Overhead transporter and overhead transporter system

Abstract

The overhead transporter (6) of the present invention includes a traveling unit (18) capable of traveling along a track (4), and a lifting unit (30) having a clamp (30A) for gripping a FOUP (10) and being lifted and lowered relative to the traveling unit (18) by a suspension member (28A). The overhead transporter (6) includes: a main controller (50) provided in the traveling unit (18) for controlling each part of the overhead transporter (6); a vibration detection unit (55A) provided in the lifting unit (30) for detecting vibrations generated on the lifting unit (30); and a vibration monitoring unit (55B) provided in the lifting unit (30) for determining whether the detection result of vibrations by the vibration detection unit (55A) is within a preset allowable range (R) and outputting the determination result to the main controller (50).

Description

Technical Field

[0001] One aspect of the present invention relates to an overhead transporter and an overhead transporter system. Background Art

[0002] As is well known, such an overhead transporter includes a main body portion capable of traveling along a track, and a lifting portion having a gripping portion for gripping an article and being lifted or lowered by winding or unwinding with respect to the main body portion via a plurality of suspension members. In such an overhead transporter, there is a need to monitor vibrations generated in the article held by the lifting portion with a simple structure. For example, Patent Document 1 discloses such a diagnostic system: a vibration sensor is provided in the overhead transporter, and vibrations acquired by the vibration sensor, together with output torques and rotational speeds of a traveling motor and a lifting motor, are transmitted to a diagnostic device provided outside the overhead transporter, and the diagnostic device can automatically diagnose the overhead transporter.

[0003] Prior Art Documents

[0004] Patent Documents

[0005] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2006-315813

[0006] Summary of the Invention

[0007] Problems to be Solved by the Invention

[0008] However, the above-described conventional diagnostic system requires a diagnostic device that deeply analyzes and diagnoses based on various information transmitted from the overhead transporter, and thus does not meet the need to monitor vibrations generated in the article held by the lifting portion with a simple structure. Further, the above-described conventional diagnostic system has a structure that directly transmits vibration information acquired by the vibration sensor and also transmits output torque and rotational speed, and thus the burden of processing including communication in the main body control unit mounted in the overhead transporter also increases. Summary of the Invention

[0009] Therefore, an object of one aspect of the present invention is to provide an overhead transporter and an overhead transporter system that do not increase the burden of processing in the main body control unit mounted in the overhead transporter and can monitor vibrations generated in the article held by the lifting portion with a simple structure.

[0010] Means for Solving the Problems

[0011] An overhead transporter according to one embodiment of the present invention includes a main body portion capable of traveling along a track, and a lifting portion having a gripping portion for gripping an article and lifting and lowering relative to the main body portion by a suspension member; and includes: a main body control portion provided in the main body portion for controlling respective parts of the overhead transporter, a vibration detection portion provided in the lifting portion for detecting vibration generated in the lifting portion, and a vibration monitoring portion provided in the lifting portion for determining whether a detection result of the vibration by the vibration detection portion is within a preset allowable range and outputting a determination result to the main body control portion.

[0012] In this configuration, since only a determination result as to whether a detection result of vibration exceeds a preset allowable range is output from the vibration monitoring portion to the main body control portion, the processing load on the main body control portion can be reduced as compared with a configuration in which all detection results detected by the vibration detection portion are output to the main body control portion. Further, in this configuration, since it is only determined whether detected vibration is within a preset allowable range, in-depth analysis or the like is not required, and vibration generated on the article can be monitored using a simple configuration. As a result, the processing load on the main body control portion mounted in the overhead transporter is not increased, and vibration generated on the article held by the lifting portion can be monitored using a simple configuration.

[0013] In the overhead transporter according to one embodiment of the present invention, the main body control portion may set an allowable range for the vibration monitoring portion. Thereby, the allowable range for determining abnormal vibration can be easily set.

[0014] In the overhead transporter according to one embodiment of the present invention, the vibration monitoring portion may output a meaning thereof to the main body control portion when vibration detected by the vibration detection portion exceeds the allowable range. In this configuration, since the meaning is output to the main body control portion only when it is determined that vibration detected by the vibration detection portion exceeds the allowable range, that is, only when it is determined that the vibration monitoring portion detects abnormal vibration, the processing load on the main body control portion can be further reduced.

[0015] In the overhead transporter according to one embodiment of the present invention, the vibration monitoring portion may output at least one of a determination result of vibration during traveling and a determination result of vibration during lifting and lowering of the article to the main body control portion. In this configuration, at least one of abnormal vibration during traveling of the overhead transporter and abnormal vibration during lifting and lowering of the lifting portion in a stopped state of the overhead transporter can be monitored.

[0016] In the overhead transporter according to one aspect of the present invention, the vibration monitoring unit can be set to be able to set a plurality of allowable ranges, and is set to switch the allowable ranges according to the operating conditions of the overhead transporter. The so-called operating conditions include, for example, when traveling on a straight track, when traveling on a curved track, and when lifting an article. In this configuration, abnormal vibrations corresponding to the operating conditions of the overhead transporter can be appropriately obtained.

[0017] The overhead transporter system according to one aspect of the present invention includes the above-described plurality of overhead transporters, and a state monitoring unit configured to be able to communicate with the main control unit in the plurality of overhead transporters; the state monitoring unit stores the determination result of the vibration monitoring unit in association with the position on the track, and outputs information in which the determination result is superimposed on the map data indicating the configuration of the track. In this configuration, since the abnormal vibration (vibration exceeding the allowable range) and the position where the abnormal vibration occurs are stored in an associated state, it is easy to grasp the part where the abnormal vibration occurs. And since the position where the abnormal vibration occurs is displayed superimposed on the map data, the position where the abnormal vibration occurs can be visually recognized.

[0018] Effects of the Invention

[0019] According to one aspect of the present invention, the processing load on the main control unit mounted in the overhead transporter is not increased, and vibrations generated on the article held by the lifting unit can be monitored using a simple configuration. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A side view showing an overhead transporter having a transfer device according to one embodiment.

[0021] Figure 2 To show Figure 1 The functional block diagram of the overhead transporter.

[0022] Figure 3 An example of the detection result of the vibration detected by the vibration detection unit.

[0023] Figure 4 To show Figure 1 The timing chart of the vibration monitoring process in the overhead transporter.

[0024] Figure 5 An example of the vibration monitoring screen output by the transport controller. DETAILED DESCRIPTION OF THE INVENTION

[0025] Hereinafter, a preferred embodiment of one aspect of the present invention will be described in detail with reference to the drawings. In the description of the drawings, the same reference numerals are added to the same elements, and duplicate descriptions are omitted.

[0026] An overhead transporter system 1 of an embodiment includes a plurality of overhead transporters 6 (see Figure 1 ), a track 4, and a transport controller 70 (see Figure 2 ).

[0027] As Figure 1 shown, an overhead transporter 6 of an embodiment is an overhead transporter capable of moving along a track 4 and is used in a system for transporting a FOUP (Front Opening Unified Pod) (article) 10 between loading units (not shown). The overhead transporter 6 may also transport containers such as mask boxes storing a plurality of glass substrates, general components, etc. instead of the FOUP 10. Here, for example, the overhead transporter 6 in the overhead transporter system 1 in which the overhead transporter 6 travels along a one-way track 4 laid on the ceiling of a factory or the like will be described as an example.

[0028] The track 4 is laid, for example, near the ceiling in the overhead space of an operator. The track 4 is suspended, for example, from the ceiling. The track 4 is a predetermined travel path for the overhead transporter 6 to travel. The loading units are arranged along the track 4 and are provided at positions where the overhead transporter 6 can transfer the FOUP 10. The loading units include a buffer area and a transfer port. The buffer area is a loading unit for temporarily loading the FOUP 10. The buffer area is, for example, a loading unit for temporarily placing the FOUP 10 when the FOUP 10 transported by the overhead transporter 6 cannot be transferred to the transfer port because another FOUP 10 or the like is loaded at the transfer port as the destination. The transfer port is, for example, a loading unit for transferring the FOUP 10 to a semiconductor processing device (not shown) mainly including a cleaning device, a film forming device, a lithography device, an etching device, a heat treatment device, and a flattening device. In addition, the processing device is not particularly limited and can be various devices.

[0029] The overhead transporter 6 travels along the track 4 and transports the FOUP 10. The overhead transporter 6 is an unmanned overhead transporter. The number of overhead transporters 6 included in the overhead transporter system 1 is not particularly limited and is a plurality. As Figure 1 and Figure 2 shown, the overhead transporter 6 has a traveling unit 18, a transfer device 7, and a main body controller (main body control unit) 50.

[0030] The traveling unit 18 includes a motor and the like and causes the overhead transporter 6 to travel along the track 4. The transfer device 7 has a main body portion 22, a lateral movement portion 24, a θ driver 26, a lifting drive portion 28, a lifting portion 30, and front and rear frames 33, 33.

[0031] The main body portion 22 supports the lateral movement portion 24, the θ driver 26, the lifting drive portion 28, and the lifting portion 30. The lateral movement portion 24 causes the θ driver 26, the lifting drive portion 28, and the lifting portion 30 to move laterally in a direction perpendicular to the traveling direction of the track 4. The θ driver 26 causes at least one of the lifting drive portion 28 and the lifting portion 30 to rotate within a specified angular range in the horizontal plane. The lifting drive portion 28 raises and lowers the lifting portion 30 by winding or unwinding a suspension member 28A such as a wire rope, a rope, and a belt.

[0032] A clamp (holding portion) 30A and a sensor unit 55 are provided on the lifting portion 30. The clamp 30A holds the FOUP 10 in a state of supporting the flange portion of the FOUP 10 from below. The clamp 30A can freely hold or release the FOUP 10. The front and rear frames 33, 33 cause a pawl (not shown) to protrude and retract, preventing the FOUP 10 from falling during transportation. The front and rear frames 33, 33 are provided at the front and rear in the traveling direction of the overhead transporter 6.

[0033] The sensor unit 55 detects vibrations generated on the lifting portion 30 (i.e., vibrations generated on the FOUP 10 held by the clamp 30A), and outputs the detection result to the main body controller 50 described in detail in the following paragraphs. The sensor unit 55 includes a vibration detection portion 55A that detects vibrations and a vibration monitoring portion 55B. The vibration detection portion 55A is, for example, a triaxial acceleration sensor that detects vibrations in the X-axis direction, the Y-axis direction, and the Z-axis direction. When looking down at the lifting portion 30 from the Z-axis direction, the vibration detection portion 55A is provided at the center of gravity position of the lifting portion 30. In the present embodiment, it is provided at a position adjacent to the clamp 30A. The vibration detection portion 55A continuously detects vibrations in the X-axis direction, the Y-axis direction, and the Z-axis direction at a specified interval (see Figure 3 ).

[0034] The vibration monitoring portion 55B determines whether the detection result of the vibration by the vibration detection portion 55A is within a preset allowable range R, and outputs the determination result to the main body controller 50. The vibration monitoring portion 55B is an electronic control unit composed of a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), and the like. The vibration monitoring portion 55B can be configured as, for example, software in which a program stored in the ROM is loaded onto the RAM and executed in the CPU. The vibration monitoring portion 55B can also be configured as hardware composed of an electronic circuit or the like.

[0035] The allowable range R set in the vibration monitoring portion 55B is set by the main body controller 50. The vibration monitoring portion 55B of the present embodiment monitors the detection result of the vibration by the vibration detection portion 55A (see Figure 3) Only when exceeding the above allowable range R, a signal indicating the meaning of exceeding the above allowable range is output to the main controller 50. That is, the vibration monitoring unit 55B outputs a signal indicating the meaning of exceeding the allowable range R to the main controller 50 at the point D shown in Figure 3 The vibration monitoring unit 55B outputs the determination result of the vibration during travel and the determination result of the vibration during the lifting of the FOUP 10 to the main controller 50. That is, in the overhead transporter 6 of the present embodiment, it is possible to monitor the vibration generated on the lifting unit 30 during both travel and lifting.

[0036] The vibration monitoring unit 55B is configured to be able to set a plurality of allowable ranges R. For example, the vibration monitoring unit 55B includes an allowable range R1 during straight track travel, an allowable range R2 during curved track travel, and an allowable range R3 during FOUP lifting. And the vibration monitoring unit 55B is set to switch the allowable ranges R1, R2, and R3 according to the operation status of the overhead transporter 6.

[0037] The main controller 50 is an electronic control unit composed of a CPU, a ROM, a RAM, etc. The main controller 50 controls various operations of each part in the overhead transporter 6 (that is, the traveling unit 18 and the transfer device 7). Specifically, as

[0038] shown, the main controller 50 controls the traveling unit 18, the lateral movement unit 24, the θ driver 26, the lifting drive unit 28, and the lifting unit 30. The main controller 50 can be configured as software in which a program stored in the ROM is loaded onto the RAM and executed in the CPU. The main controller 50 can also be configured as hardware composed of an electronic circuit or the like. The main controller 50 and the sensor unit 55 are set to be able to communicate with each other in a wired or wireless form. In the case of wired, the communication line is built into the lifting member 28A. Figure 2

[0039] The main controller 50 sets the allowable range R for the vibration monitoring unit 55B. For the vibration monitoring unit 55B of the present embodiment, an allowable range R1 during straight track travel, an allowable range R2 during curved track travel, and an allowable range R3 during article lifting are respectively set in the vibration monitoring unit 55B.

[0040] ​The main controller 50 can grasp the position of the overhead transporter 6 by appropriate means. For example, the main controller 50 can grasp the position of the overhead transporter 6 from the position information obtained from barcodes or the like pasted on the track 4, and the counter of the motor or the like provided in the traveling unit 18. When the main controller 50 receives a signal indicating that it has exceeded the allowable range R from the sensor unit 55, it stores the signal in a memory (not shown) or the like in association with the position of the overhead transporter 6. That is, the main controller 50 stores information indicating the position where vibration exceeding the allowable range R (abnormal vibration) is measured. And the main controller 50 sends the information indicating the position where vibration exceeding the allowable range R is measured to the transport controller 70 according to a request from the transport controller 70.

[0041] Figure 2 The illustrated transport controller 70 controls multiple overhead transporters 6. The transport controller 70 is an electronic control unit composed of a CPU, ROM, RAM, etc. The transport controller 70 can be configured as software in which a program stored in the ROM is loaded onto the RAM and executed in the CPU. The transport controller 70 can also be configured as hardware composed of an electronic circuit or the like. The transport controller 70 has a transport control unit 71, a state monitoring unit 72, and a storage unit 73 that are composed of the cooperation of hardware such as a CPU, RAM, and ROM and software such as a program.

[0042] The transport control unit 71 assigns transport commands to multiple overhead transporters 6 based on a transport request from an upper controller (not shown). The state monitoring unit 72 causes the main controller 50 to send information indicating the position where vibration exceeding the allowable range R is measured in the main controller 50 of the overhead transporter 6. The storage unit 73 stores the determination result of the vibration monitoring unit 55B in association with the position on the track 4. That is, the storage unit 73 stores the information indicating the position where vibration exceeding the allowable range R (abnormal vibration) is measured and sent from the main controller 50.

[0043] The state monitoring unit 72 of the present embodiment outputs the information stored in the storage unit 73 to the terminal device 80. For example, the state monitoring unit 72 displays a vibration monitoring screen SC1 as shown in Figure 5 in the terminal device 80. The vibration monitoring screen SC1 is a screen in which the position A where abnormal vibration occurs is superimposed on the top view of the configuration of the track 4. On the top view of the track 4, in addition to the track 4, storage warehouses, etc. (rectangular figures shown along the track 4) are also displayed.

[0044] Next, mainly referring to Figure 4Describe the operation of the overhead transporter system 1 in this embodiment. First, the main controller 50 sends a threshold value for setting the allowable range R of vibration to the vibration monitoring unit 55B to the vibration monitoring unit 55B (step S1). The vibration monitoring unit 55B that has received the threshold value from the main controller 50 sets the allowable range R (threshold value) (step S2). The vibration monitoring unit 55B sends the meaning of setting the allowable range R to the main controller 50 (step S3). Thus, the preparation for vibration monitoring in the sensor unit 55, that is, the preparation for outputting a signal indicating that the vibration detected by the vibration detection unit 55A exceeds the allowable range R (when abnormal vibration is detected) is completed (step S10).

[0045] When the preparation for vibration monitoring in the sensor unit 55 is completed, the vibration detection unit 55A detects the vibration generated on the lifting unit 30 at regular intervals. The vibration monitoring unit 55B performs successive data communication with the vibration detection unit 55A, and the vibration monitoring unit 55B monitors the vibration detected by the vibration detection unit 55A (step S11). Also, the main controller 50 successively checks whether the vibration exceeds the allowable range R (step S12). Among them, when the vibration detection unit 55A detects that the vibration value detected by the vibration detection unit 55A exceeds the allowable range R (step S13), it sends information indicating this meaning to the main controller 50 (step S14).

[0046] When the main controller 50 receives a signal indicating that the vibration exceeds the allowable range R sent from the vibration monitoring unit 55B (step S15), it stores the abnormal vibration information associated with the position on the track 4 in a memory (not shown) or the like. The transport controller 70 periodically queries the main controller 50 about the status of the overhead transporter 6 (step S16). When the main controller 50 receives a periodic query from the transport controller 70, if there is abnormal vibration information (vibration detection log) stored (accumulated) in the memory, it outputs the abnormal vibration information to the transport controller 70 (step S20).

[0047] When the transport controller 70 receives the abnormal vibration information output from the main controller 50, it stores the abnormal vibration information in the storage unit 73 (step S21). Then, the transport controller 70 outputs the abnormal vibration information stored in the storage unit 73 to the terminal device 80 (step S22). Examples of the terminal device 80 include a display device, a portable terminal, a smartphone, a tablet computer, etc. The terminal device 80 displays the abnormal vibration information sent from the transport controller 70 as Figure 5 shown in the vibration monitoring screen SC1.

[0048] In the overhead transporter 6 of the above-described embodiment, only the determination result of whether the detection result of vibration by the vibration detection unit 55A exceeds a preset allowable range R is output from the vibration monitoring unit 55B to the main body controller 50. Thus, compared with a configuration in which all the detection results detected by the sensor unit 55 are output to the main body controller 50, the processing load on the main body controller 50 can be reduced. Further, in the overhead transporter 6 of the above-described embodiment, since it is only determined whether the vibration detected by the vibration detection unit 55A is within the preset allowable range R, it is not necessary to perform in-depth analysis or the like, and the vibration generated on the FOUP 10 can be monitored using a simple configuration. As a result, the processing load on the main body controller 50 mounted in the overhead transporter 6 is not increased, and the vibration generated on the FOUP 10 held by the lifting unit 30 can be monitored using a simple configuration.

[0049] In the overhead transporter 6 of the above-described embodiment, the main body controller 50 can set the allowable range R for the vibration monitoring unit 55B. With this configuration, the allowable range R for determining abnormal vibration can be easily set.

[0050] In the overhead transporter 6 of the above-described embodiment, when the vibration monitoring unit 55B determines that the vibration detected by the vibration detection unit 55A exceeds the allowable range R, a signal indicating this is output to the main body controller 50. In this configuration, since a signal indicating this is output to the main body controller 50 only when it is determined that the vibration detected by the vibration detection unit 55A exceeds the allowable range R, that is, when the vibration monitoring unit 55B detects abnormal vibration, the processing load on the main body controller 50 can be further reduced.

[0051] In the overhead transporter 6 of the above-described embodiment, the vibration monitoring unit 55B outputs both the determination result of the vibration during travel and the determination result of the vibration during the lifting of the FOUP 10 to the main body controller 50. With this configuration, it is possible to monitor both abnormal vibration during the travel of the overhead transporter 6 and abnormal vibration during the lifting of the lifting unit 30 in a stopped state of the overhead transporter 6.

[0052] In the overhead transporter 6 of the above-described embodiment, the vibration monitoring unit 55B is configured to be able to set a plurality of allowable ranges and to switch the allowable range according to the operating condition of the overhead transporter 6. With this configuration, it is possible to appropriately obtain abnormal vibration corresponding to the operating condition of the overhead transporter 6.

[0053] In the overhead transporter system 1 of the above-described embodiment, since the abnormal vibration (vibration exceeding the allowable range) and the position where the abnormal vibration occurred are stored in an associated state, it becomes easy to identify the abnormal portion of the track 4. Further, in the above-described embodiment, since the vibration information stored in the storage unit 73 is displayed asFigure 5 The vibration monitoring screen SC1 shown, thus enabling the provision of information that can be visually grasped.

[0054] The above has described an embodiment of one aspect of the present invention, but this aspect of the present invention is not limited to the above embodiment and can be variously modified within the scope not exceeding the gist of the invention.

[0055] In the above embodiment, an example in which the main body controller 50 sets a plurality of allowable ranges R1, R2, R3 has been described, but it is not limited thereto, and it may also be one, two, or four or more.

[0056] In the above embodiment and the modification example, an example in which the vibration monitoring unit 55B outputs a signal indicating that the vibration detected by the vibration detection unit 55A exceeds the allowable range R to the main body controller 50 has been described, but information (signal) indicating whether it exceeds or does not exceed the allowable range R may also be output to the main body controller 50 regularly.

[0057] In the above embodiment and the modification example, an example in which the allowable range R in the vibration monitoring unit 55B can be set from the main body controller 50 has been described, but it may also be configured not to be settable. In this case, the allowable range R may be set in the vibration monitoring unit 55B in advance, or it may be configured to be switchable using a switch or the like provided in the vibration monitoring unit 55B.

[0058] In the above embodiment and the modification example, an example in which the state monitoring unit 72 that outputs information in which the determination result is superimposed on the map data indicating the configuration of the track 4 is configured in the conveyance controller 70 has been described, but an independent controller may be provided separately, or a controller having the above function may be provided in one of the plurality of overhead conveyors 6.

[0059] Description of reference numerals

[0060] 1 - Overhead conveyor system; 4 - Track; 6 - Overhead conveyor; 18 - Traveling unit; 22 - Main body; 28A - Suspension member; 30 - Lifting unit; 30A - Fixture (holding unit); 50 - Main body controller (main body control unit); 55 - Sensor unit; 55A - Vibration detection unit; 55B - Vibration monitoring unit; 70 - Conveyance controller; 71 - Conveyance control unit; 72 - State monitoring unit; 73 - Storage unit; R, R1, R2, R3 - Allowable range; SC1 - Vibration monitoring screen.

Claims

1. An elevated transporter, comprising a main body capable of traveling along a track, and a lifting part having a gripping part for gripping an article and being lifted and lowered relative to the main body by a lifting member; characterized in that Comprising: a main control unit provided in the main body portion for controlling each part in the overhead transporter, a vibration detection unit provided in the lifting portion for detecting vibrations generated in the lifting portion, and a vibration monitoring unit provided in the lifting portion for determining whether the detection result of the vibration by the vibration detection unit is within a preset allowable range and outputting the determination result to the main control unit; when the vibration detected by the vibration detection unit exceeds the allowable range, the vibration monitoring unit outputs this meaning to the main control unit.

2. The elevated transporter according to claim 1, wherein, The main control unit sets the allowable range for the vibration monitoring unit.

3. The elevated transporter according to claim 1, wherein, The vibration monitoring unit outputs at least one of the determination result of the vibration during travel and the determination result of the vibration during the lifting of the article to the main control unit.

4. The elevated transporter according to any one of claims 1 to 3, wherein, The vibration monitoring unit is set to be able to set a plurality of the allowable ranges and is set to switch the allowable ranges according to the operating conditions of the overhead transporter.

5. An overhead transporter system, characterized in that Comprising: a plurality of overhead transporters according to any one of claims 1 to 4, and a status monitoring unit configured to be able to communicate with the main control unit in the plurality of overhead transporters; the status monitoring unit stores the determination result of the vibration monitoring unit in association with the position on the track and outputs information in which the determination result is superimposed on map data representing the configuration of the track.

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