Ellipsometry measurement device and measurement method

Abstract

The present application discloses an ellipsometric measurement device and a measurement method, including a substrate, a sample stage, a detection component, an angle switching mechanism and an angle positioning mechanism; the sample stage is fixedly mounted on the substrate, and the sample stage surface is a plane; the angle switching mechanism is rotatably mounted on the substrate, and the rotation axis of the angle switching mechanism is located within the detection surface; the detection component includes a polarizing arm and an analyzing arm, and the polarizing arm and the analyzing arm are mounted on the angle switching mechanism; the angle positioning mechanism is mounted on a working platform, and the rotation angle of the angle switching mechanism is limited by a rigid abutment limit or a self-locking structure. The ellipsometric measurement device and the measurement method of the present application do not need to change the sample stage or the orientation of the sample stage, and have the advantages of simple structure, simple operation, and high repeatability positioning accuracy. It can realize the same placement of multiple types of samples, reduce the risk of sample fragmentation during the test, realize arbitrary point testing of the sample, and improve the test efficiency.

Description

Technical Field

[0001] The present application relates to the technical field of optical measuring instruments, and in particular to an ellipsometric measuring device and a measuring method. Background Art

[0002] Solar cells are semiconductor devices that convert light energy into electrical energy. There are many types of solar cells: crystalline silicon solar cells, thin-film solar cells, dye-sensitized solar cells, etc. Crystalline silicon solar cells are the most commonly used solar cells. Their basic structure is that the silicon substrate is textured and then coated with an anti-reflection film. The role of the texture is to allow the solar cell to effectively absorb sunlight; the role of the anti-reflection film is to reduce the reflection of sunlight on the surface of the solar cell, so that most of the sunlight can reach the inside of the cell and be absorbed by the semiconductor material, thereby greatly improving the conversion of light energy.

[0003] At present, the textured monocrystalline silicon solar cells are mostly made by alkaline method, which uses the anisotropy of the crystal when corroded to form a regularly arranged four-sided pyramid-shaped basic structure on the surface of the cell; while the textured polycrystalline silicon solar cells are mostly made by acid corrosion, which forms irregular tiny undulations on the surface of the cell.

[0004] At present, the commonly used instrument for detecting the thickness and refractive index of the anti-reflection film on the textured crystalline silicon solar cell is the ellipsometer. The basic principle of the ellipsometer is to obtain the surface information of the sample (such as the thickness and refractive index of the nanofilm) by using the change of the polarization state of the light wave when it is reflected on the sample surface.

[0005] When testing with an ellipsometer, the plane where the sample test surface is located is required to be perpendicular to the incident plane formed by the incident light axis and the reflected light axis, and pass through the intersection of the two optical axes. The plane that is perpendicular to the incident plane formed by the incident light axis and the reflected light axis and passes through the intersection of the two optical axes is usually called the reference plane. During testing, the test plane must coincide with the reference plane, which also satisfies the system's incident angle equal to the reflection angle.

[0006] When using an ellipsometer measurement system to measure the thickness and refractive index of anti-reflection films on different crystalline silicon (such as single crystal silicon and polycrystalline silicon), due to the different structures of the velvet surface on the crystalline silicon, it is required that the orientations of different crystalline silicon relative to the reference surface be different during sample testing to ensure that the test surface coincides with the reference surface.

[0007] Specifically, the acute angle between the cone surface of the four-sided pyramid formed on the surface of the monocrystalline silicon solar cell and the silicon substrate is about 54.7°, and the size of the pyramid is about 2-5 microns. An anti-reflection film is coated on the cone surface. In order to detect the thickness and refractive index of the anti-reflection film, the cone surface of the pyramid is required to be used as the detection surface during detection. In order to ensure that this detection surface coincides with the reference surface, it is necessary to ensure that the inclination angle between the placement surface of the sample stage for placing the monocrystalline silicon and the reference plane is 54.7°; and the orientation of the monocrystalline silicon solar cell on the sample stage must be adjusted to ensure that the detection surface coincides with the reference surface.

[0008] The texture feature of polycrystalline silicon solar cells textured by acid method is that there are tiny irregular undulations on the silicon surface, and the size of the undulations is in the micron range. An anti-reflection film is coated on the silicon. In order to detect the thickness and refractive index of the anti-reflection film, the plane parallel to the silicon substrate and passing through the sample surface is used as the detection plane, so the sample stage placement surface for placing the polycrystalline silicon is parallel to the reference plane.

[0009] In addition, for untextured crystalline silicon solar cells, the detection surface is the upper surface coated with an anti-reflection film, and the sample stage placement surface is also required to be parallel to the reference plane, which is the same as the sample stage for polycrystalline silicon solar cells.

[0010] Through the above analysis, it can be seen that when testing single-crystal silicon and polycrystalline silicon solar cells, the placement orientation of the cells relative to the reference plane is different. When the single-crystal silicon prepared by the alkaline method is placed, its base has a large angle with the reference plane, while when the polycrystalline silicon prepared by the acid method is placed, its base is parallel to the reference plane.

[0011] In other words, when testing the anti-reflection films of solar cells with two different surface texturing structures, it is required to change the dihedral angle formed by the sample stage placement surface and the reference plane to meet the test requirements.

[0012] In actual testing, for example, on a solar cell production line, different types (single crystal, multi-crystalline) of solar cells need to be tested. This requires the ellipsometer to be able to adapt to such changing testing conditions and to be simple to operate, time-saving, highly accurate, and repeatable during the testing process.

[0013] In order to meet the above requirements, the existing methods are:

[0014] (1) Design sample stages with different tilt angles in the ellipsometric measurement system. According to the test requirements of different samples, the required sample stage is replaced by disassembling the sample stage. The tilt angle refers to the acute angle between the placement surface of the sample stage and the reference surface. This method is widely used in ellipsometric measurement systems, but its disadvantages are that the sample stage disassembly process is cumbersome, the replacement speed is slow, and it is inconvenient to store the disassembled sample stage. After replacing the new sample stage, the accuracy and repeatability of the sample stage of the entire instrument cannot be guaranteed during the installation process and needs to be recalibrated.

[0015] (2) A method is designed in the ellipsometric measurement system that does not require the sample stage to be disassembled, that is, two sets of sample stages with different tilt angles are installed, and the two sets of sample stages are connected by electric (manual) guide rails. When a sample stage with a certain tilt angle is needed, the sample stage is moved to the installation position through the guide rail, and the other sample stages are moved out of the installation position. However, this method of replacing different types of sample stages by moving the guide rail is slow and occupies a large space, and it is difficult to guarantee accuracy and repeatability.

[0016] (3) A sample stage with two table positioning surfaces is designed in the ellipsometric measurement system. The dihedral angle between the two table positioning surfaces is 54.7°±5°. By rotating the sample stage surface, the requirements for the dihedral angle formed by the sample stage placement surface and the reference plane under different test conditions can be met. However, when using this method to detect single-crystal silicon solar cells, the sample to be tested needs to be placed on the sample stage in a state of being tilted at 54.7°±5° to the horizontal plane, which undoubtedly increases the difficulty of sample placement and also increases the risk of damaging the sample to be tested.

[0017] It can be seen that in the ellipsometer measurement system, the existing problems with the crystalline silicon solar cell sample stage used in the ellipsometer are: (1) the angle of the sample stage needs to be changed to achieve flat or tilted placement of the sample; (2) it is difficult to move the sample when it is tilted, which is not conducive to uniformity detection of the sample; (3) the risk of fragmentation is high when the sample is tilted.

[0018] These problems mean that some types of samples can only be tested at a fixed point, and cannot be tested at any point. In addition, it is inconvenient to take and place the test samples, which has a great impact on process improvement and improving test efficiency. Summary of the invention

[0019] The purpose of the present application is to provide an ellipsometric measurement device and a measurement method which do not require changing the sample stage or changing the orientation of the sample stage, have a simple structure, are easy to operate, are quickly replaced, have high repeat positioning accuracy, and can achieve the same placement of multiple types of samples. The device and a measurement method can simultaneously meet the detection requirements of single-crystal solar cells and polycrystalline solar cells, reduce the risk of fragmentation of single-crystal solar cells during the test process, achieve arbitrary point testing of the sample, and improve test efficiency.

[0020] The above-mentioned purpose of the present application is achieved through the following technical solutions:

[0021] An ellipsometric measurement device comprises a substrate, a sample stage, a detection component, an angle switching mechanism and an angle positioning mechanism; the sample stage is fixedly mounted on the substrate, the sample stage surface is a plane, and the sample to be measured is placed on the sample stage surface; the detection component comprises a polarizing arm for emitting incident light and an analyzing arm for receiving reflected light, and the incident light axis and the reflected light axis form an incident surface; the angle switching mechanism is rotatably mounted on the substrate, the polarizing arm and the analyzing arm are mounted on the angle switching mechanism, and the angle switching mechanism drives the detection component to rotate synchronously to change the angle between the incident surface of the detection component and the surface of the sample to be measured; the angle positioning mechanism is mounted on the substrate, and the rotation angle of the angle switching mechanism is limited by a rigid abutment limit or a self-locking structure.

[0022] By adopting the above technical solution, when testing the sample to be tested, the sample to be tested is placed flat on the sample table, and the angle switching mechanism is positioned by the angle positioning mechanism, so that the incident surface of the detection component is directly perpendicular to the detection surface of the sample to be tested, and the intersection of the two optical axes passes through the detection surface, and then subsequent measurements are performed; the whole process is fast and convenient, and avoids tilting the sample, reducing the risk of sample damage.

[0023] The present application is further configured as follows: the height of the sample stage is adjustable.

[0024] By adopting the above technical solution, the height of the sample stage can be adjusted in real time to correspond to different types of samples, making the sample stage more adaptable.

[0025] The present application is further configured as follows: the angle switching mechanism includes a portal frame and a bearing seat, the bearing seats are provided in two and are coaxially arranged on the base plate; a rotating shaft is fixedly connected to the end of the portal frame, and the portal frame is rotatably connected to the bearing seat via the rotating shaft inserted into the bearing seat; the detection component is mounted on the portal frame.

[0026] By adopting the above technical solution, the portal frame provides a mounting base for the detection component, and the portal frame is rotatably mounted on the base plate through the bearing seat, so that the detection component can be adjusted in angle.

[0027] The present application is further configured as follows: the angle positioning mechanism includes an inclined positioning member and a vertical positioning member, and the inclined positioning member and the vertical positioning member are arranged on both sides of the angle switching mechanism along the rotation direction of the angle switching mechanism; the angle switching mechanism rigidly contacts and cooperates with the inclined positioning member to position the angle switching mechanism to an inclined state; the angle switching mechanism rigidly contacts and cooperates with the vertical positioning member to position the angle switching mechanism to a vertical state.

[0028] By adopting the above technical solution, the vertical positioning member limits the vertical state of the angle switching mechanism, and the inclined positioning member limits the inclined state of the angle switching mechanism. By cooperating with the vertical positioning member and the inclined positioning member, the angle switching mechanism can be quickly positioned at an angle, thereby improving the test efficiency.

[0029] The present application is further configured as follows: the angle switching mechanism is in conflict with the tilt positioning member, and the angle between the incident surface of the detection component and the vertical surface is 54.7°±5°.

[0030] By adopting the above technical solution, the angle between the incident surface and the vertical surface is 54.7°, so that after the angle switching mechanism abuts against the tilt positioning member, the incident surface of the detection component is directly perpendicular to the detection surface of the monocrystalline silicon solar cell, realizing standardized angle adjustment, thereby improving the measurement rate.

[0031] The present application is further configured as follows: the angle positioning mechanism includes a first driving member mounted on a substrate, a crank fixedly connected to the output end of the first driving member, and an intermediate rod rotatably connected to the crank, wherein one end of the intermediate rod away from the crank is hinged to the angle switching mechanism; the first driving member is a torque motor.

[0032] By adopting the above technical solution, the driving member drives the crank to rotate, and the crank drives the angle switching mechanism to swing back and forth between certain angles by pulling the intermediate rod; when testing different types of solar cells, it is only necessary to control the driving member to drive the crank to move to the corresponding position.

[0033] The present application is further configured as follows: the angle positioning mechanism includes a guide rail installed on a substrate, a slider installed on the guide rail, a connecting rod hinged to the slider, and a second driving member that drives the slider to reciprocate along the guide rail, and the end of the connecting rod away from the slider is hinged to the angle switching mechanism; the second driving member is a torque motor or an electric push rod.

[0034] By adopting the above technical solution and utilizing the working principle of the slider-connecting rod mechanism, the slider is driven to perform reciprocating linear motion by the second driving member, and the slider drives the angle switching mechanism to swing back and forth by pulling the connecting rod. When testing different types of solar cells, it is only necessary to control the second driving member to move the slider to the corresponding position.

[0035] The present application is further configured as follows: the angle positioning mechanism is an electric push rod, the base of the electric push rod is hinged on the base plate of the base plate, and the output end of the electric push rod is hinged on the side wall of the angle switching mechanism.

[0036] By adopting the above technical solution, the driving member is directly used to drive the angle switching mechanism to perform reciprocating swinging motion, so as to achieve angle adjustment of the angle switching mechanism, and the adjustment process is simpler and more direct.

[0037] The present application is further configured as follows: the angle positioning mechanism includes a worm wheel and a worm, the worm wheel is fixedly connected to one side of the angle switching mechanism and is coaxially arranged with the rotation axis of the angle switching mechanism; the worm is rotatably mounted on a substrate and meshes with the worm wheel; a third driving member is provided at the end of the worm to drive it to rotate; the third driving member is a motor or a manual crank.

[0038] By adopting the above technical solution, the worm is rotated by the third driving member, and the worm is meshed with the worm wheel to drive the worm wheel to rotate synchronously, thereby driving the angle switching mechanism to rotate, thereby realizing the angle adjustment of the angle switching mechanism; and the worm and the worm wheel are multi-tooth meshing, which has the characteristics of smooth transmission and low noise, and the worm gear is self-locking. When testing different types of solar cells, it is only necessary to control the third driving member to rotate the worm wheel to the corresponding position.

[0039] The above-mentioned second objective of the present application is achieved through the following technical solutions:

[0040] A measurement method using an ellipsometric measurement device comprises the following steps:

[0041] S1. Place the sample to be tested flat on the sample table;

[0042] S2. According to the type of the sample to be tested, the incident surface is rotated so that the incident surface of the detection component is perpendicular to the detection surface of the sample to be tested;

[0043] S3. Record the obtained surface information of the sample to be tested.

[0044] In summary, the present application has the following beneficial effects: by configuring an angle switching structure for the detection component, the angle of the detection component relative to the sample stage and the sample to be tested placed on the sample stage is changed, rather than changing the angular position of the sample to be tested. The dihedral angle between the incident surface and the reference surface of the positioning detection component is adjusted by standardization, thereby ultimately achieving the purpose of quickly testing samples. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1 It is a structural diagram of a manual angle change scheme;

[0046] Figure 2 It is the front view of the manual angle change scheme;

[0047] Figure 3 It is a schematic diagram of the crank-rocker mechanism scheme;

[0048] Figure 4 It is a schematic diagram of the slider-link mechanism scheme;

[0049] Figure 5 It is a schematic diagram of the electric push rod scheme;

[0050] Figure 6It is a schematic diagram of the worm gear scheme.

[0051] In the figure, 1, substrate; 2, sample stage; 3, detection component; 31, polarizing arm; 32, analyzing arm; 4, angle switching mechanism; 41, gantry; 42, bearing seat; 43, rotating shaft; 5, angle positioning mechanism; 6, tilt positioning member; 7, vertical positioning member; 8, first driving member; 9, crank; 10, intermediate rod; 11, guide rail; 12, slider; 13, connecting rod; 14, second driving member; 15, worm gear; 16, worm; 17, third driving member; 20, sample to be tested. DETAILED DESCRIPTION

[0052] The present application is further described in detail below in conjunction with the accompanying drawings.

[0053] An ellipsometer measuring device. Compared with the ellipsometer measuring system in the prior art with a detachable sample stage design or a sample stage table conversion and angle-adjustable design, the present application mainly makes the following improvements: an angle switching structure is configured for a detection component 3, so that the angle of the detection component 3 can be changed relative to the sample stage 2 and a sample 20 to be measured placed on the sample stage 2, and the dihedral angle between the incident surface and the reference surface of the positioning detection component 3 is adjusted by standardization, so as to achieve the purpose of rapid sample testing.

[0054] The specific implementation is as follows: Figure 1 As shown, an ellipsometric measurement device includes a substrate 1, a sample stage 2, a detection component 3, an angle switching mechanism 4 and an angle positioning mechanism 5.

[0055] Among them, a working platform is provided on the top of the substrate 1, the sample table 2 is fixedly mounted on the working platform of the substrate 1, and the angle switching mechanism 4 is rotatably mounted on the working platform of the substrate 1. The table top of the sample table 2 is a plane, and its own height can be adjusted. The height adjustment method can adopt a cylinder jacking or a mechanical lifting structure such as a scissor fork; the sample 20 to be tested is placed flat on the table top of the sample table 2.

[0056] The detection component 3 includes a polarizing arm 31 and an analyzing arm 32. The polarizing arm 31 emits incident light and the analyzing arm 32 receives reflected light. The polarizing arm 31 and the analyzing arm 32 are mounted on the angle switching mechanism 4. The rotation axis of the angle switching mechanism 4 is located within the detection surface of the sample 20 to be tested.

[0057] When the angle switching mechanism 4 is in a vertical state, the incident plane formed by the incident light axis and the reflected light axis of the detection component 3 is perpendicular to the table surface of the sample stage 2 .

[0058] The angle positioning mechanism 5 is also installed on the working platform of the substrate 1, and is used to limit the rotation angle of the angle switching mechanism 4. The angle positioning mechanism 5 can position the angle switching mechanism 4 at a single angle, or at several specific angles, or at any angle; for example, the incident surface of the detection component 3 installed on the angle switching mechanism 4 is positioned to be parallel to the vertical plane or to form a 54.7° dihedral angle with the vertical plane.

[0059] The working principle of the ellipsometric measurement device of the present application for measuring crystalline silicon solar cells is as follows:

[0060] When testing samples, the test surface must coincide with the reference surface. Therefore, when testing different types of samples, the sample stage needs to be adjusted to a specific height based on the test system, and the test component 3 needs to be positioned and fixed at the corresponding angle, that is, the orientation of the reference surface is adjusted by rotating the test component 3; for example, when testing single-crystal silicon solar cells, the incident surface of the test component 3 needs to be positioned at an angle of 54.7° to the vertical plane, and when testing polycrystalline silicon solar cells, the incident surface of the test component 3 needs to be positioned at an angle parallel to the vertical plane, so that different types of (single-crystal, polycrystalline) solar cells can be tested, and finally the surface information of the sample to be tested can be recorded.

[0061] Example 1: Figure 1 , Figure 2 As shown, the angle switching mechanism 4 includes a gantry 41 and a bearing seat 42. The number of bearing seats 42 is set to two, which are symmetrically arranged on the working platform of the base plate 1 with the central axis of the sample table 2 as the reference; the gantry 41 is composed of a horizontal bar and two vertical bars, and the two vertical bars of the gantry 41 are respectively fixed with a rotating shaft 43, and the rotating shaft 43 is rotatably installed on the bearing seat 42, so that the gantry 41 can rotate around the axis of the rotating shaft 43. The polarizing arm 31 and the analyzing arm 32 of the detection component 3 are installed on the gantry 41.

[0062] In this embodiment, the bearing seat 42 can be made of angular contact ball bearings, deep groove ball bearings, rolling bearings, sliding bearings, etc., and the shaft-hub connection can be made of key connection, interference fit, pin connection, expansion sleeve connection or profile fit connection.

[0063] The angle positioning mechanism 5 includes an inclined positioning member 6 and a vertical positioning member 7. The inclined positioning member 6 is a mechanical member having an inclined positioning surface. The angle between the inclined positioning surface of the inclined positioning member 6 and the vertical surface is 54.7°±5°. The vertical positioning member 7 is a mechanical member having a vertical positioning surface. The inclined positioning member 6 and the vertical positioning member 7 are arranged on both sides of the angle switching mechanism 4 along the rotation direction of the angle switching mechanism 4. The angle switching mechanism is rigidly matched with the inclined positioning member or the vertical positioning member.

[0064] When the angle switching mechanism 4 is turned to a vertical state, the angle switching mechanism 4 is in contact with the vertical positioning surface of the vertical positioning member 7, and the polycrystalline silicon solar cell can be tested at this time; when the angle switching mechanism 4 is turned to be in contact with the inclined surface of the inclined positioning member 6, the monocrystalline silicon solar cell can be tested; the entire angle adjustment process can be completed manually.

[0065] Magnets and magnetic steel are respectively embedded on the contact surfaces of the angle switching mechanism 4 and the angle positioning mechanism 5, and the adsorption force of the magnets is used to achieve a firm connection between the angle positioning mechanism 5 and the angle switching mechanism 4, thereby reducing the influence of external force factors on the stability of the ellipsometric measurement device during measurement and ensuring a smooth measurement process.

[0066] Embodiment 2: The difference between this embodiment and embodiment 1 is that Figure 3 As shown, the angle positioning mechanism 5 includes a first driving member 8, a crank 9 and an intermediate rod 10. The first driving member 8 is fixedly mounted on the working platform of the base plate 1 and is located on one side of the rotation direction of the angle switching mechanism 4. In this embodiment, the first driving member 8 is a motor with a holding torque, which can stop at any position and remain at the position. One end of the crank 9 is fixedly connected to the output shaft of the motor, and the other end is rotatably connected to the end of the intermediate rod 10; the other end of the intermediate rod 10 is rotatably mounted on the side wall of the angle switching mechanism 4.

[0067] The working principle of this embodiment is that the first driving member 8 drives the crank 9 to make a rotational motion, and the crank 9 drives the angle switching mechanism 4 to swing back and forth between a certain angle by pulling the intermediate rod 10 (this angle can be adjusted by changing the length of the crank 9 and the intermediate rod 10); in this way, when testing solar cells of different types (single crystal, polycrystalline), it is only necessary to control the first driving member 8 to drive the crank 9 to move to the corresponding position.

[0068] Embodiment 3: This embodiment differs from Embodiment 1 in that Figure 4 As shown, the angle positioning mechanism 5 includes a guide rail 11, a slider 12, a connecting rod 13 and a second driving member 14. The guide rail 11 is fixedly mounted on the working platform of the base plate 1, and the length direction of the guide rail 11 is arranged in the same direction as the rotation direction of the angle switching mechanism 4; the slider 12 is mounted on the guide rail 11, one end of the connecting rod 13 is hinged to the slider 12, and the other end is hinged to the angle switching mechanism 4; the second driving member 14 is also mounted on the base plate 1, driving the slider 12 to perform reciprocating linear motion on the guide rail 11.

[0069] Specifically, the guide rail 11 can be set as a bare rod, the slider 12 is slidably connected to the guide rail 11, and the second driving member 14 is an electric push rod; the output end of the electric push rod is connected to the slider 12, directly driving the slider 12 to reciprocate on the guide rail; the guide rail 11 can also be set as a screw, and its two ends are rotatably matched with bearing seats, and the bearing seats are fixed on the base plate 1. Correspondingly, the slider 12 is threadedly connected to the guide rail 11, and the second driving member 14 is a motor, and the output end of the motor is connected to the screw; the motor drives the screw to rotate forward and reverse to drive the slider 12 to reciprocate on the screw.

[0070] This embodiment utilizes the working principle of the connecting rod mechanism of the slider 12, and drives the slider 12 to perform reciprocating linear motion through the second driving member 14. The slider 12 drives the angle switching mechanism 4 to swing back and forth by pulling the connecting rod 13 (the swing angle can be adjusted by changing the length of the connecting rod 13, and can also be adjusted by changing the stroke of the reciprocating motion of the slider 12). The second driving member 14 selected in this embodiment has a holding torque, and can stop at any position and maintain the position.

[0071] When testing solar cells of different types (single crystal, multi-crystal), it is only necessary to control the second driving member 14 to move the slider 12 to the corresponding position.

[0072] Embodiment 4: This embodiment differs from Embodiment 1 in that Figure 5 As shown, the angle positioning mechanism 5 is an electric push rod, the base of which is hinged on the working platform of the base plate 1, and the output end of which is hinged on the side wall of the angle switching mechanism 4. When the electric push rod performs telescopic movement, it drives the angle switching mechanism 4 to perform reciprocating swinging movement (this angle can be adjusted by selecting electric push rods with different strokes). The electric push rod selected in this embodiment has a holding torque and can stop at any position and maintain the position.

[0073] When testing different types of solar cells (single crystal, multi-crystalline), you only need to control the electric push rod to move to the corresponding position.

[0074] Embodiment 5: This embodiment differs from Embodiment 1 in that Figure 6 As shown, the angle positioning mechanism 5 includes a worm wheel 15, a worm 16 and a third driving member 17, wherein the worm wheel 15 is coaxially fixed to the rotating shaft 43 at the end of the angle switching mechanism 4, and the worm 16 is rotatably mounted on the top of the base plate 1 through a bearing seat 42, and the worm wheel 15 and the worm 16 are meshed; the third driving member 17 can be selected as a motor or a manual crank, which is arranged at one end of the worm 16, and the worm 16 is driven to rotate by the third driving member 17. When the worm 16 rotates, it drives the worm wheel 15 to rotate synchronously, thereby driving the angle switching mechanism 4 to perform reciprocating swinging motion (this angle can be adjusted by the rotation of the worm wheel 15).

[0075] When testing solar cells of different types (single crystal, multi-crystal), it is only necessary to control the worm gear 15 to move to the corresponding position.

[0076] This specific embodiment is merely an explanation of the present application and is not a limitation of the present application. After reading this specification, those skilled in the art may make modifications to the present embodiment without any creative contribution as needed, but such modifications are protected by the patent law as long as they are within the scope of the claims of the present application.

Claims

1. An ellipsometric measuring device, characterized in that: It comprises a substrate (1), a sample stage (2), a detection component (3), an angle switching mechanism (4) and an angle positioning mechanism (5); The sample table (2) is fixedly mounted on the substrate (1); the surface of the sample table (2) is a plane; and the sample (20) to be tested is placed on the surface of the sample table (2); The detection component (3) comprises a polarizing arm (31) for emitting incident light and an analyzing arm (32) for receiving reflected light, and the incident light axis and the reflected light axis form an incident surface; The angle switching mechanism (4) is rotatably mounted on the substrate (1), the polarizing arm (31) and the analyzing arm (32) are mounted on the angle switching mechanism (4), and the angle switching mechanism (4) drives the detection component (3) to rotate synchronously to change the angle between the incident surface of the detection component (3) and the surface of the sample (20) to be detected; The angle positioning mechanism (5) is mounted on the base plate (1) and limits the rotation angle of the angle switching mechanism (4) through a rigid abutment limit or self-locking structure; The sample table (2) is height-adjustable, and the height adjustment method is either a cylinder jacking or a scissor lift; The angle switching mechanism (4) comprises a portal frame (41) and a bearing seat (42); the bearing seats (42) are provided in two numbers and are coaxially arranged on the base plate (1); a rotating shaft (43) is fixedly connected to the end of the portal frame (41); the portal frame (41) is rotatably connected to the bearing seat (42) via the rotating shaft (43) that penetrates into the bearing seat (42); and the detection component (3) is mounted on the portal frame (41).

2. An ellipsometric measuring device according to claim 1, characterized in that: The angle positioning mechanism (5) comprises an inclined positioning member (6) and a vertical positioning member (7), wherein the inclined positioning member (6) and the vertical positioning member (7) are arranged on both sides of the angle switching mechanism (4) along the rotation direction of the angle switching mechanism (4); the angle switching mechanism (4) and the inclined positioning member (6) are rigidly abutted against each other to position the angle switching mechanism (4) to an inclined state; the angle switching mechanism (4) and the vertical positioning member (7) are rigidly abutted against each other to position the angle switching mechanism (4) to a vertical state.

3. An ellipsometric measuring device according to claim 2, characterized in that: The angle switching mechanism (4) is in abutment with the tilt positioning member (6), and the angle between the incident surface of the detection component (3) and the vertical surface is 54.7°±5°.

4. An ellipsometric measurement device according to claim 1, characterized in that: The angle positioning mechanism (5) comprises a first driving member (8) mounted on a base plate (1), a crank (9) fixedly connected to the output end of the first driving member (8), and an intermediate rod (10) rotatably connected to the crank (9), wherein one end of the intermediate rod (10) away from the crank (9) is hinged to the angle switching mechanism (4); the first driving member (8) is a torque motor.

5. The ellipsometric measuring device according to claim 1, characterized in that: The angle positioning mechanism (5) comprises a guide rail (11) mounted on a base plate (1), a slider (12) mounted on the guide rail (11), a connecting rod (13) hinged to the slider (12), and a second driving member (14) driving the slider (12) to reciprocate along the guide rail (11); an end of the connecting rod (13) away from the slider (12) is hinged to the angle switching mechanism (4); the second driving member (14) is a torque motor or an electric push rod.

6. An ellipsometric measuring device according to claim 1, characterized in that: The angle positioning mechanism (5) is an electric push rod, the base of the electric push rod is hinged on the base plate (1), and the output end of the electric push rod is hinged on the side wall of the angle switching mechanism (4).

7. An ellipsometric measuring device according to claim 1, characterized in that: The angle positioning mechanism (5) comprises a worm wheel (15) and a worm (16); the worm wheel (15) is fixedly connected to one side of the angle switching mechanism (4) and is coaxially arranged with the rotation axis of the angle switching mechanism (4); the worm (16) is rotatably mounted on the base plate (1) and meshes with the worm wheel (15); a third driving member (17) for driving the worm (16) to rotate is arranged at the end thereof; the third driving member (17) is a motor or a manual crank.

8. A measurement method using the ellipsometric measurement device according to any one of claims 1 to 7, characterized in that: The following steps are involved: S1. Place the sample to be tested (20) flat on the surface of the sample table (2); S2. According to the type of the sample (20) to be tested, the incident surface is rotated so that the incident surface of the detection component (3) is perpendicular to the detection surface of the sample (20) to be tested; S3. Record the obtained surface information of the sample to be tested (20).

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