A temperature measuring device and temperature measuring method for ultra-high vacuum heating furnace

Abstract

The present invention discloses a temperature measuring device and a temperature measuring method for an ultra-high vacuum heating furnace. The temperature measuring device of the present invention comprises a lifting mechanism, a temperature measuring mechanism and a signal acquisition mechanism, wherein the lifting mechanism can perform lifting and lowering movements in the vertical direction, the temperature measuring mechanism is connected to the lifting mechanism and moves in the vertical direction based on the lifting and lowering movements of the lifting mechanism; the temperature measuring mechanism is connected to the inner vacuum, the temperature measuring component of the temperature measuring mechanism is placed in the inner crucible and is used to detect the temperature in the inner crucible; the temperature measuring component is also connected to the signal acquisition mechanism, and the signal acquisition mechanism is used to collect and display the signal collected by the temperature measuring component. The temperature data obtained by the temperature measuring device of the present invention can truly reflect the temperature inside the inner crucible; by measuring the temperature data at different heights in the inner crucible, the temperature field distribution in the inner crucible can also be obtained, reflecting the actual temperature distribution in the vertical direction inside the inner crucible.

Description

Technical Field

[0001] The present invention relates to the technical field of temperature monitoring of an ultra-high vacuum heating furnace, and in particular to a temperature measuring device and a temperature measuring method for an ultra-high vacuum heating furnace. Background Art

[0002] The ultra-high vacuum heating furnace is combined with a mass spectrometer to measure the rare gases in the sample. Figure 1 The schematic diagram of the structure of the existing ultra-high vacuum heating furnace is shown in FIG. Figure 1 As shown, the heating element of the ultra-high vacuum heating furnace is a resistance load 2 wrapped around the tantalum crucible 1. The material of the resistance load 2 is graphite. The resistance load 2 is powered by a low-voltage high-current transformer to heat up, and the temperature can be raised from room temperature to 1800°C. Tantalum crucible 1 is also called an outer crucible. A vacuum structure is formed between the outer wall of the outer crucible and the graphite resistance load 2, which is called the outer vacuum. A cylindrical crucible made of tantalum-molybdenum material with a diameter of 17mm, a wall thickness of 1mm and a sealed bottom is placed in the outer crucible. The cylindrical crucible inside the outer crucible is also called an inner crucible. A vacuum structure is formed between the outer wall of the inner crucible and the outer crucible, which is called the inner vacuum. The inner vacuum and the outer vacuum are isolated by a metal gasket on the flange. The inner vacuum is an ultra-high vacuum, specifically 10 -7 -10 -9 Torr; the external vacuum is high vacuum, specifically 10 -6 -10 -7 Torr. This ultra-high vacuum heating furnace structure is called a double vacuum structure.

[0003] During the experiment, the sample placed in the glass tree structure 3 above the ultra-high vacuum heating furnace is put into the inner crucible in the heating furnace directly below. The graphite resistor load 2 outside the outer crucible specifies the output power or target temperature under external control to achieve temperature increase, and the external heat is transferred to the sample in the inner crucible through thermal radiation in the vacuum. During the experiment, the prior art monitors the temperature inside the inner crucible by measuring the temperature at the bottom of the tantalum crucible 1. As the temperature rises, the gas in the sample is precipitated and enters the purification system and magnetic mass spectrometer, thereby completing the measurement of the rare gas.

[0004] The applicant has found that the temperature measuring device used in the ultra-high vacuum heating furnace in the prior art has at least the following defects: (1) The temperature measuring device used in the ultra-high vacuum heating furnace in the prior art is a first thermocouple 4 arranged outside the ultra-high vacuum furnace. The first thermocouple 4 is infinitely close to the bottom of the tantalum crucible 1 (it cannot be in direct contact, as direct contact will affect the measurement of the first thermocouple 4) to reflect the real-time temperature of the bottom of the tantalum crucible 1. Therefore, the temperature measured by the first thermocouple 4 is actually the temperature of the bottom of the tantalum crucible 1, which is different from the actual temperature inside the inner crucible and cannot truly reflect the temperature inside the inner crucible; (2) When performing the actual During the test, multiple samples are placed in the glass tree structure 3, but only one sample can be put into the inner crucible each time for measurement. Therefore, multiple samples are not all located at the bottom of the inner crucible. The later the sample is put, the higher its distribution position in the inner crucible. Since the position of the first thermocouple 4 in the prior art is fixed and cannot be moved, the measured temperature is always the temperature at the bottom of the tantalum crucible 1, which cannot truly reflect the actual temperature distribution in the vertical direction inside the inner crucible. (3) The first thermocouple 4 adopts a tungsten-rhenium thermocouple, but this type of thermocouple has poor temperature linearity and low accuracy when the temperature is lower than 600°C.

[0005] Therefore, it becomes a technical problem to be solved urgently by those skilled in the art to improve the temperature measuring device in the prior art and provide a temperature measuring device which can truly reflect the temperature distribution in the vertical direction inside the inner crucible. Summary of the invention

[0006] One of the purposes of the present invention is to provide a temperature measuring device and a temperature measuring method for an ultra-high vacuum heating furnace, which solves the technical problems that the temperature measured by the thermocouple in the prior art is different from the actual temperature inside the inner crucible and the temperature measured by the thermocouple in the prior art cannot truly reflect the actual temperature distribution in the vertical direction inside the inner crucible. The many technical effects that can be produced by the preferred technical solution of the present invention are described in detail below.

[0007] To achieve the above object, the present invention provides the following technical solutions:

[0008] The temperature measuring device for an ultra-high vacuum heating furnace of the present invention comprises a lifting mechanism, a temperature measuring mechanism and a signal acquisition mechanism, wherein the lifting mechanism can perform lifting and lowering movements in the vertical direction, the temperature measuring mechanism is connected to the lifting mechanism and moves in the vertical direction based on the lifting and lowering movements of the lifting mechanism; the temperature measuring mechanism is connected to an inner vacuum, a temperature measuring component of the temperature measuring mechanism is placed in the inner crucible and is used to detect the temperature in the inner crucible; the temperature measuring component is also connected to the signal acquisition mechanism, and the signal acquisition mechanism is used to collect and display the signal collected by the temperature measuring component.

[0009] According to a preferred embodiment, the lifting mechanism includes a driving device, a coupling, an adjusting screw and a guide rod, wherein the adjusting screw and the guide rod are mounted on a first mounting plate and a second mounting plate parallel to each other, the adjusting screw and the guide rod are arranged parallel to each other, and the adjusting screw and the guide rod are fixed to the top of the ultra-high vacuum heating furnace; the first mounting plate and the second mounting plate are fixedly connected to the temperature measuring device, the adjusting screw is also connected to the driving device through the coupling, and the driving device is used to drive the adjusting screw to move in the vertical direction and drive the temperature measuring mechanism to move in the vertical direction.

[0010] According to a preferred embodiment, the vertical movement range of the lifting mechanism is 0 to 50 mm.

[0011] According to a preferred embodiment, the temperature measuring mechanism includes a metal bellows, a clamping nut, a fluororubber seal and a second thermocouple, wherein the two ends of the metal bellows are fixedly connected to the first mounting plate and the second mounting plate through flanges and fixed to the top of the ultra-high vacuum heating furnace; the metal bellows is connected to the inner vacuum, the second thermocouple is installed in the clamping nut and extends into the inner crucible through the metal bellows for detecting the temperature in the inner crucible; a fluororubber seal is provided on the side of the clamping nut close to the metal bellows to maintain a vacuum environment in the metal bellows.

[0012] According to a preferred embodiment, the interior of the metal bellows is 10 -7 ~10 -9 Torr vacuum environment.

[0013] According to a preferred embodiment, when the temperature inside the inner crucible is less than 600° C., the second thermocouple is a K-type thermocouple; when the temperature inside the inner crucible is 600° C. to 1800° C., the second thermocouple is a tungsten-rhenium thermocouple.

[0014] According to a preferred embodiment, the temperature measuring mechanism also includes a thermal insulation component and a cooling component, and the thermal insulation component and the cooling component are respectively arranged below and above the metal bellows, and the thermal insulation component and the cooling component are also connected to the metal bellows and the inner vacuum, and the second thermocouple extends into the inner crucible through the cooling component, the metal bellows and the thermal insulation component.

[0015] According to a preferred embodiment, the thermal insulation assembly includes a thermal insulation sheet and a circular tube, wherein there are multiple thermal insulation sheets, the multiple thermal insulation sheets are spaced apart from each other and arranged in parallel, the thermal insulation sheets are also perpendicular to the metal bellows, the circular tube is connected to the multiple thermal insulation sheets, and the circular tube is connected to the metal bellows and the inner vacuum.

[0016] According to a preferred embodiment, the cooling component includes a cooling water jacket, which is a double-layer stainless steel water-cooling structure. The cooling water jacket is connected to the metal bellows and the inner vacuum, and the cooling water jacket is provided with a water inlet and a water outlet for supplying cooling circulating water.

[0017] The temperature measurement method for an ultra-high vacuum heating furnace of the present invention is characterized in that the method is implemented by the temperature measurement device for an ultra-high vacuum heating furnace described in any technical solution of the present invention, and the temperature measurement method comprises the following steps:

[0018] The lifting mechanism and the temperature measuring mechanism are installed on the top of the ultra-high vacuum heating furnace, and the second thermocouple of the temperature measuring mechanism is extended into the inner crucible and used to detect the temperature of the bottom of the inner crucible to obtain first temperature data;

[0019] The driving device of the lifting mechanism drives the adjusting screw to move upward and drives the second thermocouple to move upward, and the second thermocouple detects the temperature in the inner crucible and obtains second temperature data;

[0020] The driving device of the lifting mechanism continues to drive the adjusting screw to move upward and drives the second thermocouple to move upward, and the second thermocouple detects the temperature in the inner crucible and obtains third temperature data;

[0021] According to the same method as above, a plurality of temperature data at different heights in the inner crucible are obtained, and a temperature curve is established based on the obtained plurality of temperature data and the height of the inner crucible.

[0022] The temperature measuring device and temperature measuring method for an ultra-high vacuum heating furnace of the present invention have at least the following beneficial technical effects:

[0023] The temperature measuring device of the present invention is used for an ultra-high vacuum heating furnace. The temperature measuring component of the temperature measuring mechanism is placed in an inner crucible and is used to detect the temperature in the inner crucible. The obtained temperature data can truly reflect the temperature inside the inner crucible. On the other hand, the temperature measuring device of the present invention for an ultra-high vacuum heating furnace also includes a lifting mechanism. The lifting mechanism can perform lifting and lowering movements in the vertical direction. The temperature measuring mechanism is connected to the lifting mechanism and moves in the vertical direction based on the lifting and lowering movements of the lifting mechanism. That is, through the action of the lifting mechanism, the temperature measuring mechanism can be driven to move in the vertical direction, thereby measuring the temperature data at different heights in the inner crucible, thereby obtaining the temperature field distribution in the inner crucible, reflecting the actual temperature distribution in the vertical direction inside the inner crucible.

[0024] The temperature measurement method for an ultra-high vacuum heating furnace of the present invention can obtain multiple temperature data at different heights in an inner crucible through a temperature measurement device for an ultra-high vacuum heating furnace according to any technical solution of the present invention. A temperature curve is established based on the obtained multiple temperature data and the height of the inner crucible, thereby obtaining the temperature field distribution in the inner crucible, reflecting the actual temperature distribution in the vertical direction inside the inner crucible.

[0025] That is, the temperature measuring device and temperature measuring method for an ultra-high vacuum heating furnace of the present invention solve the problems in the prior art that there is a difference between the temperature measured by the thermocouple and the actual temperature inside the inner crucible and that the temperature measured by the thermocouple in the prior art cannot truly reflect the actual temperature distribution in the vertical direction inside the inner crucible. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 It is a schematic diagram of a preferred embodiment of an existing ultra-high vacuum heating furnace;

[0028] Figure 2 is a first schematic diagram of a preferred embodiment of the temperature measuring device of the present invention;

[0029] Figure 3 is a second schematic diagram of a preferred embodiment of the temperature measuring device of the present invention;

[0030] Figure 4 It is a partial schematic diagram of a preferred embodiment of the temperature measuring device of the present invention;

[0031] Figure 5 It is a schematic diagram of the connection between the metal bellows of the present invention and the first mounting plate and the second mounting plate.

[0032] Figure 6 is a schematic diagram of a preferred embodiment of the first mounting plate of the present invention;

[0033] Figure 7 is a first schematic diagram of a preferred embodiment of the thermal insulation assembly of the present invention;

[0034] Figure 8 It is a second schematic diagram of a preferred embodiment of the thermal insulation assembly of the present invention.

[0035] In the figure: 1. Tantalum crucible; 2. Resistive load; 3. Glass tree structure; 4. First thermocouple; 101. Driving device; 102. Coupling; 103. Adjusting screw; 104. Guide rod; 105. First mounting plate; 106. Second mounting plate; 201. Metal bellows; 202. Pressing nut; 203. Fluororubber seal; 204. Flange; 205. Heat insulation sheet; 206. Round pipe; 207. Cooling water jacket. DETAILED DESCRIPTION

[0036] To make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be described in detail below. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other implementation methods obtained by ordinary technicians in this field without creative work belong to the scope of protection of the present invention.

[0037] The following is attached to the instruction manual Figures 2 to 8 And Examples 1 and 2 provide detailed descriptions of the temperature measuring device and temperature measuring method for an ultra-high vacuum heating furnace of the present invention.

[0038] Example 1

[0039] This embodiment describes in detail the temperature measuring device for an ultra-high vacuum heating furnace of the present invention.

[0040] The temperature measuring device of the present embodiment for an ultra-high vacuum heating furnace comprises a lifting mechanism, a temperature measuring mechanism and a signal collecting mechanism. Figure 2 As shown. Preferably, the lifting mechanism can perform lifting and lowering motion in the vertical direction, the temperature measuring mechanism is connected to the lifting mechanism and moves in the vertical direction based on the lifting and lowering motion of the lifting mechanism; the temperature measuring mechanism is connected to the inner vacuum, and the temperature measuring component of the temperature measuring mechanism is placed in the inner crucible and is used to detect the temperature in the inner crucible; the temperature measuring component is also connected to the signal acquisition mechanism, and the signal acquisition mechanism is used to collect and display the signal collected by the temperature measuring component. More preferably, the signal acquisition mechanism is a device such as a temperature controller, and the temperature measuring mechanism is connected to the temperature controller, and the temperature can be controlled, adjusted and displayed by the temperature controller. The temperature controller can be a device in the prior art. The temperature control accuracy of the temperature controller is ±3 to 5°C.

[0041] The temperature measuring device of the present embodiment is used for an ultra-high vacuum heating furnace. The temperature measuring component of the temperature measuring mechanism is placed in the inner crucible and used to detect the temperature in the inner crucible. The obtained temperature data can truly reflect the temperature inside the inner crucible. On the other hand, the temperature measuring device of the present embodiment for an ultra-high vacuum heating furnace also includes a lifting mechanism, which can perform lifting and lowering movements in the vertical direction. The temperature measuring mechanism is connected to the lifting mechanism and moves in the vertical direction based on the lifting and lowering movements of the lifting mechanism. That is, through the action of the lifting mechanism, the temperature measuring mechanism can be driven to move in the vertical direction, thereby measuring the temperature data at different heights in the inner crucible, thereby obtaining the temperature field distribution in the inner crucible, and reflecting the actual temperature distribution in the vertical direction inside the inner crucible. That is, the temperature measuring device of the present embodiment for an ultra-high vacuum heating furnace solves the problem that the temperature measured by the thermocouple in the prior art is different from the actual temperature inside the inner crucible and the temperature measured by the thermocouple in the prior art cannot truly reflect the actual temperature distribution in the vertical direction inside the inner crucible.

[0042] According to a preferred embodiment, the lifting mechanism includes a driving device 101, a coupling 102, an adjusting screw 103 and a guide rod 104. Figure 2 or Figure 3 Preferably, the adjusting screw 103 and the guide rod 104 are mounted on a first mounting plate 105 and a second mounting plate 106 which are parallel to each other, and the adjusting screw 103 and the guide rod 104 are arranged parallel to each other, and the adjusting screw 103 and the guide rod 104 are fixed to the top of the ultra-high vacuum heating furnace; the first mounting plate 105 and the second mounting plate 106 are fixedly connected to the temperature measuring device, and the adjusting screw 103 is also connected to the driving device 101 through the coupling 102, and the driving device 101 is used to drive the adjusting screw 103 to move in the vertical direction and drive the temperature measuring mechanism to move in the vertical direction, as shown in FIG. Figure 2 Or as shown in 3. The driving device 101 is, for example, a stepping motor, which adjusts the rise and fall of the stepping motor by controlling the power supply. The adjusting screw 103 can be a structure in the prior art. In the preferred technical solution of this embodiment, the first mounting plate 105 and the second mounting plate 106 are fixedly connected to the temperature measuring device. When the driving device 101 drives the adjusting screw 103 to move in the vertical direction, it can drive the temperature measuring mechanism to move in the vertical direction, so that the temperature measuring device can measure the temperature data at different heights in the inner crucible. On the other hand, the lifting mechanism of the preferred technical solution of this embodiment also includes a guide rod 104, which can provide a guiding effect for the movement of the temperature measuring mechanism in the vertical direction, so that the temperature measuring mechanism can achieve synchronous movement with the coupling 102 and the adjusting screw 103.

[0043] Preferably, the range of movement of the lifting mechanism in the vertical direction is 0 to 50 mm. The range of movement of the lifting mechanism in the vertical direction of the preferred technical solution of this embodiment is 0 to 50 mm, that is, the range of movement of the second thermocouple in the vertical direction is 0 to 50 mm. Since the inner crucible is a cylindrical crucible with a diameter of 17 mm, a wall thickness of 1 mm, and a height of 130 mm, the range of movement of the lifting mechanism in the vertical direction is 0 to 50 mm, and the temperature distribution of the entire inner crucible in the vertical direction can be measured by step-by-step testing. Specifically, when installing for the first time, the second thermocouple is brought close to the bottom of the inner crucible, and the temperature distribution at the height position of 0 to 50 mm of the inner crucible is measured; when installing for the second time, the position of the second thermocouple is moved up to 50 mm of the height of the inner crucible, and the temperature distribution at the height position of 50 to 100 mm of the inner crucible is measured; and so on, until the temperature measurement at the position of 0 to 130 mm is completed.

[0044] According to a preferred embodiment, the temperature measuring mechanism includes a metal bellows 201, a compression nut 202, a fluororubber seal 203 and a second thermocouple, such as Figures 2 to 5 Preferably, both ends of the metal bellows 201 are fixedly connected to the first mounting plate 105 and the second mounting plate 106 through flanges 204 and fixed to the top of the ultra-high vacuum heating furnace; the metal bellows 201 is connected to the inner vacuum, and the second thermocouple is installed in the clamping nut 202 and extends into the inner crucible through the metal bellows 201 to detect the temperature in the inner crucible; a fluororubber seal 203 is provided on one side of the clamping nut 202 close to the metal bellows 201 to maintain a vacuum environment in the metal bellows 201, as shown in FIG. Figures 2 to 5 More preferably, the interior of the metal bellows 201 is 10 -7 ~10 -9 Torr vacuum environment. The metal bellows 201 can be a structure in the prior art. The ends of the first mounting plate 105 and the second mounting plate 106 of the preferred technical solution of this embodiment are arc-shaped structures that match the flange 204. Through the fixing effect of the flange 204, the two ends of the metal bellows 201 can be fixedly connected to the first mounting plate 105 and the second mounting plate 106 respectively. The schematic diagram of the first mounting plate 105 and the second mounting plate 106 is shown in FIG. Figure 6 As shown. The metal bellows 201 of the preferred technical solution of this embodiment is connected to the inner vacuum, which is convenient for extending the second thermocouple through the metal bellows 201 into the inner crucible for detecting the temperature in the inner crucible, so as to obtain data that can truly reflect the temperature inside the inner crucible. After the second thermocouple is inserted into the metal bellows 201, the preferred technical solution of this embodiment can keep the upper end of the metal bellows 201 sealed through the action of the clamping nut 202 and the fluororubber seal 203, and the lower end of the metal bellows 201 is fixedly connected to the furnace body through the flange 204, so that the sealing of the metal bellows 201 can be maintained, and a stable vacuum environment can be maintained inside it.

[0045] Preferably, when the temperature inside the inner crucible is less than 600°C, the second thermocouple is a K-type thermocouple; when the temperature inside the inner crucible is between 600°C and 1800°C, the second thermocouple is a tungsten-rhenium thermocouple. Based on the temperature inside the inner crucible, the second thermocouple of the preferred technical solution of this embodiment selects different types. By using different types of thermocouples together, an accurate temperature curve from room temperature to 1800°C can be established, which solves the technical problem that the first thermocouple 4 in the prior art uses a tungsten-rhenium thermocouple, but this type of thermocouple has poor temperature linearity and low accuracy when the temperature is below 600°C. Specifically, when the temperature inside the inner crucible is less than 600°C, the second thermocouple uses a K-type thermocouple to obtain a temperature curve of the inner crucible at room temperature to 600°C; when the temperature inside the inner crucible rises to above 600°C, the second thermocouple is taken out and replaced with a tungsten-rhenium thermocouple to obtain a temperature curve of the inner crucible at 600 to 1800°C.

[0046] Preferably, the temperature measuring mechanism further comprises a heat insulation component and a cooling component, which are respectively arranged below and above the metal bellows 201, and the heat insulation component and the cooling component are also connected to the metal bellows 201 and the inner vacuum, and the second thermocouple extends into the inner crucible through the cooling component, the metal bellows 201 and the heat insulation component. Figure 2 or Figure 3 As shown. The ultra-high vacuum heating furnace transfers heat mainly by means of thermal radiation in the high-temperature stage. The temperature measuring mechanism of the preferred technical solution of this embodiment is provided with a heat insulation component below the metal bellows 201. The temperature measuring mechanism is separated from the ultra-high vacuum heating furnace by the heat insulation component, which can block the influence of the high-temperature heat radiation in the furnace on the performance of the temperature measuring mechanism (such as the part of the temperature measuring mechanism that uses fluororubber seals). The temperature measuring mechanism of the preferred technical solution of this embodiment is provided with a cooling component above the metal bellows 201. Through the action of the cooling component, the influence of the high-temperature heat radiation in the furnace on the fluororubber seal 203 can be reduced, and the sealing performance of the fluororubber seal 203 is avoided at high temperatures, which causes the internal vacuum seal to be loose. More preferably, the cooling component of the preferred technical solution of this embodiment is activated under high temperature conditions, such as when the internal temperature of the inner crucible is higher than 600°C.

[0047] More preferably, the heat insulation assembly includes a heat insulation sheet 205 and a round tube 206, such as Figure 7As shown. There are multiple thermal insulation sheets 205, and the multiple thermal insulation sheets 205 are spaced apart from each other and arranged in parallel. The thermal insulation sheets 205 are also perpendicular to the metal bellows 201. The circular tube 206 is connected to the multiple thermal insulation sheets 205, and the circular tube 206 is connected to the metal bellows 201 and the inner vacuum. The multiple thermal insulation sheets 205 are connected to the circular tube 206 by welding. The thermal insulation assembly of the preferred technical solution of this embodiment includes a thermal insulation sheet 205 and a circular tube 206. The thermal insulation sheet 205 can be used to isolate high-temperature thermal radiation. The circular tube 206 can not only connect multiple thermal insulation sheets 205, but also facilitate the insertion of the second thermocouple, thereby reducing the influence of thermal radiation in the inner crucible on the second thermocouple. The preferred technical solution of this embodiment is that the number of thermal insulation plates 205 is multiple, for example, 5. The multiple thermal insulation plates 205 are spaced apart from each other and arranged in parallel to enhance the thermal insulation effect. The number of circular tubes 206 can be one or more, for example, 3. The height of the circular tube 206 is 20 to 30 mm, the inner diameter is 3 to 5 mm, and the material is 304 stainless steel.

[0048] like Figure 7 or Figure 8 As shown, the heat insulation assembly includes 5 heat insulation sheets 205 and 3 round tubes 206. Preferably, the heat insulation sheet 205 is close to the inner wall of the inner crucible. The diameter of the middle round tube 206 is 3mm, the wall thickness is 0.5mm, and the height is 21mm. The round tube 206 can be used to extract the vacuum at the bottom of the inner crucible, so that the inner crucible can reach ultra-high vacuum faster, greatly reducing the waiting time for vacuuming; the diameter of the round tubes 206 on both sides is 5mm, the wall thickness is 0.5mm, and the height is 21mm. The round tube 206 is used for the second thermocouple to pass through, which can not only effectively isolate thermal interference, but also prevent the lead of the second thermocouple (the lead of the second thermocouple is wrapped with ceramic) from contacting the tube wall and causing a short circuit.

[0049] More preferably, the cooling component includes a cooling water jacket 207, which is a double-layer stainless steel water-cooled structure. The cooling water jacket 207 is connected to the metal bellows 201 and the inner vacuum, and the cooling water jacket 207 is provided with a water inlet and a water outlet for supplying cooling circulating water. Figure 2 or Figure 3 The cooling water jacket 207 of the preferred technical solution of this embodiment can play a role in cooling down through the inflow and outflow of cooling circulating water.

[0050] Example 2

[0051] This embodiment describes in detail the temperature measurement method for an ultra-high vacuum heating furnace of the present invention.

[0052] The temperature measurement method for an ultra-high vacuum heating furnace in this embodiment is implemented by a temperature measurement device for an ultra-high vacuum heating furnace using any one of the technical solutions in Embodiment 1. Preferably, the temperature measurement method comprises the following steps:

[0053] S1: Install the lifting mechanism and the temperature measuring mechanism on the top of the ultra-high vacuum heating furnace, and extend the second thermocouple of the temperature measuring mechanism into the inner crucible to detect the temperature of the bottom of the inner crucible to obtain first temperature data.

[0054] S2: The driving device 101 of the lifting mechanism drives the adjusting screw 103 to move upward and drives the second thermocouple to move upward. The second thermocouple detects the temperature in the inner crucible and obtains second temperature data.

[0055] S3: The driving device 101 of the lifting mechanism continues to drive the adjusting screw 103 to move upward and drives the second thermocouple to move upward. The second thermocouple detects the temperature in the inner crucible and obtains third temperature data.

[0056] S4: According to the same method as above, a plurality of temperature data at different heights in the inner crucible are obtained, and a temperature curve is established based on the obtained plurality of temperature data and the height of the inner crucible.

[0057] The temperature measurement method for the ultra-high vacuum heating furnace in this embodiment is carried out before the experiment. After the glass tree structure 3 of the ultra-high vacuum heating furnace is removed, the temperature measuring device of any technical solution in Example 1 is installed on the top of the ultra-high vacuum heating furnace. By measuring multiple temperature data at different heights in the inner crucible, an accurate temperature curve from room temperature to 1800°C can be established.

[0058] The temperature measurement method for an ultra-high vacuum heating furnace in this embodiment can obtain multiple temperature data at different heights in the inner crucible through the temperature measurement device for an ultra-high vacuum heating furnace using any one of the technical solutions in Example 1, and establish a temperature curve based on the obtained multiple temperature data and the height of the inner crucible, so as to obtain the temperature field distribution in the inner crucible, reflecting the actual temperature distribution in the vertical direction inside the inner crucible. That is, the temperature measurement method for an ultra-high vacuum heating furnace in this embodiment solves the problem that the temperature measured by the thermocouple in the prior art is different from the actual temperature inside the inner crucible, and the temperature measured by the thermocouple in the prior art cannot truly reflect the actual temperature distribution in the vertical direction inside the inner crucible.

[0059] In the description of the present invention, it should be noted that, unless otherwise specified, "multiple" means two or more than two; the directions or positional relationships indicated by the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail", etc. are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0060] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0061] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A temperature measuring device for an ultra-high vacuum heating furnace, characterized in that: It comprises a lifting mechanism, a temperature measuring mechanism and a signal collecting mechanism, wherein the lifting mechanism can perform lifting movement in the vertical direction, the temperature measuring mechanism is connected to the lifting mechanism and moves in the vertical direction based on the lifting movement of the lifting mechanism; the temperature measuring mechanism is connected to the inner vacuum, the temperature measuring component of the temperature measuring mechanism is placed in the inner crucible and is used to detect the temperature in the inner crucible; the temperature measuring component is also connected to the signal collecting mechanism, and the signal collecting mechanism is used to collect and display the signal collected by the temperature measuring component; The temperature measuring mechanism comprises a metal bellows (201), a clamping nut (202), a fluororubber seal (203) and a second thermocouple, wherein two ends of the metal bellows (201) are fixedly connected to a first mounting plate (105) and a second mounting plate (106) via flanges (204) and fixed to the top of the ultra-high vacuum heating furnace; the metal bellows (201) is in communication with the inner vacuum, the second thermocouple is installed in the clamping nut (202) and extends into the inner crucible through the metal bellows (201) to detect the temperature in the inner crucible; a fluororubber seal (203) is provided on one side of the clamping nut (202) close to the metal bellows (201) to maintain a vacuum environment in the metal bellows (201); The temperature measuring mechanism further comprises a heat insulation component and a cooling component, the heat insulation component and the cooling component are respectively arranged below and above the metal bellows (201), and the heat insulation component and the cooling component are also connected to the metal bellows (201) and the inner vacuum, and the second thermocouple extends into the inner crucible through the cooling component, the metal bellows (201) and the heat insulation component; The heat insulation component comprises a heat insulation sheet (205) and a circular tube (206), wherein the number of the heat insulation sheets (205) is multiple, the multiple heat insulation sheets (205) are spaced apart from each other and arranged in parallel, the heat insulation sheets (205) are also perpendicular to the metal bellows (201), the circular tube (206) is connected to the multiple heat insulation sheets (205), and the circular tube (206) is in communication with the metal bellows (201) and the inner vacuum; The cooling component comprises a cooling water jacket (207), the cooling water jacket (207) is a double-layer stainless steel water-cooling structure, the cooling water jacket (207) is connected to the metal bellows (201) and the inner vacuum, and the cooling water jacket (207) is provided with a water inlet and a water outlet for supplying cooling circulating water.

2. The temperature measuring device for an ultra-high vacuum heating furnace according to claim 1, characterized in that: The lifting mechanism comprises a driving device (101), a coupling (102), an adjusting screw (103) and a guide rod (104), wherein the adjusting screw (103) and the guide rod (104) are mounted on a first mounting plate (105) and a second mounting plate (106) which are parallel to each other, the adjusting screw (103) and the guide rod (104) are arranged parallel to each other, and the adjusting screw (103) and the guide rod (104) are fixed to the top of the ultra-high vacuum heating furnace; the first mounting plate (105) and the second mounting plate (106) are fixedly connected to the temperature measuring device, the adjusting screw (103) is also connected to the driving device (101) through the coupling (102), and the driving device (101) is used to drive the adjusting screw (103) to move in a vertical direction and drive the temperature measuring mechanism to move in the vertical direction.

3. The temperature measuring device for an ultra-high vacuum heating furnace according to claim 1 or 2, characterized in that: The vertical movement range of the lifting mechanism is 0 to 50 mm.

4. The temperature measuring device for an ultra-high vacuum heating furnace according to claim 1, characterized in that: The interior of the metal bellows (201) is 10 -7 ~10 -9 Torr vacuum environment.

5. The temperature measuring device for an ultra-high vacuum heating furnace according to claim 1, characterized in that: When the temperature inside the inner crucible is less than 600° C., the second thermocouple is a K-type thermocouple; when the temperature inside the inner crucible is between 600° C. and 1800° C., the second thermocouple is a tungsten-rhenium thermocouple.

6. A temperature measurement method for an ultra-high vacuum heating furnace, characterized in that: The method is implemented by the temperature measuring device for an ultra-high vacuum heating furnace according to any one of claims 1 to 5, and the temperature measuring method comprises the following steps: The lifting mechanism and the temperature measuring mechanism are installed on the top of the ultra-high vacuum heating furnace, and the second thermocouple of the temperature measuring mechanism is extended into the inner crucible and used to detect the temperature of the bottom of the inner crucible to obtain first temperature data; The driving device of the lifting mechanism drives the adjusting screw (103) to move upward and drives the second thermocouple to move upward, and the second thermocouple detects the temperature in the inner crucible and obtains second temperature data; The driving device of the lifting mechanism continues to drive the adjusting screw (103) to move upward and drives the second thermocouple to move upward, and the second thermocouple detects the temperature in the inner crucible and obtains third temperature data; According to the same method as above, a plurality of temperature data at different heights in the inner crucible are obtained, and a temperature curve is established based on the obtained plurality of temperature data and the height of the inner crucible.

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