Micro coaxial radio frequency probe card

A technology of probe card and radio frequency, which is applied in the field of probe card and can solve the problem of unsatisfactory shielding effect

CN113376409APending Publication Date: 2021-09-10深圳市道格特科技有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2021-09-10

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Abstract

The invention relates to the technical field of probe cards, and discloses a micro coaxial radio frequency probe card, which is characterized in that a radio frequency probe is embedded in an isolation plastic sleeve, the isolation plastic sleeve is embedded in a grounding copper sleeve, and a second through hole matched with the radio frequency probe is concavely formed in the front end part of a probe shielding grounding head; the front end portion of the radio frequency probe is provided with a needle point which is of a cone-shaped structure, the needle point extends out of the second through hole, the two sides of the front end wall of the probe shielding grounding head are respectively provided with a shielding grounding needle which inclines inwards in a protruding mode, the needle point is arranged on the inner side of the shielding grounding needle, and the lower end portion of the coaxial radio frequency connector is provided with an insertion core. The lower end part of the bolt is provided with a second plug hole matched with the radio frequency probe, and the upper end part of the radio frequency probe is detachably embedded in the second plug hole, so that the shielding effect and the performance stability of the radio frequency probe are effectively improved, and the radio frequency probe card has the advantages of simple structure, low manufacturing cost, small insertion loss, low standing wave, stable performance and the like.
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Description

technical field

[0001] The invention relates to the technical field of probe cards, in particular to a micro-coaxial radio frequency probe card. Background technique

[0002] The transmission lines used in RF applications are generally coaxial cables connected to the circuit board, and microstrip lines arranged inside the circuit board. An RF probe is a measurement device used in electronic test equipment to measure radio frequency (RF) signals from electronic circuits in silicon wafers, dies, and open microchips. Additionally, RF probes are used in narrow pitch or high density RF interconnect applications in connector assemblies. Before the development of RF probes in 1980, there was no easy way to test monolithic microwave integrated circuit (MMIC) devices without mounting or bonding, so the test process often caused circuit integrity to be compromised. damage, causing system disturbances or reducing electrical loads. The first generation of RF probes used coplanar cera...

Examples

Embodiment Construction

[0026] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0027] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention are only used to explain the relationship between the components in a certain posture (as shown in the figure). Relative positional relationship, movement conditions, etc., if the specific posture changes, the directional indication will also change accordingly.

[0028] In addition, the technical solut...