Thermocouple structure, heat treatment apparatus, and method for manufacturing thermocouple structure

Abstract

Provided is a thermocouple structure having a plurality of temperature measuring portions, which can be made compact. The thermocouple structure includes: a first thermocouple wire; a plurality of second thermocouple wires joined to different positions of a top end or a middle of the first thermocouple wire and formed of a material different from that of the first thermocouple wire; an insulating cover member covering at least any one of the first thermocouple wire and the second thermocouple wires; and a protective tube accommodating the first thermocouple wire and the second thermocouple wires.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to a thermocouple structure, a heat treatment apparatus, and a manufacturing method of a thermocouple structure. BACKGROUND

[0002] A thermocouple structure having a plurality of temperature measuring portions is known (see, for example, Patent Documents 1 to 3). In addition, a thermocouple having two wires and a clamping member, and a temperature measuring junction portion provided by clamping the tip end portions of the two wires in contact with each other by the clamping member is known (see, for example, Patent Document 4).

[0003] <Related Art Documents>

[0004] <Patent Documents>

[0005] Patent Document 1: Japanese Patent Application Publication No. 2011-151055

[0006] Patent Document 2: Japanese Patent Application Publication No. S58-222582

[0007] Patent Document 3: Japanese Patent Application Publication No. S61-110135

[0008] Patent Document 4: Japanese Patent Application Publication No. 2018-25525 SUMMARY

[0009] <Problems to be Solved by the Invention>

[0010] The present disclosure provides a technique capable of downsizing a thermocouple structure having a plurality of temperature measuring portions.

[0011] <Means for Solving the Problems>

[0012] According to one embodiment of the present disclosure, a thermocouple structure is provided, including: a first thermocouple wire; a plurality of second thermocouple wires joined to different positions of a tip end or a middle of the first thermocouple wire and formed of a different material from the first thermocouple wire; an insulating covering member covering at least any one of the first thermocouple wire and the second thermocouple wires; and a protection tube accommodating the first thermocouple wire and the second thermocouple wires.

[0013] <EFFECT OF THE INVENTION>

[0014] According to one aspect, a thermocouple structure having a plurality of temperature measuring portions can be downsized. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 is a diagram showing a configuration example of a thermocouple structure of Embodiment 1.

[0016] Figure 2 is a diagram illustrating one example of a temperature measurement method using the thermocouple structure.

[0017] Figure 3 is a diagram illustrating one example of a temperature measuring portion of the thermocouple structure.

[0018] Figure 4 is a diagram illustrating another example of a temperature measuring portion of the thermocouple structure.

[0019] Figure 5 is a diagram illustrating still another example of a temperature measuring portion of the thermocouple structure.

[0020] Figure 6 is a diagram illustrating one example of a configuration of a heat treatment apparatus having the thermocouple structure.

[0021] Figure 7 is a diagram for explaining a processing container of a heat treatment apparatus of Figure 6

[0022] Figure 8 is a diagram illustrating one example of a configuration of the thermocouple structure of the second embodiment.

[0023] Figure 9 is a diagram illustrating one example of a configuration of the thermocouple structure of the third embodiment. DETAILED DESCRIPTION

[0024] Hereinafter, non-limiting and exemplary embodiments of the present disclosure will be described with reference to the accompanying drawings. In all the drawings, the same or corresponding parts or components are given the same or corresponding reference numerals, and overlapping description will be omitted.

[0025] [First Embodiment]

[0026] (Thermocouple Structure)

[0027] One example of a configuration of the thermocouple structure of the first embodiment will be described. Figure 1 is a diagram illustrating one example of a configuration of the thermocouple structure of the first embodiment. Figure 2 is a diagram illustrating one example of a temperature measurement method using the thermocouple structure.

[0028] As shown in Figure 1 and Figure 2 , the thermocouple structure 100 has a first thermocouple wire 110, a second thermocouple wire 120, a covering member 130, a protection tube 140, a measurer 150, and a switching device 160. Note that, in Figure 1 , the measurer 150 and the switching device 160 are omitted from the illustration. Also, in Figure 2 , the covering member 130 and the protection tube 140 are omitted from the illustration. ​

[0029] The first thermocouple wire 110 and the second thermocouple wire 120 constitute a thermocouple. One end (top end) of the first thermocouple wire 110 is joined to the second thermocouple wire 120, and the other end is connected to the measurer 150. The first thermocouple wire 110 can be formed of one wire, or can be formed by joining a plurality of wires. There is no particular limitation on the material of the first thermocouple wire 110, and for example, a metal conductor such as platinum, platinum-rhodium alloy, or the like can be used.

[0030] The second thermocouple wire 120 is made of a material different from that of the first thermocouple wire 110, and constitutes a thermocouple with the first thermocouple wire 110. The second thermocouple wire 120 includes second thermocouple wires 120a, 120b, 120c.

[0031] One end of the second thermocouple wire 120a is joined to the top end of the first thermocouple wire 110, and forms a temperature measuring portion Al together with the first thermocouple wire 110. One end of the second thermocouple wire 120b is joined to a position of the first thermocouple wire 110 spaced apart from the top end by a predetermined length toward the other end side of the first thermocouple wire 110, and forms a temperature measuring portion A2 together with the first thermocouple wire 110. The second thermocouple wire 120c is joined to a position spaced apart from the position where the first thermocouple wire 110 and the second thermocouple wire 120b are joined by a predetermined length toward the other end side of the first thermocouple wire 110, and forms a temperature measuring portion A3 together with the first thermocouple wire 110.

[0032] The intervals between the second thermocouple wire 120a and the second thermocouple wire 120b, and the intervals between the second thermocouple wire 120b and the second thermocouple wire 120c are set according to the positions of the temperature measuring portions, and can be the same or different. The other ends of the second thermocouple wires 120a, 120b, 120c are connected to the measurer 150 via the switching device 160, respectively.

[0033] There is no particular limitation on the material of the second thermocouple wires 120a, 120b, 120c, and for example, a metal conductor such as platinum, platinum-rhodium alloy, or the like can be used. As one example, in the case where the material of the first thermocouple wire 110 is platinum, platinum-rhodium alloy can be used as the material of the second thermocouple wires 120a, 120b, 120c.

[0034] Note that the number of the second thermocouple wires 120 is not limited to the above-described three, but is determined according to the number of the temperature measuring portions, and for example, can be two, or can be four or more.

[0035] The covering member 130 is an insulating member that covers the second thermocouple wire 120. The covering member 130 functions to prevent contact between the first thermocouple wire 110 and the second thermocouple wire 120. The covering member 130 includes covering members 130a, 130b, 130c.

[0036] The covering members 130a, 130b, 130c are insulating tubes into which the second thermocouple wires 120a, 120b, 120c are inserted and through which the second thermocouple wires 120a, 120b, 120c pass to be covered. As a material of the insulating tube, there is no particular limitation, and for example, ceramics such as alumina (AI2O3), magnesia (MgO), zirconia (ZrO2), aluminum titanate (AI2O3-TiO2), quartz, silicon carbide (SiC) can be used.

[0037] Note that, as the covering member 130, as long as it is an insulating member capable of covering the second thermocouple wire 120, for example, an insulating bead or an insulating sheet can be used. In the case of using an insulating bead, by mounting a plurality of insulating beads on the second thermocouple wire 120, it is possible to cover and insulate the second thermocouple wire 120. In the case of using an insulating sheet, by winding an insulating sheet on the second thermocouple wire 120 in a manner of covering the second thermocouple wire 120, it is possible to cover and insulate the second thermocouple wire 120.

[0038] In addition, the covering member 130 can cover the first thermocouple wire 110 instead of covering the second thermocouple wire 120, or can cover both the first thermocouple wire 110 and the second thermocouple wire 120a.

[0039] The protection tube 140 is used to house the first thermocouple wire 110 and the second thermocouple wire 120. The protection tube 140 is formed of, for example, quartz or SiC.

[0040] The measurer 150 measures the temperature based on the thermoelectric electromotive force of the first thermocouple wire 110 and the second thermocouple wire 120. As the measurer 150, for example, a data logger can be used.

[0041] The switching device 160 switches the connection state between the measurer 150 and the second thermocouple wires 120a, 120b, 120c. By switching the connection state between the measurer 150 and the second thermocouple wires 120a, 120b, 120c, it is possible to switch and measure the temperature of the temperature measuring sections Al to A3. For example, when the switching device 160 is switched so that the second thermocouple wire 120a is connected to the measurer 150, it is possible to measure the temperature of the temperature measuring section Al. The measurer 150 and the switching device 160 are connected by a thermocouple wire made of the same material as the second thermocouple wire 120. However, the measurer 150 and the switching device 160 can be connected by a compensating lead.

[0042] According to the thermocouple structure 100 described above, a diverse thermocouple with three temperature measuring sections A1 to A3 is formed by a first thermocouple wire 110 and three second thermocouple wires 120 that form a thermocouple with the first thermocouple wire 110. This reduces the number of thermocouple wires required for multi-point measurements, thus saving space and reducing manufacturing costs. Specifically, when using a thermocouple formed by a pair of thermocouple wires, six thermocouple wires are required. In contrast, when using the thermocouple structure 100, only four thermocouple wires are needed: one first thermocouple wire 110 and three second thermocouple wires 120, thus reducing the number of thermocouple wires.

[0043] (Temperature Measurement Department)

[0044] Taking temperature measuring unit A2 as an example Figure 1 The configuration of the temperature measuring parts A1 to A3 of the thermocouple structure 100 will be explained by way of example.

[0045] Figure 3 This is a diagram showing an example of the temperature measuring section A2 of the thermocouple structure 100. (See diagram for example.) Figure 3 As shown, the temperature measuring unit A2 is formed by welding two first thermocouple wires 110 and a second thermocouple wire 120 to the respective ends 110p of the first thermocouple wires 110. In other words, the temperature measuring unit A2 is formed by welding the respective ends 110p of the two first thermocouple wires 110 to the end 120p of the second thermocouple wire 120.

[0046] There are no particular limitations on the methods used to form welded joints; for example, gas welding or spot welding can be used. Figure 3 The image shows an example of gas welding using a combustion flame F ejected from a gas jet unit G.

[0047] Figure 4 This is a diagram showing another example of the temperature measuring section A2 of the thermocouple structure 100. (See diagram for example.) Figure 4 As shown, the temperature measuring unit A2 is formed by a first thermocouple wire 110, a second thermocouple wire 120, and a clamping member 170.

[0048] The clamping member 170 clamps the first thermocouple wire 110 in a state where the middle (midway) portion is in contact with the tip of the second thermocouple wire 120 to form the temperature measuring section A2. The clamping member 170 can be, for example, a cylindrical member, or a member formed by rolling a plate-shaped member into a cylindrical shape. The clamping member 170 is formed, for example, of a metal conductor such as platinum or platinum-rhodium. From the viewpoint of suppressing the generation of thermoelectric potential caused by the contact of different types of materials, the material of the clamping member 170 is preferably the same as the material of the first thermocouple wire 110 or the second thermocouple wire 120.

[0049] The method of forming the temperature measuring portion A2 using the holding member 170 is not particularly limited, and for example, press bonding can be used. Specifically, first, the first thermocouple wire 110 and the second thermocouple wire 120 are arranged in the cylinder of the holding member 170 in a state in which the middle portion of the first thermocouple wire 110 is juxtaposed with the top end of the second thermocouple wire 120. Next, the holding member 170 is pressed to form the temperature measuring portion A2.

[0050] As described above, in the example shown in Figure 4 In the example shown in FIG. 10, the temperature measuring portion A2 is formed by the first thermocouple wire 110 and the second thermocouple wire 120 that is press-bonded to the middle of the first thermocouple wire 110. Therefore, the risk of disconnection of the first thermocouple wire 110 and the second thermocouple wire 120 due to thermal expansion and contraction of the thermocouple wires can be reduced.

[0051] In addition, after the first thermocouple wire 110 and the second thermocouple wire 120 are arranged in the cylinder of the holding member 170 in a state in which they are juxtaposed, the holding member 170 is pressed to form the temperature measuring portion A2. Therefore, it is easy to form the temperature measuring portion A2 at a desired position, and the positioning accuracy is improved.

[0052] Figure 5 FIG. 11 is a view showing still another example of the temperature measuring portion A2 of the thermocouple structure 100. As shown in Figure 5 The temperature measuring portion A2 is formed by two first thermocouple wires 110a, 110b, a second thermocouple wire 120, and a holding member 170.

[0053] The holding member 170 holds the respective top ends of the two first thermocouple wires 110a, 110b and the top end of the second thermocouple wire 120 in contact with each other to form the temperature measuring portion A2.

[0054] The method of forming the temperature measuring portion A2 using the holding member 170 is not particularly limited, and for example, press bonding can be used. Specifically, first, the first thermocouple wire 110 and the second thermocouple wire 120 are arranged in the cylinder of the holding member 170 in a state in which the middle portion of the first thermocouple wire 110 is juxtaposed with the top end of the second thermocouple wire 120. Next, the holding member 170 is pressed to form the temperature measuring portion A2.

[0055] As described above, in the example shown in Figure 5 In the example shown in FIG. 10, the temperature measuring portion A2 is formed by the first thermocouple wire 110 and the second thermocouple wire 120 that is press-bonded to the middle of the first thermocouple wire 110. Therefore, the risk of disconnection of the first thermocouple wire 110 and the second thermocouple wire 120 due to thermal expansion and contraction of the thermocouple wires can be reduced.

[0056] In addition, the first thermocouple wire 110a and the first thermocouple wire 110b are arranged in the cylinder of the holding member 170 in a state where the respective top ends thereof are abutted against each other and are juxtaposed with the top end of the second thermocouple wire 120, and then the holding member 170 is flattened to form the temperature measuring portion A2. Thus, the temperature measuring portion A2 is easily formed at a desired position, and the positioning accuracy is improved.

[0057] (Heat treatment apparatus)

[0058] A heat treatment apparatus having the thermocouple structure 100 will be described taking a batch-type heat treatment apparatus capable of performing heat treatment on a plurality of substrates in a state where the plurality of substrates are held on a substrate holder in a plurality of stages in a processing container as an example. However, the heat treatment apparatus having the thermocouple structure 100 is not limited to the batch-type heat treatment apparatus, and can be applied to, for example, a single-wafer-type heat treatment apparatus. Figure 6 is a view showing a configuration example of a heat treatment apparatus having the thermocouple structure 100. Figure 7 is a view for describing a processing container of a heat treatment apparatus. Figure 6

[0059] As shown in Figure 6 , the heat treatment apparatus 1 has a processing container 34, a lid body 36, a wafer boat 38, a gas supply unit 40, an exhaust unit 41, and a heater 42.

[0060] The processing container 34 is a vertically long (vertical) container for accommodating the wafer boat 38. The wafer boat 38 is a substrate holder that holds a plurality of semiconductor wafers (hereinafter referred to as "wafers W") at predetermined intervals. The processing container 34 includes an inner tube 44 that is a cylindrical tube having a top plate and whose lower end is open, and an outer tube 46 that is a cylindrical tube having a top plate and whose lower end is open and covers the outside of the inner tube 44. The inner tube 44 and the outer tube 46 are formed of a heat-resistant material such as quartz, and constitute a double-tube structure arranged in a coaxial manner.

[0061] The top plate portion 44A of the inner tube 44 is, for example, flat. On one side of the inner tube 44, a nozzle accommodation portion 48 for accommodating a gas supply tube is formed along the longitudinal direction (vertical direction) thereof. For example, as shown in Figure 7 , a portion of the side wall of the inner tube 44 protrudes outward to form a protruding portion 50, and the inside of the protruding portion 50 is formed as the nozzle accommodation portion 48. On the side wall of the inner tube 44 on the opposite side from the nozzle accommodation portion 48, a rectangular opening 52 is formed along the longitudinal direction (vertical direction) thereof.

[0062] The opening 52 is an exhaust port formed in a manner capable of exhausting gas inside the inner tube 44. The length of the opening 52 is the same as the length of the wafer boat 38, or is formed longer than the length of the wafer boat 38 and extends in the vertical direction, respectively. ​

[0063] The lower end of the processing container 34 is supported by a cylindrical manifold 54 formed of, for example, stainless steel. A flange portion 56 is formed on the upper end of the manifold 54, and the lower end of the outer tube 46 is provided on the flange portion 56 to be supported thereby. A seal member 58 such as an O-ring is interposed between the flange portion 56 and the lower end of the outer tube 46 to make the inside of the outer tube 46 airtight.

[0064] A support portion 60 in the shape of a circular ring is provided on the inner wall of the upper portion of the manifold 54, and the lower end of the inner tube 44 is provided on the support portion 60 to be supported thereby. A lid 36 is airtightly mounted on the opening of the lower end of the manifold 54 via a seal member 62 such as an O-ring to airtightly plug the opening of the lower end of the processing container 34, that is, the opening of the manifold 54. The lid 36 is formed of, for example, stainless steel.

[0065] A rotary shaft 66 is provided through the center portion of the lid 36 via a magnetic fluid seal 64. The lower portion of the rotary shaft 66 is supported in a rotatable manner by an arm 68A of a lift unit 68 constituted by a boat lift mechanism.

[0066] A rotary plate 70 is provided on the upper end of the rotary shaft 66, and a wafer boat 38 for holding a wafer W is placed on the rotary plate 70 via a heat insulating stage 72 made of quartz. Thus, the lid 36 and the wafer boat 38 can be integrally moved up and down by lifting the lift unit 68, and the wafer boat 38 is inserted into or pulled out of the processing container 34.

[0067] A gas supply unit 40 is provided on the manifold 54, and gases such as film forming gas, etching gas, and purge gas are introduced into the inner tube 44. The gas supply unit 40 has a plurality of (for example, three) gas supply tubes 76, 78, 80 made of quartz. Each of the gas supply tubes 76, 78, 80 is provided in the inner tube 44 in the longitudinal direction thereof, and the base end thereof is bent in the shape of an L and supported by the manifold 54 in such a manner as to penetrate the manifold 54.

[0068] As Figure 7As shown, the gas supply pipes 76, 78, 80 are arranged in a row in the circumferential direction in the nozzle housing portion 48 of the inner pipe 44. In the gas supply pipes 76, 78, 80, a plurality of gas holes 76A, 78A, 80A are formed at predetermined intervals in the longitudinal direction thereof, and are arranged so as to be able to release each gas from each gas hole 76A, 78A, 80A toward the horizontal direction. The predetermined intervals are, for example, set to be the same as the intervals of the wafers W supported by the wafer boat 38. Further, the positions in the height direction are set so that the gas holes 76A, 78A, 80A are located in the middle between the wafers W adjacent to each other in the vertical direction, and each gas can be effectively supplied to the space portion between the wafers W. As the types of the gases, a film formation gas, an etching gas, and a purge gas are used, and each gas can be supplied as needed via each gas supply pipe 76, 78, 80 while being subjected to flow control.

[0069] A gas outlet 82 is formed in the side wall of the upper portion of the manifold 54 and above the support portion 60, and is able to discharge the gas in the inner pipe 44 discharged from the opening 52 via the space portion 84 between the inner pipe 44 and the outer pipe 46. A gas exhaust unit 41 is provided at the gas outlet 82. The gas exhaust unit 41 has a gas exhaust passage 86 connected to the gas outlet 82, and a pressure regulating valve 88 and a vacuum pump 90 are sequentially inserted in the gas exhaust passage 86, so that the inside of the processing container 34 can be evacuated.

[0070] A cylindrical heater 42 is provided around the outer pipe 46 so as to cover the outer pipe 46. The heater 42 is a heating unit for heating the wafers W housed in the processing container 34. The heater 42 is divided into a plurality of heating regions, and the heaters 42a to 42e are provided from the upper side to the lower side in the vertical direction. The amounts of heat generation of the heaters 42a to 42e are independently controlled by power controllers 43a to 43e, respectively.

[0071] Further, a thermocouple structure 100 having temperature measuring portions Al to A5 corresponding to the heaters 42a to 42e is provided in the vicinity of the inner wall of the inner pipe 44.

[0072] The overall operation of the heat treatment apparatus 1 is controlled by a control portion 95. The control portion 95 controls the amounts of heat generation of the heaters 42a to 42e by controlling the power controllers 43a to 43e based on the temperatures measured by the thermocouple structure 100. The control portion 95 can be, for example, a computer or the like. Further, a computer program for performing the overall operation of the heat treatment apparatus 1 is stored in a storage medium. The storage medium can be, for example, a floppy disk, an optical disk, a hard disk, a flash memory, a DVD, or the like.

[0073] According to the heat treatment apparatus 1 described above, since the thermocouple structure 100 is space-saving, the thermocouple structure 100 can be easily arranged in the narrow space between the inner tube 44 and the wafer boat 38.

[0074] [2nd Embodiment]

[0075] A configuration example of the thermocouple structure of the 2nd embodiment will be described. Figure 8 is a view showing a configuration example of the thermocouple structure of the 2nd embodiment.

[0076] As shown in Figure 8 , the thermocouple structure 200 of the 2nd embodiment differs from the thermocouple structure 100 of the 1st embodiment in that the second thermocouple wires 120a, 120b are collectively covered by one covering member 230b. Note that, as for other structures, the structures are the same as those of the thermocouple structure 100. Hereinafter, mainly the differences from the thermocouple structure 100 will be described.

[0077] The thermocouple structure 200 has the first thermocouple wire 110, the second thermocouple wires 120, the covering member 230, the protection tube 140, the measurer 150, and the switching device 160. Note that, in Figure 8 , the illustration of the measurer 150 and the switching device 160 is omitted.

[0078] The covering member 230 includes the covering members 230a, 230b, 230c. The covering member 230a is an insulating tube into which the second thermocouple wire 120a is inserted and through which the second thermocouple wire 120a passes to cover the second thermocouple wire 120a. The covering member 230b is an insulating tube into which the second thermocouple wires 120a, 120b are inserted and through which the second thermocouple wires 120a, 120b pass to cover the second thermocouple wires 120a, 120b. The covering member 230c is an insulating tube into which the second thermocouple wire 120c is inserted and through which the second thermocouple wire 120c passes to cover the second thermocouple wire 120c. The covering members 230a, 230c are one example of the first covering member, and the covering member 230b is one example of the second covering member.

[0079] According to the thermocouple structure 200 described above, a diversified thermocouple having three temperature measuring portions Al to A3 is formed by the first thermocouple wire 110 and the three second thermocouple wires 120 that constitute thermocouples with the first thermocouple wire 110. Thus, the number of thermocouple wires in the case of multipoint measurement can be reduced, and therefore, space-saving can be achieved, and manufacturing cost can be reduced.

[0080] In addition, according to the thermocouple structure 200, the two second thermocouple wires 120a, 120b are covered by one covering member 230b. Thus, the thermocouple structure 200 can be made more space-saving.

[0081] Note that, in the thermocouple structure 200, as with the thermocouple structure 100, the temperature measuring portions A1 to A3 can be formed by welding, pressure bonding, or the like. Also, as with the thermocouple structure 100, the thermocouple structure 200 is suitable for temperature measurement in the batch-type heat treatment apparatus 1.

[0082] [3rd Embodiment]

[0083] A configuration example of the thermocouple structure of the 3rd embodiment will be described. Figure 9 is a view showing a configuration example of the thermocouple structure of the 3rd embodiment. Figure 9 (a) is a view showing an outline of the thermocouple structure, Figure 9 (b) is a plan view of the holding member.

[0084] As shown in Figure 9 (a), the thermocouple structure 300 of the 3rd embodiment differs from the thermocouple structure 200 of the 2nd embodiment in that the thermocouple structure 300 has an insulating holding member 380 that holds the first thermocouple wire 110 and the second thermocouple wires 120a, 120b, 120c. Note that, regarding other structures, the structures are the same as those of the thermocouple structure 200. Hereinafter, mainly the differences from the thermocouple structure 200 will be described.

[0085] The thermocouple structure 300 has the first thermocouple wire 110, the second thermocouple wires 120, the cover member 230, the protection tube 140, the measurer 150, the switching device 160, and the holding member 380. Note that, in Figure 9 (a), the measurer 150 and the switching device 160 are omitted from the illustration.

[0086] As shown in Figure 9 (b), the holding member 380 is a circular plate-shaped insulating member that is formed with four insertion holes 380h through which the first thermocouple wire 110 and the second thermocouple wires 120a, 120b, 120c can be inserted and passed. By inserting and passing the first thermocouple wire 110 and the second thermocouple wires 120a, 120b, 120c through the insertion holes 380h of the holding member 380, it is possible to hold the positional relationship between the first thermocouple wire 110 and the second thermocouple wires 120a, 120b, 120c. Therefore, when the first thermocouple wire 110 and the second thermocouple wires 120a, 120b, 120c are inserted into the protection tube 140, it is possible to suppress a deviation in the positional relationship between the first thermocouple wire 110 and the second thermocouple wires 120a, 120b, 120c.

[0087] According to the thermocouple structure 300, a diversified thermocouple having three temperature measuring portions Al to A3 is formed by the first thermocouple wire 110 and the three second thermocouple wires 120 which constitute a thermocouple with the first thermocouple wire 110. Thus, the number of thermocouple wires in the case of multipoint measurement can be reduced, and therefore, space saving can be achieved, and manufacturing cost can be reduced.

[0088] Further, according to the thermocouple structure 300, the two second thermocouple wires 120a and 120b are covered by one cover member 230b. Thus, the thermocouple structure 300 can be made more space saving.

[0089] Further, according to the thermocouple structure 300, the positional relationship between the first thermocouple wire 110 and the second thermocouple wires 120a, 120b, and 120c is maintained by the holding member 380. Thus, when the first thermocouple wire 110 and the second thermocouple wires 120a, 120b, and 120c are inserted into the protection tube 140, the positional relationship between the first thermocouple wire 110 and the second thermocouple wires 120a, 120b, and 120c can be prevented from being deviated.

[0090] Note that, in the thermocouple structure 300, as with the thermocouple structure 100, the temperature measuring portions Al to A3 can be formed by welding, pressure bonding, or the like. Further, as with the thermocouple structure 100, the thermocouple structure 300 is also suitable for temperature measurement of the batch-type heat treatment apparatus 1.

[0091] It should be understood that the embodiments disclosed herein are illustrative in all respects and are not restrictive. The embodiments described above can be omitted, replaced, or changed in various ways without departing from the scope and spirit of the appended claims.

Claims

1. A thermocouple structure, comprising: First thermocouple wire; Multiple second thermocouple wires are crimped to different positions at the top or middle of the first thermocouple wire and are formed of a different material from the first thermocouple wire; An insulating covering component covers at least one of the first thermocouple wire and the second thermocouple wire; The protective tube houses the first thermocouple wire and the second thermocouple wire; as well as The clamping component clamps the first thermocouple wire and the second thermocouple wire. The first thermocouple wire is formed by joining two thermocouple wires. The top ends of the two thermocouple wires are pressed together with the top end of the second thermocouple wire by the clamping component when they are in contact.

2. The thermocouple structure according to claim 1, wherein, The covering component at least covers the second thermocouple wire.

3. The thermocouple structure according to claim 2, wherein, The covering component includes a first covering component covering one of the second thermocouple wires and a second covering component covering multiple of the second thermocouple wires.

4. The thermocouple structure according to any one of claims 1 to 3, comprising: An insulating retaining component holds the first thermocouple wire and the plurality of second thermocouple wires.

5. A heat treatment apparatus, comprising: Elongated processing containers; A heating unit is disposed around the processing container; as well as A thermocouple structure is disposed within the processing container or in the space between the processing container and the heating unit. The thermocouple structure has First thermocouple wire; Multiple second thermocouple wires are crimped to different positions at the top or middle of the first thermocouple wire and are formed of a different material from the first thermocouple wire; A covering component that covers at least one of the first thermocouple wire and the second thermocouple wire; A protective tube, accommodating the first thermocouple wire and the second thermocouple wire; and The clamping component clamps the first thermocouple wire and the second thermocouple wire. The first thermocouple wire is formed by joining two thermocouple wires. The top ends of the two thermocouple wires are pressed together with the top end of the second thermocouple wire by the clamping component when they are in contact.

6. The heat treatment apparatus according to claim 5, wherein, The heating unit is divided into multiple independently controllable heating zones along the longitudinal direction of the processing container. Multiple temperature measuring sections, formed by connecting the first thermocouple wire and the second thermocouple wire, are respectively arranged correspondingly to the multiple heating areas.

7. A method for manufacturing a thermocouple structure, comprising: The process of pressing a second thermocouple wire made of a different material from the first thermocouple wire onto the top of the first thermocouple wire; as well as A clamping component that clamps the first thermocouple wire and the second thermocouple wire is used in the process of pressing the first thermocouple wire into the second thermocouple wire. The first thermocouple wire is formed by joining two thermocouple wires. The top ends of the two thermocouple wires are pressed together with the top end of the second thermocouple wire by the clamping component when they are in contact.

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