A vacuum chamber sampling system

Abstract

The present invention provides a vacuum chamber sampling system, which is used to solve the technical problems in the prior art that the vacuum chamber sampling system easily destroys the vacuum environment of other chambers and cannot realize atmospheric sampling; it comprises: a transfer chamber and a vacuum sample storage chamber; the vacuum sample storage chamber comprises a first flange, a sample holding device and a first sample transfer device; the first flange is provided with a first valve; the transfer chamber comprises a second flange, a third flange, a vacuum pump, a sample transfer table and a second sample transfer device; in implementing the technical solution of the present invention, the transfer chamber is connected to the vacuum chamber body, a vacuum sample storage chamber is provided, and the transfer chamber, the vacuum sample storage chamber and the external chamber are isolated by a gate valve, so that sampling can be completed without destroying the vacuum environment of the external chamber; a normal pressure sampling door is provided to realize normal pressure sampling; the vacuum sample storage chamber is connected to the transfer chamber through a CF flange, which is detachable, and a portable bracket is provided to realize sample transfer and rapid switching.

Description

Technical Field

[0001] The invention relates to the field of vacuum reaction devices, and in particular to a vacuum chamber sampling system. Background Art

[0002] Vacuum chambers are widely used in the fields of chemistry and physics. Among them, in the fields of surface science, semiconductors, aerospace research, etc. In the prior art, there are mainly two ways to inject samples into the vacuum chamber. One is direct injection, but injection often requires destroying the vacuum environment of the vacuum chamber, and the sample must be placed in the reactor and then re-vacuumed. This experimental method consumes high time and labor costs, and is not suitable for air-sensitive samples. The second is to connect the vacuum chamber containing the sample to the reaction chamber for injection, but this method requires cumbersome installation of the vacuum chamber, and a small amount of air remaining during the installation process will inevitably enter the vacuum chamber, and the sample transfer is more troublesome, and atmospheric sampling cannot be achieved.

[0003] Therefore, a vacuum chamber sampling system is needed that is convenient for sample storage and transfer and can realize atmospheric sampling and vacuum sampling at the same time. Summary of the Invention

[0004] In order to solve the above technical problems, the present invention discloses a vacuum chamber sampling system, and the technical solution of the present invention is implemented as follows:

[0005] A vacuum chamber sampling system comprises: a transfer chamber and a vacuum sample storage chamber; the vacuum sample storage chamber comprises a first flange, a sample holding device and a first sample transfer device; the first flange is provided with a first valve; the transfer chamber comprises a second flange, a third flange, a vacuum pump, a sample transfer table and a second sample transfer device, the sample transfer table is fixed to the second sample transfer device; the vacuum pump is connected to the interior of the vacuum chamber; the third flange is provided with a second valve; the third flange is sealed and fixed to an external reaction chamber; the first flange is detachably fixed to the second flange; the sample holding device is fixed to the first sample transfer device; the first sample transfer device drives the sample holding device to enter the transfer chamber or retract into the vacuum sample storage chamber.

[0006] Preferably, the vacuum chamber sampling system further comprises a normal pressure sampling door, and the transfer chamber further comprises a fourth flange, and the fourth flange is sealed and connected to the normal pressure sampling door.

[0007] Preferably, the third flange is detachably fixed to the external reaction chamber.

[0008] Preferably, the first flange and the second flange are CF flanges.

[0009] Preferably, the first valve and / or the second valve is a gate valve.

[0010] Preferably, the vacuum sample storage chamber is provided with a window flange.

[0011] Preferably, the transfer chamber is provided with a window flange.

[0012] Preferably, the vacuum chamber sampling system further comprises a portable bracket, and the vacuum sample storage chamber is fixed to the portable bracket.

[0013] Preferably, the vacuum chamber sampling system further comprises a vacuum gauge, which measures the internal air pressure of the transfer chamber.

[0014] The implementation of the technical solution of the present invention can solve the technical problems in the prior art that the vacuum chamber sampling system easily destroys the vacuum environment of other chambers and cannot realize atmospheric sampling; by implementing the technical solution of the present invention, the transfer chamber is connected to the vacuum chamber, a vacuum sample storage chamber is set, and the transfer chamber, the vacuum sample storage chamber and the external chamber are isolated by a gate valve, so that sampling can be completed without destroying the vacuum environment of the external cavity; a normal pressure sampling door is set to realize normal pressure sampling; the vacuum sample storage chamber is connected to the transfer chamber through a CF flange, which is detachable, and a portable bracket is set to realize the transfer and rapid switching of samples. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only one embodiment of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0016] Figure 1 A schematic structural diagram of a sample injection system according to a specific embodiment of the present invention;

[0017] Figure 2 The figure is a schematic diagram of the internal structure of the sampling system according to a specific embodiment of the present invention.

[0018] In the above drawings, the figure numbers represent:

[0019] 1-transfer chamber; 2-vacuum sample storage chamber; 3-first flange; 4-sample holding device; 5-first sample transfer device; 6-first valve; 7-second flange; 8-third flange; 9-vacuum pump; 10-sample transfer platform; 11-second sample transfer device; 12-second valve; 13-normal pressure injection door; 14-hand stand; 15-vacuum gauge. DETAILED DESCRIPTION

[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0021] In a specific embodiment of the present invention, a vacuum chamber sampling system, such as Figure 1 and Figure 2 As shown, it includes: a transfer chamber 1 and a vacuum sample storage chamber 2; the vacuum sample storage chamber 2 includes a first flange 3, a sample holding device 4 and a first sample transfer device 5; the first flange 3 is provided with a first valve 6; the transfer chamber 1 includes a second flange 7, a third flange 8, a vacuum pump 9, a sample transfer table 10 and a second sample transfer device 11, and the sample transfer table 10 is fixed to the second sample transfer device 11; the vacuum pump 9 is connected to the interior of the vacuum chamber; the third flange 8 is provided with a second valve 12; the third flange 8 is sealed and fixed to the external reaction chamber; the first flange 3 is detachably fixed to the second flange 7; the sample holding device 4 is fixed to the first sample transfer device 5; the first sample transfer device 5 drives the sample holding device 4 to enter the transfer chamber 1 or retreat to the vacuum sample storage chamber 2.

[0022] In this specific embodiment, both the transfer chamber 1 and the vacuum sample storage chamber 2 are made of stainless steel, which offers high strength and can maintain its shape under high pressure differentials. The vacuum pump 9 can be a combination of a molecular pump and a mechanical pump. The first sample transfer device 5 can be a magnetic structure integrated within the transfer chamber 1. Tracks are provided within the transfer chamber 1. The user can move the external magnets to control the magnetic structure with a manipulator within the transfer chamber 1 to move the sample. The manipulator can grip the sample and store it in the vacuum sample storage chamber 2. The second sample transfer device 11 can be similar in structure to the first sample transfer device 5. The sample transfer platform 10 can be snapped onto the end of the second sample transfer device 11. During the sample loading process, the first flange 3 and the second flange 7 are first sealed together. Next, the transfer chamber 1 is evacuated using the vacuum pump 9. Once the transfer chamber 1 reaches the required vacuum level, the first valve 6 and the second valve 12 are opened, establishing communication between the vacuum sample storage chamber 2, the transfer chamber 1, and the external chamber. Next, the first sample transfer device 5 is used to move the sample to the sample transfer platform 10 and place it there. The second sample transfer device 11 is used to move the sample transfer platform 10 to or past the third flange 8. The sample or the sample transfer device carrying the sample is then loaded using the gripping device in the external chamber. After gripping, the second valve 12 is closed, completing the sample loading. Users can also select the appropriate sample transfer device based on sample type, weight, and other parameters.

[0023] By reversing the above steps, the sample can be transferred from the external reaction chamber to the vacuum sample chamber 2. By closing the first valve 6 and connecting the transfer chamber 1 to the atmosphere, the user can then remove the vacuum sample chamber 2, allowing sample storage and access in an atmospheric environment. The provision of the transfer chamber 1 prevents degassing of the vacuum sample chamber 2 and the external reaction chamber, making it suitable for air-sensitive samples. Furthermore, the detachable vacuum sample chamber 2 allows users to use multiple vacuum sample chambers 2 for sequential sample loading, improving work efficiency.

[0024] In a preferred embodiment, Figure 1 and Figure 2 As shown, the third flange 8 is detachably fixed to the external reaction chamber for easy disassembly. The user can select the appropriate size or type of transfer chamber 1 and second sample transfer device 11 according to the sample type, specifications and other parameters.

[0025] In a preferred embodiment, Figure 1 and Figure 2 As shown, the first flange 3 and the second flange 7 are CF flanges, and knife edges are provided on the edges for metal sealing, which has high sealing degree and is suitable for samples that are extremely sensitive to air. Moreover, the flanges are easy to disassemble, which is beneficial to improving the efficiency of installation and disassembly.

[0026] In a preferred embodiment, Figure 1 and Figure 2 As shown, the first valve 6 and / or the second valve 12 are gate valves. Gate valves are easy to open and close. The edges of the gate valves can be provided with knife edges, and when closed, the metal seals to the cavity, which can improve the reliability of the device.

[0027] In a preferred embodiment, a vacuum chamber sampling system, such as Figure 1 and Figure 2 As shown, the transfer chamber 1 also includes a normal pressure injection door 13, and the transfer chamber 1 also includes a fourth flange, which is sealed and connected to the normal pressure injection door 13. When using the vacuum sample storage chamber 2 for injection, the normal pressure injection door 13 is kept sealed and closed to maintain the vacuum of the transfer chamber 1. When injecting non-air-sensitive samples into the external cavity, the user can open the normal pressure injection door 13, place the sample on the sample transfer table 10 through the normal pressure injection door 13, and then close the normal pressure injection door 13 and evacuate the sample transfer chamber to inject the sample into the external vacuum reaction chamber. In this way, the normal pressure sample injection is completed without destroying the vacuum environment of the external vacuum reaction chamber.

[0028] In a preferred embodiment, the vacuum sample storage chamber 2 is provided with a window flange, such as Figure 1 and Figure 2 As shown, the transfer chamber 1 is provided with a window flange to facilitate the user to observe the sample injection situation.

[0029] In a preferred embodiment, a vacuum chamber sampling system, such as Figure 1 and Figure 2 As shown, a hand-held bracket 14 is also included, and the vacuum sample chamber 2 is fixed to the hand-held bracket 14. The hand-held bracket 14 can be made of stainless steel and is used to hold the vacuum sample chamber 2. A handle is provided to facilitate the user to carry, replace and transfer the vacuum sample chamber 2.

[0030] In a preferred embodiment, a vacuum chamber sampling system, such as Figure 1 and Figure 2 As shown, the device also includes a vacuum gauge 15, which measures the internal air pressure of the transfer chamber 1. This allows the user to monitor the air pressure in the transfer chamber and proceed with subsequent sample transfer operations only after the pressure reaches the required level. A thin film capacitance gauge can be used for this vacuum gauge, which offers high sensitivity and improves device reliability.

[0031] It should be pointed out that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A vacuum chamber sampling system, characterized in that: include: Transfer chamber, multiple vacuum sample storage chambers, multiple portable holders and atmospheric pressure injection door; Each of the vacuum sample storage chambers comprises a first flange, a sample holding device, and a first sample transfer device; the first flange is provided with a first valve; the plurality of vacuum sample storage chambers are respectively fixed to the plurality of portable brackets, and the vacuum sample storage chambers are used to store air-sensitive samples; The transfer chamber includes a second flange, a third flange, a fourth flange, a vacuum pump, a sample transfer table and a second sample transfer device, and the sample transfer table is fixed to the second sample transfer device; The vacuum pump is connected to the interior of the vacuum chamber; the third flange is provided with a second valve; The third flange is sealed and fixed to the external reaction chamber; The first flanges of the plurality of vacuum sample storage chambers can be detachably fixed to the second flange of the transfer chamber in sequence to perform sequential sample injection; The fourth flange is sealed and connected to the normal pressure injection door; The sample holding device is fixed to the first sample transfer device; The first sample transfer device drives the sample holding device to enter the transfer chamber or retract into the vacuum sample storage chamber.

2. A vacuum chamber sampling system according to claim 1, characterized in that: The third flange is detachably fixed to the external reaction chamber.

3. A vacuum chamber sampling system according to claim 2, characterized in that: The first flange and the second flange are CF flanges.

4. A vacuum chamber sampling system according to claim 3, characterized in that: The first valve and / or the second valve is a gate valve.

5. A vacuum chamber sampling system according to claim 4, characterized in that: The vacuum sample storage chamber is provided with a window flange.

6. A vacuum chamber sampling system according to claim 5, characterized in that: The transfer cavity is provided with a window flange.

7. The vacuum chamber sampling system according to claim 1, characterized in that: A vacuum gauge is also included to measure the internal air pressure of the transfer chamber.

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