A charge arrangement device used in a probe station

Abstract

The present invention belongs to the technical field of semiconductor testing equipment, and specifically relates to a charge arrangement device applied to a probe station. The present invention includes a sealing top cover fixed on the probe platform by a connecting plate and provided with positioning through holes on both sides, a protective layer arranged on the probe platform, an insulating layer arranged between the probe platform and the protective layer, side plates fixed on the left and right sides of the probe platform, a front plate and a rear plate fixed on the front and rear ends of the probe platform, a support frame fixed on the base of the probe station by a support pad, and a sliding bottom plate assembly clamped on the support frame; the stage of the probe station is rotatably connected to the base of the probe station through the sliding bottom plate assembly. By managing the charge arrangement structure, the test object is placed in a "Faraday cage" cavity, and by managing the potential arrangement of each structure of the probe station, the occurrence of factors that are not conducive to integrated circuit testing, such as parasitic capacitance, common mode voltage, and ground loop current, is reduced, thereby improving the testing capability of the probe station.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor testing equipment, and in particular relates to a charge arrangement device applied to a probe station. Background Art

[0002] The probe station is a test equipment used in the semiconductor industry, especially in the field of integrated circuit testing. Usually, the electrical performance of the integrated circuit is tested on the probe station to determine whether the integrated circuit meets the design requirements or meets the use requirements. With the advancement of technology and the increase in demand, the integrated circuit process is becoming more and more advanced, the performance is getting higher and higher, and the corresponding test requirements and test environment are becoming more and more stringent. This also puts higher requirements on the probe station, which not only requires more precise movement accuracy, but also needs to provide a better test environment.

[0003] For a probe station, an excellent test environment is to protect effective signals while reducing the impact of external and internal noise on the IC to be tested. To achieve this goal, it is necessary to consider the charge distribution of the probe station, and to protect effective signals and isolate noise through charge distribution management. In existing domestic technologies, charge distribution management of the probe station is usually only performed through grounding, so that part of the probe station structure is at a relative zero potential to achieve a certain shielding effect.

[0004] Correct grounding is of course meaningful and necessary for improving the test environment. However, if it is only grounded and there is a lack of management of the overall internal charge distribution of the probe station, tests with high precision requirements such as small signals and low leakage will face some challenges. Usually, probe stations that lack charge distribution management technology will have the following situations:

[0005] (1) The potential of each component of the probe station is in the floating state, and the components that should be equal in potential are not treated with equal potential;

[0006] (2) Grounding is "excessive" and a ground loop occurs;

[0007] (3) Open structure, “Faraday cage” type charge arrangement has gaps;

[0008] (4) Lack of protective charge layer.

[0009] The above probe station conditions will bring many problems to integrated circuits that need to be tested more precisely:

[0010] (1) All components of the probe station are in the floating state, which will cause a large amount of parasitic capacitance.

[0011] (2) If the grounding is "excessive", a common-mode voltage will be generated in the ground loop, resulting in the generation of loop current.

[0012] (3) The open structure cannot form a complete shield and the interference of external noise cannot be isolated.

[0013] (4) The lack of a protective charge layer will increase leakage current.

[0014] These problems have a huge impact on integrated circuits that need to undergo related high-precision testing projects. At the very least, the test data may be biased, and at worst, the required data may not be obtained, or even the device may be damaged. Summary of the invention

[0015] The purpose of the present invention is to overcome the defects in the prior art that the electric potential of each component of the probe station is in a floating state, and there are gaps in the "Faraday cage" type charge arrangement during the test, which makes the data inaccurate or damages the components, and to provide a charge arrangement device for the probe station which has no gaps in the "Faraday cage" type charge arrangement and prevents the leakage of current signals.

[0016] The technical solution adopted by the present invention to solve its technical problem is:

[0017] A charge distribution device applied to a probe station, wherein the charge distribution device is arranged between a base of the probe station and a microscope, and is characterized in that it comprises a sealing top cover fixed to the probe station through a connecting plate and having positioning through holes on both left and right sides, a protective layer arranged on the probe platform, an insulating layer arranged between the probe platform and the protective layer, side plates fixed to the left and right sides of the probe platform, a front plate and a rear plate fixed to the front and rear ends of the probe platform, a support frame fixed to the base of the probe station through a support pad, and a sliding bottom plate assembly clamped on the support frame; the object carrier of the probe station passes through the sliding bottom plate assembly and is rotatably connected to the base of the probe station.

[0018] Furthermore, a door assembly is arranged on the front panel; the door assembly comprises a lower door panel hinged on the front panel, an upper door panel fixedly mounted on the lower door panel, and a handle arranged on the upper door panel; the shape and size of the upper door panel are adapted to the notch on the probe platform.

[0019] Furthermore, the sliding bottom plate assembly is a perforated layer plate structure composed of four perforated layer plates that are slidably connected to each other.

[0020] Furthermore, the protective layer and the insulating layer, and the insulating layer and the probe platform are fixed by insulating screws, and the sizes of the protective layer and the insulating layer are smaller than the size of the probe platform.

[0021] Furthermore, the stage includes a surface layer, a middle layer and a bottom layer; an isolation layer is provided between the surface layer, the middle layer and the bottom layer; the surface layer, the middle layer and the bottom layer are all made of conductive materials; the surface layer of the stage is used to place the object to be tested, and the protective layer and the middle layer are connected to a test instrument via a three-axis cable to ensure that the protective layer and the middle layer are both arranged with charges with the same potential as the surface layer.

[0022] Furthermore, the support frame is provided with a wire hole for installing the triaxial cable.

[0023] Furthermore, the insulating layer and the isolation layer are both made of insulating materials.

[0024] Furthermore, it also includes four heat-insulating air rings arranged on the probe platform.

[0025] Furthermore, the sealing top cover is fixed to the connecting plate by bolts, and the sealing top cover is circular or polygonal.

[0026] Furthermore, the sealing top cover, side plates, probe platform, front plate, rear plate, sliding bottom plate assembly, support frame and protective layer are all made of conductive materials.

[0027] The beneficial effects of a charge arrangement device applied to a probe station of the present invention are:

[0028] 1. The charge arrangement device of the present invention manages the charge arrangement structure so that the test object is placed in a "Faraday cage" cavity. By managing the potential arrangement of each structure of the probe station, the occurrence of factors that are not conducive to integrated circuit testing, such as parasitic capacitance, common mode voltage, and ground loop current, is reduced, thereby improving the test capability of the probe station.

[0029] 2. The charge distribution device of the present invention forms a relatively closed cavity on an open probe platform. The outer layer of the cavity is made of conductive material to form a "Faraday cage", and is grounded using a star method to achieve isolation from external noise. An isolation layer made of insulating material is provided between the protective layer and the probe platform to provide an environmental basis for the charge distribution of the protective layer and to prevent the protective layer from being connected to the probe platform. The protective layer is made of conductive material and is arranged with a charge layer of the same potential as the test signal applied to the stage to reduce the leakage loss of the test signal.

[0030] 3. The stage of the present invention is provided with a surface layer, a middle layer and a bottom layer. The protective layer and the middle layer are arranged with charges with the same potential as the object to be tested through a three-axis cable. The bottom layer is connected to the probe station, which is equivalent to a grounding design, further reducing the leakage of the test signal, thereby further ensuring the accuracy of the test data.

[0031] 4. The application of the present invention to the probe station not only enables the probe station to have the ability to test high-precision projects, especially small signal, low leakage and other high-precision test projects. Since the entire set of charge distribution devices belongs to a relatively closed space, it also has the environmental conditions for high and low temperature testing. An insulating air ring is provided on the probe platform, which is used in high and low temperature test scenarios. By purging dry gas, the surface of the probe platform can avoid scalding accidents during high temperature testing, and avoid condensation or frost on the surface during low temperature testing. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0033] Figure 1 is an assembly diagram of an embodiment of the present invention applied on a probe station;

[0034] Figure 2 It is a partial three-dimensional structural diagram of an embodiment of the present invention applied to a probe station;

[0035] Figure 3 is a schematic diagram of the three-dimensional structure of an embodiment of the present invention;

[0036] Figure 4 is a structural exploded diagram of an embodiment of the present invention;

[0037] Figure 5 It is a schematic diagram of charge arrangement connection according to an embodiment of the present invention.

[0038] In the figure: 1. charge distribution device, 11. connecting plate, 12. probe platform, 13. sealing top cover, 14. protective layer, 15. insulating layer, 16. side plate, 17. front plate, 171. door assembly, 1711. lower door plate, 1712. upper door plate, 1713. handle, 18. back plate, 19. support pad, 20. support frame, 21. sliding bottom plate assembly, 211. perforated layer plate, 212. baffle, 23. three-axis cable, 24. thermal insulation air ring, 25. movable ring strip, 2. base, 3. displacement assembly, 4. microscope, 5. microscope bridge, 6. stage, 61. surface layer, 62. middle layer, 63. bottom layer, 64. isolation layer, 7. positioner. DETAILED DESCRIPTION

[0039] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0040] like Figure 1-Figure 5A specific embodiment of a charge distribution device applied to a probe station of the present invention is shown, wherein the charge distribution device 1 is arranged between a base 2 of the probe station and a microscope 4, and is characterized in that it includes a sealing top cover 13 fixed to a probe platform 12 through a connecting plate 11 and having positioning through holes on both left and right sides, a protective layer 14 arranged on the probe platform 12, an insulating layer 15 arranged between the probe platform 12 and the protective layer 14, side panels 16 fixed to the left and right sides of the probe platform 12, a front panel 17 and a rear panel 18 fixed to the front and rear ends of the probe platform 12, a support frame 20 fixed to the base 2 of the probe station through a support pad 19, and a sliding base plate assembly 21 clamped on the support frame 20; the stage 6 of the probe station is rotatably connected to the base 2 of the probe station through the sliding base plate assembly 21. The probe station in the prior art includes: a microscope 4, a microscope bridge 5, a positioner 7 and a probe, a stage 6, a displacement component 3, and a base 2, wherein the microscope 4 is used to magnify the integrated circuit to be tested; the microscope bridge 5 is used to fix and move the microscope 4; the positioner 7 and the probe are used to connect the integrated circuit and the instrument for signal transmission; the stage 6 is used to place the integrated circuit to be tested; the displacement component 3 is used to achieve micron-level movement of the integrated circuit to be tested; and the base 2 is used to carry the entire system.

[0041] The sealed top cover 13, side plate 16, probe platform 12, front plate 17, rear plate 18, door assembly 171, sliding bottom plate assembly 21, support frame 20 and protective layer 14 are all made of conductive materials and star-shaped grounded. The sealed top cover 13, side plate 16, probe platform 12, front plate 17, rear plate 18, sliding bottom plate assembly 21 and support frame 20 are relatively sealed into a cavity, thus forming a "Faraday cage". After these components are installed and connected, star-shaped grounding is adopted, and the probe platform 12 and the instrument or the common ground terminal are uniformly connected to achieve isolation from external noise.

[0042] A Faraday Cage is a cage formed of metal or a good conductor. The cage is connected to the ground, and according to the condition of electrostatic balance of the grounded conductor, the cage forms an equipotential body, with zero internal potential difference and zero electric field. The charge arrangement device 1 of the present invention manages the charge arrangement structure so that the object to be tested is placed in a "Faraday cage" cavity. By managing the potential arrangement of each structure of the probe station, the occurrence of factors that are not conducive to integrated circuit testing, such as parasitic capacitance, common mode voltage, and ground loop current, is reduced, thereby improving the test capability of the probe station.

[0043] In the embodiment of the present invention, a door assembly 171 is provided on the front plate 17; the door assembly 171 includes a lower door plate 1711 hinged on the front plate 17, an upper door plate 1712 fixedly mounted on the lower door plate 1711, and a handle 1713 provided on the upper door plate 1712; the shape and size of the upper door plate 1712 are adapted to the notch on the probe platform 12. It is ensured that the formed "Faraday cage" is in a closed cavity, wherein a handle 1713 is provided on the upper door plate 1712 to facilitate the placement and removal of the object to be tested.

[0044] The sliding bottom plate assembly 21 is a perforated layer plate 211 structure composed of 4 perforated layer plates 211 slidably connected to each other. The perforated layer plates 211 are square with rounded corners, and the three perforated layer plates 211 on the periphery are all provided with baffles 212 to prevent excessive movement of the perforated layer plates 211. When the displacement assembly 3 on the probe station base 2 drives the stage 6 to move forward and backward, each perforated layer plate 211 follows the relative sliding, but always ensures that the bottom of the cavity is airtight. Under the premise of ensuring that the moving stroke of the stage 6 is not affected, the complete "Faraday cage" state is guaranteed. The displacement assembly 3 is a prior art and is not elaborated in detail.

[0045] In the embodiment of the present invention, the protective layer 14 and the insulating layer 15, as well as the insulating layer 15 and the probe platform 12 are fixed by insulating screws. Both the protective layer 14 and the insulating layer 15 are U-shaped structures, and their size is slightly smaller than that of the probe platform. The stage 6 of the present invention adopts a multi-layer structure, and the stage 6 includes a surface layer 61, an intermediate layer 62 and a bottom layer 63; an isolation layer 64 is provided between the surface layer 61 and the intermediate layer 62, as well as between the intermediate layer 62 and the bottom layer 63; wherein the surface layer 61, the intermediate layer 62 and the bottom layer 63 are all made of conductive materials, specifically imported aviation aluminum alloy, and the insulating layer 15 and the isolation layer 64 are all made of insulating materials, specifically polytetrafluoroethylene. The surface layer 61 of the stage 6 is used to place the object to be tested, and the protective layer 14 and the intermediate layer 62 are connected to the test instrument via a three-axis cable 23 to ensure that the protective layer 14 and the intermediate layer 62 are both arranged with charges with the same potential as the surface layer 61, such as Figure 5 As shown. This can effectively prevent the signal from leaking to the base 2 through the stage 6, avoiding the test results being affected by the signal leakage. An isolation layer 64 is provided between the surface layer 61 and the middle layer 62, and between the middle layer 62 and the bottom layer 63, so that each layer can independently arrange the charges of the corresponding potential.

[0046] In an embodiment of the present invention, a protective layer 14 is provided on the lower surface of the probe platform 12, and the protective layer 14 is connected to the intermediate layer 62, and is connected to the test instrument through a three-axis cable 23. An insulating layer 15 is glued between the protective layer 14 and the probe platform 12, which is used to isolate the protective layer 14 from the probe platform 12 with conductive properties, and prevent the signal from leaking from the top of the "Faraday cage" cavity. Its probe platform 12 is directly connected to the probe platform, and the potential of the bottom layer 63 of its stage 6 is in direct contact with the probe platform 12, so the potential of the bottom layer 63 of the stage 6 is also the "ground" potential. A wire hole for installing the three-axis cable 23 is provided on the support frame 20. A movable ring strip 25 is provided between the wire hole and the probe platform to increase the sealing effect.

[0047] Through the design of the "Faraday cage" cavity, the multi-layer design of the stage 6, and the design of the insulating layer 15 and the protective layer 14 on the lower surface of the probe platform 12, the entire probe platform has the ability to test high-precision projects, especially small signals, low leakage and other high-precision test projects. Since the entire set of charge arrangement device 1 belongs to a relatively closed space, it also has the environmental conditions for high and low temperature testing. It is also provided with an insulating air ring 24 on the probe platform 12. In the embodiment of the present invention, there are 4 insulating air rings 24, which are applied to high and low temperature test scenarios. By purging dry gas, the surface of the probe platform 12 can avoid scalding accidents during high temperature testing, and avoid condensation or frost on the surface during low temperature testing.

[0048] like Figure 1 and Figure 2 The probe station of the charge arrangement device 1 of the present invention is shown in the application, the integrated circuit to be tested is placed on the surface of the stage 6, the potentiometer and the probe are passed through the positioning holes on the left and right sides of the sealing top cover 13, which are used to connect the integrated circuit and the instrument for signal transmission, the middle layer 62 and the protective layer 14 of the stage 6 in the charge arrangement device 1 rearrange the electric potential of the test environment according to the signal, when the tested integrated circuit needs to be moved back and forth at the micron level, the open layer plate 211 of the sliding bottom plate assembly 21 follows the displacement assembly 3 to slide relatively, and the probe station of the charge arrangement device 1 of the present invention is applied to achieve noise isolation and signal protection.

[0049] It should be understood that the specific embodiments described above are only used to explain the present invention, and are not used to limit the present invention. Obvious changes or modifications derived from the spirit of the present invention are still within the protection scope of the present invention.

Claims

1. A charge arrangement device for a probe station, wherein the charge arrangement device (1) is arranged between a displacement component (3) and a microscope (4) on a probe station base (2), and is characterized in that: The probe platform (12) comprises a sealing top cover (13) fixed on the probe platform (12) through a connecting plate (11) and provided with positioning through holes on both sides thereof, a protective layer (14) arranged on the probe platform (12), an insulating layer (15) arranged between the probe platform (12) and the protective layer (14), side plates (16) fixed on the left and right sides of the probe platform (12), a front plate (17) and a rear plate (18) fixed on the front and rear ends of the probe platform (12), a support frame (20) fixed on the probe platform base (2) through a support pad (19), and a sliding base plate assembly (21) clamped on the support frame (20); The object carrier (6) of the probe station passes through the sliding base plate assembly (21) and is rotatably connected to the displacement assembly (3) of the probe station; the object carrier (6) comprises a surface layer (61), an intermediate layer (62) and a bottom layer (63); an isolation layer (64) is arranged between the surface layer (61), the intermediate layer (62) and the bottom layer (63); the surface layer (61) of the object carrier (6) is used to place the object to be tested, and the protective layer (14) and the intermediate layer (62) are connected to a test instrument through a three-axis cable (23) to ensure that the protective layer (14) and the intermediate layer (62) are both arranged with charges with the same potential as the surface layer (61).

2. A charge arrangement device for a probe station according to claim 1, characterized in that: A door assembly (171) is arranged on the front panel (17); the door assembly (171) comprises a lower door panel (1711) hinged on the front panel (17), an upper door panel (1712) fixedly mounted on the lower door panel (1711), and a handle (1713) arranged on the upper door panel (1712); the shape and size of the upper door panel (1712) are adapted to the notch on the probe platform (12).

3. The charge arrangement device for a probe station according to claim 1, characterized in that: The sliding bottom plate assembly (21) is a perforated layer plate (211) structure composed of four perforated layer plates (211) that are slidably connected to each other.

4. The charge arrangement device for a probe station according to claim 1, characterized in that: The protective layer (14) and the insulating layer (15), and the insulating layer (15) and the probe platform (12) are fixed by insulating screws, and the sizes of the protective layer (14) and the insulating layer (15) are smaller than the size of the probe platform (12).

5. The charge arrangement device for a probe station according to claim 1, characterized in that: The support frame (20) is provided with a wire hole for installing the triaxial cable (23).

6. The charge arrangement device for a probe station according to claim 1, characterized in that: The insulating layer (15) and the isolation layer (64) are both made of insulating materials.

7. The charge arrangement device for a probe station according to claim 1, characterized in that: It also includes heat-insulating air rings (24) arranged on the probe platform (12), wherein there are four heat-insulating air rings (24).

8. The charge arrangement device for a probe station according to claim 1, characterized in that: The sealing top cover (13) is fixed to the connecting plate (11) by means of bolts, and the sealing top cover (13) is circular or polygonal.

9. The charge arrangement device for a probe station according to claim 1, characterized in that: The sealing top cover (13), the side plate (16), the probe platform (12), the front plate (17), the rear plate (18), the sliding bottom plate assembly (21), the supporting frame (20) and the protective layer (14) are all made of conductive materials.

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