An air-floating nozzle module and its use method

Abstract

The invention relates to an air-floating suction nozzle module and a method for using the same, wherein the module comprises an air-floating shaft, a fixing seat and a suction nozzle; the fixing seat is provided with an active cavity for the air-floating shaft to move up and down, the lower end of the air-floating shaft is provided with a suction nozzle groove, the side wall of the air-floating shaft is provided with a first negative-pressure air channel and a second negative-pressure air channel connected to the suction nozzle groove, respectively used for adsorbing the suction nozzle and cooperating with the air channel in the suction nozzle to adsorb the workpiece; a negative-pressure portion and a positive-pressure portion are axially arranged on the inner wall of the active cavity, and a first negative-pressure air port and a second negative-pressure air port are respectively provided on the negative-pressure portion corresponding to the first negative-pressure air port and the second negative-pressure air port; a positive-pressure air channel is provided on the positive-pressure portion, which is used to form an air flow film between the air-floating shaft and the inner wall of the active cavity to separate the air-floating shaft and the fixing seat; when assembled in place, the distance between the side wall of the air-floating shaft and the negative-pressure portion is in the range of 3 to 5 microns, and the air-floating shaft is separated from the inner wall of the active cavity by the positive-pressure air channel to avoid friction, so as to ensure the pressure stability of the suction nozzle module and reduce external interference.

Description

Technical Field

[0001] The present invention relates to the technical field of eutectic welding, and in particular to an air-floating nozzle module and a method for using the same. Background Art

[0002] Eutectic soldering technology requires not only the selection of eutectic materials and control of soldering temperature, but also stringent requirements for chip functionality and appearance. High-power integrated circuit chips often require multiple chip sizes to be mounted on a single circuit board. Different chip sizes require different nozzles for mounting. However, the nozzle mechanism on existing equipment is cumbersome and inefficient to replace. During eutectic soldering, the pressure applied by the nozzle on the chip directly impacts soldering quality. The applied pressure varies for different chip products, ranging from a few grams to tens of grams. Existing nozzle mechanisms inevitably generate static friction on the guide rails during the downward movement of the nozzle, making it difficult or unstable to achieve even low pressures. Summary of the Invention

[0003] The purpose of the present invention is to provide an air-floating nozzle module and a method of using the same in order to address the deficiencies of the prior art. The air-floating nozzle module can effectively solve the above-mentioned problems.

[0004] In order to achieve the above requirements, the technical solution adopted by the present invention to solve the technical problem is:

[0005] Provided is an air-floating suction nozzle module, comprising an air-floating shaft, a fixed seat and a suction nozzle; the fixed seat is provided with an active cavity for the air-floating shaft to move up and down, the lower end of the air-floating shaft is provided with a suction nozzle groove, the side wall of the air-floating shaft is provided with a first negative pressure air channel and a second negative pressure air channel connected to the suction nozzle groove, respectively used to adsorb the suction nozzle and cooperate with the air channel in the suction nozzle to adsorb the workpiece; a negative pressure part and a positive pressure part are axially arranged on the inner wall of the active cavity, and a first negative pressure air port and a second negative pressure air port are respectively provided on the negative pressure part corresponding to the first negative pressure air port and the second negative pressure air port; a positive pressure air channel is provided on the positive pressure part, which is used to form an air flow film between the air-floating shaft and the inner wall of the active cavity to separate the air-floating shaft and the fixed seat; when assembled in place, the distance between the side wall of the air-floating shaft and the negative pressure part is in the range of 3 to 5 microns.

[0006] In the air-floating nozzle module of the present invention, the negative pressure portion is provided in the middle of the active cavity, and the positive pressure portions are provided at both the upper and lower portions of the active cavity.

[0007] In the air-floating nozzle module of the present invention, an air-floating end cover is provided above the fixing seat, and the upper end of the air-floating shaft is connected to the air-floating end cover.

[0008] In the air-floating nozzle module of the present invention, a rotating mechanism for driving the air-floating shaft to rotate is provided above the air-floating shaft, and the air-floating shaft and the rotating mechanism are connected via an elastic component.

[0009] The air-floating suction nozzle module described in the present invention, wherein the rotating mechanism is a motor, the elastic component includes a spring sheet coaxially connected to the air-floating shaft, a spring seat for fixing the spring sheet, and a connecting cover connecting the spring seat and the motor; the spring seat is provided with a positioning groove adapted to the spring sheet, the bottom surface of the positioning groove is provided with a movable through-hole for the middle part of the spring sheet to deform up and down, the positioning groove is provided with a fixing part for fixing the spring sheet, and the connecting cover is detachably connected to the spring seat.

[0010] In the air-floating nozzle module of the present invention, the spring sheet is provided with an opening for reducing the stress of the spring sheet, and a plurality of openings are provided, and the plurality of openings are distributed in multiple layers along the radial direction of the spring sheet.

[0011] The air-floating suction nozzle module described in the present invention is characterized in that the suction nozzle groove is trumpet-shaped, and a conduction chamber is provided at the bottom of the suction nozzle groove. When assembled in place, the air channel in the suction nozzle is connected to the conduction chamber, the first negative pressure air channel is connected to the oblique side wall of the suction nozzle groove, and the second negative pressure air channel is connected to the conduction chamber.

[0012] The air-floating suction nozzle module described in the present invention is characterized in that the air outlet of the first negative-pressure air duct and the air outlet of the second negative-pressure air duct are distributed along the axial direction of the air-floating shaft, and a first annular groove and a second annular groove are respectively provided on the negative-pressure part corresponding to the first negative-pressure air duct and the second negative-pressure air duct, and a stroke groove is longitudinally opened on the positive-pressure part, and the positive-pressure air duct is connected to the stroke groove, and a plurality of stroke grooves are provided and are evenly distributed in a ring shape on the positive-pressure part.

[0013] The air-floating suction nozzle module described in the present invention, wherein the fixed seat includes an air-dividing shaft and an air-dividing shaft seat mounted on the outside of the air-dividing shaft; the air-dividing shaft is provided with through holes running through both ends thereof, and the through holes form the active cavity; the outer wall of the air-dividing shaft is provided with a sealing ring for separating the first negative pressure air port, the second negative pressure air port and the positive pressure air duct, and the air-dividing shaft seat is provided with a first air nozzle, a second air nozzle and a third air nozzle corresponding to the first negative pressure air port, the second negative pressure air port and the positive pressure air duct respectively; the upper end of the air-dividing shaft is provided with a positioning platform, and the lower end of the air-dividing shaft passes through the active cavity and is fixedly connected to the air-dividing shaft seat through a stop member.

[0014] The present invention also provides a method for using the air-floating nozzle module, and the steps for implementing the method are as follows:

[0015] Step 1: Connect the first negative pressure airway and the second negative pressure airway to the negative pressure air source and adjust the preset negative pressure;

[0016] Step 2: Place the nozzle in the nozzle slot and position it in place so that the airway in the nozzle is connected to the second negative pressure airway, and fix the nozzle by suction through the first negative pressure airway;

[0017] Step 3: Connect the positive pressure airway to the positive pressure air source and adjust the preset positive pressure to separate the air-floating shaft from the inner wall of the active cavity;

[0018] Step 4: Drive the air bearing shaft to rotate through the rotating mechanism to adjust the rotation angle of the nozzle.

[0019] The beneficial effects of the present invention are: the present invention discloses an air-floating suction nozzle module, which, when working, connects the positive-pressure air channel to the positive-pressure air source, and forms a high-speed airflow film between the air-floating shaft and the inner wall of the active cavity through the positive-pressure air channel, thereby separating the air-floating shaft and the inner wall of the active cavity from contact, thereby avoiding mutual friction between the two, so as to ensure the pressure stability of the suction nozzle module and reduce external interference. At the same time, the suction and fixation of the suction nozzle and the adsorption of the workpiece are realized through the first negative-pressure air channel and the second negative-pressure air channel, and by limiting the distance between the negative-pressure part of the inner wall of the active cavity and the air-floating shaft to between 3 and 5 microns, the positive-pressure air channel and the negative-pressure air channel are avoided from interfering with each other, thereby ensuring normal operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the present invention will be further described below with reference to the accompanying drawings and embodiments. The drawings described below are only some embodiments of the present invention. Those skilled in the art can also derive other drawings based on these drawings without inventive work.

[0021] Figure 1 It is the overall structure diagram of the air-floating suction nozzle module of the present invention.

[0022] Figure 2 It is a top view of the overall structure of the air-floating suction nozzle module of the present invention in an exploded state.

[0023] Figure 3 It is a structural diagram of the elastic component of the air-floating nozzle module of the present invention.

[0024] Figure 4 It is a top view of the spring piece of the air-floating nozzle module of the present invention.

[0025] Figure 5 This is an assembly diagram of the suction nozzle and the air floating shaft of the air floating suction nozzle module of the present invention.

[0026] Figure 6 It is a bottom view of the overall structure of the air-floating suction nozzle module of the present invention in an exploded state.

[0027] Figure 7 It is a structural diagram of the air distribution axis of the air-floating nozzle module of the present invention.

[0028] Figure 8 It is a structural diagram of the air-floating shaft of the air-floating nozzle module of the present invention.

[0029] Figure 9 This is a cross-sectional view of the first negative pressure airway in the air-floating shaft of the air-floating nozzle module of the present invention.

[0030] Figure 10 This is a cross-sectional view of the second negative pressure airway in the air-floating shaft of the air-floating nozzle module of the present invention.

[0031] Figure 11 It is a horizontal cross-sectional view of the second negative pressure air channel in the air floating shaft of the air floating nozzle module of the present invention.

[0032] Figure 12 It is a horizontal cross-sectional view of the first negative pressure air channel in the air floating shaft of the air floating nozzle module of the present invention.

[0033] Figure 13 It is a cross-sectional view of the air distribution axis of the air-floating nozzle module of the present invention.

[0034] Figure 14 It is a cross-sectional view of the air shaft seat of the air-floating nozzle module of the present invention.

[0035] Figure 15 It is a cross-sectional view of the air shaft seat of the air-floating nozzle module of the present invention.

[0036] Figure 16 This is a cross-sectional view of the overall structure of the air-floating nozzle module of the present invention.

[0037] Figure 17 This is a flow chart of the method of using the air-floating nozzle module of the present invention. DETAILED DESCRIPTION

[0038] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the following will be a clear and complete description of the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work shall fall within the scope of protection of the present invention.

[0039] The air-floating nozzle module and its use method of the preferred embodiment of the present invention are as follows: Figure 1-17As shown, the module includes an air floating shaft 1, a fixed seat 2 and a suction nozzle 3; the fixed seat 2 is provided with an active chamber 4 for the air floating shaft 1 to move up and down, and the lower end of the air floating shaft 1 is provided with a suction nozzle groove 5 for fixing the suction nozzle 3, and the side wall of the air floating shaft 1 is provided with a first negative pressure air channel 6 and a second negative pressure air channel 7 connected to the suction nozzle groove 5, which are respectively used to adsorb the suction nozzle 3 and cooperate with the air channel 8 in the suction nozzle 3 to adsorb the workpiece 400, and the air outlets of the first negative pressure air channel 6 and the second negative pressure air channel 7 can be arranged on the same horizontal plane, or on horizontal planes at different heights, and different configurations can be selected according to different application scenarios; a negative pressure part 100 and a positive pressure part 200 are axially provided on the inner wall of the active chamber 4, and a first negative pressure air port 6a and a second negative pressure air port 7a are respectively provided on the negative pressure part 100 corresponding to the first negative pressure air channel 6 and the second negative pressure air channel 7; a positive pressure part 200 is provided through The positive pressure air channel 9 is used to form a high-speed air flow film between the air floating shaft 1 and the inner wall of the active chamber 4 to separate the air floating shaft 1 and the fixed seat 2; when assembled in place, the distance between the side wall of the air floating shaft 1 and the negative pressure part 100 ranges from 3 to 5 microns. During operation, the positive pressure air channel 9 is connected to the positive pressure air source, and a high-speed air flow film is formed between the air floating shaft 1 and the inner wall of the active chamber 4 through the positive pressure air channel 9, thereby separating the air floating shaft 1 and the inner wall of the active chamber 4 from contact, thereby avoiding mutual friction between the two, so as to ensure the pressure stability of the suction nozzle module and reduce external interference. At the same time, the first negative pressure air channel 6 and the second negative pressure air channel 7 are used to realize the adsorption and fixation of the suction nozzle 3 and the adsorption of the workpiece, and by limiting the distance between the negative pressure part 100 of the inner wall of the active chamber 4 and the air floating shaft 1 to between 3 and 5 microns, the positive pressure air channel 9 and the negative pressure air channel are avoided from interfering with each other, thereby ensuring normal operation.

[0040] Preferably, the negative pressure part 100 is arranged in the middle of the active chamber 4, and the upper and lower parts of the active chamber 4 are provided with positive pressure parts 200. By setting two positive pressure parts 200, the upper and lower ends of the air-floating shaft 1 are further blown and limited by the air flow in the positive pressure airway 9 on the two positive pressure parts 200 to prevent the air-floating shaft 1 from deflecting. The negative pressure part 100 is reasonably set in the middle of the two positive pressure parts 200 to facilitate the arrangement and setting of external components.

[0041] Preferably, an air-floating end cover 10 is provided above the fixing seat 2. The air-floating end cover is specifically disc-shaped. The upper end of the air-floating shaft 1 is detachably connected to the air-floating end cover 10 through a connector 11. By reasonably configuring the distance between the air-floating end cover 10 and the upper end of the active chamber 4, when the gas in the positive pressure airway 9 located at the upper part of the active chamber 4 is blown out of the active chamber 4, the high-speed airflow can blow the air-floating end cover 10 upward. By setting a predetermined pressure, all or part of the deadweight of the air-floating shaft 1 and the suction nozzle 3 can be offset, which is convenient for pressure regulation of the suction nozzle 3. Specifically, the connector 11 is a threaded connection shaft and coaxially passes through the air-floating end cover 10 to facilitate assembly and disassembly.

[0042] Preferably, a rotating mechanism 12 is provided above the air-floating shaft 1 to drive it to rotate, so as to drive the air-floating shaft 1 to rotate after the suction nozzle 3 sucks the chip, thereby adjusting the horizontal deflection angle of the chip to ensure the processing accuracy. The air-floating shaft 1 is connected to the rotating mechanism 12 through an elastic component 13. In order to ensure the firmness of the equipment, a base 14 is provided on the fixed seat 2 to support and fix the rotating mechanism 12. The base 14 is a cylindrical structure with openings at both ends to facilitate the arrangement of the elastic component 13 therein, thereby reducing the volume of the equipment. The deformability of the elastic component 13 can be used to make the air-floating shaft 1 have a certain range of motion in the longitudinal direction, and also provide a small range of pressure control for the suction nozzle 3, and the control range is specifically between 10-50g to reduce the chip damage rate.

[0043] Preferably, the rotating mechanism 12 is a motor, specifically a 50W servo motor to ensure control accuracy, and the elastic component 13 includes a spring sheet 131 coaxially connected to the air-floating shaft 1, a spring seat 132 for fixing the spring sheet 131, and a connecting cover 133 connecting the spring seat 132 and the motor; in order to ensure that the air-floating shaft 1 is subjected to balanced force, the air-floating shaft 1 is fixed at the center of the spring sheet 131, and the spring sheet 131 can be set to a disc, square or rectangular shape; a positioning groove 15 is provided on the spring seat 132 to adapt to the spring sheet 131, and a movable through-hole 16 is provided on the bottom surface of the positioning groove 15 for the middle part of the spring sheet 131 to deform up and down. Specifically, the connecting piece 11 is coaxially fixed to the spring sheet 131 and the air-floating shaft 1, and the positioning A fixing piece for fixing the spring piece 131 is provided in the groove 15, and the connecting cover 133 is detachably connected to the spring seat 132. Specifically, a first thread 17 is provided on the inner side wall of the positioning groove 15, and a second thread 18 adapted to the first thread 17 is provided on the outer side wall of the connecting cover 133, thereby facilitating the assembly and disassembly of the spring seat 132 and the connecting cover 133. At the same time, when the connecting cover 133 is tightened to the bottom surface of the positioning groove 15, it can cooperate with the spring seat 132 to clamp the spring piece 131, and the connecting cover 133 forms a fixing piece. In addition, the fixing piece can also be realized by screws, and the spring piece 131 can also be fixed in the positioning groove 15. In order to reduce friction, a fixed bearing 37 for fixing the connecting cover 133 is coaxially provided on the base 14.

[0044] Preferably, the spring piece 131 of this embodiment is disc-shaped, and an opening 19 is provided on the spring piece 131 to reduce the stress of the spring piece 131. There are multiple openings 19, and the multiple openings 19 are distributed in multiple layers along the radial direction of the spring piece 131. In order to match the shape of the spring piece 131 and ensure the stress balance of the spring piece 131, the multiple openings 19 are all semicircular and concentrically opposite to each other. Each pair of opposite openings 19 forms a group. The multiple groups of openings 19 are distributed in a ring shape with the center of the spring piece 131 as the center of the circle, and the rotation angle of each adjacent group of openings 19 is 90°. In addition, in order to monitor the pressure parameters during the processing at all times, a pressure sensor 36 can be configured to detect the elastic force when the spring piece is deformed.

[0045] Preferably, the suction nozzle groove 5 is in the shape of a trumpet with the open end being the larger end, and a conduction chamber 20 is provided at the bottom of the suction nozzle groove 5. When assembled in place, the air duct 8 in the suction nozzle 3 is connected to the conduction chamber 20, and an annular guide groove 38 is provided on the oblique side wall of the suction nozzle groove 5. The first negative pressure air duct 6 is connected to the annular guide groove 38 to adsorb and fix the suction nozzle 3 in the suction nozzle groove 5. The second negative pressure air duct 7 is connected to the conduction chamber 20 to conduct the air duct 8 in the suction nozzle 3 and then be used to adsorb the chip. In order to prevent the suction nozzle 3 from rotating, a positioning pin 21 is provided on the suction nozzle 3, and a card slot 22 for the positioning pin 21 to be connected is further opened on the inner wall of the suction nozzle groove 5.

[0046] Preferably, the air outlet 6b of the first negative pressure air channel 6 and the air outlet 7b of the second negative pressure air channel 7 are distributed along the axial direction of the air floating shaft 1, and the air outlet 6b of the first negative pressure air channel 6 and the air outlet 7b of the second negative pressure air channel 7 are each provided with multiple, and the negative pressure portion 100 is provided with a first annular groove 23 and a second annular groove 24 corresponding to the first negative pressure air channel 6 and the second negative pressure air channel 7, respectively, to form a balanced air chamber. When the air floating shaft 1 rotates and moves up and down, it is ensured that the first negative pressure air channel 6 and the first negative pressure air port 6a are always connected, and the second negative pressure air channel 7 and the second negative pressure air channel are always connected. The air pressure port 7a is always connected; a stroke groove 25 is longitudinally opened on the positive pressure part 200, and the positive pressure air duct 9 is connected to the stroke groove 25. There are multiple stroke grooves 25 and they are evenly distributed in an annular shape on the positive pressure part 200. On the one hand, it can ensure that the side wall of the air-floating shaft 1 is uniformly stressed in the circumferential direction. On the other hand, it can also ensure that the axial force on the side wall of the air-floating shaft 1 is balanced when the air-floating shaft 1 moves up and down and the force area is larger, thereby ensuring the air-floating stability of the air-floating shaft 1. It should be noted that the longitudinal width of the first annular groove 23 and the second annular groove and the length of the stroke groove 25 are both greater than or equal to the stroke of the air-floating shaft 1.

[0047] Preferably, the fixing seat 2 includes an air-dividing shaft 201 and an air-dividing shaft seat 202 sleeved on the outside of the air-dividing shaft 201. For the convenience of processing, a fixing hole 300 for fixing the air-dividing shaft 201 is pierced on the air-dividing shaft seat 202; the air-dividing shaft 201 is provided with a through hole running through both ends thereof, which forms an active cavity 4, and the outer wall of the air-dividing shaft 201 is provided with a sealing ring 26 for separating the first negative pressure air port 6a and the second negative pressure air port 7a and the positive pressure airway 9, so as to reduce the mutual interference of the air pressure in each airway. The air-dividing shaft seat 202 corresponds to the first negative pressure air port 6a and the second The negative pressure air port 7a and the positive pressure air channel 9 are provided with a first air nozzle 27, a second air nozzle 28 and a third air nozzle 29. Considering the cost and the aesthetics of the equipment, the positive pressure air channels 9 on the two positive pressure parts 200 are connected through a connecting air channel 39 opened in the air dividing shaft seat 202 and supply air through the third air nozzle 29; the upper end of the air dividing shaft 201 is provided with an annular positioning platform 30, and the air dividing shaft seat 202 is provided with a limiting groove 40 adapted to the positioning platform 30. In order to further ensure the stability of the air floating end cover 10, the positioning platform 30 is provided with an air outlet 31 for communicating with the air flow in the movable cavity 4. The positive pressure airway 9 of the upper part is connected, and the air outlet holes 31 are provided with multiple and annular evenly distributed on the positioning platform 30. An annular groove 32 connected to the multiple air outlet holes 31 is further provided on the upper surface of the positioning platform 30. An air flow buffer ring 33 is provided in the annular groove 32. An air flow buffer ring 33 is provided with an air outlet hole 31a corresponding to the air outlet hole 31 on the air flow buffer ring 33. The air flow buffer ring 33 can be made of graphite to play a buffering role. When the positive pressure air flow enters the air outlet hole 31, it is further ejected through the air outlet hole 31a, thereby blowing up the air floating end cover 10, and then the air floating shaft 1 and the suction nozzle. The gravity of the components is offset, which is more conducive to pressure regulation; the lower end of the air-divider shaft 201 passes through the active cavity 4 and is fixedly connected to the air-divider shaft seat 202 through the stop member 34. The stop member 34 is specifically a nut threaded with the air-divider shaft 201. The positioning platform 30 cooperates with the stop member to fix the air-divider shaft 201 to the air-divider shaft seat 202. In order to control the up and down stroke of the air-floating shaft 1, a stroke limit block 35 is provided on the air-floating shaft 1 below the stop member 34. By adjusting the up and down positions of the stroke limit block 35 and further cooperating with the stop member 34, the up and down displacement range of the air-floating shaft 1 can be adjusted.

[0048] The method of using the air-floating nozzle module of this solution includes the following steps:

[0049] Step S10: connecting the first negative pressure airway 6 and the second negative pressure airway 7 to a negative pressure air source, and adjusting a preset negative pressure;

[0050] Step 2 S20: The nozzle 3 is placed in the nozzle groove 5 and in place, so that the airway in the nozzle 3 is connected to the second negative pressure airway 7, and the nozzle 3 is sucked and fixed through the first negative pressure airway 6;

[0051] Step 3 S30: Connect the positive pressure airway 9 to the positive pressure air source and adjust the preset positive pressure to separate the air-floating shaft 1 from the inner wall of the movable chamber 4;

[0052] Step 4 S40 : driving the air bearing shaft 1 to rotate via the rotating mechanism 12 to adjust the rotation angle of the suction nozzle 3 .

[0053] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all such improvements and changes should fall within the scope of protection of the appended claims of the present invention.

Claims

1. An air-floating nozzle module, characterized in that: The cam is secured to the bottom of the airbag and has a cam face that is adapted to move the airbag upwards and downwards, the cam face being adapted to move the airbag upwards and downwards, the cam face being adapted to move the airbag upwards and downwards, the cam face being adapted to move the airbag downwards and downwards, the cam face being adapted to move the airbag upwards and downwards, the cam face being adapted to move the airbag downwards and downwards, the cam face being adapted to move the airbag downwards and downwards, the cam face being adapted to move the airbag downwards and downwards, the cam face being adapted to move the airbag downwards and downwards, the cam face being adapted to move the airbag downwards and downwards, the cam face being adapted to move the airbag downwards and downwards, the cam face being adapted to move the airbag downwards and downwards, the cam face being adapted to move the airbag downwards and downwards, the A rotating mechanism for driving the air-floating shaft to rotate is provided above the air-floating shaft, and the air-floating shaft is connected to the rotating mechanism through an elastic component; the rotating mechanism is a motor, and the elastic component includes a spring sheet coaxially connected to the air-floating shaft, a spring seat for fixing the spring sheet, and a connecting cover connecting the spring seat and the motor; a positioning groove is provided on the spring seat to adapt to the spring sheet, and a movable through-hole is provided on the bottom surface of the positioning groove for the middle part of the spring sheet to be deformed up and down, a fixing piece for fixing the spring sheet is provided in the positioning groove, and the connecting cover is detachably connected to the spring seat; The air outlet of the first negative pressure air channel and the air outlet of the second negative pressure air channel are distributed along the axial direction of the air floating shaft. The negative pressure part is provided with a first annular groove and a second annular groove corresponding to the first negative pressure air channel and the second negative pressure air channel respectively. The positive pressure part is longitudinally provided with a travel groove, and the positive pressure air channel is connected to the travel groove. There are multiple travel grooves and they are evenly distributed in an annular shape on the positive pressure part. The fixing seat includes an air-dividing shaft and an air-dividing shaft seat sleeved on the outside of the air-dividing shaft; the air-dividing shaft is provided with through holes running through both ends thereof, and the through holes form the active cavity; the outer wall of the air-dividing shaft is provided with a sealing ring that separates the first negative-pressure air port, the second negative-pressure air port and the positive-pressure air duct, and the air-dividing shaft seat is provided with a first air nozzle, a second air nozzle and a third air nozzle corresponding to the first negative-pressure air port, the second negative-pressure air port and the positive-pressure air duct respectively; the upper end of the air-dividing shaft is provided with a positioning platform, and the lower end of the air-dividing shaft passes through the active cavity and is fixedly connected to the air-dividing shaft seat through a stop member; The steps for using the air-floating nozzle module are as follows: Step 1: Connect the first negative pressure airway and the second negative pressure airway to the negative pressure air source and adjust the preset negative pressure; Step 2: Place the nozzle in the nozzle slot and position it in place so that the airway in the nozzle is connected to the second negative pressure airway, and fix the nozzle by suction through the first negative pressure airway; Step 3: Connect the positive pressure airway to the positive pressure air source and adjust the preset positive pressure to separate the air-floating shaft from the inner wall of the active cavity; Step 4: Drive the air bearing shaft to rotate through the rotating mechanism to adjust the rotation angle of the nozzle.

2. The air-floating nozzle module according to claim 1, characterized in that: The negative pressure portion is arranged in the middle of the active cavity, and the positive pressure portions are arranged at the upper and lower portions of the active cavity.

3. The air-floating nozzle module according to claim 2, characterized in that: An air-floating end cover is provided above the fixing seat, and the upper end of the air-floating shaft is connected to the air-floating end cover.

4. The air-floating nozzle module according to claim 1, wherein: The spring sheet is provided with openings for reducing the stress of the spring sheet. There are a plurality of openings, and the plurality of openings are distributed in multiple layers along the radial direction of the spring sheet.

5. The air-floating nozzle module according to claim 1, characterized in that: The suction nozzle groove is trumpet-shaped, and a conduction chamber is provided at the bottom of the suction nozzle groove. When assembled in place, the airway in the suction nozzle is connected to the conduction chamber, the first negative pressure airway is connected to the oblique side wall of the suction nozzle groove, and the second negative pressure airway is connected to the conduction chamber.

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