Method and equipment for manufacturing zinc oxide, titanium oxide and nickel oxide quantum dots in same cavity

A zinc oxide and titanium oxide technology, applied in gaseous chemical plating, metal material coating process, coating, etc., can solve the problems of transfer, difficult to further promote the industrialization and large-scale application of quantum dots, and ex-situ manufacturing.

CN111826636AActive Publication Date: 2020-10-27NANJING INST OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
Publication Date
2020-10-27

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Abstract

The embodiment of the invention discloses a method and equipment for manufacturing zinc oxide, titanium oxide and nickel oxide quantum dots in the same cavity, relates to the technical field of new energy, and is convenient for industrialization and large-scale application of the quantum dots. The method comprises the following steps of: putting a sample substrate into a reaction cavity, and starting a vacuum system to vacuumize the reaction cavity; inputting -OH organic matter gas into the reaction cavity as a -OH plasma gas source; starting a laser processing head to scan the surface of thesample substrate; starting the laser processing head to scan the surface of the sample substrate again; inputting driving gas into the reaction cavity, and starting the laser processing head to scan the surface of the sample substrate for heating; and inputting an O source precursor into the reaction cavity, and starting the laser processing head to heat the surface of the sample substrate, so that the source precursor adsorbed on the surface and the input O source precursor are subjected to chemical reaction to generate a quantum dot array. The method and the equipment are suitable for manufacturing the zinc oxide, titanium oxide and nickel oxide quantum dots.
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Description

technical field

[0001] The invention relates to the field of new energy technology, in particular to a method and equipment for manufacturing zinc oxide, titanium oxide and nickel oxide quantum dots in one cavity. Background technique

[0002] Quantum dots (Quantum Dot, QDs) have a small size (usually below 10nm), due to the size confinement caused the dielectric confinement effect, macroscopic quantum tunneling effect, quantum size effect and surface effect, thus exhibiting the same characteristics as most Different physical and chemical properties of luminescent materials. Quantum dots have good spectral properties, photostability and biocompatibility, etc., and they have emerged in the fields of biological detection, electronic lasers, and light-emitting diodes (Light Emitting Diode, LED). Especially, inorganic semiconductor quantum dots have an important role in the development of LED devices. important role. However, quantum dots such as lead sulfide (PbS), cadmium sul...

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Embodiment Construction

[0027] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. Hereinafter, embodiments of the present invention will be described in detail, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention. Those skilled in the art will understand that unless otherwise stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the word "comprising" used in the description of the present invention refe...