Electron beam extraction window and electron beam generator including the same

Abstract

The present invention discloses an electron beam extraction window and an electron beam generator including the same. The electron beam extraction window comprises: a film; a window body, a window is arranged in the middle of the window body; at least one first grid unit, the first grid unit comprises a first grid slot; at least one second grid unit, the second grid unit comprises a second grid slot, the first grid unit and the second grid unit are arranged at intervals and are both located on the window, and the second grid unit is arranged at the far end of the window relative to the first grid unit along the scanning direction. The electron beam extraction window takes advantage of the short length of the near-end first grid slot, which facilitates the rapid conduction of heat on the film to the window body. At the same time, the window is divided by the first grid unit and the second grid unit, so that the length of the second grid slot becomes shorter, which is conducive to the conduction of heat in the middle of the second grid unit to the edge of the window body, thereby extending the service life of the film and the electron beam extraction window.

Description

Technical Field

[0001] The invention relates to an electron beam extraction window and an electron beam generator comprising the same. Background Art

[0002] Electron beam generators are widely used in process irradiation and scientific research experiments, and the electron beam extraction window is a very critical component. The two sides of this component are atmosphere and vacuum, respectively, and a metal or non-metal film that is easy for the electron beam to penetrate needs to be configured on the grille of the extraction window.

[0003] Usually, the length direction of the window is the scanning direction of the electron beam extraction, that is, the electron beam scans back and forth in this direction, and forms an irradiation process length of a certain size after extraction. The longer the length, the more conducive it is to process items with larger formats. The extension direction of the grid groove of the electron beam extraction window can be parallel to the length direction of the window, but the longer the length of the grid groove, the more unfavorable it is for heat conduction in the middle of the window, which easily causes the titanium film and grid plate in the middle of the grid to heat up, shortening the service life of the extraction window. The extension direction of the grid groove of the electron beam extraction window can also be perpendicular to the length direction of the window, so that the length of the grid groove is shortened, which is convenient for conducting the heat in the middle of the window to the surroundings of the window. However, when the scanning width is increased, at both ends of the scanning direction, since the rays form a certain angle with the side of the grid, the side of the grid will block the rays, reducing the pass rate of the rays. At the same time, when the electron beam penetrates the titanium film, it will cause a large heat deposition at both ends of the grid and the titanium film, which is easy to cause the titanium film and the grid plate at both ends of the grid to heat up, causing the grid plate to deform, shortening the service life of the extraction window.

[0004] In order to solve this problem, in the patent number CN207589258 U, the angle between the grid plate and the plate body in the horizontal plane is gradually reduced from the center of the plate body to both sides, and its inclination angle is directly opposite to the travel angle of the electron beam, so as to reduce the grid's blocking of the radiation. However, this method cannot fundamentally solve the above problems. This method has the following shortcomings: (1) The side of the grid is processed according to the emission angle of the radiation, which is difficult to process and has high processing costs; (2) The side of the grid still partially blocks the radiation, and the radiation transmission rate is poor. Summary of the invention

[0005] The technical problem to be solved by the present invention is to overcome the defects of low ray passing rate and poor heat dissipation of electron beam extraction windows in the prior art, and to provide an electron beam extraction window and an electron beam generator comprising the same.

[0006] The present invention solves the above technical problems through the following technical solutions:

[0007] An electron beam extraction window, comprising a thin film, and the electron beam extraction window further comprises:

[0008] A window is provided in the middle of the window;

[0009] At least one first grille unit, wherein the first grille unit comprises first grille slots, and the first grille slots are extended along the longitudinal direction;

[0010] At least one second grid unit, the second grid unit includes a second grid groove, the second grid groove is extended in the lateral direction, the first grid unit and the second grid unit are spaced apart and are both located on the window, and the second grid unit is configured at the far end of the window along the scanning direction relative to the first grid unit.

[0011] In this solution, the electron beam extraction window is provided with a second grid unit and a first grid unit. When in use, the electron beam is guided in a lateral direction. The first grid unit is arranged in the middle of the scanning direction, and the second grid unit is arranged in the far end of the scanning direction. The electron beam extraction window takes advantage of the short length of the first grid slot arranged longitudinally at the near end, which facilitates the rapid conduction of heat on the film to the window body, thereby improving the service life of the film and the window body. At the same time, the window is divided by the first grid unit and the second grid unit, so that the length of the second grid slot arranged transversely becomes shorter, which is conducive to the conduction of heat in the middle of the second grid unit to the edge of the window body, thereby extending the service life of the film and the electron beam extraction window. In addition, since the scanning direction of the electron beam is the same as the extension direction of the second grid slot arranged transversely, when the ray scans the second grid unit at the far end, the side of the second grid slot of the second grid unit will not block the ray, thereby improving the passing rate of the ray.

[0012] Preferably, the number of the second grille units is two, the number of the first grille unit is one, and the two second grille units are respectively arranged on both sides of the first grille unit.

[0013] In this solution, since the scanning direction of the electron beam is the same as the extension direction of the second grid slot of the second grid unit, when the rays scan to the two ends of the window, the side surfaces of the second grid units at the two ends will not block the rays, thereby increasing the pass rate of the rays. At the same time, the advantage of the short length of the first grid slot of the proximal first grid unit is also utilized, which facilitates the rapid conduction of heat on the film to the window, thereby increasing the service life of the film and the window.

[0014] Preferably, the window body further has a cooling channel inside, the cooling channel is arranged around the window and does not pass through the window, and the inlet and outlet of the cooling channel are both arranged on the side of the window body.

[0015] In this solution, the heat generated on the film is conducted to the window through the grille, and cooling liquid flows in the cooling channel. The cooling liquid is used to absorb the heat of the window, reduce the temperature of the window, and extend the service life of the film and the window.

[0016] Preferably, the thin film completely covers the window, and the electron beam can pass through the thin film.

[0017] Preferably, the film is close to the atmosphere side of the window.

[0018] Preferably, the surface of the window on the atmosphere side is provided with a first sealing groove surrounding the window, and the electron beam extraction window further comprises a first sealing member, and the edge of the film is embedded in the first sealing groove and fixed to the window through the first sealing member.

[0019] In this solution, the first sealing member presses the edge of the film into the first sealing groove, and the film seals the window to prevent external air on the atmosphere side of the window from leaking into the vacuum chamber through the window.

[0020] Preferably, the surface of the vacuum side of the window is provided with a second sealing groove surrounding the window, and the electron beam extraction window also includes a second sealing member embedded in the second sealing groove, and the second sealing member is used to contact the vacuum cavity surface of the electron beam generator.

[0021] Preferably, the number of the first grille slots and the number of the second grille slots are both multiple, the multiple first grille slots are arranged in parallel, and the multiple second grille slots are arranged in parallel.

[0022] Preferably, the window body further comprises a reinforcing rib, wherein the reinforcing rib is arranged in the window and between the second grille unit and the first grille unit, the reinforcing rib is extended in the longitudinal direction, and one end of the second grille slot is connected to the reinforcing rib.

[0023] In this solution, the above-mentioned structural form is adopted, and the reinforcing ribs can not only improve the strength of the window body, but also conduct the heat of the second grille groove to the edge of the window body, thereby reducing the temperature of the middle part of the window body.

[0024] An electron beam generator comprises a shell, wherein a vacuum chamber is provided in the shell. The electron beam generator further comprises the electron beam extraction window as described above, and the electron beam extraction window is installed at an opening of the shell.

[0025] In this solution, the electron beam extraction window is installed at the opening of the shell, and the electron beam extraction window and the shell form a vacuum chamber.

[0026] On the basis of being in accordance with the common sense in the art, the above-mentioned preferred conditions can be arbitrarily combined to obtain the preferred embodiments of the present invention.

[0027] The positive and progressive effect of the present invention is that: the electron beam extraction window takes advantage of the short length of the first grid slot arranged longitudinally at the near end, which facilitates the rapid conduction of heat on the film to the window body, thereby improving the service life of the film and the window body. At the same time, the window is divided by the first grid unit and the second grid unit, which also shortens the length of the second grid slot arranged transversely, which is conducive to the conduction of heat in the middle of the second grid unit to the edge of the window body, thereby extending the service life of the film and the electron beam extraction window. In addition, since the scanning direction of the electron beam is the same as the extension direction of the second grid slot of the second grid unit during use, when the ray scans the second grid unit at the far end, the side of the grid slot of the second grid unit will not block the ray, thereby improving the passing rate of the ray. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 The figure is a schematic structural diagram of an electron beam generator according to a preferred embodiment of the present invention.

[0029] Figure 2 It is a schematic structural diagram of the electron beam extraction window of a preferred embodiment of the present invention from a first viewing angle.

[0030] Figure 3 It is a structural schematic diagram of the electron beam extraction window of a preferred embodiment of the present invention from a second viewing angle.

[0031] Figure 4 It is a schematic structural diagram of the electron beam extraction window of a preferred embodiment of the present invention from a third viewing angle.

[0032] Figure 5 FIG. 4 is a side view of an electron beam extraction window according to a preferred embodiment of the present invention.

[0033] Figure 6 for Figure 5 Sectional view along line AA.

[0034] Description of reference numerals:

[0035] Electron beam extraction window 10

[0036] Form 1

[0037] Windows 11

[0038] Atmospheric side 12

[0039] Vacuum side 13

[0040] First grid unit 2

[0041] First grille slot 21

[0042] Second grid unit 3

[0043] Second grille slot 31

[0044] Cooling channel 4

[0045] Import 41

[0046] Exit 42

[0047] First sealing groove 5

[0048] Second sealing groove 6

[0049] Reinforcement 7

[0050] Electron beam generator 20

[0051] Housing 201

[0052] Water flow direction 30

[0053] Vertical direction 50

[0054] Horizontal direction 60 DETAILED DESCRIPTION

[0055] The present invention will be described more clearly and completely below by way of embodiments in conjunction with the accompanying drawings, but the present invention is not limited to the scope of the embodiments.

[0056] like Figure 1 As shown, this embodiment discloses an electron beam generator, the electron beam generator 20 comprises a housing 201 and an electron beam extraction window 10, a vacuum chamber is provided in the housing 201, the electron beam extraction window 10 is installed at the opening of the housing 201, and the electron beam extraction window 10 and the housing 201 form a vacuum chamber. When in use, the vacuum chamber is evacuated.

[0057] like Figure 2-Figure 6 As shown, the present embodiment also discloses the electron beam extraction window as described above, and the electron beam extraction window 10 includes a film (not shown in the figure), a window body 1, a first grid unit 2 and two second grid units 3. A window 11 is provided in the middle of the window body 1, the first grid unit 2 and the second grid unit 3 are arranged at intervals and are both located on the window 11, and the second grid unit 3 is arranged at the far end of the window 11 relative to the first grid unit 2 along the scanning direction.

[0058] Among them, the first grille unit 2 includes a plurality of first grille slots 21, which extend along the longitudinal direction 50 and are arranged in parallel with each other; the second grille unit 3 includes a plurality of second grille slots 31, which extend along the transverse direction 60 and are arranged in parallel with each other.

[0059] The scanning direction of the electron beam is configured to be the same as the extending direction of the second grid slots 31 , that is, the electron beam scans back and forth in the transverse direction 60 , and forms an irradiation process length of a certain size after being led out.

[0060] The first grid unit 2 is arranged in the middle of the scanning direction, and the second grid unit 3 is arranged at the far end of the scanning direction. The electron beam extraction window 10 takes advantage of the short length of the first grid slot 21 arranged longitudinally at the near end, which facilitates the rapid conduction of heat on the film to the window 1, thereby improving the service life of the film and the window 1. At the same time, the window 11 is divided by the first grid unit 2 and the second grid unit 3, which also shortens the length of the second grid slot 31 arranged transversely, which is conducive to the conduction of heat in the middle of the second grid unit 3 to the edge of the window 1, thereby extending the service life of the film and the electron beam extraction window 10. In addition, since the scanning direction of the electron beam is the same as the extension direction of the second grid slot 31 of the second grid unit 3, when the ray scans the second grid unit 3 at the far end, the side of the second grid slot 31 of the second grid unit 3 will not block the ray, thereby improving the passing rate of the ray.

[0061] In this embodiment, the number of the second grid units 3 is two, the number of the first grid unit 2 is one, and the two second grid units 3 are respectively arranged on both sides of the first grid unit 2. In other embodiments, the number of the second grid units and the first grid units can be set as needed. When in use, when the ray scans the two ends of the window 11, since the scanning direction of the electron beam is the same as the extension direction of the second grid slots 31 of the second grid unit 3, the side surfaces of the second grid slots 31 at the two ends will not block the ray, thereby increasing the passing rate of the ray. At the same time, the advantage of the short length of the first grid slots 21 of the near-end first grid unit 2 is also utilized, so that the heat on the film is quickly transferred to the window 1, thereby increasing the service life of the film and the window 1.

[0062] In addition, in order to quickly cool the window 1, a cooling channel 4 is also provided inside the window 1. The cooling channel 4 is provided around the window 11 and does not pass through the window 11. The inlet 41 and the outlet 42 of the cooling channel 4 are both provided on the side of the window 1, so as to be conveniently connected to an external circulation pipeline. A cooling liquid flows in the cooling channel 4, and the cooling liquid is used to absorb the heat of the window 1, reduce the temperature of the window 1, prevent the grid and the film from deforming, and extend the service life of the film and the window 1. The cooling liquid in this embodiment is water, and the water flow direction 30 in the window 1 is as shown in FIG. Figure 5 As shown by the arrows in FIG. , in other alternative embodiments, the cooling liquid may also be a refrigerant.

[0063] The two sides of the window 1 are respectively an atmosphere side 12 and a vacuum side 13. The atmosphere side 12 is connected to the outside, and the vacuum side 13 is in a vacuum chamber. A thin film is arranged on the atmosphere side 12 of the window 1, and the thin film completely covers the window 11, and the thin film can be passed through by the electron beam. Preferably, the thin film is a titanium foil, and its thickness is more than ten microns.

[0064] The surface of the atmospheric side 12 of the window 1 is provided with a first sealing groove 5 surrounding the window 11. The electron beam extraction window 10 also includes a first sealing member (not shown in the figure). The first sealing member presses the edge of the film into the first sealing groove 5. The film seals the window 11. At the same time, the first sealing member fixes the film on the window to prevent the external air on the atmospheric side 12 of the window 11 from leaking into the vacuum chamber through the window 11.

[0065] The surface of the vacuum side 13 of the window body 1 is also provided with a second sealing groove 6 surrounding the window 11, and the electron beam extraction window 10 further includes a second sealing member (not shown in the figure), which is embedded in the second sealing groove 6 and is used to contact the vacuum chamber surface of the electron beam generator 20. In this embodiment, the first sealing member and the second sealing member are rubber rings with elastic deformation.

[0066] On this basis, the window 1 further includes a reinforcing rib 7, which is arranged in the window 11 and between the second grille unit 3 and the first grille unit 2, and the reinforcing rib 7 is arranged to extend in the longitudinal direction, and one end of the second grille slot 31 is connected to the reinforcing rib 7. The reinforcing rib 7 can not only improve the strength of the window 1, but also conduct the heat of the second grille slot 31 to the edge of the window 1, thereby reducing the temperature of the middle part of the window 1. Preferably, the window 1 is made of copper.

[0067] Although the specific embodiments of the present invention are described above, it should be understood by those skilled in the art that this is only for illustration and the protection scope of the present invention is defined by the appended claims. Those skilled in the art may make various changes or modifications to these embodiments without departing from the principles and essence of the present invention, but these changes and modifications all fall within the protection scope of the present invention.

Claims

1. An electron beam extraction window, comprising a thin film, characterized in that: The electron beam extraction window also includes: A window is provided in the middle of the window; At least one first grille unit, wherein the first grille unit comprises first grille slots, and the first grille slots are extended along the longitudinal direction; at least one second grid unit, the second grid unit comprising second grid slots, the second grid slots extending in a transverse direction, the first grid unit and the second grid unit being spaced apart and both located on the window, the second grid unit being arranged at a far end of the window relative to the first grid unit along a scanning direction; The film completely covers the window, and the film can be penetrated by the electron beam; The film is adjacent to the atmosphere side of the window.

2. The electron beam extraction window according to claim 1, characterized in that: The number of the second grille units is two, the number of the first grille unit is one, and the two second grille units are respectively arranged on both sides of the first grille unit.

3. The electron beam extraction window according to claim 1, characterized in that: The window body also has a cooling channel inside, which is arranged around the window and does not pass through the window. The inlet and outlet of the cooling channel are both arranged on the side of the window body.

4. The electron beam extraction window according to claim 1, characterized in that: The surface of the window on the atmosphere side is provided with a first sealing groove surrounding the window, and the electron beam extraction window further comprises a first sealing member, through which the edge of the film is embedded in the first sealing groove and fixed to the window.

5. The electron beam extraction window according to claim 1, characterized in that: The surface of the vacuum side of the window is provided with a second sealing groove surrounding the window, and the electron beam extraction window also includes a second sealing member embedded in the second sealing groove, and the second sealing member is used to contact the vacuum cavity surface of the electron beam generator.

6. The electron beam extraction window according to claim 1, characterized in that: The number of the first grille slots and the number of the second grille slots are both multiple, the multiple first grille slots are arranged in parallel, and the multiple second grille slots are arranged in parallel.

7. The electron beam extraction window according to claim 1, characterized in that: The window body further comprises a reinforcing rib, which is arranged in the window and between the second grille unit and the first grille unit. The reinforcing rib is arranged to extend in the longitudinal direction, and one end of the second grille slot is connected to the reinforcing rib.

8. An electron beam generator, comprising a housing, characterized in that: The shell has a vacuum chamber inside, and the electron beam generator further includes an electron beam extraction window as described in any one of claims 1 to 7, and the electron beam extraction window is installed at the opening of the shell.

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