Short-arc discharge lamp

Abstract

The present invention provides a short arc discharge lamp that enables early stable lighting by rapidly evaporating mercury at the time of lighting. The short arc discharge lamp is provided with: a discharge vessel having a light emitting tube portion and a pair of sealing tube portions continuously extending in opposite directions from upper and lower ends of the light emitting tube portion; a pair of electrodes disposed in opposition to each other inside the light emitting tube portion; a pair of lead rods connected to the pair of electrodes and extending inside the sealing tube portions; and a glass support cylinder disposed between an outer peripheral surface of the lead rods and an inner peripheral surface of the sealing tube portions in a manner to support the lead rods, the short arc discharge lamp having mercury sealed inside a light emitting space of the discharge vessel and being vertically lit, a storage portion for storing mercury when the discharge lamp is in an extinguished state being provided between the lead rod connected to the lower electrode and the support cylinder supporting the lead rod, the storage portion being a gap that is in communication with the light emitting space and is provided in an axial direction of the lead rod.

Description

TECHNICAL FIELD

[0001] The present application relates to a short-arc discharge lamp. BACKGROUND

[0002] An exposure apparatus used in a manufacturing process of a semiconductor element, a liquid crystal display element, or the like, and various projectors use a short-arc discharge lamp (hereinafter also referred to simply as "lamp") as a light source. This short-arc discharge lamp is configured such that an anode and a cathode are arranged in opposition to each other in a discharge vessel, and a lead rod having the anode or the cathode at a tip end thereof is supported by a glass-made support cylinder. In addition, mercury is enclosed in the discharge vessel as a light emitting substance.

[0003] Mercury evaporated at the time of lighting of such a lamp condenses and remains at the root of the lower electrode in an extinguished state. Here, in the case of vertical lighting, the mercury remains on the lower electrode side, that is, on the lower support cylinder.

[0004] Further, at the time of start of lighting of the lamp, the lead rod is heated by heat conduction from the electrode which is electrically heated by arc discharge between the electrodes, and the support cylinder is heated by heat conduction from the lead rod. The mercury is heated and evaporated by the heat conduction from the lead rod or the support cylinder, or the like.

[0005] In recent years, a lamp which radiates light having a large luminous intensity is required, and in conjunction therewith, the amount of enclosed mercury is increased, so that the mercury accumulated on the surface of the support cylinder cannot be rapidly evaporated, and it is difficult to stabilize the lighting as early as possible.

[0006] In order to solve such a problem, an attempt is made to arrange a heat conducting plate which comes into contact with the lead rod at the cathode side end portion in the light emitting space of the discharge vessel, and to rapidly evaporate the mercury at the time of lighting (Patent Document 1).

[0007] PRIOR ART DOCUMENTS

[0008] PATENT DOCUMENTS

[0009] Patent Document 1: Japanese Patent Application Laid-Open (kokai) No. 2001-15070 SUMMARY

[0010] PROBLEMS TO BE SOLVED BY THE INVENTION

[0011] However, in the technology of Patent Document 1, since the structure is such that the lead rod passes through the heat conducting plate having a hole, it is necessary to make the inner diameter of the hole of the heat conducting plate slightly larger than the outer diameter of the lead rod, and since there is a gap between the lead rod and the heat conducting plate, there is a problem that heat of the lead rod cannot be well transmitted to the heat conducting plate.

[0012] In addition, for example, when it is intended to weld the lead rod and the heat conducting plate to solve the problem, there is a problem that the glass-made support cylinder is broken by heat at the time of welding.

[0013] In addition, with the increase in size and the increase in life of the lamp, the size of the cathode is increased, and the radiation light from the arc cannot reach the heat conducting plate (becomes the shadow of the cathode), and thus the heating effect due to the radiation of the arc cannot be obtained, and the problem that the evaporation promoting effect of the mercury is small occurs.

[0014] The present application is made in view of the above problem, and an object thereof is to provide a short arc type discharge lamp which makes the mercury rapidly evaporate at the time of lighting and can stabilize the lighting as early as possible.

[0015] Technical solution for solving the problem

[0016] The short arc type discharge lamp according to the present application includes: a discharge vessel having a light emitting tube portion and a pair of sealing tube portions continuously extending in opposite directions from upper and lower ends of the light emitting tube portion;

[0017] a pair of electrodes disposed in opposition to each other in the inside of the light emitting tube portion;

[0018] a pair of lead rods connected to the pair of electrodes and extending in the sealing tube portions; and

[0019] a glass support cylinder disposed between the outer peripheral surface of the lead rod and the inner peripheral surface of the sealing tube portion in a manner of supporting the lead rod,

[0020] the short arc type discharge lamp encloses mercury in a light emitting space of the discharge vessel and is vertically lit, wherein

[0021] a storage portion which stores the mercury when the discharge lamp is in an extinguished state is provided between the lead rod connected to the lower one of the electrodes and the support cylinder supporting the lead rod,

[0022] the storage portion is a gap which communicates with the light emitting space and is provided in the axial direction of the lead rod.

[0023] According to this structure, since the storage portion which stores the mercury when the discharge lamp is in an extinguished state is provided adjacent to the lead rod, the mercury is directly heated by the heat conduction from the lead rod. As a result, the short arc type discharge lamp according to the present application makes the mercury rapidly evaporate at the time of lighting and can stabilize the lighting as early as possible.

[0024] In the short arc type discharge lamp according to the present application, the gap can be constituted by a D-cut surface in which a part of the outer peripheral surface of the lead rod in the circumferential direction is cut into a flat surface and the inner peripheral surface of the support cylinder.

[0025] In the short arc discharge lamp of the present application, the gap can be formed by a reduced diameter portion in which an axial portion of the outer peripheral surface of the lead rod is reduced in diameter and the inner peripheral surface of the support cylinder.

[0026] In the short arc discharge lamp of the present application, the gap can be formed by a first groove extending in the axial direction provided in the outer peripheral surface of the lead rod and the inner peripheral surface of the support cylinder.

[0027] In the short arc discharge lamp of the present application, the gap can be formed by a second groove extending in the axial direction of the lead rod provided in the inner peripheral surface of the support cylinder and the outer peripheral surface of the lead rod.

[0028] In the short arc discharge lamp of the present application, the outer peripheral surface of the lead rod and the inner peripheral surface of the support cylinder are separated over the entire circumference,

[0029] A gap forming member is disposed in a portion of the circumference between the outer peripheral surface of the lead rod and the inner peripheral surface of the support cylinder,

[0030] The gap is formed by the circumferential side surface of the gap forming member, the outer peripheral surface of the lead rod, and the inner peripheral surface of the support cylinder.

[0031] In addition, the short arc discharge lamp of the present application includes: a discharge vessel having a light emitting tube portion and a pair of sealing tube portions continuously extending in opposite directions from the upper and lower ends of the light emitting tube portion;

[0032] a pair of electrodes disposed opposite each other inside the light emitting tube portion;

[0033] a pair of lead rods connected to the pair of electrodes and extending inside the sealing tube portions; and

[0034] a support cylinder made of glass disposed between the outer peripheral surface of the lead rods and the inner peripheral surface of the sealing tube portions in a manner to support the lead rods,

[0035] the short arc discharge lamp encloses mercury in a light emitting space of the discharge vessel and is vertically lit, wherein

[0036] a storage portion that stores mercury when the discharge lamp is in an extinguished state is provided between the lead rod connected to the lower one of the electrodes and the support cylinder supporting the lead rod,

[0037] the storage portion is a spiral-shaped gap that communicates with the light emitting space.

[0038] According to this structure, since the mercury storage section is positioned adjacent to the lead bar when the discharge lamp is off, the mercury is directly heated through heat conduction from the lead bar. As a result, the short-arc discharge lamp of the present invention allows the mercury to evaporate rapidly upon ignition, enabling it to achieve stable ignition as early as possible.

[0039] In the short-arc discharge lamp of the present invention, the spiral gap may also be formed by a spiral third groove formed on the outer peripheral surface of the lead bar and the inner peripheral surface of the support cylinder, or by a spiral fourth groove formed on the inner peripheral surface of the support cylinder and the outer peripheral surface of the lead bar.

[0040] In the short-arc discharge lamp of the present invention, the outer peripheral surface of the lead rod may also be separated from the inner peripheral surface of the supporting cylinder along its entire circumference.

[0041] Between the outer circumferential surface of the lead bar and the inner circumferential surface of the support cylinder, a coil is disposed to hold the wire-like component wound into a spiral shape with gaps between it.

[0042] The spiral gap is formed by the gap of the coil, the outer circumferential surface of the lead bar, and the inner circumferential surface of the supporting cylinder.

[0043] In the short-arc discharge lamp of the present invention, the lower end of the storage section may be located above the lower end face of the lead bar. Attached Figure Description

[0044] Figure 1 This is an explanatory diagram showing the structure of the short-arc discharge lamp according to the first embodiment.

[0045] Figure 2 yes Figure 1 The enlarged view of region A of the short arc discharge lamp shown.

[0046] Figure 3 yes Figure 2 The BB cross-sectional view of the short arc discharge lamp shown.

[0047] Figure 4 This is a diagram showing the mercury storage status in the extinguished state of a short-arc discharge lamp.

[0048] Figure 5 It is a graph showing the change in lamp voltage from the moment it is lit, as in the embodiments, etc.

[0049] Figure 6 This is a cross-sectional view of the short-arc discharge lamp according to the second embodiment.

[0050] Figure 7 This is a cross-sectional view of the short-arc discharge lamp according to the third embodiment.

[0051] Figure 8 This is a cross-sectional view of the short-arc discharge lamp according to the fourth embodiment.

[0052] Figure 9 This is a cross-sectional view of the short-arc discharge lamp according to the fifth embodiment.

[0053] Figure 10 This is a cross-sectional view of the short-arc discharge lamp according to the sixth embodiment.

[0054] Figure 11 This is a cross-sectional view of the short-arc discharge lamp according to the seventh embodiment.

[0055] Figure 12 This is a cross-sectional view of a short-arc discharge lamp as described in other embodiments. Detailed Implementation

[0056] Embodiments of the short-arc discharge lamp according to the present invention will be described with reference to the accompanying drawings. Furthermore, the following drawings are schematic illustrations, and the aspect ratios shown in the drawings may not necessarily match the actual aspect ratios, nor may the aspect ratios be consistent between different drawings.

[0057] The following explanation will refer to the XYZ coordinate system as appropriate. Furthermore, in this specification, when indicating direction, if a direction is distinguished by positive or negative signs, it will be labeled with a positive or negative symbol, such as "+X direction" or "-X direction". If a direction is not distinguished by positive or negative signs, it will only be described as "X direction". That is, in this specification, when only "X direction" is described, it includes both "+X direction" and "-X direction". The same applies to the Y and Z directions. In this embodiment, the horizontal plane is parallel to the XY plane, and the vertical direction is the -Z direction.

[0058] [First Implementation Method]

[0059] Figure 1 This is an explanatory diagram showing the structure of the short-arc discharge lamp according to the first embodiment. The short-arc discharge lamp 100 (hereinafter referred to as "lamp 100") includes a discharge capacitor 1, an anode 2 and a cathode 3 arranged vertically opposite each other, a first lead bar 4, a second lead bar 5, a first support cylinder 6, and a second support cylinder 7.

[0060] Lamp 100 is illuminated vertically. The term "vertical illumination" in this invention includes not only illumination when a pair of electrodes (anode 2 and cathode 3) are arranged opposite each other in a vertical direction, but also illumination when a pair of electrodes are arranged opposite each other at an angle other than 90° relative to the vertical direction. That is, "vertical illumination" in this invention is a concept other than illumination when a pair of electrodes are arranged completely opposite each other in a horizontal direction (horizontal illumination), including illumination when a pair of electrodes are arranged at different heights. The lamp 100 of this embodiment is a large lamp used in exposure apparatuses or the like in the manufacturing processes of semiconductor devices, liquid crystal display devices, etc., with a rated power of, for example, 2kW to 35kW.

[0061] The discharge capacitor 1 is composed of a light-emitting tube section 10 and a first sealing tube section 11 and a second sealing tube section 12 that extend continuously from the upper and lower ends of the light-emitting tube section 10 in opposite directions, respectively. The discharge capacitor 1 is integrally formed of quartz glass, for example.

[0062] The light-emitting tube section 10 is formed by bulging out the center of a glass tube. The light-emitting tube section 10 is a region of a glass tube whose inner diameter increases from the lower end in the -Z direction and the upper end in the +Z direction toward the center. The approximate shape of the light-emitting tube section 10 is a sphere or an ellipsoid.

[0063] The first sealing tube portion 11 is connected to the upper end of the light-emitting tube portion 10 and extends upward (in the +Z direction). The second sealing tube portion 12 is connected to the lower end of the light-emitting tube portion 10 and extends downward (in the -Z direction). That is, the discharge capacitor 1 is configured such that the light-emitting tube portion 10 is sandwiched between the first sealing tube portion 11 and the second sealing tube portion 12. The central axes of the first sealing tube portion 11 and the second sealing tube portion 12 overlap. Figure 1 The axis Z1 is indicated. Furthermore, it is preferable that axis Z1 passes through the center point of the light-emitting diode section 10.

[0064] The first sealing tube portion 11 has a narrowed portion 11a in the Z direction, where a portion of the diameter is reduced. In the Z direction, the inner diameter of the narrowed portion 11a is smaller than the inner diameter of its surrounding area. Similarly, the second sealing tube portion 12 has a narrowed portion 12a in the Z direction, where a portion of the diameter is reduced. In the Z direction, the inner diameter of the narrowed portion 12a is smaller than the inner diameter of its surrounding area.

[0065] A light-emitting space S1 is formed inside the light-emitting tube section 10, the first sealing tube section 11, and the second sealing tube section 12. In addition to light-emitting substances such as mercury, a buffer gas such as argon or xenon is also sealed in the light-emitting space S1 for starting assistance.

[0066] Inside the light-emitting tube section 10, the anode 2 and the cathode 3 are arranged opposite to each other. The anode 2 is arranged on the upper side, and the cathode 3 is arranged on the lower side. In this embodiment, the so-called short-arc discharge lamp is a discharge lamp in which the anode 2 and the cathode 3 are arranged opposite to each other with a gap of 40 mm or less (the value at room temperature without thermal expansion).

[0067] The first lead bar 4 is connected to the anode 2 and extends along the Z direction within the first sealing tube portion 11. The anode 2 is fixed to the front end 4a of the first lead bar 4. The second lead bar 5 is connected to the cathode 3 and extends along the Z direction within the second sealing tube portion 12. The cathode 3 is fixed to the front end 5a of the second lead bar 5. The central axes of the first lead bar 4 and the second lead bar 5 preferably overlap with axis Z1. The first lead bar 4 and the second lead bar 5 are made of a material containing a high-melting-point metal, such as tungsten.

[0068] The lamp holder 91 covers the side of the first sealing tube 11 away from the anode 2 (+Z direction side), and the lamp holder 92 covers the side of the second sealing tube 12 away from the cathode 3 (-Z direction side). Additionally, in Figure 1 In the diagram, lamp holder 92 is shown in a cross-sectional view, and lamp holder 91 is shown in a side view. However, the lamp holder 91 and the first sealing tube portion 11 have the same structure as the lamp holder 92 and the second sealing tube portion 12. Therefore, the structure of the lamp holder 92 and the second sealing tube portion 12 will be mainly described below.

[0069] Inside the second sealing tube section 12, near the light-emitting tube section 10, a second support cylinder 7 made of glass (e.g., quartz glass) is disposed. The second support cylinder 7 has a bore with an inner diameter slightly larger than the outer diameter of the second guide rod 5, through which the second guide rod 5 is inserted. Furthermore, a metal foil, such as molybdenum foil (not shown), is disposed between the second lead rod 5 and the second support cylinder 7 to prevent shaking and welding. If the second lead rod 5 and the second support cylinder 7 are welded together, the difference in thermal expansion coefficients between glass and tungsten could potentially cause cracks in the second support cylinder 7, leading to breakage. Therefore, the metal foil is provided to prevent this. Additionally, the outer circumferential surface of the second support cylinder 7 is hermetically welded to the inner circumferential surface of the narrowed portion 12a of the second sealing tube section 12.

[0070] A sealing glass component 81 is disposed below the second support cylinder 7 within the second sealing tube section 12. The sealing glass component 81 has a tapered portion 81a that tapers towards the second support cylinder 7 and a main body portion 81b connected to the tapered portion 81a. The outer diameter of the cylindrical main body portion 81b is slightly smaller than the inner diameter of the second sealing tube section 12. Furthermore, the sealing glass component 81 has a hole 81c extending from the lower end of the main body portion 81b in the +Z direction, into which an external lead rod 82 is inserted. The lamp holder 92 is electrically connected to the external lead rod 82.

[0071] On the outer peripheral surface of the sealing glass component 81, a plurality of strip-shaped metal foils 83 made of molybdenum are separated from each other in the circumferential direction of the sealing glass component 81 and are arranged to extend from the upper end to the lower end of the sealing glass component 81. The upper end of each metal foil 83 extends along the upper end surface of the sealing glass component 81 and is connected to the second lead bar 5, and the lower end of each metal foil 83 extends along the lower end surface of the sealing glass component 81 and is connected to the outer lead bar 82. In addition, the outer peripheral surface of the sealing glass component 81 is hermetically fused to the inner peripheral surface of the second sealing tube portion 12 through the metal foils 83.

[0072] At the lower end of the sealing glass component 81, a glass outer lead bar cylinder 84 with a cylindrical hole that matches the outer diameter of the outer lead bar 82 is arranged with the outer lead bar 82 inserted through it. The outer peripheral surface of the outer lead bar cylinder 84 is airtightly fused to the inner peripheral surface of the second sealing tube portion 12.

[0073] A storage section S2 for storing mercury is provided between the second lead bar 5 and the second support cylinder 7 that supports the second lead bar 5, for storing mercury when the lamp 100 is in the off state. The storage section S2 is a gap that communicates with the light-emitting space S1 and is provided along the axial direction of the second lead bar 5. The volume of the storage section S2 is determined by the amount of mercury sealed in the light-emitting space S1.

[0074] Figure 2 yes Figure 1 A magnified view of area A of lamp 100 shown. Figure 3 yes Figure 2 The diagram shows a BB cross-sectional view of the lamp 100. In this embodiment, the storage section S2 is a gap formed by a D-cut surface 51, a portion of the outer peripheral surface 5b of the second guide rod 5 being cut into a planar shape, and the inner peripheral surface 7a of the second support cylinder 7. Two D-cut surfaces 51 are formed, and the two D-cut surfaces 51 are arranged opposite each other across the central axis of the second guide rod 5. However, the number and arrangement of the D-cut surfaces 51 are not particularly limited; for example, only one D-cut surface 51 may be provided, or three D-cut surfaces 51 may be arranged at equal intervals in the circumferential direction of the second guide rod 5.

[0075] The distance 5r from the outer peripheral surface 5b of the second lead bar 5 to the D-cut surface 51 is, for example, 0.5 to 2 mm. Furthermore, the distance 5r is 4 to 40% of the radius 5R of the second lead bar 5.

[0076] The D-cut surface 51 is located at the axial center of the second lead bar 5. Furthermore, the D-cut surface 51 is positioned to extend beyond the upper end face 7b of the second support cylinder 7. The distance 5z from the upper end face 7b to the lower end of the D-cut surface 51 is appropriately set according to the amount of mercury sealed within the light-emitting space S1. The distance 5z is, for example, 5 to 20 mm.

[0077] The D-cut surface 51 is located at the axial center of the second lead bar 5, but does not reach the lower end face 5c of the second lead bar 5. That is, the lower end of the storage part S2 is located above the lower end face 5c of the second guide bar 5. As a result, the mercury will not come into contact with the lower end face 5c of the second lead bar 5.

[0078] Next, the operation of lamp 100 will be explained based on the accompanying drawings.

[0079] Figure 4 This diagram illustrates the mercury storage status when lamp 100 is off. In the off state of lamp 100, as... Figure 4 As shown, mercury H is condensed and stored below the lower electrode (cathode 3 in this embodiment) of the pair of electrodes (anode 2 and cathode 3) and on the upper end surface 7b of the second support cylinder 7. Furthermore, in the lamp 100 of this embodiment, mercury H is also stored in the storage section S2.

[0080] When the lamp 100 is turned on, the cathode 3 is heated by an electric arc discharge between the electrodes. Furthermore, the second lead bar 5 is heated by heat conduction from the heated cathode 3. At this time, the lamp 100 of this embodiment is provided with a storage section S2, in which the second lead bar 5 contacts the mercury H. Therefore, compared to a lamp without a storage section S2, the contact area between the second lead bar 5 and the mercury is larger.

[0081] As the mercury H evaporates, the lamp voltage of lamp 100 rises sharply, eventually reaching the rated voltage and thus illuminating stably. According to this embodiment, since the mercury H is directly heated through heat conduction from the second lead bar 5, the mercury H accumulated on the upper end face 7b of the second support cylinder 7 evaporates rapidly, thereby reaching the rated voltage as early as possible. As a result, lamp 100 can be stably illuminated as early as possible.

[0082]

Example

[0083] Hereinafter, embodiments illustrating the structure and effects of the present invention will be described. A short-arc discharge lamp of the following specifications is used as an example.

[0084] [Discharge Capacitor]

[0085] Material = Quartz glass, Overall length = 175mm

[0086] LED section: Maximum outer diameter = 140mm, maximum inner diameter = 127mm

[0087] Sealed tube section: Outer diameter = 35mm

[0088] [anode]

[0089] Material: Tungsten; Outer diameter: 35mm; Overall length: 65mm

[0090] [cathode]

[0091] Material = Thorium-coated tungsten, outer diameter = 25mm, overall length = 40mm

[0092] [Anode side lead bar]

[0093] Material = Tungsten, Outer Diameter = 8mm

[0094] [Cathode side lead bar]

[0095] Material = Tungsten, Outer Diameter = 10mm

[0096] [Cylinder for Anode Side Support]

[0097] Material = Quartz glass, Overall length = 29mm, Outer diameter = 27mm

[0098] [Cathode-side support cylinder]

[0099] Material = Quartz glass, Overall length = 26mm, Outer diameter = 25mm

[0100] [Storage Department]

[0101] A portion of the cathode-side lead bar with an outer diameter of 10 mm is subjected to double-sided D-cutting (the resulting planes are machined so that they face each other). The distance from the outer circumferential surface of the cathode-side lead bar to the D-cut surface is 2 mm, and the storage capacity is 425 mm. 3 .

[0102] [Luminescent material]

[0103] Mercury amount = 32g

[0104] [Buffer gas]

[0105] Xenon: Sealing pressure = one atmosphere

[0106] [Kyokuma]

[0107] The distance between the anode tip and the cathode tip is 17mm.

[0108] [Electrical properties]

[0109] Rated power = 16kW, rated voltage = 134V, rated current = 119A

[0110] A lamp without a storage compartment, as described above in the short-arc discharge lamps, was used as a comparative example. For the embodiments, the change in lamp voltage from the start of illumination was measured. The measurement results are shown below. Figure 5The voltage is expressed as 100% of the voltage at which stable illumination occurs. The voltage increases with the increase of mercury vapor pressure in the luminous space. That is, the voltage is correlated with the mercury vapor pressure in the luminous space.

[0111] like Figure 5 As shown, in the comparative example, the voltage reached 100% in approximately 14 minutes, and in the embodiment, the voltage reached 100% in approximately 12 minutes. Therefore, it can be seen that the lamp of the present invention, compared to conventional lamps, has a faster voltage rise and a quicker transition to stable operation. That is, in the lamp of the present invention, compared to conventional lamps, the time until it transitions to stable operation and is able to provide illumination is shorter.

[0112] [Second Implementation]

[0113] exist Figure 6 In the lamp 100 of the second embodiment shown, the storage section S2 is a gap formed by a reduced-diameter section 52, which is a portion of the outer peripheral surface 5b of the second lead bar 5 that is axially reduced, and the inner peripheral surface 7a of the second support cylinder 7. The reduced-diameter section 52 is provided at the axial center of the second lead bar 5. Furthermore, Figure 6 The sectional view shown is Figure 3 Similarly, corresponding to Figure 2 The BB section view of lamp 100 is shown. (To be continued...) Figures 7-9 The same applies to China.

[0114] [Third Implementation Method]

[0115] exist Figure 7 In the lamp 100 of the third embodiment shown, the storage section S2 is a gap formed by a first groove 53 extending axially on the outer peripheral surface 5b of the second lead bar 5 and the inner peripheral surface 7a of the second support cylinder 7. In this example, six first grooves 53 are formed at equal intervals along the circumferential direction on the outer peripheral surface 5b of the second lead bar 5. The first grooves 53 are located at the axial center of the second lead bar 5.

[0116] [Fourth Implementation Method]

[0117] exist Figure 8 In the lamp 100 of the fourth embodiment shown, the storage section S2 is a gap formed by a second groove 71 extending axially along the second lead bar 5 and provided on the inner peripheral surface 7a of the second support cylinder 7, and the outer peripheral surface 5b of the second lead bar 5. In this example, two second grooves 71 are formed at equal intervals along the circumferential direction on the inner peripheral surface 7a of the second support cylinder 7. The second grooves 71 may also be provided to reach the lower end surface of the second support cylinder 7. Alternatively, the second grooves 71 may be grooves continuously formed along the circumferential direction on the inner peripheral surface 7a of the second support cylinder 7.

[0118] [Fifth Implementation]

[0119] exist Figure 9 In the lamp 100 of the fifth embodiment shown, the outer peripheral surface 5b of the second lead bar 5 is separated from the inner peripheral surface 7a of the second support cylinder 7 circumferentially. A gap forming member 57 is disposed in a circumferential portion between the outer peripheral surface 5b of the second lead bar 5 and the inner peripheral surface 7a of the second support cylinder 7. The gap forming member 57 is a member with an arc-shaped cross-section, which abuts against a circumferential portion of the outer peripheral surface 5b of the second lead bar 5 and a circumferential portion of the inner peripheral surface 7a of the second support cylinder 7. The thickness of the gap forming member 57 is, for example, 0.2 mm to 2 mm. Thus, the storage section S2 becomes a gap formed by the circumferential side surface 57a of the gap forming member 57, the outer peripheral surface 5b of the second lead bar 5 that does not contact the gap forming member 57, and the inner peripheral surface 7a of the second support cylinder 7 that does not contact the gap forming member 57.

[0120] [Sixth Implementation Method]

[0121] The storage section S2 can also be a spiral-shaped gap disposed between the second lead bar 5 and the second support cylinder 7 and communicating with the light-emitting space S1. Figure 10 In the lamp 100 of the sixth embodiment shown, the storage section S2 is a spiral-shaped gap formed by a spiral third groove 54 formed on the outer peripheral surface 5b of the second guide rod 5 and the inner peripheral surface 7a of the second support cylinder 7. By forming the storage section S2 with a spiral-shaped gap, the support function of the second support cylinder 7 for the second lead rod 5 can be ensured, and the contact area between the second lead rod 5 and the mercury can be increased.

[0122] Alternatively, the storage section S2 may also be a spiral-shaped gap formed by a spiral fourth groove (not shown) formed on the inner circumferential surface 7a of the second support cylinder 7 and the outer circumferential surface 5b of the second lead bar 5.

[0123] [Seventh Implementation Method]

[0124] exist Figure 11 In the lamp 100 of the seventh embodiment shown, the outer peripheral surface 5b of the second lead bar 5 and the inner peripheral surface 7a of the second support cylinder 7 are separated circumferentially, and a coil 58 is disposed between the outer peripheral surface 5b of the second lead bar 5 and the inner peripheral surface 7a of the second support cylinder 7. The coil 58 is formed by winding a wire-like component into a spiral shape while leaving a gap, and abuts against the outer peripheral surface 5b of the second lead bar 5 and the inner peripheral surface 7a of the second support cylinder 7. As a result, the storage section S2 becomes a gap formed by the gap of the coil 58, the outer peripheral surface 5b of the second lead bar 5, and the inner peripheral surface 7a of the second support cylinder 7.

[0125] The embodiments of the present invention have been described above based on the accompanying drawings, but it should be understood that the specific structure is not limited to these embodiments. The scope of the present invention is not limited to the description of the above embodiments, but is shown by the scope of the claims, and includes all modifications within the scope and meaning equivalent to the scope of the claims.

[0126] The structures employed in the above embodiments can be applied to any other embodiments. The specific structure of each part is not limited to the above embodiments, but can be modified in various ways without departing from the spirit of the invention. Furthermore, one or more of the structures or methods described in the various modifications below can be arbitrarily selected and applied to the structures or methods involved in the above embodiments.

[0127] (1) In Figure 2 , Figure 10 In the lamp 100 shown, the lower end of the storage section S2 is located above the lower end face 5c of the second lead bar 5, but it is not limited to this. Alternatively, as shown... Figure 11 As shown in lamp 100, the lower end of the storage section S2 is located at the same height as the lower end face 5c of the second lead bar 5. However, when the second lead bar 5 is provided with a D-cut surface 51 or a first groove 53, it is preferable that the D-cut surface 51 or the first groove 53 does not reach the lower end face 5c of the second lead bar 5, and the lower end of the storage section S2 is located above the lower end face 5c of the second lead bar 5.

[0128] (2) In the lamp 100 described in the above embodiment, the anode 2 is disposed on the upper side and the cathode 3 is disposed on the lower side, but it is not limited to this. Alternatively, as... Figure 12 As shown, the cathode 3 is positioned on the upper side, and the anode 2 is positioned on the lower side. In this case, the storage section S2 is located between the first lead bar 4 and the first support cylinder 6.

[0129] Label Explanation

[0130] 1: Discharge capacitor

[0131] 2: Anode

[0132] 3: Cathode

[0133] 4: First lead bar

[0134] 5: Second lead bar

[0135] 5b: Outer circumferential surface of the second lead bar

[0136] 5c: Lower end face of the second lead bar

[0137] 6: First support cylinder

[0138] 7: Second support cylinder

[0139] 7a: Inner circumferential surface of the second support cylinder

[0140] 7b: Upper end face of the second support cylinder

[0141] 10: Light-emitting diode section

[0142] 11: First sealing tube section

[0143] 12: Second sealing tube section

[0144] 51:D cut surface

[0145] 52: Reduction section

[0146] 53: First slot

[0147] 54: Third slot

[0148] 57: Void Forming Component

[0149] 57a: Circumferential side surface of the void-forming component

[0150] 58: Coil

[0151] 71: Second slot

[0152] 100: Short-arc discharge lamp (lamp)

[0153] H: Mercury

[0154] S1: Illuminated Space

[0155] S2: Storage Section

[0156] Z1: Axis

Claims

1. A short-arc discharge lamp, comprising: A discharge capacitor has a light-emitting tube portion and a pair of sealed tube portions extending continuously in opposite directions from the upper and lower ends of the light-emitting tube portion; A pair of electrodes are arranged opposite each other inside the light-emitting diode section; A pair of lead rods are respectively connected to a pair of said electrodes and extend inside the sealed tube; and A glass support cylinder is disposed between the outer circumferential surface of the lead bar and the inner circumferential surface of the sealing tube section to support the lead bar. The short-arc discharge lamp is characterized by having mercury sealed within the luminous space of the discharge capacitor and being illuminated vertically. Between the lead rod connected to the lower electrode of the electrodes and the support cylinder supporting the lead rod, a storage section is provided for storing mercury when the discharge lamp is extinguished. The storage section is a gap that communicates with the light-emitting space and is provided along a portion of the axial direction of the lead bar, with the lower end of the storage section located above the lower end face of the lead bar.

2. The short-arc discharge lamp according to claim 1, characterized in that, The gap is formed by a D-cut surface, which is a portion of the outer circumferential surface of the lead bar cut into a planar shape, and the inner circumferential surface of the supporting cylinder.

3. The short-arc discharge lamp according to claim 1, characterized in that, The gap is formed by a reduced diameter portion of the outer peripheral surface of the lead bar and the inner peripheral surface of the support cylinder.

4. The short-arc discharge lamp according to claim 1, characterized in that, The gap is formed by a first groove extending axially on the outer peripheral surface of the lead bar and the inner peripheral surface of the support cylinder.

5. The short-arc discharge lamp according to claim 1, characterized in that, The gap is formed by a second groove extending axially along the lead bar on the inner circumferential surface of the support cylinder and the outer circumferential surface of the lead bar.

6. The short-arc discharge lamp according to claim 1, characterized in that, The outer circumferential surface of the lead bar is separated from the inner circumferential surface of the supporting cylinder around its entire circumference. A gap-forming component is disposed in a portion of the circumferential direction between the outer peripheral surface of the lead bar and the inner peripheral surface of the support cylinder. The gap is formed by the circumferential side of the gap forming component, the outer circumferential surface of the lead bar, and the inner circumferential surface of the supporting cylinder.

7. A short-arc discharge lamp, comprising: A discharge capacitor has a light-emitting tube portion and a pair of sealed tube portions extending continuously in opposite directions from the upper and lower ends of the light-emitting tube portion; A pair of electrodes are arranged opposite each other inside the light-emitting diode section; A pair of lead rods are respectively connected to a pair of said electrodes and extend inside the sealed tube; and A glass support cylinder is disposed between the outer circumferential surface of the lead bar and the inner circumferential surface of the sealing tube section to support the lead bar. The short-arc discharge lamp is characterized by having mercury sealed within the luminous space of the discharge capacitor and being illuminated vertically. Between the lead rod connected to the lower electrode of the electrodes and the support cylinder supporting the lead rod, a storage section is provided for storing mercury when the discharge lamp is extinguished. The storage section is a spiral-shaped void that communicates with the light-emitting space.

8. The short-arc discharge lamp according to claim 7, characterized in that, The spiral gap is formed by a spiral third groove formed on the outer peripheral surface of the lead bar and the inner peripheral surface of the support cylinder, or by a spiral fourth groove formed on the inner peripheral surface of the support cylinder and the outer peripheral surface of the lead bar.

9. The short-arc discharge lamp according to claim 7, characterized in that, The outer circumferential surface of the lead bar is separated from the inner circumferential surface of the supporting cylinder around its entire circumference. Between the outer circumferential surface of the lead bar and the inner circumferential surface of the support cylinder, a coil is disposed to hold the wire-like component wound into a spiral shape with gaps between it. The spiral gap is formed by the gap of the coil, the outer circumferential surface of the lead bar, and the inner circumferential surface of the supporting cylinder.

10. The short-arc discharge lamp according to any one of claims 7 to 9, characterized in that, The lower end of the storage section is located above the lower end face of the lead bar.

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