Sintering press and pressure sintering method for producing sintered connections by means of a sintering press

Abstract

The present invention relates to a sintering press for forming a sintered connection between a first connecting partner and a second connecting partner arranged above the first connecting partner, the sintering press having a suction fixture for fixing the first connecting partner and a pressing member arranged above the suction fixture, the pressing member and the suction fixture converging relative to each other when the first connecting partner and the second connecting partner are arranged between the pressing member and the suction fixture, and for mutually pressing the first connecting partner and the second connecting partner, the suction fixture having a first suction opening on its side facing the pressing member, the suction fixture being configured to suck the first connecting partner and to fix the first connecting partner relative to the suction fixture by generating negative pressure at the first suction opening when the first connecting partner is arranged above the first suction opening. The present invention also relates to a pressure sintering method for producing a sintered connection by means of a sintering press.

Description

Technical Field

[0001] The invention relates to a sintering press and a pressure sintering method for producing a sintered connection by means of a sintering press. Background Art

[0002] A pressure sintering method is known from DE20152015120156A1, in which a first connection partner (e.g. a substrate) is connected to a second connection partner (e.g. a power semiconductor component) by sintering. The first connection partner on which the second connection partner is arranged is placed on the lower tool of the sintering press in this article, wherein the sintered material to be sintered is placed between the two connection partners. The plastic film portion of the plastic film is preferably arranged on the connection partner. Pressure is applied to the connection partner in the direction of the lower tool by the clamping piece and the elastic pressure pad of the sintering press, and a temperature treatment is applied to the sintered material, wherein the sintering material in this article is converted into sintered metal, thereby constructing a sintered connection between the connection partners. After the sintering connection is constructed, the clamping piece and the elastic pressure pad are lifted away from the connection partner again.

[0003] A disadvantage here is that the connecting partner may adhere to the pressure pad or, during a pressure shock, in the case of a plastic film portion of the plastic film being arranged between the pressure pad and the connecting partner, the connecting partner may adhere to the plastic film and thereby the position and / or orientation of the connecting partner in the sintering press may change and, in particular, the connecting partner may be lifted together with the pressure pad or the plastic film, respectively, when the elastic pressure pad or the plastic film, respectively, is lifted. Summary of the invention

[0004] The object of the present invention is to provide a sintering press for producing a sintered connection between a first connection partner and a second connection partner arranged above the first connection partner, wherein the first sintering partner can be securely fixed in the sintering press.

[0005] The object is achieved by a sintering press, which is used to form a sintered connection between a first connecting partner and a second connecting partner arranged above the first connecting partner, the sintering press having a suction fixing device for fixing the first connecting partner, and a pressing member arranged above the suction fixing device, wherein the sintering press for producing the sintered connection is configured so that the pressing member and the suction fixing device converge relative to each other when the first connecting partner and the second connecting partner are arranged between the pressing member and the suction fixing device, and thus are used to press the first connecting partner and the second connecting partner against each other, wherein the suction fixing device has a first suction opening on its side facing the pressing member, wherein the suction fixing device is configured so that when the first connecting partner is arranged above the first suction opening, negative pressure is generated at the first suction opening for sucking the first connecting partner and thus for fixing the first connecting partner relative to the suction fixing device.

[0006] The object is further achieved by a pressure sintering method for producing a sintered connection between a first connection partner and a second connection partner arranged thereon by means of a sintering press according to the invention, the pressure sintering method comprising the following consecutive method steps:

[0007] a) arranging a first connecting partner together with a second connecting partner arranged above the first connecting partner between the holding-down element and the suction fixture, wherein the sintering material to be sintered is arranged between the first connecting partner and the second connecting partner, wherein the first connecting partner is arranged above the first suction opening;

[0008] b) suctioning the first connection partner by generating a negative pressure at the first suction opening, thereby fixing the first connection partner relative to the suction fixing device;

[0009] c) applying pressure to the first connection partner and the second connection partner and the sintered material by bringing the pressing element and the suction fixture together relative to one another, wherein the first connection partner and the second connection partner are thereby pressed against one another, and applying temperature to the sintered material, wherein due to the application of pressure and temperature the sintered material is transformed into a sintered metal;

[0010] d) separating the pressing element and the suction fixture relative to each other;

[0011] e) releasing the first connection partner relative to the suction fastening by restoring the gas pressure present above the first connection partner at the first suction opening.

[0012] Advantageous configurations of the method result in a manner analogous to the advantageous configurations of the sintering press, and vice versa.

[0013] It has proven to be advantageous if the suction securing device is arranged on the pressing partner of the sintering press or is an integral component of the pressing partner of the sintering press. If the suction securing device is arranged on the pressing partner of the sintering press, the sintering press has a particularly simple structure. If the suction securing device is an integral component of the pressing partner of the sintering press, the sintering press has a particularly compact structure.

[0014] Furthermore, it has proven to be advantageous if the corresponding cross-sectional area of ​​the first suction opening is 0.007 mm 2 Up to 3.2mm 2 , especially 0.03mm 2 Up to 1.8mm 2 Therefore, the cross-sectional area of ​​the first suction opening is preferably relatively small. For example, during a pressing process, when a high pressure acts on the first connection partner, such as on a substrate, damage to the first connection partner is reliably avoided due to the above, and in particular a breakage of the first connection partner is avoided, although the first connection partner is not supported across the entire area, the latter being caused by the first suction opening.

[0015] It has also proven to be advantageous if the side of the suction fixing device facing the pressure element has a particularly rectangular fixing area, wherein the first suction openings are arranged in the fixing area, wherein at least some of the first suction openings are arranged in the peripheral area of ​​the fixing area or in the central area of ​​the fixing area, thereby making it possible to fix the first connection partner in a highly load-bearing manner.

[0016] In this case, it has proven to be advantageous if the side of the suction fixing device facing the pressure element has a rectangular fixing area, wherein the number of first suction openings in the corner area of ​​the fixing area is increased compared to other areas of the fixing area, thus making it possible to fix the first connection partner in a highly load-bearing manner.

[0017] It has also proven to be advantageous if the sintering press has a suction gripper which is designed to hold the first connecting partner securely thereon directly or indirectly by generating negative pressure at its suction opening and to arrange the first connecting partner together with the second connecting partner arranged above the first connecting partner in the space between the pressure piece and the suction fixture before the pressing process and / or to remove the first connecting partner and the second connecting partner together from the space again after the pressing process. The suction gripper allows the first connecting partner together with the second connecting partner arranged above the first connecting partner to be arranged very quickly in the space between the pressure piece and the suction fixture before the pressing process and / or to be removed very quickly from the space again after the pressing process.

[0018] It has also proven to be advantageous if the sintering press for producing the sintered connection is designed to bring the pressure element and the suction fixture together and thus to press the first and second connection partners together when the first connection partner and the second connection partner are arranged between the pressure element and the suction fixture and the first connection partner is arranged directly on the suction fixture, wherein the suction fixture has a first suction opening on its side facing the pressure element, wherein the suction fixture is designed to suck the first connection partner and thus to fix the latter, the first connection partner, relative to the suction fixture by generating a negative pressure at the first suction opening when the first connection partner is arranged above the first suction opening so as to lie directly on the suction fixture. This makes it possible to produce a sintered connection between the first connection partner and the second connection partner arranged above it particularly economically, wherein no workpiece carrier is required for producing the sintered connection.

[0019] In this case, it has proven to be advantageous if the suction fixture has, on its side facing the pressure element, at least one second suction opening for sucking the membrane portion of the membrane when the membrane portion is arranged above the first connection partner and the second connection partner and above the at least one second suction opening, wherein the at least one second suction opening is arranged in such a way that when the first connection partner is arranged above the first suction opening, the first connection partner is not arranged above the at least one second suction opening, wherein when the membrane portion is arranged above the at least one second suction opening, the suction fixture is designed to suck the membrane portion by generating a negative pressure at the at least one second suction opening and thus the first connection partner is fixed relative to the suction fixture via the membrane portion. The first connection partner is thus additionally fixed relative to the suction fixture indirectly via the membrane portion.

[0020] It has also proven to be advantageous to arrange a preferably elastic limiting element on the side of the suction fixture facing the pressure piece, which limiting element limits or prevents a movement of the first connecting partner in a normal direction perpendicular to the side of the suction fixture facing the pressure piece when the first connecting partner is arranged directly on the suction fixture. The first connecting partner is thus additionally fixed relative to the suction fixture, albeit only in a normal direction perpendicular to the side of the suction fixture facing the pressure piece. The limiting element also enables a particularly precise positioning of the first connecting partner above the first suction opening.

[0021] It has also proven to be advantageous that the sintering press for producing the sintered connection is configured to bring the pressing element and the suction fixture together and thus to press the first connecting partner and the second connecting partner against each other, when the first connecting partner and the second connecting partner are arranged between the pressing element and the suction fixture, and the first connecting partner is arranged directly on the workpiece carrier with the passage opening so as to be located above the passage opening, and the workpiece carrier is arranged directly on the suction fixture, wherein the suction fixture has a first suction opening on its side facing the pressing element, wherein when the first connecting partner is arranged directly on the workpiece carrier with the passage line so as to be located above the passage line, and the workpiece carrier is arranged directly on the suction fixture in such a way that the passage line is arranged aligned with the first suction opening, the suction fixture is configured to suck the first connecting partner by generating a negative pressure at the first suction opening, and thus to fix the latter, the first connecting partner, relative to the suction fixture. Thus, a sintered connection between the first connecting partner and the second connecting partner arranged above it can be produced economically.

[0022] In this case, it has proven to be advantageous if the suction fixture has at least one second suction opening on its side facing the pressure element for fixing the workpiece carrier when the workpiece carrier is fixed directly to the suction fixture, wherein the suction fixture is designed to suck the workpiece carrier by generating a negative pressure at the at least one second suction opening when the workpiece carrier is arranged above the at least one second suction opening and thus to fix the latter, i.e. the workpiece carrier, relative to the suction fixture. As a result, the workpiece carrier is very reliably fixed to the suction fixture.

[0023] It has also proven to be advantageous if a frame element is arranged on the workpiece carrier, which surrounds the first connecting partner and can be moved relative to the workpiece carrier at least in the normal direction of the side of the suction fixture facing the clamping element, wherein the frame element has ventilation slots on its side facing the suction fixture, which pass through the frame element in a direction perpendicular to the normal of the side of the suction fixture facing the clamping element.

[0024] It has also proven to be advantageous if between method steps a) and b) or between method steps b) and c) a membrane section of the membrane is arranged on the first connection partner and the second connection partner. The membrane section prevents the first connection partner and / or the second connection partner from adhering to the pressure element or, in the case of a sintering press according to the invention with a pressure pad between the pressure element and the connection partner, to prevent the first connection partner and / or the second connection partner from adhering to the pressure pad.

[0025] In this case, it has proven to be advantageous if the membrane part is removed from the first connection partner and the second connection partner between method steps d) and e). Since the first connection partner is fixed relative to the suction fixture when the membrane part is removed from the first connection partner and the second connection partner, the first connection partner and the second connection partner remain securely in their position in the sintering press according to the invention when the membrane part is removed from the first connection partner and the second connection partner, in the case where the membrane part adheres to the first connection partner and / or the second connection partner after the pressing process, the first connection partner and the second connection partner are not removed or lifted together with the membrane part in the sintering press according to the invention.

[0026] In method step a), the first connection partner can be arranged directly on the suction fixture.

[0027] Alternatively, if in method step a) the first connection partner is arranged directly on the workpiece carrier having the channel line so as to be located above the channel line, the workpiece carrier can be arranged directly on the suction fixture in such a way that the channel line is arranged aligned with the first suction opening.

[0028] It should be pointed out that the elements described in the singular may optionally also be present in the plural. For example, a plurality of first connection partners and / or second connection partners may be present, so that a plurality of sintered connections between the connection partners can be produced in one pressing process of the sintering press according to the invention. For this purpose, a plurality of first connection partners may be arranged above the first suction opening. A corresponding fixing area may be assigned to the respective first connection partner, which in each case has an assigned first suction opening on the side of the suction fixture facing the pressing element. For example, the sintering press may have a plurality of suction clamps, wherein the respective suction clamps can securely hold the respective first connection partner. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Exemplary embodiments of the present invention will be explained below with reference to the following drawings. In the drawings:

[0030] Figure 1 A sectional view showing the construction of a sintering press according to the invention having a first connecting partner and a second connecting partner arranged in the sintering press;

[0031] Figure 2 Shows Figure 1 A plan view of the side of the suction fixture of the sintering press facing the pressing piece of the sintering press;

[0032] Figure 3A sectional view shows a further embodiment of a sintering press according to the invention, which has a first connecting partner and a second connecting partner arranged in the sintering press;

[0033] Figure 4 Shows Figure 3 A plan view of the side of the suction fixture of the sintering press facing the holding piece of the sintering press; and

[0034] Figure 5 A plan view of a suction gripper of a sintering press according to the invention is shown.

[0035] Identical elements are provided with the same reference numerals in the figures. DETAILED DESCRIPTION

[0036] Figure 1 , a sectional view of the construction of a sintering press 1 according to the invention is shown, which has a first connection partner 5 and a second connection partner 6 arranged in the sintering press 1. Figure 2 It is shown in Figure 1 A plan view of the side 3a of the suction fixture 3 of the sintering press 1 facing the holding element 10 of the sintering press 1. Figure 3 , a cross-sectional view of another embodiment of a sintering press 1 according to the invention is shown, which has a first connecting partner 5 and a second connecting partner 6 arranged in the sintering press 1. Figure 4 It is shown in Figure 3 A plan view of the side 3 a of the suction fixture 3 of the sintering press 1 which faces the holding element 10 of the sintering press 1 .

[0037] exist Figure 1 and Figure 3 2 shows a sintering press 1 according to the invention for producing a sintered connection between a first connection partner 5 and a second connection partner 6 arranged above it. A sintering material 7 to be sintered is arranged between the first connection partner 1 and the second connection partner 6.

[0038] As in the exemplary embodiment, the first connection partner 5 can be configured as a substrate, for example. The substrate 5 has a non-conductive insulating layer 5a, and the metallized layer 5b has been structured to form a conductor path 5b' arranged on the first main side 5a' facing the pressing member 10 of the insulating layer 5a. The conductor path 5b' is arranged to be separated from each other on the insulating layer 5a. The insulating layer 5a is preferably configured as a ceramic plate. The substrate 5 preferably has another structured or unstructured metallized layer 5c arranged on the insulating layer 5a, wherein the insulating layer 5a is arranged between the metallized layer 5b and the other metallized layer 5c. Each metallized layer 5b or 5c is connected to the insulating layer 5a in a material-bonded manner. The substrate 5 can be configured as a direct copper bonding substrate (DCB substrate) or as an active metal brazing substrate (AMB substrate). Alternatively, the substrate 5 can also be configured as an insulating metal substrate (IMS substrate).

[0039] As in the exemplary embodiment, the second connection partner 6 can be designed as a power semiconductor component, for example, wherein the power semiconductor component 6 is preferably present in the form of a power semiconductor switch or a diode. In this context, the respective power semiconductor switch is preferably present in the form of a transistor such as an IGBT (insulated gate bipolar transistor), or in the form of a MOSFET (metal oxide semiconductor field effect transistor) or a thyristor. However, the second connection partner 6 can also be designed as an electrically conductive load connection element, for example.

[0040] It should be noted that the respective connection partner 5 or 6 can also consist of a plurality of components connected to one another. Thus, for example, the first connection partner 5 can also include a substrate and a power semiconductor component, which have been connected to one another in an electrically conductive manner by means of sintered metal or solder, and the second connection partner 6 can be in the form of a metal foil. The metal foil is preferably structured so as to form a conductor path and is a component of the film / foil composite material.

[0041] The sintering press 1 also has a suction fixture 3 for fixing the first connecting partner 5 and a pressure piece 10 arranged above the suction fixture 3. The pressure piece 10 is preferably made of metal and can be designed, for example, as a metal plate (see by way of example Figure 1 and Figure 3 ) or is configured as a compression mold. The sintering press 1 can have an elastic pressure pad 2, which is arranged between the suction fixture 3 and the compression piece 10 and which can be composed of silicone, for example. The pressure pad 2 is preferably connected to the compression piece 10.

[0042] The membrane portion 4a of the membrane 4 (in particular the plastic membrane 4 preferably configured as a polytetrafluoroethylene membrane (PTFE membrane)) can be arranged between the pressing piece 10 and the suction fixture 3, or can be arranged between the pressure pad 2 (if present) and the suction fixture 3. For example, the membrane portion 4a can be manually arranged on the first connection partner 5 and the second connection partner 6 before the pressure process for producing the sintered connection is performed by the sintering press 1, and after the pressing process, once the sintered connection is formed, the membrane portion 4a can be manually lifted from the first connection partner 5 and the second connection partner 6 again in the direction of the normal direction N1 of the side 3a of the suction fixture 3 facing the pressing piece 10. Alternatively, the process can also be carried out in an automated manner by a membrane moving device.

[0043] When the first connection partner 5 and the second connection partner 6 are arranged between the pressing member 10 and the suction fixture 3, the sintering press 1 for producing the sintered connection is configured to converge the pressing member 10 and the suction fixture 3 relative to each other and thus to mutually compress the first connection partner 5 and the second connection partner 6. In the present invention, the reason why the pressing member 10 and the suction fixture 3 converge relative to each other can occur because the pressing member 10 moves downward and / or because the suction fixture 3 moves upward, such as by Figure 1 and Figure 3 As shown by arrow 8 in FIG.

[0044] The suction fixture 3 has a first suction opening 9 on its side 3a facing the pressing member 10, wherein when the first connection partner 5 is arranged above the first suction opening 9, the suction fixture 3 is configured to suck the first connection partner 5 by generating negative pressure at the first suction opening 9, and thus fix the latter, i.e., the first connection partner 5, relative to the suction fixture 3. Figure 1 and Figure 3As shown in an exemplary manner in FIG, the first connection partner 5 covers the first suction opening 9. The first connection partner 5 is arranged in the region of the first suction opening 9. Since the first connection partner 5 is fixed relative to the suction fixture 3 by the suction fixture 3, the first connection partner 5 is prevented from moving relative to the suction fixture 3, especially in the normal direction N1 of the side 3a of the suction fixture 3 facing the pressing piece 10. After pressure is applied to the pressure piece 10 or the pressure pad 2 (if present) by the sintering press 1, or if the plastic film portion 4a of the plastic film 4 is arranged between the pressure pad 2 and the connecting partners 5 and 6 during the application of pressure, when the first connecting partner 5 and / or the second connecting partner 6 adheres to the plastic film portion 4a, respectively, after the application of pressure or after the formation of the sintered connection, the pressure piece 10 or the elastic pressure pad 2 or the plastic film 4 is lifted, the first connecting partner 5 and therefore the second connecting partner 6 remain fixed relative to the suction fixture 3, so that the connecting partners 5, 6 are not lifted together with the pressure piece 10, or with the pressure pad 2, or with the plastic film 4, respectively.

[0045] As in Figure 1 and Figure 3 As shown in the figure by way of example, the suction fixture 3 can be arranged on the pressing partner 11 of the sintering press 1 and preferably connected to the pressing partner 11 by a force-fitting and / or form-fitting connection, for example, in particular by a screw connection, or be an integral component of the pressing partner 11 of the sintering press 1. The pressing partner 11 is preferably made of metal. The suction fixture 3 and / or the pressing partner 11 and / or the pressing part 10 preferably have a heat generating device, which is not shown in the figure, and by means of which the first connection partner 5 and / or the second connection partner and thus the sintering material 7 to be sintered are heated to produce the sintering connection.

[0046] The corresponding cross-sectional area of ​​the first suction opening 9 is preferably 0.007 mm 2 Up to 3.2mm 2 , especially 0.03mm 2 Up to 1.8mm 2 Therefore, the cross-sectional area of ​​the first suction opening 9 is preferably relatively small. For example, during a pressing process, when a high pressure acts on the first connection partner 5, such as on a substrate, damage to the first connection partner 5 is reliably avoided due to the above, and in particular a breakage of the first connection partner 5 is avoided, although the first connection partner 5 is not supported across the entire area, the latter being caused by the first suction opening 9.

[0047] As in Figure 2 and Figure 4As shown in an exemplary manner in the figure, the side 3a of the suction fixing device 3 facing the pressing member 10 preferably has a preferably rectangular fixing area 14, wherein the first suction openings 9 are arranged in the fixing area 14, wherein at least some 9' of the first suction openings 9 are arranged in the peripheral area 14c of the fixing area 14, or in the central area (not shown in the figure) of the fixing area 14. All first suction openings 9 can also be arranged in the peripheral area 14c of the fixing area 14, or in the central area of ​​the fixing area 14. At least some of the first suction openings 9 can be arranged along at least one lateral periphery 14a of the fixing area 14. All first suction openings 9 can also be arranged along at least one lateral periphery 14a of the fixing area 14. The shape of the fixing area 14 is preferably adapted to the peripheral shape of the side 5d of the fixing area 14 of the first connecting partner 5 facing the suction fixing device 3. In the case of a rectangular fixing area 14, the number of first suction openings 9 in the corner area 14b of the fixing area 14 is preferably increased compared to other areas of the fixing area 14.

[0048] In accordance with Figure 1 and Figure 2 In an exemplary embodiment of the present invention, the first connecting partner 5 is directly arranged on the suction fixture 3, more specifically, directly arranged on the side 3a of the suction fixture 3 facing the pressing piece 10, so as to be located above the first suction opening 9. The first connecting partner 5 is in mechanical contact with the suction fixture 3, more specifically, with the side 3a of the suction fixture 3 facing the pressing piece 10. When the first connecting partner 5 is directly arranged on the suction fixture 3 so as to be located above the first suction opening 9, the suction fixture 3 is configured to suck the first connecting partner 5 and thus to fix the latter, i.e., the first connecting partner 5, relative to the suction fixture 3 by generating a negative pressure at the first suction opening 9. In accordance with Figure 1 and Figure 2 The first connection partner 5 in the exemplary embodiment of is therefore fixed directly to the suction fixture 3 by means of the suction fixture 3 .

[0049] In accordance with Figure 1 and Figure 2In the embodiment of the suction fixture 3, the side 3a thereof facing the pressing member 10 preferably has at least one second suction opening 15, and the at least one second suction opening 15 is used for the membrane portion 4a of the suction membrane 4 when the membrane portion 4a is arranged above the first connection partner 5 and the second connection partner 6 and arranged above the at least one second suction opening 15. The at least one second suction opening 15 is arranged in such a way that when the first connection partner 5 is arranged above the first suction opening 9, the first connection partner 5 is not arranged above the at least one second suction opening 15. When the membrane portion 4a is arranged above the at least one second suction opening, the suction fixture 3 is configured to suck the membrane portion 4a and thus to fix the first connection partner 5 relative to the suction fixture 3 via the membrane portion 4a by generating a negative pressure at the at least one second suction opening 15. Therefore, the first connection partner 5 is also indirectly fixed relative to the suction fixture 3 via the membrane portion 4a. As in Figure 2 As shown in an exemplary manner in FIG. 1 , the suction fixture 3 can have a plurality of second suction openings 15, which are preferably arranged around the first connection partner 5 in a projection view toward the first connection partner 5. At least one second suction opening 15 can also be configured in the shape of a groove.

[0050] Preferably, the elastic limiting element 13 can be arranged on the side 3a of the suction fixture 3 facing the pressing member 10, when the first connection partner 5 is directly arranged on the suction fixture 3, so that in addition to the suction fixture 3 fixing the first connection partner 5, the limiting element 13 limits or prevents the first connection partner 5 from moving in a direction perpendicular to the normal direction N1 of the side 3a of the suction fixture 3 facing the pressing member 10, although only in the direction perpendicular to the normal direction N1 of the side 3a of the suction fixture 3 facing the pressing member 10. The suction fixture 3 fixes the first connection partner 5 relative to the suction fixture 3 in a direction perpendicular to the normal direction N1 of the side 3a of the suction fixture 3 facing the pressing member 10 and in a direction on the normal direction N1 of the side 3a of the suction fixture 3 facing the pressing member 10. The limiting element 13 is preferably also used as a positioning aid for positioning the first connection partner 5 above the first suction opening 9. The limiting element 13 can be composed of silicone, for example.

[0051] According to Figure 1 and Figure 2 On the contrary, according to the structure of the present invention Figure 3 and Figure 4In the configuration of the present invention, the workpiece carrier 17 is arranged between the suction fixture 3 and the second connection partner 6. The workpiece carrier 17 has a channel pipeline 16 extending through it. The first connection partner 5 is directly arranged on the workpiece carrier 17 so as to be located above the channel pipeline 16. Therefore, the first connection partner 5 is in mechanical contact with the workpiece carrier 17. The workpiece carrier 17 is directly arranged on the suction fixture 3, more specifically on the side 3a of the suction fixture 3 facing the pressing member 10, so as to be located above the first suction opening 9. The workpiece carrier 17 is therefore in mechanical contact with the suction fixture 3, more specifically, in mechanical contact with the side 3a of the suction fixture 3 facing the pressing member 10. When the first connection partner 5 is arranged directly on the workpiece carrier 17 so as to be located above the passage line 16 and the workpiece carrier 17 is arranged directly on the suction fixture 3 in such a way that the passage line 16 is arranged aligned with the first suction opening 9, the suction fixture 3 is designed to suck the first connection partner 5 by generating a negative pressure at the first suction opening 9 and thus fix the latter, the first connection partner 5 relative to the suction fixture 3. The negative pressure generated at the first suction opening 9 has the effect that a negative pressure is generated in the passage line 16, so that the first connection partner 5 is sucked through the workpiece carrier 17 by the suction fixture 3 and thus fixed relative to the suction fixture 3. The gas pressure existing above the first connection partner 5 in the pressure chamber 28 of the sintering press 1 pushes the first connection partner 5 against the workpiece carrier 17 and the workpiece carrier 17 against the suction fixture 3. The gas pressure is preferably in the form of air pressure. The pressing process of the sintering press 1 for producing the sintering connection takes place in the pressure chamber 28. Once the sintered connection has been produced, the workpiece carrier 17 is preferably used to transport the first connection partner 5 together with the second connection partner 6 arranged above it and the sintering material 7 to be sintered and arranged between the connection partners 5 and 6 into and out of the sintering press 1, wherein the sintering material 7 is converted into a sintered metal due to the pressure and temperature to which it is subjected in the sintering press 1. The sintering material 7 to be sintered is preferably in the form of a sintering paste that is common in this technology. The sintering material 7, in particular the sintering paste, contains metal particles, such as silver. The workpiece carrier 17 can, for example, be in the form of a metal plate with a channel pipe. The workpiece carrier 17 can have a recess on its side facing the first connection partner 5, in which recess, for example, the lower part of the first connection partner 5 is arranged for positioning the first connection partner 5, which in Figure 3 and Figure 4. Not shown. A frame element 29 can be arranged on the workpiece carrier 17, the frame element 29 surrounds the first connecting partner 5 and can be moved relative to the workpiece carrier 17 at least in the normal direction N1 of the side 3a of the suction fixture 3 facing the clamping member. The frame element 29 has a ventilation groove 29a on its side facing the suction fixture 3, and the ventilation groove 29a passes through the frame element 29 in a direction perpendicular to the normal direction N1 of the side 3a of the suction fixture 3 facing the clamping member 10. The area surrounding the periphery of the first connecting partner 5 below the membrane 4a is ventilated by the ventilation groove 29a, which helps to lift the membrane 4a. In addition, it is preferably avoided that the membrane 4a adheres to the workpiece carrier 17 due to the frame element 29. If a pressure pad 2 is present and there is no membrane 4a, the membrane 4a is applicable to the pressure pad 2 in a similar manner. It should be pointed out that in accordance with Figure 1 and Figure 2 In the exemplary embodiment of the present invention, the frame element 29 can be arranged in the same manner as described above so as to be constructed on the suction fixture 3. Preferably, the elastic limiting element (not in Figure 3 and Figure 4 ) can be arranged on the workpiece carrier 17, the limiting elements limiting or preventing the movement of the first connection partner 5 in a direction perpendicular to the normal direction N1 of the side 3a of the suction fixture 3 facing the pressing element 10. These limiting elements are preferably also used as positioning aids for positioning the first connection partner 5 on the workpiece carrier 17. These limiting elements can be composed of silicone, for example.

[0052] In accordance with Figure 3 and Figure 4 In the exemplary embodiment of the present invention, the suction fixture 3 has at least one second suction opening 15' on its side 3a facing the pressing element 10, for fixing the workpiece carrier 17 when the workpiece carrier 17 is directly arranged on the suction fixture 3. When the workpiece carrier 17 is arranged above the at least one second suction opening 15', the suction fixture 3 is configured to suck the workpiece carrier 17 by generating a negative pressure at the at least one second suction opening 15', and thus to fix the latter, i.e. the workpiece carrier 17, relative to the suction fixture 3. Therefore, the workpiece carrier 17 is also additionally fixed to the suction fixture 3. Figure 4 As shown in the example, the suction fixture 3 can have a plurality of second suction openings 15', which are preferably arranged in a projection view toward the first connection partner 5 so as to surround the first connection partner 5. At least one second suction opening 15' can also be configured in the shape of a groove.

[0053] Despite Figure 3 and Figure 4, but it should be noted that the suction fixture 3 can also have at least one third suction opening, which is not arranged above the first connecting partner 5, and the workpiece carrier 17 can have at least one other channel pipeline, wherein the at least one other channel pipeline is arranged so as to be aligned above the at least one third suction opening. When the membrane part 4a is arranged above at least one other channel pipeline, the suction fixture 3 is configured to suck the membrane part 4a and thus to fix the first connecting partner 5 relative to the suction fixture 3 via the membrane part 4a by generating a negative pressure at the at least one third suction opening. Therefore, the first connecting partner 5 is additionally indirectly fixed relative to the suction fixture 3 via the membrane part 4a. The suction fixture 3 can have a plurality of third suction openings, which are preferably arranged in a projection view toward the first connecting partner 5 so as to surround the first connecting partner 5. At least one third suction opening can also be configured in the shape of a groove.

[0054] In addition to the above differences, Figure 3 and Figure 4 The structure and basis of the present invention Figure 1 and Figure 2 The configuration of the present invention is the same, including advantageous configurations and configuration variations.

[0055] The respective suction openings 9, 15, 15' of the suction fixture 3 are fluidly connected to the respective negative pressure connectors 26 or 27 via the respective negative pressure line conduit systems 20 or 21. The suction device generates a respective negative pressure at the respective suction openings 9, 15, 15' of the suction fixture 3 via the respective negative pressure line conduit systems 20 or 21, so that when the first connection partner 5 is arranged above the first suction opening 9, the first connection partner 5 is sucked by the first suction opening 9, or when the membrane part 4a is arranged above at least one second suction opening 15 or 15', the membrane part 4a is sucked by at least one second suction opening 15 or 15', respectively, and the second suction opening 15 or 15' is respectively connected to the negative pressure connector 26 or 27, which is not shown for clarity in any of the drawings. The negative pressure generated by the suction device in the negative pressure line pipe system 20 or 21, respectively, can preferably be controlled in an independent manner, so that the negative pressure at the first suction opening 9 and at least one second suction opening 15 or 15' can be controlled in each case in an independent manner. If the suction fixture 3 has at least one third suction opening, this applies in an analogous manner.

[0056] The sintering press 1 preferably has a suction gripper 22 which is designed to hold the first connecting partner 5 firmly and directly on the suction gripper 22 by generating negative pressure at its suction opening 24 and to arrange the first connecting partner 5 together with the second connecting partner 6 arranged above the first connecting partner 5 in the space between the pressure piece 10 and the suction fixture 3 before the pressing process and / or to remove the first connecting partner 5 together with the second connecting partner 6 from the space again after the pressing process. Figure 1 and Figure 2 In the case of the configuration of the present invention, for example, the suction clamp can directly and firmly hold the connecting partner 5, here the connecting partner 5 is the substrate 5, by generating a negative pressure at its suction opening 24. Alternatively, the sintering press 1 preferably has a suction clamp 22, which is configured to indirectly and firmly hold the first connecting partner 5 on the suction clamp 22 by generating a negative pressure at its suction opening 24, and before the pressing process, to arrange the first connecting partner 5 together with the second connecting partner 6 arranged above the first connecting partner 5 in the space between the clamping member 10 and the suction fixture 3, and / or after the pressing process, to remove the first connecting partner 5 together with the second connecting partner 6 from the space again. In accordance with Figure 3 and Figure 4 In the case of the configuration of the invention, for example, the suction gripper 22 can indirectly and securely hold the connection partner 5, that is, the base plate 5, by generating a negative pressure at its suction opening 24, because the suction gripper 22 sucks the workpiece carrier 17, on which the first connection partner 5 and the second connection partner 6 arranged above the first connection partner 5 are arranged, and thus indirectly holds the first connection partner 5 securely on the suction gripper 22. Before the pressing process, the workpiece carrier 17 is arranged together with the first connection partner 5 and the second connection partner 6 arranged above the first connection partner 5 in the space between the pressing element 10 and the suction fixture 3, and / or after the pressing process, the workpiece carrier 17 together with the first connection partner 5 and the second connection partner 6 arranged above the first connection partner 5 can be removed from the space again. The suction gripper 22 preferably has a sealing lip 25, which is arranged around one suction opening 24 in each case. The suction gripper 22 also preferably has a frame 23 on which the sealing lip 25 and the suction opening 24 are arranged.

[0057] The following will describe a pressure sintering method according to the invention for producing a sintered connection between a first connection partner 5 and a second connection partner 6 arranged above it by means of a sintering press 1 according to the invention.

[0058] In method step a), the first connection partner 5 and the second connection partner 6 arranged above the first connection partner 5 are arranged together between the pressure piece 10 and the suction fixture 3, wherein the sintering material 7 to be sintered is arranged between the first connection partner 5 and the second connection partner 6, wherein the first connection partner 5 is arranged above the first suction opening 9. The first connection partner 5 in this context can be arranged directly on the suction fixture 3, such as in Figure 1 and Figure 2 Alternatively, the first connection partner 5 in this context can be arranged directly on the workpiece carrier 17 with the passage conduit 16 so as to be located above the passage conduit 16, and the workpiece carrier 17 can be arranged directly on the suction fixture 3 in such a way that the passage conduit 16 is arranged so as to be aligned with the first suction opening 9, as in Figure 3 and Figure 4 In this context, the arrangement of the first connection partner 5 together with the second connection partner 6 arranged above the first connection partner 5 can be carried out by means of the suction gripper 22, as described above.

[0059] In the subsequent method step b), the first connection partner 5 is fixed relative to the suction fixing device 3 by suctioning the first connection partner 5 by means of generating a negative pressure at the first suction opening 9 .

[0060] In the subsequent method step c), pressure is applied to the first connection partner 5 and the second connection partner 6 and the sintered material 7 by bringing the pressing piece 10 and the suction fixture 3 together relative to each other, wherein the first connection partner 5 and the second connection partner 6 are pressed against each other, and temperature is applied to the sintered material 7, wherein the sintered material 7 is transformed into a sintered metal due to the application of pressure and temperature. The transformation of the sintered material 7 into a sintered metal occurs by sintering the metal particles contained in the sintered material 7. In an exemplary embodiment, the metal particles are composed of silver, so that in an exemplary embodiment, the sintered metal is composed of silver. The impact on the sintered material 7 with a certain temperature is preferably carried out by heating the pressing piece 11 and / or the suction fixture 3 and / or the pressing piece 10. In this context, heat is conducted from the first connection partner 5 and / or from the second connection partner 6 to the sintered material 7. In the present invention, a convergence of the pressing element 10 and the suction fixture 3 relative to each other can occur due to the downward movement of the pressing element 10 and / or due to the downward movement of the pressing element 10, such as by Figure 1 and Figure 3As shown by the arrow 8 in FIG. 3 . The suction fixture 3 can be moved upwards, for example, because Figure 1 and Figure 3 The pressing partner 11 in the middle moves upward.

[0061] In the subsequent method step d), the pressing member 10 and the suction fixing device 3 are separated from each other. In the present invention, the pressing member 10 and the suction fixing device 3 are separated from each other because Figure 1 and Figure 3 The pressing member 10 in the embodiment moves upward and / or the reason for this is that the suction fixing device 3 moves downward. The suction fixing device 3 can move downward, for example, because Figure 1 and Figure 3 The pressing partner 11 in the middle moves downward.

[0062] In the subsequent method step e), the first connection partner is released relative to the fixed connection by restoring the gas pressure present in the pressure chamber 28 of the sintering press 1 above the first connection partner 5 at the first suction opening 9. The gas pressure is preferably in the form of air pressure. Subsequently, the first connection partner 5 is removed from the pressure chamber 28 again, preferably by means of a suction gripper 22, together with the second connection partner 6, which is arranged above the first connection partner 5 and connected to the latter, the second connection partner 5, by sintering bonding.

[0063] Between method steps a) and b) or between method steps b) and c), the membrane portion 4a of the membrane 4 is preferably arranged on the first connection partner 5 and the second connection partner 6. This can be done manually or by a membrane displacement device which arranges the membrane portion 4a on the first connection partner 5 and the second connection partner 6. Once the membrane portion 4a has been arranged on the first connection partner 5 and the second connection partner 6, it can be sucked through at least one second suction opening 15 or 15', respectively, which is preferably present, as already described above,

[0064] Between method steps d) and e), the membrane part 4a can be removed from the first connection partner 5 and the second connection partner 6, for example by manually lifting the membrane part 4a away from the first connection partner 5 and the second connection partner 6 again in the direction of the normal direction N1 of the side 3a of the suction fixture 3 facing the pressure element 10. Alternatively, lifting the membrane part 4a away from the first connection partner 5 and the second connection partner 6 in the normal direction N1 of the side 3a of the suction fixture 3 facing the pressure element 10 can also be performed automatically by a membrane moving device.

[0065] It should be pointed out that, of course, the features of different exemplary embodiments of the present invention may be combined with each other in any way without departing from the scope of the present invention, unless the features are mutually exclusive.

Claims

1. A sintering press for forming a sintered connection between a first connection partner (5) and a second connection partner (6) arranged above the first connection partner, the sintering press having a suction fixing device (3) for fixing the first connection partner (5), having a pressing member (10) arranged above the suction fixing device (3), characterized in that: A sintering press for producing a sintered connection is configured such that when a first connection partner (5) and a second connection partner (6) are arranged between a pressing member (10) and a suction fixture (3), the pressing member (10) and the suction fixture (3) converge relative to each other and are thereby used to press the first connection partner (5) and the second connection partner (6) against each other, wherein the suction fixture (3) has a first suction opening (9) on its side (3a) facing the pressing member (10), wherein when the first connection partner (5) is arranged above the first suction opening (9), the suction fixture (3) is configured to suck the first connection partner (5) and is thereby used to fix the first connection partner (5) relative to the suction fixture (3) by generating a negative pressure at the first suction opening (9), wherein the suction fixture (3) has at least one second suction opening (15) on its side (3a) facing the pressing member (10), for sucking the membrane portion (4a) of the membrane (4) when the membrane portion (4a) is arranged above the first connecting partner (5) and the second connecting partner (6) and above the at least one second suction opening (15), wherein the at least one second suction opening (15) is arranged so that when the first connecting partner (5) is arranged above the first suction opening (9), the first connecting partner (5) is not arranged above the at least one second suction opening (15), wherein when the membrane portion (4a) is arranged above the at least one second suction opening (15), the suction fixture (3) is configured to suck the membrane portion (4a) by generating a negative pressure at the at least one second suction opening (15), and thus the first connecting partner (5) is fixed relative to the suction fixture (3) by the membrane portion (4a); or The suction fixture (3) has at least one second suction opening (15') on its side (3a) facing the pressing member (10) for fixing the workpiece carrier (17) when the workpiece carrier (17) is directly arranged on the suction fixture (3), wherein when the workpiece carrier (17) is arranged above the at least one second suction opening (15'), the suction fixture (3) is configured to suck the workpiece carrier (17) and thus to fix the workpiece carrier (17) relative to the suction fixture (3) by generating a negative pressure at the at least one second suction opening (15'), and the frame element The part (29) is arranged on the workpiece carrier (17), the frame element (29) surrounds the first connecting partner (5) and can be moved relative to the workpiece carrier (17) at least in the normal direction (N1) of the side (3a) of the suction fixture (3) facing the clamping member (10), wherein the frame element (29) has ventilation grooves (29a) on its side (3a) facing the suction fixture (3), and these ventilation grooves (29a) pass through the frame element (29) in a direction perpendicular to the normal direction (N1) of the side (3a) of the suction fixture (3) facing the clamping member (10).

2. The sintering press according to claim 1, characterized in that The suction fixing device (3) is arranged on a pressing partner (11) of the sintering press (1) or is an integral component of the pressing partner (11) of the sintering press (1).

3. The sintering press according to claim 1 or 2, characterized in that: The corresponding cross-sectional area of ​​the first suction opening (9) is 0.007 mm2 to 3.2 mm2.

4. The sintering press according to claim 1 or 2, characterized in that The corresponding cross-sectional area of ​​the first suction opening (9) is 0.03 mm2 to 1.8 mm2.

5. The sintering press according to claim 1 or 2, characterized in that: The side surface (3a) of the suction fixing device (3) facing the clamping member (10) has a fixing area (14), wherein the first suction openings (9) are arranged in the fixing area (14), wherein at least some of the first suction openings (9) are arranged in a peripheral area (14c) of the fixing area (14) or in a central area of ​​the fixing area (14), and the shape of the fixing area (14) is suitable for the peripheral shape of the side surface (5d) of the first connecting partner (5) facing the suction fixing device (3).

6. The sintering press according to claim 5, characterized in that The fixing area (14) is rectangular.

7. The sintering press according to claim 5, characterized in that The side surface (3a) of the suction fixing device (3) facing the pressure piece (10) has a rectangular fixing area (14), wherein the number of first suction openings (9) is increased in the corner area (14b) of the fixing area (14) compared to other areas of the fixing area (14).

8. The sintering press according to claim 1 or 2, characterized in that: The sintering press (1) has a suction clamp (22), which is configured to directly or indirectly firmly hold a first connecting partner (5) on the suction clamp (22) by generating negative pressure at its suction opening (24), and to arrange the first connecting partner (5) together with a second connecting partner (6) arranged above the first connecting partner (5) in a space between a clamping member (10) and a suction fixture (3) before the pressing process, and / or to remove the first connecting partner (5) together with the second connecting partner (6) from the space again after the pressing process.

9. The sintering press according to claim 1 or 2, characterized in that: A sintering press (1) for producing a sintered connection is configured to bring the pressing piece (10) and the suction fixture (3) together and thereby press the first connecting partner (5) and the second connecting partner (6) together when the first connecting partner (5) and the second connecting partner (6) are arranged between the pressing piece (10) and the suction fixture (3) and the first connecting partner (5) is arranged directly on the suction fixture (3), wherein the suction fixture (3) has a first suction opening (9) on its side (3a) facing the pressing piece (10), wherein when the first connecting partner (5) is arranged above the first suction opening (9) so as to be directly located on the suction fixture (3), the suction fixture (3) is configured to suck the first connecting partner (5) and thereby fix the first connecting partner (5) relative to the suction fixture (3) by generating a negative pressure at the first suction opening (9).

10. The sintering press according to claim 1, characterized in that An elastic limiting element (13) is arranged on the side (3a) of the suction fixture (3) facing the clamping member (10), and when the first connecting partner (5) is directly arranged on the suction fixture (3), the limiting element (13) limits or prevents the first connecting partner (5) from moving in a direction perpendicular to the normal direction (N1) of the side (3a) of the suction fixture (3) facing the clamping member (10).

11. The sintering press according to claim 1 or 2, characterized in that: The sintering press (1) for producing a sintered connection is designed to bring the pressing piece (10) and the suction fixture (3) together and thus to press the first connecting partner (5) and the second connecting partner (6) together, when the first connecting partner (5) and the second connecting partner (6) are arranged between the pressing piece (10) and the suction fixture (3), and the first connecting partner (5) is arranged directly on a workpiece carrier (17) having a channel pipe (16) so as to be located above the channel pipe (16), and the workpiece carrier (17) is arranged directly on the suction fixture (3). ) has a first suction opening (9) on its side (3a) facing the clamping piece (10), wherein when the first connecting partner (5) is directly arranged on a workpiece carrier (17) having a channel pipe (16) so as to be located above the channel pipe (16) and the workpiece carrier (17) is directly arranged on the suction fixture (3) in such a way that the channel pipe (16) is arranged to be aligned with the first suction opening (9), the suction fixture (3) is configured to suck the first connecting partner (5) by generating a negative pressure at the first suction opening (9) and is thereby used to fix the first connecting partner (5) relative to the suction fixture (3).

12. A pressure sintering method, characterized in that: The method for producing a sintered connection between a first connection partner (5) and a second connection partner (6) arranged above the first connection partner by means of a sintering press (1) according to any one of claims 1 to 11 comprises the following consecutive method steps: a) arranging a first connecting partner (5) together with a second connecting partner (6) arranged above the first connecting partner (5) between a pressing member (10) and a suction fixture (3), wherein the sintering material (7) to be sintered is arranged between the first connecting partner (5) and the second connecting partner (6), wherein the first connecting partner (5) is arranged above a first suction opening (9); b) suctioning the first connection partner (5) by generating negative pressure at the first suction opening (9), thereby fixing the first connection partner (5) relative to the suction fixing device (3); c) applying pressure to the first connecting partner (5) and the second connecting partner (6) and the sintered material (7) by bringing the pressing element (10) and the suction fixture (3) together, wherein the first connecting partner (5) and the second connecting partner (6) are thereby pressed against each other and a temperature is applied to the sintered material, wherein the sintered material (7) is transformed into a sintered metal due to the application of pressure and temperature; d) separating the pressing element (10) and the suction fixture (3) relative to each other; e) releasing the first connection partner (5) relative to the suction fixture (3) by restoring the gas pressure present above the first connection partner (5) at the first suction opening (9).

13. The pressure sintering method according to claim 12, characterized in that: Between method steps a) and b) or between method steps b) and c), the membrane part (4a) of the membrane (4) is arranged on the first connection partner (5) and the second connection partner (6).

14. The pressure sintering method according to claim 13, characterized in that: Between method steps d) and e), the membrane part ( 4 a ) is removed from the first connection partner ( 5 ) and the second connection partner ( 6 ).

15. The pressure sintering method according to any one of claims 12 to 14, characterized in that: The sintering press (1) is designed according to one of claims 1 and 9 - 10, wherein in method step a) the first connecting partner (5) is arranged directly on the suction fixture (3).

16. The pressure sintering method according to any one of claims 12 to 14, characterized in that: The sintering press (1) is designed according to claim 1 or 11, wherein in method step a) the first connecting partner (5) is arranged directly on a workpiece carrier (17) having a passage line (16) so as to be located above the passage line (16), and the workpiece carrier (17) is arranged directly on the suction fixture (3) in such a way that the passage line (16) is arranged aligned with the first suction opening (9).

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