Driving device and driving method of semiconductor manufacturing equipment

Abstract

A driving device of semiconductor manufacturing equipment is disclosed. The driving device includes a first driver for applying a signal to drive a first motor and a second driver for applying a signal to drive a second motor. The first driver and the second driver drive the first motor and the second motor in different schemes. The driving device also includes a controller, which performs integrated control of the first driver and the second driver. Each of the first driver and the second driver is connected to the controller through an I / O cable. The controller uses information input through the I / O cable to identify the first driver or the second driver. The controller changes the signal transmission scheme according to the driving mode of the motor corresponding to the identified driver.

Description

Background Art

[0001] Embodiments of the inventive concepts described herein relate to a driving device of semiconductor manufacturing equipment and a driving method of the semiconductor manufacturing equipment, and more particularly, to a method of controlling a driving device driven in different schemes in semiconductor manufacturing equipment using one controller.

[0002] A drive device such as a cylinder, a motion control board, a motor, etc. is required as a device for moving an instrument that rotates or moves to multiple positions to a specific position in a semiconductor manufacturing equipment. According to an example, a motor is a generator basically used in various industrial equipment or machine tools, and it is important for the motor to perform drive control.

[0003] The prior art uses a motor and a driver manufactured by one company to perform driving in a product equipment. The motor and the driver manufactured by one company are driven using the same firmware. The driver can generate current for driving the motor. The controller can apply a control signal to drive the speed of the driver.

[0004] However, when a product equipment uses motors and drivers manufactured by two or more companies instead of one company, the following problems may occur.

[0005] Motors and drivers manufactured by the same enterprise can use one firmware corresponding to the motor and driver to perform processing. However, motors and drivers manufactured by different enterprises should use different firmware corresponding to the motor and driver to perform processing. Therefore, when motors and drivers manufactured by multiple enterprises are used in one production equipment, a load occurs because multiple firmware corresponding to the motor and driver should be provided to perform processing. Since the load should be adjusted individually, there is a complicated problem due to processing.

[0006] In addition, when changing the driver or firmware after setting the product equipment, there is the inconvenience of having to apply separate firmware according to the type of motor and driver. When the non-corresponding firmware is incorrectly applied, other accidents may be caused because the driving distance is inaccurate. Summary of the invention

[0007] Embodiments of the inventive concept provide a driving apparatus for integrating and controlling drivers, each of which has a different driving mode.

[0008] The problems to be solved by the present invention are not limited to the above problems. Those skilled in the art can clearly understand other problems not described herein from the description and the accompanying drawings.

[0009] A driving device for semiconductor manufacturing equipment may be disclosed.

[0010] According to an exemplary embodiment, a driving device of a semiconductor manufacturing equipment may include a first driver applying a signal to drive a first motor and a second driver applying a signal to drive a second motor. The first driver and the second driver may drive the first motor and the second motor in different schemes, respectively. The driving device may also include a controller that performs integrated control of the first driver and the second driver.

[0011] According to an embodiment, each of the first driver and the second driver may be connected to the controller through an input / output (I / O) cable.

[0012] According to an embodiment, the I / O cable may include a plurality of pins.

[0013] According to an embodiment, the controller may identify the first driver or the second driver using information input through the I / O cable.

[0014] According to an embodiment, the controller may change a signal transfer scheme according to a driving mode of a motor corresponding to the identified driver.

[0015] According to an embodiment, the controller may obtain the initial position value of the motor using a scheme of obtaining an initial value of the motor corresponding to the identified driver.

[0016] According to an embodiment, the controller may calculate the pulse applied to the motor using a method for calculating an encoded pulse of the motor corresponding to the identified driver.

[0017] According to an embodiment, the first motor according to the first driver may use a scheme of decoding serial data of the first motor to obtain an initial position value.

[0018] According to an embodiment, the second motor according to the second driver may use a scheme of decoding the number of pulses of the second motor to obtain an initial position value.

[0019] According to an embodiment, the controller may calculate an encoding pulse value related to the number of rotations of the motor corresponding to the identified driver.

[0020] According to an exemplary embodiment, a driving method of a semiconductor manufacturing equipment may be disclosed, the semiconductor manufacturing equipment including: a plurality of drivers driven in different schemes; and a controller controlling the plurality of drivers.

[0021] According to an exemplary embodiment, a driving method of semiconductor manufacturing equipment may include: receiving information of a driver driving a motor to be driven among a plurality of drivers; and selecting and controlling a driving mode of the driver corresponding to the received information.

[0022] According to an embodiment, receiving information of a driver driving the motor to be driven among the plurality of drivers may include recognizing a unique ID that each of the plurality of drivers has through an I / O cable connected to the controller.

[0023] According to an embodiment, selecting and controlling a driving mode of a driver corresponding to the received information may include obtaining an initial position value of the motor using a scheme for obtaining an initial value of a motor corresponding to the identified driver.

[0024] According to an embodiment, selecting and controlling a driving mode of a driver corresponding to the received information may include calculating a pulse applied to a motor using a method for calculating an encoded pulse of a motor corresponding to the identified driver.

[0025] According to an embodiment, the scheme of obtaining the initial value of the motor may be a scheme of decoding serial data of the motor to obtain the initial position value.

[0026] According to an embodiment, the scheme of obtaining the initial value of the motor may be a scheme of decoding the number of pulses of the motor to obtain the initial position value.

[0027] According to an embodiment, the method for calculating the pulse may include calculating an encoded pulse value related to the number of revolutions of the motor corresponding to the identified driver. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The above and other objects and features will become apparent from the following description with reference to the accompanying drawings, wherein like reference numerals refer to like parts throughout the various drawings unless otherwise specified, and in the drawings:

[0029] Figure 1 is a block diagram illustrating a driving device of semiconductor manufacturing equipment according to an embodiment of the inventive concept;

[0030] Figure 2 is a diagram illustrating a driving method of a driving device of semiconductor manufacturing equipment according to an embodiment of the inventive concept;

[0031] Figure 3 is a flowchart schematically illustrating a driving method of semiconductor manufacturing equipment according to an embodiment of the inventive concept; and

[0032] Figure 4 is a flowchart illustrating in detail a driving method of semiconductor manufacturing equipment according to an embodiment of the inventive concept. DETAILED DESCRIPTION

[0033] With reference to the embodiments described in detail below in conjunction with the accompanying drawings, the advantages, features and methods of achieving these advantages and features according to the present invention will become apparent. However, the present invention is not limited to the embodiments disclosed below and can be implemented in various different forms. On the contrary, these embodiments are provided to make the disclosure of the present invention thorough and complete, and to fully convey the concept of the present invention to those skilled in the art, and the present invention will only be limited by the appended claims.

[0034] Unless otherwise defined herein, all terms (including technical and scientific terms) used herein may have the same meaning as those commonly understood by those skilled in the art to which the inventive concept belongs. Terms (including those defined in commonly used dictionaries) should be interpreted as having a meaning consistent with their meaning in the context of the relevant art, and will not be interpreted as an idealized or overly formal meaning unless explicitly defined herein.

[0035] The terms used in the specification are used to describe the embodiments and are not intended to limit the inventive concept. In the specification, unless otherwise specified, the terms in the singular may include the plural form. The meaning of "comprise" and / or various variations of this verb, for example, "comprising" specifies ingredients, parts, components, steps, operations and / or elements, but does not exclude other ingredients, parts, components, steps, operations and / or elements. The term "and / or" in the specification indicates each of the elements and one or more combinations of the elements.

[0036] Terms such as "first" and "second" are used to describe various elements, but it is obvious that such elements are not limited to the above terms. The above terms are only used to distinguish one element from another element. For example, within the technical scope of the present invention, a first element may be referred to as a second element, and similarly, a second element may be referred to as a first element.

[0037] Unless otherwise indicated in the context, terms in the singular may include plural forms. Furthermore, in the drawings, the shapes, sizes, etc. of elements may be exaggerated for clearer description.

[0038] The term " A “unit” may be a unit that processes at least one function or operation, which may refer to, for example, software or hardware, such as a field programmable gate array (FPGA) or an application specific integrated circuit (ASIC). However, “ Units are not limited to software or hardware. The "unit" may be configured to be included in an addressable storage medium, or to replicate one or more processors.

[0039] For example," "Units" include components, such as software components, object-oriented software components, class components and task components, procedures, functions, properties, programs, subroutines, program code segments, drivers, firmware, microcode, circuits, data, databases, data structures, tables, arrays and variables. The functionality provided by the "unit" can be provided by multiple components and " Unit" division and execution, and can be integrated with another additional component.

[0040] Figure 1 is a block diagram illustrating a driving device of semiconductor manufacturing equipment according to an embodiment of the inventive concept.

[0041] according to Figure 1 , a driving apparatus of semiconductor manufacturing equipment according to an embodiment of the inventive concept may include a first driver 100 , a second driver 200 , and a controller 300 .

[0042] The first driver 100 may be physically connected to the controller 300 through two cables having different functions.

[0043] The second driver 200 may be physically connected to the controller 300 through two cables having different functions.

[0044] According to an example, the first driver 100 may be connected to the controller 300 through a cable 400a for connection. The second driver 200 may be connected to the controller 300 through a cable 400b for connection.

[0045] The cables 400a and 400b for connection may be cables for driving a driver at the controller 300, which may process the on / off of a servo driver or may drive an encoder, a positioner, etc. The cables 400a and 400b for connection may play a role in connecting the drivers 100 and 200 and the controller 300 when actually driving the drivers 100 and 200.

[0046] According to an example, the first driver 100 may be connected to the controller 300 through an I / O cable 500a. The second driver 200 may be connected to the controller 300 through an I / O cable 500b.

[0047] Each of the I / O cables 500a and 500b may refer to an input / output cable. Each of the I / O cables 500a and 500b may play a role in delivering specific information of each of the drivers 100 and 200 to the controller 300. The I / O cables 500a and 500b may be provided for the purpose of dividing the characteristics of the drivers 100 and 200.

[0048] Each of the I / O cables 500a and 500b may be provided in the form of a plurality of pins. According to an example, each of the I / O cables 500a and 500b may be provided in the form of three pins.

[0049] According to an example, each of the I / O cables 500a and 500b may be provided in the form of three pins, and the pins may be provided for dividing 23 (=8) drivers.

[0050] According to an example, each of the I / O cables 500a and 500b may be provided in the form of three pins, and a voltage may be supplied to each pin. When information is applied to the controller 300 through each of the I / O cables 500a and 500b, each of the I / O cables 500a and 500b may match the unique ID of the driver connected thereto with the voltage supply method at the pins included in each of the I / O cables 500a and 500b to verify whether the corresponding driver has any unique ID.

[0051] According to an example, the I / O cable 500a connected to the first driver 100 may transmit (0, 0, 0) V to the controller 300. According to an example, the I / O cable 500b connected to the second driver 200 may transmit (0, 0, 5) V to the controller 300. Such matching information may be input to the controller 300 in advance.

[0052] When (0, 0, 0)V is transmitted to the controller 300, the controller 300 may identify the first driver 100. When (0, 0, 5)V is transmitted to the controller 300, the controller 300 may identify the second driver 200. When the identification of the driver is completed, the controller 300 may perform control by applying firmware corresponding to each driver.

[0053] Therefore, the controller 300 can verify information about the components of the driver and the motor to be controlled, and can match whether each of the components obtains an initial value in any scheme using a method for calculating the specifications and encoding pulses of the motor.

[0054] When the identification driver is completed, the controller 300 may transmit a control signal suitable for the moving position of the processing module to the driver. The processing module may refer to a control target. In response to the moving position of the processing module, the control signal may be the same as the data stored in the driver. When the control signal is applied to the driver, the driver may output a pulse signal as high as the value stored in the driver to the motor in response to the setting data embedded in the driver. The motor may drive the processing module in response to the pulse signal. For each driver, the method for calculating the pulse signal may be different.

[0055] According to an example, the driver may include: a memory for storing setting data; an encoder for detecting an operating state of the motor; and a switch panel for selecting a data communication or input / output interface for mutual communication with the controller. The memory may store setting data corresponding to a moving position to which the motor is driven.

[0056] According to an example, the memory can be used to store the pulse signal data of the position to be moved, and the controller can change the setting data. In addition, parameter conditions (such as speed and acceleration when moving) are programmable.

[0057] The encoder can detect the operating state of the motor, which is processed in response to the pulse signal output from the driver to the motor, and the encoder can output the detected signal to the controller. According to an example, the encoder can be set in the driver. According to another example, the encoder can be set independently of the driver.

[0058] For various drives of the drive device, a switch panel can be provided to facilitate mutual communication using data communication and input / output interfaces between the controller and the drive.

[0059] The driving device according to an embodiment of the inventive concept may include: an encoder for verifying a position according to an operating state of a motor; and a driver for driving the motor. The driving device may communicate with a controller via an input / output interface to control the processing module to move to a desired position.

[0060] Figure 2 is a diagram illustrating a driving method of a driving device of semiconductor manufacturing equipment according to an embodiment of the inventive concept;

[0061] according to Figure 2 , the configuration in which the first driver 100 is connected to the first motor 110 may be disclosed. Figure 2 , a configuration in which the second driver 200 is connected to the second motor 210 may be disclosed. The first driver 100 and the second driver 200 may apply driving signals to the first motor 110 and the second motor 210 respectively connected thereto.

[0062] The first motor 110 and the second motor 210 can drive the driving devices connected thereto. Figure 2 For example, the first motor 110 and the second motor 210 can drive the pulleys respectively.

[0063] Each of the first driver 100 and the first motor 110 and the second driver 200 and the second motor 210 may obtain initial values ​​using the method described below. The method for obtaining the initial value of the absolute encoder may vary depending on the supplier of the motor and the driver (that is, the components).

[0064] The first driver 100 and the first motor 110 may obtain an initial position value through serial data and deliver the initial position value.

[0065] The second driver 200 and the second motor 210 may obtain an initial position value by the number of pulses and deliver the initial position value.

[0066] Therefore, since the scheme of obtaining data of the initial position value varies with the driver, the control scheme may vary for each driver type.

[0067] Furthermore, the detailed specifications of the motor may vary depending on the supplier of the motor and drive. Specifically, for each type of motor, there may be differences in the encoder pulses generated per revolution.

[0068] According to an example, the first motor 110 corresponding to the first driver 100 may generate 8192 pulses per rotation. When 8192 pulses are generated per rotation, the first motor 110 may move 10 cm.

[0069] According to an example, the second motor 210 corresponding to the second driver 200 may generate 4096 pulses per rotation. When 4096 pulses are generated per rotation, the second motor 210 may move 10 cm.

[0070] In other words, since a difference occurs in a pulse value for moving the same distance when a driver and a motor produced by different businesses are used, information of the driver and the motor may be received to perform calculations based on the received information.

[0071] In other words, the firmware applied to each type of motor and the firmware applied to each type of driver should be different from each other.

[0072] The controller 300 according to an embodiment of the inventive concept may include both firmware for driving the first driver 100 and firmware for driving the second driver 200 , so that a plurality of drivers driven in different schemes may be controlled in an integrated manner.

[0073] In addition, the controller 300 may assign a unique ID to each drive, and may identify the drive type using a method of matching the unique ID through each of the I / O cables 500a and 500b and inputting the unique ID to the controller 300. Each of the I / O cables 500a and 500b may deliver the unique ID to the controller 300 using a voltage supply scheme that matches the unique ID.

[0074] Similar to the above example, when the I / O cable 500a connected to the first driver 100 transmits (0, 0, 0) V to the controller 300, the controller 300 can recognize the first driver 100. In order to obtain the initial value, the controller 300 can decode the serial data, which is a way of obtaining the initial value in the first driver 100. When it is necessary to move 10 cm, the controller 300 can deliver a command of 8192 pulse values ​​corresponding to the number of revolutions of the first motor 110 to the first driver 100.

[0075] Similar to the above example, when the I / O cable 500b connected to the second driver 200 transmits (0, 0, 5) V to the controller 300, the controller 300 can recognize the second driver 200. In order to obtain the initial value, the controller 300 can decode the number of pulses, which is a way of obtaining the initial value in the second driver 200. When it is necessary to move 10 cm, the controller 300 can deliver a command of 4096 pulse values ​​corresponding to the number of revolutions of the second motor 210 to the second driver 200.

[0076] In other words, in an embodiment of the inventive concept, there may be differences in the method of obtaining the initial value according to the type of each of the driver and the motor, and there may be differences in the method for calculating the coded pulse. The embodiment of the inventive concept discloses that there are only two differences in the method for obtaining the initial value and the method for calculating the coded pulse, but is not limited thereto. It is obvious that differences in control schemes in drivers and motors manufactured by different suppliers are applicable.

[0077] In an embodiment of the inventive concept, the driver can deliver unique IDs of the motor and driver, that is, identifiable information, to the controller 300 through an I / O cable. The controller 300 can change the control logic according to the delivered unique ID, or can convert the rotation or movement distance scale to perform control processing.

[0078] Figure 3 is a flowchart schematically illustrating a driving method of semiconductor manufacturing equipment according to an embodiment of the inventive concept.

[0079] refer to Figure 3 , in an embodiment of the present invention, Figure 2 The controller 300 can receive information of a driver driving the motor to be driven. The driver information can be a unique ID of the driver. In the method for receiving the driver information, the controller 300 can receive the driver information through an I / O cable connected to the controller 300.

[0080] According to an example, since the I / O cable consists of a plurality of pins, the controller 300 may recognize information of the driver through the plurality of pins.

[0081] The controller 300 can select and control the driving mode of the driver corresponding to the received information. Figure 2 When the first driver 100 of the received information is selected, the controller 300 may select and control a driving mode for driving the first driver 100 and the first motor 110. Figure 2 When the second driver 200 is turned on and off, the controller 300 may select and control a driving mode for driving the second driver 200 and the second motor 210 .

[0082] Figure 4 is a flowchart illustrating in detail a driving method of semiconductor manufacturing equipment according to an embodiment of the inventive concept.

[0083] refer to Figure 4 , in an embodiment of the present invention, Figure 2 The controller 300 can receive information of a driver driving a motor to be driven. The information of the driver can be identified using an I / O cable. The I / O cable can include a plurality of pins. The plurality of pins and the unique ID of each driver can be matched, and the matched information can be delivered to the controller 300.

[0084] When the identified drive corresponds to Figure 2 When the first driver 100 is driven, the controller 300 may select and control a driving mode for driving the first driver 100 and the first motor 110 .

[0085] According to an example, in order to drive the first driver 100 and the first motor 110 , a process of obtaining an initial position value of the first motor 110 and calculating a pulse value to be input to the first motor 110 may be required.

[0086] In order to obtain the initial position value of the first motor 110, the controller 300 may decode the serial data of the first motor 110 to obtain the initial position value. According to an example, the serial data of the first motor 110 may be provided as an ASCII code. The controller 300 may decode the ASCII code to analyze the initial position value. In addition, the controller 300 may calculate a pulse value to be input related to the number of revolutions of the first motor 110 connected to the first driver 100.

[0087] When the identified drive corresponds to Figure 2 When the second driver 200 is turned on and off, the controller 300 may select and control a driving mode for driving the second driver 200 and the second motor 210 .

[0088] According to an example, in order to drive the second driver 200 and the second motor 210 , a process of obtaining an initial position value of the second motor 210 and calculating a pulse value to be input to the second motor 210 may be required.

[0089] To obtain the initial position value of the second motor 210, the controller 300 may decode the number of pulses of the second motor 210 to obtain the initial position value. In addition, the controller 300 may calculate the pulse value to be inputted in relation to the number of revolutions of the second motor 210 connected to the second driver 200.

[0090] The driving device of the semiconductor manufacturing equipment shown and described according to the embodiment of the inventive concept discloses only the first driver 100 and the second driver 200, but the number of drivers is not limited thereto. The driving device of the semiconductor manufacturing equipment may further include a third driver that drives the motor in a different manner from the first driver 100 and the second driver 200. In other words, the number of drivers may be plural.

[0091] In an embodiment of the inventive concept, the controller may identify characteristics of the driver using I / O information transmitted from the driver, and may variously perform a control method to perform integrated control suitable for the identified characteristics of the driver.

[0092] Specifically, the controller can apply logic differently to obtain the initial value of the encoder to suit the characteristics of the identified drive. In more detail, the controller can calculate the setting of the pulse value when the motor rotates one time differently to suit the characteristics of the identified drive. Therefore, although software for applying and processing different schemes is not separately provided in the drive, one integrated software can be used to manage motors and drives of various component companies.

[0093] When the motor is driven, if the motor stops unexpectedly due to a fault, power failure, etc., a control signal should be delivered to the motor to resume driving the motor. Therefore, when a control signal must be delivered quickly, an embodiment of the inventive concept can quickly identify a driver through a connected I / O cable to perform control using a control scheme corresponding to the identified driver.

[0094] In an embodiment of the present inventive concept, a driving apparatus capable of integrating and controlling drivers, each of which has a different driving mode, may be disclosed.

[0095] According to embodiments of the inventive concept, since integrated control of drivers, each of which has a different driving mode, can be performed, it is more efficient and economical than the prior art.

[0096] According to an embodiment of the inventive concept, although operations of a motor and a driver are stopped due to an external impact or the like, a driving device may read information of the stopped motor and driver to respond quickly.

[0097] The effects of the present invention are not limited to the above effects, and those skilled in the art can clearly understand other effects not described herein from the specification and the accompanying drawings.

[0098] The foregoing embodiments are provided to help understand the inventive concept, but do not limit the scope of the inventive concept. It should be understood that various modifiable embodiments belong to the scope of the inventive concept. The drawings provided in the inventive concept only illustrate exemplary embodiments of the inventive concept. The protection scope of the inventive concept is defined by the technical ideas of the claims, and the protection scope of the inventive concept is not limited to the text description itself, however, it should be understood that the technical value of the inventive concept extends to inventions of equivalent scope.

Claims

1. A driving device for semiconductor manufacturing equipment, the driving device comprising: a first driver configured to apply a signal to drive the first motor; as well as a second driver configured to apply a signal to drive the second motor, wherein the first driver and the second driver drive the first motor and the second motor in different schemes respectively, The driving device further comprises: a controller configured to perform integrated control of the first driver and the second driver, wherein each of the first driver and the second driver is connected to the controller via a separate input / output cable including a plurality of pins, wherein the controller uses information input to the controller via the input / output cable to identify the driver for driving the motor to be driven among the first driver and the second driver and controls according to a driving mode of the motor corresponding to the identified driver, the information including voltages respectively supplied at the plurality of pins according to a preset voltage supply scheme matching the driver for driving the motor to be driven, The controller changes the signal transmission scheme according to the driving mode of the motor corresponding to the identified driver. 2 . The driving device according to claim 1 , wherein the controller obtains the initial position value of the motor using a scheme of obtaining an initial value of the motor corresponding to the identified driver. 3 . The driving device according to claim 1 , wherein the controller calculates the pulse applied to the motor using a method for calculating an encoded pulse of the motor corresponding to the identified driver. 4 . The driving apparatus according to claim 2 , wherein the first motor of the first driver uses a scheme of decoding the serial data of the first motor to obtain the initial position value. 5 . The driving apparatus according to claim 2 , wherein the second motor of the second driver uses a scheme of decoding the number of pulses of the second motor to obtain the initial position value.

6. The driving device according to claim 3, wherein the controller calculates an encoding pulse value related to the number of rotations of the motor corresponding to the identified driver.

7. A driving method for semiconductor manufacturing equipment, the semiconductor manufacturing equipment comprising: Multiple drivers that drive with different schemes; and a controller configured to control the plurality of drivers, the driving method comprising: receiving information of a driver driving a motor to be driven among the plurality of drivers; and Selecting and controlling a driving mode of the driver corresponding to the received information, wherein each of the plurality of drivers is connected to the controller via a separate input / output cable including a plurality of pins, wherein receiving information of a driver among the plurality of drivers that drives a motor to be driven comprises: using information input to the controller via the input / output cable to identify a unique ID of the driver that drives the motor to be driven, wherein the information input to the controller via the input / output cable comprises voltages respectively supplied at the plurality of pins according to a preset voltage supply scheme matching the unique ID, The controller changes the signal transmission scheme according to the driving mode of the motor corresponding to the identified driver.

8. The driving method according to claim 7, wherein the selecting and controlling the driving mode of the driver corresponding to the received information comprises: An initial position value of the motor is obtained using a scheme for obtaining an initial value of the motor corresponding to the identified drive.

9. The driving method according to claim 7, wherein the selecting and controlling the driving mode of the driver corresponding to the received information comprises: The pulses applied to the motor are calculated using a method for calculating the encoded pulses of the motor corresponding to the identified drive. 10 . The driving method according to claim 8 , wherein the scheme of obtaining the initial value of the motor is a scheme of decoding serial data of the motor to obtain the initial position value. 11 . The driving method according to claim 8 , wherein the scheme of obtaining the initial value of the motor is a scheme of decoding the number of pulses of the motor to obtain the initial position value.

12. The driving method according to claim 9, wherein the method for calculating the pulse includes calculating an encoded pulse value related to the number of revolutions of the motor corresponding to the identified driver.

13. A driving method for semiconductor manufacturing equipment, the semiconductor manufacturing equipment comprising: a first driver and a second driver, which are driven in different schemes; a first motor driven by a first driver; a second motor driven by a second driver; and a controller configured to control the first driver and the second driver, the driving method comprising: receiving information of a driver connected to a to-be-driven motor among the first motor and the second motor; and Selecting and controlling a driving mode of the driver corresponding to the received information, Each of the first driver and the second driver is connected to the controller via a separate input / output cable including a plurality of pins, and the driving method further comprises: using information input to the controller via the input / output cable to identify a unique ID of a driver connected to the motor to be driven and selecting a driver corresponding to the identified unique ID, wherein the information input to the controller via the input / output cable includes voltages respectively supplied at the plurality of pins according to a preset voltage supply scheme matching the unique ID, The controller changes the signal transmission scheme according to the driving mode of the motor corresponding to the identified driver.

14. The driving method according to claim 13, further comprising: The initial position value of the motor is obtained using a scheme for obtaining an initial value of the motor corresponding to the selected driver, or the pulse applied to the motor is calculated using a method for calculating an encoded pulse of the motor corresponding to the selected driver.

Images