A helium gas delivery pump for chip lithography

Abstract

The invention discloses a helium delivery pump for chip lithography, comprising a casing, a volute assembly being sealed and connected at the left end of the casing, a bearing support assembly being sealed and connected at the right end of the casing, a magnetic bearing stator a being sealed and installed at the left end of the casing inner cavity, a magnetic bearing stator b being sealed and installed at the right end of the casing inner cavity, a stator assembly being installed in the middle of the casing inner cavity, a rotating shaft assembly being also installed in the casing, the rotating shaft assembly passing through the magnetic bearing stator a, the stator assembly and the magnetic bearing stator b in sequence, and the rotating shaft assembly rotating circumferentially under the magnetic force of the magnetic bearing stator a, the stator assembly and the magnetic bearing stator b, an impeller being also installed at the left end of the rotating shaft assembly, and the impeller being located in the volute assembly. The helium in the casing will form a static seal, and when working, an air seal will be formed between the assembly in the casing and the volute, thereby preventing the helium from taking away substances from the casing, ensuring the quality of the helium, and the helium delivery pump can rotate at high speed, thereby ensuring the delivery of the helium.

Description

Technical Field

[0001] The invention relates to helium delivery for chip photolithography, in particular to a helium delivery pump for chip photolithography. Background Art

[0002] When a lithography machine is making chips, in order to ensure the quality of the chip's lithography, lithography is usually performed in a helium environment, and the helium flows in a closed channel. In order to make the helium flow, it is necessary to give the helium power, so a helium delivery pump is needed. However, the lithography machine has relatively high requirements for helium, especially in terms of cleanliness. Therefore, the helium delivery pump is also required to be oil-free, dust-free, and noise-free. Summary of the invention

[0003] The purpose of the present invention is to overcome the shortcomings of the prior art and provide a helium gas delivery pump for chip lithography.

[0004] The purpose of the present invention is achieved through the following technical solutions: a helium delivery pump for chip lithography, comprising a casing, a volute assembly being sealed at the left end of the casing, a bearing support assembly being sealed at the right end of the casing, a magnetic bearing stator a being sealed and installed at the left end of the casing inner cavity, a magnetic bearing stator b being sealed and installed at the right end of the casing inner cavity, a stator assembly being installed at the middle of the casing inner cavity, a rotating shaft assembly being also installed in the casing, the rotating shaft assembly passing through the magnetic bearing stator a, the stator assembly and the magnetic bearing stator b in sequence, and the rotating shaft assembly rotating circumferentially under the magnetic force of the magnetic bearing stator a, the stator assembly and the magnetic bearing stator b, an impeller being also installed at the left end of the rotating shaft assembly, and the impeller being located in the volute assembly.

[0005] Optionally, the rotating shaft assembly includes a hollow core shaft a and a hollow core shaft b, a magnet is installed in the inner cavity of the core shaft a or the core shaft b, the core shaft a and the core shaft b are magnetically connected by the magnet, the core shaft a located on the right side of the impeller is provided with a bushing a and a part to be tested from left to right, the bushing a is provided with a bearing a, the bushing a, the bearing a and the part to be tested are all located in the magnetic bearing stator b, the core shaft b is provided with a radial magnetic bearing punching b, a measured ring, a thrust plate and a bearing b from left to right, the radial magnetic bearing punching b, the measured ring and the thrust plate are located in the magnetic bearing stator b, and the bearing b is located in the bearing support assembly.

[0006] Optionally, the magnetic bearing stator a includes a support seat, a bearing seat a, a detection component a and a radial magnetic bearing stator a, a sealing ring is installed on the outer edge of the support seat, the support seat is installed on the left end of the casing by a screw assembly, and the inner cavity of the left end of the support seat and the casing is sealed by a sealing ring, the support seat has a step cavity a and a step cavity b, the step cavity a is located on the left side of the step cavity b, and the bearing seat a is sealed and installed in the step cavity a, the radial magnetic bearing stator a is installed in the step cavity b, and a detection component a for detecting the movement of the test piece is also installed in the step cavity a, the detection component a is located between the radial magnetic bearing stator a and the bearing seat a, the bearing a is located in the bearing seat a, and a sealing ring is also installed on the core shaft a, the sealing ring is located between the test piece and the impeller, the inner ring of the sealing ring has a gap with the core shaft a in the radial direction, and the sealing ring is pressed tightly against the sleeve a under the top pressure of the impeller.

[0007] Optionally, the detection component a includes a fixed shell a and a plastic sealing module a, the plastic sealing module a is installed in the fixed shell a, and a radial displacement detector a for detecting the radial displacement of the core shaft a is installed in the radial direction of the plastic sealing module a, and an axial displacement detector for detecting the axial displacement of the core shaft a is installed in the axial direction of the plastic sealing module a block, the plastic sealing module a includes an annular ring, a radial column a is arranged in the radial direction of the annular ring, an axial column a is axially arranged on the inner side wall of the annular ring, the fixed shell a has a through hole through which the core shaft a passes, and an annular groove d is provided on one end surface of the fixed shell a, a radial through hole a is provided in the radial direction of the fixed shell a, the radial through hole a passes through the annular groove d and is connected with the through hole, an axial through hole a is also axially provided on the fixed shell a, the annular ring is installed in the annular groove d, the axial column a is installed in the axial through hole a, the radial column a is installed in the radial through hole a, a radial displacement detector a for detecting the radial displacement of the test piece is installed in the radial column a, and an axial displacement detector for detecting the axial position of the test piece is installed in the axial column a.

[0008] Optionally, the piece to be tested has an axial detection surface and a radial detection surface, the core shaft a passes through the through hole of the fixed shell a, and there is a gap between the radial detection surface and the through hole, and there is a gap between the axial detection surface and the fixed shell a.

[0009] Optionally, the magnetic bearing stator b includes a hollow stator shell, which is installed in the inner cavity of the right end of the casing through a screw assembly, and heat dissipation fins are arranged on the outer circumference of the stator shell. The stator shell has a first cavity, a second cavity and a third cavity from left to right, and the inner cavity of the stator shell is provided with a retaining ring. The first cavity and the second cavity are separated by the retaining ring, and the second cavity and the third cavity are connected. A radial magnetic bearing stator b is installed in the first cavity, and the radial magnetic bearing punching sheet b is located in the radial magnetic bearing stator b. A radial displacement detection component b of the core shaft b is installed in the second cavity, and the measured ring is located in the detection component b. An axial displacement adjustment component is installed in the third cavity, and the thrust plate is located in the axial displacement adjustment component.

[0010] Optionally, the radial displacement detection component includes a plastic sealing module b and a fixed shell b, the center of the fixed shell b has a through hole through which the rotating shaft passes, the measured ring is located in the through hole, and there is a radial gap between the measured ring and the through hole, an annular groove a is provided on one end surface of the fixed shell b, and a radial through hole b is also radially provided on the fixed shell b, the radial through hole b is connected to the through hole, the plastic sealing module b is in a ring shape, and a radial column b is radially arranged on the plastic sealing module b, the annular part of the plastic sealing module b is fitted and installed in the annular groove a, the radial column b of the plastic sealing module b is fitted and installed in the radial through hole b, and a radial displacement detector b for detecting the radial displacement of the rotating shaft is installed in the radial column b close to the through hole.

[0011] Optionally, the axial displacement adjustment component includes a left magnetic induction component, a bushing and a right magnetic induction component, which are connected by bolts, the bushing is located between the left magnetic induction component and the right magnetic induction component, and an adjustment cavity is formed between the left magnetic induction component and the right magnetic induction component, the outer edge of the thrust plate is located in the adjustment cavity, and the left end face of the thrust plate has a gap with the left magnetic induction component, and the right end face of the thrust plate has a gap with the right magnetic induction component.

[0012] Optionally, the left magnetic induction component includes a left outer shell and a left end cover, an annular groove b is opened on the right end face of the left outer shell, a coil is installed in the annular groove b, the left end cover is installed on the right end face of the left outer shell, the left end cover has a through hole, and the diameter of the through hole is larger than the minor diameter of the annular groove b; the right magnetic induction component includes a right outer shell and a right end cover, an annular groove c is opened on the left end face of the right outer shell, a coil is installed in the annular groove c, the right end cover is installed on the left end face of the right outer shell, the right end cover has a through hole, and the diameter of the through hole is larger than the minor diameter of the annular groove c.

[0013] Optionally, the left end of the casing is connected to the volute assembly through a flange, the right end of the casing is connected to the bearing support assembly through a flange, and an annular heat dissipation fin is provided on the outer side wall of the casing.

[0014] The present invention has the following advantages: the helium in the casing of the helium delivery pump of the present invention forms a static seal, and during operation, an airtight seal is formed between the components in the casing and the volute, thereby preventing the helium from carrying away substances from the casing and ensuring the quality of the helium, and the helium delivery pump can rotate at a high speed, thereby ensuring the delivery of the helium. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of the present invention;

[0016] Figure 2 for Figure 1 The schematic diagram of the structure without the volute assembly;

[0017] Figure 3 for Figure 2A cross-sectional schematic diagram in which the bearing support assembly is removed;

[0018] Figure 4 is a structural schematic diagram of a volute assembly;

[0019] Figure 5 is a structural schematic diagram of a bearing support assembly;

[0020] Figure 6 is a cross-sectional schematic diagram of a bearing support assembly;

[0021] Figure 7 Schematic diagram of the casing structure

[0022] Figure 8 Schematic diagram of the structure of the shaft assembly

[0023] Fig. 9 Schematic diagram of the cross section of the shaft assembly

[0024] Fig.10 Schematic diagram of the structure of the magnetic bearing stator a

[0025] Fig.11 Schematic cross-sectional view of magnetic bearing stator a

[0026] Fig.12 Schematic diagram of the support seat

[0027] Fig.13 Installation diagram of detection component a and shaft assembly Figure 1

[0028] Fig.14 Installation diagram of detection component a and shaft assembly Figure 2

[0029] Fig.15 for Fig.14 AA cross-sectional view

[0030] Fig.16 Schematic diagram of the structure of detection component a

[0031] Fig.17 Schematic diagram of the structure of fixed shell a

[0032] Fig.18 Schematic diagram of the structure of plastic encapsulation module a Figure 1

[0033] Fig.19 Schematic diagram of the structure of plastic encapsulation module a Figure 2

[0034] Fig. 20 Schematic diagram of the structure of the device under test

[0035] Fig.21Schematic diagram of the structure of magnetic bearing stator b

[0036] Fig. 22 Schematic cross-sectional view of magnetic bearing stator b

[0037] Fig.23 is a structural schematic diagram of a stator housing;

[0038] Fig.24 is a schematic cross-sectional view of a stator housing;

[0039] Fig.25 It is a schematic diagram of the structure of the detection component b;

[0040] Fig.26 It is a schematic diagram of the explosion of the detection component b;

[0041] Fig. 27 Schematic diagram of the structure of the axial displacement adjustment component

[0042] Fig.28 A cross-sectional view of the axial displacement adjustment component

[0043] Fig.29 Schematic diagram of coil installation

[0044] In the figure, 100-magnetic bearing stator a, 200-rotating shaft assembly, 300-stator assembly, 400-magnetic bearing stator b, 500-volute assembly, 600-bearing support assembly, 700-casing, 501-volute, 502-inlet pipe, 503-outlet pipe, 601-end cover, 602-bearing seat b, 603-pressure cover, 604-sealing cover, 131-support seat, 132-bearing seat a, 134-step cavity a, 135-step cavity b, 110-detection component a, 120-radial magnetic Bearing stator a, 701-electrical socket, 702-support frame, 210-core a, 211-sealing ring, 212-bushing a, 213-bushing b, 214-radial magnetic bearing punching sheet a, 220-core b, 221-radial magnetic bearing punching sheet b, 222-pressing sleeve, 223-test ring, 224-bushing c, 225-bushing group, 226-gasket, 230-turbine, 240-magnetic steel, 101-fixed shell a, 102-plastic sealing module a, 103-test piece, 111-annular groove d, 112- radial perforation a, 113- axial perforation a, 115- lead wire notch a, 116- radial displacement detector a, 117- axial displacement detector, 121- annular ring, 122- radial column a, 123- axial column a, 124- protrusion a, 10- stator housing, 12- first cavity, 13- second cavity, 14- third cavity, 15- retaining ring, 16- first anti-rotation groove, 17- lead wire hole, 18- second anti-rotation groove, 420- radial magnetic bearing stator b, 430- detection component b , 440-axial displacement adjustment component, 301-plastic package module b, 302-fixed shell b, 303-radial column b, 304-radial displacement detector b, 305-protrusion b, 306-annular groove a, 307-lead wire notch, 308-second anti-rotation shaft, 401-left outer shell, 402-left end cover, 403-bushing d, 404-right end cover, 405-right outer shell, 406-thrust plate, 407-annular groove b, 408-adjustment chamber, 409-annular groove c, 410-first anti-rotation shaft. DETAILED DESCRIPTION

[0045] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0046] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0047] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features of the embodiments may be combined with each other.

[0048] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0049] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the invention is usually placed when in use, or the positions or positional relationships commonly understood by those skilled in the art, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0050] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0051] like Figure 1 , Figure 2 and Figure 3 As shown, a helium delivery pump for chip lithography includes a housing 700, a volute assembly 500 is sealed at the left end of the housing 700, a bearing support assembly 600 is sealed at the right end of the housing 700, the left end of the housing 700 is connected to the volute assembly 500 through a flange, and the right end of the housing 700 is connected to the bearing support assembly 600 through a flange. Figure 7 As shown, the outer wall of the housing 700 is provided with an annular heat dissipation fin, which can improve the heat dissipation performance of the helium delivery pump. Figure 4As shown, the volute assembly 500 includes a volute 501, and the volute 501 is provided with an inlet pipe 502 and an outlet pipe 503, and the outlet pipe 503 is located on one side of the inlet pipe 502. Preferably, the inlet pipe 502 is located in the middle of the volute 501, and the volute 501 is provided with a flange, and the volute 501 is connected to the casing 700 by a bolt assembly. Furthermore, a convex ring is provided at the left end of the casing 700, and an O-ring is installed on the outer surface of the convex ring. When the casing 700 and the volute 501 are installed, the convex ring is located in the volute 501, and the casing 700 and the volute 501 are sealed by an O-ring.

[0052] In this embodiment, if Figure 3 As shown, a magnetic bearing stator a100 is sealed and installed at the left end of the inner cavity of the casing 700, a magnetic bearing stator b400 is sealed and installed at the right end of the inner cavity of the casing 700, a stator assembly 300 is installed in the middle of the inner cavity of the casing 700, and a rotating shaft assembly 200 is also installed in the casing 700. The rotating shaft assembly 200 passes through the magnetic bearing stator a100, the stator assembly 300 and the magnetic bearing stator b400 in sequence, and the rotating shaft assembly 200 rotates circumferentially under the magnetic force of the magnetic bearing stator a100, the stator assembly 300 and the magnetic bearing stator b400. An impeller 230 is also installed at the left end of the rotating shaft assembly 200. The impeller 230 is located in the volute assembly 500 and is driven by the rotating shaft assembly 200. The impeller 230 rotates at a height of 200, so that the impeller 230 rotates at a high speed, thereby drawing helium from the inlet pipe 502 into the volute 501, and then discharged from the outlet pipe 503, and finally reaches the designated position of the helium required by the lithography machine through the pipeline. Since the helium is rotated at a high speed by the impeller 230, the helium is pressurized in the volute 501, thereby ensuring the transportation of helium. In this embodiment, since the lithography machine has very high requirements on the cleanliness of helium, the casing 700, the volute assembly 500 and the bearing support assembly 600 are all made of titanium alloy, and the surface thereof is coated with a protective coating to prevent the helium delivery pump from being contaminated by the helium after being wrapped by the helium.

[0053] In this implementation, if Figure 8 and Fig. 9 As shown, the rotating shaft assembly 200 includes a hollow core shaft a210 and a hollow core shaft b220. A magnet 240 is installed in the inner cavity of the core shaft a210 or the core shaft b220. The core shaft a210 and the core shaft b220 are magnetically connected by the magnet 240. The magnet 240 is also hollow, thereby reducing the mass of the rotating shaft assembly 200 and ensuring the rotation speed of the rotating shaft. At the same time, the rotating shaft assembly 200 is hollow, and an exhaust channel can be formed during assembly, thereby facilitating the assembly of the helium delivery pump.

[0054] In this embodiment, if Fig. 9As shown, a bushing a212 and a piece to be tested 103 are installed on the core shaft a210 located on the right side of the impeller 230 from left to right in sequence, and a bearing a is mounted on the bushing a212. The bushing a212, the bearing a and the piece to be tested 103 are all located in the magnetic bearing stator b400. Furthermore, a bushing b213 and a radial magnetic bearing punching a214 are also mounted on the core shaft a210, wherein the bushing b213 and the radial magnetic bearing punching a214 are both located on the right side of the piece to be tested 103, and the bushing b213 is located between the piece to be tested 103 and the radial magnetic bearing punching a214.

[0055] In this embodiment, if Fig. 9 As shown, radial magnetic bearing punch b221, measured ring 223, thrust plate 406, bearing b and gasket 226 are arranged on the core shaft b220 from left to right. The radial magnetic bearing punch b221, measured ring 223 and thrust plate 406 are located in the magnetic bearing stator b400. The bearing b and gasket 226 are located in the bearing support assembly 600. Furthermore, a pressing sleeve 222 and a bushing c224 are also arranged on the core shaft b220. The pressing sleeve 222 is located between the radial magnetic bearing punch b221 and the measured ring 223. The bushing c224 is located between the measured ring 223 and the thrust plate 406. A bushing group 225 is also arranged at the right end of the core shaft b220. The bushing group 225 consists of three bushing groups 225. The bearing b is installed on the middle bushing, and the bushings on both sides are arranged on the right end of the core shaft b220. The two bushings limit the axial movement of bearing B. The gasket 226 is located on the right side of the bushing group 225. The core shaft b220 is also a stepped shaft. During installation, the radial magnetic bearing punching piece b221, the pressing sleeve 222, the measured ring 223, the bushing c224 and the thrust plate 406 are assembled on the core shaft b220 in sequence. After assembly, the radial magnetic bearing punching piece b221, the pressing sleeve 222, the measured ring 223, the bushing c224 and the thrust plate 406 rotate synchronously with the core shaft b220, and no relative axial movement can occur. Then, the bushing group 225 and the gasket 226 are assembled on the core shaft b220, and finally locked by the locking nut, so that the left side of the gasket 226 is tightly attached to the bushing group 225, and the right side of the gasket 226 is tightly attached to the locking nut. In the embodiment, as Figure 5 and Figure 6As shown, the bearing support assembly 600 includes an end cover 601, a bearing seat b602, a pressure cover 603 and a sealing cover 604. A through hole is opened in the middle of the end cover 601, and a bearing seat b602 is installed on the left side of the through hole. The bearing b is located in the bearing seat b602. A stepped hole is opened at the right end of the end cover 601, and the stepped hole is connected to the through hole. A pressure cover 603 is installed in the small hole of the stepped hole. The pressure cover 603 is connected to the end cover 601 through a screw assembly, and a sealing cover 604 is installed in the large hole of the stepped hole through a screw assembly, and a sealing ring is arranged between the sealing cover 604 and the large hole of the stepped hole. Therefore, the bearing support assembly 600 is a sealing component. When helium enters the inner cavity of the casing 700, the helium will form a static seal in the casing 700.

[0056] In this embodiment, if Fig.10 and Fig.11 As shown, the magnetic bearing stator a100 includes a support seat 131, a bearing seat a132, a detection assembly a110 and a radial magnetic bearing stator a120. A sealing ring is installed on the outer edge of the support seat 131. The support seat 131 is installed on the left end of the housing 700 through a screw assembly, and the support seat 131 and the inner cavity of the left end of the housing 700 are sealed by a sealing ring. Fig.12 As shown, the support seat 131 has a step cavity a134 and a step cavity b135, the step cavity a134 is located on the left side of the step cavity b135, and a bearing seat a132 is sealed and installed in the step cavity a134, a radial magnetic bearing stator a120 is installed in the step cavity b135, and a detection component a110 for detecting the movement of the test piece 103 is also installed in the step cavity a134, and the detection component a110 is located between the radial magnetic bearing stator a120 and the bearing seat a132, the bearing a is located in the bearing seat a132, and a sealing ring 211 is also installed on the core shaft a210, and the sealing ring 211 is located between the test piece 103 and the impeller 230, and the inner ring of the sealing ring 211 has a gap with the core shaft a210 in the radial direction, and the sealing ring 211 is pressed tightly against the bushing a under the top pressure of the impeller 230. 212. During assembly, the core shaft a210 has multiple steps. During installation, the radial magnetic bearing punching sheet a214 is first installed on the core shaft a210, and then the bushing b213, the test piece 103, the bushing a212, the sealing ring 211 and the impeller 230 are installed, and finally locked by the locking nut. When the locking nut is locked, the sealing ring 211 is tightly attached to the bushing a212. A plurality of grooves are arranged on the outer edge of the sealing ring 211, and the plurality of grooves are arranged at intervals. When the sealing ring 211 rotates at a high speed, an air blockage will be formed between the sealing ring 211 and the inner cavity of the bearing seat a132, so that the cavity in the casing 700 forms a static seal, and the helium in the cavity in the casing 700 cannot enter the volute 501, and the gas in the volute 501 cannot enter the cavity of the casing 700.

[0057] In this embodiment, if Fig. 20 As shown, the piece to be tested 103 includes a tube to be tested and a ring to be tested, and the tube to be tested and the ring to be tested are connected, and both of them are mounted on the core shaft a210. Furthermore, the piece to be tested 103 and the core shaft a210 are installed in a tight fit, that is, the tube to be tested and the ring to be tested are tightly fitted with the core shaft a210. Therefore, during operation, the piece to be tested 103 and the core shaft a210 maintain synchronous movement, that is, when the core shaft a210 moves axially, the piece to be tested 103 will also move axially, and the displacement is the same. When the core shaft a210 moves radially, the piece to be tested 103 will also move radially, and the displacement is the same. The piece to be tested 103 has an axial detection surface and a radial detection surface, the outer circumferential wall of the tube to be tested is the radial detection surface, and the front end face of the ring to be tested is the axial detection surface, and the axial detection surface is a flat end face.

[0058] In this embodiment, if Figure 13~Figure 16 As shown, the detection component a110 includes a fixed shell a101 and a plastic packaging module a102. The plastic packaging module a102 is installed in the fixed shell a101, and a radial displacement detector a116 for detecting the radial displacement of the core shaft a210 is installed in the radial direction of the plastic packaging module a102, and an axial displacement detector 117 for detecting the axial displacement of the core shaft a210 is installed in the axial direction of the plastic packaging module a102. Fig.13 As shown, the fixed shell a101 has a through hole through which the core shaft a210 passes, the core shaft a210 passes through the through hole of the fixed shell a101, and there is a gap between the radial detection surface and the through hole, and there is a gap between the axial detection surface and the fixed shell a101, that is, after the core shaft a210 is installed in the through hole, when the core shaft a210 is working, the core shaft a210 and the test piece 103 on the core shaft a210 are in a suspended state, when the core shaft a210 is subjected to an axial force, the core shaft a210 can move in the axial direction, and when the core shaft a210 is subjected to a radial force, the core shaft a210 can move in the radial direction, When the core shaft a210 moves radially, the radial displacement detector a116 can detect the displacement of the core shaft a210 and transmit the signal to the control system, and then reset the core shaft a210 by changing the magnitude and direction of the magnetic force. Similarly, when the core shaft a210 moves axially, the axial displacement detector 117 can detect the axial displacement of the core shaft a210 and transmit the signal to the control system, and then reset the core shaft a210 by changing the magnitude and direction of the magnetic force. The control system controls the magnitude and direction of the magnetic force, which belongs to the prior art and will not be elaborated here.

[0059] In this embodiment, if Fig.18 and Fig.19 As shown, the plastic encapsulation module a102 includes an annular ring 121, a radial column a122 is arranged in the radial direction of the annular ring 121, and an axial column 123 is axially arranged on the inner side wall of the annular ring 121. Fig.17 As shown, the fixed shell a101 has a through hole through which the core shaft a210 passes, and an annular groove d111 is provided on one end surface of the fixed shell a101, and a radial through hole a112 is provided in the radial direction of the fixed shell a101, and the radial through hole a112 passes through the annular groove d111 and is connected to the through hole, and an axial through hole 113 is also axially provided on the fixed shell a101, an annular ring 121 is installed in the annular groove d111, an axial column 123 is installed in the axial through hole 113, a radial column a122 is installed in the radial through hole a112, a radial displacement detector a116 is installed in the radial column a122, and an axial displacement detector 117 is installed in the axial column 123 During assembly, the radial displacement detector a116 is installed in the radial perforation a112, and the axial displacement detector 117 is installed in the axial perforation 113, and the cables are laid out, and then the plastic-sealed filler is plastic-sealed in the corresponding annular groove d111. After the plastic sealing is completed, the axial displacement detector 117 and the radial displacement detector a116 are plastic-sealed in the plastic sealing module a102. Furthermore, when the plastic sealing module a102 is plastic-sealed, a power amplifier board is also plastic-sealed in the plastic sealing module a102. The axial displacement detector 117 and the radial displacement detector a116 are connected to the power amplifier board through wires, and the wires are plastic-sealed in the plastic sealing module a102.

[0060] In this embodiment, if Fig.17 As shown, a lead wire notch a115 is provided on the end face of the fixed shell a101, and the lead wire notch a115 is connected to the annular groove d111. A protrusion a124 is provided on the outer wall of the annular ring 121, and the protrusion a124 fits in the lead wire notch a115. The cooperation between the protrusion a124 and the lead wire notch a115, the cooperation between the annular ring 121 and the annular groove d111, the cooperation between the axial column 123 and the axial through-hole 113, and the cooperation between the radial column a122 and the radial through-hole a112 ensure the stability of the relative position of the fixed shell a101 and the plastic package module a102, thereby ensuring the accuracy and reliability of the radial displacement detector a116 and the axial displacement detector 117 in detecting the displacement.

[0061] In this embodiment, if Fig.17 As shown, there are two radial through holes a112, and the two radial through holes a112 are arranged at an angle to each other. A radial displacement detector a116 is installed in each radial through hole a112. The two radial displacement detectors a116 further ensure the accuracy and reliability of the displacement detection of the core shaft a210.

[0062] In this embodiment, if Fig.21 and Fig. 22 As shown, the thrust magnetic bearing stator b400 includes a hollow stator housing 10, and heat dissipation fins are arranged on the outer circumference of the stator housing 10. Fig.23 and Fig.24 As shown, the stator housing 10 has a first cavity 12, a second cavity 13 and a third cavity 14 from left to right, and the inner cavity of the stator housing 10 is provided with a retaining ring 15, the first cavity 12 and the second cavity 13 are separated by the retaining ring 15, and the second cavity 13 and the third cavity 14 are connected, a radial magnetic bearing stator b420 is installed in the first cavity 12, a detection component b430 is installed in the second cavity 13, and an axial displacement adjustment component 440 is installed in the third cavity 14. The radial magnetic bearing stator b420 is an existing structure and has not been improved, so it is not repeated. When the helium delivery pump is working, the heat generated by the radial magnetic bearing stator b420 and the axial displacement adjustment component 440 is dissipated through the stator housing 10, and a heat dissipation fin is provided on the stator housing 10. The heat dissipation fin can accelerate the dissipation of heat energy, and the dissipated heat is transferred to the housing of the magnetic levitation motor through the air again, so that the heat dissipation efficiency of the magnetic levitation motor stator component 300 is high.

[0063] In this embodiment, if Fig.25 and Fig.26 As shown, the detection component b430 includes a plastic sealing module b301 and a fixed shell b302. The center of the fixed shell b302 has a through hole through which the core shaft b220 passes. An annular groove a306 is provided on one end surface of the fixed shell b302. A radial through hole b is also radially provided on the fixed shell b302. The radial through hole b is connected to the through hole. The plastic sealing module b301 is ring-shaped, and radial columns b303 are radially arranged on the plastic sealing module b301. The annular portion of the plastic sealing module b301 is fitted in the annular groove a306. The radial columns b303 of the plastic sealing module b301 are fitted in the radial through hole b. A radial displacement detector b304 for detecting the radial displacement of the core shaft b220 is installed in the radial column b303 close to the through hole. Furthermore, there are two radial through holes b, and the two radial through holes b are arranged at angles to each other. There are also two radial columns b303, each A radial column b303 is installed in each radial perforation b. The plastic encapsulation module b301 is made of insulating material. During the manufacturing process, the plastic encapsulation material is poured on the fixed shell b302, and then the radial displacement detector b304 and its wires are plastic encapsulated together. In this embodiment, a power amplifier board can also be plastic encapsulated in the plastic encapsulation module b301, and the radial displacement detector is connected to the power amplifier board through wires, and then the power amplifier board is connected to the control system through a guide. By plastic encapsulating the plastic encapsulation module b301 in the fixed shell b302, the relative position of the plastic encapsulation module b301 and the fixed shell b302 is fixed, so that the fixed shell b302 and the plastic encapsulation module b301 form a whole, and the relative position of the radial displacement detector b304 and the fixed shell b302 is stable, thereby ensuring that the data detected by the radial displacement detector b304 is stable and reliable.

[0064] In this embodiment, a lead-out wire notch b307 is further provided on the fixed shell b302, a protrusion b305 is provided on the plastic package module b301, the protrusion b305 is installed in the lead-out wire notch b307, a wire outlet hole 17 is provided on the stator housing 10, and the wire of the radial displacement detector b304 is led out from the protrusion b305 and then from the wire outlet hole 17.

[0065] In this embodiment, a second stop groove 18 is axially opened on the inner wall of the second cavity 13, and a clamping groove is axially opened on the outer wall of the fixed shell b302. The second stop groove 18 and the clamping groove constitute a positioning groove, and a second stop shaft 308 is installed in the positioning groove. Through the cooperation between the second stop groove 18 and the positioning groove, the detection component b430 has a positioning function during installation, and after the detection component b430 is installed, the detection component b430 will not rotate relative to the stator housing 10.

[0066] In this embodiment, if Fig. 27 and Fig.28 As shown, the axial displacement adjustment component 440 includes a left magnetic induction component, a bushing d403, a thrust plate 406 and a right magnetic induction component. The left magnetic induction component, the bushing d403 and the right magnetic induction component are connected by bolts. The bushing d403 is located between the left magnetic induction component and the right magnetic induction component, and an adjustment cavity 408 is formed between the left magnetic induction component and the right magnetic induction component. The thrust plate 406 is sleeved on the core shaft b220, and the outer edge of the thrust plate 406 is located in the adjustment cavity 408, and the left end face of the thrust plate 406 is aligned with the left magnetic induction component. The components should have a gap, the right end face of the thrust disk 406 has a gap with the right magnetic induction component, the thrust disk 406 and the core shaft B220 move synchronously, that is, when the core shaft B220 rotates, the thrust disk 406 also rotates, when the thrust disk 406 moves axially, the core shaft B220 also moves axially, and the thrust disk 406 has a gap with both the left magnetic induction component and the right magnetic induction component. Therefore, the resistance received by the thrust disk 406 during movement and rotation is small and can be ignored, thereby not affecting the operation of the core shaft B220.

[0067] In this embodiment, if Fig. 27 , Fig.28 and Fig.29As shown, the left magnetic induction component includes a left shell 401 and a left end cover 402. An annular groove b407 is provided on the right end surface of the left shell 401, and a coil is installed in the annular groove b407. The left end cover 402 is installed on the right end surface of the left shell 401. The left end cover 402 has a through hole, and the diameter of the through hole is larger than the minor diameter of the annular groove b407, so that the left end cover 402 cannot completely cover the annular groove b407. Therefore, the left magnetic induction component has a magnetic field channel facing the thrust plate 406. Preferably, the annular groove b407 is a circular groove, and the left end cover 402 is annular, and the left shell 401 is coaxially installed with the end cover 601. Similarly, the right magnetic induction component includes a right shell 405 and a right end cover 404. The left end surface of the right shell 405 is provided with a through hole. There is an annular groove c409, in which a coil is installed, and the right end cover 404 is installed on the left end face of the right outer shell 405. The right end cover 404 has a through hole, and the diameter of the through hole is larger than the minor diameter of the annular groove c409, so that the right end cover 404 cannot completely cover the annular groove c409. Therefore, the right magnetic induction component has a magnetic field channel facing the thrust plate 406. Preferably, the annular groove c409 is a circular groove, and the right end cover 404 is in a circular ring shape, and the left outer shell 401 is coaxially installed with the end cover 601. When in use, the magnetic force of the left magnetic induction component and the right magnetic induction component can be changed to change the force on the left and right sides of the thrust plate 406, so that the thrust plate 406 moves axially to complete the axial position adjustment of the rotating shaft.

[0068] In this embodiment, the outer edges of the left magnetic induction component, the bushing d403 and the right magnetic induction component are flush, and a first stop shaft 410 is axially installed on the outer walls of the left magnetic induction component, the bushing d403 and the right magnetic induction component. A first stop groove 16 is axially opened on the inner wall of the third cavity 14, and part of the first stop shaft 410 is stuck in the first stop groove 16. Through the cooperation between the first stop groove 16 and the first stop shaft 410, the axial displacement adjustment component 440 is easy to install, and after installation, the axial displacement adjustment component 440 will not rotate relative to the stator housing 10.

[0069] In this embodiment, a plurality of electrical sockets 701 are provided on the surface of the casing 700, and wiring terminals are provided inside the electrical sockets 701. The magnetic bearing stator a100, the magnetic bearing stator b400 and the stator assembly 300 are connected to the wiring terminals through the corresponding electrical sockets 701. The connection method here is the prior art and will not be described in detail. A support frame 702 is provided at the bottom of the casing 700 to facilitate the installation of the casing 700.

[0070] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A helium gas delivery pump for chip lithography, characterized in that: The invention comprises a casing, wherein the left end of the casing is sealedly connected with a volute assembly, the right end of the casing is sealedly connected with a bearing support assembly, the left end of the casing inner cavity is sealedly installed with a magnetic bearing stator a, the right end of the casing inner cavity is sealedly installed with a magnetic bearing stator b, the middle part of the casing inner cavity is installed with a stator assembly, and a rotating shaft assembly is also installed in the casing, the rotating shaft assembly passes through the magnetic bearing stator a, the stator assembly and the magnetic bearing stator b in sequence, and the rotating shaft assembly rotates circumferentially under the magnetic force of the magnetic bearing stator a, the stator assembly and the magnetic bearing stator b, and the rotating shaft assembly An impeller is also installed at the left end, and the impeller is located in the volute assembly. The rotating shaft assembly includes a hollow core shaft a and a hollow core shaft b. A magnetic steel is installed in the inner cavity of the core shaft a or the core shaft b. The core shaft a and the core shaft b are magnetically connected through the magnetic steel. The core shaft a located on the right side of the impeller is sequentially installed with a bushing a and a test piece from left to right. The bushing a is sleeved with a bearing a. The bushing a, the bearing a and the test piece are all located in the magnetic bearing stator b. The core shaft b is provided with a radial magnetic bearing punching b, a test ring from left to right. , thrust plate and bearing b, the radial magnetic bearing punching sheet b, the measured ring and the thrust plate are located in the magnetic bearing stator b, and the bearing b is located in the bearing support assembly; the magnetic bearing stator a includes a support seat, a bearing seat a, a detection assembly a and a radial magnetic bearing stator a, a sealing ring is installed on the outer edge of the support seat, the support seat is installed on the left end of the casing through a screw assembly, and the support seat and the left end inner cavity of the casing are sealed by the sealing ring, the support seat has a step cavity a and a step cavity b, the step cavity a is located on the left side of the step cavity b, and the The bearing seat a is sealed and installed in the step cavity a, the radial magnetic bearing stator a is installed in the step cavity b, and a detection component a for detecting the movement of the test piece is also installed in the step cavity a, the detection component a is located between the radial magnetic bearing stator a and the bearing seat a, the bearing a is located in the bearing seat a, and a sealing ring is also installed on the core shaft a, the sealing ring is located between the test piece and the impeller, the inner ring of the sealing ring has a gap with the core shaft a in the radial direction, and the sealing ring is pressed against the bushing a under the top pressure of the impeller;The detection assembly a comprises a fixed shell a and a plastic sealing module a, wherein the plastic sealing module a is installed in the fixed shell a, and a radial displacement detector a for detecting the radial displacement of the core shaft a is installed in the radial direction of the plastic sealing module a, and an axial displacement detector for detecting the axial displacement of the core shaft a is installed in the axial direction of the plastic sealing module a, wherein the plastic sealing module a comprises an annular ring, wherein a radial column a is arranged in the radial direction of the annular ring, and an axial column a is axially arranged on the inner side wall of the annular ring, wherein the fixed shell a has a through hole through which the core shaft a passes, and an end surface of the fixed shell a An annular groove d is provided on the fixed shell a, a radial through hole a is provided in the radial direction of the fixed shell a, the radial through hole a passes through the annular groove d and is connected with the through hole, an axial through hole a is also provided axially on the fixed shell a, the annular ring is installed in the annular groove d, the axial column a is installed in the axial through hole a, the radial column a is installed in the radial through hole a, the radial displacement detector a for detecting the radial displacement of the test piece is installed in the radial column a, and the axial displacement detector for detecting the axial position of the test piece is installed in the axial column a. ; 2. A helium gas delivery pump for chip lithography according to claim 1, characterized in that: The test piece has an axial detection surface and a radial detection surface. The core shaft a passes through a through hole of a fixed shell a, and there is a gap between the radial detection surface and the through hole, and there is a gap between the axial detection surface and the fixed shell a.

3. A helium gas delivery pump for chip lithography according to any one of claims 1 or 2, characterized in that: The magnetic bearing stator b includes a hollow stator shell, which is installed in the inner cavity at the right end of the casing through a screw assembly. Heat dissipation fins are arranged on the outer circumference of the stator shell. The stator shell has a first cavity, a second cavity and a third cavity from left to right. The inner cavity of the stator shell is provided with a retaining ring. The first cavity and the second cavity are separated by the retaining ring, and the second cavity and the third cavity are connected. A radial magnetic bearing stator b is installed in the first cavity, and the radial magnetic bearing punching sheet b is located in the radial magnetic bearing stator b. A detection component b for the radial displacement of the core shaft b is installed in the second cavity, and the measured ring is located in the detection component b. An axial displacement adjustment component is installed in the third cavity, and the thrust plate is located in the axial displacement adjustment component.

4. A helium gas delivery pump for chip lithography according to claim 3, characterized in that: The radial displacement detection component includes a plastic sealing module b and a fixed shell b. The center of the fixed shell b has a through hole through which the rotating shaft passes. The measured ring is located in the through hole, and a radial gap is provided between the measured ring and the through hole. An annular groove a is provided on one end surface of the fixed shell b. The fixed shell b is also radially provided with a radial through hole b, and the radial through hole b is connected with the through hole. The plastic sealing module b is in a ring shape, and a radial column b is radially arranged on the plastic sealing module b. The annular portion of the plastic sealing module b is fitted and installed in the annular groove a, and the radial column b of the plastic sealing module b is fitted and installed in the radial through hole b. A radial displacement detector b for detecting the radial displacement of the rotating shaft is installed in the radial column b close to the through hole.

5. A helium gas delivery pump for chip lithography according to claim 4, characterized in that: The axial displacement adjustment component includes a left magnetic induction component, a bushing and a right magnetic induction component, which are connected by bolts. The bushing is located between the left magnetic induction component and the right magnetic induction component, and an adjustment cavity is formed between the left magnetic induction component and the right magnetic induction component. The outer edge of the thrust plate is located in the adjustment cavity, and a left end surface of the thrust plate has a gap with the left magnetic induction component, and a right end surface of the thrust plate has a gap with the right magnetic induction component.

6. A helium gas delivery pump for chip lithography according to claim 5, characterized in that: The left magnetic induction component includes a left outer shell and a left end cover, an annular groove b is provided on the right end surface of the left outer shell, a coil is installed in the annular groove b, the left end cover is installed on the right end surface of the left outer shell, the left end cover has a through hole, the diameter of the through hole is larger than the minor diameter of the annular groove b, the right magnetic induction component includes a right outer shell and a right end cover, an annular groove c is provided on the left end surface of the right outer shell, a coil is installed in the annular groove c, the right end cover is installed on the left end surface of the right outer shell, the right end cover has a through hole, the diameter of the through hole is larger than the minor diameter of the annular groove c.

7. A helium gas delivery pump for chip lithography according to claim 1, characterized in that: The left end of the casing is connected to the volute assembly through a flange, the right end of the casing is connected to the bearing support assembly through a flange, and an annular heat dissipation fin is provided on the outer side wall of the casing.

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