A UV microwave shielding structure and reaction chamber equipment

Abstract

The embodiment of the present application provides a UV microwave shielding structure and a reaction chamber device for shielding microwaves from a UV light source, wherein the UV microwave shielding structure includes a light-transmitting base, wherein a metal mesh is disposed inside the light-transmitting base. A metal mesh is disposed inside the light-transmitting base, and the light-transmitting base serves as a supporting structure for the metal mesh without affecting the irradiation of the product to be processed by ultraviolet rays, and the metal mesh is located inside the light-transmitting base and can be protected. The metal mesh is in a relatively stable state and is not easily displaced or deformed, thereby better playing its function of shielding microwaves and having a longer service life. In addition, precisely because the structure of the metal mesh is stable, the mesh size of the metal mesh can be set larger, and the diameter of the metal wire of the metal mesh can also be set smaller, that is, it can be set thinner, thereby saving materials.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor manufacturing, and in particular to a UV microwave shielding structure and a reaction cavity device. Background Art

[0002] When processing wafers, the reaction chamber equipment will set up a UV light source for irradiation, but the microwaves of the UV light source will interfere with other components and may also affect the heating environment of the wafer. Currently, a metal shielding net is set up to shield the microwaves of the UV light source, and the metal shielding net is fixed on a metal frame. In order to meet the light requirements, the metal wire of the metal shielding net is relatively thin. During installation and disassembly or when airflow blows through, the metal shielding net will be deformed, the mesh will become larger or damaged, thereby reducing the shielding effect, causing microwave leakage, and interfering with the normal operation of the reaction chamber equipment. Summary of the invention

[0003] An embodiment of the present application provides a UV microwave shielding structure for shielding microwaves of a UV light source. The UV microwave shielding structure includes a light-transmitting base, and a metal mesh is arranged inside the light-transmitting base.

[0004] In a specific embodiment, the light-transmitting base is made of quartz.

[0005] In a specific embodiment, the metal mesh is etched inside the light-transmitting base.

[0006] In a specific embodiment, it also includes a mounting plate that is an integral structure with the metal mesh, the mounting plate is connected to the outer periphery of the metal mesh, and the mounting plate extends out of the outer periphery of the light-transmitting base; the mounting plate is used to install the UV microwave shielding structure.

[0007] In a specific implementation, the light-transmitting base has no through hole; or, the light-transmitting base has a plurality of through holes.

[0008] In a specific embodiment, one or more through holes are provided at positions corresponding to each grid area of ​​the metal mesh on the light-transmitting base.

[0009] An embodiment of the present application also provides a reaction chamber device, including a first cavity structure, wherein the first cavity structure forms a first chamber, a UV light source is provided in the first chamber, and the UV microwave shielding structure is also provided in the first chamber, wherein the UV shielding structure is any of the UV microwave shielding structures described above.

[0010] In one specific embodiment, the reaction chamber device includes a gas circulation loop flowing through the UV light source;

[0011] The light-transmitting base has no through holes, the first cavity structure is provided with a ventilation channel, and the gas circulation loop includes the ventilation channel; or, the light-transmitting base is provided with a plurality of through holes, and the gas circulation loop includes the through holes.

[0012] In a specific embodiment, the reaction chamber device includes a box body for accommodating the UV light source, the bottom of the box body is open, and the light-transmitting base seals the opening.

[0013] In a specific embodiment, the light-transmitting base has no through hole, a gas inlet is arranged on the top of the box body, a gas outlet is arranged on the side wall of the box body, and the gas outlet is connected to the ventilation channel.

[0014] In the embodiment of the present application, a metal mesh is arranged inside the light-transmitting base. The light-transmitting base serves as a supporting structure for the metal mesh without affecting the irradiation of the product to be processed by ultraviolet rays. The metal mesh is located inside the light-transmitting base and can be protected. The metal mesh is in a relatively stable state and is not easy to deflect or deform, thereby better playing its function of shielding microwaves and having a longer service life. In addition, precisely because the structure of the metal mesh is stable, the mesh size of the metal mesh can be set larger, and the diameter of the metal wire of the metal mesh can also be set smaller, that is, it can be set thinner, thereby saving materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 A schematic structural diagram of a reaction chamber device provided in the first embodiment of the present invention;

[0016] Figure 2 for Figure 1 Schematic diagram of the mid-UV microwave shielding structure;

[0017] Figure 3 for Figure 2 AA section view;

[0018] Figure 4 A schematic structural diagram of a reaction chamber device provided in a second embodiment of the present invention;

[0019] Figure 5 for Figure 4 Schematic diagram of the mid-UV microwave shielding structure.

[0020] Figure 1-5 The reference numerals in the drawings are described as follows:

[0021] 1- box body; 1a- gas inlet; 1b- gas outlet;

[0022] 2-UV light source;

[0023] 3-UV microwave shielding structure; 31-metal mesh; 32-light-transmitting base; 32a-through hole; 33-mounting plate; 33a-mounting hole;

[0024] 4-first cavity structure; 4a-ventilation channel. DETAILED DESCRIPTION

[0025] In order to enable those skilled in the art to better understand the solution of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0026] Example 1

[0027] Please refer to Figure 1-3 , Figure 1 A schematic structural diagram of a reaction chamber device provided in the first embodiment of the present invention; Figure 2 for Figure 1 Schematic diagram of the medium UV microwave shielding structure 3; Figure 3 for Figure 1 AA section view.

[0028] like Figure 1 As shown, the reaction chamber device in this embodiment is provided with a UV (Ultraviolet) light source 2, that is, the UV light source 2 is an ultraviolet light source. Specifically, the reaction chamber device includes a first cavity structure 4, the first cavity structure 4 forms a first cavity, and the UV light source 2 is located in the first cavity. Specifically, the box 1 provided with the UV light source 2 can be installed in the first cavity. In addition, the reaction chamber device also includes a second cavity structure ( Figure 1 The product to be processed may be placed in the second chamber of the second chamber structure (not shown), and the product to be processed may be, for example, a wafer.

[0029] A light-transmitting quartz glass can be arranged between the first cavity structure 4 and the second cavity structure. The second cavity structure is a vacuum environment. The ultraviolet rays generated by the UV light source 2 in the first cavity structure 4 can be irradiated to the product to be processed in the second cavity structure through the quartz glass for processing. When the product to be processed is a wafer, the ultraviolet rays can irradiate and modify the thin film deposited on the surface of the wafer.

[0030] like Figure 1 As shown, a UV microwave shielding structure 3 is also arranged in the first cavity of the first cavity structure 4, and the UV microwave shielding structure 3 includes a light-transmitting base 32, which is made of a light-transmitting material, generally a transparent material, such as quartz. The material of the light-transmitting base 32 needs to be both light-transmitting and have a certain high temperature resistance, because the UV light source 2 will generate a high temperature during the irradiation process, and quartz has the properties of good light transmittance and high temperature resistance.

[0031] In addition, a metal mesh 31 is disposed inside the light-transmitting base 32, and the metal mesh 31 can shield the microwaves of the UV light source 2, preventing the microwaves from interfering with other working components and also preventing the microwaves from affecting the heating environment in the second cavity structure. Figure 1 As shown, the box 1 in which the UV light source 2 is set is provided with an opening at the bottom, and the ultraviolet rays emitted by the UV light source 2 are irradiated from the opening to the second cavity structure below. At this time, the UV microwave shielding structure 3 can be set at the opening position of the box 1, so that the UV microwave shielding structure 3 can basically block the microwaves within the working area of ​​the UV light source 2.

[0032] It can be seen that the setting position of the UV microwave shielding structure 3 can be changed accordingly according to the different working areas of the UV light source 2. For example, when the box body 1 only covers the top of the UV light source 2, the UV microwave shielding structure 3 is not only set below the UV light source 2, but also surrounds the periphery of the UV light source 2. In short, it can shield the microwaves of the UV light source 2 to prevent it from interfering with other components, and does not prevent the ultraviolet rays of the UV light source 2 from irradiating the product to be processed. This embodiment does not make specific restrictions. In addition, the UV microwave shielding structure 3 can be as follows Figure 2 The flat plate structure shown may also include multiple flat plate structures, which can be designed according to shielding requirements.

[0033] It can be seen that in this embodiment, a metal mesh 31 is arranged inside the light-transmitting base 32. The light-transmitting base 32 serves as a supporting structure of the metal mesh 31 without affecting the irradiation of the product to be processed by ultraviolet rays. The metal mesh 31 is located inside the light-transmitting base 32 and can be protected. The metal mesh 31 is in a relatively stable state and is not easy to deflect or deform, so that it can better play its function of shielding microwaves and has a longer service life. In addition, just because the structure of the metal mesh 31 is stable, the mesh size of the metal mesh 31 can be set larger. For example, the metal mesh in the background technology solution needs to be set with a mesh size of less than 2 mm, while the mesh size in this embodiment can be 6 mm or larger. Here, 6 mm is, for example, the side length of a square or the diameter of a circular grid, and the specific size and shape of the mesh are not limited in this embodiment. Moreover, based on the same reason, the diameter of the metal wire of the metal mesh 31 in this embodiment can be smaller, that is, it can be set thinner, thereby saving materials.

[0034] In addition, in this embodiment, the metal mesh 31 can be etched inside the light-transmitting base 32 made of quartz, and formed into the inside of the light-transmitting base 32 through an etching process, and become an integrated structure with the light-transmitting base 32. The structure is very stable, and the etching process is simple and easy to implement. The metal mesh 31 and the light-transmitting base 32 formed by etching do not affect each other, and the light-transmitting base 32 can maintain good light transmittance and achieve uniform illumination. However, it can be seen that the metal mesh 31 is not limited to being etched on the light-transmitting base 32. For example, the metal mesh 31 can be clamped and fixed between two pieces of quartz material. However, the light-transmitting base 32 in the above-mentioned integrated UV microwave shielding structure formed by etching is an integrated quartz, which has better light transmittance.

[0035] In addition, if Figure 2 , 3 As shown, the UV microwave shielding structure 3 also includes a mounting plate 33 formed integrally with the metal mesh 31. The mesh structure can be formed on a whole metal plate. The edge of the mesh structure is used as the mounting plate 33, and the main body of the mesh structure is etched into the inside of the light-transmitting base 32. In this way, the mounting plate 33 is connected to the outer periphery of the metal mesh 31, and after the mesh structure is etched into the inside of the light-transmitting base 32, the mounting plate 33 extends out of the outer periphery of the light-transmitting base 32. At this time, the mounting plate 33 can be used to install the UV microwave shielding structure 3. Figure 2 In the embodiment, the mounting plate 33 is provided with a mounting hole 33a, which can be fastened to the box body 1 of the UV light source 2 by inserting a fastener into the mounting hole 33a, such as a bolt, a screw, etc. Of course, other mounting structures can also be provided on the mounting plate 33, such as a buckle that is fastened to the box body 1 of the UV light source 2, etc. The mounting plate 33 made of metal is easy to process the mounting hole 33a, and the connection is more reliable. Moreover, the mounting plate 33 and the light-transmitting base 32 of the UV microwave shielding structure 3 are also equivalent to an integrated structure, and the installation and fixation are more reliable.

[0036] However, it can be known that the UV microwave shielding structure 3 is not limited to being installed in this way. For example, the light-transmitting base 32 can be directly connected to the box 1 of the UV light source 2 through a mechanical connection structure such as a fastener or a buckle.

[0037] Please continue to refer to Figure 1 The reaction chamber equipment generally includes a gas circulation loop flowing through the UV light source 2. The gas is, for example, nitrogen. As mentioned above, the UV light source 2 will generate high temperature during ultraviolet irradiation and requires a certain degree of ventilation and cooling. The gas circulation loop flows through the UV light source 2, thereby taking away part of the heat of the UV light source 2 to play a role in cooling and ventilation.

[0038] like Figure 2As shown, the transparent base 32 is a non-porous structure. When the transparent base 32 seals the opening at the lower end of the box 1 of the UV light source 2, the gas entering the box 1 cannot flow downward. At this time, a ventilation channel 4a can be opened on the first cavity structure 4. Figure 1 The bottom wall of the first cavity structure 4 is provided with a ventilation channel 4a, the first cavity structure 4 can be provided with a gas inlet, and the gas inlet can be provided on the top wall of the first cavity structure 4. The gas enters the first cavity structure 4 through the gas inlet. The top of the box 1 of the UV light source 2 is provided with a gas inlet 1a, and the side wall is provided with a gas outlet 1b. The gas enters the box 1 through the gas inlet 1a to cool the UV light source 2, and then flows out from the gas outlet 1b on the side wall of the box 1, and then flows out through the ventilation channel 4a on the bottom wall of the first cavity structure 4, and then re-circulates into the box 1.

[0039] The ventilation channel 4a may also be provided with a metal mesh for shielding microwaves, but the ventilation channel 4a may avoid the main working area of ​​the UV light source 2, so when the ventilation channel 4a is provided with a metal mesh, a metal mesh made of thicker metal wire may be used.

[0040] In this embodiment, Figure 1 The box 1 with two UV light sources 2 is arranged in the first cavity structure 4, and accordingly, two groups of products to be processed in the second cavity structure below can be irradiated and processed, with high processing efficiency.

[0041] Example 2

[0042] Please refer to Figure 4 , 5 , Figure 4 A schematic structural diagram of a reaction chamber device provided in a second embodiment of the present invention; Figure 5 for Figure 4 Schematic diagram of the mid-UV microwave shielding structure 3.

[0043] The UV microwave shielding structure 3 in this embodiment is substantially the same as that in the first embodiment, except that the light-transmitting base 32 in the first embodiment is a non-porous structure, while the light-transmitting base 32 in the second embodiment is provided with a plurality of through holes 32a. Figure 5 As shown, since the light-transmitting base 32 has its own through hole 32a, it can be used for ventilation. There is no need to set a ventilation channel 4a in the first cavity structure 4, and there is no need to set a gas outlet 1b on the side wall of the box body 1. The gas can enter the first cavity structure 4, and then enter the box body 1 through the gas inlet 1a, and then directly flow out from the through hole 32a of the light-transmitting base 32, and then circulate again.

[0044] It can be seen that in this embodiment, a through hole 32a is provided in the light-transmitting base 32, and the through hole 32a can also be used as a gas circulation loop, thereby simplifying the arrangement of the box 1 and the first cavity structure 4. However, it should be known that the light-transmitting base 32 with a non-porous structure in the first embodiment has better illumination uniformity, and in actual applications, the non-porous arrangement of the first embodiment or the porous arrangement of the second embodiment can be selected according to illumination requirements.

[0045] When the through holes 32a are set on the light-transmitting base 32, one or more through holes 32a can be set in the corresponding part of the light-transmitting base 32 in the area of ​​each grid of the metal mesh 31, that is, the grid of the metal mesh 31 needs to avoid the position of the through holes 32a, which will not affect the ventilation, and the grid is supported by the position of the light-transmitting base 32 without holes, which is more reliable and stable.

[0046] The principles and implementation methods of the present invention are described in this article using specific examples. The description of the above embodiments is only used to help understand the method and core ideas of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made to the present invention without departing from the principles of the present invention, and these improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. A reaction chamber device, comprising a first cavity structure, wherein the first cavity structure forms a first cavity, wherein a UV light source is disposed in the first cavity, wherein the reaction chamber device further comprises a UV microwave shielding structure, wherein the UV microwave shielding structure is used to shield microwaves of the UV light source, wherein the UV microwave shielding structure is disposed in the first cavity, and wherein: The UV microwave shielding structure comprises a light-transmitting base, a metal mesh is arranged inside the light-transmitting base; the light-transmitting base is provided with a plurality of through holes; one or more through holes are arranged at positions corresponding to each grid area of ​​the light-transmitting base and the metal mesh; The reaction chamber device comprises a box body for accommodating the UV light source, the bottom of the box body is open, and the light-transmitting base seals the opening to block microwaves in the working area of ​​the UV light source; the reaction chamber device comprises a gas circulation loop flowing through the UV light source; the gas circulation loop comprises the through hole.

2. The reaction chamber device according to claim 1, characterized in that: The light-transmitting base is made of quartz.

3. The reaction chamber device according to claim 2, characterized in that: The metal mesh is etched inside the light-transmitting base.

4. The reaction chamber device according to claim 3, characterized in that: It also includes a mounting plate that is an integral structure with the metal mesh, the mounting plate is connected to the outer periphery of the metal mesh, and the mounting plate extends out of the outer periphery of the light-transmitting base; the mounting plate is used to install the UV microwave shielding structure.

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