Pipe connection device

Abstract

A pipe connection device may include: a first body portion surrounding a pipe and including a first groove; a first sealing member inserted into the first groove and sealing between the pipe and the first body portion; a second body portion surrounding the pipe and fastened to the first body portion, and including a second groove and a third groove; a second sealing member inserted into the second groove and sealing between the pipe and the second body portion; a spacer surrounding the pipe and disposed between the first body portion and the second body portion; and a third sealing member inserted into the third groove and sealing between the spacer and the second body portion. This prevents gas leakage.

Description

Technical Field

[0001] The present invention relates to a pipe connection device, and more specifically to a pipe connection device for preventing gas leakage. Background Technology

[0002] In the manufacturing processes of semiconductors and display devices, vacuum processes such as mounting, etching, and ion implantation are widely used. These vacuum processes are performed by placing a substrate inside a vacuum chamber, which contains multiple connecting pipes, such as exhaust pipes for venting gas and gas injection pipes for injecting gas. The vacuum tubes are externally connected to these other pipes, and the components used here are vacuum tube fittings. To maintain the vacuum, these fittings consist of structures with inserted O-rings, gaskets, etc., and different vacuum fittings are used depending on the degree of vacuum required. Summary of the Invention

[0003] The purpose of this invention is to provide a pipe connection device with improved airtightness.

[0004] However, the purpose of this invention is not limited to this purpose, and various extensions can be made without departing from the concept and scope of this invention.

[0005] A pipe connection device according to one embodiment for achieving the above-described object of the present invention may include: a first body portion surrounding a pipe and including a first groove; a first sealing member inserted into the first groove and sealing between the pipe and the first body portion; a second body portion surrounding the pipe and fastened to the first body portion, and including a second groove and a third groove; a second sealing member inserted into the second groove and sealing between the pipe and the second body portion; a spacer surrounding the pipe and disposed between the first body portion and the second body portion; and a third sealing member inserted into the third groove and sealing between the spacer and the second body portion.

[0006] In one embodiment, the first main body may include: a connecting portion that connects with the second main body; and a clamp fixing portion that extends from the connecting portion and partially surrounds the tube.

[0007] In one embodiment, the pipe connection device may further include a clamp that engages with the clamp fixing portion and partially surrounds the pipe.

[0008] In one embodiment, at least one of the first to the third sealing components may have a ring shape surrounding the tube.

[0009] In one embodiment, at least one of the first to the third sealing components may contain an elastic material.

[0010] In one embodiment, at least one of the first to the third sealing components may contain rubber.

[0011] In one embodiment, the first sealing component and the second sealing component may respectively contact the tube.

[0012] In one embodiment, the third sealing component may be spaced apart from the tube.

[0013] In one embodiment, a portion of the spacer may be inserted into both the first slot and the second slot.

[0014] In one embodiment, the tube may contain a flexible material.

[0015] In one embodiment, the tube may contain a fluoropolymer.

[0016] In one embodiment, a portion of the second main body may be inserted into the first main body.

[0017] In one embodiment, the first main body portion and the second main body portion may be threaded together.

[0018] In one embodiment, the pipe connection device may further include a fourth sealing component for sealing between the spacer and the first main body, wherein the first main body further includes a fourth groove into which the fourth sealing component is inserted.

[0019] In one embodiment, the fourth sealing component may be spaced apart from the tube.

[0020] In one embodiment, the first body portion and the second body portion may be made of stainless steel.

[0021] In one embodiment, a lubricant may be applied to at least one of the first to the third sealing components.

[0022] In one embodiment, the joint may further include a probe hole, which exposes the outer peripheral surface of the spacer.

[0023] In one embodiment, the pipe connection device may further include a transfer section inserted into the second main body section and having a transfer space that is hollowly connected to the pipe.

[0024] In one embodiment, a portion of the transfer section may be fused to the second main body section.

[0025] (Invention Effects)

[0026] The pipe connection device according to an embodiment of the present invention can prevent gas leakage and improve the cooling efficiency of components.

[0027] However, the effects of the present invention are not limited to those described above, and various extensions can be made without departing from the concept and scope of the present invention. Attached Figure Description

[0028] Figure 1 This is a diagram illustrating a pipe connection device according to an embodiment of the present invention.

[0029] Figure 2 This is a diagram showing one side of a pipe connection device according to an embodiment of the present invention.

[0030] Figure 3 This is a diagram showing another side of the pipe connection device according to an embodiment of the present invention.

[0031] Figure 4 It is shown Figure 2 A diagram showing a portion of the cross-section of a pipe connection device.

[0032] Figure 5 This is a perspective view of a pipe connection device according to an embodiment of the present invention.

[0033] Figure 6 This is a cross-sectional view showing the joint and the second main body of the pipe connection device according to an embodiment of the present invention.

[0034] (Explanation of reference numerals in the attached diagram)

[0035] 10: pipe

[0036] 20: First Main Body

[0037] 20a: Fixture fixing part

[0038] 20b: Joint

[0039] 30: Fixture

[0040] 40: Second Main Body

[0041] 50: Transmission Department Detailed Implementation

[0042] Hereinafter, embodiments of the present invention will be described in more detail with reference to the accompanying drawings. The same reference numerals are used for the same components in the drawings, and repeated descriptions of the same components are omitted.

[0043] Figure 1 This is a diagram illustrating a pipe connection device according to an embodiment of the present invention. Figure 2 This is a diagram showing one side of a pipe connection device according to an embodiment of the present invention. Figure 3 This is a diagram showing another side of the pipe connection device according to an embodiment of the present invention.

[0044] Reference Figures 1 to 3 The pipe connection device 100 may include a pipe 10, a first main body 20, a second main body 40, a clamp 30, and a transfer part 50.

[0045] The pipe connection device 100 can deliver compressed air for cooling. However, embodiments of the present invention are not limited thereto; the pipe connection device 100 can also be used to deliver liquids and various gases.

[0046] The tube 10 can be inserted into the hollow space between the first main body portion 20 and the second main body portion 40. The tube 10 can be made of a flexible material. For example, the tube 10 can be formed of a polymer material. For example, the polymer material may include polyethylene terephthalate, polyethylene, polypropylene, polyamide, polyimide, polytetrafluoroethylene, etc. According to one embodiment, the tube 10 may contain a fluoropolymer such as polytetrafluoroethylene.

[0047] The first main body 20 may include a clamp fixing part 20a and a connecting part 20b. A hollow space may be formed inside the first main body 20 to surround the tube 10. For example, the tube 10 may be inserted through the hollow space formed in the first main body 20. Threads may be machined inside the connecting part 20b. That is, the first main body 20 may have an internal (female) thread. A detection hole 21 may be formed on the outside of the connecting part 20b. The detection hole 21 may be defined as a gas hole. The detection hole 21 can be used to confirm whether gas flows out to the outside when passing through the tube 10. Refer to the following... Figure 5 The outer peripheral surface of the spacer 80 can be exposed through the probe hole 21.

[0048] The clamp fixing part 20a can be formed as a structure in which a portion is cut out of the cylindrical structure, and the connecting part 20b can be formed as a cylindrical structure. However, it is not limited to this and can be formed in various forms.

[0049] Four bolts 22 can be incorporated into the cut section of the clamp fixing part 20a. For example, the four bolts 22 can be formed from hex socket head cap screws, round head bolts, flat head bolts, etc. According to one embodiment, four holes can be formed in the cut section of the clamp fixing part 20a, and the four bolts 22 can be incorporated into the four holes.

[0050] The first main body portion 20 can be formed of stainless steel. For example, the stainless steel can be formed of stainless steel-303, stainless steel-304, stainless steel-316, stainless steel-440C, stainless steel-410, etc. According to one embodiment, the first main body portion 20 can be formed of a corrosion-resistant material such as stainless steel-316.

[0051] A portion of the second main body 40 can be threadedly engaged with the interior of the joint portion 20b of the first main body 20. A hollow space can be formed inside the second main body 40 to surround the tube 10. Threads can be machined on the outside of the second main body 40. That is, the second main body 40 can be male-threaded. According to one embodiment, the second main body 40 can be generally formed as a portion of a cylindrical structure being cut off, but it is not limited to this and can be formed in various forms.

[0052] The second body portion 40 can be formed of stainless steel. For example, the stainless steel can be formed of stainless steel-303, stainless steel-304, stainless steel-316, stainless steel-440C, stainless steel-410, etc. According to one embodiment, the second body portion 40 can be formed of a corrosion-resistant material such as stainless steel-316.

[0053] The transfer section 50 can be integrated into the interior of the second main body 40. Specifically, it can be integrated by welding the transfer section 50 to the second main body 40. According to one embodiment, a transfer space can be formed inside the transfer section 50, which can be connected to the pipe 10 to allow gas flow. For example, the transfer section 50 can be formed from a VCR clamping nut.

[0054] According to one embodiment, the transfer section 50 can be formed as a combination of a hexagonal prism shape and an elongated cylindrical shape. However, it is not limited to this and can be formed in various forms.

[0055] The transfer part 50 may be formed of stainless steel. For example, the stainless steel may be formed of stainless steel-303, stainless steel-304, stainless steel-316, stainless steel-440C, stainless steel-410, etc. According to one embodiment, the transfer part 50 may be formed of a corrosion-resistant material such as stainless steel-316.

[0056] A clamp 30 can be attached to the clamp fixing portion 20a of the first main body portion 20. Specifically, the clamp 30 can be attached to four bolts 22 in the cut section of the clamp fixing portion 20a. According to one embodiment, the clamp 30 may have a structure with four holes for attachment to the clamp fixing portion 20a, but is not limited thereto. To prevent the pipe 10 from being squeezed out of the pipe connection device 100 when it expands due to pressure difference, the clamp 30 can be tightly attached to the pipe 10.

[0057] The clamp 30 can be made of stainless steel. For example, the stainless steel can be made of stainless steel-303, stainless steel-304, stainless steel-316, stainless steel-440C, stainless steel-410, etc. According to one embodiment, the clamp 30 can be made of a corrosion-resistant material such as stainless steel-316.

[0058] Figure 4 It is shown Figure 2 A partial cross-sectional view of the pipe connection device. Figure 5 This is a perspective view of a pipe connection device according to an embodiment of the present invention. Figure 6 This is a cross-sectional view showing the joint and the second main body of the pipe connection device according to an embodiment of the present invention.

[0059] Reference Figures 4 to 6 The joint 20b and the second main body 40 may include a first groove 70a, a second groove 70b, a third groove 70c, a fourth groove 70d, a first sealing member 60a, a second sealing member 60b, a third sealing member 60c, a fourth sealing member 60d, and a spacer 80.

[0060] The first groove 70a, the second groove 70b, the third groove 70c, and the fourth groove 70d can be spaces into which the first sealing component 60a, the second sealing component 60b, the third sealing component 60c, and the fourth sealing component 60d are inserted to prevent the gas flowing through the pipe 10 from flowing out to the outside.

[0061] According to one embodiment, the first sealing component 60a, the second sealing component 60b, the third sealing component 60c, and the fourth sealing component 60d can be defined as O-rings that can be formed into a flat, ring shape. At least one of the first sealing component 60a, the second sealing component 60b, the third sealing component 60c, and the fourth sealing component 60d can be formed of an elastic material. For example, the elastic material can be formed of natural rubber, butadiene rubber, styrene-butadiene rubber, acrylonitrile-butadiene rubber, hydrogenated nitrile rubber, chloroprene rubber, ethylene propylene rubber, polyurethane rubber, silicone rubber, fluororubber, acrylic rubber, etc.

[0062] The first sealing member 60a can be inserted into the first groove 70a and seal between the tube 10 and the first main body 20. Specifically, the first sealing member 60a can be in close contact with the tube 10. According to one embodiment, the first sealing member 60a can provide a first defense against gas leakage to the outside when gas flows through the tube 10.

[0063] The second sealing member 60b can be inserted into the second groove 70b and seal between the tube 10 and the second main body 40. Specifically, the second sealing member 60b can be in close contact with the tube 10. According to one embodiment, if the first sealing member 60a fails to maintain airtightness, the second sealing member 60b can further prevent gas from flowing out to the outside.

[0064] The spacer 80 may surround the tube 10 and be disposed between the first main body portion 20 and the second main body portion 40. Specifically, the spacer 80 may be disposed between the joint portion 20b of the first main body portion 20 and the second main body portion 40. According to one embodiment, the spacer 80 may perform an insertion limitation function to prevent the tube 10 from being fastened to a certain level. The spacer 80 may be formed into a generally cylindrical structure.

[0065] The third sealing member 60c can be inserted into the third groove 70c and seal between the spacer 80 and the second main body 40. Specifically, the third sealing member 60c can be positioned spaced apart from the tube 10. According to one embodiment, if the second sealing member 60b fails to maintain airtightness, the third sealing member 60c can prevent gas from flowing out to the outside three times.

[0066] The fourth sealing member 60d can be inserted into the fourth groove 70d and seal between the spacer 80 and the first main body 20. Specifically, the fourth sealing member 60d can be disposed at a location spaced apart from the tube 10. According to one embodiment, if the third sealing member 60c fails to maintain airtightness, the fourth sealing member 60d can prevent gas from flowing out to the outside four times.

[0067] According to one embodiment, a lubricant may be applied in a fine amount to at least one of the first sealing member 60a, the second sealing member 60b, the third sealing member 60c, and the fourth sealing member 60d. This allows the tube 10 to expand further, thereby maximizing the sealing force.

[0068] As described above, although exemplary embodiments of the present invention have been referenced, it should be understood that those skilled in the art can make various modifications and alterations to the present invention without departing from the concept and scope of the invention as set forth in the claims.

Claims

1. A pipe connection device, wherein, comprises: a first main portion surrounding the pipe and including a first groove; a first sealing member inserted into the first groove and sealing between the pipe and the first main portion; a second main portion surrounding the pipe and fastened with the first main portion, and including a second groove and a third groove; a second sealing member inserted into the second groove and sealing between the pipe and the second main portion; a spacer surrounding the pipe and disposed between the first main portion and the second main portion; and a third sealing member inserted into the third groove and sealing between the spacer and the second main portion, the third sealing member being spaced apart from the pipe.

2. The pipe connecting device according to claim 1, wherein the first main portion includes: a coupling portion coupled with the second main portion; and a clamp fixing portion extending from the coupling portion and partially surrounding the pipe.

3. The pipe connecting device according to claim 2, further comprising: a clamp coupled with the clamp fixing portion and partially surrounding the pipe.

4. The pipe connecting device according to claim 1, wherein at least one of the first sealing member to the third sealing member has a ring shape surrounding the pipe.

5. The pipe connecting device according to claim 1, wherein at least one of the first sealing member to the third sealing member contains an elastic substance.

6. The pipe connecting device according to claim 5, wherein at least one of the first sealing member to the third sealing member contains rubber.

7. The pipe connecting device according to claim 1, wherein the first sealing member and the second sealing member are in contact with the pipe, respectively.

8. The pipe connecting device according to claim 1, wherein a portion of the spacer is inserted into the first groove and the second groove.

9. The pipe connecting device according to claim 1, wherein the pipe contains a flexible substance. ​ ​

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