Outer box for moving photomask inner box with improved fastening force

Abstract

An outer box for moving a photomask inner box with improved fastening force. The present invention provides an outer box that improves fastening force and prevents exposure to the outside by fastening parts for fastening side frames provided on the outer box to a main frame, and relates to an outer box for moving a photomask inner box, wherein the fastening force is improved by a fastening part structure for fastening the main frame and the side frame to each other, the fastening part adopts a non-protruding structure, and damage to the fastening part can be prevented in advance during movement, and a support part for improving the fixing force is used to fix a bracket to a shelf part inside the outer box, and the bracket is an essential structural element when the photomask inner box is moved to the inside of the outer box, and an anti-folding component is provided to prevent the sheet from folding when the sheet is connected to the frame constituting the outer box by rivets, and to support the bracket.

Description

Technical Field

[0001] The present invention relates to an outer box for moving a photomask inner box, and more particularly to an outer box that improves fastening force and prevents exposure to the outside by fastening parts for fastening side frames provided on the outer box to a main frame. Background Art

[0002] First, in the prior art, the mobile box is usually a rectangular flat-plate-shaped substrate, including a glass substrate for manufacturing a liquid crystal display (LCD) panel or a plasma display (PD) panel, a mask base with a shading film or an anti-etching film laminated on the surface of the glass substrate, and a photomask for forming a circuit pattern through a photolithography process.

[0003] Such a substrate requires a high degree of cleanliness in each manufacturing process and in a film forming process or an exposure process which are subsequent processes, and is therefore manufactured in a clean room maintained at a cleanliness level of, for example, Class 100.

[0004] In a clean room, manufactured substrates are housed in a substrate box (inner box) having a dust-free structure and are sealed.

[0005] The substrate as described above is a heavy object.

[0006] For example, in the case of a substrate with a diagonal dimension of about 18 m, the mass of a single substrate is about 50 kg, and in the case of a substrate with a diagonal dimension of about 24 m, the mass of a single substrate exceeds 100 kg.

[0007] Therefore, it is not practical to lift and transport the substrate box containing the substrates by manpower.

[0008] In order to facilitate the movement of a substrate box that accommodates substrates, casters are provided at the lower end of the substrate box.

[0009] In a conventional substrate box, the substrate is housed in the substrate box in a vertical position with the front and back surfaces being vertical.

[0010] Alternatively, after the substrates are accommodated in the substrate box, the substrate box is stood up so that the substrates are in the vertical position.

[0011] Casters are provided at the four corners of the bottom of the box which is the lower end at this time.

[0012] In a clean room with a medium cleanliness level called a pass-through window, a substrate box that accommodates substrates is wrapped with a box cover made of a cloth that suppresses dust generation and is used as a clean cloth.

[0013] The box cover has an opening on the lower surface side and has a bag shape that covers the box body from above. A bottom portion is formed on the lower surface side, and the bottom portion extends from the vertical side of one side (for example, the surface side of the substrate) extending up and down parallel to each other to the vertical side of the other side (for example, the back side of the substrate).

[0014] For example, the bottom portion passes through the lower side of the box body in an area where casters are not arranged, is formed into a tongue shape connecting the vertical surfaces, and is fastened and attached to the vertical surface side on the other side by a surface buckle.

[0015] Therefore, when the substrate box is transported, the box body portion is covered with the box cover portion, and particles (dust) are not easily attached thereto.

[0016] The substrate box packed by the box cover portion is moved from the pass-through window to a normal environment.

[0017] During transportation, the substrate box (inner box) wrapped by the box cover is placed in a larger transport box (outer box) and transported in a strictly protected state.

[0018] Since the substrate is a heavy object as described above, it is difficult for a person to lift and move the substrate transport box.

[0019] Therefore, casters are also provided at the lower end of the substrate transport box.

[0020] The substrates packed in the substrate box, the box cover, and the substrate transport box are moved within the factory using casters or a forklift, and are transported from the substrate manufacturing factory to the factory of the next process by transportation tools such as trucks or airplanes.

[0021] In recent years, LCD panels and PD panels have become larger, and large substrates with a diagonal size exceeding 2m have begun to be required.

[0022] As the substrate becomes larger, the mass also increases, for example, the mass of a single substrate of a substrate with a size of 1800×1600×17 mm is as high as 110 kg.

[0023] In order to protect and stably move such enlarged and heavy substrates, there are various problems that cannot be solved by simply scaling up the existing substrate boxes.

[0024] First, as in the related art, when the substrate is accommodated in the substrate box in a vertical position, there is a problem that the size of the substrate box becomes larger than the required shape size based on the size of the substrate.

[0025] That is, as the size of the substrate increases, the center of gravity becomes higher, and therefore, in consideration of the turning stability, the thickness of the substrate box needs to be greatly increased than previously required.

[0026] In the vertical position with the short side of the substrate extending in the vertical direction, the height of the substrate box is 1800 mm, and the center of gravity is at a height of 900 mm. At this time, if the substrate box is tilted by about 8 degrees due to the tilt of the floor surface, the substrate box 101 is turned over.

[0027] When the static inversion angle is set to 15°, which is a standard for general home electrical appliances, the required thickness of the substrate box is about 480 mm.

[0028] At this time, the volume of the space occupied by the substrate box is approximately twice that of the substrate box based on the size of the substrate.

[0029] Considering that the substrate box accommodating the substrates is a heavy object with a mass of about 300 kg and that there is a great risk of damage to the expensive substrates when flipping, the flip angle is preferably set to a larger angle.

[0030] When the static flip angle is set to 30°, the volume of the space occupied by the substrate box exceeds four times the size of the substrate box based on the size of the substrate.

[0031] On the other hand, when casters are provided at the four corners of the bottom surface, the spacing between the fulcrums supporting the load becomes wider, so the substrate box is easily bent and deformed by the load acting on the substrate box. If an attempt is made to suppress this by adding a structure, the problem of complex box structure will arise.

[0032] Also, in such a conventional case cover portion, there has been pointed out a problem that the effect of preventing particles from adhering to the case cover portion when transporting a substrate is still insufficient.

[0033] Specifically, when the box cover is opened in a clean room of medium cleanliness as a destination for transporting substrates, a large amount of particles actually adhere to the outer surface of the box body, and a lot of man-hours are required to remove these particles.

[0034] That is, there is a problem that the loading process from opening the substrate box to taking out the substrate requires time.

[0035] Furthermore, as described above, when transporting the substrate from the substrate manufacturing plant to the plant for the next process, transportation means such as trucks and airplanes are used.

[0036] During such transportation, shock or vibration is applied to the substrate transport box from the outside (eg, the floor surface of a truck).

[0037] However, the existing publications do not provide a means for absorbing these shocks and vibrations.

[0038] Therefore, there is a concern that external shock or vibration may be transmitted to the substrate through the substrate transport box and the substrate box, thereby damaging the substrate.

[0039] Rivets are generally used to fix the frame set in the box and the sheet connected to the frame, but the rivets cause the sheet to bend, and foreign matter is introduced from the outside to the inside of the box through the gap caused by the bending, resulting in the problem of foreign matter adhering to the substrate.

[0040] Furthermore, when the substrate is moved into the box, a bracket having a predetermined slope is used. After being moved into the box, the bracket is disposed on one side of the box. During the arrangement, the fixing force is reduced, which may cause damage to the substrate.

[0041] Furthermore, the fastening parts for fastening the main frame and the side frames provided on the outer box to each other are also simply installed and fixed, so the outer box is frequently damaged, twisted or opened during movement, and the side frames are opened due to damage of the simply installed and fixed fastening parts.

[0042] In this regard, Korean Patent Publication No. 10-2014-0065874 "Base Mask and Photomask Packaging Container" and Korean Patent Publication No. 10-2015-0013515 "Substrate Box, Substrate Transport Box, Box Cover, Substrate Transport System and Substrate Transport Method" have been disclosed, but the above-mentioned problems have not been improved. Summary of the invention

[0043] Technical problem to be solved by the invention

[0044] The present invention is proposed to solve the problems of the prior art as described above. The main technical problem is to provide an outer box for moving a photomask inner box. The fastening force is improved by a fastening portion structure for fastening a main frame and a side frame to each other. The fastening portion adopts a non-protruding structure, and damage to the fastening portion can be prevented in advance during movement. A support portion for improving the fixing force is used to fix a bracket to a rest portion inside the outer box. The bracket is an essential structural element when moving the photomask inner box to the inside of the outer box. An anti-folding component is provided to prevent the sheet from folding when the sheet is connected to the frame constituting the outer box by rivets, and to support the bracket.

[0045] Technical solutions to solve problems

[0046] To this end, the technical feature of the present invention is to provide an outer box for moving a photomask inner box with improved fastening force, the outer box for moving the photomask inner box comprising: a frame for storing and moving a photomask inner box with a photomask placed inside and having wheels at the bottom to form an internal space; a shelf portion arranged on the inner lower side of the frame; a danpla sheet combined with the outer side of the frame; a plurality of wheels connected to the lower part of the frame; a track located at the upper part of the shelf portion for moving the photomask inner box; and a bracket for moving the photomask inner box to the inside and outside using the track, the outer box for moving the photomask inner box with improved fastening force is characterized in that the frame is composed of a main frame and a side frame, the main frame forms an integral frame, and on both sides of the main frame, side frames are respectively located on both sides of the main frame, and fastening parts for fixing the side frames on both sides are arranged on the front and back of the main frame.

[0047] Effects of the Invention

[0048] The outer box for moving the inner box of the photomask with improved fastening force according to the present invention has the following effects: the fastening force is improved by the fastening part structure of the main frame and the side frame, and the fastening part will not collide during movement due to the non-protruding fastening part, so damage can be prevented in advance, and the supporting force is improved by supporting the bracket required for moving the inner box of the photomask to the inside and outside of the outer box from the inside of the outer box to the sides, front and back. When the frame is combined with the sheet, an anti-folding component can be provided at the combined part to prevent the sheet from folding in advance, thereby preventing foreign matter from flowing in through the folded part. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] Figure 1 A three-dimensional diagram showing the combination of the mobile outer box of the present invention;

[0050] Figure 2 To show Figure 1 The main view of the connection;

[0051] Figure 3 To show Figure 2 An enlarged view of the connection of the fastening portion in the structure;

[0052] Figure 4 To show Figure 2 A front view of another embodiment of the present invention;

[0053] Figure 5 To show Figure 4 An enlarged view of the connection of the fastening portion in the structure;

[0054] Figure 6 A top view showing the operation of the locking member in the structure of the present invention;

[0055] Figure 7 To show Figure 6 A side view of another embodiment of the present invention;

[0056] Figure 8 A front cross-sectional view showing a mobile outer box of the present invention;

[0057] Fig. 9 To show Figure 8 A top cross-sectional view of line AA;

[0058] Fig.10 A side sectional view showing a mobile outer box of the present invention;

[0059] Fig.11 A top view showing the support portion A and the bracket B of the present invention;

[0060] Fig.12 A side view showing an embodiment of the front bracket and the back bracket of the present invention;

[0061] Fig.13 To show Fig.11 A top view of the state where A and B are combined;

[0062] Fig.14 A side view showing an existing rivet connection;

[0063] Fig.15 A side view showing a rivet connection of the present invention;

[0064] Fig.16 It is a front cross-sectional view showing an embodiment of an outer box of the present invention.

[0065] Description of Reference Numerals

[0066] 10: Outer box for moving the inner box of the photomask

[0067] 20: Photomask inner box 21: Wheel

[0068] 30: Fastening part 31: Fastening hook 31a: Locking groove

[0069] 33: Fastening unit 33a: Locking member 33b: Rotating member

[0070] 100: frame 110: main frame 120: side frame

[0071] 200: shelf portion 210: support portion

[0072] 211: Side bracket 213: Front bracket 215: Back bracket

[0073] 300: Tanpura sheet 400: Wheel 500: Track

[0074] 600: Bracket 700: Rivet 800: Anti-folding part DETAILED DESCRIPTION

[0075] Hereinafter, with reference to the accompanying drawings, Figures 1 to 16 , describing the preferred structure and function of the present invention for achieving the stated purpose.

[0076] First, in the outer box for moving the inner box of the photomask with improved fastening force of the present invention, the outer box for moving the inner box of the photomask comprises: a frame 100, which is used to store and move the inner box of the photomask with a photomask placed therein and having wheels 21 at the bottom and forming an internal space; a shelf 200, which is arranged at the lower side of the inner part of the frame 100; a dampura sheet 300, which is combined with the outer side of the frame 100; a plurality of wheels 400 connected to the lower part of the frame 100; a track 500, which is located at the shelf The upper part of the placement portion 200 is used to move the photomask inner box; and the bracket 600 uses the track 500 to move the photomask inner box to the inside and outside. The frame 100 is composed of a main frame 110 and a side frame 120. The main frame 110 forms an integral frame. On both sides of the main frame 110, the side frames 120 are respectively located on the two side surfaces of the main frame 110. Fastening portions 30 for fixing the side frames 120 on both sides are provided on the front and back of the main frame 110.

[0077] The present invention described above will be described in more detail.

[0078] First, the outer box for moving the photomask inner box of the present invention is used to store and move the photomask inner box which has a photomask placed inside and has wheels 21 at the bottom. The outer box for moving the photomask inner box is roughly composed of a frame 100, a shelf 200, a dampura sheet 300, wheels 400, rails 500 and a bracket 600.

[0079] The frame 100 is composed of a main frame 110 and side frames 120 respectively located on two sides of the main frame 110 , and is provided with a fastening portion 30 for fastening and fixing the main frame 110 and the side frames 120 to each other.

[0080] When fastened to the main frame 110, the upper portion of the side frame 120 is fastened for the first time by a hinge or hinge provided on the upper portion of the main frame 110, and after the side frame 120 is closed, it is fastened for the second time by the fastening portion 30, thereby completing the locking.

[0081] The fastening parts 30 are used to prevent the side frames 120 from opening after being fixed to the main frame 110 , and a plurality of fastening parts 30 are provided on the front and back sides of the main frame 110 .

[0082] The fastening portion 30 is used to connect and fix the main frame 110 and the side frame 120 to each other, and is formed in a protruding type or a non-protruding type that protrudes outward.

[0083] The protruding fastening portion 30 includes a fastening hook 31 provided on the side frame 120 and a fastening unit 33 provided on the main frame 110 and having a locking member 33 a locked to the fastening hook 31 .

[0084] The fastening hook 31 is formed into a simple protruding type, or a bent portion is formed in the direction opposite to the locking direction after protruding, so as to prevent easy separation even after fastening.

[0085] Furthermore, a closing portion is separately provided on the fastening hook 31 to prevent separation after the locking member 33a is completely locked.

[0086] Through the structure of the closing portion, the fastening of the locking part 33a operates in the following manner: if the closing portion is pressed for the first time, a part of the closing portion is pressed to generate a space, through which the locking part 33a contacts the fastening hook 31, and at this time, the pressed part of the closing portion is restored to its original position by a spring arranged on one side.

[0087] Thereby, unless an external force is applied or it is damaged, the locking member 33a will not be separated from between the closing portion and the fastening hook 31, and the fastening force is increased.

[0088] The non-protruding fastening portion 30 is composed of a fastening hook 31 and a fastening unit 33. In the fastening hook 31, a locking groove 31a is formed in a part of the inner side of the side frame 120. In the fastening unit 33, a locking component 33a formed by a first bending portion for locking the side frame 120 through the locking groove 31a, a rotating component 33b for rotating the locking component 33a, and a switch component for operating the rotating component 33b are provided on the main frame 110.

[0089] The fastening hook 31 is a member for locking the locking member 33 a , and the locking groove 31 a is a groove for ensuring a rotational space so that the locking member 33 a locked by rotation is locked to the fastening hook 31 .

[0090] A first bent portion is formed at an end of the locking member 33 a so as to be locked to the fastening hook 31 through the locking groove 31 a.

[0091] The locking member 33a is rotated by the rotating member 33b, and a separate opening member and a closing member are provided to rotate the rotating member 33b.

[0092] Below, refer to Figure 6 Provide explanation.

[0093] When the closing member is pressed, the rotating member 33 b stands up, the locking member 33 a is lifted up, and the lifted locking member 33 a is fastened to the fastening hook 31 through the locking groove 31 a.

[0094] When the opening member is pressed, the rotating member 33 b moves down, the locking member 33 a moves down, and the locking member 33 a is separated from the fastening hook 31 , whereby the side frame 120 is opened.

[0095] A cover portion that surrounds and covers the outer side of the protrusion type fastening portion 30 or the non-protrusion type fastening portion 30 is also provided.

[0096] The cover surrounds the outer side of the protruding or non-protruding fastening part 30 to prevent damage in advance and thus provide primary protection, and also prevent problems caused by exposure and thus provide secondary protection.

[0097] Furthermore, in the case of the non-protruding fastening portion 30, the fastening portion 30 is located inside the surface where the main frame 110 is located, and even if a cover is provided, the fastening portion 30 will not be exposed to the outside from the surface where the main frame 110 is located.

[0098] The frame 100 is used to constitute the entire frame of the mobile outer box 10 and is generally made of aluminum or iron.

[0099] The placement portion 200 is disposed in the inner space of the frame 100 and at the center of the bottom surface.

[0100] A bracket 600 to be described later is placed on the placement portion 200 .

[0101] The placement portion 200 is provided with a support portion 210 , and the support portion 210 allows a bracket 600 to be described later to be located on the placement portion 200 .

[0102] The support portion 210 has the same shape as the bracket 600 , and is wide at the front and becomes narrower toward the back.

[0103] The support portion 210 is provided with a placement portion for placing the bracket 600 , a side support 211 , a front support 213 , and a back support.

[0104] The side supports 211 are respectively disposed at both sides to support the side portions of the bracket 600 when the bracket 600 is placed on the placement portion.

[0105] The side bracket 211 is provided in a manner of having the same angle as the side surface of the bracket 600 .

[0106] When the bracket 600 is placed on the placement portion, the front support 213 supports the front end of the bracket 600 .

[0107] The front support 213 is provided to prevent the front portion of the bracket 600 from moving forward when the front support 213 is placed on the placement portion and the side support 211 supports the side of the bracket 600 .

[0108] The front support 213 is provided with a locking portion to support the front end of the bracket 600 .

[0109] The locking portion is formed in a stepped shape or at a predetermined angle. shape.

[0110] In order to prevent the bracket 600 from not moving to the front portion after being locked in the locking portion, a fastening unit is used to penetrate the front bracket 213 and then fasten to the placement portion.

[0111] The locking portion and the fastening unit provided on the front bracket 213 may be provided simultaneously or separately.

[0112] The back support 215 is connected to the back side of the bracket 600 for support.

[0113] The rear support 215 supports the bracket 600 by surrounding the bottom surface of the rear surface of the bracket 600 at the upper portion.

[0114] At this time, similar to the front bracket 213 , a locking portion or a fastening unit may also be provided on the back bracket 215 .

[0115] And, if Figure 5 As shown, the front support 213 and the back support 215 can also be respectively disposed on the front and back of the bracket 600 to respectively surround the upper structures of the front and back for support.

[0116] At this time, the locking portion and the fastening unit may be provided simultaneously or separately.

[0117] Reference Figure 5 , the front support 213 and the back support 215 can also be rotated in the horizontal direction to support the bracket 600.

[0118] When rotating in the horizontal direction, the portions contacting the front and back sides of the bracket 600 may also form separate stopper portions.

[0119] The brackets 211 , 213 , and 215 may be provided separately or connected to each other to form an integral body.

[0120] When formed as one body, the three brackets may be combined to form a single component or two of the three brackets may be connected to each other to form a single component.

[0121] The dampura sheet 300 is coupled to the outer side of the frame 100 .

[0122] If the frame 100 as an outer frame is manufactured using a generally used angle pipe, the dampura sheet 300 for covering the remaining portion of the frame is combined with the frame 100 .

[0123] At this time, the frame 100 and the dampura sheet 300 are generally combined and fixed using rivets 700 .

[0124] A plurality of wheels 400 are connected to a lower portion of the frame 100 .

[0125] The wheels 400 are wheels 400 generally used as a moving means for moving the outer box 10 .

[0126] The rail 500 is used to move the photomask inner box to the inside or outside of the transfer outer box 10 .

[0127] The rails 500 are respectively disposed on one side or both sides of the placing portion 200 centered thereon.

[0128] The bracket 600 connects the bottom surface to the rail 500 to introduce the photomask inner box into the outer box 10 .

[0129] Then, after the outer box 10 for transportation has arrived at the destination, the bottom surface is connected to the rail 500 in order to be pulled out from the inside of the outer box 10 to the outside.

[0130] The frame 100 and the dampura sheet 300 are connected by rivets 700 .

[0131] At this time, if Figure 7 As shown, due to the force of the portion connected to the rivet 700, the periphery of the portion connected to the rivet 700 forms a protrusion toward one side.

[0132] The protrusions form gaps accordingly, and fine foreign matter flows into the interior of the outer box 10 through the gaps, which becomes a factor for the foreign matter to adhere to the photomask inner box.

[0133] In order to solve this problem, the present invention preferably inserts and combines a separate anti-folding component 800 into the portion connected to the rivet 700 .

[0134] The inner circumference of the anti-folding component 800 is the same as the outer circumference of the rivet 700. In the present invention, urethane material is used, but additional structural elements that can prevent gaps can be provided.

[0135] The anti-folding member 800 is composed of two layers, and the inner portion is shorter than the outer portion.

[0136] The inner and outer lengths of the anti-folding member 800 are for preventing gaps and deformation of the frame 100 and the dampura sheet 300 in advance.

[0137] The photomask is placed inside the photomask inner box located inside the outer box 10 of the present invention, and wheels 21 are provided on both sides of the lower part. The photomask inner box can be located inside the outer box 10 through the bracket 600 and the track 500.

[0138] When the photomask inner box is located in the outer box 10 , the wheels 21 are located on the upper portion of the rails 500 , and the photomask inner box is located on the upper portion of the placement portion 200 at a predetermined interval.

[0139] According to the present invention as described above, the support force is increased by supporting the bracket required for moving the photomask inner box to the inside and outside of the outer box from the inside of the outer box to the sides, front and back. When the frame is combined with the sheet, an anti-folding component can be provided at the combined portion to prevent the sheet from folding in advance, thereby preventing foreign matter from flowing in through the folded portion.

Claims

1. An outer box for moving a photomask inner box with improved fastening force, comprising: A frame (100) is used to store and move a photomask inner box (20) in which a photomask is placed and a wheel (21) is arranged at the bottom, and forms an internal space; A shelf portion (200) is arranged on the inner lower side of the frame (100); A danpla sheet (300) is combined on the outer side of the frame (100), and the danpla sheet is a danpla sheet; Wheels (400), which are multiple and connected to the lower part of the frame (100); A track (500) is located on the upper part of the shelf (200) for the photomask inner box to move; and The bracket (600) uses the track (500) to move the photomask inner box to the inside and outside. The outer box for moving the inner box of the photomask with improved fastening force is characterized in that: The frame (100) is composed of a main frame (110) and a side frame (120), wherein the main frame (110) forms an integral frame, and the side frames (120) are respectively formed on both sides of the main frame (110). The front and back sides of the main frame (110) are provided with fastening parts (30) for fixing the side frames (120) on both sides. A cover portion is provided to surround and cover the outer side of the fastening portion (30), A support portion (210) is provided on the shelf portion (200), so that the bracket (600) is located on the support portion (210). Side brackets (211) are provided on both sides of the support portion (210), having the same shape as the outer shape of the bracket (600) and supporting the side portions of the bracket (600). The support portion (210) is provided with a front bracket (213) for supporting the front end of the bracket (600). The support portion (210) is provided with a back support (215) connected to the back side of the bracket (600) for support.

2. The outer box for moving the inner box of the photomask with improved fastening force according to claim 1, characterized in that: The fastening portion (30) is composed of a fastening hook (31) and a fastening unit (33). In the fastening hook (31), a locking groove (31a) is formed in a part of the inner side of the side frame (120). In the fastening unit (33), a locking component (33a) forming a first bent portion for locking the side frame (120) through the locking groove (31a), a rotating component (33b) for rotating the locking component (33a), and a switch component for operating the rotating component (33b) are provided on the main frame (110).

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