Plasma cleaning machine

Abstract

The present invention proposes a plasma cleaning machine. The plasma cleaning machine includes a cleaning machine body, a mounting part, a clamping fixture and an adjusting device. The cleaning machine body includes a controller; the mounting part is mounted on the cleaning machine body; the clamping fixture is mounted on the mounting part, the clamping fixture has a clamping groove, and the width of the clamping groove is adjustable; the adjusting device is mounted on one side of the clamping fixture, the adjusting device is electrically connected to the controller, and the adjusting device is used to adjust the width of the clamping groove. The plasma cleaning machine of the present invention can improve the compatibility of the clamping fixture to improve the applicability of the plasma cleaning machine.

Description

Technical Field

[0001] The invention relates to the technical field of cleaning, and in particular to a plasma cleaning machine. Background Art

[0002] Plasma cleaning machines use plasma to achieve effects that conventional cleaning methods cannot achieve. The clamping fixtures of existing plasma cleaning machines are usually fixed structures that are only compatible with conventional-sized substrates and cannot automatically be compatible with new-sized substrates. If a new-sized substrate is required, the clamping fixture needs to be replaced with another new-sized fixture manually using a wrench, and the compatibility of the clamping fixture is low.

[0003] Therefore, it is necessary to propose a plasma cleaning machine to solve the above problems. Summary of the invention

[0004] The main purpose of the present invention is to provide a plasma cleaning machine, aiming to improve the compatibility of a clamping fixture to improve the applicability of the plasma cleaning machine.

[0005] To achieve the above-mentioned purpose, the present invention proposes a plasma cleaning machine, which includes a cleaning machine body, a mounting part, a clamping fixture and an adjusting device. The cleaning machine body includes a controller; the mounting part is mounted on the cleaning machine body; the clamping fixture is mounted on the mounting part, the clamping fixture has a clamping groove, and the width of the clamping groove is adjustable; the adjusting device is mounted on one side of the clamping fixture, the adjusting device is electrically connected to the controller, and the adjusting device is used to adjust the width of the clamping groove.

[0006] Optionally, the clamping fixture includes a fixed part and a movable part, the fixed part is fixedly mounted on the mounting member, the movable part is movably connected to the fixed part, the fixed part and the movable part cooperate to form the clamping groove, and the adjusting device drives the movable part to move along the fixed part to adjust the width of the clamping groove.

[0007] Optionally, the fixed part includes a fixed frame and a fixed rod, and the fixed rod is installed on one side of the fixed frame; the movable part includes a movable frame and a movable rod, and the movable rod is installed on one side of the movable frame in the same way as the fixed rod is installed on one side of the fixed frame, and the clamping groove is formed between the fixed rod and the movable rod, and the movable frame can be movably installed in the fixed frame so that the width of the clamping groove is adjustable.

[0008] Optionally, the fixed frame includes two fixed frames arranged opposite to each other, and both ends of the fixed rod are respectively fixedly installed on the two fixed frames. A slot is formed between the two fixed frames, and the slot extends along the length direction of the fixed frames. The slot is arranged corresponding to the movable frame, and the movable frame can be movably installed in the slot.

[0009] Optionally, the clamping fixture further includes a positioning piece, and a positioning hole is formed on the fixed frame of one of the fixed frames, and the positioning piece passes through the positioning hole to abut against the movable frame.

[0010] Optionally, the clamping fixture further includes a sensor sheet, and a sensor corresponding to the sensor sheet is provided on the cleaning machine body. The sensor is electrically connected to the controller, and the sensor can sense the position of the sensor sheet to detect changes in the width of the clamping groove.

[0011] Optionally, there are multiple fixed rods, and the number of movable rods is the same as the number of fixed rods and is also multiple, and the multiple fixed rods and the multiple movable rods are arranged in sequence and spaced apart to form a multiple clamping grooves.

[0012] Optionally, the adjustment device includes a jig adjustment member, a horizontal displacement mechanism and a lifting mechanism, the jig adjustment member is installed on the horizontal displacement mechanism, the horizontal displacement mechanism is installed on the lifting mechanism, the jig adjustment member is arranged below the mounting member, the mounting member is hollowed out, the horizontal displacement mechanism and the lifting mechanism are respectively electrically connected to the controller so that the jig adjustment member can pass through the mounting member to adjust the width of the clamping groove.

[0013] Optionally, the horizontal displacement mechanism includes a first linear module, a horizontal moving part and a first drag chain assembly, the jig adjustment part is installed on the first linear module, the first linear module is installed on the horizontal moving part, the first drag chain assembly is connected to the horizontal moving part, the first linear module and the first drag chain assembly have the same moving direction, and the first linear module and the first drag chain assembly jointly drive the jig adjustment part to move in the horizontal direction.

[0014] Optionally, the lifting mechanism includes a support member, a second linear module, a lifting movable member and a second drag chain assembly, the second linear module is installed on the support member and connected to the lifting movable member, the second drag chain assembly is connected to the lifting movable member, the second linear module and the second drag chain assembly have the same moving direction, the horizontal displacement mechanism is installed on the lifting movable member, and the second linear module and the second drag chain assembly jointly drive the horizontal displacement mechanism to perform upward or downward adjustment.

[0015] The technical solution of the present invention is to install a clamping jig on a mounting part, wherein the clamping jig has a clamping groove, the width of the clamping groove is adjustable, and an adjusting device is installed on one side of the clamping jig. The adjusting device is electrically connected to a controller, and the controller can control the adjusting device to automatically adjust the width of the clamping groove, so that the clamping groove of the clamping jig has different widths, thereby enabling the clamping jig to clamp substrates of different widths, thereby improving the compatibility of the clamping jig and the applicability of the plasma cleaning machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0017] Figure 1 It is a structural schematic diagram of an embodiment of a plasma cleaning machine of the present invention;

[0018] Figure 2 for Figure 1 Schematic diagram of part of the structure of a medium plasma cleaning machine;

[0019] Figure 3 for Figure 2 Schematic diagram of part of the structure of a medium plasma cleaning machine;

[0020] Figure 4 for Figure 3 Schematic diagram of the structure after the structure is decomposed;

[0021] Figure 5 for Figure 4 Schematic diagram of the structure of the clamping fixture;

[0022] Figure 6 for Figure 5 A schematic diagram of the structure of the fixed part;

[0023] Figure 7 for Figure 6 Schematic diagram of the structure after the structure is decomposed;

[0024] Figure 8 for Figure 5 Schematic diagram of the structure of the central active part.

[0025] Description of Figure Numbers:

[0026]

[0027]

[0028] The purpose, features and advantages of the present invention will be further described with reference to the accompanying drawings in conjunction with the embodiments. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0031] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or suggesting their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0032] The present invention provides a plasma cleaning machine, which utilizes plasma to achieve an effect that conventional cleaning methods cannot achieve, and can improve the compatibility of a clamping fixture and the applicability of the plasma cleaning machine.

[0033] See also Figures 1 to 3 In one embodiment of the plasma cleaning machine 10 of the present invention, the plasma cleaning machine 10 includes a cleaning machine body 100, a mounting member 200, a clamping fixture 300 and an adjusting device 400. The cleaning machine body 100 includes a controller 111; the mounting member 200 is mounted on the cleaning machine body 100; the clamping fixture 300 is mounted on the mounting member 200, and the clamping fixture 300 has a clamping groove 330, and the width of the clamping groove 330 is adjustable; the adjusting device 400 is mounted on one side of the clamping fixture 300, and the adjusting device 400 is electrically connected to the controller 111, and the adjusting device 400 is used to adjust the width of the clamping groove 330 (such as Figure 5 shown).

[0034] Specifically, the controller 111 includes a touch screen and a control module, the control module includes an electric control board and control buttons connected to the electric control board, a control program is provided on the electric control board, the electric control board is electrically connected to the adjustment device 400, and the width of the clamping groove 330 of the clamping fixture 300 is adjusted by operating the touch screen and the control buttons. The adjustment device 400 can be a fixture adjustment member 410 and an adjustment mechanism for driving the fixture adjustment member 410 to move, or a manipulator, which is not limited here. The details are described in detail later.

[0035] Furthermore, the cleaning machine body 100 also includes an upper frame 110 and a lower frame 120, the upper frame 110 covers the lower frame 120, and the touch screen is installed on the upper frame 110 to facilitate the operation of the touch screen; a workbench is provided on the lower frame 120, the clamping fixture 300 can be installed on the workbench, and the adjustment device 400 is installed on one side of the clamping fixture 300. The adjustment device 400 can be installed on the workbench or under the workbench, as long as the adjustment device 400 can adjust the clamping fixture 300. The plasma cleaning machine 10 also includes a conveying module and a cleaning module, the conveying module and the cleaning module are installed on the workbench, the conveying module is suitable for conveying the substrate to the clamping fixture 300 so that the clamping fixture 300 can clamp the substrate, and the cleaning module is suitable for cleaning the substrate in the clamping fixture 300.

[0036] The technical solution of the present invention is to install a clamping fixture 300 on a mounting member 200, wherein the clamping fixture 300 has a clamping groove 330, the width of which is adjustable, and to install an adjusting device 400 on one side of the clamping fixture 300, wherein the adjusting device 400 is electrically connected to a controller 111, and the controller 111 can control the adjusting device 400 to automatically adjust the width of the clamping groove 330, so that the clamping groove 330 of the clamping fixture 300 has different widths, thereby enabling the clamping fixture 300 to clamp substrates of different widths, thereby improving the compatibility of the clamping fixture 300 and improving the applicability of the plasma cleaning machine 10.

[0037] See also Figure 4 and Figure 5 In one embodiment, optionally, the clamping fixture 300 includes a fixed portion 310 and a movable portion 320, the fixed portion 310 is fixedly mounted on the mounting member 200, the movable portion 320 is movably connected to the fixed portion 310, a clamping groove 330 is formed between the fixed portion 310 and the movable portion 320, and the adjusting device 400 drives the movable portion 320 to move along the fixed portion 310 to adjust the width of the clamping groove 330.

[0038] Specifically, the mounting member 200 is provided with a stopper, and the number of the stoppers is multiple. The stopper is connected to the mounting member 200 by bolts, and the multiple stoppers enclose a mounting area for the mounting of the fixed portion 310. There are multiple ways to flexibly connect the movable portion 320 with the fixed portion 310, such as but not limited to: the fixed portion 310 is provided with a slot 340, a part of the structure of the movable portion 320 is inserted into the slot 340, the movable portion 320 and the fixed portion 310 are connected by insertion to form a clamping groove 330, and the adjusting device 400 adjusts the width of the clamping groove 330 by adjusting the movable portion 320 to move in the slot 340 of the fixed portion 310; or the fixed portion 310 is hollow, the fixed portion 310 is sleeved on the movable portion 320, the movable portion 320 and the fixed portion 310 are connected by sliding to form a clamping groove 330, and the adjusting device 400 adjusts the width of the clamping groove 330 by adjusting the movable portion 320 to slide in the fixed portion 310. The method of adjusting the width of the clamping groove 330 by driving the movable portion 320 to move is simple and easy to operate.

[0039] Furthermore, the fixing portion 310 includes a fixing frame 311 and a fixing rod 312 (such as Figure 6 As shown), the fixed rod 312 is installed on one side of the fixed frame 311; the movable part 320 includes a movable frame 321 and a movable rod 322 (as shown Figure 8 As shown in the figure, the movable rod 322 is installed on one side of the movable frame 321 and is similar to the fixed rod 312 installed on one side of the fixed frame 311. A clamping groove 330 is formed between the fixed rod 312 and the movable rod 322. The movable frame 321 can be movably installed in the fixed frame 311 so that the width of the clamping groove 330 is adjustable.

[0040] Specifically, the fixed frame 311 includes a frame, and the number of frames can be multiple, which is not specifically limited here. In this embodiment, the number of frames is four, and the four frames are connected in sequence so that the fixed frame 311 is set in a rectangular shape. It can be understood that the fixed frame 311 composed of four frames can also be set in a square shape or a diamond shape.

[0041] In this embodiment, the four frames of the fixed frame 311 are connected and fixed by bolt structures. The fixed frame 311 has two frames extending in the length direction and two frames extending in the width direction. For the convenience of description, one frame extending in the length direction and one frame extending in the width direction are taken as examples for description. Both ends of the frame extending in the width direction are structured to form first screw holes 3112, and both ends of the frame extending in the length direction are also structured to form second screw holes 3113 (such as Figure 7As shown in the figure, the two frames are fixedly connected by bolts passing through the first screw hole 3112 and the second screw hole 3113 in sequence. In order to make the frame of the fixed frame 311 firmly connected, the number of the first screw holes 3112 at the frame connection is two, and the number of the second screw holes 3113 corresponding to the first screw holes 3112 is also two. The two bolts make the two frames firmly connected, thereby improving the stability of the fixing holes.

[0042] Furthermore, in order to facilitate the user to assemble the fixed frame 311, both ends of the frame extending along the width direction of the fixed frame 311 are provided with a first connection part, and both ends of the frame extending along the length direction of the fixed frame 311 are also provided with a second connection part corresponding to the first connection part, the first connection part is pressed on the second connection part, the first screw hole 3112 is vertically penetrated in the first connection part, and the second screw hole 3113 is also vertically penetrated in the second connection part. When assembling the frame, because the first connection part is pressed on the second connection part, the bolt can be installed in the first screw hole 3112 and the second screw hole 3113 from top to bottom, so that it is convenient to directly assemble the frame, avoiding the situation that the first screw hole 3112 is set on the side of the frame, and the frame needs to be reversed for assembly during assembly, thereby simplifying the assembly method of the frame of the fixed frame 311 and improving the assembly efficiency of the fixed frame 311. The structure of the movable frame 321 is similar to that of the fixed frame 311. The movable frame 321 is also composed of four frames connected in sequence, and the four frames of the movable frame 321 are also connected and fixed by bolt structures. In this embodiment, the movable frame 321 is also arranged in a rectangular shape. It can be understood that the movable frame 321 can also be arranged in a square shape or a diamond shape. Since the structure of the movable frame 321 is similar to that of the fixed frame 311, it will not be described one by one here.

[0043] In addition, the fixed rod 312 is arranged in a long strip shape, and the two ends of the fixed rod 312 are respectively installed on the two frames extending along the length direction of the fixed frame 311, and the fixed rod 312 is connected to the fixed frame 311 through a bolt structure, and the two ends of the fixed rod 312 are respectively constructed to form a third screw hole, and the two frames extending along the length direction of the fixed frame 311 are provided with a fourth screw hole corresponding to the third screw hole, and the bolts pass through the third screw hole and the fourth screw hole in sequence to fix the fixed rod 312 and the fixed frame 311. The movable rod 322 is also arranged in a long strip shape, and the movable rod 322 is installed on the movable frame 321 and is located on the same side of the clamping fixture 300 as the fixed rod 312. The movable rod 322 and the fixed rod 312 are arranged at intervals to form a clamping groove 330. In order to facilitate the clamping fixture 300 to clamp the substrate, a first boss is formed on the side of the fixed rod 312 facing the movable rod 322, and a second boss adapted to the first boss is correspondingly provided on the side of the movable rod 322 facing the fixed rod 312, and the first boss and the second boss are suitable for the substrate to be supported. There are many ways for the movable frame 321 to be movably mounted on the fixed frame 311, such as but not limited to; the movable frame 321 can be slidably mounted in the fixed frame 311 so that the width of the clamping groove 330 formed by the movable rod 322 and the fixed rod 312 is adjustable, or the movable frame 321 can be movably mounted in the fixed frame 311 so that the width of the clamping groove 330 formed by the movable rod 322 and the fixed rod 312 is adjustable. The details will be described in detail later.

[0044] It is understandable that the clamping groove 330 can also be formed by the movable rod 322 and the movable rod 322 at intervals, and the formation method is similar to the above method, which will not be repeated here. The clamping fixture 300 is adjusted by the adjustment device 400, so that the clamping groove 330 has different widths to meet the needs of substrates of different widths, thereby improving the compatibility of the clamping fixture 300. Moreover, the clamping fixture 300 is directly adjusted by the adjustment device 400, which simplifies the operation and improves the adjustment efficiency.

[0045] See also Figures 5 to 7 In one embodiment, considering that when the movable frame 321 is installed in the fixed frame 311 by sliding, its installation method is relatively complicated. In order to simplify the installation method of the movable frame 321, optionally, the fixed frame 311 includes two fixed frame frames 3111 arranged opposite to each other, and the two ends of the fixed rod 312 are respectively fixedly installed on the two fixed frame frames 3111. A slot 340 is formed between the two fixed frame frames 3111. The slot 340 extends along the length direction of the fixed frame 311. The slot 340 is arranged corresponding to the movable frame 321, and the movable frame 321 is movably installed in the slot 340.

[0046] Specifically, the frame extending along the length direction of the fixed frame 311 is the fixed frame 3111, and the two fixed frames 3111 and the two frames extending along the width direction together enclose a slot 340. The width dimension of the slot 340 is set corresponding to the width dimension of the movable frame 321, and the length dimension of the slot 340 is greater than the length dimension of the movable frame 321, so that the movable frame 321 can be movably installed in the slot 340.

[0047] Furthermore, the two ends of the fixed rod 312 are respectively mounted on the two fixed frames 3111, and the two ends of the movable rod 322 are also respectively mounted on the frames extending along the length direction of the movable frame 321, and the movable rod 322 and the fixed rod 312 are arranged at intervals to form a clamping groove 330. When the movable frame 321 is moved, the movable rod 322 moves synchronously with the movable frame 321, so that the width of the clamping groove 330 between the movable rod 322 and the fixed rod 312 also changes with the movement of the movable frame 321. By adjusting the position of the movable frame 321, the width of the clamping groove 330 is further adjusted. This installation method is simple, easy to operate, and improves the installation efficiency of the movable frame 321.

[0048] In addition, there are multiple fixed rods 312, and the number of movable rods 322 is the same as the number of fixed rods 312. The multiple fixed rods 312 and the multiple movable rods 322 are sequentially arranged at intervals to form multiple clamping grooves 330. The multiple fixed rods 312 are sequentially installed on the fixed rods 312, and the multiple movable rods 322 are sequentially arranged between adjacent fixed rods 312 to form multiple clamping grooves 330, so that the clamping fixture 300 can clamp multiple substrates at the same time, improving the clamping capacity of the clamping fixture 300, so that the plasma cleaning machine 10 can clean multiple substrates at the same time, and improving the cleaning efficiency of the plasma cleaning machine 10.

[0049] See also Figures 5 to 7 In one embodiment, considering that the width of the clamping groove 330 is adjusted by adjusting the movable frame 321 to move in the fixed frame 311, if the movable frame 321 is not positioned and fixed, the width of the clamping groove 330 is easy to loosen and change. In order to avoid this situation, the clamping fixture 300 optionally further includes a positioning member 350, and a positioning hole is formed on the fixed frame 3111 of one of the fixed frames 311, and the positioning member 350 passes through the positioning hole and abuts against the movable frame 321.

[0050] Specifically, the positioning member 350 includes a positioning body with an inner hexagonal end, a spring, a spacer ring and a ball. The surface of the positioning body is provided with an external thread. The positioning body has a cavity. The spring, the spacer ring and the ball are sequentially arranged in the cavity, wherein a part of the structure of the ball is exposed in the cavity. An internal thread that matches the external thread of the positioning body is provided in the positioning hole on the fixed frame 3111. There are multiple positioning holes, and the multiple positioning holes are sequentially arranged at intervals along the length direction of the fixed frame 3111. The number of positioning members 350 corresponds to the number of multiple positioning holes. When installing the positioning member 350, the positioning member 350 passes through the positioning hole and abuts against the frame of the movable frame 321. The positioning body and the positioning hole are fixed by threads, so that the positioning member 350 can completely fix the movable frame 321 in the slot 340.

[0051] Furthermore, a ball bearing is provided at the end of the positioning member 350, and at this time, the ball bearing abuts against the frame of the movable frame 321. Since a spring is provided in the positioning body, when the movable frame 321 moves, the ball bearing can roll in the cavity, thereby facilitating the movable frame 321 to move in the slot 340. In this process, the positioning member 350 can completely position and fix the movable frame 321, thereby preventing the movable frame 321 from moving arbitrarily in the slot 340; at the same time, the ball bearing can roll in the cavity, so that there is space for movement between the movable frame 321 and the fixed frame 311, thereby enabling the movable frame 321 to move in the slot 340. By installing the positioning member 350, the stability of the clamping fixture 300 is improved.

[0052] See also Figure 4 and Figure 5 In one embodiment, the clamping fixture 300 also includes a sensing sheet 360 , and a sensor (not shown) corresponding to the sensing sheet 360 is provided on the cleaning machine body 100 . The sensor is electrically connected to the controller 111 , and the sensor can sense the position of the sensing sheet 360 to detect changes in the width of the clamping groove 330 .

[0053] Specifically, the sensing sheet 360 is mounted on the movable rod 322, and the sensor is mounted on one side of the sensing sheet 360 and is in the same straight line with the sensing sheet 360. The sensor can sense the position of the sensing sheet 360 in the same straight line. Since the sensing sheet 360 is mounted on the movable rod 322, a clamping groove 330 is formed between the movable rod 322 and the fixed rod 312. When the movable rod 322 moves with the movable frame 321, the width of the clamping groove 330 changes accordingly. At this time, the sensing sheet 360 and the sensor are not in the same straight line, and the sensor cannot sense the position of the sensing sheet 360, that is, the width of the clamping groove 330 has changed. The sensor transmits the signal that the sensing sheet 360 is not sensed to the controller 111, and the controller 111 can stop the plasma cleaning machine 10 so that the staff can handle it; when the sensor can sense the sensing sheet 360, it means that the sensor and the sensing sheet 360 are in the same straight line, that is, the width of the clamping groove 330 has not changed.

[0054] It should be noted that in this embodiment, the sensor is a limit sensor. In other embodiments, the sensor can also be a position sensor, a light sensor or other sensing device, and the technical effects achieved are similar to those of this embodiment, which will not be described in detail here.

[0055] See also Figure 3 to Figure 4 In one embodiment, the adjustment device 400 includes a jig adjustment member 410, a horizontal displacement mechanism 420 and a lifting mechanism 430. The jig adjustment member 410 is installed on the horizontal displacement mechanism 420, and the horizontal displacement mechanism 420 is installed on the lifting mechanism 430. The jig adjustment member 410 is arranged below the mounting member 200, and the mounting member 200 is hollowed out. The horizontal displacement mechanism 420 and the lifting mechanism 430 are respectively electrically connected to the controller 111, so that the jig adjustment member 410 can pass through the mounting member 200 to adjust the width of the clamping groove 330.

[0056] Specifically, the jig adjustment member 410 includes a jig adjustment block and a proximity sensor. The jig adjustment block is provided with a groove, and the proximity sensor is provided in the groove. The proximity sensor is electrically connected to the controller 111, and the proximity sensor is used to detect whether the position of the jig adjustment block corresponds to the position of the clamping jig 300, and feed back the detected signal to the controller 111. The controller 111 adjusts the width of the clamping groove 330 of the clamping jig 300 through the signal fed back by the proximity sensor.

[0057] Furthermore, the horizontal displacement mechanism 420 includes a first linear module, a horizontal moving member and a first drag chain assembly. The jig adjustment member 410 is installed on the first linear module, the first linear module is installed on the horizontal moving member, the first drag chain assembly is connected to the horizontal moving member, the first linear module and the first drag chain assembly have the same moving direction, and the first linear module and the first drag chain assembly jointly drive the jig adjustment member 410 to move in the horizontal direction.

[0058] The first linear module includes a first stepper motor 421, a first ball screw and a first linear guide assembly, the horizontal moving part includes a mounting plate and a horizontal moving plate, the first stepper motor 421 is mounted on the horizontal moving plate, the first stepper motor 421 is connected to the first ball screw, and can drive the horizontal moving plate to move horizontally on the mounting plate. The first linear guide assembly is mounted on the mounting plate, a three-axis cylinder is provided on the first linear guide assembly, and the fixture adjustment part 410 is mounted on the three-axis cylinder to adjust the fixture adjustment part 410 to rise or fall, so that the fixture adjustment part 410 can more accurately adjust the clamping fixture 300.

[0059] In addition, the first drag chain assembly is installed on the mounting plate and connected to the horizontal moving plate, so that the first drag chain assembly can move synchronously with the first linear module along the horizontal direction. The first drag chain assembly can tow and protect the first linear module, thereby improving the reliability of the first linear module.

[0060] Furthermore, the lifting mechanism 430 includes a support member, a second linear module, a lifting movable member and a second drag chain assembly. The second linear module is installed on the support member and connected to the lifting movable member. The second drag chain assembly is connected to the lifting movable member. The second linear module and the second drag chain assembly have the same moving direction. The horizontal displacement mechanism 420 is installed on the lifting movable member. The second linear module and the second drag chain assembly jointly drive the horizontal displacement mechanism 420 to adjust upward or downward.

[0061] Among them, the support member is installed on the lower frame 120 of the cleaning machine body 100, the second linear module includes a second stepper motor 431, a second ball screw and a second linear guide, the lifting and moving member includes a fixed plate and a lifting and moving plate, the second stepper motor 431 is connected to the second ball screw and fixedly installed on the fixed plate, the second linear guide is installed on the lifting and moving plate and slidably connected to the fixed plate, the lifting and moving plate is connected to the horizontal moving plate of the horizontal displacement mechanism 420, and the lifting and moving plate is driven by the second stepper motor 431 to perform an upward or downward adjustment, so that the lifting and moving plate can drive the horizontal displacement mechanism 420 to synchronously perform an upward or downward adjustment.

[0062] In addition, one end of the second drag chain assembly is connected to the fixed plate, and the other end is connected to the lifting and moving plate, so that the second drag chain assembly can be synchronously raised or lowered with the second linear module under the drive of the second synchronous motor. The second drag chain assembly can tow and protect the second linear module, thereby improving the reliability of the second linear module.

[0063] The above description is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A plasma cleaning machine, characterized in that: The plasma cleaning machine comprises: A cleaning machine body, wherein the cleaning machine body includes a controller; A mounting member, the mounting member being mounted on the cleaning machine body; A clamping jig, the clamping jig is mounted on the mounting member, the clamping jig has a clamping groove, and the width of the clamping groove is adjustable; as well as An adjusting device, the adjusting device is installed on one side of the clamping fixture, the adjusting device is electrically connected to the controller, and the adjusting device is used to adjust the width of the clamping groove; The clamping fixture comprises a fixed part, a movable part and a positioning member, the fixed part is fixedly mounted on the mounting member, the movable part is movably connected to the fixed part, the fixed part and the movable part cooperate to form the clamping groove, and the adjusting device drives the movable part to move along the fixed part to adjust the width of the clamping groove; the fixed part comprises a fixed frame and a fixed rod, and the fixed rod is mounted on one side of the fixed frame; the movable part comprises a movable frame and a movable rod, and the movable rod is mounted on one side of the movable frame and is the same as the fixed rod being mounted on one side of the fixed frame, the clamping groove is formed between the fixed rod and the movable rod, and the movable frame can be movably mounted in the fixed frame so that the width of the clamping groove is adjustable; The fixed frame includes two fixed frames arranged opposite to each other, a positioning hole is formed on the fixed frame of one of the fixed frames, the positioning member passes through the positioning hole, the positioning member includes a positioning body, a spring, a spacer ring and a ball, the positioning body has a cavity, the spring, the spacer ring and the ball are arranged in the cavity in sequence, a part of the structure of the ball is exposed in the cavity, and the ball is abutted against the frame of the movable frame.

2. The plasma cleaning machine according to claim 1, characterized in that: The two ends of the fixing rod are respectively fixedly mounted on the two fixed frames, a slot is formed between the two fixed frames, the slot extends along the length direction of the fixed frames, the slot is arranged corresponding to the movable frame, and the movable frame is movably mounted in the slot.

3. The plasma cleaning machine according to claim 1, characterized in that: The clamping fixture also includes a sensor sheet. A sensor corresponding to the sensor sheet is provided on the cleaning machine body. The sensor is electrically connected to the controller. The sensor can sense the position of the sensor sheet to detect changes in the width of the clamping groove.

4. The plasma cleaning machine according to claim 1, characterized in that: There are multiple fixed rods, and there are multiple movable rods, which are the same as the number of the fixed rods. The multiple fixed rods and the multiple movable rods are arranged in sequence at intervals to form multiple clamping grooves.

5. The plasma cleaning machine according to any one of claims 1 to 4, characterized in that: The adjustment device includes a jig adjustment piece, a horizontal displacement mechanism and a lifting mechanism. The jig adjustment piece is installed on the horizontal displacement mechanism, and the horizontal displacement mechanism is installed on the lifting mechanism. The jig adjustment piece is arranged below the mounting piece, and the mounting piece is hollowed out. The horizontal displacement mechanism and the lifting mechanism are electrically connected to the controller respectively, so that the jig adjustment piece can pass through the mounting piece to adjust the width of the clamping groove.

6. The plasma cleaning machine according to claim 5, characterized in that: The horizontal displacement mechanism includes a first linear module, a horizontal moving part and a first drag chain assembly, the jig adjustment part is installed on the first linear module, the first linear module is installed on the horizontal moving part, the first drag chain assembly is connected to the horizontal moving part, the first linear module and the first drag chain assembly have the same moving direction, and the first linear module and the first drag chain assembly jointly drive the jig adjustment part to move in the horizontal direction.

7. The plasma cleaning machine according to claim 5, characterized in that: The lifting mechanism includes a support member, a second linear module, a lifting movable member, and a second drag chain assembly. The second linear module is installed on the support member and connected to the lifting movable member. The second drag chain assembly is connected to the lifting movable member. The second linear module and the second drag chain assembly have the same moving direction. The horizontal displacement mechanism is installed on the lifting movable member. The second linear module and the second drag chain assembly jointly drive the horizontal displacement mechanism to adjust upward or downward.

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