Semiconductor device inner lead bonding strength testing device and detection method

Abstract

The present application relates to a semiconductor device internal lead bonding strength test device and a detection method thereof, which comprises: a frame, a horizontal conveying mechanism, a support frame and a pull-out detection mechanism, wherein the horizontal conveying mechanism is arranged on the frame, and the horizontal conveying mechanism is used to horizontally convey the lead frame to be detected; the support frame is vertically fixedly arranged on the frame, and the support frame is arranged adjacent to the horizontal conveying mechanism; the pull-out detection mechanism is arranged on the side of the support frame close to the horizontal conveying mechanism, and the pull-out detection mechanism is above the horizontal conveying mechanism. The present application has the effect of improving the efficiency of lead pull-out detection and saving manpower.

Description

Technical Field

[0001] The present application relates to the field of wire strength testing, and in particular to a device for testing the bonding strength of wires within a semiconductor device and a testing method thereof. Background Art

[0002] Lead frame is the chip carrier of integrated circuit. It is a key structural part that uses bonding materials (gold wire, aluminum wire, copper wire) to realize the electrical connection between the internal circuit lead end of the chip and the external lead to form an electrical circuit. It plays a bridge role in connecting with external wires. Lead frame is required in most semiconductor integrated blocks and is an important basic material in the electronic information industry. Lead refers to the wire that leads out from the component package.

[0003] like Figure 1 The lead frame is composed of a plurality of substrates 6, on which a chip 61 and a pin 62 are arranged. The pin 62 and the chip 61 are connected by a lead 63, and the two ends of the lead 63 are respectively welded to the pin 62 and the chip 61; two leads 63 are symmetrically welded on one chip 61, and a gap is formed between the lead 63 and the substrate 6.

[0004] On the lead frame, the lead is a relatively important component, and the connection strength between its two ends and the chip and the pin is also particularly important. Therefore, after the two ends of the lead are welded to the pin and the chip respectively, it is also necessary to test the welding strength of the lead to the pin and the chip respectively.

[0005] In the related art, the method of manually pulling out the leads is often used to detect the firmness of the connection between the leads and the chip and the pins.

[0006] With respect to the above-mentioned related technologies, the inventors believe that there are defects in that the detection by manual pulling is inefficient and requires more manpower. Summary of the invention

[0007] In order to improve the efficiency of lead pull detection and save manpower, the present application provides a semiconductor device internal lead bonding strength testing device and a detection method thereof.

[0008] In a first aspect, the present application provides a semiconductor device inner lead bonding strength testing device, which adopts the following technical solution:

[0009] A semiconductor device internal lead bonding strength testing device comprises: a frame, a horizontal conveying mechanism, a support frame and a pull-out detection mechanism, wherein the horizontal conveying mechanism is arranged on the frame and is used for horizontally conveying a lead frame to be tested; the support frame is vertically fixedly arranged on the frame, and the support frame is arranged adjacent to the horizontal conveying mechanism; the pull-out detection mechanism is arranged on the support frame at one side close to the horizontal conveying mechanism, and the pull-out detection mechanism is above the horizontal conveying mechanism.

[0010] By adopting the above technical solution, when the lead frame to be inspected moves to the bottom of the pulling inspection mechanism through the horizontal conveying mechanism, the lead frame to be inspected stops moving. At this time, the pulling inspection mechanism moves downward to pull the leads on the lead frame upward, thereby inspecting the firmness of the leads on the lead frame. Compared with manually pulling out the leads on the lead frame, this design method can be more convenient and quick when performing pulling inspection, the inspection efficiency will be higher, and it will help save manpower.

[0011] Preferably, the pulling detection mechanism includes: a mounting block, a pulling hook, a motion conversion assembly, a first driving member, a limiting assembly and an elastic reset member, the mounting block is rotatably arranged on a side of the support frame close to the horizontal conveying mechanism; the pulling hook is rotatably arranged on the mounting block, the pulling hook extends away from one end of the mounting block to above the horizontal conveying mechanism, and the pulling hook is used to hook the lead on the lead frame; the motion conversion assembly is movably arranged between the mounting block and the first driving member; the first driving member is fixedly arranged on the support frame, and the first driving member is used to drive the mounting block to swing left and right on the horizontal plane and drive the pulling hook to rotate up and down on the vertical plane through the motion conversion assembly; the limiting assembly is arranged on the support frame, and the limiting assembly is used to limit the rotation of the mounting block; one end of the elastic reset member is fixedly connected to the support frame, and the other end is fixedly connected to the mounting block, and the elastic reset member is used to pull the mounting block to rotate back to the initial position.

[0012] By adopting the above technical solution, the setting of the mounting block, on the one hand, provides a stable mounting position for the pulling hook, and on the other hand, through the drive of the first driving member, it can rotate left and right on the horizontal plane, so as to facilitate the pulling hook to move from the oblique lower part of the lead to the right lower part of the lead, so as to prepare for hooking the lead; the setting of the pulling hook facilitates hooking the lead; the setting of the motion conversion component enables the first driving member to drive the mounting block to rotate and drive the pulling hook to move up and down near one end of the lead, so as to facilitate the pulling detection of the lead, and at the same time, it is not easy to hinder the movement of the lead frame after the detection; the setting of the limiting component enables the first driving member to drive the pulling hook to move up and down near one end of the lead through the motion conversion component, and the mounting block will not rotate back to the original position due to the action of the elastic reset member, so as not to affect the pulling detection of the lead by the pulling hook; the setting of the reset elastic member enables the pulling hook to rotate by pulling the mounting block after the pulling detection, so as to leave the lower part of the lead, so as to avoid affecting the movement of the lead frame.

[0013] Preferably, the motion conversion assembly comprises: a U-shaped member, a first inclined plane block and a second inclined plane block, the U-shaped member is slidably arranged on the support frame, and the opening of the U-shaped member faces a direction away from the first driving member, one end of the U-shaped member close to its own opening is fixedly connected to an end of the first inclined plane block away from its own inclined plane, and the other end of the U-shaped member close to its own opening is opposite to and spaced from a surface of a side of the mounting block close to the first driving member, and the first driving member drives the U-shaped member to slide in the horizontal direction, so as to respectively push the first inclined plane block to slide in the horizontal direction and push the mounting block to swing left and right on the horizontal plane; the inclined plane on the first inclined plane block and the inclined plane on the second inclined plane block abut against each other, and the inclined plane on the first inclined plane block is below the upper inclined plane of the second inclined plane block; the end of the second inclined plane block away from its own inclined plane is fixedly connected to an end of the pulling hook close to the first driving member.

[0014] By adopting the above technical solution, the U-shaped member is arranged so that the power output by the first driving member can act on the pulling hook member and the mounting block respectively, providing relatively sufficient power for the pulling hook member to swing up and down away from the end of the second inclined block and the mounting block to swing left and right; the arrangement of the first inclined block and the second inclined block enables the horizontal sliding of the U-shaped member to be converted into the up and down swinging of the pulling hook member close to the end of the second inclined block, thereby realizing the up and down swinging of the pulling member away from the end of the second inclined block; the end of the U-shaped member opening used to drive the mounting block to rotate is connected to the mounting block There is a gap between the two, so that after the U-shaped part is driven by the first driving part, the U-shaped part will not immediately push the mounting block to rotate, and because the inclined surface on the first inclined surface block abuts against the inclined surface on the second inclined surface block, when the first driving part drives the U-shaped part to move away from itself, the end of the pulling hook away from the second inclined surface block can immediately achieve the purpose of downward movement, so the left and right swinging of the mounting block and the up and down swinging of the pulling hook will have a sequence, which helps the pulling hook to avoid the lead wire and move to the bottom of the lead wire away from the end of the second inclined surface block.

[0015] Preferably, a first delay plane is also provided on the first inclined plane block, one end of the first delay plane is connected to the inclined plane on the first inclined plane block, and the other end extends in the direction close to the first driving member; a second delay plane is also provided on the second inclined plane block, one end of the second delay plane is connected to the inclined plane on the second inclined plane block, and the other end extends in the direction away from the first driving member, after the pulling hook hooks the lead wire, the first delay plane and the second delay plane abut each other up and down.

[0016] By adopting the above technical solution, when the U-shaped part pushes the mounting block to rotate, the U-shaped part will continue to move in the direction close to the second inclined plane block. Therefore, the setting of the first delay plane and the second delay plane allows the first inclined plane block and the second inclined plane to abut against each other through the first delay plane and the second delay plane, so that when the U-shaped part moves in the direction away from the second inclined plane block, the inclined surface on the first inclined plane block and the inclined surface on the second inclined plane can be relatively smoothly restored to the state of abutting against each other, so that the first inclined plane block and the second inclined plane can be separated from each other subsequently.

[0017] Preferably, the pulling hook includes a rotating rod and a vertical hook, one end of the rotating rod is fixedly connected to the second inclined block, and the other end of the rotating rod is fixedly connected to the upper end of the vertical hook. The rotating rod is rotatably connected to the mounting block. When the rotating rod moves upward near one end of the second inclined block, the rotating rod moves downward near one end of the vertical hook; the lower end of the vertical hook is bent to form a hook to hook the lead wire.

[0018] By adopting the above technical solution, the setting of the rotating rod makes it easy for the first driving member to drive the rotating rod to swing up and down on the vertical plane through the first inclined block and the second inclined block, thereby driving the vertical hook to hook the lead wire downward and pull the lead wire for pull-out detection.

[0019] Preferably, two groups of the pulling detection mechanisms are provided, and the two groups of pulling detection mechanisms are arranged in a straight line along the moving direction of the lead frame to be detected.

[0020] By adopting the above technical solution, two sets of pull-out detection mechanisms are set up to facilitate pull-out detection of the two leads on the lead frame separately. Compared with pulling-out detection of the two leads at the same time, this detection method helps to improve the accuracy of detection.

[0021] Preferably, the two vertical hooks in the two groups of pulling detection mechanisms are bent towards each other.

[0022] By adopting the above technical solution, the two groups of pulling detection mechanisms can hook the leads from the side where the two leads are far away from each other. At this time, each group of pulling detection mechanisms is not easily hindered by the other lead when hooking one lead, thereby improving the convenience of pulling detection.

[0023] Preferably, the limit assembly includes a limit block and a second driving member, the limit block is vertically slidably arranged on the support frame, and a limit hole adapted to the limit sliding block is arranged on one side surface of the mounting block; the second driving member is fixedly arranged on the support frame, and the second driving member is used to drive the limit block in and out of the limit hole; after the mounting block rotates away from the initial position, the limit block is opposite to the limit hole.

[0024] By adopting the above technical scheme, the setting of the limit block and the limit hole allows the mounting block to be fixed after rotation, and the mounting block will not rotate when the pulling hook is used for pulling detection, so that the pulling hook can smoothly hook the lead wire for pulling detection; the setting of the second driving member provides power for the movement of the limit block, so that the limit block can limit the state of the mounting block after the mounting block is rotated, and when the mounting block needs to be rotated back to the initial position, the second driving member can also more conveniently drive the limit block to release the restriction on the rotation of the mounting block.

[0025] Preferably, the horizontal conveying mechanism includes a horizontal conveying track and a horizontal driving member, the horizontal conveying track is fixedly set on the frame, and the lead frame to be inspected moves along the horizontal conveying track; the horizontal driving member is set on the frame and is located below the horizontal conveying track, and the horizontal driving member is used to drive the lead frame to be inspected to move on the horizontal conveying track.

[0026] By adopting the above technical solution, the setting of the horizontal conveying track facilitates the conveying of the lead frame to be inspected to the bottom of the pulling inspection mechanism; the setting of the horizontal driving member provides sufficient power for the lead frame to be inspected to move on the horizontal conveying track, and can also control the lead frame to be inspected to pause on the horizontal conveying track to facilitate pulling inspection.

[0027] In a second aspect, the present application provides a detection method, which adopts the following technical solution:

[0028] A detection method comprises the following steps:

[0029] S1. First, the lead frame to be tested needs to be placed on a horizontal conveying mechanism. The lead frame to be tested first moves to a pulling detection mechanism and pauses there;

[0030] S2. Then the first driving member on the pull-out detection mechanism is started, and the first driving member drives the U-shaped member to move away from itself. The U-shaped member first pushes the second inclined surface block upward through the first inclined surface block, so that the pull-out hook moves downward away from one end of the second inclined surface block to the oblique lower side of the single lead on the lead frame to be detected;

[0031] S3. Then, as the first driving member continues to drive, the first delay plane and the second delay plane abut against each other up and down, and at this time, the end of the U-shaped member opening opposite to the mounting block and spaced apart will push the mounting block to rotate, so that the mounting block swings to one side on the horizontal plane, and the end of the hook member pulled away from the second inclined block will move to the bottom of the single lead, and then the limit assembly is started, so that the position of the mounting block is fixed after rotation;

[0032] S4. After the position of the mounting block is fixed, the first driving member drives the first inclined plane block to move in a direction away from the second inclined plane block in the reverse direction through the U-shaped member, and after the inclined plane on the first inclined plane block and the inclined plane on the second inclined plane block are separated from each other, the end of the pulling hook member close to the second inclined plane block moves downward under the action of its own gravity, so that the end of the pulling hook member away from the second inclined plane block hooks the lead wire upward to perform the lead wire pulling detection;

[0033] S5. After the pull-out test, the first driving member again drives the first inclined plane block to move toward the second inclined plane block by the U-shaped member, so that the pull-out hook moves downward away from one end of the second inclined plane block and breaks away from contact with the lead wire;

[0034] S6. After that, the limit assembly releases the fixing of the mounting block, and the mounting block rotates to the initial position under the action of the elastic reset member, so that the pull hook moves away from one end of the second inclined block and leaves directly below the lead;

[0035] S7. Then the first driving member drives the first inclined plane block and the second inclined plane block to separate from each other through the U-shaped member, so that the puller hook moves upward away from one end of the second inclined plane block;

[0036] S8. Finally, the horizontal conveying mechanism transports the lead frame forward.

[0037] By adopting the above technical solution, the lead frame to be inspected on the horizontal conveying mechanism can be automatically pulled out for inspection. Compared with manual pulling out of the lead wire, not only is the inspection efficiency higher, but the inspection standards are more unified during the inspection. It is not easy to use a large force for pulling out inspection one moment and a small force for pulling out inspection the next moment, which helps to ensure the quality of the pulling out inspection.

[0038] In summary, the present application includes at least one of the following beneficial technical effects:

[0039] 1. The setting of the pull-out detection mechanism enables the pull-out detection of the lead on the lead frame to be performed automatically without the need for manual pulling, which greatly improves the efficiency of the pull-out detection and also helps to improve the quality of the detection;

[0040] 2. The setting of the motion conversion component enables the power for the rotation of the installation block and the power for the rotation of the pull hook to come from the first driving member, reducing the setting of the driving member and making the structure more compact. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1 It is a schematic diagram of the structure of the substrate in the background technology of this application.

[0042] Figure 2 It is a schematic diagram of the overall structure of this application.

[0043] Figure 3 It is a schematic diagram of the cross-sectional structure of the drawing detection mechanism in this application.

[0044] Figure 4 It is a structural schematic diagram of the motion conversion component and the pulling hook in this application.

[0045] Description of reference numerals: 1, frame; 2, horizontal conveying mechanism; 21, horizontal conveying track; 211, horizontal track; 2111, guide groove; 212, support foot; 22, horizontal driving member; 3, support frame; 31, vertical support plate; 311, mounting plate; 32, horizontal support plate; 4, pulling detection mechanism; 41, mounting block; 411, mounting groove; 412, limiting hole; 42, pulling hook; 421, rotating block; 422 , rotating rod; 423, vertical hook; 43, first driving member; 44, motion conversion assembly; 441, U-shaped member; 442, first inclined block; 4421, first delay plane; 443, second inclined block; 4431, second delay plane; 45, limiting assembly; 451, limiting block; 452, second driving member; 46, elastic reset member; 5, lead frame; 6, substrate; 61, chip; 62, pin; 63, lead. DETAILED DESCRIPTION

[0046] The following is combined with Figure 1-4 This application is described in further detail.

[0047] The present application embodiment discloses a device for testing the bonding strength of a lead wire in a semiconductor device. Figure 2 The testing device includes: a frame 1, a horizontal conveying mechanism 2, a support frame 3 and a pulling detection mechanism 4. The horizontal conveying mechanism 2 is arranged on the frame 1, and the horizontal conveying mechanism 2 is used to horizontally convey the lead frame 5 to be tested; the support frame 3 is vertically fixed on the frame 1, and the support frame 3 is adjacent to the horizontal conveying mechanism 2; the pulling detection mechanism 4 is arranged on the side of the support frame 3 close to the horizontal conveying mechanism 2, and the pulling detection mechanism 4 is above the horizontal conveying mechanism 2.

[0048] Specifically, refer to Figure 2 The horizontal conveying mechanism 2 includes a horizontal conveying rail 21 and a horizontal driving member 22. The horizontal conveying rail 21 is fixed to the frame 1 by bolts; the horizontal conveying rail 21 includes two horizontal rails 211 parallel to each other and four supporting feet 212. The horizontal rails 211 are in the shape of a rectangular parallelepiped and made of stainless steel. The two horizontal rails 211 are arranged at intervals; the supporting feet 212 are in the shape of a rectangular parallelepiped and made of stainless steel. The four supporting feet 212 are vertically arranged in pairs on the two horizontal rails 211. The lower ends of the supporting feet 212 are fixedly connected to the frame 1 by bolts, and the upper ends of the supporting feet 212 are welded to the horizontal rails 211.

[0049] Reference Figure 2A guide groove 2111 is provided between two side surfaces of the two horizontal rails 211 that are close to each other. The length direction of the guide groove 2111 is the same as the length direction of the horizontal rail 211. The lead frame 5 to be detected is in the gap between the two horizontal rails 211, and both ends of the lead frame 5 to be detected are respectively inserted into the two guide grooves 2111, so that the lead wire to be detected can slide along the guide groove 2111, and when the lead wire is pulled in the vertical direction, the lead frame 5 is not easily pulled away from the horizontal rail 211, so as to complete the lead wire pulling detection.

[0050] Reference Figure 2 The horizontal driving member 22 is arranged on the frame 1 and is located below the horizontal conveying track 21. In this embodiment, the horizontal driving member 22 is a conveyor belt, which is located between two horizontal tracks 211. The upper surface of the conveyor belt directly abuts against the lower surface of the lead frame 5 to be detected, thereby achieving the purpose of driving the lead frame 5 to slide on the horizontal track 211 along the length direction of the guide groove 2111.

[0051] Reference Figure 2 The support frame 3 includes a vertical support plate 31 and a horizontal support plate 32. The vertical support plate 31 is in a rectangular shape and is made of stainless steel. The lower end of the vertical support plate 31 is fixedly connected to the upper surface of the frame 1, and the vertical support plate 31 is arranged adjacent to the horizontal rail 211; the horizontal support plate 32 is made of stainless steel, one end of the horizontal support plate 32 is welded to the vertical support plate 31, and the other end of the horizontal support plate 32 extends in a direction close to the horizontal rail 211. The horizontal support plate 32 is provided with two spaced-apart plates, and the two horizontal support plates 32 are arranged in a straight line along the length direction of the horizontal rail 211. Two pulling detection mechanisms 4 are provided, and the two pulling detection mechanisms 4 are respectively arranged on the two horizontal support plates 32. The two pulling detection mechanisms 4 are respectively used to perform pulling detection on the two leads on the lead frame 5 to be detected.

[0052] Reference Figure 2 and Figure 3 In this embodiment, the pulling detection mechanism 4 includes: a mounting block 41, a pulling hook 42, a first driving member 43 and a motion conversion assembly 44. The mounting block 41 is made of stainless steel. The mounting block 41 is rotatably arranged on the side of the support frame 3 close to the horizontal conveying mechanism 2. There is a gap between the mounting block 41 and the vertical support plate 31. A rotating shaft is vertically welded on the upper surface of the horizontal support plate 32. The rotating shaft is inserted upward into the interior of the mounting block 41. The mounting block 41 is rotatably connected to the rotating shaft through a bearing, so that the mounting block 41 can swing left and right on the horizontal plane.

[0053] Reference Figure 2 and Figure 3A mounting groove 411 is provided on the surface of the mounting block 41 on one side close to the vertical support plate 31. The pulling hook 42 is rotatably arranged on the mounting block 41. The pulling hook 42 extends to the top of the horizontal conveying mechanism 2 at one end away from the mounting block 41. The pulling hook 42 includes: a rotating block 421, a rotating rod 422 and a vertical bent hook 423. A mounting hole is provided on the surface of the mounting block 41 on one side away from the vertical support plate 31. The cross-section of the mounting hole is rectangular. The rotating block 421 is in the shape of a cuboid and is made of stainless steel. The rotating block 421 is arranged in the mounting hole, and the rotating block 421 is rotatably connected to the mounting block 41 through a horizontally arranged round rod.

[0054] Reference Figure 2 and Figure 3 The rotating rod 422 is cylindrical and made of stainless steel. The rotating rod 422 is in a horizontal state. One end of the rotating rod 422 passes through the rotating block 421 and enters the mounting groove 411. The position where the rotating rod 422 passes through the mounting block 41 is staggered with the position where the round rod passes through the mounting block 41. The end of the rotating rod 422 outside the mounting block 41 is fixedly connected with the upper end of the vertical hook 423 by bolts. When the end of the rotating rod 422 in the mounting groove 411 moves upward, the rotating rod 422 moves downward close to the end of the vertical hook 423. When the end of the rotating rod 422 in the mounting groove 411 moves downward, the rotating rod 422 moves upward close to the end of the vertical hook 423; the upper end of the vertical hook 423 is perpendicular to the rotating rod 422, the vertical hook 423 is made of stainless steel, and the lower end of the vertical hook 423 is bent to form a hook at a 90-degree angle for hooking the lead wire so as to perform pull-out detection on the lead wire.

[0055] Reference Figure 2 and Figure 3 The first driving member 43 is a cylinder. A mounting plate 311 is welded on the surface of the vertical support plate 31 away from the horizontal rail 211. The mounting plate 311 is square plate-shaped and made of stainless steel. The first driving member 43 is fixed to the mounting block 41 by bolts. The output shaft of the first driving member 43 can extend toward the direction close to the vertical support plate 31. In this embodiment, because two pulling detection mechanisms 4 are provided, the mounting block 41 is also provided with two horizontally parallel blocks, and one first driving member 43 is provided on one mounting plate 311.

[0056] Reference Figure 2 and Figure 3The motion conversion component 44 is movably arranged between the mounting block 41 and the first driving member 43. The motion conversion component 44 includes: a U-shaped member 441, a first inclined surface block 442 and a second inclined surface block 443. The U-shaped member 441 is made of stainless steel. The U-shaped member 441 is slidably arranged on the vertical support plate 31, and the opening of the U-shaped member 441 faces the direction away from the first driving member 43. Two horizontal through holes are provided on the surface of the vertical support plate 31 close to the mounting block 41. The two ends of the opening of the U-shaped member 441 pass through the two through holes from the surface of the vertical support plate 31 away from the mounting block 41. The end of the U-shaped member 441 close to one end of its own opening is welded to the end of the first inclined surface block 442 away from one end of its own inclined surface. The other end of the U-shaped member 441 close to its own opening is opposite to and spaced from the surface of the mounting block 41 close to the first driving member 43. The end of the U-shaped member 441 away from the opening is fixedly connected to the output shaft of the first driving member 43.

[0057] Therefore, refer to Figure 2 and Figure 3 When the output shaft of the first driving member 43 extends out to push the U-shaped member 441, the U-shaped member 441 will first push the first inclined block 442 to move, and then push the mounting block 41 to rotate.

[0058] Reference Figure 2 and Figure 3 The first bevel block 442 and the second bevel block 443 are both made of stainless steel. The bevel on the first bevel block 442 and the bevel on the second bevel block 443 abut against each other, and the bevel on the first bevel block 442 is below the bevel on the second bevel block 443; the end of the second bevel block 443 away from its own bevel is welded to the end of the rotating rod 422 close to the vertical support plate 31.

[0059] Reference Figure 2 and Figure 3 When the first driving member 43 drives the U-shaped member 441 to push the first inclined surface block 442 to move toward the direction close to the second inclined surface block 443, the first inclined surface block 442 can push the second inclined surface block 443 upward through the inclined surface on itself, so that the second inclined surface block 443 moves upward, and then the end of the rotating rod 422 close to the second inclined surface block 443 swings upward, and the end of the rotating rod 422 away from the second inclined surface block 443 swings downward.

[0060] Reference Figure 2 and Figure 3When the first driving member 43 drives the U-shaped member 441 to pull the first inclined plane block 442 to move in the direction away from the second inclined plane block 443, the first inclined plane block 442 and the second inclined plane block 443 will separate from each other. At this time, under the action of the gravity of the second inclined plane block 443, the second inclined plane block 443 will pull the rotating rod 422 to move downward close to one end of the second inclined plane block 443, so that the rotating rod 422 moves upward away from one end of the second inclined plane block 443.

[0061] Reference Figure 2 and Figure 3 In other embodiments, a spring can also be provided at one end of the rotating rod 422 close to the second inclined surface block 443, one end of the spring is fixedly connected to the end of the rotating rod 422 close to the second inclined surface block 443, and the other end is fixedly connected to the lower side wall of the mounting groove 411. When the rotating rod 422 moves upward close to the second inclined surface block 443, the spring is pulled apart. When the rotating rod 422 needs to move downward close to the second inclined surface end, the spring can also assist the rotating rod 422 to move downward close to the second inclined surface end, thereby improving the sensitivity of the rotating rod 422 to swing up and down.

[0062] Reference Figure 2 and Figure 3 Therefore, at this time, under the drive of the first driving member 43, the end of the pulling hook 42 away from the first driving member 43 can realize an up and down movement in the vertical direction. At the same time, because the pulling hook 42 is installed on the mounting block 41, the rotation of the mounting block 41 can drive the pulling hook 42 to swing left and right on the horizontal plane; when the lead moves to the bottom of the pulling hook 42, the pulling hook 42 away from one end can first move downward to the oblique bottom of the lead, and then swing to the bottom of the lead through the horizontal direction. At this time, it is only necessary to drive the pulling hook 42 up and down to realize the pulling detection of the lead.

[0063] Reference Figure 2 and Figure 3 During the pulling detection, the pulling hook 42 needs to keep hooking the lead wire, so the position of the mounting block 41 needs to be fixed. Therefore, in this embodiment, the pulling detection mechanism 4 also includes a limit assembly 45 for fixing the state of the mounting block 41 after rotation.

[0064] Reference Figure 2 and Figure 3The limit assembly 45 includes a limit block 451 and a second drive member 452. The limit block 451 is made of stainless steel. The limit block 451 vertically passes through the horizontal support plate 32. The horizontal support plate 32 is provided with a through hole for the limit block 451 to vertically pass through. The surface of the mounting block 41 close to the horizontal support plate 32 is provided with a limit hole 412 adapted to the limit slider; the second drive member 452 is fixed to the support frame 3 by screws. The second drive member 452 is a cylinder. The output shaft of the second drive member 452 is away from the end of the cylinder body and is connected to the lower end of the limit block 451. Fixed connection to drive the limit block 451 to move vertically; after the mounting block 41 rotates away from the initial position, the limit block 451 is opposite to the limit hole 412. At this time, the second driving member 452 can drive the limit block 451 to be inserted upward into the limit hole 412, so that the mounting block 41 maintains the rotated state, and when the mounting block 41 needs to be rotated back to the original position, the second driving member 452 can also pull the limit block 451 downward, so that the limit block 451 is pulled out of the limit hole 412, thereby releasing the restriction on the rotation of the mounting block 41.

[0065] At this time, when the pulling hook 42 pulls the lead wire in the vertical direction, the position of the mounting block 41 is not easily changed at will, which helps the pulling hook 42 to stably pull and detect the lead wire.

[0066] Reference Figure 2 and Figure 3 After the pulling test, the end of the pulling hook 42 away from the first driving member 43 needs to avoid the lead and be lifted up, so as to facilitate the subsequent detection of other leads. Therefore, after the pulling test of one lead, the mounting block 41 first needs to drive the pulling hook 42 to move back to the original position, so as to avoid the lead that has been detected, and then the end of the pulling hook 42 away from the first driving member 43 can be lifted up. Because the U-shaped member 441 is only in contact with the mounting block 41, in this embodiment, the pulling detection mechanism 4 also includes an elastic reset member 46.

[0067] Reference Figure 2 and Figure 3 The elastic return member 46 is a spring, one end of which is fixedly connected to the surface of the mounting block 41 away from the vertical support plate 31 by a screw, and the other end is fixedly connected to the horizontal support plate 32 by a screw. After the mounting block 41 rotates, the elastic return member 46 is pulled apart and elastically deformed. After the limit assembly 45 releases the restriction on the rotation of the mounting block 41, the elastic return member 46 can pull the mounting block 41 back to its original position through its own elastic force, so that the mounting block 41 can automatically swing left and right on the horizontal plane.

[0068] Reference Figure 2 and Figure 3At this time, with the up and down movement of the pulling hook 42, the pulling hook 42 can achieve the purpose of hooking the lead wire for pulling detection. At the same time, after the pulling detection, it can also be separated from the lead wire, so as to facilitate the detection of the next lead wire.

[0069] Reference Figure 3 and Figure 4 In this embodiment, in order to facilitate the second inclined plane block 443 to slide down from the first inclined plane block 442 more smoothly after the U-shaped member 441 pushes the mounting block 41 to rotate, a first delay plane 4421 is further provided on the first inclined plane block 442, one end of the first delay plane 4421 is connected to the inclined plane on the first inclined plane block 442, and the other end extends in the direction away from the mounting block 41; a second delay plane 4431 is further provided on the second inclined plane block 443, one end of the second delay plane 4431 is connected to the inclined plane on the second inclined plane block 443, The other end extends toward the direction close to the mounting block 41, and when one end of the U-shaped piece 441 near the opening abuts against the mounting block 41, the first delay plane 4421 and the second delay plane 4431 abut against each other up and down, and when the first inclined plane block 442 and the second inclined plane block 443 move away from each other, the second inclined plane block 443 can also slide down from the first inclined plane block 442 more smoothly through the first delay plane 4421 and the second delay plane 4431, and it is not easy to form a step at this location to affect the smooth separation of the first inclined plane block 442 and the second inclined plane block 443.

[0070] The following is a detection method using the above-mentioned test device, including the following steps:

[0071] S1. First, the lead frame 5 to be tested needs to be placed in the guide groove 2111 on the horizontal conveying track 21, and the lead frame 5 to be tested is driven by the horizontal driving member 22 to move. The lead frame 5 to be tested first moves to the bottom of a pulling detection mechanism 4 and stops moving there;

[0072] S2. Then the first driving member 43 on the pulling detection mechanism 4 is started, and the first driving member 43 drives the U-shaped member 441 to move away from itself. The U-shaped member 441 first pushes the second inclined surface block 443 upward through the first inclined surface block 442, so that the pulling hook 42 moves downward away from the end of the second inclined surface block 443 to the oblique lower side of the single lead on the lead frame 5 to be detected;

[0073] S3. Then, as the first driving member 43 is continuously driven, the first delay plane 4421 and the second delay plane 4431 abut against each other up and down, and at this time, the end of the opening of the U-shaped member 441 opposite to the mounting block 41 and spaced apart will push the mounting block 41 to rotate, so that the mounting block 41 swings to one side on the horizontal plane, and the end of the pull hook 42 away from the second inclined block 443 will move to the bottom of the single lead, and then the limit assembly 45 is started, so that the mounting block 41 is fixed in position after rotation;

[0074] S4. After the position of the mounting block 41 is fixed, the first driving member 43 drives the first inclined plane block 442 to move in the direction away from the second inclined plane block 443 in the reverse direction through the U-shaped member 441. After the inclined plane on the first inclined plane block 442 and the inclined plane on the second inclined plane block 443 are separated from each other, the end of the pulling hook 42 close to the second inclined plane block 443 moves downward under the action of its own gravity, so that the end of the pulling hook 42 away from the second inclined plane block 443 hooks the lead wire upward to perform the lead wire pulling test. At this time, because the limit assembly 45 locks the state of the mounting block 41, when the pulling hook 42 performs the lead wire pulling test, the end of the pulling hook 42 away from the first driving member 43 will not leave the bottom of the lead wire.

[0075] S5. After the pull-out test, the first driving member 43 again drives the first inclined plane block 442 to move toward the second inclined plane block 443 by the U-shaped member 441, so that the pull-out hook member 42 moves downward away from one end of the second inclined plane block 443 and is out of contact with the lead wire;

[0076] S6. Then the limit assembly 45 releases the fixation of the mounting block 41. At this time, because the end of the U-shaped member 441 close to the opening is still in the state of supporting the mounting block 41, the mounting block 41 will not immediately rotate back to the original position. As the first driving member 43 pulls the U-shaped block to move in the direction close to the first driving member 43, the first inclined plane block 442 and the second inclined plane block 443 slide through the first delay plane 4421 and the second delay plane 4431. Therefore, at this time, the end of the pulling hook 42 away from the second inclined plane block 443 will not immediately move upward. Since the end of the U-shaped member 441 close to the opening has been separated from the abutment with the mounting block 41, the mounting block 41 can be rotated to the initial position under the action of the elastic reset member 46, so that the end of the pulling hook 42 away from the second inclined plane block 443 leaves the lead wire;

[0077] S7. Then, as the first driving member 43 continues to drive the first inclined block 442 to move toward the first driving member 43 through the U-shaped member 441, the first inclined block 442 and the second inclined block 443 are separated from each other, and at this time, the end of the pulling hook 42 away from the second inclined block 443 moves upward and will not be hooked to the lead wire;

[0078] S8. Finally, the horizontal conveying mechanism 2 transports the lead frame 5 forward.

[0079] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A semiconductor device inner lead bonding strength testing device, characterized in that: include: A frame (1), a horizontal conveying mechanism (2), a support frame (3) and a pull-out detection mechanism (4), wherein the horizontal conveying mechanism (2) is arranged on the frame (1), and the horizontal conveying mechanism (2) is used for horizontally conveying a lead frame (5) to be detected; the support frame (3) is vertically fixedly arranged on the frame (1), and the support frame (3) and the horizontal conveying mechanism (2) are arranged adjacent to each other; the pull-out detection mechanism (4) is arranged on a side of the support frame (3) close to the horizontal conveying mechanism (2), and the pull-out detection mechanism (4) is located above the horizontal conveying mechanism (2); the pull-out detection mechanism (4) comprises: a mounting block (41), a pull-out hook (42), a motion conversion component (44), a first driving component (43), a limiter component (45) and an elastic reset component (46); the mounting block (41) is rotatably arranged on a side of the support frame (3) close to the horizontal conveying mechanism (2); the pull-out hook (42) is rotatably arranged on the mounting block (41), and the pull-out hook (42) is rotatably arranged on the mounting block (41). The support frame (41) is provided with a pull hook (42) extending from one end of the mounting block (41) to above the horizontal conveying mechanism (2), and the pull hook (42) is used to hook the lead on the lead frame (5); the motion conversion component (44) is movably arranged between the mounting block (41) and the first driving component (43); the first driving component (43) is fixedly arranged on the support frame (3), and the first driving component (43) is used to drive the mounting block (41) to swing left and right on the horizontal plane and drive the pull hook (42) to rotate up and down on the vertical plane through the motion conversion component (44); the limit component (45) is arranged on the support frame (3), and the limit component (45) is used to limit the rotation of the mounting block (41); one end of the elastic reset component (46) is fixedly connected to the support frame (3), and the other end is fixedly connected to the mounting block (41), and the elastic reset component (46) is used to pull the mounting block (41) to rotate back to the initial position, The horizontal conveying mechanism (2) comprises a horizontal conveying track (21) and a horizontal driving member (22); the horizontal conveying track (21) is fixedly arranged on the frame (1), and the lead frame (5) to be detected moves along the horizontal conveying track (21); the horizontal driving member (22) is arranged on the frame (1) and is located below the horizontal conveying track (21), and the horizontal driving member (22) is used to drive the lead frame (5) to be detected to move on the horizontal conveying track (21).

2. The semiconductor device inner lead bonding strength testing device according to claim 1, characterized in that: The motion conversion assembly (44) comprises: a U-shaped member (441), a first inclined surface block (442) and a second inclined surface block (443); the U-shaped member (441) is slidably arranged on the support frame (3); the opening of the U-shaped member (441) faces a direction away from the first driving member (43); one end of the U-shaped member (441) close to its opening is fixedly connected to one end of the first inclined surface block (442) away from its inclined surface; the other end of the U-shaped member (441) close to its opening is opposite to a surface of a side of the mounting block (41) close to the first driving member (43); The first driving member (43) drives the U-shaped member (441) to slide in the horizontal direction, so as to respectively push the first inclined plane block (442) to slide in the horizontal direction and push the mounting block (41) to swing left and right on the horizontal plane; the inclined plane on the first inclined plane block (442) and the inclined plane on the second inclined plane block (443) abut against each other, and the inclined plane on the first inclined plane block (442) is below the inclined plane on the second inclined plane block (443); the end of the second inclined plane block (443) away from its own inclined plane is fixedly connected to the end of the pulling hook member (42) close to the first driving member (43).

3. The semiconductor device inner lead bonding strength testing device according to claim 2, characterized in that: The first inclined plane block (442) is also provided with a first delay plane (4421), one end of which is connected to the inclined plane on the first inclined plane block (442), and the other end of which extends in a direction close to the first driving member (43); the second inclined plane block (443) is also provided with a second delay plane (4431), one end of which is connected to the inclined plane on the second inclined plane block (443), and the other end of which extends in a direction away from the first driving member (43). After the pulling hook (42) hooks the lead wire, the first delay plane (4421) and the second delay plane (4431) abut against each other up and down.

4. The semiconductor device inner lead bonding strength testing device according to claim 2, characterized in that: The pulling hook member (42) comprises a rotating rod (422) and a vertical hook (423); one end of the rotating rod (422) is fixedly connected to the second inclined plane block (443); the other end of the rotating rod (422) is fixedly connected to the upper end of the vertical hook (423); the rotating rod (422) is rotatably connected to the mounting block (41); when the rotating rod (422) moves upward near one end of the second inclined plane block (443), the rotating rod (422) moves downward near one end of the vertical hook (423); the lower end of the vertical hook (423) is bent to form a hook to hook the lead wire.

5. The device for testing the bonding strength of inner leads of a semiconductor device according to claim 4, characterized in that: The pulling detection mechanisms (4) are provided in two groups, and the two groups of pulling detection mechanisms (4) are arranged in a straight line along the movement direction of the lead frame (5) to be detected.

6. The device for testing the bonding strength of inner leads of a semiconductor device according to claim 5, characterized in that: The two vertical hooks (423) in the two sets of pull-out detection mechanisms (4) are bent towards directions approaching each other.

7. The semiconductor device inner lead bonding strength testing device according to claim 1, characterized in that: The limiting assembly (45) comprises a limiting block (451) and a second driving member (452); the limiting block (451) is vertically slidably arranged on the support frame (3); a limiting hole (412) adapted to the limiting slider is arranged on a side surface of the mounting block (41); the second driving member (452) is fixedly arranged on the support frame (3); the second driving member (452) is used to drive the limiting block (451) to enter and exit the limiting hole (412); after the mounting block (41) rotates away from the initial position, the limiting block (451) is opposite to the limiting hole (412).

8. A detection method, based on the semiconductor device inner lead bonding strength testing device according to claim 6, characterized in that: The following steps are involved: S1. First, the lead frame to be tested (5) needs to be placed on the horizontal conveying mechanism (2), and the lead frame to be tested (5) first moves to a pulling detection mechanism (4) and pauses there; S2. Then the first driving member (43) on the pulling detection mechanism (4) is started, and the first driving member (43) drives the U-shaped member (441) to move in a direction away from itself. The U-shaped member (441) first pushes the second inclined block (443) upward through the first inclined block (442), so that the pulling hook member (42) moves downward away from one end of the second inclined block (443) to the oblique lower side of the single lead on the lead frame (5) to be detected; S3. Then, as the first driving member (43) is continuously driven, the first delay plane (4421) and the second delay plane (4431) abut against each other up and down, and at this time, the end of the opening of the U-shaped member (441) opposite to the mounting block (41) and spaced apart will push the mounting block (41) to rotate, so that the mounting block (41) swings to one side on the horizontal plane, and the end of the pulling hook member (42) away from the second inclined block (443) will move to the bottom of the single lead wire, and then the limit assembly (45) will be started, so that the position of the mounting block (41) is fixed after rotation; S4. After the position of the mounting block (41) is fixed, the first driving member (43) drives the first inclined surface block (442) in the reverse direction through the U-shaped member (441) to move in a direction away from the second inclined surface block (443). After the inclined surface on the first inclined surface block (442) and the inclined surface on the second inclined surface block (443) are separated from each other, the end of the pulling hook (42) close to the second inclined surface block (443) moves downward under the action of its own gravity, so that the end of the pulling hook (42) away from the second inclined surface block (443) hooks the lead wire upward to perform the lead wire pulling detection; S5. After the pull-out test, the first driving member (43) drives the first inclined block (442) to move toward the second inclined block (443) through the U-shaped member (441) again, so that the pull-out hook member (42) moves downward away from one end of the second inclined block (443) and breaks away from contact with the lead wire; S6. Then the limit assembly (45) releases the fixation of the mounting block (41), and the mounting block (41) rotates to the initial position under the action of the elastic reset member (46), so that the pull hook (42) moves away from one end of the second inclined block (443) and leaves the bottom of the lead wire; S7. Then, the first driving member (43) drives the first inclined surface block (442) and the second inclined surface block (443) to separate from each other through the U-shaped member (441), so that the pulling hook member (42) moves upward away from one end of the second inclined surface block (443); S8. Finally, the horizontal conveying mechanism (2) transports the lead frame (5) forward.

Images