A deposition furnace with a multi-axis rotating bearing structure

Abstract

This invention discloses a deposition furnace with a multi-axis rotating support structure, relating to the field of carbon fiber composite material manufacturing equipment. The invention includes at least two heaters and at least two rotating support plates mounted on a support platform corresponding to the heaters; the heaters are any one of a circular integral heater, a circular spliced ​​heater, a square integral heater, or a square spliced ​​heater; the heater material is graphite, carbon-carbon, or other high-temperature resistant materials such as tungsten-molybdenum; sealing rings are installed on the peripheral sidewalls of the support platform to press and seal against the inner sidewall of the furnace. This invention enables the rotating support plates carrying the carbon fiber preform to rotate during the heating and preparation process, maintaining the uniformity of the internal mixed gas and heating temperature on its surface, improving the quality of the finished carbon fiber preform, ensuring that the carbon source gas begins to fully decompose and volatilize at the bottom of the furnace cavity, and improving the overall deposition effect of the product.

Description

Technical Field

[0001] This invention belongs to the field of carbon fiber composite material manufacturing equipment, and in particular relates to a deposition furnace with a multi-axis rotating load-bearing structure. Background Technology

[0002] Carbon-carbon composites are high-performance composite materials with carbon fiber reinforcement and carbon matrix. They have the characteristics of high strength, corrosion resistance and strong designability. They have been widely used in many fields such as aerospace, aviation and transportation. With social development and technological progress, there are higher requirements for the quality of carbon-carbon composite products.

[0003] Chemical vapor deposition (CVD) is a widely used process for producing carbon-carbon composite materials. Most existing CVD furnaces or systems introduce carbon source gas into the furnace from the bottom through multiple inlet pipes. This gas flows directly into the bottom of the deposition chamber at a specific flow rate and velocity, where it undergoes pyrolysis to form matrix carbon deposited on the interior or surface of the preform. Due to this inlet structure, the carbon source gas enters the material tray at the bottom of the deposition chamber directly from the inlet pipes and rapidly enters the high-temperature zone in the middle of the furnace at a speed of 1–3 m / s. This results in the product temperature at the very bottom of the furnace being too low to reach the deposition temperature. Furthermore, the carbon source gas quickly passes through the bottom product and reaches the middle product before it can deposit on the bottom. This leads to poor deposition of the bottom product within the furnace, resulting in inconsistent product quality at different locations within the furnace, or inconsistent quality at different parts of the same product. Summary of the Invention

[0004] This invention provides a deposition furnace with a multi-axis rotating bearing structure, which solves the above problems.

[0005] To solve the above-mentioned technical problems, the present invention is achieved through the following technical solution:

[0006] The present invention provides a deposition furnace with a multi-axis rotating support structure, wherein the furnace includes at least two heaters and at least two rotating support plates mounted on a support platform corresponding to the heaters.

[0007] Furthermore, the heater can be any one of a circular integral heater, a circular spliced ​​heater, a square integral heater, or a square spliced ​​heater.

[0008] Furthermore, the heater is made of other high-temperature resistant materials such as graphite, carbon-carbon, or tungsten-molybdenum.

[0009] Furthermore, the support platform can be either axial-flow or non-axial-flow type.

[0010] Furthermore, the deposition furnace also includes a furnace body and a lifting mechanism for raising and lowering the support platform; a sealing ring is installed on the peripheral side wall of the support platform to press and seal against the inner side wall of the furnace body.

[0011] The present invention has the following advantages over the prior art:

[0012] 1. The deposition furnace with multi-axis rotary bearing structure of the present invention uses a lifting platform with lifting structure, which can automatically and conveniently lift the rotating bearing plate on which the carbon fiber preform is placed, so as to conveniently realize the placement, removal or entry of the preform into the working position, and has strong controllability.

[0013] 2. The deposition furnace of the present invention with a multi-axis rotating bearing structure has multiple rotating bearing plates, which are driven by multiple rotating axes and driving mechanisms to rotate, so that the rotating bearing plates carrying the carbon fiber preform can rotate during the heating and preparation process, maintain the uniformity of the effect of the internal mixed gas and heating temperature on its surface, and improve the quality of the finished carbon fiber preform.

[0014] 3. The deposition furnace of the present invention with a multi-axis rotating bearing structure has through holes evenly distributed on the bearing platform and rotating bearing plate. A gas collection chamber is provided in the bearing platform to buffer the mixed gas, so that the mixed gas can be uniformly transported into the furnace cavity through the through holes in the form of buffered airflow at the same rate, maintaining the uniformity of the movement of the mixed gas in the furnace cavity, ensuring that the carbon source gas begins to fully decompose and volatilize at the bottom of the furnace cavity, and improving the overall deposition effect of the product.

[0015] Of course, any product implementing this invention does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the internal structure of a deposition furnace with a multi-axis rotating bearing structure according to the present invention, showing the furnace moving upward on the bearing platform.

[0018] Figure 2 This is a schematic diagram of the internal structure of a deposition furnace with a multi-axis rotating bearing structure according to the present invention when the bearing platform reaches the top working state.

[0019] Figure 3 for Figure 1 A magnified view of a portion of position A in the middle;

[0020] Figure 4 This is a top view of the support platform structure of specific embodiment 1 of the present invention;

[0021] Figure 5 This is a top view of the support platform structure of specific embodiment 2 of the present invention;

[0022] The attached diagram lists the components represented by each number as follows:

[0023] 1-Furnace body, 101-Insulation layer, 102-Furnace cavity, 103-Exhaust pipe, 2-Heater, 201-High temperature resistant insulation pipe, 3-Power box, 301-Rotating mechanism, 302-Rotating shaft, 303-Rotating support plate, 304-Second through hole, 4-Support platform, 401-Gas collection chamber, 402-Sealing ring, 403-Gas inlet pipe, 404-First through hole, 5-Lifting mechanism, 6-Heating controller, 7-Medium frequency power supply, 8-Carbon fiber preform. Detailed Implementation

[0024] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0025] In the description of this invention, it should be understood that the terms "below", "inside", "lifting motion", "upper surface", "peripheral sidewall", etc., which indicate orientation or positional relationship, are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting this invention. Specific Implementation Example 1:

[0027] Please see Figure 1-4As shown, a deposition furnace with a multi-axis rotating bearing structure according to the present invention includes a furnace body 1, a bearing platform 4 installed below the furnace body 1 and moving up and down within the furnace cavity 102 of the furnace body 1, three rotating bearing plates 303 disposed on the upper surface of the bearing platform 4 for supporting carbon fiber preforms 8, a power box 3 installed below the bearing platform 4, a lifting mechanism 5 disposed below the power box 3 for lifting the bearing platform 4, and three heaters 2 installed on the upper part of the furnace cavity 102 and corresponding to the rotating bearing plates 303; the three rotating bearing plates 303 are evenly distributed on the bearing platform 4; generally, the number of rotating bearing plates 303 disposed on the surface of the bearing platform 4 generally does not exceed 7 depending on the volume of the deposition furnace, and the corresponding number of heaters 2 and rotating mechanism 301 is consistent with the number of rotating bearing plates 303; the heaters 2 are any one of a circular integral heater, a circular spliced ​​heater, a square integral heater, or a square spliced ​​heater, and the material of the heaters 2 is graphite, carbon-carbon, or tungsten-molybdenum or other high-temperature resistant materials; in this embodiment, a circular integral heater is preferred, and the material is preferably graphite high-temperature resistant material;

[0028] Multiple rotating mechanisms 301 are installed inside the power box 3. Each rotating mechanism 301 is equipped with a rotating shaft 302 that is rotatably connected to the rotating support plate 303. The rotating support plate 303 is rotated by the rotating shaft 302 that passes through the support platform 4. The lifting mechanism 5 can lift the carbon fiber preform 8 carried on the support platform 4 and send it into the heater 2. The lifting mechanism 5 adopts a hydraulic cylinder, electric cylinder, or lead screw structure. The rotating mechanism 301 inside the power box 3 is a motor, which is fixedly installed inside the power box 3. Its rotating shaft passes through the support platform 4 and is clearance-fitted with the through hole of the support platform 4. The end of the rotating shaft is fixedly connected to the bottom of the rotating support plate 303 to drive its rotation.

[0029] The bearing platform 4 is equipped with a sealing ring 402 on its peripheral side wall, which is pressed and sealed against the inner side wall of the furnace body 1; this is used to keep the bearing platform 4 sealed when it moves upward inside the furnace cavity 102, so as to prevent pressure loss or internal gas leakage.

[0030] The support platform 4 is either axial or non-axial, and in this embodiment, it is preferably non-axial. The specific structure is as follows: a gas collecting chamber 401 is provided inside the support platform 4, and first through holes 404 are evenly distributed on the surface of the support platform 4 to connect the furnace cavity 102 and the gas collecting chamber 401; the lower part of the gas collecting chamber 401 is connected to an air inlet pipe 403; the gas collecting chamber 401 is used to input a mixed gas including alkanes, nitrogen, CH4+C3H8 and oxygen through the air inlet pipe 403 for homogenization and temporary storage.

[0031] The rotating support plate 303 has evenly distributed second through holes 304 corresponding to the first through hole 404 on its surface. The mixed gas is homogenized by the gas collecting chamber 401 and enters the furnace chamber 102 directly through the first through hole 404, or it first enters the bottom of the rotating support plate 303 through the first through hole 404 and is located below the second through hole 304, and then enters the furnace chamber 102 after connecting with the second through hole 304, or it directly reacts with the carbon fiber preform 8.

[0032] The furnace body 1 is fixed by a bracket 104; a heat insulation layer 101 is provided inside the furnace body 1, and an exhaust pipe 103 is provided at the top; the heat insulation layer 101 is used to ensure the uniformity of the internal heating reaction temperature and prevent rapid temperature changes; the heat insulation layer 101 is made of silicate composite material, such as glass wool, ceramic fiber board or aluminum silicate fiber board.

[0033] The positive and negative electrodes at the top of the heater 2 are connected to the furnace outside by wires inside the high-temperature resistant insulating tube 201, and are connected to the heating controller 6 and the intermediate frequency power supply 7 in sequence. The high-temperature resistant insulating tube 201 is made of high-temperature resistant insulating ceramic. The heating controller 6 and the intermediate frequency power supply 7 are common heating controllers and power supplies for heater-type deposition furnaces. This is existing technology and will not be described in detail. Specific Implementation Example 2:

[0035] like Figure 5 As shown, the difference between this specific embodiment and specific embodiment 1 is that...

[0036] The upper surface of the support platform 4 has 5 rotating support plates 303 for supporting the carbon fiber preform 8. The corresponding number of heaters 2 and rotating mechanisms 301 is the same as the number of rotating support plates 303, which is also 5. The rotating support plates 303 are evenly distributed on the upper surface of the support platform 4. The support platform 4 adopts an axial flow type, which is the prior art and will not be described in detail. The heaters 2 are square integral heaters, and the material of the heaters 2 is carbon high temperature resistant material.

[0037] The working principle of this invention is:

[0038] In the initial state, a gap is formed between the support platform 4 and the furnace chamber 102, so that the carbon fiber preform 8 can be directly placed on the rotating support plate 303 on the support platform 4. Then, it is lifted by the lifting mechanism 5 so that the rotating support plate 303 on which the carbon fiber preform 8 is placed is just below the heater 2, so that the carbon fiber preform 8 is located in the heater 2, and the support platform 4 and the furnace chamber 102 are sealed by the sealing ring 402.

[0039] In operation, a negative pressure is created inside the furnace chamber 102, and the carbon fiber preform 8 is fully heated to 1050 degrees Celsius by the heater 2. During this process, a mixed gas including alkanes, nitrogen, and CH4+C3H8 is continuously introduced into the furnace chamber 102 through an axial or non-axial support platform and its gas inlet structure, and together they react with the carbon fiber preform 8. Furthermore, the carbon fiber preform 8 is continuously rotated on the rotating support plate 303 on the support platform 4 by the rotating mechanism 301 to achieve uniform heating and reaction.

[0040] After preparation, the support platform 4 is lowered by the lifting mechanism 5 to bring the support platform 4 to its initial state, that is, a gap is formed between the support platform 4 and the furnace cavity 102; after cooling, the prepared carbon fiber composite material can be taken out.

[0041] Beneficial effects:

[0042] 1. The deposition furnace with multi-axis rotary bearing structure of the present invention uses a lifting platform with lifting structure, which can automatically and conveniently lift the rotating bearing plate on which the carbon fiber preform is placed, so as to conveniently realize the placement, removal or entry of the preform into the working position, and has strong controllability.

[0043] 2. The deposition furnace of the present invention with a multi-axis rotating bearing structure has multiple rotating bearing plates, which are driven by multiple rotating axes and driving mechanisms to rotate, so that the rotating bearing plates carrying the carbon fiber preform can rotate during the heating and preparation process, maintain the uniformity of the effect of the internal mixed gas and heating temperature on its surface, and improve the quality of the finished carbon fiber preform.

[0044] 3. The deposition furnace of the present invention with a multi-axis rotating bearing structure has through holes evenly distributed on the bearing platform and rotating bearing plate. A gas collection chamber is provided in the bearing platform to buffer the mixed gas, so that the mixed gas can be uniformly transported into the furnace cavity through the through holes in the form of buffered airflow at the same rate, maintaining the uniformity of the movement of the mixed gas in the furnace cavity, ensuring that the carbon source gas begins to fully decompose and volatilize at the bottom of the furnace cavity, and improving the overall deposition effect of the product.

[0045] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A deposition furnace with a multi-axis rotating bearing structure, characterized in that, The furnace includes at least two heaters (2) and at least two rotating support plates (303) mounted on the support platform (4) corresponding to the heaters (2); The deposition furnace also includes a furnace body (1), a lifting mechanism (5) for lifting the support platform (4), and a power box (3) installed below the support platform (4); the lifting mechanism (5) is located below the power box (3) for lifting the support platform (4); Multiple rotating mechanisms (301) are installed inside the power box (3). The rotating mechanism (301) is provided with a rotating shaft (302) that is rotatably connected to the rotating bearing plate (303). The rotating bearing plate (303) is rotated by the rotating shaft (302) that passes through the bearing platform (4). The surface of the support platform (4) is evenly provided with first through holes (404) to connect the furnace cavity (102) and the gas collecting chamber (401); the lower part of the gas collecting chamber (401) is connected to the gas inlet pipe (403). The rotating support plate (303) has a second through hole (304) that corresponds to the first through hole (404) evenly distributed on its surface; the mixed gas is homogenized by the gas collection chamber (401) and enters the furnace cavity (102) directly through the first through hole (404), or it enters the bottom of the rotating support plate (303) through the first through hole (404) and is located below the second through hole (304), and then enters the furnace cavity (102) after connecting with the second through hole (304), or it directly reacts with the carbon fiber preform (8); A sealing ring (402) is installed on the peripheral wall of the support platform (4) to press and seal against the inner wall of the furnace body (1).

2. A deposition furnace with a multi-axis rotating bearing structure according to claim 1, characterized in that, The heater (2) can be any one of a circular integral heater, a circular spliced ​​heater, a square integral heater, or a square spliced ​​heater.

3. A deposition furnace with a multi-axis rotating bearing structure according to claim 2, characterized in that, The heater (2) is made of high-temperature resistant materials such as graphite, carbon-carbon or tungsten-molybdenum.

4. A deposition furnace with a multi-axis rotating bearing structure according to claim 1, characterized in that, The support platform (4) can be axial or non-axial.

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