Adjustable height vacuum platform module

Abstract

The present invention discloses an adjustable height vacuum suction platform module, which belongs to the technical field of wafer processing equipment, and includes a vacuum suction platform; a position adjustment component, the vacuum suction platform is divided into three layers: upper, middle and lower. The lower layer is provided with a plurality of mutually parallel air guide grooves with increasing or decreasing lengths, the middle layer of the vacuum suction platform is provided with a plurality of panel guide grooves connected with the air guide grooves, the panel guide grooves and the air guide grooves cover the surface to be adsorbed of the vacuum suction platform, the upper layer of the vacuum suction platform is evenly provided with air holes, the air holes will be connected by the panel guide grooves and the air guide grooves to form an air chamber connected with the surface of the vacuum suction platform, and the vacuum suction platform is also provided with an air inlet and an air outlet for connecting a negative pressure generating device. The present invention proposes an adjustable height vacuum suction platform module, the adsorption action area of ​​which is divided into a plurality of intervals, and different intervals are combined to form a variety of specifications to meet the processing requirements of wafers.

Description

Technical Field

[0001] The invention relates to the technical field of wafer processing equipment, and more specifically to a vacuum suction platform module with adjustable height. Background Art

[0002] In a Chinese invention patent with publication number CN1235270C, a cutting machine is disclosed, in which an electric motor is connected to a male threaded shaft, and the sliding block is moved along the guide rail toward the X-axis direction by the forward and reverse rotation of the electric motor. A cylindrical supporting member is fixed to the sliding block, and an adsorption member is rotatably mounted on the supporting member around a central axis extending substantially vertically. A rotational drive source of an electric motor that can be used to rotate the adsorption member is provided in the supporting member. The disc-shaped adsorption member is formed of a porous material such as porous ceramics. In this patent, the adsorption action area of ​​the adsorption member is fixed, and can only adsorb wafers that are less than or equal to the adsorption area.

[0003] In the mini LED and micron LED manufacturing fields, the sizes of wafers to be processed are different. The adsorption components in the above patents cannot meet the market demand.

[0004] In view of the above problems, the present invention proposes an adjustable height vacuum suction platform module, whose adsorption area is divided into several intervals, and different intervals are combined to form a variety of specifications to meet the processing requirements of wafers. Summary of the invention

[0005] The technical solution adopted by the present invention is: providing an adjustable height vacuum suction platform module, including: a vacuum suction platform; a position adjustment component, used to move the vacuum suction platform in mutually perpendicular X-axis and Y-axis directions; wherein the vacuum suction platform is divided into three layers, upper, middle and lower, the lower layer is provided with a plurality of air guide grooves which are parallel to each other and whose lengths are increasing or decreasing, the middle layer of the vacuum suction platform is provided with a plurality of panel guide grooves connected to the air guide grooves, the panel guide grooves and the air guide grooves cover the surface to be adsorbed of the vacuum suction platform, the upper layer of the vacuum suction platform is evenly provided with air holes, the air holes will be connected by the panel guide grooves and the air guide grooves to form an air chamber connected to the surface of the vacuum suction platform, and the vacuum suction platform is also provided with an air inlet and an air outlet for connecting a negative pressure generating device.

[0006] After adopting the above structure, the air guide grooves of different lengths and the panel guide grooves connected thereto constitute a plurality of air chamber sections, and the air chamber sections are combined to form vacuum adsorption surfaces of different sizes for adsorbing wafers of different specifications and sizes.

[0007] Preferably, the position adjustment component includes a Y-axis linear guide and an X-axis linear guide stacked vertically with each other, the Y-axis linear guide is equipped with a first servo motor, the output shaft of the first servo motor is connected to a first ball screw arranged along the linear direction of the Y-axis linear guide, the X-axis linear guide is screwed with the first ball screw, the X-axis linear guide is equipped with a second servo motor, the output shaft of the second servo motor is connected to a second ball screw arranged along the linear direction of the X-axis linear guide, and the first ball screw is screwed with a carrier plate; the position adjustment component can freely move the vacuum adsorption platform on the plane formed by the X-axis and the Y-axis.

[0008] Preferably, a sliding block slidably connected to the Y-axis linear guide is provided at the bottom of the X-axis linear guide, and the carrier plate is slidably connected to the Y-axis linear guide.

[0009] Preferably, it further comprises a height adjusting component, which is arranged at the output position of the position adjusting component, and the vacuum adsorption platform is installed on the height adjusting component.

[0010] Preferably, the height adjustment component includes a base and a rotating driven precision screw horizontally arranged on the base, the rotating driven precision screw is threaded with a wedge block, and an upper platform with a right-angled triangular cross-section is vertically slidably connected to the base, the inclined surface of the upper platform is in contact with the surface of the wedge block, and an enlarged panel is installed on the horizontal surface of the upper platform.

[0011] Preferably, the wedge block is slidably connected to the base in a direction parallel to the rotationally driven precision lead screw.

[0012] Preferably, a height scale is provided on the surface of the side wall of the base, and an indicator needle cooperating with the height scale is provided on the enlarged panel.

[0013] Preferably, the number of the air guide grooves is five, a single air guide groove and the panel guide groove connected thereto form an air chamber area, and the air guide groove with the shortest length forms a rectangular area, which is located at any one of the four corners of the vacuum adsorption platform.

[0014] Preferably, the five air chamber sections on the vacuum adsorption platform include a rectangular section and four L-shaped sections, and the ends of the L-shaped sections have equal widths.

[0015] Preferably, a cable chain is further included for electrical connection of the position adjustment component in the X-axis and Y-axis directions.

[0016] Preferably, the device comprises: a vacuum adsorption platform; a position adjustment component for moving the vacuum adsorption platform in the directions of mutually perpendicular X-axis and Y-axis; wherein the vacuum adsorption platform is divided into an upper and lower layer, the lower layer is provided with a plurality of air guide grooves which are parallel to each other and whose lengths are increasing or decreasing, the lower layer is also provided with a plurality of panel guide grooves connected with the air guide grooves, the panel guide grooves and the air guide grooves cover the surface to be adsorbed of the vacuum adsorption platform, the upper layer of the vacuum adsorption platform is evenly provided with air holes, the air holes will be connected by the panel guide grooves and the air guide grooves to form an air chamber connected with the surface of the vacuum adsorption platform, and the vacuum adsorption platform is also provided with an air inlet and an air outlet for connecting a negative pressure generating device.

[0017] Compared with the prior art, the present invention has the following advantages:

[0018] 1. In the present invention, the vacuum adsorption platform is installed at the working end of the position adjustment component, and the position adjustment component can move freely on a plane formed by an X-axis and a Y-axis that are perpendicular to each other, and the X-axis and the Y-axis on the position adjustment component are driven by a driving motor to drive the ball screw to rotate, thereby driving the vacuum adsorption platform to move precisely in this direction.

[0019] 2. The surface to be adsorbed of the vacuum adsorption platform in the present invention is composed of several sections, the shortest air guide groove forms a rectangular section, and the remaining sections and the matrix section form a new rectangular surface to be adsorbed. The existing vacuum adsorption platform is mainly circular and used for processing wafers, while the surface to be adsorbed in the present invention is rectangular and suitable for panel processing fields such as LEDs. It has good specification compatibility and accurate positioning of large areas and long strokes.

[0020] 3. In the present invention, a height adjustment component is used, in which the upper platform is slidably connected to the side wall of the base, and the wedge block is driven to move along the direction of the screw by rotating the precision screw, and the wedge block drives the height adjustment component to move up and down. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0022] Figure 2 It is a structural schematic diagram of the total position adjustment components of the present invention;

[0023] Figure 3 An exploded view of the height adjustment component of the present invention;

[0024] Figure 4 It is a structural diagram of the height adjustment component in the present invention;

[0025] Figure 5 It is a structural schematic diagram of the bottom surface of the vacuum adsorption platform in the present invention;

[0026] Figure 6It is a structural schematic diagram of the upper surface of the vacuum adsorption platform in the present invention.

[0027] Description of the numbers in the figure:

[0028] Among them, 1. Position adjustment component; 11. Y-axis linear guide; 12. First servo motor; 13. First ball screw; 14. X-axis linear guide; 15. Second servo motor; 16. Second ball screw; 17. Carrier plate; 2. Height adjustment component; 21. Base; 22. Knob-driven precision screw; 23. Wedge block; 24. Upper platform; 25. Enlarged panel; 26. Height scale; 3. Vacuum adsorption platform; 31. Bottom plate; 32. Air guide groove; 34. Panel guide groove; 4. Cable chain. DETAILED DESCRIPTION

[0029] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0031] The negative pressure generating device in this specification refers to a device such as a vacuum generator or a vacuum pump that can generate negative pressure. The input and output air ducts of the device are connected to the air inlet and the air outlet in this specification. This is the prior art, so it will not be elaborated on.

[0032] The rotary drive precision screw in this specification means that at least one end of the screw is provided with a gear connected to the driving shaft, and the two ends of the rotary drive precision screw are rotatably connected to the base 21. This is the prior art, so no further description is given. However, the movable end of the screw in the prior art is a nut, while the movable end in the present invention is a wedge block 23 screwed with the rotary drive precision screw.

[0033] In the present invention, the adsorption area of ​​the vacuum adsorption platform 3 is changed with the actual application. Preferably, the adsorption area of ​​the vacuum adsorption platform 3 is not less than 20㎜*20㎜, and more preferably, the adsorption area of ​​the vacuum adsorption platform 3 is not less than 20㎜*20㎜-600㎜*600㎜.

[0034] Example 1

[0035] like Figure 1 As shown, the present invention includes a position adjustment component 1, a height adjustment component 2 installed on the active end of the position adjustment component 1, and a vacuum adsorption platform 3 installed on the active end of the height adjustment component 2. In some examples, a cable chain 4 is provided on both the X-axis and the Y-axis of the position adjustment component 1, and the cables in the cable chain 4 are electrically connected to the driving member in the position adjustment component 1.

[0036] like Figure 2 As shown, the position adjustment component 1 includes a Y-axis linear guide 11 and an X-axis linear guide 14 stacked on the Y-axis linear guide 11, and the angle between the linear direction of the Y-axis linear guide 11 and the linear direction of the X-axis linear guide 14 is a right angle. The linear direction of the Y-axis linear guide 11 is now called the Y-axis, and the linear direction of the X-axis linear guide 14 is called the X-axis. Guide rails protruding upward are provided on both sides of the Y-axis linear guide 11, and a first servo motor 12 is provided at one end of the Y-axis linear guide 11, and the output end of the first servo motor 12 faces the other end of the Y-axis linear guide 11. The output end of the first servo motor 12 is connected to a first ball screw 13, and the first ball screw 13 is arranged along the linear direction of the Y-axis linear guide 11. Two sliding blocks are arranged side by side at the bottom of the X-axis linear guide 14, and the X-axis linear guide 14 is slidably connected to the Y-axis linear guide 11 through the sliding blocks. The bottom of the X-axis linear guide 14 is provided with a female threaded hole, which is screwed with the male thread on the first ball screw 13. By driving the first ball screw 13 to rotate, the X-axis linear guide 14 is driven to move along the first ball screw 13. Similarly, upwardly protruding guide rails are provided on both sides of the X-axis linear guide 14, and a second servo motor 15 is provided at one end of the X-axis linear guide 14, and the output end of the second servo motor 15 faces the other end of the X-axis linear guide 14. The output end of the second servo motor 15 is connected to the second ball screw 16, which is arranged along the linear direction of the X-axis linear guide 14, and the action end of the position adjustment component 1 is screwed with the second ball screw 16.

[0037] In some examples, the active end of the position adjustment component 1 is a carrier plate 17, the height adjustment component 2 is mounted on the carrier plate 17, the bottom of the carrier plate 17 is slidably connected to the guide rail on the X-axis linear guide 14, and the bottom of the carrier plate 17 is also screwed with the second ball screw 16. By driving the second ball screw 16 to rotate, the carrier plate 17 is driven to move along the second ball screw 16.

[0038] In some examples, the active end of the position adjustment component 1 is a carrier plate 17 , and the vacuum adsorption platform 3 is directly mounted on the carrier plate 17 .

[0039] like Figure 3 As shown, the height adjustment component 2 includes a base 21, a knob-driven precision lead screw 22 and an upper platform 24. The base 21 includes a base plate and two side plates symmetrically arranged at the edge of the base plate. The knob-driven precision lead screw 22 is connected to the two side plates so that the middle part thereof is suspended in the air. In some examples, the area of ​​the side plate adjacent to the driving end of the knob-driven precision lead screw 22 is larger than the side plate on the other side. In some examples, a reinforcing plate is provided between the edge of the side plate with a larger area and the base plate. A wedge block 23 is screwed in the middle of the knob-driven precision lead screw 22, and the wedge block 23 is slidably connected to the base plate along the linear direction of the knob-driven precision lead screw 22. The cross-sections of the upper platform 24 on both sides along the linear direction of the knob-driven precision lead screw 22 are right triangles, the plane where one of the right-angled sides of the right triangle is located is parallel to the plane of the base plate on the base 21, and the plane where the other right-angled side of the right triangle is located is vertically slidably connected to the side plate on the base 21. The inclined surface of the right triangle faces downward, and a plane that fits the inclined surface of the upper platform 24 is provided on the wedge block 23. The upper platform 24 is lifted up and down by moving the wedge block 23 in the linear direction of the precision lead screw 22 driven by the knob. In some examples, an enlarged panel 25 having an area larger than the surface area of ​​the upper platform 24 is installed on the upper platform 24, and the vacuum adsorption platform 3 is installed on the enlarged panel 25.

[0040] In some examples, the vacuum adsorption platform 3 is directly mounted on the upper surface of the upper platform 24 .

[0041] like Figure 4 As shown, in some examples, a height scale 26 is vertically provided on the surface of the side plate of the base 21 , and an indicator needle cooperating with the height scale 26 is provided on the enlarged panel 25 .

[0042] In some examples, an indicator needle that cooperates with the height scale 26 is installed at the bottom of the vacuum adsorption platform 3 .

[0043] like Figure 5 For the convenience of description, Figure 5 The direction of the air guide groove 32 is called the first direction, and the direction perpendicular to the first direction in the plane of the vacuum adsorption platform 3 is called the second direction. The vacuum adsorption platform 3 is divided into three layers, and five air guide grooves 32 are arranged in parallel in the bottom layer. The lengths of the air guide grooves 32 are distributed in equal intervals toward one direction in the second direction. The shortest air guide groove 32 is adjacent to the edge of the vacuum adsorption platform 3. Figure 6As shown, a panel guide groove 34 is provided in the middle layer of the vacuum adsorption platform 3, and the panel guide groove 34 is arranged along the first direction and connected with the air guide groove 32 to form an air chamber. The panel guide groove 34 and the air guide groove 32 cover the surface to be adsorbed of the vacuum adsorption platform 3, and the upper layer of the vacuum adsorption platform 3 is evenly provided with air holes, which are connected by the panel guide groove 34 and the air guide groove 32 to form an air chamber connected to the surface of the vacuum adsorption platform 3. A single panel guide groove 34 can only be connected to one air guide groove 32, and five air guide grooves 32 divide the surface to be adsorbed into five adsorption intervals, among which the shortest air guide groove 32 constitutes a rectangular interval, and the remaining four L-shaped intervals and the matrix interval constitute a new rectangular surface to be adsorbed, and the five intervals can constitute five rectangular surfaces to be adsorbed of different sizes.

[0044] Combination Figure 4 As shown, in some examples, the vacuum adsorption platform 3 is mounted on a bottom plate 31, and the bottom plate 31 is mounted on the enlarged panel 25, and the bottom plate 31 is used to increase the load-bearing structural strength of the vacuum adsorption platform 3. Two of the four sides of the vacuum adsorption platform 3 are respectively provided with an air inlet and an air outlet for connecting the negative pressure generating device.

[0045] Example 2

[0046] This embodiment is different from Embodiment 1 in that, in this embodiment, an air inlet and an air outlet for connecting the negative pressure generating device are arranged in one of the four sides of the vacuum adsorption platform 3 .

[0047] Example 3

[0048] The difference between this embodiment and the first embodiment is that the vacuum adsorption platform 3 is divided into two layers, and five air guide grooves 32 are arranged in parallel in the bottom layer. The lengths of the air guide grooves 32 are distributed in equal proportions in one direction of the second direction. The shortest air guide groove 32 is adjacent to the edge of the vacuum adsorption platform 3. Figure 6 As shown, a panel guide groove 34 is also provided in the bottom layer of the vacuum adsorption platform 3. The panel guide groove 34 is arranged along the first direction and is connected with the air guide groove 32 to form an air chamber. The panel guide groove 34 and the air guide groove 32 cover the surface to be adsorbed of the vacuum adsorption platform 3. The upper layer of the vacuum adsorption platform 3 is evenly provided with air holes. The air holes are connected by the panel guide groove 34 and the air guide groove 32 to form an air chamber connected to the surface of the vacuum adsorption platform 3. A single panel guide groove 34 can only be connected to one air guide groove 32. Five air guide grooves 32 divide the surface to be adsorbed into five adsorption intervals, among which the shortest air guide groove 32 constitutes a rectangular interval, and the remaining four L-shaped intervals and the matrix interval constitute a new rectangular surface to be adsorbed. The five intervals can constitute five rectangular surfaces to be adsorbed of different sizes.

[0049] By controlling the opening and closing of the air inlet and outlet of different matrix intervals, the area of ​​the interval to be adsorbed can be controlled. The negative pressure generating device acts on the air chamber formed by the panel guide groove 34 and the air guide groove 32. The material placed on the surface of the vacuum adsorption platform 3 is adsorbed and fixed by the air holes. This is the existing technology, so it is not elaborated.

[0050] The above is an explanation of the preferred embodiments of the present invention, but it cannot be understood as a limitation of the claims. The present invention is not limited to the above embodiments, and its specific structure is allowed to be changed. All changes made within the scope of protection of the independent claims of the present invention are within the scope of protection of the present invention.

Claims

1. Adjustable height vacuum suction platform module, including: Vacuum adsorption platform; A position adjustment component, used for moving the vacuum adsorption platform in mutually perpendicular X-axis and Y-axis directions; The vacuum adsorption platform is divided into three layers: upper, middle and lower. The lower layer is provided with a plurality of air guide grooves which are parallel to each other and whose lengths are increasing or decreasing. The middle layer of the vacuum adsorption platform is provided with a plurality of panel guide grooves which are connected with the air guide grooves. The panel guide grooves and the air guide grooves cover the surface to be adsorbed of the vacuum adsorption platform. The upper layer of the vacuum adsorption platform is evenly provided with air holes. The air holes are connected with the panel guide grooves and the air guide grooves to form an air chamber which is connected with the surface of the vacuum adsorption platform. The vacuum adsorption platform is also provided with an air inlet and an air outlet for connecting a negative pressure generating device. and a height adjustment component, the height adjustment component is arranged at the output position of the position adjustment component, and the vacuum adsorption platform is installed on the height adjustment component; The height adjustment component includes a base and a rotary drive precision screw horizontally arranged on the base, the rotary drive precision screw is screwed with a wedge block, an upper platform with a right triangle cross section is vertically slidably connected to the base, the inclined surface of the upper platform is in contact with the surface of the wedge block, and an enlarged panel is installed on the horizontal surface of the upper platform; The wedge block is slidably connected to the base in a direction parallel to the rotationally driven precision lead screw; A height scale is arranged on the surface of the side wall of the base, and an indicating needle matched with the height scale is arranged on the enlarged panel.

2. The height-adjustable vacuum suction platform module according to claim 1, characterized in that: The position adjustment component includes a Y-axis linear guide and an X-axis linear guide stacked vertically with each other, the Y-axis linear guide is equipped with a first servo motor, the output shaft of the first servo motor is connected to a first ball screw arranged along the linear direction of the Y-axis linear guide, the X-axis linear guide is screwed with the first ball screw, the X-axis linear guide is equipped with a second servo motor, the output shaft of the second servo motor is connected to a second ball screw arranged along the linear direction of the X-axis linear guide, and the first ball screw is screwed with a carrier plate.

3. The height-adjustable vacuum suction platform module according to claim 2, characterized in that: A sliding block slidably connected to the Y-axis linear guide is provided at the bottom of the X-axis linear guide, and the carrier plate is slidably connected to the Y-axis linear guide.

4. The height-adjustable vacuum suction platform module according to claim 1, characterized in that: There are five air guide grooves, and a single air guide groove and the panel guide groove connected thereto form an air chamber area. The shortest air guide groove forms a rectangular area, which is located at any one of the four corners of the vacuum adsorption platform.

5. The height-adjustable vacuum suction platform module according to claim 4, characterized in that: The five air chamber sections on the vacuum adsorption platform include a rectangular section and four L-shaped sections, and the widths of the ends of the L-shaped sections are equal.

6. The height-adjustable vacuum suction platform module according to claim 1, characterized in that: A cable chain is also included for electrical connection of the position adjustment component in the X-axis and Y-axis directions.

7. Adjustable height vacuum suction platform module, including: Vacuum adsorption platform; A position adjustment component, used for moving the vacuum adsorption platform in the directions of the X-axis and the Y-axis which are perpendicular to each other; The vacuum adsorption platform is divided into two layers, the lower layer is provided with a plurality of air guide grooves which are parallel to each other and whose lengths are increasing or decreasing, and the lower layer is also provided with a plurality of panel guide grooves connected with the air guide grooves, the panel guide grooves and the air guide grooves cover the surface to be adsorbed of the vacuum adsorption platform, the upper layer of the vacuum adsorption platform is evenly provided with air holes, the air holes are connected by the panel guide grooves and the air guide grooves to form an air chamber connected with the surface of the vacuum adsorption platform, and the vacuum adsorption platform is also provided with an air inlet and an air outlet for connecting a negative pressure generating device; and a height adjustment component, the height adjustment component is arranged at the output position of the position adjustment component, and the vacuum adsorption platform is installed on the height adjustment component; The height adjustment component includes a base and a rotary drive precision screw horizontally arranged on the base, the rotary drive precision screw is screwed with a wedge block, an upper platform with a right triangle cross section is vertically slidably connected to the base, the inclined surface of the upper platform is in contact with the surface of the wedge block, and an enlarged panel is installed on the horizontal surface of the upper platform; The wedge block is slidably connected to the base in a direction parallel to the rotationally driven precision lead screw; A height scale is arranged on the surface of the side wall of the base, and an indicating needle matched with the height scale is arranged on the enlarged panel.

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