Laminating machine

Abstract

The present invention discloses a film laminating machine, comprising a film laminating device, a film placing device, and a film cutting device; the film laminating device comprises a first laminating stage, a second laminating stage, and a film pressing drive mechanism; the film cutting device comprises a cutting assembly and a moving drive assembly. The film placing device separates the dry film of the raw material film from the base film and transports the dry film to the gap between the first laminating stage and the second laminating stage and is located directly above the wafer on the second laminating stage; the film pressing drive mechanism drives the first laminating stage toward the second laminating stage and presses the dry film against the wafer; the film pressing drive mechanism drives the first laminating stage away from the second laminating stage; the moving drive assembly drives the cutting assembly into the film laminating processing chamber; the cutting assembly cuts the dry film along the boundary of the wafer, separating the wafer coated with the dry film from the entire dry film, thereby achieving film laminating processing for the product and removing the dry film outside the product boundary.

Description

Technical Field

[0001] The present invention relates to the field of film laminating equipment, and in particular to a film laminating machine. Background Art

[0002] A wafer refers to the silicon chip used to manufacture silicon semiconductor integrated circuits. Due to its round shape, it is called a wafer. Various circuit component structures can be processed on the silicon wafer to become integrated circuit products with specific electrical functions.

[0003] During the production process of products such as wafers, the products need to be filmed and the dry film outside the product boundary needs to be removed. Summary of the Invention

[0004] The purpose of the present invention is to provide a film laminating machine, which aims to solve the problem in the prior art that during the production process of products such as wafers, the products need to be film-laminated and the dry film outside the product boundary needs to be cut off.

[0005] To achieve this object, the present invention adopts the following technical solutions:

[0006] The film laminating machine includes a film laminating device, a film placing device for supplying dry film to the film laminating device, and a film cutting device; the film laminating device includes a first film pressing table, a second film pressing table arranged opposite to the first film pressing table and used to place the product to be film-laminated, and a film pressing drive mechanism for driving the first film pressing table to move relative to the second film pressing table to complete the film laminating action; the film cutting device includes a cutting assembly and a moving drive assembly for driving the cutting assembly to move to complete cutting of the dry film outside the boundary of the product to be film-laminated.

[0007] Furthermore, the film laminating device also includes a clamping assembly arranged on the first film laminating platform, a sealing ring arranged on the second film laminating platform and used to contact the first film laminating platform, a vacuum pump, and a vacuum tube connected to the vacuum pump; the second film laminating platform is provided with a vacuum hole, the vacuum hole is communicated with the vacuum tube, and the vacuum hole is located within the boundary range of the sealing ring.

[0008] Furthermore, the film pressing drive mechanism includes a film pressing lifting rod connected to the first film pressing platform, a film pressing lifting plate connected to the end of the film pressing lifting rod away from the first film pressing platform, a film pressing lifting cylinder whose movable end is connected to the film pressing lifting plate, and a film pressing fixed plate connected to the fixed end of the film pressing lifting cylinder; the film pressing drive mechanism also includes a film pressing guide rod arranged on the film pressing fixed plate, and the film pressing lifting plate is provided with a film pressing guide hole for the film pressing guide rod to pass through.

[0009] Furthermore, the film laminating device also includes a clamping assembly arranged on the first film laminating platform, a locking drive member arranged on the film laminating fixing plate, and a locking block arranged at the output end of the locking drive member and used to limit the movement of the film laminating lifting plate along the axial direction of the film laminating lifting rod; the locking block is provided with a locking clearance groove; the film laminating lifting plate is provided with a first locking protrusion; the film laminating fixing plate is provided with a second locking protrusion; the film laminating device also includes a film laminating guide rail slidably connected to the second film laminating platform, and a loading and unloading drive assembly for driving the second film laminating platform to slide along the film laminating guide rail.

[0010] Furthermore, the pressing assembly includes a lamination airbag provided on the first lamination platform, a lamination air tube communicating with the lamination airbag, and an air pump connected to the lamination air tube.

[0011] Furthermore, the film placing device includes a film feeding sliding seat, a raw film supplying assembly provided on the film feeding sliding seat and used for supplying raw film, and a film separating assembly provided on the film feeding sliding seat and used for separating the raw film into a dry film and a base film; the film separating assembly includes a film separating frame, a film feeding tensioning roller rotatably connected to the film separating frame, and a film separating roller rotatably connected to the film separating frame.

[0012] Furthermore, the film-laying device also includes a film-splitting lifting drive assembly for driving the film-splitting assembly to move in a vertical direction; the film-splitting lifting drive assembly includes a film-splitting connecting rod connected to the film-feeding sliding seat, a film-splitting fixing plate connected to the film-splitting connecting rod, a film-splitting lifting rod passing through the film-feeding sliding seat and slidably connected to the film-feeding sliding seat, a film-splitting lifting plate connected to the film-splitting lifting rod, and a film-splitting lifting drive component provided on the film-splitting fixing plate; the film-splitting frame is connected to one end of the film-splitting lifting rod away from the film-splitting lifting plate, and the film-splitting lifting plate is connected to the output end of the film-splitting lifting drive component.

[0013] The film-feeding device further comprises a film-feeding slide rail slidably connected to the film-feeding sliding seat, and a film-feeding sliding drive assembly for driving the film-feeding sliding seat to slide; the film-feeding device also comprises a base film winding assembly provided on the film-feeding sliding seat and used to wind up the base film, and a waste film winding assembly coordinated with the raw film supply assembly; the film-feeding device also comprises a film-feeding auxiliary mechanism coordinated with the raw film supply assembly; the film-feeding auxiliary mechanism comprises an auxiliary mounting seat, an auxiliary connecting rod connected to the auxiliary mounting seat, an auxiliary fixing plate connected to the auxiliary connecting rod, an auxiliary lifting rod passing through the auxiliary mounting seat and slidably connected to the auxiliary mounting seat, an auxiliary lifting seat connected to one end of the auxiliary lifting rod, an auxiliary lifting plate connected to the other end of the auxiliary lifting rod, and a first auxiliary guide roller provided on the auxiliary lifting seat. , and an auxiliary lifting drive member provided on the auxiliary fixed plate and used for driving the auxiliary lifting plate to move along the axial direction of the auxiliary lifting rod; the film feeding auxiliary mechanism also includes a second auxiliary guide roller provided on the auxiliary lifting seat, the second auxiliary guide roller is rotatably connected to the auxiliary lifting seat; the auxiliary lifting seat is provided with two relatively arranged leveling components, the leveling component includes a leveling guide rail provided on the auxiliary lifting seat, a leveling block slidingly connected to the leveling guide rail, a leveling drive member for driving the leveling block to slide, a leveling cylinder provided on the leveling block, a leveling pressure plate connected to the movable end of the leveling cylinder and matched with the first auxiliary guide roller; the surface of the leveling pressure plate in contact with the first auxiliary guide roller has a leveling groove, and the first auxiliary guide roller is provided with a leveling flexible member in contact with the leveling pressure plate.

[0014] Furthermore, the mobile drive component includes a support table, a first drive module arranged on the support table, a second drive module connected to the output end of the first drive module, and a third drive module connected to the output end of the second drive module; the cutting component includes a cutting fixed table connected to the output end of the third drive module, a cutter assembly, and a cutting drive assembly arranged on the cutting fixed table and used to drive the cutter assembly to complete the cutting action.

[0015] Furthermore, the cutting assembly also includes a mounting plate arranged between the cutting drive assembly and the cutter assembly, and the cutter assembly is rotatably connected to the mounting plate; the cutting assembly also includes a film-breaking drive assembly for driving the cutter assembly to rotate relative to the mounting plate so that the cutter assembly abuts against the boundary of the product to be cut; the cutter assembly includes a knife seat rotatably connected to the mounting plate, and a tool fixedly mounted on the knife seat; the film-breaking drive assembly includes a rotating block rotatably connected to the knife seat, and a driving cylinder with a movable end connected to the rotating block; the fixed end of the driving cylinder is rotatably connected to the mounting plate; a first rotating seat is provided on the knife seat; the rotating block is rotatably connected to the first rotating seat; a second rotating seat is provided on the mounting plate; the fixed end of the driving cylinder is rotatably connected to the second rotating seat.

[0016] The beneficial effects of the present invention are as follows: the film placing device separates the dry film of the raw material film from the base film and transports the dry film to the gap between the first film pressing stage and the second film pressing stage and is located directly above the wafer on the second film pressing stage; the film pressing drive mechanism drives the first film pressing stage close to the second film pressing stage and presses the dry film and the wafer tightly; the film pressing drive mechanism drives the first film pressing stage away from the second film pressing stage; the mobile drive assembly drives the cutting assembly to extend into the film laminating processing cavity; the cutting assembly cuts the dry film along the boundary of the wafer, so that the wafer covered with the dry film is separated from the dry film as a whole, thereby realizing the film laminating process of the product and removing the dry film outside the boundary of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0018] Figure 1 is a cross-sectional view of a film laminating machine in an embodiment of the present invention;

[0019] Figure 2 for Figure 1 A partial enlarged view of point A in the middle;

[0020] Figure 3 Schematic diagram of the structure of the film sticking device in an embodiment of the present invention;

[0021] Figure 4 is a cross-sectional view of a film-sticking device in an embodiment of the present invention;

[0022] Figure 5 Schematic diagram of the structure of the membrane separation component in an embodiment of the present invention;

[0023] Figure 6 Schematic diagram of the structure of the film feeding auxiliary mechanism in an embodiment of the present invention;

[0024] Figure 7 Schematic diagram of the structure of the film cutting device in an embodiment of the present invention;

[0025] Figure 8 Schematic diagram of the structure of the cutting assembly in an embodiment of the present invention;

[0026] In the picture:

[0027] 400, raw film; 4001, dry film; 40011, waste film; 4002, base film; 500, film processing chamber; 600, wafer;

[0028] 1. Film laminating device; 11. First laminating stage; 12. Second laminating stage; 121. Vacuum hole; 13. Laminating drive mechanism; 131. Laminating lift rod; 132. Laminating lift plate; 1321. First locking protrusion; 133. Laminating lift cylinder; 134. Laminating fixing plate; 1341. Second locking protrusion; 135. Laminating guide rod; 14. Clamping assembly; 141. Laminating airbag; 142. Laminating air tube; 15. Sealing ring; 16. Vacuum tube; 17. Locking drive member; 18. Locking block; 181. Locking clearance groove; 19. Laminating guide rail;

[0029] 2. Film unwinding device; 21. Film feeding slide seat; 22. Raw film supply assembly; 23. Film separation assembly; 231. Film separation frame; 232. Film feeding tensioning roller; 233. Film separation roller; 24. Film separation lifting drive assembly; 241. Film separation connecting rod; 242. Film separation fixing plate; 243. Film separation lifting rod; 244. Film separation lifting plate; 245. Film separation lifting drive member; 25. Film feeding slide rail; 26. Base film winding assembly; 27. Waste film winding assembly; 28 , film feeding auxiliary mechanism; 281, auxiliary mounting seat; 282, auxiliary connecting rod; 283, auxiliary fixing plate; 284, auxiliary lifting rod; 285, auxiliary lifting seat; 286, auxiliary lifting plate; 287, first auxiliary guide roller; 2871, leveling flexible member; 288, auxiliary lifting drive member; 289, second auxiliary guide roller; 29, leveling assembly; 291, leveling guide rail; 292, leveling block; 293, leveling cylinder; 294, leveling pressure plate;

[0030] 3. Film cutting device; 31. Cutting assembly; 311. Cutting fixed table; 312. Cutter assembly; 3121. Cutter holder; 3122. Cutter; 313. Cutting drive assembly; 314. Mounting plate; 315. Film breaking drive assembly; 3151. Rotating block; 3152. Drive cylinder; 32. Moving drive assembly; 321. Support table; 322. First drive module; 323. Second drive module; 324. Third drive module. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0032] It should be noted that when an element is referred to as being “fixed on” or “disposed on” another element, it may be directly on the other element or indirectly on the other element. When an element is referred to as being “connected to” another element, it may be directly connected to the other element or indirectly connected to the other element.

[0033] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention.

[0034] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature identified as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.

[0035] The implementation of the present invention is described in detail below with reference to specific embodiments.

[0036] like Figures 1-8 As shown, an embodiment of the present invention proposes a film laminating machine, including a film laminating device 1, a film placing device 2 for supplying a dry film 4001 to the film laminating device 1, and a film cutting device 3; the film laminating device 1 includes a first film pressing table 11, a second film pressing table 12 arranged opposite to the first film pressing table 11 and used for placing the product to be laminarized, and a film pressing drive mechanism 13 for driving the first film pressing table 11 to move relative to the second film pressing table 12 to complete the film laminating action; the film cutting device 3 includes a cutting component 31, and a moving drive component 32 for driving the cutting component 31 to move to complete the cutting of the dry film 4001 outside the boundary of the product to be laminarized.

[0037] In an embodiment of the present invention, the working process of the film laminating machine is as follows: the film placing device 2 separates the dry film 4001 of the raw material film 400 from the base film 4002 and transports the dry film 4001 to the gap between the first laminating stage 11 and the second laminating stage 12 (the gap between the first laminating stage 11 and the second laminating stage 12 is defined as the laminating processing cavity 500) and is located directly above the product to be laminarized (e.g., wafer 600) on the second laminating stage 12. The laminating drive mechanism 13 drives the first laminating stage 11 to approach the second laminating stage 12 and presses the dry film 4001 and the wafer 600 tightly so that the area is larger than the surface size of the wafer 600. The dry film 4001 is bonded to the wafer 600, and the laminating drive mechanism 13 drives the first laminating stage 11 away from the second laminating stage 12 so that there is a sufficient gap between the first laminating stage 11 and the second laminating stage 12, that is, the above-mentioned laminating processing chamber 500 is formed, and the mobile driving component 32 drives the cutting component 31 to extend into the laminating processing chamber 500, and the cutting component 31 cuts the dry film 4001 along the boundary of the wafer 600, so that the wafer 600 covered with the dry film 4001 is separated from the dry film 4001 as a whole, thereby realizing the laminating process of the product and removing the dry film 4001 outside the product boundary.

[0038] Further, see Figure 3-Figure 4 As another specific embodiment of the film laminating machine provided by the present invention, the film laminating device 1 also includes a clamping assembly 14 arranged on the first film laminating stage 11, a sealing ring 15 arranged on the second film laminating stage 12 and used to contact the first film laminating stage 11, a vacuum pump, and a vacuum tube 16 connected to the vacuum pump; the second film laminating stage 12 is provided with a vacuum hole 121, the vacuum hole 121 is communicated with the vacuum tube 16, and the vacuum hole 121 is located within the boundary range of the sealing ring 15. The film pressing drive mechanism 13 drives the first film pressing stage 11 to move and abut against the sealing ring 15 on the second film pressing stage 12. The vacuum pump extracts the air between the first film pressing stage 11 and the second film pressing stage 12 through the vacuum tube 16, so that a near-vacuum state is formed between the first film pressing stage 11 and the second film pressing stage 12. At this time, the film pressing drive mechanism 13 can continue to drive the first film pressing stage 11 to press the dry film 4001 and the wafer 600 (the pressing component 14 on the first film pressing stage 11 can also be used to directly apply force to the dry film 4001 and the wafer 600 to press the dry film 4001 and the wafer 600). Moreover, since a near-vacuum state is formed between the first film pressing stage 11 and the second film pressing stage 12, bubbles are avoided between the wafer 600 and the dry film 4001 after the dry film 4001 is attached to the wafer 600, thereby improving the film-sticking effect of the dry film 4001.

[0039] Further, see Figure 3As another specific embodiment of the film laminating machine provided by the present invention, the film pressing drive mechanism 13 includes a film pressing lift rod 131 connected to the first film pressing stage 11, a film pressing lift plate 132 connected to the end of the film pressing lift rod 131 away from the first film pressing stage 11, a film pressing lift cylinder 133 whose movable end is connected to the film pressing lift plate 132, and a film pressing fixed plate 134 connected to the fixed end of the film pressing lift cylinder 133. The film pressing drive mechanism 13 also includes a film pressing guide rod 135 provided on the film pressing fixed plate 134. The film pressing lift plate 132 has a film pressing guide hole for the film pressing guide rod 135 to pass through. The film pressing lift cylinder 133 drives the film pressing lift plate 132 to move, thereby driving the first film pressing stage 11 connected to the film pressing lift plate 132 via the film pressing lift rod 131 to move, so that the first film pressing stage 11 completes the movement relative to the second film pressing stage 12.

[0040] Further, see Figure 3-Figure 4 As another specific embodiment of the film laminating machine provided by the present invention, the film laminating device 1 also includes a clamping assembly 14 arranged on the first film laminating platform 11, a locking drive 17 arranged on the film laminating fixing plate 134, and a locking block 18 arranged at the output end of the locking drive 17 and used to limit the film laminating lifting plate 132 from moving along the axial direction of the film laminating lifting rod 131; the locking block 18 is provided with a locking clearance groove 181; the film laminating lifting plate 132 is provided with a first locking protrusion 1321; the film laminating fixing plate 134 is provided with a second locking protrusion 1341; the film laminating device 1 also includes a film laminating guide rail 19 slidably connected to the second film laminating platform 12, and a loading and unloading drive assembly (which can be a combination of a motor and a screw pair or a cylinder) for driving the second film laminating platform 12 to slide along the film laminating guide rail 19. The film pressing drive mechanism 13 drives the first film pressing stage 11 to move and approach the second film pressing stage 12, so that the pressing assembly 14 on the first film pressing stage 11 contacts the dry film 4001 placed on the surface of the wafer 600 on the second film pressing stage 12. At this time, the locking drive member 17 drives the locking block 18 to extend, so that the film pressing lifting plate 132 is located between the film pressing fixing plate 134 and the locking block 18. The film pressing lifting plate 132 cannot move along the axis direction of the film pressing lifting rod 131. Then the pressing assembly 14 applies pressure to the dry film 4001 to press the dry film 4001 and the wafer 600 tightly together. The pressing assembly 14 applies pressure to the dry film 4001. When the film is pressed, the dry film 4001 placed on the second laminating table 12 exerts a reaction force on the clamping assembly 14, and makes the clamping assembly 14 connected to the first laminating table 11 tend to move away from the dry film 4001. However, since the locking drive 17 drives the locking block 18 to extend, the laminating lifting plate 132 is restricted from moving along the axial direction of the laminating lifting rod 131. Therefore, the first laminating table 11 connected to the laminating lifting plate 132 through the laminating lifting rod 131 will not move, that is, the clamping assembly 14 will not move after receiving the reaction force, so that the clamping assembly 14 continues to exert a large and stable pressure on the dry film 4001, ensuring the film laminating effect.

[0041] The locking drive member 17 is a locking drive cylinder 3152. The extension and retraction of the piston rod of the locking drive cylinder 3152 drives the locking block 18 to move. The locking drive member 17 drives the locking block 18 to move, causing the first locking protrusion 1321 on the film pressing lifting plate 132 to enter the locking clearance groove 181 of the locking block 18. At the same time, the second locking protrusion 1341 on the film pressing fixed plate 134 enters the locking clearance groove 181 of the locking block 18. The first locking protrusion 1321 and the second locking protrusion 1341 are respectively at opposite ends of the locking clearance groove 181. That is, when the first locking protrusion 1321 on the film pressing lifting plate 132 applies a pulling force to the locking block 18 and has a tendency to move, the second locking protrusion 1341 on the film pressing fixed plate 134 presses against the locking block 18, thereby enhancing the locking block 18's limiting effect on the entire film pressing lifting plate 132.

[0042] Further, see Figure 4 As another specific embodiment of the laminating machine provided by the present invention, the pressing assembly 14 includes a laminating airbag 141 provided on the first laminating stage 11, a laminating air tube 142 communicating with the laminating airbag 141, and an air pump connected to the laminating air tube 142. The pressing assembly 142 presses the dry film 4001 and the wafer 600 in the following manner: the air pump inflates the laminating airbag 141 through the laminating air tube 142. After inflation, the laminating airbag 141 expands and tightly presses the dry film 4001 onto the wafer 600. Because the laminating airbag 141 is filled with gas, the pressure applied by the laminating airbag 141 to the dry film 4001 and the wafer 600 at all locations is substantially the same, ensuring that all locations of the dry film 4001 are well bonded to the wafer 600, avoiding the problem of poor local bonding and thereby improving the bonding effect of the dry film 4001 to the wafer 600.

[0043] Further, see Figure 4As another specific embodiment of the laminating machine provided by the present invention, the first laminating stage 11 has a first heating chamber, in which a first heating assembly is provided; the first heating assembly includes a first heating element, a first heat-conducting element connected to the side of the first heating element close to the second laminating stage 12, and a first heat-insulating element connected to the side of the first heating element away from the first heat-conducting element; the second laminating stage 12 has a second heating chamber, in which a second heating assembly is provided; the second heating assembly includes a second heating element, a second heat-conducting element connected to the side of the second heating element close to the first laminating stage 11, and a second heat-insulating element connected to the side of the second heating element away from the second heat-conducting element. After the dry film 4001 is separated from the base film 4002, the dry film 4001 is bonded to the wafer 600 through its own glue. In order to prevent the glue from hardening after the dry film 4001 is separated from the base film 4002 and affecting the effect of the dry film 4001 being attached to the wafer 600, a first heating assembly is provided to heat the dry film 4001 to alleviate the hardening of the glue. The heat generated by the first heating element is transferred to the laminating airbag 141 through the first heat conducting element and heats the dry film 4001. A first heat insulating element is provided on the side of the first heating element away from the first heat conducting element to prevent the heat generated by the first heating element from being transferred to other locations, thereby improving the utilization rate of heat. A second heating component is provided in the second laminating stage 12 to heat the second laminating stage 12, and then cooperates with the first heating component in the first laminating stage 11 to heat the wafer 600 and the dry film 4001 to relieve the hardening of the glue. The heat generated by the second heating element is transferred to the second laminating stage 12 through the second heat conducting element, so that the wafer 600 and the dry film 4001 placed on the second laminating stage 12 are heated. A second heat insulating element is provided on the side of the second heating element away from the first laminating stage 11 to prevent heat from being transferred in a direction away from the first laminating stage 11, thereby improving the utilization rate of heat.

[0044] Further, see Figure 5 As another specific embodiment of the film laminating machine provided by the present invention, the film placing device 2 includes a film feeding sliding seat 21, a raw film supplying assembly 22 arranged on the film feeding sliding seat 21 and used to supply the raw film 400, and a film separating assembly 23 arranged on the film feeding sliding seat 21 and used to separate the raw film 400 into a dry film 4001 and a base film 4002; the film separating assembly 23 includes a film separating frame 231, a film feeding tensioning roller 232 rotatably connected to the film separating frame 231, and a film separating roller 233 rotatably connected to the film separating frame 231. The raw film supply component 22 is used to transport the raw film 400 to the film separation component 23. The raw film 400 is separated at the film separation roller 233 of the film separation component 23. After the raw film 400 passes through the film separation roller 233, the bottom film 4002 moves in the opposite direction to separate from the dry film 4001. The dry film 4001 separated from the bottom film 4002 continues to move to the film processing chamber 500 for bonding with the wafer 600.

[0045] Further, see Figure 5 As another specific embodiment of the film laminating machine provided by the present invention, the film placing device 2 also includes a film separating lifting drive component 24 for driving the film separating component 23 to move in the vertical direction; the film separating lifting drive component 24 includes a film separating connecting rod 241 connected to the film feeding sliding seat 21, a film separating fixing plate 242 connected to the film separating connecting rod 241, a film separating lifting rod 243 that passes through the film feeding sliding seat 21 and is slidably connected to the film feeding sliding seat 21, a film separating lifting plate 244 connected to the film separating lifting rod 243, and a film separating lifting drive component 245 (which can be a cylinder) provided on the film separating fixing plate 242; the film separating frame 231 is connected to the end of the film separating lifting rod 243 away from the film separating lifting plate 244, and the film separating lifting plate 244 is connected to the output end of the film separating lifting drive component 245. During the movement of the dry film 4001, the film separation lifting drive 245 drives the film separation lifting plate 244 to move upward along the axis of the film separation lifting rod 243. The film separation assembly 23 connected to the other end of the film separation lifting rod 243 moves upward synchronously with the film separation lifting plate 244, thereby driving the entire film separation assembly 23 to move upward, and then raising the film separation assembly 23 to a certain height. The dry film 4001 separated by the film separation assembly 23 moves a certain distance above the surface of the wafer 600, preventing the dry film 4001 from touching the wafer 600 during movement, thereby causing the wafer 600 to deviate from the film application position. When the new dry film 4001 is directly above the wafer 600, the film separation assembly 23 is lowered as a whole to make contact between the dry film 4001 and the wafer 600.

[0046] Further, see Figure 5 As another specific embodiment of the film laminating machine provided by the present invention, the film placing device 2 also includes a film feeding slide rail 25 slidably connected to the film feeding sliding seat 21, and a film feeding sliding drive assembly for driving the film feeding sliding seat 21 to slide; the film placing device 2 also includes a base film winding assembly 26 provided on the film feeding sliding seat 21 and used to wind up the base film 4002, and a waste film winding assembly 27 coordinated with the raw film supply assembly 22. The raw film 400 includes a dry film 4001 and a base film 4002 covering the surface of the dry film 4001. The raw film 400 is wound on the raw film supply assembly 22. The base film 4002, separated from the dry film 4001, is wound on the base film take-up assembly 26. After the dry film 4001 is bonded to the wafer 600 in the film lamination chamber 500, a cutting mechanism can cut the dry film 4001 along the edge of the wafer 600. The wafer 600 is separated from the dry film 4001. The cut portion of the dry film 4001 becomes waste film 40011 and is taken up by the waste film take-up assembly 27. The raw film 400 is separated at the film separation roller 233. After the raw film 400 passes through the film separation roller 233, the base film 4002 moves in the opposite direction to separate from the dry film 4001.

[0047] The film feeding sliding drive assembly (which can be a motor and a screw pair or a cylinder) drives the film feeding sliding seat 21 to move along the film feeding slide rail 25 so that the film separation assembly 23 enters the film processing chamber 500 (the gap between the first film pressing table 11 and the second film pressing table 12), and the waste film winding assembly 27 fixes the dry film 4001 away from one end of the raw film supply assembly 22. The film feeding sliding drive assembly drives the film feeding sliding seat 21 to move along the film feeding slide rail 25 and causes the film separation assembly 23 to gradually leave the film processing chamber 500; while the film feeding sliding seat 21 moves, the raw film supply assembly 22 releases the raw film 400, and the bottom film winding assembly 26 works to wind up the bottom film 4002 so that the bottom film 4002 is separated from the dry film 4001. Since the waste film winding assembly 27 fixes the dry film 4001 is fixed at one end away from the raw material film supply component 22, so the dry film 4001 will not move relative to the film processing chamber 500, so the dry film 4001 is separated from the base film 4002 in the film processing chamber 500, and when the film separation component 23 on the film feeding sliding seat 21 completely leaves the film processing chamber 500, the dry film 4001 in the film processing chamber 500 is separated from the base film 4002. At this time, the first film pressing station 11 and the second film pressing station 12 immediately act to fit the dry film 4001 to the wafer 600, reducing the time for the dry film 4001 to move to the film processing chamber 500 after separation from the base film 4002, avoiding the hardening of the glue on the dry film 4001, and improving the bonding effect between the dry film 4001 and the wafer 600.

[0048] Further, see Figure 6As another specific embodiment of the film laminating machine provided by the present invention, the film placing device 2 also includes a film feeding auxiliary mechanism 28 that cooperates with the raw film supply assembly 22; the film feeding auxiliary mechanism 28 includes an auxiliary mounting seat 281, an auxiliary connecting rod 282 connected to the auxiliary mounting seat 281, an auxiliary fixing plate 283 connected to the auxiliary connecting rod 282, an auxiliary lifting rod 284 that passes through the auxiliary mounting seat 281 and is slidably connected to the auxiliary mounting seat 281, an auxiliary lifting seat 285 connected to one end of the auxiliary lifting rod 284, an auxiliary lifting plate 286 connected to the other end of the auxiliary lifting rod 284, a first auxiliary guide roller 287 provided on the auxiliary lifting seat 285, and an auxiliary lifting drive member 288 (which can be a cylinder) provided on the auxiliary fixing plate 283 and used to drive the auxiliary lifting plate 286 to move along the axial direction of the auxiliary lifting rod 284. After the raw material film 400 transported by the raw material film supply component 22 is separated by the film separation component 23, the dry film 4001 enters the film processing chamber 500 to complete the bonding with the wafer 600. The dry film 4001 that is partially cut off forms a waste film 40011 that passes through the film processing chamber 500 and passes through the film feeding auxiliary mechanism 28. The film feeding auxiliary mechanism 28 lifts the waste film 40011 as a whole to a certain height (consistent with the height of the film separation component 23), so that the dry film 4001 and the waste film 40011 at both ends of the film processing chamber 500 are higher than the wafer 600 by a certain height, further avoiding the dry film 4001 and the waste film 40011 from contacting the wafer 600 when moving, that is, ensuring that the dry film 4001 and the waste film 40011 formed by the partial cutting of the dry film 4001 touch the wafer 600 when moving, avoiding the situation where the wafer 600 deviates from the film bonding position.

[0049] Further, see Figure 1 and Figure 6As another specific embodiment of the film laminating machine provided by the present invention, the film feeding auxiliary mechanism 28 also includes a second auxiliary guide roller 289 provided on the auxiliary lifting seat 285, and the second auxiliary guide roller 289 is rotatably connected to the auxiliary lifting seat 285; the auxiliary lifting seat 285 is provided with two relatively arranged leveling components 29, the leveling component 29 includes a leveling guide rail 291 provided on the auxiliary lifting seat 285, a leveling block 292 slidably connected to the leveling guide rail 291, a leveling driving member for driving the leveling block 292 to slide, a leveling cylinder 293 provided on the leveling block 292, and a leveling pressure plate 294 connected to the movable end of the leveling cylinder 293 and matched with the first auxiliary guide roller 287; the surface of the leveling pressure plate 294 in contact with the first auxiliary guide roller 287 has a leveling groove, and the first auxiliary guide roller 287 is provided with a leveling flexible member 2871 in contact with the leveling pressure plate 294. The auxiliary lifting base 285 is also equipped with a second auxiliary guide roller 289 that cooperates with the first auxiliary guide roller 287. As the dry film 4001 moves, it contacts the top of the first auxiliary guide roller 287 and the bottom of the second auxiliary guide roller 289. The dry film 4001 winds its way through the first and second auxiliary guide rollers 287 and 289, increasing the tension of the dry film 4001 during movement. The dry film 4001 (or waste film 40011) is prone to wrinkling during movement. The flattening assembly 29 is used to flatten wrinkled dry film 4001. Specifically, the flattening cylinder 293 drives the flattening plate 294 to move and press against the dry film 4001, positioning it between the flattening plate 294 and the first auxiliary guide roller 287. The two flattening drive elements on the flattening assembly 29 respectively drive the two flattening cylinders 293 in opposite directions, applying tension to the opposing sides of the dry film 4001, thereby flattening the wrinkled dry film 4001. The flattening flexible member 2871 has a certain friction force. When the flattening plate 294 flattens the dry film 4001 , the dry film 4001 does not slide along the first auxiliary guide roller 287 . The flattening plate 294 only flattens the dry film 4001 .

[0050] In an embodiment of the present invention, the raw film supply assembly 22 includes a first air-expanding shaft and a raw film 400 supply driver (which may be a motor) for driving the first air-expanding shaft to rotate. The raw film 400 is wound around the first air-expanding shaft, and the raw film 400 supply driver drives the first air-expanding shaft to rotate, thereby releasing the raw film 400 from the first air-expanding shaft, thereby supplying the raw film 400. The base film winding assembly 26 includes a second air-expanding shaft and a base film 4002 winding driver (which may be a motor) for driving the second air-expanding shaft to rotate. The base film 4002 is wound around the second air-expanding shaft, and the base film 4002 winding driver drives the second air-expanding shaft to rotate, thereby winding the base film 4002. The waste film winding assembly 27 includes a third air expansion shaft and a waste film 40011 winding drive (which can be a motor) for driving the third air expansion shaft to rotate; after the dry film 4001 is adhered to the wafer 600, it is cut along the boundary of the wafer 600 by the cutting mechanism, and part of the cut dry film 4001 forms the waste film 40011, and the waste film 40011 is wound on the third air expansion shaft, and the waste film 40011 winding drive drives the third air expansion shaft to rotate to achieve the winding of the waste film 40011.

[0051] Further, see Figure 7As another specific embodiment of the film laminating machine provided by the present invention, the mobile driving component 32 includes a support table 321, a first driving module 322 arranged on the support table 321, a second driving module 323 connected to the output end of the first driving module 322, and a third driving module 324 connected to the output end of the second driving module 323; the cutting component 31 includes a cutting fixed table 311 connected to the output end of the third driving module 324, a cutter assembly 312, and a cutting driving component 313 arranged on the cutting fixed table 311 and used to drive the cutter assembly 312 to complete the cutting action (which can be a driving member in the prior art that drives the cutter assembly 312 to complete a linear, circular or curved motion to complete the cutting action). The film cutting process of the film cutting device 3 is as follows: the moving driving component 32 drives the cutting component 31 to extend into the film processing cavity 500 (the gap between the first film pressing table 11 and the second film pressing table 12), and the cutting component 31 cuts the film of the wafer 600 that has completed the film pressing and is waiting to be cut, and cuts the dry film 4001 along the boundary of the product to be cut to separate the wafer 600 and the dry film 4001. That is, the cutting of the dry film 4001 can be completed without pulling the wafer 600 and the dry film 4001 away from the gap between the upper cavity and the lower cavity, which simplifies the film cutting steps and improves the efficiency of film cutting. Specifically, the second driving module 323 can drive the third driving module 324 to extend into the film processing chamber 500, so that the cutting component 31 connected to the output end of the third driving module 324 is located in the film processing chamber 500, and completes the cutting of the dry film 4001 at the boundary of the wafer 600. The first driving module 322 can drive the second driving module 323 to multiple processing positions. Therefore, for the situation where multiple wafers 600 are simultaneously film-laminated in the film processing chamber 500, the film cutting can be completed for multiple wafers 600 in sequence.

[0052] Further, see Figure 8As another specific embodiment of the film laminating machine provided by the present invention, the cutting assembly 31 also includes a mounting plate 314 arranged between the cutting drive assembly 313 and the cutter assembly 312, and the cutter assembly 312 is rotatably connected to the mounting plate 314; the cutting assembly 31 also includes a film breaking drive assembly 315 for driving the cutter assembly 312 to rotate relative to the mounting plate 314 so that the cutter assembly 312 abuts against the boundary of the product to be cut. In the initial state of the cutting assembly 31, the cutter assembly 312 is tilted away from the product to be cut, and the cutter assembly 312 is positioned above the dry film 4001 with a small gap. The film-breaking drive assembly 315 drives the cutter assembly 312 to rotate toward the product to be cut. The rotation of the cutter assembly 312 has two sub-movements: horizontal and vertical. The vertical sub-movement causes the cutter assembly 312 to cut the dry film 4001 and lower the end of the cutter assembly 312 below the product to be cut. The horizontal sub-movement causes the cutter assembly 312 to move toward the product to be cut until it abuts the edge of the product to be cut. Therefore, the cutter assembly 312 can abut the edge of the product to be cut after being below the product to be cut, without damaging the product to be cut. Compared to the method in which the cutter assembly 312 directly moves downward from the vertical direction to cut the dry film 4001 and abut the edge of the product to be cut, this method can avoid damaging the product to be cut when the cutter assembly 312 directly moves downward from the vertical direction. The mounting plate 314 can be connected to the output end of the cutting drive assembly 313 through a connecting plate.

[0053] Further, see Figure 8 As another specific embodiment of the film laminating machine provided by the present invention, the cutter assembly 312 includes a cutter holder 3121 rotatably connected to a mounting plate 314, and a cutter 3122 fixedly mounted to the cutter holder 3121. Rotation of the cutter holder 3121 relative to the mounting plate 314 drives the cutter 3122 to rotate. Alternatively, the cutter assembly 312 may be directly rotatably connected to the mounting plate 314. The cutter 3122 has an inclined blade and is provided with multiple mounting positions connected to the cutter holder 3121 to adjust the length of the cutter 3122 extending from the cutter holder 3121.

[0054] Further, see Figure 8 As another specific embodiment of the film laminating machine provided by the present invention, the film breaking drive assembly 315 includes a rotating block 3151 rotatably connected to the knife holder 3121, and a driving cylinder 3152 whose movable end is connected to the rotating block 3151; the fixed end of the driving cylinder 3152 is rotatably connected to the mounting plate 314; the process of the film breaking drive assembly 315 driving the cutter assembly 312 to rotate is: the extension and retraction process of the movable end of the driving cylinder 3152 drives the movement of the rotating block 3151, and the movement of the rotating block 3151 drives the cutter assembly 312 to rotate.

[0055] Further, see Figure 8 As another specific embodiment of the film laminating machine provided by the present invention, a first rotating seat is provided on the knife seat 3121; the rotating block 3151 is rotatably connected to the first rotating seat; the first rotating seat can be two guide plates arranged opposite to each other and at intervals, and a rotating shaft can be provided between the rotating block 3151 and the guide plate of the first rotating seat to realize the rotating connection.

[0056] Further, see Figure 8 In another embodiment of the laminating machine provided by the present invention, a second rotating base is provided on the mounting plate 314; the fixed end of the driving cylinder 3152 is rotatably connected to the second rotating base. The second rotating base can be two guide plates arranged opposite and spaced apart, and a rotating shaft can be provided between the fixed end of the driving cylinder 3152 and the guide plates of the second rotating base to achieve the rotational connection.

[0057] It should be noted that the solution in another specific implementation manner may be a further improved implementation scheme based on other embodiments.

[0058] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Those skilled in the art will appreciate that other variations or modifications can be made based on the above description. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. Film laminating machine, characterized in that, The film laminating device comprises a film laminating device, a film placing device for supplying dry film to the film laminating device, and a film cutting device; the film laminating device comprises a first film laminating table, a second film laminating table arranged opposite to the first film laminating table and for placing the product to be laminarized, and a film laminating drive mechanism for driving the first film laminating table to move relative to the second film laminating table to complete the film laminating action; the film cutting device comprises a cutting assembly and a moving drive assembly for driving the cutting assembly to move to complete cutting of the dry film outside the boundary of the product to be laminarized; The film placing device includes a film feeding sliding seat and a film separation component provided on the film feeding sliding seat and used for separating the raw material film into a dry film and a base film; the film separation component includes a film separation frame; The film-laying device also includes a film-splitting lifting drive assembly for driving the film-splitting assembly to move in a vertical direction; the film-splitting lifting drive assembly includes a film-splitting connecting rod connected to the film-feeding sliding seat, a film-splitting fixing plate connected to the film-splitting connecting rod, a film-splitting lifting rod that passes through the film-feeding sliding seat and is slidably connected to the film-feeding sliding seat, a film-splitting lifting plate connected to the film-splitting lifting rod, and a film-splitting lifting drive component provided on the film-splitting fixing plate; the film-splitting frame is connected to one end of the film-splitting lifting rod away from the film-splitting lifting plate, and the film-splitting lifting plate is connected to the output end of the film-splitting lifting drive component; The film separation lifting drive component drives the film separation lifting plate to move upward along the axial direction of the film separation lifting rod, and the film separation assembly connected to the other end of the film separation lifting rod moves upward synchronously with the film separation lifting plate, thereby driving the entire film separation assembly to move upward, and then raising the film separation assembly to a certain height, so that the dry film separated by the film separation assembly moves a certain distance above the surface of the product to be film-attached.

2. The film laminating machine according to claim 1, characterized in that: The film laminating device also includes a clamping assembly arranged on the first film laminating platform, a sealing ring arranged on the second film laminating platform and used to contact the first film laminating platform, a vacuum pump, and a vacuum tube connected to the vacuum pump; the second film laminating platform is provided with a vacuum hole, the vacuum hole is communicated with the vacuum tube, and the vacuum hole is located within the boundary range of the sealing ring.

3. The film laminating machine according to claim 1, characterized in that: The film pressing drive mechanism includes a film pressing lifting rod connected to the first film pressing platform, a film pressing lifting plate connected to the end of the film pressing lifting rod away from the first film pressing platform, a film pressing lifting cylinder whose movable end is connected to the film pressing lifting plate, and a film pressing fixed plate connected to the fixed end of the film pressing lifting cylinder.

4. The film laminating machine according to claim 3, characterized in that: The film laminating device also includes a clamping assembly arranged on the first film laminating platform, a locking drive member arranged on the film laminating fixing plate, and a locking block arranged at the output end of the locking drive member and used to limit the movement of the film laminating lifting plate along the axial direction of the film laminating lifting rod.

5. The film laminating machine according to claim 2 or 4, characterized in that: The pressing assembly includes a lamination air bag arranged on the first lamination platform, a lamination air tube communicating with the lamination air bag, and an air pump connected to the lamination air tube.

6. The film laminating machine according to any one of claims 1 to 4, characterized in that: The film placing device includes a raw film supply assembly provided on the film feeding sliding seat and used for supplying raw film; the film separating assembly includes a film feeding tensioning roller rotatably connected to the film separating frame, and a film separating roller rotatably connected to the film separating frame.

7. The film laminating machine according to claim 6, characterized in that: The film unwinding device also includes a film feeding slide rail slidably connected to the film feeding sliding seat, and a film feeding sliding drive assembly for driving the film feeding sliding seat to slide; the film unwinding device also includes a bottom film winding assembly provided on the film feeding sliding seat and used to wind up the bottom film, and a waste film winding assembly coordinated with the raw film supply assembly.

8. The film laminating machine according to any one of claims 1 to 4, characterized in that: The mobile driving assembly includes a support platform, a first driving module provided on the support platform, a second driving module connected to an output end of the first driving module, and a third driving module connected to an output end of the second driving module; The cutting assembly includes a cutting fixing table connected to the output end of the third driving module, a cutter assembly, and a cutting driving assembly disposed on the cutting fixing table and used to drive the cutter assembly to complete the cutting action.

9. The film laminating machine according to claim 8, characterized in that: The cutting assembly also includes a mounting plate arranged between the cutting drive assembly and the cutter assembly, and the cutter assembly is rotatably connected to the mounting plate; the cutting assembly also includes a film breaking drive assembly for driving the cutter assembly to rotate relative to the mounting plate so that the cutter assembly abuts against the boundary of the product to be cut.

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