A piezoelectric pump with a vertical valve plate and a split pump body structure

Abstract

The present invention discloses a piezoelectric pump with a vertical valve plate and a split pump body structure, which includes: a pump body, a pump cavity, an integrated valve plate body, a valve chamber, a flow channel and a piezoelectric vibrator; the pump body includes: a left pump body and a right pump body; the integrated valve plate body is arranged between the left pump body and the right pump body and fits together; the integrated valve plate body is provided with a flow channel through hole, and a connecting cavity is provided on the split surface of the pump body, and the valve chamber and the flow channel through hole are connected through the flow channel. The split surface of the pump body is a folded surface or a curved surface, and the integrated valve plate body is assembled in a manner that conforms to the trend of the split surface interface; this assembly method means that in a smaller volume space, multiple valve plates can be arranged on the integrated valve plate body; when the split surface of the pump body is a curved surface, the film valve plate in the vertical valve plate is subjected to the prestress caused by the bending deformation, so that the valve plate has a faster reset speed after being deformed to the corresponding chamber. It has the characteristics of a check effect, accurate output flow and high output pressure, thereby effectively improving the problems existing in the existing piezoelectric pump.

Description

Technical Field

[0001] The invention belongs to the technical field of fluid conveying devices, and in particular relates to a piezoelectric pump with a vertical valve plate and a split pump body structure. Background Art

[0002] With the advent of the information age, integration and miniaturization have become the development trend of many industries and fields.

[0003] In recent years, with the continuous development of micro-electromechanical system technology, microfluidic systems, as an important branch of micro-electromechanical systems, have attracted much attention. Micropumps are one of the key driving components of microfluidic systems and can determine the stability and reliability of microfluidic systems. Compared with micropumps driven by other methods, micropumps driven by piezoelectric vibrators have the characteristics of simple structure, small size, low energy consumption, and fast response. They have always played an important role in aerospace, biomedicine, chemistry and chemical engineering and other fields. Piezoelectric micropumps use the inverse piezoelectric effect of piezoelectric chips to cause periodic deformation of piezoelectric vibrators, resulting in periodic changes in the pressure difference inside and outside the pump chamber to achieve the purpose of conveying fluids. There are still many problems with existing piezoelectric micropumps:

[0004] 1. The output pressure of piezoelectric pumps is generally low and cannot be used in situations with high pressure differences;

[0005] 2. The valve plate of the piezoelectric pump has poor cut-off performance, making it difficult to accurately control the output flow of the piezoelectric pump. Summary of the invention

[0006] The purpose of the present invention is to solve the above problems and provide a piezoelectric pump with a vertical valve plate and a split pump body structure;

[0007] A piezoelectric pump with a vertical valve plate and a split pump body structure, comprising: a pump body 1, a pump cavity, an integrated valve plate body 2, a valve chamber, a flow channel and a piezoelectric vibrator 3;

[0008] The pump body 1 comprises: a left pump body 11 and a right pump body 12; the integrated valve plate body 2 is arranged between the left pump body 11 and the right pump body 12, and its main body is fitted with their split surfaces;

[0009] The integrated valve plate body 2 is provided with a flow channel through hole 21, and valve plates 22 are provided on both sides of the flow channel through hole 21;

[0010] The valve chamber is arranged on the left and / or right pump body section surface;

[0011] A connecting cavity is provided on the left and / or right pump body split surface, located at the flow channel through hole and communicated with the pump cavity;

[0012] The valve chamber and the flow channel through hole 21 are connected through the flow channel.

[0013] The left pump body split surface is a folded surface or a smooth curved surface, and the right pump body split surface corresponds to it.

[0014] The folded surface or smooth curved surface is bent or folded at the body of the integrated valve sheet body 2 between two adjacent valve sheets 22 or between the valve sheet 22 and the flow channel through hole 21 .

[0015] When the left pump body split surface is a folded surface, there are multiple valve plates 22, and the valve chambers are respectively arranged on the left and right pump body split surfaces; two adjacent valve chambers are arranged alternately, one on the left pump body and the other on the right pump body; a valve chamber or through hole is provided on each folded surface, and the flow channel is arranged in a straight line.

[0016] The integrated valve sheet body 2 has the roots of all valve sheets 22 facing the inlet direction after being unfolded;

[0017] When the left pump body split surface is a curved surface, there are multiple valve plates 22, and the valve chambers are respectively arranged on the left pump body and the right pump body split surfaces; two adjacent valve chambers are arranged alternately, one on the left pump body and the other on the right pump body; a valve chamber or through hole is provided on each folded surface.

[0018] The valve chamber is arranged on a convex section between an inflection point and a stationary point after passing through an inflection point in a direction from an inlet point to an outlet point on the profile curve of the split surface.

[0019] The integrated valve plate body 2 is made of a flexible film material.

[0020] The present invention provides a piezoelectric pump with a vertical valve plate and a split pump body structure, which includes: a piezoelectric pump with a vertical valve plate and a split pump body structure, which includes: a pump body, a pump cavity, an integrated valve plate body, a valve chamber, a flow channel and a piezoelectric vibrator; the pump body includes: a left pump body and a right pump body; the integrated valve plate body is arranged between the left pump body and the right pump body, and its body is in contact with their split surfaces; the integrated valve plate body is provided with a flow channel through hole, and valve plates are arranged on both sides of the flow channel through hole; the valve chamber is arranged on the left and / or right pump body split surface; a connecting cavity is provided on the left and / or right pump body split surface, located at the flow channel through hole, and communicated with the pump cavity; the valve chamber and the flow channel through hole 21 are connected through the flow channel.

[0021] The split surface of the pump body is a curved surface, and the integrated valve body is assembled in a way that conforms to the trend of the split surface interface; this assembly method means that the valve plate on the integrated valve body is subjected to prestress caused by bending deformation, so that the valve plate has a faster reset speed after deforming to the corresponding chamber. It has a non-return effect, accurate output flow, and high output pressure, which effectively improves the problems existing in existing piezoelectric pumps. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is an overall schematic diagram of a piezoelectric pump with a vertical valve plate and a split pump body structure according to the present invention;

[0023] Figure 2 It is an exploded schematic diagram of a curved vertical valve plate and a split pump body structure of the present invention;

[0024] Figure 3 It is a schematic diagram of a curved valve plate and a left pump body adopting a split pump body structure of the present invention;

[0025] Figure 4 It is a schematic diagram of a curved vertical valve plate and a right pump body adopting a split pump body structure of the present invention;

[0026] Figure 5 It is a schematic diagram of a curved vertical valve plate and an integrated valve plate body adopting a split pump body structure of the present invention;

[0027] Figure 6 It is a partial schematic diagram of a curved vertical valve disc and an integrated valve disc body adopting a split pump body structure of the present invention;

[0028] Figure 7 It is a cross-sectional view of a curved vertical valve disc and an integrated valve disc body adopting a split pump body structure in the use state of the present invention;

[0029] Figure 8 It is a schematic diagram of the fluid injection principle of a curved vertical valve plate and a split pump body structure of the present invention;

[0030] Fig. 9 It is an exploded schematic diagram of a continuously bent vertical valve plate and a split pump body structure of the present invention;

[0031] Fig.10 It is a schematic diagram of a continuously bent vertical valve plate and a left pump body adopting a split pump body structure of the present invention;

[0032] Fig.11 It is a schematic diagram of a right pump body of a continuously bent vertical valve plate and a split pump body structure of the present invention;

[0033] Fig.12 It is a schematic diagram of fluid inflow and outflow of a continuously bent vertical valve plate and a split pump body structure of the present invention;

[0034] Fig.13 It is the best implementation method of the invention for a large curved vertical valve disc and a valve disc with a split pump body structure;

[0035] Fig.14 It is a schematic diagram of a vertical valve disc with a large curved surface and a valve disc with a split pump body structure according to the present invention;

[0036] In the figure: pump body 1, left pump body 11, first inlet flow channel 112, second inlet valve chamber 113, left pump body connecting chamber 141, first outlet valve chamber 114, second outlet flow channel 115, right pump body 12, first inlet valve chamber 122, second inlet flow channel 123, right pump body connecting chamber 142, first outlet flow channel 125, second outlet valve chamber 126, upper left pump body pump chamber 1311, upper right pump body pump chamber 1313 12, left pump body connecting cavity 141, right pump body connecting cavity 142, inlet 15, outlet 16, positioning pin hole 17, positioning pin column 18, integrated valve plate body 2, flow channel through hole 21, valve plate 22, first valve plate 221, second valve plate 222, third valve plate 223, fourth valve plate 224, installation positioning hole 23, piezoelectric vibrator 3, upper piezoelectric vibrator 31, lower piezoelectric vibrator 32, inflection point 5, stationary point 6. DETAILED DESCRIPTION

[0037] Example 1 Piezoelectric pump with curved valve plate

[0038] See also Figures 1 to 9 As shown, a curved vertical valve plate and a split pump body structure are used, which includes: a pump body 1, an integrated valve plate body 2, and a piezoelectric vibrator 3;

[0039] The pump body 1 comprises: a left pump body 11 and a right pump body 12, and both the left pump body 11 and the right pump body 12 are provided with assembly split surfaces that are butted against each other;

[0040] The integrated valve plate body 2 is arranged on the split surface between the left pump body 11 and the right pump body 12; the integrated valve plate body 2 fits with the split surfaces on the left pump body 11 and the right pump body 12;

[0041] The split surfaces of the left pump body 11 and the right pump body 12 are curved surfaces that fit each other;

[0042] The pump body 1 is provided with a pump body flow channel, a pump body valve chamber, a pump body connecting cavity, and a pump body pump cavity; the pump body flow channel, the pump body valve chamber, and the pump body connecting cavity are all grooves arranged on the left and right pump body split surfaces;

[0043] The pump body 1 is provided with a pump body pump cavity 13; the piezoelectric vibrator 3 is provided on the pump body pump cavity;

[0044] The pump body has two pump chambers, namely, an upper pump body pump chamber and a lower pump body pump chamber; the upper pump body pump chamber and the lower pump body pump chamber are respectively arranged at the upper and lower ends of the pump body 1; the upper pump body pump chamber and the lower pump body pump chamber are connected through the pump body connecting chamber;

[0045] The integrated valve plate body 2 is provided with: a flow channel through hole 21, a valve plate 22, and an installation positioning hole 23; the flow channel through hole 21 is provided at the center of the integrated valve plate body 2; valve plates 22 are provided on the main body of the integrated valve plate body 2 on both sides of the flow channel through hole 21; there are multiple valve plates 22, and the root of each valve plate 22 is flexibly integrally formed with the integrated valve plate body 2; the valve plate 22 is provided between the pump body flow channel and the pump body valve chamber; the valve plate 22 can completely block the pump body flow channel; there is a deformation space in the pump body valve chamber that can accommodate the valve plate 22 to bend inward;

[0046] The installation positioning holes 23 are arranged at the corners of the integrated valve body 2;

[0047] The integrated valve plate body 2 is made of a flexible film material, and the integrated valve plate body 2 fits the curved surface of the pump body;

[0048] The pump body flow channel is divided into: an inlet flow channel and an outlet flow channel; the inlet flow channel includes: a first inlet flow channel and a second inlet flow channel; the outlet flow channel includes: a first outlet flow channel and a second outlet flow channel;

[0049] The pump body valve chamber is divided into: an inlet valve chamber and an outlet valve chamber; the inlet valve chamber includes: a first inlet valve chamber and a second inlet valve chamber 113; the outlet valve chamber includes: a first outlet valve chamber and a second outlet valve chamber;

[0050] The pump body connecting chambers are: a left pump body connecting chamber 141 and a right pump body connecting chamber 142;

[0051] The upper pump body pump chamber is divided into: an upper left pump body pump chamber 1311 and an upper right pump body pump chamber 1312; the lower pump body pump chamber is divided into: a lower left pump body pump chamber 1321 and a lower right pump body pump chamber 1322;

[0052] The inlet flow channel and the inlet valve chamber are connected to each other; the outlet flow channel and the outlet valve chamber are connected to each other; the left pump body connecting cavity and the right pump body connecting cavity are connected to each other; the upper left pump body pump cavity 1311 and the upper right pump body pump cavity 1312 are connected to each other to form an upper pump body pump cavity; the lower left pump body pump cavity 1321 and the lower right pump body pump cavity 1322 are connected to each other to form a lower pump body pump cavity;

[0053] The pump body 1 is provided with an inlet 15 and an outlet 16; the inlet 15 and the outlet 16 are respectively arranged at two ends of the split surface of the pump body 1;

[0054] The pump body 1 is also provided with: a positioning pin hole 17 and a positioning pin 18; the positioning pin holes 17 and the positioning pin 18 are provided in the same number; the positioning pin 18 can be set to a circular and / or rectangular shape; one of the positioning pins 18 is set to a rectangular shape, which has the characteristic of preventing wrong installation;

[0055] The positioning pin hole 17 and the positioning pin column 18 are clearance-matched;

[0056] The positioning pin hole 17 is provided on the left pump body 11, and the positioning pin 18 is provided on the right pump body 12; the installation positioning hole 23 of the integrated valve plate body 2 and the positioning pin 18 have the same position, number and shape; the positioning pin 18 passes through the installation positioning hole 23 and is sleeved in the positioning pin hole 17;

[0057] The split surface of the left pump body 11 is a left split curved surface, and four positioning pin holes 17 are provided, and the four positioning pin holes 17 are provided at the corners of the left split curved surface;

[0058] The middle part of the left split curved surface is provided with: a first inlet flow channel 112, a second inlet valve chamber 113, a left pump body connecting chamber 141, a first outlet valve chamber 114, and a second outlet flow channel 115 in sequence;

[0059] The inlet 15 is connected to the first inlet flow channel 112; the second inlet valve chamber 113 is connected to the left pump body connecting chamber 141; the first outlet valve chamber 114 is connected to the second outlet flow channel 115;

[0060] The split surface of the right pump body 12 is a right split curved surface, and the left split curved surface and the right split curved surface are mutually supplemented and assembled;

[0061] The middle part of the right split curved surface is provided with: a first inlet valve chamber 122, a second inlet flow channel 123, a right pump body connecting chamber 142, a first outlet flow channel 125, and a second outlet valve chamber 126 in sequence;

[0062] The valve plate 22 is divided into: a first valve plate 221, a second valve plate 222, a third valve plate 223, and a fourth valve plate 224;

[0063] The first valve disc 221, the second valve disc 222, the third valve disc 223 and the fourth valve disc 224 are integrally formed on the integrated valve disc body 2; the first valve disc 221 and the second valve disc 222 are arranged on one side of the flow channel through hole 21; the third valve disc 223 and the fourth valve disc 224 are arranged on the other side of the flow channel through hole 21;

[0064] The piezoelectric vibrator 3 comprises: a piezoelectric chip and a metal substrate, wherein the piezoelectric chip and the metal substrate are bonded;

[0065] The piezoelectric vibrator 3 is provided with two, namely: an upper piezoelectric vibrator 31 and a lower piezoelectric vibrator 32; the upper piezoelectric vibrator 31 is provided at the pump cavity of the upper pump body; the lower piezoelectric vibrator 32 is provided at the pump cavity of the lower pump body;

[0066] The inlet port 15 is connected to the first inlet flow channel 112; the first inlet valve chamber 122 is opposite to the first inlet flow channel 112; the first valve plate 221 is arranged between the first inlet flow channel 112 and the first inlet valve chamber 122, the first valve plate 221 is bent into the first inlet valve chamber 122, and the first inlet flow channel 112 and the first inlet valve chamber 122 are connected;

[0067] The first inlet valve chamber 122 is connected to the second inlet flow channel 123; the second inlet flow channel 123 is opposite to the second inlet valve chamber 113; the second valve plate 222 is arranged between the second inlet flow channel 123 and the second inlet valve chamber 113, the second valve plate 222 is bent into the second inlet valve chamber 113, and the second inlet flow channel 123 and the second inlet valve chamber 113 are connected;

[0068] The second inlet valve chamber 113 is connected to the left pump body connecting chamber 141 directly or through a flow passage; the left pump body connecting chamber 141 is opposite to the right pump body connecting chamber 142; the flow channel through hole 21 is provided between the left pump body connecting chamber 141 and the right pump body connecting chamber 142;

[0069] The left pump body connecting chamber 141 is connected to the right pump body connecting chamber 142 through the flow channel through hole 21; the upper pump body pump chamber is connected to the lower pump body pump chamber through the flow channel through hole 21;

[0070] The right pump body connecting cavity 142 is connected to the first outlet flow channel 125 directly or through a flow passage; the first outlet flow channel 125 is opposite to the first outlet valve chamber 114; the third valve plate 223 is arranged between the first outlet flow channel 125 and the first outlet valve chamber 114, the third valve plate 223 is bent into the first outlet valve chamber 114, and the first outlet flow channel 125 is connected to the first outlet valve chamber 114;

[0071] The first outlet valve chamber 114 is connected to the second outlet flow channel 115 directly or through a flow passage; the second outlet flow channel 115 is opposite to the second outlet valve chamber 126; the fourth valve plate 224 is arranged between the second outlet flow channel 115 and the second outlet valve chamber 126, the fourth valve plate 224 is bent into the second outlet valve chamber 126, and the second outlet flow channel 115 and the second outlet valve chamber 126 are connected;

[0072] The second outlet valve chamber 126 is connected to the outlet 16 directly or through a flow passage;

[0073] The second inlet valve chamber 113 and the first outlet valve chamber 114 are arranged on the convex section between the inflection point and the stationary point after the inflection point in the direction from the inlet point to the outlet point on the profile curve of the split surface of the left pump body 11; the second inlet flow channel 123 and the first outlet flow channel 125 are grooves arranged on the right pump body;

[0074] The first inlet valve chamber 122 and the second outlet valve chamber 126 are arranged on the convex section between the inflection point and the stationary point after the inflection point in the direction from the inlet point to the outlet point on the profile curve of the split surface of the right pump body 12; the first inlet flow channel 112 and the second outlet flow channel 115 are grooves arranged on the left pump body;

[0075] The integrated valve plate body 2 is elastically bent and deformed under the action of the curved surface, and the valve plate 22 corresponds to the valve chamber position. After the integrated valve plate body 2 is deformed by the curvature of the curved surface, the current valve plate 22 is bent and deformed in accordance with the curvature of the curved surface; see the attached Figure 6 As shown, the integrated valve plate body 2 is bent without being clamped relative to the pump body, and the valve plate 22 is visible turned outward; that is, when the split surface interface of the pump body structure is a continuous smooth curved surface, the integrated valve plate body 2 of the piezoelectric pump is assembled in a manner that conforms to the trend of the split surface interface; this assembly method means that each film valve plate in the vertical valve plate is subjected to prestress caused by bending deformation, so that the valve plate has a faster reset speed after being deformed to the corresponding chamber, thereby blocking the corresponding flow channel.

[0076] Example 2 A piezoelectric pump with a continuously bent flat valve sheet

[0077] See also Fig.10 As shown in FIG12 , a piezoelectric pump with a continuously bent flat valve sheet comprises: a pump body 1, an integrated valve sheet body 2, and a piezoelectric vibrator 3;

[0078] The pump body 1 comprises: a left pump body 11 and a right pump body 12, and both the left pump body 11 and the right pump body 12 are provided with assembly split surfaces that are butted against each other;

[0079] The integrated valve plate body 2 is arranged on the split surface between the left pump body 11 and the right pump body 12; the integrated valve plate body 2 fits with the split surfaces on the left pump body 11 and the right pump body 12;

[0080] The split surfaces on the left pump body 11 and the right pump body 12 are continuously bent planes; the continuously bent planes on the left pump body 11 and the right pump body 12 can fit each other;

[0081] The pump body 1 is provided with a pump body flow channel, a pump body valve chamber, a pump body connecting cavity, and a pump body pump cavity; the pump body flow channel, the pump body valve chamber, and the pump body connecting cavity are all butted grooves provided on the left and right pump body split surfaces;

[0082] The pump body 1 is provided with a pump body pump cavity 13; the piezoelectric vibrator 3 is provided on the pump body pump cavity;

[0083] The pump body has two pump chambers, namely, an upper pump body pump chamber and a lower pump body pump chamber; the upper pump body pump chamber and the lower pump body pump chamber are respectively arranged at the upper and lower ends of the pump body 1; the upper pump body pump chamber and the lower pump body pump chamber are connected through the pump body connecting chamber;

[0084] The integrated valve plate body 2 is provided with: a flow channel through hole 21, a valve plate 22, and an installation positioning hole 23; the flow channel through hole 21 is provided at the center of the integrated valve plate body 2; valve plates 22 are provided on the main body of the integrated valve plate body 2 on both sides of the flow channel through hole 21; there are multiple valve plates 22, and the root of each valve plate 22 is flexibly integrally formed with the integrated valve plate body 2; the valve plate 22 is provided between the pump body flow channel and the pump body valve chamber; the valve plate 22 can completely block the pump body flow channel; there is a deformation space in the pump body valve chamber that can accommodate the valve plate 22 to bend inward;

[0085] The installation positioning holes 23 are arranged at the corners of the integrated valve body 2;

[0086] The integrated valve plate body 2 is made of a flexible film material, and the integrated valve plate body 2 is fitted with the pump body split surface of the continuous bending plane;

[0087] The pump body flow channel is divided into: an inlet flow channel and an outlet flow channel; the inlet flow channel includes: a first inlet flow channel and a second inlet flow channel; the outlet flow channel includes: a first outlet flow channel and a second outlet flow channel;

[0088] The pump body valve chamber is divided into: an inlet valve chamber and an outlet valve chamber; the inlet valve chamber includes: a first inlet valve chamber and a second inlet valve chamber 113; the outlet valve chamber includes: a first outlet valve chamber and a second outlet valve chamber;

[0089] The pump body connecting chambers are: a left pump body connecting chamber 141 and a right pump body connecting chamber 142;

[0090] The upper pump body pump chamber is divided into: an upper left pump body pump chamber 1311 and an upper right pump body pump chamber 1312; the lower pump body pump chamber is divided into: a lower left pump body pump chamber 1321 and a lower right pump body pump chamber 1322;

[0091] The inlet flow channel and the inlet valve chamber are connected to each other; the outlet flow channel and the outlet valve chamber are connected to each other; the left pump body connecting cavity and the right pump body connecting cavity are connected to each other; the upper left pump body pump cavity 1311 and the upper right pump body pump cavity 1312 are connected to each other to form an upper pump body pump cavity; the lower left pump body pump cavity 1321 and the lower right pump body pump cavity 1322 are connected to each other to form a lower pump body pump cavity;

[0092] The pump body 1 is provided with an inlet 15 and an outlet 16; the inlet 15 and the outlet 16 are respectively arranged at two ends of the split surface of the pump body 1;

[0093] The pump body 1 is also provided with: a positioning pin hole 17 and a positioning pin 18; the positioning pin holes 17 and the positioning pin 18 are provided in the same number; the positioning pin 18 can be set to a circular and / or rectangular shape; one of the positioning pins 18 is set to a rectangular shape, which has the characteristic of preventing wrong installation;

[0094] The positioning pin hole 17 and the positioning pin column 18 are clearance-matched;

[0095] The positioning pin hole 17 is provided on the left pump body 11, and the positioning pin 18 is provided on the right pump body 12; the installation positioning hole 23 of the integrated valve plate body 2 and the positioning pin 18 have the same position, number and shape; the positioning pin 18 passes through the installation positioning hole 23 and is sleeved in the positioning pin hole 17;

[0096] The middle part of the left split contour surface is provided with: a first inlet flow channel 112, a second inlet valve chamber 113, a left pump body connecting chamber 141, a first outlet valve chamber 114, and a second outlet flow channel 115 in sequence;

[0097] The inlet 15 is connected to the first inlet flow channel 112; the second inlet valve chamber 113 is connected to the left pump body connecting chamber 141; the first outlet valve chamber 114 is connected to the second outlet flow channel 115;

[0098] The split surface of the right pump body 12 is a right split contour surface, and the left split contour surface and the right split contour surface are mutually supplemented and assembled;

[0099] The middle part of the right split contour surface is provided with: a first inlet valve chamber 122, a second inlet flow channel 123, a right pump body connecting cavity 142, a first outlet flow channel 125, and a second outlet valve chamber 126 in sequence;

[0100] The valve plate 22 is divided into: a first valve plate 221, a second valve plate 222, a third valve plate 223, and a fourth valve plate 224;

[0101] The first valve disc 221, the second valve disc 222, the third valve disc 223 and the fourth valve disc 224 are integrally formed on the integrated valve disc body 2; the first valve disc 221 and the second valve disc 222 are arranged on one side of the flow channel through hole 21; the third valve disc 223 and the fourth valve disc 224 are arranged on the other side of the flow channel through hole 21;

[0102] The piezoelectric vibrator 3 comprises: a piezoelectric chip and a metal substrate, wherein the piezoelectric chip and the metal substrate are bonded;

[0103] The piezoelectric vibrator 3 is provided with two, namely: an upper piezoelectric vibrator 31 and a lower piezoelectric vibrator 32; the upper piezoelectric vibrator 31 is provided at the pump cavity of the upper pump body; the lower piezoelectric vibrator 32 is provided at the pump cavity of the lower pump body;

[0104] The inlet port 15 is connected to the first inlet flow channel 112; the first inlet valve chamber 122 is opposite to the first inlet flow channel 112; the first valve plate 221 is arranged between the first inlet flow channel 112 and the first inlet valve chamber 122, the first valve plate 221 is bent into the first inlet valve chamber 122, and the first inlet flow channel 112 and the first inlet valve chamber 122 are connected;

[0105] The first inlet valve chamber 122 is connected to the second inlet flow channel 123; the second inlet flow channel 123 is opposite to the second inlet valve chamber 113; the second valve plate 222 is arranged between the second inlet flow channel 123 and the second inlet valve chamber 113, the second valve plate 222 is bent into the second inlet valve chamber 113, and the second inlet flow channel 123 and the second inlet valve chamber 113 are connected;

[0106] The second inlet valve chamber 113 is connected to the left pump body connecting chamber 141 directly or through a flow passage; the left pump body connecting chamber 141 is opposite to the right pump body connecting chamber 142; the flow channel through hole 21 is provided between the left pump body connecting chamber 141 and the right pump body connecting chamber 142;

[0107] The left pump body connecting chamber 141 is connected to the right pump body connecting chamber 142 through the flow channel through hole 21; the upper pump body pump chamber is connected to the lower pump body pump chamber through the flow channel through hole 21;

[0108] The right pump body connecting cavity 142 is connected to the first outlet flow channel 125 directly or through a flow passage; the first outlet flow channel 125 is opposite to the first outlet valve chamber 114; the third valve plate 223 is arranged between the first outlet flow channel 125 and the first outlet valve chamber 114, the third valve plate 223 is bent into the first outlet valve chamber 114, and the first outlet flow channel 125 is connected to the first outlet valve chamber 114;

[0109] The first outlet valve chamber 114 is connected to the second outlet flow channel 115 directly or through a flow passage; the second outlet flow channel 115 is opposite to the second outlet valve chamber 126; the fourth valve plate 224 is arranged between the second outlet flow channel 115 and the second outlet valve chamber 126, the fourth valve plate 224 is bent into the second outlet valve chamber 126, and the second outlet flow channel 115 and the second outlet valve chamber 126 are connected;

[0110] The inlet 15, the first inlet channel 112, the first valve disc 221, the first inlet valve chamber 122, the second inlet channel 123, the second valve disc 222, the second inlet valve chamber 113, the pump body connecting cavity, the first outlet channel 125, the third valve disc 223, the first outlet valve chamber 114, the second outlet channel 115, the fourth valve disc 224, the second outlet valve chamber 126 and the outlet 16 are arranged on a line at the center of the same straight fluid passage.

[0111] The working principle of this technical solution is as follows:

[0112] The patent of the present invention provides a piezoelectric pump with a vertical valve plate and a split pump body structure. It applies an external electric field to the piezoelectric vibrator, causing the piezoelectric vibrator to produce periodic displacement under the action of the inverse piezoelectric effect, forming an internal and external pressure difference, thereby realizing unidirectional flow of the fluid inside the piezoelectric pump.

[0113] When the positive voltage of the external electric field acts on the piezoelectric vibrator, the piezoelectric chip on the upper part of the piezoelectric pump body and the piezoelectric chip on the lower part of the pump body vibrate synchronously, the upper piezoelectric chip drives the metal substrate to bend upward, and the lower piezoelectric chip drives the metal substrate to bend downward; the fluid in the pump body drives the valve plate on the integrated valve plate body to deform toward the corresponding pump body valve chamber direction; the pump body valve chamber in the inlet area is connected with the pump body flow channel;

[0114] The valve plate on the integrated valve plate body between the inlet and the pump body connecting cavity is deformed, and the valve plate on the integrated valve plate body between the pump body connecting cavity and the outlet is closed; the inlet is connected with the pump body valve chamber, the pump body flow channel, the pump body connecting cavity and the pump body pump cavity, and the fluid is pumped into the pump body pump cavity;

[0115] The valve plate on the integrated valve plate body between the inlet and the pump body connecting cavity is closed, the valve plate on the integrated valve plate body between the pump body connecting cavity and the outlet is deformed, the pump body pump cavity is connected with the pump body connecting cavity, the pump body valve chamber, the pump body flow channel, and the outlet; the fluid in the pump body pump cavity is pumped out from the outlet;

[0116] That is, when the positive voltage of the external electric field acts on the piezoelectric vibrator, the piezoelectric chip on the upper part of the piezoelectric pump body and the piezoelectric chip on the lower part of the pump body vibrate synchronously, the upper piezoelectric chip drives the metal substrate to bend upward, and the lower piezoelectric chip drives the metal substrate to bend downward; the first valve plate 221 and the second valve plate 222 assembled in the inlet area formed between the inlet port 15 and the pump body connecting cavity are bent and deformed into the first inlet valve chamber 122 and the second inlet valve chamber 113 respectively, and the inlet port is connected to the pump body. The inlet area formed between the connecting cavities is connected by the pump body flow channel; the third valve plate 223 and the fourth valve plate 224 assembled on the integrated valve plate body 2 in the outlet area formed between the pump body connecting cavity and the outlet port are respectively tightly attached to the section surface at the first outlet flow channel 125 and the second outlet flow channel 115; the fluid flows from the inlet port 15 through the first inlet flow channel 112, the first inlet valve chamber 122, the second inlet flow channel 123, the second inlet valve chamber 113, and the pump body connecting cavity into the pump body pump cavity;

[0117] When the negative voltage of the external electric field acts on the piezoelectric vibrator, the piezoelectric crystal on the upper part of the piezoelectric pump body and the piezoelectric chip on the lower part of the pump body vibrate synchronously, the upper piezoelectric chip drives the metal substrate to bend downward, and the lower piezoelectric chip drives the metal substrate to bend upward, the first valve plate 221 and the second valve plate 222 are tightly attached to the section surface of the first inlet flow channel 112 and the second inlet flow channel 123 respectively; the third valve plate 223 and the fourth valve plate 224 are bent and deformed into the first outlet valve chamber 114 and the second outlet valve chamber 126 respectively, and the pump body pump cavity is connected with the outlet 16; the fluid in the pump body pump cavity bursts out through the first outlet flow channel 125, the first outlet valve chamber 114, the second outlet flow channel 115, and the second outlet valve chamber 126 in sequence;

[0118] The split surface of the pump body is a curved surface, and the integrated valve plate body 2 is assembled in a manner that conforms to the interface trend of the split surface; this assembly method means that the valve plate on the integrated valve plate body is subjected to prestress caused by bending deformation, so that the valve plate has a faster reset speed after deforming toward the corresponding chamber.

Claims

1. A piezoelectric pump with a vertical valve plate and a split pump body structure, comprising: A pump body (1), a pump body chamber, a pump body connecting chamber, an integrated valve plate body (2), a valve chamber, a flow channel and a piezoelectric vibrator (3); characterized in that: The pump body (1) comprises: a left pump body (11) and a right pump body (12); the integrated valve plate body (2) is arranged between the left pump body (11) and the right pump body (12), and is fitted with the split surfaces of the left pump body (11) and the right pump body (12); The integrated valve plate body (2) is provided with a flow channel through hole (21), and valve plates (22) are provided on the main body of the integrated valve plate body (2) on both sides of the flow channel through hole (21); The pump body pump cavity is divided into an upper pump body pump cavity and a lower pump body pump cavity; the upper pump body pump cavity and the lower pump body pump cavity are respectively arranged at the upper and lower ends of the pump body (1), and are connected through the pump body connecting cavity; the piezoelectric vibrator (3) is arranged on the pump body pump cavity; The upper pump body pump chamber is divided into: an upper left pump body pump chamber (1311) and an upper right pump body pump chamber (1312); the lower pump body pump chamber is divided into: a lower left pump body pump chamber (1321) and a lower right pump body pump chamber (1322); the pump body connecting chamber is divided into: a left pump body connecting chamber (141) and a right pump body connecting chamber (142), which are respectively arranged on the left pump body or the right pump body split surface and communicate with each other through the flow channel through hole (21); The valve chamber is arranged on the left and right pump body split surfaces; The valve chamber and the pump body connecting cavity are connected through a flow channel; The left pump body split surface is a folded surface or a smooth curved surface, and the right pump body split surface corresponds to it; When the left pump body split surface is a folded surface or a curved surface, there are multiple valve plates (22), and the valve chambers are respectively arranged on the left and right pump body split surfaces; two adjacent valve chambers are arranged alternately, one on the left pump body and the other on the right pump body; each folded surface or curved surface is provided with a valve chamber or a through hole; The valve chamber and the valve plate (22) correspond in position to each other.

2. A piezoelectric pump with a vertical valve plate and a split pump body structure according to claim 1, characterized in that: The folded surface or the smooth curved surface is bent or folded at the body of the integrated vertical valve plate body (2) between two adjacent valve plates (22) or between the valve plate (22) and the flow channel through hole (21).

3. A piezoelectric pump with a vertical valve plate and a split pump body structure according to claim 2, characterized in that: The valve chamber and the connecting cavity are grooves arranged on the split surfaces of the left and right pump bodies.

4. A piezoelectric pump with a vertical valve plate and a split pump body structure according to claim 3, characterized in that: In the integrated valve sheet body (2), the roots of all valve sheets (22) face toward the inlet direction after being unfolded.

5. A piezoelectric pump with a vertical valve plate and a split pump body structure according to claim 4, characterized in that: The valve chamber is arranged on a convex section between an inflection point and a stationary point after passing through an inflection point in a direction from an inlet point to an outlet point on the profile curve of the split surface.

6. A piezoelectric pump with a vertical valve plate and a split pump body structure according to claim 5, characterized in that: The integrated valve plate body (2) is made of a flexible film material.

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