Semiconductor cleaning equipment and its robotic arm

Abstract

The embodiment of the present application provides a semiconductor cleaning device and a mechanical arm thereof. The mechanical arm comprises: a movable box, the box comprises a first side wall and a second side wall arranged opposite to each other in the moving direction thereof, and a third side wall adjacent to the first side wall and the second side wall, the first side wall and the second side wall can be deformed under the action of an external force, and a notch is provided on the third side wall; a substrate assembly located in the box, which is movably connected to the first side wall and the second side wall, and is arranged close to the notch, the substrate assembly can move relative to the box when the first side wall and / or the second side wall are deformed, the inner side surface of the substrate assembly is used to install the mechanical arm assembly, and the outer side surface of the substrate assembly is used to close the notch; a detection assembly arranged on the outer side surface of the third side wall and the outer side surface of the substrate assembly is used to stop the box from moving when relative movement is detected. The mechanical arm provided by the embodiment of the present application has a large detection area, which greatly improves the safety performance.

Description

Technical Field

[0001] The present application relates to the field of semiconductor processing technology, and more specifically, to a semiconductor cleaning device and a robotic arm thereof. Background Art

[0002] At present, in the wafer slot type wet cleaning equipment in semiconductor cleaning equipment, the robot arm plays the role of transferring wafers or workpieces. In daily work, the robot arm is often accompanied by the danger of mechanical injury. Although a door interlock switch is added to the equipment hardware interlock circuit to realize the safety interlock function of stopping the robot arm immediately after any door is opened, in some debugging, testing, maintenance and other situations, it is necessary to debug the action performance and position setting of the robot arm at close range. The operator may shield the door interlock and work around the robot arm. In the case of careless or illegal operation, the operator working near the robot arm will be in danger, and there is a hidden danger of causing mechanical safety accidents. Therefore, it is very necessary to install an anti-collision structure on the robot arm.

[0003] In the prior art, the side panels of the robot box are all equipped with rubber anti-collision strips with mounting bases. When the robot moves horizontally and collides with an obstacle, the anti-collision strips are elastically deformed. The anti-collision strips are sensors in the electrical brake control circuit, and their deformation will trigger the braking action of the safety control circuit. However, since the collision contact point must contact the anti-collision strip and the stress of the frontal contact causes a large elastic deformation on its surface, and since the area of ​​the anti-collision strip is small, the probability of triggering the anti-collision strip is low, which may cause safety accidents and pose a great risk of mechanical injury to operators. Summary of the invention

[0004] In view of the shortcomings of the existing methods, the present application proposes a semiconductor cleaning equipment and a robotic arm thereof, so as to solve the technical problem in the prior art that the robotic arm is prone to safety accidents due to unreasonable anti-collision structure design, thereby posing a great risk of mechanical injury to the operator.

[0005] In a first aspect, an embodiment of the present application provides a robot arm in a semiconductor cleaning device for conveying workpieces to be processed, comprising: a box body, a substrate assembly, a robot arm assembly and a detection assembly; the box body is movable, and the box body comprises a first side wall and a second side wall arranged opposite to each other in its moving direction, and a third side wall adjacent to the first side wall and the second side wall, the first side wall and the second side wall can be deformed under the action of an external force, and a notch is provided on the third side wall; the substrate assembly is located in the box body, movably connected to the first side wall and the second side wall, and arranged close to the notch, the substrate assembly can move relative to the box body when the first side wall and / or the second side wall are deformed, the substrate assembly comprises opposite inner and outer side surfaces, the inner side surface of the substrate assembly is used to install the robot arm assembly, and the outer side surface of the substrate assembly is used to close the notch; the detection assembly is arranged on the outer side surface of the third side wall and the outer side surface of the substrate assembly, and is used to detect the relative movement between the box body and the substrate assembly, and when the relative movement is detected, the box body stops moving.

[0006] In one embodiment of the present application, the substrate assembly is movably connected to the first side wall and the second side wall through a plurality of elastic structures, the elastic structure comprising a connecting block, a fixing member and an elastic member, the connecting block is arranged on the inner side surface of the substrate assembly, and is partially arranged facing the inner side surface of the first side wall or the second side wall; the fixing member is arranged on the first side wall or the second side wall; and the two ends of the elastic member are respectively connected to the connecting block and the fixing member.

[0007] In one embodiment of the present application, the robotic arm also includes a slide rail structure, which is arranged between the substrate assembly and the third side wall. The slide rail structure includes a slide rail and a slider. The slide rail is arranged on one of the substrate assembly and the third side wall, and the slider is connected to the other of the substrate assembly and the third side wall. The slide rail extends along the moving direction, and the slide rail cooperates with the slider, so that the substrate assembly slides relative to the box when the first side wall and / or the second side wall is deformed.

[0008] In one embodiment of the present application, the robotic arm also includes a movable positioning structure, which is arranged between the substrate assembly and the third side wall, and includes a positioning bolt and a positioning groove. The positioning bolt is arranged on one of the substrate assembly and the third side wall, and the positioning groove is arranged on the other of the substrate assembly and the third side wall. The positioning bolt cooperates with the positioning groove for positioning, and when the substrate assembly slides relative to the box body, the positioning bolt slides out of the positioning groove.

[0009] In one embodiment of the present application, the substrate assembly includes a top plate, a middle plate and a bottom plate arranged from top to bottom, the thickness of the middle plate is greater than that of the top plate and the bottom plate, the inner side surfaces of the top plate, the middle plate and the bottom plate are flush with each other to form the inner side surface of the substrate assembly, the middle plate extends into the notch, and its outer side surface is flush with the outer side surface of the third side wall.

[0010] In one embodiment of the present application, a contour of at least part of the notch matches a contour of at least part of the middle plate, and the detection component is disposed at a junction where the contours of the outer side surface of the third side wall and the outer side surface of the middle plate match.

[0011] In one embodiment of the present application, the detection component includes a sensing block and a sensor, the sensing block is arranged on one of the outer side surface of the third side wall and the outer side surface of the substrate assembly, and the sensor is arranged on the other of the outer side surface of the third side wall and the outer side surface of the substrate assembly, and the sensor is used to detect whether the sensing block is displaced so as to detect the relative movement between the box and the substrate assembly.

[0012] In one embodiment of the present application, the detection component includes a capacitive induction switch or an electromagnetic induction switch.

[0013] In one embodiment of the present application, the robotic arm also includes a power supply device, which is used to supply power to the robotic arm. The detection component is electrically connected to the power supply device to form a power supply circuit, which is used to disconnect the power supply circuit and stop the box from moving when the relative movement is detected.

[0014] In a second aspect, an embodiment of the present application provides a semiconductor cleaning device, comprising: a guide rail and a robotic arm as provided in the first aspect.

[0015] The beneficial technical effects brought about by the technical solution provided by the embodiment of the present application are:

[0016] In the embodiment of the present application, the substrate assembly is movably connected to the first side wall and the second side wall. When the box body collides along the moving direction, any contact between the obstacle and the first side wall and / or the second side wall will cause the obstacle to deform, so that relative movement occurs between the substrate assembly and the box body. The detection component controls the box body to stop moving by detecting the relative movement. Since the first side wall and the second side wall can be detected as a whole, the detection area is large, thereby greatly improving the safety performance, thereby avoiding mechanical damage to the operator. In addition, since the box body is tough and easy to deform, it is not easy to have hard contact when a collision occurs, thereby further improving the safety performance.

[0017] Additional aspects and advantages of the present application will be partially given in the following description, which will become apparent from the following description, or will be understood through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which:

[0019] Figure 1 A front perspective schematic diagram of a robotic arm provided in an embodiment of the present application;

[0020] Figure 2 A three-dimensional schematic diagram of the rear side of a box provided in an embodiment of the present application;

[0021] Figure 3 A front perspective schematic diagram of a substrate assembly provided in an embodiment of the present application;

[0022] Figure 4 A rear perspective schematic diagram of a substrate assembly provided in an embodiment of the present application;

[0023] Figure 5 A rear view schematic diagram of a box body and a base plate assembly provided in an embodiment of the present application;

[0024] Figure 6 A cross-sectional schematic diagram of a box body and a base plate assembly in a side view state provided in an embodiment of the present application;

[0025] Figure 7 A schematic diagram of an electrical braking control circuit for a robotic arm provided in an embodiment of the present application. DETAILED DESCRIPTION

[0026] The present application is described in detail below, and examples of embodiments of the present application are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar components or components with the same or similar functions. In addition, if the detailed description of the known technology is unnecessary for the features of the present application shown, it will be omitted. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be interpreted as limiting the present application.

[0027] It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as those generally understood by those skilled in the art to which this application belongs. It should also be understood that terms such as those defined in general dictionaries should be understood to have meanings consistent with those in the context of the prior art, and will not be interpreted with idealized or overly formal meanings unless specifically defined as here.

[0028] The technical solution of the present application and how the technical solution of the present application solves the above-mentioned technical problems are described in detail below with specific embodiments.

[0029] The present application embodiment provides a mechanical arm in a semiconductor cleaning device for transferring a workpiece to be processed. The structural schematic diagram of the mechanical arm is shown in FIG. Figures 1 to 3 As shown, it includes: a box body 1, a substrate assembly 2, a robot arm assembly 3 and a detection assembly 4; the box body 1 is movable, and the box body 1 includes a first side wall 11 and a second side wall 12 that are arranged opposite to each other in the moving direction L thereof, and a third side wall 13 adjacent to the first side wall 11 and the second side wall 12, the first side wall 11 and the second side wall 12 can be deformed under the action of an external force, and a notch 121 is opened on the third side wall 13; the substrate assembly 2 is located in the box body 1, and is movably connected to the first side wall 11 and the second side wall 12, and is arranged close to the notch 121 The substrate assembly 2 can move relative to the box body 1 when the first side wall 11 and / or the second side wall 12 are deformed. The substrate assembly 2 includes an inner side surface 21 and an outer side surface 22 relative to each other. The inner side surface 21 of the substrate assembly 2 is used to install the robot arm assembly 3, and the outer side surface 22 of the substrate assembly 2 is used to close the third side wall 13; the detection assembly 4 is arranged on the outer side surface of the third side wall 13 and the outer side surface 22 of the substrate assembly 2, and is used to detect the relative movement between the box body 1 and the substrate assembly 2, and when the relative movement is detected, the box body 1 stops moving.

[0030] like Figures 1 to 3 As shown, the box body 1 can be a box-type structure made of metal material. For example, the box body 1 can be made of 2mm thick stainless steel material and bent into an integral structure, so that the box body 1 has strong toughness and is easy to restore to its original shape after being deformed by impact. The bottom of the box body 1 can be set on the guide rail of the semiconductor cleaning equipment and can reciprocate along the extension direction of the guide rail. The two side walls of the box body 1 in the moving direction L are respectively the first side wall 11 and the second side wall 12, which are used to deform when an impact occurs, that is, Figure 1 The side wall between the first side wall 11 and the second side wall 12 is the third side wall 13, that is, Figure 1The front side wall shown in the figure, the rear side of the box body 1 can be set as an open structure to facilitate the installation of the substrate assembly 2 and the mechanical arm assembly 3. The third side wall 13 can be set close to the process area of ​​the semiconductor cleaning equipment, for example, but the embodiment of the present application is not limited to this. The substrate assembly 2 can be installed in the box body 1 from the rear side of the box body 1. The substrate assembly 2 is movably connected to the box body 1 and is set close to the notch 121. When the box body 1 is hit, the substrate assembly 2 can move relative to the box body 1. The inner side 21 of the substrate assembly 2 can be used to install the mechanical arm assembly 3, which includes but is not limited to motors, moving screws, mechanical arms and other components, wherein the mechanical arm is set toward the process area of ​​the semiconductor cleaning equipment, and the mechanical arm can be driven by the motor and the moving screw to rise and fall relative to the box body 1 for transmitting the workpiece to be processed (not shown in the figure). The workpiece to be processed can be a wafer, but the embodiment of the present application is not limited to this. The outer side 22 of the substrate assembly 2 can be used to close the notch 121 to install the detection assembly 4. The detection component 4 is disposed on the outer side surface of the third side wall 13 and the outer side surface 22 of the substrate assembly 2. The detection component 4 is used to detect the relative movement between the box body 1 and the substrate assembly 2, and when the relative movement is detected, the box body 1 stops moving. In actual application, when the first side wall 11 and / or the second side wall 12 of the box body 1 is hit, the box body 1 is deformed and moves relative to the substrate assembly 2. After the detection component 4 detects the relative movement, the power supply circuit of the box body 1 can be disconnected to stop the box body 1 from moving, thereby avoiding safety accidents.

[0031] In the embodiment of the present application, the substrate assembly is movably connected to the first side wall and the second side wall. When the box body collides along the moving direction, any obstacle that contacts the first side wall and / or the second side wall at any position will cause the obstacle to deform, so that relative movement occurs between the substrate assembly and the box body. The detection component controls the box body to stop moving by detecting the relative movement. Since the first side wall and the second side wall can be detected as a whole, the detection area is large, thereby greatly improving the safety performance, thereby avoiding mechanical damage to the operator. In addition, since the box body is tough and easy to deform, it is not easy to have hard contact when a collision occurs, thereby further improving the safety performance.

[0032] It should be noted that the embodiment of the present application does not limit the specific material and specifications of the box 1. For example, the box 1 can also be made of a rigid material. Since the substrate assembly 2 is movably arranged in the box 1, when the box 1 is hit, the substrate assembly 2 will also move relative to the box 1, thereby facilitating the detection of the detection assembly 4. Therefore, the embodiment of the present application is not limited to this, and those skilled in the art can adjust the settings according to actual conditions.

[0033] In one embodiment of the present application, Figures 1 to 5As shown, the substrate assembly 2 is movably connected to the first side wall 11 and the second side wall 12 through a plurality of elastic structures 6. The elastic structure 6 includes a connecting block 61, a fixing member 62 and an elastic member 63. The connecting block 61 is arranged on the inner side surface 21 of the substrate assembly 2, and is partially arranged facing the inner side surfaces of the first side wall 11 and the second side wall 12; the fixing member 62 is arranged on the first side wall 11 or the second side wall 12; and the two ends of the elastic member 63 are respectively connected to the connecting block 61 and the fixing member 62.

[0034] like Figures 1 to 5 As shown, four elastic structures 6 are respectively arranged at the corners of the substrate assembly 2, and can be connected to the inner side of the first side wall 11 and the second side wall 12. When the first side wall 11 and the second side wall 12 of the box body 1 collide with the operator or other objects, the deformation of the elastic structure 6 and the first side wall 11 and the second side wall 12 can buffer the impact of the collision obstacle to avoid hard contact between the substrate assembly 2 and the box body 1, thereby further improving the safety and stability of the embodiment of the present application. However, the embodiment of the present application is not limited to the specific number of elastic structures 6, and those skilled in the art can adjust the settings according to their needs. Specifically, the connecting block 61 is a plate-like structure made of metal material, and the shape of the connecting block 61 can be set to an "L" shaped structure, wherein one side plate is arranged to fit the inner side 21 of the substrate assembly 2, and is arranged on the substrate assembly 2 by, for example, bolt connection, and the other side plate is arranged facing the inner side of the first side wall 11 or the second side wall 12. The fixing member 62 may be a pin structure, the fixing member 62 is inserted into the first side wall 11 or the second side wall 12, and the nail cap of the fixing member 62 is located outside the first side wall 11 or the second side wall 12. The elastic member 63 may be a coil spring with a certain strength, and the two ends of the elastic member 63 are respectively connected to the connecting block 61 and the fixing member 62. The above design not only makes the structure of the elastic structure 6 simple, but also greatly reduces the application and maintenance costs.

[0035] It should be noted that the embodiment of the present application does not limit the specific implementation of the elastic structure 6. For example, the elastic structure 6 can also be a hydraulic telescopic cylinder. Therefore, the embodiment of the present application is not limited to this, and those skilled in the art can adjust the configuration according to actual conditions.

[0036] In one embodiment of the present application, Figures 1 to 4 As shown, the robotic arm also includes a slide rail structure 5, which is arranged between the substrate assembly 2 and the third side wall 13. The slide rail structure 5 includes a slide rail 51 and a slider 52. The slide rail 51 is arranged on one of the substrate assembly 2 and the third side wall 13, and the slider 52 is connected to the other of the substrate assembly 2 and the third side wall 13. The slide rail 52 is extended along the moving direction, and the slide rail 51 cooperates with the slider 51. When the first side wall 11 and / or the second side wall 11 is deformed, the substrate assembly 2 slides relative to the box body 1.

[0037] like Figures 1 to 4 As shown, the two slide rail structures 5 are both arranged between the outer side surface 22 of the substrate assembly 2 and the inner side surface of the third side wall 13, and can be arranged near the two ends of the substrate assembly 2. The slide rail structure 5 can be specifically extended along the left and right directions of the box body 1, that is, the extension direction of the slide rail structure 5 is arranged parallel to the moving direction L of the box body 1, so that the substrate assembly 2 slides relative to the box body 1. It should be noted that the embodiment of the present application is not limited to the specific number and position of the slide rail structure 5, and those skilled in the art can adjust the setting according to their needs. Specifically, the slide rail 51 is arranged on the substrate assembly 2, for example, by bolt connection, and is located on the outer side surface 22 of the substrate assembly 2. The slider 52 is arranged on the inner side surface of the third side wall 13, for example, by bolt connection. The slider 52 cooperates with the slide rail 51 to enable the substrate assembly 2 to slide relative to the box body 1 when the first side wall 11 and / or the second side wall 12 are deformed. The above design not only makes the structural design of the embodiment of the present application reasonable, thereby greatly reducing the failure rate of the embodiment of the present application, but also adopts the method of matching the slider 52 with the slide rail 51 to make the detection of the detection component 4 more accurate.

[0038] It should be noted that the embodiments of the present application do not limit the specific positions of the slide rail 51 and the slider 52, and the specific positions of the two can be interchanged, that is, the slide rail 51 is set on the inner side of the third side wall 13, and the slider 52 is set on the outer side 22 of the substrate assembly 2. Therefore, the embodiments of the present application are not limited to this, and those skilled in the art can adjust the settings according to actual conditions.

[0039] In one embodiment of the present application, Figures 1 to 4 , Figure 6 As shown, the robot arm 1 also includes a movable positioning structure 7, which is arranged between the substrate assembly 2 and the third side wall 13, and includes a positioning bolt 71 and a positioning groove 72. The positioning bolt 71 is arranged on one of the substrate assembly 2 and the third side wall 13, and the positioning groove 72 is arranged on the other of the substrate assembly 2 and the third side wall 13. The positioning bolt 71 and the positioning groove 72 cooperate to position, and when the substrate assembly 2 slides relative to the box body 1, the positioning bolt 71 slides out of the positioning groove 72.

[0040] like Figures 1 to 4 , Figure 6As shown, the positioning stopcock 71 can be specifically a ball plunger, one end of the positioning stopcock 71 is fixedly arranged on the outer side 22 of the substrate assembly 2, the positioning stopcock 71 can be specifically located on the lower side of the slide rail 51, and the positioning stopcock 71 can be extended and retracted when subjected to external force, so that the positioning stopcock 71 can slide out of the positioning groove 72 to follow the movement of the substrate assembly 2, and avoid mechanical interference with the third side wall 13 to cause detection failure. The positioning groove 72 can be specifically formed on the inner side of the third side wall 13, and its position is set corresponding to the positioning stopcock 71. In actual application, the end of the positioning stopcock 71 can extend into the positioning groove 72, so as to facilitate the installation of the substrate assembly 2 in the box body 1 and to position it between the third side wall 13. Further, when the first side wall 11 and / or the second side wall 11 are deformed and need to be restored, the positioning stopcock 71 and the positioning groove 72 can also be used to cooperate for positioning, thereby greatly improving the recovery efficiency of the box body 1, and then improving the disassembly and maintenance efficiency of the embodiment of the present application.

[0041] It should be noted that the specific positions of the positioning stopcock 71 and the positioning groove 72 are not limited in the embodiment of the present application, and the specific positions of the two can be interchanged. For example, the positioning stopcock 71 is arranged on the inner side surface of the third side wall 13, and the positioning groove 72 is formed on the outer side surface 22 of the substrate assembly 2. Therefore, the embodiment of the present application is not limited to this, and those skilled in the art can adjust the position according to actual conditions.

[0042] In one embodiment of the present application, Figures 1 to 4 As shown, the substrate assembly 2 includes a top plate 23, a middle plate 24 and a bottom plate 25 arranged from top to bottom, the thickness of the middle plate 24 is greater than that of the top plate 23 and the bottom plate 25, and the inner side surfaces of the top plate 23, the middle plate 24 and the bottom plate 25 are flush to form the inner side surface 21 of the substrate assembly 2; the middle plate 24 extends into the notch 121, and its outer side surface is flush with the outer side surface of the third side wall 13.

[0043] like Figures 1 to 4As shown, the substrate assembly 2 specifically includes a top plate 23, a middle plate 24 and a bottom plate 25 arranged from top to bottom, and the sides of the multiple plates can be fixedly connected by welding or bolting, but the embodiment of the present application is not limited to this. In a specific embodiment, the middle plate 24 specifically adopts an 18mm thick aluminum plate, and the top plate 23 and the bottom plate 25 are both 10mm thick aluminum plates. The inner side surfaces of the top plate 23, the middle plate 24 and the bottom plate 25 are flush to form the inner side surface 21 of the substrate assembly 2, so as to facilitate the installation of the robot arm assembly 3, and because the thickness of the middle plate 24 is relatively thick, it can be used to carry the robot arm assembly 3, thereby improving the structural strength of the embodiment of the present application. Since the thickness of the middle plate 24 is thicker than that of other plates, the outer side surface of the middle plate 24 can extend into the notch 121 to be flush with the outer side surface of the third side wall 13. The outer side of the middle plate 24 is higher than the outer side of the top plate 23 and the bottom plate 25, so that the upper and lower sides of the middle plate 24 form installation spaces with the top plate 23 and the bottom plate 25, respectively, so as to facilitate the installation of the slide rail structure 5 and the movable positioning structure 7, and the installation space can also provide space support for the deformation of the box body 1. With the above design, since the base plate assembly 2 adopts a split design, the embodiment of the present application is easy to disassemble and assemble, thereby greatly improving the efficiency of disassembly and maintenance, and further greatly reducing the failure rate and extending the service life.

[0044] It should be noted that the embodiments of the present application do not limit the specific implementation of the substrate assembly 2. For example, the substrate assembly 2 can adopt an integrated structure. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the configuration according to actual conditions.

[0045] In one embodiment of the present application, Figures 1 to 4 As shown, the contour of at least part of the notch 121 matches the contour of at least part of the middle plate 24 , and the detection component 4 is disposed at the junction where the contours of the outer side surface of the third side wall 13 and the outer side surface of the middle plate 24 match.

[0046] like Figures 1 to 4 As shown, a notch 121 is provided in the middle of the third side wall 13, and the specific shape of the notch 121 can be rectangular. The middle plate 24 can extend into the notch 121 to be flush with the outer side of the third side wall 13, and the top contour of the notch 121 can be set corresponding to the top and the contours of both sides of the middle plate 24. Further, a mounting plate 122 is provided in the notch 121, and the mounting plate 122 is located at the bottom of the middle plate 24. The mounting plate 122 can be formed integrally with the first side wall 11 and extend into the notch 121. The two detection components 4 are respectively located at the two ends of the diagonal of the middle plate 24, that is, the detection component 4 is arranged at the junction where the outer side of the third side wall 13 and the outer side of the middle plate 24 match the contours. With the above design, since the middle plate 24 is located in the middle position in the height direction of the box body 1, the accuracy of the detection component 4 can be improved, thereby further improving the safety performance of the embodiment of the present application.

[0047] It should be noted that the embodiment of the present application does not limit the specific position and number of the detection components 4. For example, multiple detection components 4 can be respectively arranged near the first side wall 11 and the second side wall 12. Therefore, the embodiment of the present application is not limited to this, and those skilled in the art can adjust the settings according to actual conditions.

[0048] In one embodiment of the present application, Figures 1 to 6 As shown, the detection assembly 4 includes a sensor block 41 and a sensor 42, the sensor block 41 is disposed on one of the outer side surface of the third side wall 13 and the outer side surface 22 of the substrate assembly 2, and the sensor 42 is disposed on the other of the outer side surface of the third side wall 13 and the outer side surface 22 of the substrate assembly 2, and the sensor 42 is used to detect whether the sensor block 41 is displaced, so as to detect the relative movement between the box body 1 and the substrate assembly 2. Optionally, the detection assembly 4 includes a capacitive induction switch or an electromagnetic induction switch.

[0049] like Figures 1 to 6 As shown, the detection component 4 can specifically adopt a capacitive induction switch or an electromagnetic induction switch, but the embodiment of the present application is not limited thereto. The induction block 41 is specifically arranged on the third side wall 13, and the sensor 42 is arranged on the substrate component 2, for example, on the middle plate 24 of the substrate component 2. With this design, since the sensor 42 is arranged on the middle plate 24, the cables of the detection component 4 are easy to organize, so that the structure of the embodiment of the present application is simple and easy to implement. In actual application, when an obstacle forces the first side wall 11 and / or the second side wall 12 of the box 1 to deform, the elastic structure 6 expands and contracts, and the slide rail 51 on the substrate assembly 2 slides relative to the slider 52 on the box 1. The sensor block 41 will move with the box 1, and the sensor 42 is fixed on the substrate assembly 2, and its position relative to the substrate assembly 2 will not change. Therefore, since the relative position of the sensor block 41 and the sensor 42 moves, it means that relative movement occurs between the box 1 and the substrate assembly 2. At this time, the detection component can control the box 1 to stop running. For example, the detection component 4 is connected to the power supply device of the robot arm (not shown in the figure) to stop the power supply device from supplying power to the robot arm.

[0050] It should be noted that the embodiment of the present application does not limit the specific positions of the sensor block 41 and the sensor 42, and the specific positions of the two can be interchanged, for example, the sensor block 41 is set on the middle plate 24, and the sensor 42 is set on the third side wall 13. Therefore, the embodiment of the present application is not limited to this, and those skilled in the art can adjust the settings according to actual conditions.

[0051] In one embodiment of the present application, Figures 1 to 6As shown, the robot arm also includes a power supply device (not shown in the figure), which is used to supply power to the robot arm. The detection component 4 is electrically connected to the power supply device to form a power supply circuit, which is used to disconnect the power supply circuit when relative movement is detected to stop the box 1 from moving.

[0052] In a specific implementation of the present application, the schematic diagram of the electric brake control circuit of the embodiment of the present application is as follows: Figure 7 As shown, combined with reference Figures 1 to 6 As shown, when the robot arm is running smoothly, the servo motor module 103 and the servo driver module 102 are in a normal power supply state, the detection components 107 and 108 can be proximity capacitive induction switches, and the signal output ends of the normally open contacts of the detection components 107 and 108 on the robot arm are respectively connected to the signal input terminals S11 and S12, S21 and S22 of the safety relay module 109, and the 24V (volt) DC power supply module 100 is connected to the switch signal output terminal S13 of the safety relay module 109, and the switch signal output terminal S14 of the safety relay module (109) is connected to the safety relay module (109). The output terminal S14 is supplied to the safety brake terminal (STO signal input terminal) of the servo drive module 102, and the working characteristics of the safety relay module (109) are utilized, that is, when its two signal input terminals S11 and S12, S21 and S22 form a power supply circuit, the switch signals of its switch signal output terminals S13 and S14 are closed. When any of the two signal input terminals S11 and S12, S21 and S22 does not form a power supply circuit and is in a disconnected state, the switch signals of its switch signal output terminals S13 and S14 will be placed in a disconnected state.

[0053] Under normal operation of the robot arm, the two detection components 107 and 108 are in the induction state, and their signal output ends form a power supply circuit with the corresponding signal input terminals S11 and S12, S21 and S22 of the safety relay module 109. When the housing 1 of the robot arm collides, the circuit formed by the signal output ends of the detection components 107 and 108 is disconnected, thereby causing the safety brake terminal (STO signal input end) of the servo driver module 102 and the DC power supply module, and the AC power input end of the servo driver module 102 to stop supplying power to the servo motor module 103, so that the servo motor module 103 will no longer rotate when it loses the power supply energy, achieving a braking effect. With the above design, the detection component 4 is used in conjunction with the safety relay module as a power supply circuit triggering mode, and multiple detection components 4 constitute multiple power supply circuits in the power supply device to form a failure-oriented safety mechanism, that is, when any power supply circuit is disconnected, fails, or is triggered, the safety relay module will stop supplying power to achieve the braking effect of the housing 1, thereby further improving the safety and reliability of the embodiment of the present application.

[0054] Based on the same inventive concept, an embodiment of the present application provides a semiconductor cleaning device, including a robotic arm as provided in the above embodiments.

[0055] By applying the embodiments of the present application, at least the following beneficial effects can be achieved:

[0056] In the embodiment of the present application, the substrate assembly is movably connected to the first side wall and the second side wall. When the box body collides along the moving direction, any contact between the obstacle and the first side wall and / or the second side wall will cause the obstacle to deform, so that relative movement occurs between the substrate assembly and the box body. The detection component controls the box body to stop moving by detecting the relative movement. Since the first side wall and the second side wall can be detected as a whole, the detection area is large, thereby greatly improving the safety performance, thereby avoiding mechanical damage to the operator. In addition, since the box body is tough and easy to deform, it is not easy to have hard contact when a collision occurs, thereby further improving the safety performance.

[0057] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

[0058] In the description of the present application, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0059] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0060] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0061] In the description of this specification, specific features, structures, materials or characteristics may be combined in an appropriate manner in any one or more embodiments or examples.

[0062] The above description is only a partial implementation method of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications should also be regarded as the scope of protection of the present application.

Claims

1. A robotic arm in a semiconductor cleaning device, used for conveying workpieces to be processed, characterized in that: include: Box body, substrate assembly, mechanical arm assembly and detection assembly; the mechanical arm also includes a slide rail structure and a movable positioning structure; The box body is movable, and comprises a first side wall and a second side wall arranged opposite to each other in the moving direction thereof, and a third side wall adjacent to the first side wall and the second side wall, wherein the first side wall and the second side wall can be deformed under the action of an external force, and a notch is formed on the third side wall; The base plate assembly is located in the box body, movably connected to the first side wall and the second side wall, and is disposed close to the notch. The base plate assembly can move relative to the box body when the first side wall and / or the second side wall is deformed. The base plate assembly includes an inner side surface and an outer side surface opposite to each other. The inner side surface of the base plate assembly is used to install the robot arm assembly, and the outer side surface of the base plate assembly is used to close the notch. The base plate assembly includes a top plate, a middle plate and a bottom plate arranged from top to bottom, wherein the middle plate is thicker than the top plate and the bottom plate, so as to support the robot arm assembly; The inner side surfaces of the top plate, the middle plate and the bottom plate are flush with each other to form the inner side surface of the base plate assembly; the middle plate extends into the notch, and its outer side surface is flush with the outer side surface of the third side wall; The outer side surface of the middle plate is higher than the outer side surfaces of the top plate and the bottom plate, so that installation spaces are formed between the upper and lower sides of the middle plate and the top plate and the bottom plate respectively, so as to be used for installing the slide rail structure and the movable positioning structure, and to provide space support for the deformation of the box body; The detection assembly is disposed on the outer side surface of the third side wall and the outer side surface of the substrate assembly, and is used to detect the relative movement between the box body and the substrate assembly, and stop the movement of the box body when the relative movement is detected.

2. The robotic arm according to claim 1, characterized in that: The substrate assembly is movably connected to the first side wall and the second side wall through a plurality of elastic structures, the elastic structure comprising a connecting block, a fixing member and an elastic member, the connecting block being arranged on the inner side surface of the substrate assembly and partially facing the inner side surface of the first side wall or the second side wall; the fixing member being arranged on the first side wall or the second side wall; and the two ends of the elastic member being respectively connected to the connecting block and the fixing member.

3. The robotic arm according to claim 1, characterized in that: The slide rail structure is arranged between the substrate assembly and the third side wall, and the slide rail structure includes a slide rail and a slider. The slide rail is arranged on one of the substrate assembly and the third side wall, and the slider is connected to the other of the substrate assembly and the third side wall. The slide rail is extended along the moving direction, and the slide rail cooperates with the slider. When the first side wall and / or the second side wall is deformed, the substrate assembly slides relative to the box body.

4. The mechanical arm according to claim 3, characterized in that: The movable positioning structure is arranged between the substrate assembly and the third side wall, and includes a positioning bolt and a positioning groove. The positioning bolt is arranged on one of the substrate assembly and the third side wall, and the positioning groove is arranged on the other of the substrate assembly and the third side wall. The positioning bolt cooperates with the positioning groove for positioning. When the substrate assembly slides relative to the box body, the positioning bolt slides out of the positioning groove.

5. The mechanical arm according to claim 1, characterized in that: The contour of at least part of the notch matches the contour of at least part of the middle plate, and the detection component is arranged at the junction where the contours of the outer side surface of the third side wall and the outer side surface of the middle plate match.

6. The robotic arm according to any one of claims 1 to 5, characterized in that: The detection component includes a sensing block and a sensor, wherein the sensing block is disposed on one of the outer side surface of the third side wall and the outer side surface of the substrate component, and the sensor is disposed on the other of the outer side surface of the third side wall and the outer side surface of the substrate component, and the sensor is used to detect whether the sensing block is displaced so as to detect the relative movement between the box body and the substrate component.

7. The robot arm according to claim 6, characterized in that: The detection component includes a capacitive induction switch or an electromagnetic induction switch.

8. The robotic arm according to any one of claims 1 to 5, characterized in that: The robotic arm also includes a power supply device, which is used to supply power to the robotic arm. The detection component is electrically connected to the power supply device to form a power supply circuit, which is used to disconnect the power supply circuit and stop the box from moving when the relative movement is detected.

9. A semiconductor cleaning device, characterized in that: Comprising a robotic arm as described in any one of claims 1 to 8.

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