Laser cleaning system

Abstract

The utility model relates to a laser cleaning system which comprises an operation room, a workbench, a laser generating system, an intelligent identification system and a controller, the workbench, the laser generating system, the intelligent identification system and the controller are arranged in the operation room, a workpiece to be cleaned is placed on the workbench, the laser generating system is used for enabling laser to act on the workpiece to be cleaned, and the intelligent identification system comprises a scanning assembly. The scanning assembly is used for planning a cleaning path, cleaning path information of the scanning assembly is sent to the controller, and the controller controls the optical control assembly to adjust the cleaning position of the laser acting on the to-be-cleaned workpiece. The workpiece to be cleaned is scanned through the intelligent recognition system, a proper cleaning path is planned for the workpiece to be cleaned, the optical control assembly emits the laser beam to the surface of the workpiece to be cleaned according to the cleaning path for laser cleaning, physical contact with the surface of the workpiece to be cleaned is avoided through laser cleaning, mechanical damage is avoided, and the service life of the workpiece to be cleaned is prolonged. And the cleaning area of the to-be-cleaned workpiece can be accurately controlled through the proper cleaning path.

Description

Technical Field

[0001] This utility model relates to the field of laser cleaning equipment technology, and specifically to a laser cleaning system. Background Technology

[0002] Sputtering equipment is a key piece of equipment used in physical vapor deposition (PVD) to prepare thin films. It primarily works by bombarding a target material with high-energy particles in a vacuum environment, causing target atoms to be sputtered and deposited onto the substrate surface, thus forming a thin film. To prevent cross-contamination and impurity deposition, baffles are used to intercept sputtered particles, preventing them from depositing on the chamber walls, electrodes, or other non-target areas. In some processes, chromium targets are used. The chromium atoms or ions generated by high-speed ion bombardment of the target diffuse into the chamber space. The baffle, acting as a shield for sputtered particles, can only partially capture the chromium particles reaching the substrate, leading to deposition. Because the deposited chromium layer alters the geometry of the baffle, its shielding ability against sputtered particles weakens, and non-target areas become contaminated. Furthermore, the difference in thermal conductivity between metallic chromium and the baffle material can cause localized temperature fluctuations, affecting the uniformity of the thin film produced by the deposition equipment.

[0003] Existing technologies typically employ a pollution-free sandblasting cleaning method. However, since the baffles inside the sputtering equipment often have multiple holes for gas to enter, sandblasting cleaning not only damages the baffles, but also causes the holes to become clogged due to the splashing of sandblasting particles. Furthermore, the excessive density of the holes makes it difficult to precisely control the cleaning area. Utility Model Content

[0004] The purpose of this invention is to solve the technical problem of difficulty in accurately controlling the cleaning area caused by existing cleaning baffles. It provides a laser cleaning baffle device that can achieve precise and thorough cleaning of the baffle by planning the cleaning route. The main concept is as follows:

[0005] A laser cleaning system includes an operating room and a workbench, a laser generating system, an intelligent recognition system, and a controller disposed in the operating room. The workpiece to be cleaned is placed on the workbench. The laser generating system is used to apply laser light to the workpiece to be cleaned. The intelligent recognition system includes a scanning component for planning the cleaning path. The intelligent recognition system is connected to the laser generating system through the controller.

[0006] The laser generating system includes a laser and an optical control component. The laser is used to emit lasers of various frequencies. The optical control component is installed in the direction of laser emission from the laser and is used to adjust the path of the received laser. The controller is connected to the optical control component and the scanning component. The cleaning path information of the scanning component is sent to the controller, and the controller controls the optical control component to adjust the laser to the cleaning position of the workpiece to be cleaned.

[0007] Before using laser to clean the chromium layer on the surface of the workpiece, this solution first scans the workpiece using a scanning component of an intelligent recognition system. This system plans a suitable cleaning path for the workpiece, automatically avoiding sensitive areas such as holes or grooves. The intelligent recognition system sends the identified cleaning path to the controller, enabling the controller to activate the laser and optical control components. The laser beam emitted by the laser is received by the optical control components, which then project the laser beam onto the surface of the workpiece according to the cleaning path. This laser cleaning process avoids physical contact with the workpiece surface, preventing mechanical damage. Furthermore, the optimized path planning avoids sensitive areas such as holes or grooves, allowing for precise control of the cleaning area.

[0008] Preferably, the optical control assembly includes a galvanometer scanning head and a focusing lens. The galvanometer scanning head is positioned between the laser and the focusing lens. The laser emitted by the laser is reflected by the galvanometer scanning head, and the reflected laser is focused by the focusing lens onto the processing area of ​​the workpiece to be cleaned. The laser generator produces laser light, the galvanometer scanning head changes the direction of the laser beam according to the control signal from the controller, and the focusing lens converges the laser beam onto the processing area on the surface of the workpiece to be cleaned. All three components work together under the coordination of the controller to complete the laser processing task.

[0009] Preferably, the laser emitted by the focusing lens has a focusing range of 10-50 μm. This method is suitable for cleaning chromium layers deposited on the surface of aluminum substrate baffles, where the damage threshold of the aluminum substrate is 3 J / cm. 2 The ablation threshold of chromium is 0.8 J / cm. 2 Setting the range to 10-50μm ensures that the laser only covers the chromium layer, concentrating the thermal impact mainly on the chromium layer and avoiding damage to the aluminum substrate.

[0010] The second aspect of this invention addresses the technical problem of uncontrollable laser cleaning of deposited chromium on a baffle, which can lead to over-cleaning and damage to the aluminum substrate of the baffle. Furthermore, the intelligent identification system also includes a spectrometer for detecting the metal layer on the baffle surface. The spectrometer in this solution detects the surface composition of the baffle. Chromium exhibits strong spectral lines in the range of 357.9-360.5 nm, while aluminum shows obvious spectral lines near 396.1-396.2 nm. Once a location is identified as chromium-free, the process can proceed to the next working location for chromium removal.

[0011] Preferably, the worktable is a rotary table or a multi-degree-of-freedom robotic arm.

[0012] Preferably, the operating room includes a laser protective cover for preventing laser leakage and a camera. The camera is located inside the laser protective cover and is used to photograph the workpiece to be cleaned inside the laser protective cover. The camera is connected to a display, which is located outside the operating room.

[0013] Preferably, the operating room has a closed structure and is equipped with a negative pressure system.

[0014] The third aspect of this invention aims to solve the technical problem of chemical pollution caused by waste materials after laser generation. Preferably, the operating chamber is equipped with a recovery component, which includes a suction pump and a suction pipe connected to the suction pump. The suction pipe is used to absorb the products on the worktable. Since the laser generates gas and particles after acting on the chromium layer, the suction pump and suction pipe enable the collection and recovery of the generated gas and particles, achieving resource recycling and avoiding pollution from waste materials and exhaust gases.

[0015] The beneficial effects of this utility model are as follows: the optical control component emits a laser beam to the surface of the workpiece to be cleaned according to the cleaning path for laser cleaning. Laser cleaning does not make physical contact with the surface of the workpiece to be cleaned, thus avoiding mechanical damage. Furthermore, the reasonable path planning avoids sensitive areas such as holes or grooves, enabling precise control of the cleaning area of ​​the workpiece to be cleaned. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of this utility model.

[0017] Figure 2 This is a flowchart illustrating the operation of this utility model.

[0018] The attached diagram includes the following reference numerals: 1. Control room; 2. Laser generating system; 3. Intelligent recognition system; 4. Controller; 5. Workbench; 6. Workpiece to be cleaned; 7. Laser protective cover; 8. Negative pressure component; 9. Recovery component. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. When the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this disclosure. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this disclosure as detailed in the appended claims.

[0020] In this disclosure, unless otherwise stated, directional terms such as "inner" and "outer" are defined based on the contours of the corresponding components. Terms such as "first" and "second" used in this disclosure are for distinguishing one element from another and do not imply sequence or importance.

[0021] Example 1

[0022] A laser cleaning system includes an operating room 1 and a workbench 5, a laser generating system 2, an intelligent recognition system 3, and a controller 4 disposed in the operating room 1. A workpiece 6 to be cleaned is placed on the workbench 5. The laser generating system 2 is used to apply laser light to the workpiece 6 to be cleaned. The intelligent recognition system 3 includes a scanning component for planning the cleaning path. The intelligent recognition system 3 is connected to the laser generating system 2 through the controller 4.

[0023] The laser generating system 2 includes a laser and an optical control component. The laser is used to emit lasers of various frequencies. The optical control component is installed in the laser emission direction of the laser and is used to adjust the path of the received laser. The controller 4 is connected to the optical control component and the intelligent recognition system 3. The cleaning path information of the intelligent recognition system 3 is sent to the controller 4. The controller 4 controls the optical control component to adjust the laser to act on the cleaning position of the workpiece 6 to be cleaned.

[0024] In this embodiment, before cleaning the surface of the workpiece 6 with laser, the intelligent recognition system 3 scans the workpiece 6 and plans a suitable cleaning path for it. This cleaning path automatically avoids sensitive areas such as holes or grooves. The intelligent recognition system 3 sends the identified cleaning path to the controller 4, enabling the controller 4 to control the laser and optical control components to start working. After the laser emitted by the laser is received by the optical control components, the optical control components emit the laser beam onto the surface of the workpiece 6 according to the cleaning path for laser cleaning. Laser cleaning does not make physical contact with the surface of the workpiece 6, avoiding mechanical damage. Furthermore, the reasonable path planning avoids sensitive areas such as holes or grooves, allowing for precise control of the cleaning area of ​​the workpiece 6.

[0025] In this embodiment, the workpiece 6 to be cleaned is a baffle to be cleaned. The baffle to be cleaned is composed of an aluminum substrate and a chromium layer deposited on the surface of the aluminum substrate. If the baffle to be cleaned after the workpiece 6 is cleaned is composed entirely of an aluminum substrate.

[0026] The optical control assembly includes a galvanometer scanning head and a focusing lens. The galvanometer scanning head is positioned between the laser and the focusing lens. The laser emitted by the laser is reflected by the galvanometer scanning head, and the reflected laser is focused by the focusing lens onto the processing area of ​​the workpiece 6 to be cleaned. The laser generator produces laser light, the galvanometer scanning head changes the direction of the laser beam according to the control signal of the controller 4, and the focusing lens converges the laser beam onto the processing area on the surface of the workpiece 6 to be cleaned. All three components work together under the coordination of the controller 4 to complete the laser processing task.

[0027] The laser emitted from the focusing lens has a focusing range of 10-50 μm. This method is suitable for cleaning chromium layers deposited on the surface of aluminum substrate baffles, where the damage threshold of the aluminum substrate is 3 J / cm. 2 The ablation threshold of chromium is 0.8 J / cm. 2 Setting the range to 10-50μm ensures that the laser only covers the chromium layer, concentrating the thermal impact mainly on the chromium layer and avoiding damage to the aluminum substrate.

[0028] In this embodiment, the laser is fixedly mounted in the control room 1 via a rack. Sufficient heat dissipation space is reserved at the laser mounting location, and the laser intensity can be switched via the controller 4.

[0029] During the cleaning process, the scanning speed of the galvanometer scanning head in this embodiment reaches 2000 mm / s, and the laser emits a high repetition frequency laser of 100 kHz, which can shorten the cleaning time of the workpiece 6 to be cleaned from 30 minutes of traditional sandblasting to 5 minutes. After cleaning, the high-frequency laser of the laser is switched to a low-frequency laser, so that the low-frequency laser performs micro-melting polishing on the aluminum substrate surface of the cleaned workpiece, reducing the roughness Ra from 0.8 μm to 0.3 μm and improving the adhesion of subsequent coatings; then, the low-frequency laser induces oxidation on the aluminum substrate surface, forming a dense aluminum oxide layer on the aluminum substrate surface, enhancing corrosion resistance.

[0030] Example 2

[0031] This embodiment also includes a cleaning monitoring system, which includes a spectrometer used to detect the metal layer on the baffle surface. The spectrometer in this solution detects the surface composition of the baffle. Chromium exhibits strong spectral lines in the range of 357.9-360.5 nm, while aluminum shows obvious spectral lines near 396.1-396.2 nm. Once a location is identified as chromium-free, the process can proceed to the next working location for chromium removal.

[0032] The worktable 5 is a rotary table or a multi-degree-of-freedom robotic arm. In this embodiment, a rotary table is used to support the workpiece 6 to be cleaned, so that the workpiece 6 to be cleaned can be placed stably during the cleaning process.

[0033] In one embodiment, the laser cleaning system includes a robotic arm and multiple laser generating systems 2. The laser emitting systems simultaneously perform laser cleaning on the workpiece 6 to be cleaned on the robotic arm. The multiple laser generating systems 2 simultaneously perform laser attack, which can improve the cleaning efficiency. The robotic arm is a multi-degree-of-freedom robotic arm, which can adjust the cleaning position during the cleaning process to avoid cleaning dead corners.

[0034] Preferably, the operating room 1 includes a laser protective cover 7 for preventing laser leakage and a camera. The camera is located inside the laser protective cover 7 and is used to photograph the workpiece to be cleaned inside the laser protective cover 7. The camera is connected to a display, which is located outside the operating room 1.

[0035] Example 3

[0036] In this embodiment, the operating chamber 1 is a closed structure. The operating chamber 1 is equipped with a negative pressure component 8 and a recovery component 9. The recovery component 9 includes a suction pump and a suction pipe connected to the suction pump. The suction pipe is used to absorb the products generated on the worktable. Since the laser action on the chromium layer produces gas and particles, the recovery component 9, through the suction pump and suction pipe, collects and recovers the generated gas and particles, achieving resource recycling and avoiding pollution from waste gas and waste materials.

[0037] The operating chamber 1 adopts a closed structure, which allows for the complete collection of chromium vapor and chromium oxide particles produced after the reaction between the laser and the chromium layer deposited on the aluminum substrate, preventing leakage of these products and thus avoiding environmental pollution. A negative pressure component 8 is installed within the closed operating chamber 1 to maintain negative pressure within the chamber, preventing fluctuations in gas density and refractive index. This results in more stable laser propagation within the operating chamber 1, reducing laser beam distortion and energy loss.

[0038] The above descriptions are merely embodiments of this utility model, and common knowledge regarding specific structures and characteristics is not elaborated upon here. It should be noted that those skilled in the art can make various modifications and improvements without departing from the structure of this utility model, and these should also be considered within the scope of protection of this utility model. These modifications will not affect the effectiveness of the implementation of this utility model or the practicality of the patent. The scope of protection claimed in this application shall be determined by the content of its claims, and the specific embodiments described in the specification can be used to interpret the content of the claims.

Claims

1. A laser cleaning system, characterized in that: It includes an operating room and a workbench, a laser generating system, an intelligent recognition system and a controller set in the operating room. The workpiece to be cleaned is placed on the workbench. The laser generating system is used to apply laser light to the workpiece to be cleaned. The intelligent recognition system includes a scanning component, which is used to plan the cleaning path. The intelligent recognition system is connected to the laser generating system through the controller. The laser generating system includes a laser and an optical control component. The laser is used to emit lasers of various frequencies. The optical control component is installed in the direction of laser emission from the laser and is used to adjust the path of the received laser. The controller is connected to the optical control component and the scanning component. The cleaning path information of the scanning component is sent to the controller, and the controller controls the optical control component to adjust the laser to the cleaning position of the workpiece to be cleaned.

2. The laser cleaning system according to claim 1, characterized in that: The optical control assembly includes a galvanometer scanning head and a focusing lens. The galvanometer scanning head is positioned between the laser and the focusing lens. The laser emitted by the laser is reflected by the galvanometer scanning head, and the reflected laser is focused by the focusing lens onto the processing area of ​​the workpiece to be cleaned.

3. The laser cleaning system according to claim 2, characterized in that: The laser emitted by the focusing lens has a focusing range of 10μm-50μm.

4. The laser cleaning system according to claim 1, characterized in that: The intelligent recognition system also includes a spectrometer, which is used to detect the metal layer on the surface of the baffle.

5. The laser cleaning system according to claim 1, characterized in that: The worktable can be a rotary table or a multi-degree-of-freedom robotic arm.

6. The laser cleaning system according to claim 1, characterized in that: The operating room includes a laser protective cover to prevent laser leakage and a camera. The camera is located inside the laser protective cover and is used to photograph the workpiece to be cleaned inside the laser protective cover. The camera is connected to a display, which is located outside the operating room.

7. A laser cleaning system according to claim 6, characterized in that: The operating room is a closed structure and is equipped with a negative pressure system.

8. A laser cleaning system according to claim 7, characterized in that: The operating room is equipped with a recovery assembly, which includes a suction pump and a suction pipe connected to the suction pump. The suction pipe is used to absorb the products on the workbench.

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