Detection system and detection method

Abstract

A detection system suitable for detecting the area and height of overflowed bottom glue under an object. The detection system includes a lateral imaging device and a controller. The lateral imaging device includes a lateral light source and a lateral image sensor. The lateral light source is used to emit a lateral light beam so that the lateral light beam is irradiated toward the side surface of the object, wherein the angle between the lateral light beam and the normal line of the front surface of the object is 45 degrees. The lateral light beam is reflected by the object to generate a lateral reflected light beam. The lateral image sensor is arranged on the transmission path of the lateral reflected light beam. The controller is electrically connected to the lateral image sensor. The controller calculates the height of the overflowed bottom glue according to the image of the lateral reflected light beam received by the lateral image sensor. A detection method is also proposed.

Description

Technical Field

[0001] The present invention relates to a detection system and a detection method, and in particular to a detection system and a detection method suitable for detecting the area and height of overflowed primer under an object. Background Art

[0002] Existing measurement technology usually uses 3D detection devices to obtain the dispensing appearance of the underfill (white light interferometry, conjugate light, laser height measurement, laser interferometry), and then performs overall contour scanning and sampling measurement to reconstruct 3D point information. After topological modeling of the three-dimensional information, it can be further projected and analyzed into one-dimensional height and two-dimensional area information. Summary of the invention

[0003] The invention provides a detection system and a detection method, which can detect the area and height of overflowed primer under an object.

[0004] The detection system of one embodiment of the present invention is suitable for detecting the area and height of overflowed base glue under an object. The detection system includes a lateral imaging device and a controller. The lateral imaging device includes a lateral light source and a lateral image sensor. The lateral light source is used to emit a lateral light beam so that the lateral light beam is irradiated toward the side surface of the object, wherein the angle between the lateral light beam and the normal of the front surface of the object is 45 degrees. The lateral light beam generates a lateral reflected light beam after being reflected by the object. The lateral image sensor is arranged on the transmission path of the lateral reflected light beam. The controller is electrically connected to the lateral image sensor. The controller calculates the height of the overflowed base glue based on the image of the lateral reflected light beam received by the lateral image sensor. The overflowed base glue is the area where the base glue is distributed on the substrate and exceeds the area covered by the object on the substrate.

[0005] In one embodiment of the present invention, the lateral imaging device further comprises a first beam splitter and a first reflector. The lateral reflected light beam from the object is sequentially reflected by the first beam splitter, reflected by the first reflector, and penetrates the first beam splitter before being received by the lateral image sensor.

[0006] In one embodiment of the present invention, a forward imaging device is also included. The forward imaging device includes a forward light source and a forward image sensor. The forward light source is used to emit a forward light beam so that the forward light beam is irradiated toward the front surface of the object. The forward light beam is reflected by the object to generate a forward reflected light beam. The forward image sensor is arranged on the transmission path of the forward reflected light beam and is electrically connected to the controller. The controller calculates the overflowed bottom glue area according to the image of the forward reflected light beam received by the forward image sensor.

[0007] In one embodiment of the present invention, the forward imaging device further includes a second beam splitter and a second reflector. The forward reflected light beam from the object is sequentially reflected by the second beam splitter and the second reflector, and then received by the side image sensor.

[0008] In one embodiment of the present invention, the forward light source further includes a first sub-forward light source and a second sub-forward light source. The first sub-forward light source is used to emit a first sub-forward light beam, wherein the first sub-forward light beam is vertically irradiated toward the front surface of the object. The second sub-forward light source is used to emit a second sub-forward light beam, wherein the second sub-forward light beam is obliquely irradiated toward the front surface of the object.

[0009] In one embodiment of the present invention, the first sub-forward beam passes through the second beam splitter and then irradiates the front surface of the object. The forward reflected beam includes the reflected beam generated by the first sub-forward beam and the second sub-forward beam after being reflected by the object.

[0010] In one embodiment of the present invention, the direction in which the side reflected light beam is incident on the side image sensor is parallel to the direction in which the front reflected light beam is incident on the front image sensor.

[0011] In one embodiment of the present invention, the controller determines the distance D between the first critical edge and the second critical edge along the sampling line in the first region of interest in the image of the side reflected light beam. image , calculate the height difference D between the edge of the front surface of the object and the edge of the overflowed primer, and the sampling line is a straight line along the direction from the front surface to the side surface of the object.

[0012] In one embodiment of the present invention, the first critical edge is the position where the gradient of the grayscale function of the image of the lateral reflected light beam along the sampling line in the first region of interest first satisfies the condition of gradient>10. The second critical edge is the position where the gradient of the grayscale function of the image of the lateral reflected light beam along the sampling line in the first region of interest first satisfies the condition of gradient>20.

[0013] In one embodiment of the present invention, the above D=D image / cos(45 degrees).

[0014] In one embodiment of the present invention, the height H of the overflowing primer satisfies the following relationship: H = t die +t und -D, where t die is the height of the object, and t und The front surface is opposite to the bottom surface, and the side surface is adjacent to the front surface and the bottom surface.

[0015] In one embodiment of the present invention, the controller calculates the overflowed primer area based on the grayscale change of the second region of interest in the image of the forward reflected light beam.

[0016] The detection method of one embodiment of the present invention is suitable for detecting the area and height of the overflowed primer under an object. The detection method comprises the following steps: irradiating a lateral light beam toward the lateral surface of the object, wherein the angle between the lateral light beam and the normal line of the front surface of the object is 45 degrees; using a lateral image sensor to receive a lateral reflected light beam generated after the lateral light beam is reflected by the object; and using a controller to calculate the height of the overflowed primer according to the image of the lateral reflected light beam received by the lateral image sensor, wherein the overflowed primer is the area of ​​the primer under the object that exceeds the area covered by the object on the substrate in the distribution range of the primer on the substrate.

[0017] In one embodiment of the present invention, the detection method also includes the following steps: irradiating a forward light beam toward a front surface of an object; using a forward image sensor to receive a forward reflected light beam generated after the forward light beam is reflected by the object; and using a controller to calculate the overflowed base glue area based on the image of the forward reflected light beam received by the forward image sensor.

[0018] In one embodiment of the present invention, the direction in which the side reflected light beam is incident on the side image sensor is parallel to the direction in which the front reflected light beam is incident on the front image sensor.

[0019] In one embodiment of the present invention, the controller determines the distance D between the first critical edge and the second critical edge along the sampling line in the first region of interest in the image of the side reflected light beam. image , calculate the height difference D between the edge of the front surface of the object and the edge of the overflowing primer. The sampling line is a straight line along the direction from the front surface to the side surface of the object.

[0020] In one embodiment of the present invention, the first critical edge is the position where the gradient of the grayscale function of the image of the lateral reflected light beam along the sampling line in the first region of interest first satisfies the condition of gradient>10. The second critical edge is the position where the gradient of the grayscale function of the image of the lateral reflected light beam along the sampling line in the first region of interest first satisfies the condition of gradient>20.

[0021] In one embodiment of the present invention, the above-mentioned D=D image / cos(45 degrees).

[0022] In one embodiment of the present invention, the height H of the overflowing primer satisfies the following relationship: H = t die +t und -D, where t die is the height of the object, and t undThe front surface is opposite to the bottom surface, and the side surface is adjacent to the front surface and the bottom surface.

[0023] In one embodiment of the present invention, the controller calculates the overflowed primer area based on the grayscale change of the second region of interest in the image of the forward reflected light beam.

[0024] Based on the above, in the detection system and the detection method of one embodiment of the present invention, since the lateral light beam is irradiated toward the side surface of the object, the detection system and the detection method can detect the height of the overflowed primer disposed under the object. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 is a schematic diagram of a detection device according to an embodiment of the present invention.

[0026] Figure 2 yes Figure 1 Schematic diagram of the side light source in .

[0027] Figure 3 yes Figure 1 Schematic diagram of the forward light source in .

[0028] Figure 4 is a flow chart of a detection method according to an embodiment of the present invention.

[0029] Figure 5 A schematic diagram showing an image of a side reflected light beam obtained at an angle of 45 degrees to the side surface of an object.

[0030] Figure 6 is Figure 5 A relationship diagram of grayscale values ​​obtained along a sampling line L relative to pixel positions in a first region of interest of an image.

[0031] Fig. 7A A diagram illustrating the geometric relationship between the object and the base glue.

[0032] Figure 7B Indicated Fig. 7A The side surface of the Chinese-North Korean object, a partial enlarged view of the inspection at a 45-degree angle to the side surface.

[0033] Figure 8 It is a schematic diagram of the image of the forward reflected light beam obtained towards the front surface of an object.

[0034] Description of Reference Numerals

[0035] 10: Detection system

[0036] 100: Side imaging device

[0037] 110: Side light source

[0038] 120: Side image sensor

[0039] 130: First Spectroscope

[0040] 140: First Reflector

[0041] 150, 250: Lens group

[0042] 200: Forward imaging device

[0043] 210: Forward light source

[0044] 220: Forward image sensor

[0045] 230: Second beam splitter

[0046] 240: Second reflector

[0047] 300: Controller

[0048] B1: Side beam

[0049] B2: Forward beam

[0050] B2-1: First sub-forward beam

[0051] B2-2: Second sub-forward light source

[0052] BS: Lower Surface

[0053] C1, C2, C3, C4: dotted line

[0054] D: Height difference

[0055] D1, D2, D3: Direction

[0056] D image ,t und , W: distance

[0057] E: Boundary

[0058] E1: First critical edge

[0059] E2: Second critical edge

[0060] FS: Front surface

[0061] h、H、t die :high

[0062] L: Sampling line

[0063] LS1, LS2: side surface

[0064] O: Object

[0065] OF: overflow primer

[0066] RB1: Side reflected beam

[0067] RB2: forward reflected beam

[0068] ROI-1: First region of interest

[0069] ROI-2: Second region of interest

[0070] S: Substrate

[0071] S100, S120, S140: Steps

[0072] UF: Primer

[0073] θ: Angle DETAILED DESCRIPTION

[0074] Reference will now be made in detail to exemplary embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Whenever possible, the same reference numerals are used in the drawings and the description to refer to the same or like parts.

[0075] Figure 1 is a schematic diagram of a detection device according to an embodiment of the present invention. Figure 2 yes Figure 1 Schematic diagram of the side light source in . Figure 3 yes Figure 1 Schematic diagram of the forward light source in . Please refer to Figures 1 to 3 , a detection system 10 of an embodiment of the present invention is suitable for detecting the area and height of the overflowed primer OF under an object O. The object O is, for example, a chip, but the present invention is not limited thereto. The object O has a front surface FS facing the forward imaging device 200, a lower surface BS relative to the front surface FS, and at least one side surface LS1, LS2 adjacent to the front surface FS and the lower surface BS. The object O is disposed on a substrate S. The substrate S is, for example, a printed circuit board (PCB) or a flexible printed circuit (FPC), but the present invention is not limited thereto. In this embodiment, the primer UF is disposed under the object O and is located between the object O and the substrate S. The primer UF is used to protect the structure between the object O and the substrate S, for example, to improve the reliability of the solder joints between the object O and the substrate S.

[0076] Generally speaking, during the process of filling and forming the underfill UF, overflow of underfill or underfill creeping may occur to a greater or lesser extent. The distribution range of the underfill UF under the object O on the substrate S that exceeds the area covered by the object O on the substrate S is called overflow of underfill OF, and the part of the underfill UF attached to the side surfaces LS1 and LS2 of the object O is called underfill creeping. Since the overflow of underfill OF may cause poor connection between the object O and other components, such as the connection between the object O and the heat dissipation component, or the overflow of underfill OF itself affects the heat dissipation of the object O, it is necessary to detect the range and height of the overflow of underfill OF.

[0077] In the present embodiment, the detection system 10 includes a lateral imaging device 100 and a controller 300. The lateral imaging device 100 includes a lateral light source 110 and a lateral image sensor 120. The lateral light source 110 may be a light-emitting diode (LED), an incandescent light source, a halogen light source or other suitable light sources. The lateral imaging device 100 may be a complementary metal oxide semiconductor (CMOS) light sensor or a charge coupled device (CCD) light sensor, but the present invention is not limited thereto.

[0078] In this embodiment, the lateral light source 110 is used to emit a lateral light beam B1, so that the lateral light beam B1 is irradiated toward the side surfaces LS1 and LS2 of the object O, wherein the lateral light beam B1 (eg Figure 1 The direction D2 in the figure is the normal line of the positive surface FS of the object O (such as Figure 1 The angle between the lateral light beam B1 and the lateral image sensor 120 is 45 degrees. The lateral light beam B1 is reflected by the object O to generate a lateral reflected light beam RB1. The lateral image sensor 120 is disposed on the transmission path of the lateral reflected light beam RB1.

[0079] In one embodiment, the controller 300 includes, for example, a central processing unit (CPU), a microprocessor (microprocessor), a digital signal processor (DSP), a programmable controller, a programmable logic device (PLD) or other similar devices or a combination of these devices, and the present invention is not limited thereto. In addition, in one embodiment, each function of the controller 300 can be implemented as a plurality of program codes. These program codes are stored in a memory and executed by the controller 300. Alternatively, in one embodiment, each function of the controller 300 can be implemented as one or more circuits. The present invention is not limited to implementing each function of the controller 300 in software or hardware.

[0080] In this embodiment, the controller 300 is electrically connected to the lateral image sensor 120 , and the controller 300 calculates the height of the overflowed primer OF according to the image of the lateral reflected light beam RB1 received by the lateral image sensor 120 .

[0081] In one embodiment, the side imaging device 100 further includes a first beam splitter 130 and a first reflector 140. The first beam splitter 130 is, for example, a partially transmissive and partially reflective mirror. The side reflected light beam RB1 from the object O is sequentially reflected by the first beam splitter 130, reflected by the first reflector 140, and penetrates the first beam splitter 130 before being received by the side image sensor 120. In the detection system 10 of one embodiment of the present invention, since the side imaging device 100 further includes the first beam splitter 130 and the first reflector 140, the user of the detection system 10 can adjust the direction in which the side reflected light beam RB1 is incident on the side image sensor 120 to a direction that is convenient for use.

[0082] In this embodiment, the detection system 10 further includes a forward imaging device 200. The forward imaging device 200 includes a forward light source 210 and a forward image sensor 220. The forward image sensor 220 can be a complementary metal oxide semiconductor light sensor or a charge coupled device light sensor, but the present invention is not limited thereto.

[0083] In the present embodiment, the forward light source 210 is used to emit a forward light beam B2, so that the forward light beam B2 is irradiated toward the front surface FS of the object O, wherein the forward light beam B2 is parallel to the normal direction of the front surface FS. The forward light beam B2 generates a forward reflected light beam RB2 after being reflected by the object O. The forward image sensor 220 is disposed on the transmission path of the forward reflected light beam RB2 and is electrically connected to the controller 300. The controller 300 calculates the area of ​​the overflowed bottom glue OF based on the image of the forward reflected light beam RB2 received by the forward image sensor 220. In the detection system 10 of one embodiment of the present invention, since the detection system 10 further includes a forward imaging device 200, the detection system 10 can obtain the area of ​​the overflowed bottom glue OF.

[0084] Please refer to Figure 3 In one embodiment, the forward imaging device 200 further includes a second beam splitter 230 and a second reflector 240. The second beam splitter 230 is, for example, a partially transparent and partially reflective mirror. The forward reflected light beam RB2 from the object O is reflected by the second beam splitter 230 and the second reflector 240 in sequence, and then received by the side image sensor 220. In the detection system 10 of one embodiment of the present invention, since the forward imaging device 200 further includes the second beam splitter 230 and the second reflector 240, the user of the detection system 10 can adjust the direction in which the forward reflected light beam RB2 is incident on the forward image sensor 220 to a direction that is convenient for use.

[0085] In one embodiment, the forward light source 210 further includes a first sub-forward light source 212 and a second sub-forward light source 214. The first sub-forward light source 212 and the second sub-forward light source 214 may be a light emitting diode light source, an incandescent light source, a halogen light source, or other suitable light sources. The first sub-forward light source 212 is used to emit a first sub-forward light beam B2-1, wherein the first sub-forward light beam B2-1 is vertically irradiated toward the front surface FS of the object O. The second sub-forward light source 214 is used to emit a second sub-forward light beam B2-2, wherein the second sub-forward light beam B2-2 is obliquely irradiated toward the front surface FS of the object O. In the detection system 10 of one embodiment of the present invention, since the first sub-forward beam B2-1 irradiates vertically toward the front surface FS of the object O, and the second sub-forward beam B2-2 irradiates obliquely toward the front surface FS of the object O, the forward light source 210 provides vertical forward illumination and oblique illumination to the front surface FS of the object O at the same time, which can highlight the difference between the surface of the overflowed base glue OF and the background.

[0086] In one embodiment, the first sub-forward beam B2-1 passes through the second beam splitter 230 and then irradiates the front surface FS of the object O. The forward beam B2 includes the first sub-forward beam B2-1 and the second sub-forward beam B2-2, and the forward reflected beam RB2 includes a reflected beam generated after the first sub-forward beam B2-1 and the second sub-forward beam B2-2 are reflected by the object O.

[0087] Please refer to Figure 1 In another embodiment, the direction in which the side reflected light beam RB1 is incident on the side image sensor 120 is parallel to the direction in which the front reflected light beam RB2 is incident on the front image sensor 220. Therefore, the volume of the detection system 10 of one embodiment of the present invention can be further reduced.

[0088] In one embodiment, the side imaging device 100 further includes a lens set 150 , and the front imaging device 200 further includes a lens set 250 , wherein the lens set 150 is used to image the side reflected light beam RB1 onto the side imaging sensor 120 , and the lens set 250 is used to image the front reflected light beam RB2 onto the front imaging sensor 220 .

[0089] Based on the above, in the detection system 10 of one embodiment of the present invention, since the lateral light beam B1 is irradiated toward the side surfaces LS1 and LS2 of the object O, the angle between the lateral light beam B1 and the normal line of the front surface FS of the object O is 45 degrees. Therefore, the controller 300 can calculate the height of the overflowed base glue OF based on the image of the lateral reflected light beam RB1 received by the lateral image sensor 120.

[0090] Figure 4 is a flow chart of a detection method according to an embodiment of the present invention. Figure 4 , a detection method according to an embodiment of the present invention is suitable for detecting the area and height of the overflowed base glue OF under the object O. The detection method comprises the following steps. Step S100: irradiate the lateral light beam B1 toward the lateral surfaces LS1 and LS2 of the object O, wherein the angle between the lateral light beam B1 and the normal line of the front surface FS of the object O is 45 degrees. Step S120: Receive the lateral reflected light beam RB1 generated by the lateral light beam B1 reflected by the object O using the lateral image sensor 120. Step S140: Calculate the height of the overflowed base glue OF using the controller 300 according to the image of the lateral reflected light beam RB1 received by the lateral image sensor 120.

[0091] Figure 5 A schematic diagram showing an image of a side reflected light beam obtained at an angle of 45 degrees to the side surface of an object. Figure 5 The right half shows the enlarged view of the left half of the image in the first region of interest ROI-1. For the convenience of illustration, Figure 5The striped area in the right half is the part of the image with higher grayscale values. Figure 6 is Figure 5 A relationship diagram of grayscale values ​​obtained along a sampling line L relative to pixel positions in a first region of interest of an image. Fig. 7A A diagram illustrating the geometric relationship between the object and the base glue. Figure 7B Indicated Fig. 7A The side surface of the Chinese-North Korean object, a partial enlarged view of the inspection at a 45-degree angle to the side surface.

[0092] Please refer to Figure 5 In this embodiment, the controller 300 determines the distance D between the first critical edge E1 and the second critical edge E2 along the sampling line L in the first region of interest ROI-1 within the image of the side reflection light beam RB1. image (like Figure 7B ), calculate the height difference D between the edge of the front surface FS of the object O and the edge of the overflowing primer OF (such as Fig. 7A and Figure 7B ), wherein the sampling line L is a straight line along the direction D3 from the front surface FS to the side surface LS1 of the object O. In the detection system 10 and the detection method of one embodiment of the present invention, since the detection system 10 and the detection method can obtain the distance D image , so the height difference D between the edge of the front surface FS of the object O and the edge of the overflowed primer OF can be calculated.

[0093] Please refer to Figure 6 In this embodiment, the first critical edge E1 is the position where the gradient of the grayscale function of the image of the lateral reflected light beam RB1 along the sampling line L in the first region of interest ROI-1 first satisfies the condition of gradient>10. The second critical edge E2 is the position where the gradient of the grayscale function of the image of the lateral reflected light beam RB1 along the sampling line L in the first region of interest ROI-1 first satisfies the condition of gradient>20. In detail, Figure 6 The pixel position of the dotted line C1 is 6, and its corresponding grayscale value is about 66; the pixel position of the dotted line C2 is 7, and its corresponding grayscale value is about 78. Therefore, the gradient of the pixel position 6 is 12, wherein the gradient calculation is as follows: Formula (1).

[0094]

[0095] Furthermore, the pixel position of the dotted line C3 is 18, and its corresponding grayscale value is approximately 82; the pixel position of the dotted line C4 is 19, and its corresponding grayscale value is approximately 78. Therefore, the gradient of the pixel position 18 is 25. In this way, the distance Dimage between the first critical edge E1 and the second critical edge E2 is (18-7)×(the distance represented by each pixel). In the detection system 10 and the detection method of one embodiment of the present invention, since the detection system 10 and the detection method use the gradient relationship to obtain the positions of the first critical edge E1 and the second critical edge E2, the height difference D calculated by the detection system 10 and the detection method is more accurate and objective compared to the method of using human eye interpretation.

[0096] Please refer to Fig. 7A and Figure 7B , Fig. 7A and Figure 7B t in die is the height of object O, t und The lower surface BS of the object O and the substrate S (such as Figure 1 As shown in the figure, H is the height of the overflowing primer OF, and the distance W is the lateral extension range of the overflowing primer OF, where the height h = Ht und In this embodiment, D = D image / cosθ, where θ is the sum of D and D image The angle between them, and θ = 45 degrees, such as Figure 7B Furthermore, the height H satisfies the following relationship: H = t die +t und -D.

[0097] Incidentally, the above Figure 5 and Figure 6 The height difference D is obtained along the sampling line L, but the present invention is not limited thereto. In another embodiment, the detection system 10 and the detection method can also obtain the height differences of multiple different positions along multiple sampling lines in the first region of interest ROI-1. Moreover, the detection system 10 and the detection method can further calculate the average height difference between the edge of the front surface FS of the object O and the edge of the overflowed primer OF based on the aforementioned multiple height differences. Furthermore, the aforementioned Figure 5 and Figure 6 The height difference D is calculated based on the image of the side reflection light beam RB1 on one of the side surfaces of the object O, for example Figure 1 The side surface LS1 of the object O is not limited thereto. In another embodiment, the detection system 10 and the detection method may also be based on the image of the side reflection light beam RB1 of the other side surface of the object O, for example Figure 1 The side surface LS2 of the object O is used to calculate the height difference between the edge of the front surface FS of the object O and the edge of the overflowing bottom glue OF.

[0098] Figure 8 It is a schematic diagram of the image of the forward reflected light beam obtained towards the front surface of the object. Figure 8 In this embodiment, the detection method further includes the following steps: The forward light beam B2 is irradiated toward the front surface FS of the object O. The forward image sensor 220 is used to receive the forward reflected light beam RB2 generated after the forward light beam B2 is reflected by the object O. According to the image of the forward reflected light beam RB2 received by the forward image sensor 220, the controller 300 is used to calculate the area of ​​the overflowed primer OF.

[0099] In this embodiment, the controller 300 calculates the area of ​​the overflowed primer OF based on the grayscale change of the second region of interest ROI-2 in the image of the forward reflected light beam RB2. Specifically, the area of ​​the overflowed primer OF is the area within the grayscale threshold value range of the second region of interest ROI-2 in the image of the forward reflected light beam RB2, that is, Figure 8 In the detection system 10 and the detection method of one embodiment of the present invention, since the detection system 10 and the detection method use the grayscale change of the second region of interest ROI-2 to obtain the area of ​​the overflowed bottom glue OF, the height difference D calculated by the detection system 10 and the detection method is more accurate and objective compared to the method of using human eyes to interpret.

[0100] To summarize, in the detection system and detection method of one embodiment of the present invention, since the lateral light beam is irradiated toward the side surface of the object, the angle between the lateral light beam and the normal of the front surface of the object is 45 degrees. Therefore, the detection system and the detection method can detect the height of the overflowed base glue set under the object.

[0101] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A detection system suitable for detecting the area and height of overflowed primer under an object. It is characterized in that include: The lateral imaging device comprises: a lateral light source, configured to emit a lateral light beam, so that the lateral light beam is irradiated toward the lateral surface of the object, wherein the angle between the lateral light beam and the normal line of the front surface of the object is 45 degrees, and the lateral light beam is reflected by the object to generate a lateral reflected light beam; and a lateral image sensor disposed on a transmission path of the lateral reflected light beam; and a controller electrically connected to the lateral image sensor; and The forward imaging device comprises: a forward light source, configured to emit a forward light beam, so that the forward light beam is irradiated toward a front surface of the object, and the forward light beam is reflected by the object to generate a forward reflected light beam; and A forward image sensor is arranged on the transmission path of the forward reflected light beam and is electrically connected to the controller. The controller calculates the height of the overflowing primer according to the image of the lateral reflected light beam received by the lateral image sensor, wherein the overflowing primer is the area of ​​the primer under the object on the substrate that exceeds the area covered by the object on the substrate within the distribution range of the primer under the object on the substrate. The controller calculates the overflowed primer area according to the image of the forward reflected light beam received by the forward image sensor. The controller determines the distance D between the first critical edge and the second critical edge along the sampling line in the region of interest in the image of the side reflected light beam. image , calculate the height difference D between the edge of the front surface of the object and the edge of the overflowing primer, the sampling line is a straight line along the direction from the front surface of the object to the side surface, The first critical edge is the position where the gradient of the grayscale function of the image of the side-reflected light beam along the sampling line first satisfies the condition of gradient>10 in the region of interest; and The second critical edge is the position where the gradient of the grayscale function of the image of the side-reflected light beam along the sampling line first meets the condition of gradient>20 in the region of interest.

2. The detection system according to claim 1, It is characterized in that The lateral imaging device further comprises: Beamsplitter; and A reflector, wherein the side reflected light beam from the object is sequentially reflected by the beam splitter, reflected by the reflector, and penetrates the beam splitter before being received by the side image sensor.

3. The detection system according to claim 1, It is characterized in that D=D image / cos(45 degrees).

4. The detection system according to claim 1, It is characterized in that The overflowing bottom glue height H satisfies the following relationship: H = t die +t und -D, where t die is the height of the object, and t und is the distance between the lower surface of the object and the substrate, the front surface is opposite to the lower surface, and the side surface is adjacent to the front surface and the lower surface.

5. A detection method suitable for detecting the area and height of the overflowed primer under an object. It is characterized in that include: Directing a lateral light beam toward a lateral surface of the object, wherein an angle between the lateral light beam and a normal line of a front surface of the object is 45 degrees; Using a lateral image sensor to receive a lateral reflected light beam generated after the lateral light beam is reflected by the object; The controller is used to calculate the height of the overflowing primer according to the image of the lateral reflected light beam received by the lateral image sensor, wherein the overflowing primer is the area of ​​the primer under the object on the substrate that exceeds the area covered by the object on the substrate within the distribution range of the primer under the object on the substrate; directing a forward light beam toward a front surface of the object; Using a forward image sensor to receive a forward reflected light beam generated after the forward light beam is reflected by the object; and The controller is used to calculate the overflowed primer area according to the image of the forward reflected light beam received by the forward image sensor. The controller determines the distance D between the first critical edge and the second critical edge along the sampling line in the region of interest in the image of the side reflected light beam. image , calculate the height difference D between the edge of the front surface of the object and the edge of the overflowing primer, the sampling line is a straight line along the direction from the front surface of the object to the side surface, The first critical edge is the position where the gradient of the grayscale function of the image of the side-reflected light beam along the sampling line first satisfies the condition of gradient>10 in the region of interest; and The second critical edge is the position where the gradient of the grayscale function of the image of the side-reflected light beam along the sampling line first meets the condition of gradient>20 in the region of interest.

6. The detection method according to claim 5, It is characterized in that D=D image / cos(45 degrees), and the overflowing bottom glue height H satisfies the following relationship: H=t die +t und -D, where t die is the height of the object, and t und is the distance between the lower surface of the object and the substrate, the front surface is opposite to the lower surface, and the side surface is adjacent to the front surface and the lower surface.

Images