A high temperature resistant dynamic pressure sensor with triple redundancy function

Abstract

The invention discloses a high-temperature resistant dynamic pressure sensor with triple redundancy function, wherein a first metal sensing diaphragm, a second metal sensing diaphragm and a third metal sensing diaphragm are arranged in a pressure measuring cavity, a first optical fiber probe is inserted into the first vacuum insulation cavity and faces the first metal sensing diaphragm, a second optical fiber probe is inserted into the second vacuum insulation cavity and faces the second metal sensing diaphragm, and a third optical fiber probe is inserted into the third vacuum insulation cavity and faces the third metal sensing diaphragm; the first optical fiber probe, the second optical fiber probe and the third optical fiber probe are connected to a light source and a signal receiving module, the light source and the signal receiving module are connected to an external host computer, a permeable membrane is arranged at the bottom opening of the pressure measuring cavity, wherein a plurality of air ducting holes are arranged on the permeable membrane, and the sensor can effectively solve the problem that three sensors cannot be installed simultaneously due to limited space.

Description

Technical Field

[0001] The invention relates to a high temperature resistant dynamic pressure sensor, in particular to a high temperature resistant dynamic pressure sensor with triple redundancy function. Background Art

[0002] Triple redundancy technology has been widely used in industries that require high reliability and high availability, such as aerospace, military, railways, petroleum, chemical industry, and electric power. Triple redundancy technology adopts the principle of hardware fault tolerance. In the event of a single point failure in the system, the triple redundancy system can shield system errors and continue to work normally while issuing an alarm, thereby increasing the availability of the system. If two redundant components in the same link fail, the system will also enter a fail-safe state to avoid safety accidents.

[0003] Triple redundancy technology has great advantages in protecting the safe and stable operation of equipment. However, in actual use, due to the limited space for installing sensors on the operating equipment, three sensors cannot be installed at the same time, resulting in poor application of triple redundancy technology. For example, in the dynamic pressure monitoring of the operating equipment, there may be a phenomenon of false alarms and failures caused by the failure of a single sensor. Summary of the invention

[0004] The purpose of the present invention is to overcome the shortcomings of the above-mentioned prior art and provide a high temperature resistant dynamic pressure sensor with triple redundancy function, which can effectively solve the problem that three sensors cannot be installed simultaneously due to space limitations.

[0005] To achieve the above-mentioned object, the high temperature resistant dynamic pressure sensor with triple redundancy function described in the present invention comprises a first optical fiber probe, a second optical fiber probe, a third optical fiber probe, an upper sensor cover, an upper heat insulation layer, a lower sensor cover, a lower heat insulation layer, a permeable membrane, a mounting nut, and a light source and a signal receiving module;

[0006] An upper insulation layer is arranged between the bottom of the upper cover of the sensor and the top of the lower cover of the sensor, a lower insulation layer is arranged at the bottom of the lower cover of the sensor, and a pressure measuring cavity is arranged at the bottom of the lower cover of the sensor, wherein a first metal sensing diaphragm, a second metal sensing diaphragm and a third metal sensing diaphragm are arranged in the pressure measuring cavity, wherein a first vacuum insulation cavity is formed between the first metal sensing diaphragm and the top of the pressure measuring cavity, a second vacuum insulation cavity is formed between the second metal sensing diaphragm and a side wall of the pressure measuring cavity, and a third vacuum insulation cavity is formed between the third metal sensing diaphragm and the other side wall of the pressure measuring cavity. The first optical fiber probe passes through the upper cover of the sensor and the upper insulation layer, then passes through the side wall of the lower cover of the sensor, and is inserted into the first vacuum insulation cavity, and faces the first metal sensing diaphragm. The second optical fiber probe passes through the upper cover of the sensor, then is inserted into the second vacuum insulation cavity, and faces the second metal sensing diaphragm. The third optical fiber probe passes through the upper cover of the sensor and the upper insulation layer, then passes through the side wall of the lower cover of the sensor, and is inserted into the third vacuum insulation cavity, and faces the third metal sensing diaphragm.

[0007] The first optical fiber probe, the second optical fiber probe and the third optical fiber probe are connected to the light source and the signal receiving module, the light source and the signal receiving module are connected to an external host computer, a permeable membrane is arranged at the bottom opening of the pressure measuring chamber, wherein the permeable membrane is provided with a plurality of air inlet holes.

[0008] The axes of the sensor upper cover, the upper thermal insulation layer, the sensor lower cover and the lower thermal insulation layer coincide.

[0009] The sensor upper cover, the upper heat insulation layer, the sensor lower cover and the lower heat insulation layer are connected by diffusion welding.

[0010] It also includes a mounting nut, which is sleeved on the periphery of the sensor upper cover, the upper heat insulation layer and the sensor lower cover.

[0011] The outer diameter of the sensor cover is 12mm and the length is 15mm;

[0012] The outer diameter of the upper insulation layer is 12 mm and the thickness is 2 mm;

[0013] The outer diameter of the upper insulation layer is 12 mm, the length of the pressure measuring cavity is 6 mm, the width is 2 mm, and the height is 2 mm;

[0014] The outer diameter of the lower insulation layer is 12 mm and the thickness is 5 mm;

[0015] The diameters of the first optical fiber probe, the second optical fiber probe, and the third optical fiber probe are all 1 mm;

[0016] The first metal sensing diaphragm, the second metal sensing diaphragm and the third metal sensing diaphragm all have a side length of 3 mm and a thickness of 1 mm;

[0017] The diameter of the air duct hole is 0.5 mm.

[0018] The light source and the signal receiving module are connected to an external host computer via a signal line.

[0019] The air vents are evenly distributed.

[0020] The first optical fiber probe, the second optical fiber probe and the third optical fiber probe are connected to the signal receiving module via the optical fiber bundle and the light source.

[0021] The present invention has the following beneficial effects:

[0022] The high temperature resistant dynamic pressure sensor with triple redundancy function described in the present invention adopts a non-contact optical fiber sensor during specific operation. Three metal sensing diaphragms are arranged in the pressure measuring chamber. The deformation of the three metal sensing diaphragms is tested respectively by three optical fiber probes to determine the pressure of the working fluid to be measured in three directions. In actual operation, only one pressure measuring installation hole is required to obtain 3 pressure measurement signals at the same time, which solves the problem of false alarm causing equipment failure due to the inability to install three dynamic pressure sensors at the same time due to limited installation space. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a structural schematic diagram of the present invention.

[0024] Among them, 1 is the first optical fiber probe, 2 is the second optical fiber probe, 3 is the third optical fiber probe, 4 is the upper cover of the sensor, 5 is the upper insulation layer, 6 is the lower cover of the sensor, 7 is the lower insulation layer, 8 is the third vacuum insulation cavity, 9 is the third metal sensing diaphragm, 10 is the first vacuum insulation cavity, 11 is the pressure measuring cavity, 12 is the permeable membrane, 13 is the first metal sensing diaphragm, 14 is the second metal sensing diaphragm, 15 is the second vacuum insulation cavity, 16 is the mounting nut, 17 is the optical fiber bundle, 18 is the light source and signal receiving module, and 19 is the signal line. DETAILED DESCRIPTION

[0025] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiment of the present invention. Obviously, the described embodiment is only an embodiment of a part of the present invention, not all embodiments, and is not intended to limit the scope of the present invention. In addition, in the following description, the description of well-known structures and technologies is omitted to avoid unnecessary confusion of the concepts disclosed in the present invention. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work should fall within the scope of protection of the present invention.

[0026] The accompanying drawings show schematic diagrams of structures according to embodiments disclosed in the present invention. These figures are not drawn to scale, and some details are magnified and some details may be omitted for the purpose of clear expression. The shapes of various regions and layers shown in the figures and the relative sizes and positional relationships therebetween are only exemplary, and may deviate in practice due to manufacturing tolerances or technical limitations, and those skilled in the art may additionally design regions / layers with different shapes, sizes, and relative positions according to actual needs.

[0027] refer to Figure 1 The high temperature resistant dynamic pressure sensor with triple redundancy function described in the present invention comprises a first optical fiber probe 1, a second optical fiber probe 2, a third optical fiber probe 3, a sensor upper cover 4, an upper thermal insulation layer 5, a sensor lower cover 6, a lower thermal insulation layer 7, a permeable membrane 12, a mounting nut 16, an optical fiber bundle 17, a light source and a signal receiving module 18 and a signal line 19;

[0028] An upper insulation layer 5 is provided between the bottom of the sensor upper cover 4 and the top of the sensor lower cover 6, a lower insulation layer 7 is provided at the bottom of the sensor lower cover 6, and a pressure measuring cavity 11 is provided at the bottom of the sensor lower cover 6, wherein a first metal sensing diaphragm 13, a second metal sensing diaphragm 14 and a third metal sensing diaphragm 9 are provided in the pressure measuring cavity 11, wherein a first vacuum insulation cavity 10 is formed between the first metal sensing diaphragm 13 and the top of the pressure measuring cavity 11, a second vacuum insulation cavity 15 is formed between the second metal sensing diaphragm 14 and a side wall of the pressure measuring cavity 11, and a third metal sensing diaphragm 9 is provided in the pressure measuring cavity 11. 9 and the other side wall of the pressure measuring cavity 11 form a third vacuum insulation cavity 8, the first optical fiber probe 1 passes through the sensor upper cover 4 and the upper insulation layer 5, and then passes through the side wall of the sensor lower cover 6 to be inserted into the first vacuum insulation cavity 10, and faces the first metal sensing diaphragm 13, the second optical fiber probe 2 passes through the sensor upper cover 4 and then is inserted into the second vacuum insulation cavity 15, and faces the second metal sensing diaphragm 14, the third optical fiber probe 3 passes through the sensor upper cover 4 and the upper insulation layer 5, and then passes through the side wall of the sensor lower cover 6 to be inserted into the third vacuum insulation cavity 8, and faces the third metal sensing diaphragm 9.

[0029] The first optical fiber probe 1, the second optical fiber probe 2 and the third optical fiber probe 3 are connected to the signal receiving module 18 via the optical fiber bundle 17 and the light source, and the light source and the signal receiving module 18 are connected to the host computer via the signal line 19. A permeable membrane 12 is provided at the bottom opening of the pressure measuring chamber 11, wherein the permeable membrane 12 is provided with a plurality of air introduction holes.

[0030] The outer diameter of the sensor cover 4 is 12mm and the length is 15mm. The outer diameter of the upper insulation layer 5 is 12mm and the thickness is 2mm. The side length of the central square hole on the upper insulation layer 5 is 2mm. The outer diameter of the upper insulation layer 5 is 12mm. The length of the pressure measuring cavity 11 is 6mm, the width is 2mm and the height is 2mm. The outer diameter of the lower insulation layer 7 is 12mm and the thickness is 5mm. The side length of the central square hole on the lower insulation layer 7 is 2mm. The diameters of the first optical fiber probe 1, the second optical fiber probe 2 and the third optical fiber probe 3 are all 1mm. The side lengths of the first metal sensing diaphragm 13, the second metal sensing diaphragm 14 and the third metal sensing diaphragm 9 are all 3mm and 1mm thick. The aperture of the air duct is 0.5mm.

[0031] The axes of the sensor upper cover 4, the upper insulation layer 5, the sensor lower cover 6 and the lower insulation layer 7 coincide with each other, and the sensor upper cover 4, the upper insulation layer 5, the sensor lower cover 6 and the lower insulation layer 7 are connected by diffusion welding. The mounting nut 16 is sleeved on the periphery of the sensor upper cover 4, the upper insulation layer 5 and the sensor lower cover 6.

[0032] The working process of the present invention is:

[0033] The measured working fluid enters the pressure measuring chamber 11 through the air inlet hole, and the first metal sensing diaphragm 13, the second metal sensing diaphragm 14 and the third metal sensing diaphragm 9 are deformed under the action of the pressure of the measured working fluid. The light source and signal receiving module 18 emits a measuring light beam, and transmits it to the first metal sensing diaphragm 13, the second metal sensing diaphragm 14 and the third metal sensing diaphragm 9 through the first optical fiber probe 1, the second optical fiber probe 2 and the third optical fiber probe 3 respectively. After being reflected by the first metal sensing diaphragm 13, the second metal sensing diaphragm 14 and the third metal sensing diaphragm 9, they return to the light source and signal receiving module 18 through the first optical fiber probe 1, the second optical fiber probe 2 and the third optical fiber probe 3 respectively. The light source and signal receiving module 18 transmits the three The reflected light in three directions is converted into a voltage signal, and then the voltage signals obtained in the three directions are sent to the host computer. The host computer determines the deformation variable of the metal sensing diaphragm according to the size of the voltage signal, and then determines the pressure of the working fluid to be measured in the direction according to the deformation variable of the metal sensing diaphragm. It should be noted that the size of the voltage signal determines the deformation variable of the metal sensing diaphragm in a one-to-one correspondence, and the deformation variable of the metal sensing diaphragm corresponds to the pressure of the working fluid to be measured in a one-to-one correspondence. In addition, during the measurement process, the common insulation effect of the upper insulation layer 5, the lower insulation layer 7, the first vacuum insulation chamber 10, the second vacuum insulation chamber 15 and the third vacuum insulation chamber 8 effectively prevents the heat of the working fluid to be measured from being transferred outward to burn the optical fiber probe.

[0034] Although the present invention has been described in detail above with general descriptions and specific embodiments, it is obvious to those skilled in the art that some modifications or improvements may be made thereto based on the present invention. Therefore, these modifications or improvements made without departing from the spirit of the present invention all fall within the scope of protection claimed by the present invention.

Claims

1. A high temperature resistant dynamic pressure sensor with triple redundancy function, characterized in that: It comprises a first optical fiber probe (1), a second optical fiber probe (2), a third optical fiber probe (3), a sensor upper cover (4), an upper heat insulation layer (5), a sensor lower cover (6), a lower heat insulation layer (7), a permeable membrane (12), a mounting nut (16), and a light source and a signal receiving module (18); An upper heat insulation layer (5) is arranged between the bottom of the upper cover (4) of the sensor and the top of the lower cover (6) of the sensor, a lower heat insulation layer (7) is arranged at the bottom of the lower cover (6) of the sensor, and a pressure measuring cavity (11) is arranged at the bottom of the lower cover (6) of the sensor, wherein a first metal sensing diaphragm (13), a second metal sensing diaphragm (14) and a third metal sensing diaphragm (9) are arranged in the pressure measuring cavity (11), wherein a first vacuum heat insulation cavity (10) is formed between the first metal sensing diaphragm (13) and the top of the pressure measuring cavity (11), a second vacuum heat insulation cavity (15) is formed between the second metal sensing diaphragm (14) and a side wall of the pressure measuring cavity (11), and a third metal sensing diaphragm (9) is formed between the third metal sensing diaphragm (9) and the side wall of the pressure measuring cavity (11). ) and the other side wall of the pressure measuring chamber (11), a third vacuum insulation chamber (8) is formed between the first optical fiber probe (1) and the second optical fiber probe (2) after passing through the upper cover (4) and the upper insulation layer (5) of the sensor and then passing through the side wall of the lower cover (6) of the sensor to be inserted into the first vacuum insulation chamber (10), and facing the first metal sensing diaphragm (13); the second optical fiber probe (2) after passing through the upper cover (4) of the sensor and then being inserted into the second vacuum insulation chamber (15), and facing the second metal sensing diaphragm (14); the third optical fiber probe (3) after passing through the upper cover (4) and the upper insulation layer (5) of the sensor and then passing through the side wall of the lower cover (6) of the sensor to be inserted into the third vacuum insulation chamber (8), and facing the third metal sensing diaphragm (9); The first optical fiber probe (1), the second optical fiber probe (2) and the third optical fiber probe (3) are connected to a light source and a signal receiving module (18), the light source and the signal receiving module (18) are connected to an external host computer, and a permeable membrane (12) is provided at the bottom opening of the pressure measuring chamber (11), wherein the permeable membrane (12) is provided with a plurality of air inlet holes.

2. The high temperature resistant dynamic pressure sensor with triple redundancy function according to claim 1, characterized in that: The axes of the sensor upper cover (4), the upper heat insulation layer (5), the sensor lower cover (6) and the lower heat insulation layer (7) coincide with each other.

3. The high temperature resistant dynamic pressure sensor with triple redundancy function according to claim 1, characterized in that: The sensor upper cover (4), the upper heat insulation layer (5), the sensor lower cover (6) and the lower heat insulation layer (7) are connected by diffusion welding.

4. The high temperature resistant dynamic pressure sensor with triple redundancy function according to claim 1, characterized in that: It also includes a mounting nut (16); the mounting nut (16) is sleeved on the periphery of the sensor upper cover (4), the upper heat insulation layer (5) and the sensor lower cover (6).

5. The high temperature resistant dynamic pressure sensor with triple redundancy function according to claim 1, characterized in that: The outer diameter of the sensor cover (4) is 12 mm and the length is 15 mm; The outer diameter of the upper heat insulation layer (5) is 12 mm and the thickness is 2 mm; The outer diameter of the upper heat insulating layer (5) is 12 mm, the length of the pressure measuring cavity (11) is 6 mm, the width is 2 mm, and the height is 2 mm; The outer diameter of the lower heat insulation layer (7) is 12 mm and the thickness is 5 mm; The diameters of the first optical fiber probe (1), the second optical fiber probe (2) and the third optical fiber probe (3) are all 1 mm; The first metal sensing diaphragm (13), the second metal sensing diaphragm (14) and the third metal sensing diaphragm (9) all have a side length of 3 mm and a thickness of 1 mm; The diameter of the air duct hole is 0.5 mm.

6. The high temperature resistant dynamic pressure sensor with triple redundancy function according to claim 1, characterized in that: The light source and the signal receiving module (18) are connected to an external host computer via a signal line (19).

7. The high temperature resistant dynamic pressure sensor with triple redundancy function according to claim 1, characterized in that: The air vents are evenly distributed.

8. The high temperature resistant dynamic pressure sensor with triple redundancy function according to claim 1, characterized in that: The first optical fiber probe (1), the second optical fiber probe (2) and the third optical fiber probe (3) are connected to a signal receiving module (18) via an optical fiber bundle (17) and a light source.

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