A valve sealing device for flat-plate PECVD equipment

Abstract

The present invention discloses a valve sealing device for flat-plate PECVD equipment, comprising a valve body, a valve plate, a sealing ring mounted on the valve plate, and a rotating shaft for driving the valve plate to open and close. A first connecting member is fixed to the valve plate, a second connecting member is fixed to the rotating shaft, a connecting pin is fixed to the second connecting member, and a vertical waist-shaped hole is provided in the first connecting member, in which the connecting pin is mounted. This device has the advantages of a simple and reliable structure, and helps prevent torsional damage to the sealing ring.

Description

Technical Field

[0001] The present invention relates to a flat-plate PECVD device, in particular to a valve sealing device for the flat-plate PECVD device. Background Art

[0002] The existing flat-plate PECVD equipment adopts a multi-chamber series structure, and the workpiece moves continuously from one end of the equipment to the other end to complete the entire thin film growth process. Each cavity of the equipment performs different functions, and each cavity needs to work independently. Therefore, each cavity needs to be effectively isolated. Due to the large width of the cavity and the short process time in each cavity, the isolation between each cavity is mostly sealed and isolated by a rotary flap valve. A sealing ring is installed on the valve plate of the valve to ensure the sealing when closed. As the production rhythm accelerates, the valve plate needs to be opened and closed frequently. Since the valve plate is a rotating structure, the sealing ring on the valve plate will be subjected to tangential force when closed, which can easily cause the sealing ring to twist, resulting in a short service life of the sealing ring and the need for frequent replacement. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide a flat-plate PECVD equipment valve sealing device which has a simple and reliable structure and is conducive to preventing the sealing ring from being damaged by torsion.

[0004] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0005] A flat-plate PECVD equipment valve sealing device includes a valve body, a valve plate, a sealing ring arranged on the valve plate, and a rotating shaft for driving the valve plate to open and close. A first connecting member is fixed on the valve plate, a second connecting member is fixed on the rotating shaft, a connecting pin is fixed on the second connecting member, a vertical waist-shaped hole is provided on the first connecting member, and the connecting pin is arranged in the waist-shaped hole.

[0006] As a further improvement of the above technical solution: there are multiple second connecting members and they are arranged along the axial direction of the rotating shaft, and there are multiple first connecting members and they are arranged in a one-to-one correspondence with the multiple second connecting members.

[0007] As a further improvement of the above technical solution: the sealing ring is a hollow inflatable sealing ring.

[0008] Compared with the prior art, the advantages of the present invention are: the flat-plate PECVD equipment valve sealing device disclosed in the present invention adopts a rotary seal. During operation, the rotating shaft rotates, driving the second connecting member and the connecting pin to swing, and the connecting pin drives the first connecting member and the valve plate to rotate around the axis of the rotating shaft, and presses the valve plate tightly onto the valve body. The deformation of the sealing ring is used to fill the gap between the valve body and the valve plate. Since the connecting pin is inserted into the vertical waist-shaped hole, the vertical displacement of the first connecting member and the valve plate can be eliminated, thereby preventing the sealing ring from torsional damage. The structure is simple and reliable, which is conducive to extending the service life of the sealing ring. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 It is a structural schematic diagram of the valve sealing device of the flat-plate PECVD equipment of the present invention.

[0010] Figure 2 yes Figure 1 A partial enlarged view of .

[0011] The reference numerals in the figure indicate: 1, valve body; 2, valve plate; 21, first connecting member; 22, waist-shaped hole; 3, sealing ring; 4, rotating shaft; 41, second connecting member; 42, connecting pin. DETAILED DESCRIPTION

[0012] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0013] Figure 1 An embodiment of the present invention is shown. The valve sealing device of the flat-plate PECVD equipment of this embodiment includes a valve body 1, a valve plate 2, a sealing ring 3 arranged on the valve plate 2, and a rotating shaft 4 for driving the valve plate 2 to rotate. A first connecting member 21 is fixedly provided on the valve plate 2, a second connecting member 41 is fixedly provided on the rotating shaft 4, a connecting pin 42 is fixedly provided on the second connecting member 41, a vertical waist-shaped hole 22 is provided on the first connecting member 21, and the connecting pin 42 is arranged in the waist-shaped hole 22.

[0014] The valve sealing device of the flat-plate PECVD equipment adopts a rotary seal. When working, the rotating shaft 4 rotates, driving the second connecting member 41 and the connecting pin 42 to swing, and the connecting pin 42 drives the first connecting member 21 and the valve plate 2 to rotate together, and presses the valve plate 2 onto the valve body 1. The sealing ring 3 is used to fill the gap between the valve body 1 and the valve plate 2. Since the connecting pin 42 is inserted into the vertical waist-shaped hole 22, the vertical displacement of the first connecting member 41 and the valve plate 2 can be eliminated, thereby preventing the sealing ring 3 from torsional damage. The structure is simple and reliable, which is conducive to extending the service life of the sealing ring 3.

[0015] Furthermore, in this embodiment, multiple second connecting members 41 are provided and arranged along the axial direction of the rotating shaft 4, and multiple first connecting members 21 are provided and arranged one-to-one with the multiple second connecting members 41. The rotating shaft 4 applies pressure to the valve plate 2 at multiple points, so that the force on the valve plate 2 and the sealing ring 3 is more balanced.

[0016] Furthermore, in this embodiment, the sealing ring 3 is a hollow inflatable sealing ring. When the valve plate 2 is pressed against the valve body 1, the hollow inflatable sealing ring can undergo significant deformation, preventing hard contact between the valve plate 2 and the sealing ring 3, thereby helping to further increase the service life of the sealing ring 3. At the same time, when the sealing ring 3 is inflated, it also has good sealing performance (preferably, the hollow inflatable sealing ring is inflated after the valve plate 2 is fully closed).

[0017] Although the present invention has been disclosed above with reference to preferred embodiments, this is not intended to limit the present invention. Any person skilled in the art can, without departing from the scope of the technical solution of the present invention, utilize the technical content disclosed above to make many possible changes and modifications to the technical solution of the present invention, or modify it into an equivalent embodiment with equivalent changes. Therefore, any simple modification, equivalent change, and modification made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention shall fall within the scope of protection of the technical solution of the present invention.

Claims

1. A valve sealing device for a flat-plate PECVD device, characterized by: The utility model comprises a valve body (1), a valve plate (2), a sealing ring (3) provided on the valve plate (2), and a rotating shaft (4) for driving the valve plate (2) to open and close, wherein a first connecting member (21) is fixedly provided on the valve plate (2), a second connecting member (41) is fixedly provided on the rotating shaft (4), a connecting pin (42) is fixedly provided on the second connecting member (41), and when the rotating shaft (4) rotates, the second connecting member (41) and the connecting pin (42) can be driven to swing, a vertical waist-shaped hole (22) is provided on the first connecting member (21), and the connecting pin (42) is provided in the waist-shaped hole (22). When the valve plate (2) is pressed against the valve body (1), a gap is formed between the connecting pin (42) and the upper and lower ends of the waist-shaped hole (22), so as to eliminate the vertical displacement of the first connecting member (21) and the valve plate (2).

2. The valve sealing device of the flat-plate PECVD equipment according to claim 1, characterized in that: The second connecting members (41) are provided in plurality and are arranged along the axial direction of the rotating shaft (4); the first connecting members (21) are provided in plurality and are arranged in a one-to-one correspondence with the plurality of second connecting members (41).

3. The valve sealing device of the flat-plate PECVD equipment according to claim 1 or 2, characterized in that: The sealing ring (3) is a hollow inflatable sealing ring.

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