A vacuum coating machine workpiece fixture cabin transfer manipulator

Abstract

The present invention discloses a vacuum coating machine workpiece fixture cabin transfer manipulator, the manipulator has the movement functions of telescoping forward and backward, lifting and rotating up and down, and translating along guide rails, the upper and lower claws have the clamping holes, the fixture is designed to correspond to the clamping blocks on the plug rod, and the support plate between the upper and lower claws provides strong support and the bearing of the main frame and its base, so as to realize the clamping of a single large fixture, and can accurately transfer it to a certain functional cabin for installation and then return to clamp the next fixture. The manipulator of the vacuum coating machine is suitable for single-hanging fixtures with large volume or weight, and since this type of coating machine does not need to transport the entire workpiece rack as a whole, it does not need to specially design a cabin door with oversized size, thereby reducing the cost. The fixture cabin transfer method effectively reduces the number of times the vacuum is broken, and the different film systems are coated simultaneously by heating the fixture in the heating cabin and then distributing it to the coating cabins of different film systems, thereby greatly improving the processing efficiency.

Description

Technical Field

[0001] The invention relates to a manipulator, in particular to a multi-chamber vacuum coating machine workpiece fixture chamber transfer manipulator. Background Art

[0002] In a traditional single-chamber vertical vacuum coating machine, the workpiece to be plated needs to be manually hung on a fixture (or a mounting plate or hanging rod of a workpiece rack) outside the furnace, and then the fixture is manually hung piece by piece on the workpiece rack in the furnace for coating.

[0003] In recent years, in order to improve the efficiency of coating, multi-chamber vacuum coating machines have emerged, and their cabin layouts include the following two types: the first is a linear conveyor guide cabin in the center, with the front and rear ends being the feed cabin and the discharge cabin respectively, and multiple functional cabins arranged on the left and right sides; the other is a central symmetrical satellite layout, with multiple functional cabins radially distributed in a ring around the central turnover cabin. Each cabin of the multi-chamber coating machine can simultaneously implement the functions of different stages of the coating process, which improves production capacity and saves auxiliary time for breaking vacuum and pumping vacuum. The coating cabin is always in a vacuum state, reducing the impact of impurities filled in when breaking vacuum, and improving the coating quality and stability.

[0004] In order to improve the coating efficiency, the workpiece rack of the above-mentioned multi-chamber vacuum coating machine has a larger diameter of more than 1500mm in the coating chamber, and it needs to accommodate up to 20 or more fixtures. Each fixture is more than one meter high and nearly 150mm-200mm wide. A fixture weighs dozens of kg after loading, and the diameter of the entire workpiece rack is more than 1500mm. The fixtures of the above-mentioned multi-chamber coating machine must be transferred under vacuum. There are two ways to transfer the cabin: one is to transfer the fixtures of the entire workpiece rack together, and the other is to transfer the fixtures on the workpiece rack one by one. The former method mostly uses the transfer of the workpiece rack as a whole vehicle, which is faster and more efficient, but for large workpiece racks, due to their large size and weight, the structural design requirements are higher; the biggest difficulty is that the vacuum cabin doors of each cabin require larger sizes, which are difficult to design and manufacture and expensive. The latter method can avoid the problem of large-sized vacuum cabin doors, but it must be equipped with a manipulator device that transfers the cabins of the fixtures in the furnace one by one. Summary of the invention

[0005] The technical problem to be solved by the invention is to provide a vacuum coating machine workpiece fixture cabin transfer robot, which can adapt to various types of coating production lines and has a simple and compact structure and can correspond to a smaller coating cabin door to reduce costs.

[0006] The technical solutions to the above technical problems are as follows:

[0007] A vacuum coating machine workpiece fixture cabin transfer manipulator, wherein the workpiece fixture is provided with an upper insertion rod located at the upper end surface of the fixture and a lower insertion rod located at the lower end surface of the fixture, characterized in that:

[0008] It includes a clamping mechanism for clamping the fixture, a telescopic mechanism and a lifting mechanism for controlling the extension and lifting of the clamping mechanism, and a rotating mechanism and a translation mechanism for controlling the rotation of the clamping mechanism, wherein:

[0009] The clamping mechanism includes a support plate and a claw hand, the claw hand includes an upper claw hand arranged at the top of the support plate and used to clamp the upper insertion rod, and a lower claw hand arranged at the bottom of the support plate and used to clamp the lower insertion rod and parallel to the upper claw hand; the front ends of the upper claw hand and the lower claw hand are both provided with a bayonet for clamping the upper and lower insertion rods of the clamping jig.

[0010] The telescopic mechanism includes a transverse cylinder parallel to the horizontal plane, a transverse cylinder fixing seat for fixing the transverse cylinder, a transverse rail fixing plate arranged above and below the transverse cylinder fixing seat and extending in the same direction as the claw hand, a transverse rail arranged on the side of the transverse rail fixing plate facing the claw hand, a transverse rail slider for connecting the transverse rail and the claw hand, and the end of the transverse piston push rod of the transverse cylinder is fixedly connected to the support plate;

[0011] The lifting mechanism comprises a main frame fixing seat, a main frame fixed to the main frame fixing seat, a longitudinal cylinder fixing seat arranged on the upper end surface of the main frame fixing seat, a longitudinal cylinder arranged on the upper end surface of the longitudinal cylinder fixing seat, a longitudinal rail arranged on the inner side wall of the main frame, used to connect the longitudinal rail with the longitudinal rail slider on the telescopic mechanism, a longitudinal piston push rod of the longitudinal cylinder extending vertically upward, and the end of the longitudinal piston push rod is fixedly connected to the bottom of the telescopic mechanism;

[0012] The rotating mechanism comprises a movable bottom plate arranged below the main frame fixing seat, a cross roller bearing for connecting the main frame fixing seat and the movable bottom plate, and a rotating device arranged on the lower end surface of the movable bottom plate, wherein the rotating shaft of the rotating device penetrates the movable bottom plate and is fixedly connected to the main frame fixing seat, so that the main frame fixing seat can rotate with the rotation of the rotating shaft;

[0013] The translation mechanism includes a pair of translation guide rails arranged on the lower end surface of the movable base plate, a slide fixing plate arranged on the outside of the translation guide rails, a slide assembly fixed on the slide fixing plate and parallel to the translation guide rails, and a connecting block used to connect the movable base plate and the slide fixing plate.

[0014] Furthermore, the support plate is a T-shaped plate, the web of the T-shaped support plate is oriented in the same direction as the extension direction of the upper claw hand and the lower claw hand, and is located on the central axis of the extension direction of the upper claw hand and the lower claw hand.

[0015] Furthermore, the end of the transverse piston push rod of the transverse cylinder is fixedly connected to the support plate by bolts, and a notch for accommodating the bolt head is excavated on the web of the support plate at the location of the bolt.

[0016] Furthermore, the cross-rail fixing plates are in two pieces, which are respectively arranged at the top and bottom of the cross-cylinder fixing seat, namely an upper cross-rail fixing plate and a lower cross-rail fixing plate. The cross-rail fixing plates are provided with vertical plates for connecting with the longitudinal rail sliders on the side walls of the cross-rail fixing plates in the directions of the two sides of the support plate. A groove for allowing the upper and lower insertion rods to pass through is excavated on the side walls of the upper and lower cross-rail fixing plates facing the upper and lower claw hands; the cross-rail includes an upper cross-rail arranged on the lower end surface of the upper cross-rail fixing plate, and a lower cross-rail arranged on the upper end surface of the lower cross-rail fixing plate; the cross-rail slider includes an upper cross-rail slider for connecting the upper cross-rail and the upper claw hand, and a lower cross-rail slider for connecting the lower cross-rail and the lower claw hand.

[0017] Furthermore, a stepped through hole is excavated at the center of the upper end surface of the main frame fixing seat, and the rotating shaft and the main frame fixing seat are fixedly connected through a connecting seat. The connecting seat is a sleeve with bosses on both sides of its upper end. The connecting seat is connected to the rotating shaft through a flat key after being sleeved. The boss corresponds to the step of the stepped through hole, and the connection between the connecting seat and the main frame fixing seat is achieved at the step by a fastening bolt.

[0018] Furthermore, the main frame includes side plates located on both sides of the support plate, a top plate located at the top of the two side plates and connecting the two side plates, and at least one connecting plate located on the side where the transverse cylinder is located for connecting the two side plates, and the side plates, top plate and connecting plate are all provided with at least one circular hole.

[0019] The present invention has the following technical effects:

[0020] (1) The vacuum coating machine workpiece fixture transfer cabin manipulator realizes the clamping of a single large fixture through its own forward and backward telescopic and up and down lifting functions, the upper and lower claws' bayonet and the fixture design corresponding to the block on the plug rod, and the support plate between the upper and lower claws to provide strong support and the bearing of the main frame and its base;

[0021] (2) Combining the forward and backward telescopic, up and down lifting functions of the robot itself and the overall rotation and translation movement functions of the support system of the telescopic and lifting mechanism, the workpiece fixtures distributed in each chamber can be clamped one by one and transferred one by one without the need to transport the entire workpiece rack as a whole. This does not require a large size for the chamber door of the vacuum coating machine, thus avoiding the high technical and process requirements brought about by the design and manufacture of large-sized vacuum chamber doors, reducing processing difficulty and reducing costs, thereby improving the operating reliability of the multi-chamber vacuum coating machine and reducing operating costs.

[0022] (3) The movement of the robot's claw in the X, Y, and Z axes is achieved through guide rails, allowing the workpiece fixture to move smoothly during the cabin transfer process, avoiding shaking or collision of the workpiece in the fixture. Its structure is simple and compact, with low maintenance costs and high reliability.

[0023] (4) This robot solution is suitable for coating machines with multiple functional cabins distributed at the front and rear ends and left and right sides of the central translation guide rail, and is also suitable for coating machines with multiple cabins distributed radially from the center to the periphery. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a top view of the robot;

[0025] Figure 2 for Figure 1 AA section view in the figure;

[0026] Figure 3 for Figure 1 The side view in the B direction;

[0027] Figure 4 for Figure 2 A magnified view of the area at C in FIG.

[0028] Figure 5 for Figure 3 A magnified view of the area at D in FIG.

[0029] Figure 6 for Figure 3 A magnified view of the area at E in FIG.

[0030] Figure 7 This is an axonometric view of one of the angles of the robot;

[0031] Figure 8 This is an axonometric view of the robot from another angle;

[0032] Among them: fixture 1; upper insert rod 1-2; lower insert rod 1-3; clamp head 1-4; 2-1 support plate; 2-11 web plate; 2-12 notch; 2-21 upper claw hand; 2-22 lower claw hand; 2-23 bayonet; 2-3 transverse cylinder; 2-31 transverse piston push rod; 2-4 transverse cylinder fixing seat; 2-51 upper cross rail fixing plate; 2-52 lower cross rail fixing plate; 2-53 U-shaped groove; 2-54 vertical plate; 2-61 upper cross rail; 2-62 lower cross rail; 2-71 upper cross rail slider; 2-72 lower cross rail slider; 3-1 main frame fixing seat; 3-21 side plate; 3-22 top plate; 3-23 connecting plate; 3-3 round hole; 3-4 longitudinal cylinder fixing seat; 3-5 longitudinal cylinder; 3-51 longitudinal piston push rod; 3-6 longitudinal rail; 3-7 longitudinal rail slider; 4-1 moving base plate; 4-2 cross roller bearing; 4-3 rotating device; 4-31 rotating shaft; 4-4 connecting seat; 4-41 boss; 4-5 flat key; 4-6 fastening bolt; 5-1 translation guide rail; 5-2 guide rail fixing plate; 5-3 slide fixing plate; 5-4 slide assembly; 5-5 connecting block. DETAILED DESCRIPTION

[0033] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings.

[0034] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, top, bottom, inside, outside, vertical, horizontal, longitudinal, counterclockwise, clockwise, circumferential, radial, axial...), then the directional indication is only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0035] The invention provides a workpiece fixture cabin transfer manipulator for a vacuum coating machine.

[0036] like Figures 1 to 8 As shown, the manipulator for rotating the workpiece fixture comprises a clamping mechanism for clamping the fixture 1, and a telescopic mechanism and a lifting mechanism for respectively controlling the extension, lifting and rotation of the clamping mechanism, and a rotating mechanism and a translation mechanism for controlling the rotating cabin of the clamping mechanism. The fixture 1 clamped by the manipulator is provided with an upper insertion rod 1-2 located on the upper end surface of the fixture 1 and a lower insertion rod 1-3 located on the lower end surface of the fixture 1, and a clamping head 1-4 is respectively provided at the middle position of the upper insertion rod 1-2 and the lower insertion rod 1-3.

[0037] The clamping mechanism includes a support plate 2-1 and a claw hand arranged on the support plate 2-1. The claw hand includes an upper claw hand 2-21 for clamping an upper insertion rod 1-2 and a lower claw hand 2-22 for clamping a lower insertion rod 1-3. The upper claw hand 2-21 and the lower claw hand 2-22 are respectively arranged at the top and bottom ends of the support plate 2-1. The upper and lower claw hands 2-21 and 2-22 are respectively provided with a bayonet 2-23 corresponding to the clamping head 1-4. The support plate 2-1 is a T-shaped plate, and the direction of its web 2-11 is the same as the extension direction of the upper and lower claw hands 2-21 and 2-22. The web 2-11 is located on the central axis of the extension direction of the upper and lower claw hands 2-21 and 2-22.

[0038] The telescopic mechanism includes a transverse cylinder 2-3 parallel to the horizontal plane, a transverse cylinder fixing seat 2-4 for fixing the transverse cylinder 2-3, and a transverse rail fixing plate arranged on the transverse cylinder fixing seat 2-4 and extending in the same direction as the claw hand. The transverse rail fixing plate is divided into two pieces, which are arranged at the top and bottom of the transverse cylinder fixing seat 2-4, respectively, and are an upper transverse rail fixing plate 2-51 and a lower transverse rail fixing plate 2-52. The transverse rail fixing plate is provided with a longitudinal rail sliding contact on the side wall of the transverse rail fixing plate in the direction of both sides of the support plate 2-1. The vertical plate 2-54 connected to the block 3-7 and the upper and lower cross rail fixing plates 2-51 and 2-52 are used to dig a U-shaped groove 2-53 for accommodating the insertion rod on the side wall where the ends of the upper and lower claws 2-21 and 2-22 are located, allowing the upper and lower claws 2-21 and 2-22 to clamp the upper insertion rod 1-2 and the lower insertion rod 1-1 of the jig to pass through when moving backward, and at the same time, it also increases the telescopic stroke of the upper and lower claws 2-21 and 2-22, so that the manipulator can operate deeper into each cabin, thereby adapting to the vacuum coating machine with large-capacity cabins.

[0039] The telescopic mechanism also includes horizontal rails arranged on both sides of the horizontal rail fixing plate surface close to the claw hand, and the horizontal rails include a pair of upper horizontal rails 2-61 arranged on the lower end surface of the upper horizontal rail fixing plate 2-51, and a pair of lower horizontal rails 2-62 arranged on the upper end surface of the lower horizontal rail fixing plate 2-52.

[0040] The telescopic mechanism also includes a cross-rail slider for connecting the cross-rail and the clamping device, and the cross-rail slider includes an upper cross-rail slider 2-71 for connecting the upper cross-rail 2-61 and the upper claw hand 2-21, and a lower cross-rail slider 2-72 for connecting the lower cross-rail 2-62 and the lower claw hand 2-22. The end of the cross-piston push rod 2-31 of the cross-cylinder 2-3 is fixedly connected to the support plate 2-1 by bolts, and the web 2-11 of the support plate 2-1 has a notch 2-12 for accommodating the bolt head at the position of the bolt, so as to facilitate the bolt connection of the cross-piston push rod 2-31 and the support plate 2-1, and also facilitate the adjustment of the tightness of the bolt.

[0041] The lifting mechanism includes a main frame fixing seat 3-1, a main frame fixed to the main frame fixing seat 3-1, a longitudinal cylinder fixing seat 3-4 arranged on the upper end surface of the main frame fixing seat 3-1, a longitudinal cylinder 3-5 arranged on the upper end surface of the longitudinal cylinder fixing seat 3-4, a longitudinal rail 3-6 arranged on the inner side wall of the main frame, a longitudinal rail slider 3-7 for connecting the longitudinal rail 3-6 with the telescopic mechanism, which is fixed to the outer side wall of the vertical plate 2-54 of the transverse rail fixing plate, and a longitudinal piston push rod 3-51 of the longitudinal cylinder 3-5 extends vertically upward, and the end of the longitudinal piston push rod 3-51 is fixedly connected to the lower transverse rail fixing plate 2-52.

[0042] The main frame fixed to the main frame fixing seat 3-1 specifically includes side plates 3-21 located on both sides of the support plate 2-1, a top plate 3-22 located at the top of the side plates 3-21 connecting the two side plates, and five connecting plates 3-23 located on the side where the transverse cylinder 2-3 is located and used to connect the two side plates 3-21. The side plates 3-21, the top plates 3-22 and the connecting plates 3-23 are all provided with large circular holes 3-3 to reduce the deadweight of the entire manipulator.

[0043] The longitudinal rails 3-6 arranged on the inner side wall of the main frame are specifically eight in number, and a pair is arranged at the bottom and the top of the inner side wall of the two side panels 3-21 of the main frame respectively.

[0044] The rotating mechanism also includes a movable base plate 4-1 arranged below the main frame fixing seat 3-1, a cross roller bearing 4-2 for connecting the main frame fixing seat 3-1 and the movable base plate 4-1, and a rotating device 4-3 arranged on the lower end surface of the movable base plate 4-1. The rotating shaft 4-31 of the rotating device 4-3 passes through the movable base plate 4-1 and is fixedly connected to the main frame fixing seat 3-1, so that the main frame fixing seat 3-1 can rotate with the rotation of the rotating shaft 4-31.

[0045] The rotating shaft 4-31 of the rotating device 4-3 is fixedly connected with the main frame fixing seat 3-1, specifically, a stepped through hole is excavated at the center of the upper end surface of the main frame fixing seat 3-1, and the rotating shaft 4-31 is fixedly connected with the main frame fixing seat 3-1 through a connecting seat 4-4. The connecting seat 4-4 is a sleeve with bosses 4-41 on both sides of the upper end. The connecting seat 4-4 is connected to the rotating shaft 4-31 through a flat key 4-5. The boss 4-41 corresponds to the step of the stepped through hole, and the connection between the connecting seat 4-4 and the main frame fixing seat 3-1 is realized at the step by a fastening bolt 4-6. The rotating device 4-3 can use a rotary cylinder or an electric motor.

[0046] The translation mechanism includes a pair of translation guide rails 5-1 arranged on the lower end surface of the moving base plate 4-1 (the two translation guide rails 5-1 are located on both sides of the rotating device 4-3), a slide fixing plate 5-3 arranged outside the pair of translation guide rails 5-1, a slide assembly 5-4 fixed on the slide fixing plate 5-3 and parallel to the translation guide rails 5-1, and a connecting block 5-5 for connecting the moving base plate 4-1 and the slide fixing plate 5-3;

[0047] The slide assembly 5-4 fixed on the slide fixing plate 5-3 and parallel to the translation guide rail 5-1 can adopt a rodless cylinder slide, which is a standardized purchased part; or, the slide assembly 5-4 can adopt a module slide assembly 5-4 and an electric drive assembly, wherein the module slide is a complete set of purchased parts.

Claims

1. A vacuum coating machine workpiece fixture chamber transfer robot, the workpiece fixture being provided with an upper insertion rod (1-2) located at the upper end surface of the fixture (1) and a lower insertion rod (1-3) located at the lower end surface of the fixture (1), characterized in that: It comprises a clamping mechanism for clamping the fixture (1), a telescopic mechanism and a lifting mechanism for respectively controlling the extension and lifting of the clamping mechanism, and a rotating mechanism and a translating mechanism for controlling the rotation of the clamping mechanism, wherein: The clamping mechanism comprises a support plate (2-1) and a claw hand, wherein the claw hand comprises an upper claw hand (2-21) arranged at the top end of the support plate (2-1) and used to clamp the upper insertion rod (1-2), and a lower claw hand (2-22) arranged at the bottom end of the support plate (2-1) and used to clamp the lower insertion rod (1-3) and parallel to the upper claw hand (2-21); the front ends of the upper claw hand (2-21) and the lower claw hand (2-22) are both provided with a bayonet (2-23) for clamping the upper and lower insertion rods of the clamping jig; The telescopic mechanism comprises a transverse cylinder (2-3) parallel to the horizontal plane, a transverse cylinder fixing seat (2-4) for fixing the transverse cylinder, a transverse rail fixing plate arranged above and below the transverse cylinder fixing seat (2-4) and extending in the same direction as the claw hand, a transverse rail arranged on a side of the transverse rail fixing plate facing the claw hand, and a transverse rail slider for connecting the transverse rail and the claw hand, and a distal end of a transverse piston push rod (2-31) of the transverse cylinder (2-3) is fixedly connected to the support plate (2-1); The lifting mechanism comprises a main frame fixing seat (3-1), a main frame fixed to the main frame fixing seat (3-1), a longitudinal cylinder fixing seat (3-4) arranged on the upper end surface of the main frame fixing seat (3-1), a longitudinal cylinder (3-5) arranged on the upper end surface of the longitudinal cylinder fixing seat (3-4), a longitudinal rail (3-6) arranged on the inner side wall of the main frame, used to connect the longitudinal rail (3-6) and the longitudinal rail slider (3-7) on the telescopic mechanism, and a longitudinal piston push rod (3-51) of the longitudinal cylinder (3-5) extending vertically upward, and the end of the longitudinal piston push rod (3-51) is fixedly connected to the bottom of the telescopic mechanism; The rotating mechanism comprises a movable base plate (4-1) arranged below the main frame fixing seat (3-1), a cross roller bearing (4-2) for connecting the main frame fixing seat (3-1) and the movable base plate (4-1), and a rotating device (4-3) arranged on the lower end surface of the movable base plate (4-1), wherein a rotating shaft (4-31) of the rotating device (4-3) passes through the movable base plate (4-1) and is fixedly connected to the main frame fixing seat (3-1), so that the main frame fixing seat (3-1) can rotate along with the rotation of the rotating shaft (4-31); The translation mechanism comprises a pair of translation guide rails (5-1) arranged on the lower end surface of the moving base plate (4-1), a slide fixing plate (5-3) arranged outside the translation guide rails (5-1), a slide assembly (5-4) fixed on the slide fixing plate (5-3) and parallel to the translation guide rails (5-1), and a connecting block (5-5) for connecting the moving base plate (4-1) and the slide fixing plate (5-3).

2. The vacuum coating machine workpiece fixture transfer chamber manipulator according to claim 1, characterized in that: The support plate (2-1) is a T-shaped plate, and the web (2-11) of the T-shaped support plate (2-1) faces the same direction as the extension direction of the upper claw hand (2-21) and the lower claw hand (2-22), and is located on the central axis of the extension direction of the upper claw hand (2-21) and the lower claw hand (2-22).

3. The vacuum coating machine workpiece fixture transfer chamber manipulator according to claim 2, characterized in that: The end of the transverse piston push rod (2-31) of the transverse cylinder (2-3) is fixedly connected to the support plate (2-1) by means of bolts, and a notch (2-12) for accommodating the bolt head is excavated on the web (2-11) of the support plate (2-1) at the location of the bolt.

4. The workpiece fixture transfer manipulator for the vacuum coating machine according to any one of claims 1 to 3, characterized in that: The transverse rail fixing plates are in two pieces, which are respectively arranged at the top and bottom of the transverse cylinder fixing seat (2-4), namely an upper transverse rail fixing plate (2-51) and a lower transverse rail fixing plate (2-52). The transverse rail fixing plates are provided with vertical plates (2-54) for connecting with the longitudinal rail sliders (3-7) on the side walls of the transverse rail fixing plates in the direction of the two sides of the support plate (2-1). A vertical plate (2-54) for connecting with the longitudinal rail sliders (3-7) is excavated on the side walls of the upper transverse rail fixing plates (2-51) and the lower transverse rail fixing plates (2-52) in the direction of the upper and lower claws. The groove (2-53) allows the upper and lower insertion rods (1-2, 1-3) to pass through; the cross rail comprises an upper cross rail (2-61) arranged on the lower end surface of the upper cross rail fixing plate (2-51), and a lower cross rail (2-62) arranged on the upper end surface of the lower cross rail fixing plate (-52); the cross rail slider comprises an upper cross rail slider (2-71) for connecting the upper cross rail (2-61) and the upper claw hand (2-21), and a lower cross rail slider (2-72) for connecting the lower cross rail (2-62) and the lower claw hand (2-22).

5. The vacuum coating machine workpiece fixture chamber transfer manipulator according to claim 4, characterized in that: A stepped through hole is excavated at the center of the upper end surface of the main frame fixing seat (3-1); the rotating shaft (4-31) and the main frame fixing seat (3-1) are fixedly connected via a connecting seat (4-4); the connecting seat (4-4) is a sleeve with bosses (4-41) on both sides of its upper end; the connecting seat (4-4) is sleeved on the rotating shaft (4-31) and connected via a flat key (4-5); the bosses (4-41) correspond to the steps of the stepped through hole, and the connection between the connecting seat (4-4) and the main frame fixing seat (3-1) is achieved at the steps via a fastening bolt (4-6).

6. The vacuum coating machine workpiece fixture cabin transfer manipulator according to claim 5, characterized in that: The main frame comprises side plates (3-21) located on both sides of the support plate (2-1), a top plate (3-22) located at the top ends of the two side plates (3-21) and connecting the two side plates (3-21), and at least one connecting plate (3-23) located on the side where the transverse cylinder (2-3) is located and used to connect the two side plates (3-21), wherein the side plates (3-21), the top plate (3-22) and the connecting plate (3-23) are all provided with at least one circular hole (3-3).

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