Method for manufacturing optical scanning system, method for manufacturing optical scanning device, and data acquisition method

Abstract

The manufacturing method of the optical scanning system of the present invention comprises: a process of assembling multiple device structures each having a reflector device and a magnet; a process of acquiring first data and second data for each of the multiple device structures, wherein the first data is used to correct the change in the swing angle of the reflector relative to the change in the frequency of the current signal, and the second data is used to correct at least one of the deviation of the reflector that swings around the first axis from the Y axis and the deviation of the reflector that swings around the second axis from the X axis; a process of acquiring third data for correcting the change in the swing angle of the reflector relative to the change in the operating temperature for at least one device structure among the multiple device structures; and a process of storing the first data and the second data in a storage unit while maintaining the correspondence between each of the multiple device structures and the first data and the second data, and storing the third data in the storage unit.

Description

Technical Field

[0001] The present disclosure relates to a method for manufacturing an optical scanning system, a method for manufacturing an optical scanning device, and a data acquisition method. Background Art

[0002] There is known an optical scanning device, which is provided with a reflector device and a magnet, wherein the reflector device has: a first movable part, which is provided with a reflector; a second movable part, which supports the first movable part in a manner that the reflector can swing around a first axis along the X-axis as a central axis; and a supporting part, which supports the second movable part in a manner that the reflector can swing around a second axis along the Y-axis as a central axis, and the magnet generates a magnetic field that acts on a first drive coil provided on the first movable part and a second drive coil provided on the second movable part (for example, refer to patent document 1). In such an optical scanning device, the reflector is sometimes swung in a linear mode with each of the first axis and the second axis as a central axis. In addition, for the reflector that swings around the first axis as the central axis, the linear mode refers to a mode in which the frequency of the current signal input to the first drive coil is lower than the resonant frequency of the reflector that swings around the first axis as the central axis, and the swing angle of the reflector that swings around the first axis as the central axis is proportional to the current value of the current signal. In addition, for a reflector that oscillates about the second axis as the center axis, a linear mode refers to a mode in which the frequency of the current signal input to the second driving coil is lower than the resonant frequency of the reflector that oscillates about the second axis as the center axis, and the swing angle of the reflector that oscillates about the second axis as the center axis is proportional to the current value of the current signal.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2011-33980 Summary of the invention

[0006] Problems to be solved by the invention

[0007] When the above-mentioned optical scanning device is used for example in a 3D printer, an optical coherence tomography scanner, a laser scanning microscope, etc., it is necessary to suppress the error with respect to the target swing angle to, for example, less than ±0.1°.

[0008] Therefore, the purpose of the present disclosure is to provide a method for manufacturing an optical scanning system, a method for manufacturing an optical scanning device, and a data acquisition method that can achieve high-precision movement by causing a reflective mirror to swing in a linear mode with each of a first axis and a second axis as a center axis.

[0009] Means used to solve problems

[0010] The present invention discloses a method for manufacturing an optical scanning system, wherein the optical scanning system comprises: a reflector device having a first movable portion provided with a reflector and a first driving coil, a second movable portion provided with a second driving coil and supporting the first movable portion in a manner that the reflector can swing with a first axis along an X-axis as a center axis, and a supporting portion supporting the second movable portion in a manner that the reflector can swing with a second axis along a Y-axis intersecting the X-axis as a center axis; a magnet that generates a magnetic field acting on the first driving coil and the second driving coil; a temperature sensor that measures the operating temperature of the reflector device and the magnet; a computing unit that inputs a first current signal for causing the reflector to swing with the X-axis as a center axis at a first target swing angle and a first target frequency into the first driving coil, and inputs a second current signal for causing the reflector to swing with the Y-axis as a center axis at a second target swing angle and a second target frequency into the second driving coil; and a storage unit that stores data. The method for manufacturing the optical scanning system comprises: assembling a plurality of optical scanning devices each having a reflector device and a magnet; A process for providing a plurality of device structures of iron; a process for obtaining first data and second data for each of the plurality of device structures, wherein the first data is used to correct the change of the swing angle of the reflector relative to the change of the frequency of the current signal input to each of the first driving coil and the second driving coil, and the second data is used to correct at least one of the deviation of the reflector swinging with the first axis as the center axis from the Y axis and the deviation of the reflector swinging with the second axis as the center axis from the X axis; a process for obtaining third data for correcting the change of the swing angle of the reflector relative to the change of the operating temperature for at least one device structure among the plurality of device structures; and a process for storing the first data and the second data obtained for each of the plurality of device structures in a storage unit that constitutes an optical scanning system together with each of the plurality of device structures while maintaining the correspondence between each of the plurality of device structures and the first data and the second data, and storing the third data obtained for at least one device structure in a storage unit that constitutes an optical scanning system together with each of the plurality of device structures.

[0011] The inventors of the present invention have found that: when the reflector is swung in a linear mode with each of the first axis and the second axis as the center axis, the change in the oscillation angle of the reflector relative to the change in the frequency of the current signal input to each of the first drive coil and the second drive coil is not consistent for each individual (i.e., for each combination of the reflector device and the magnet); the deviation of the reflector from the Y axis when oscillating with the first axis as the center axis and the deviation of the reflector from the X axis when oscillating with the second axis as the center axis are not consistent for each individual; and the change in the oscillation angle of the reflector relative to the change in the use temperature of the reflector device and the magnet is mainly caused by the temperature characteristics of the magnet. Therefore, by manufacturing the optical scanning system as described above, in the manufactured optical scanning system, the reflector can be swung with the X axis as the center axis at the first target oscillation angle and the first target frequency, and the reflector can be swung with the Y axis as the center axis at the second target oscillation angle and the second target frequency. As described above, according to the manufacturing method of the optical scanning system, it is possible to manufacture an optical scanning system that can achieve high-precision operation when the reflector is swung in a linear mode with each of the first axis and the second axis as the center axis.

[0012] In the manufacturing method of the optical scanning system of one aspect of the present disclosure, in the process of acquiring the third data, the third data may be acquired for a representative device structure among the plurality of device structures, and in the process of storing the first data, the second data, and the third data, the first data and the second data acquired for each of the plurality of device structures may be stored in a storage unit that constitutes the optical scanning system together with each of the plurality of device structures while maintaining the correspondence between each of the plurality of device structures and the first data and the second data, and the third data acquired for the representative device structure may be stored in a storage unit that constitutes the optical scanning system together with each of the plurality of device structures. Thus, it is possible to efficiently manufacture an optical scanning system that can achieve high-precision motion when the reflector is swung in a linear mode with each of the first axis and the second axis as the center axis. In addition, for a representative device structure among the multiple device structures, third data for correcting the change in the swing angle of the reflector relative to the change in the operating temperature of the reflector device and the magnet is obtained, and the third data obtained for the representative device structure is stored in a storage unit that constitutes an optical scanning system together with each of the multiple device structures. As mentioned above, this is because the change in the swing angle of the reflector relative to the change in the operating temperature of the reflector device and the magnet is mainly caused by the temperature characteristics of the magnet.

[0013] In the manufacturing method of the optical scanning system of one aspect of the present disclosure, in the process of acquiring the third data, the third data may be acquired for each of the plurality of device structures, and in the process of storing the first data, the second data, and the third data, the first data, the second data, and the third data acquired for each of the plurality of device structures may be stored in a storage unit that constitutes the optical scanning system together with each of the plurality of device structures while maintaining the corresponding relationship between each of the plurality of device structures and the first data, the second data, and the third data. Thus, it is possible to manufacture an optical scanning system that can achieve higher precision in the case of swinging the reflector in a linear mode with each of the first axis and the second axis as the center axis.

[0014] The manufacturing method of the optical scanning system of one aspect of the present disclosure may also include: a step of configuring a calculation unit in a manner of generating the first current signal and the second current signal based on the first target swing angle and the first target frequency, the second target swing angle and the second target frequency, the use temperature, and the first data, the second data, and the third data stored in the storage unit. Thus, in the manufactured optical scanning system, it is possible to easily obtain accurate first current signals and second current signals.

[0015] The present invention discloses a method for manufacturing an optical scanning device, wherein the optical scanning device comprises: a mirror device having a first movable portion provided with a mirror and a first driving coil, a second movable portion provided with a second driving coil and supporting the first movable portion in a manner that the mirror can swing around a first axis along an X-axis as a center axis, and a supporting portion supporting the second movable portion in a manner that the mirror can swing around a second axis along a Y-axis intersecting the X-axis as a center axis; a magnet that generates a magnetic field acting on the first driving coil and the second driving coil; a computing device that inputs a first current signal for causing the mirror to swing around the X-axis as a center axis at a first target swing angle and a first target frequency into the first driving coil, and inputs a second current signal for causing the mirror to swing around the Y-axis as a center axis at a second target swing angle and a second target frequency into the second driving coil; and a storage device that stores data, wherein the optical scanning device The manufacturing method comprises: a process of assembling a plurality of device structures each having a reflector device and a magnet; a process of acquiring second data for each of the plurality of device structures, wherein the second data is used to correct at least one of a deviation of a reflector that swings about a first axis as a center axis from a Y axis and a deviation of a reflector that swings about a second axis as a center axis from an X axis; a process of acquiring third data for correcting a change in a swing angle of the reflector with respect to a change in an operating temperature of the reflector device and the magnet for at least one of the plurality of device structures; and a process of storing the second data acquired for each of the plurality of device structures in a storage device that constitutes an optical scanning device together with each of the plurality of device structures while maintaining a correspondence between each of the plurality of device structures and the second data, and storing the third data acquired for at least one device structure in a storage device that constitutes an optical scanning device together with each of the plurality of device structures.

[0016] According to this method of manufacturing an optical scanning device, for the same reasons as described above, it is possible to manufacture an optical scanning device that can achieve high-precision operation when the reflection mirror is swung in a linear mode with each of the first axis and the second axis as the center axis.

[0017] In the manufacturing method of the optical scanning device of one aspect of the present disclosure, in the process of acquiring the third data, the third data may be acquired for a representative device structure among the plurality of device structures, and in the process of storing the second data and the third data, the second data acquired for each of the plurality of device structures may be stored in a storage device that constitutes the optical scanning device together with each of the plurality of device structures while maintaining the correspondence between each of the plurality of device structures and the second data, and the third data acquired for the representative device structure may be stored in a storage device that constitutes the optical scanning device together with each of the plurality of device structures. Thus, it is possible to efficiently manufacture an optical scanning device that can achieve high-precision operation when the reflector is swung in a linear mode with each of the first axis and the second axis as the center axis.

[0018] In the manufacturing method of the optical scanning device of one aspect of the present disclosure, in the process of acquiring the third data, the third data may be acquired for each of the plurality of device structures, and in the process of storing the second data and the third data, the second data and the third data acquired for each of the plurality of device structures may be stored in a storage device that constitutes the optical scanning device together with each of the plurality of device structures while maintaining the correspondence between each of the plurality of device structures and the second data and the third data. Thus, it is possible to manufacture an optical scanning device that can achieve higher precision in the case of swinging the reflector in a linear mode with each of the first axis and the second axis as the center axis.

[0019] The manufacturing method of an optical scanning device according to one aspect of the present disclosure may also include: a process of acquiring first data for each of a plurality of device structures, wherein the first data is used to correct the change in the swing angle of the reflector relative to the change in the frequency of the current signal input to each of the first drive coil and the second drive coil; and a process of forming a computing device in a manner of acquiring data based on a first target swing angle and a first target frequency, a second target swing angle and a second target frequency, and the first data, and generating a first current signal and a second current signal based on the acquired data and a use temperature, and second data and third data stored in a storage device. Thus, in the manufactured optical scanning device, it is possible to easily obtain accurate first current signals and second current signals.

[0020] In the method for manufacturing an optical scanning device according to one aspect of the present disclosure, the optical scanning device may further include a temperature sensor for measuring a use temperature. Thus, an appropriate use temperature can be obtained in the manufactured optical scanning device.

[0021] According to one aspect of the present disclosure, a data acquisition method is provided, wherein an optical scanning system comprises: a mirror device having a first movable portion provided with a mirror and a first driving coil, a second movable portion provided with a second driving coil and supporting the first movable portion in a manner that the mirror can swing around a first axis along an X-axis as a center axis, and a supporting portion supporting the second movable portion in a manner that the mirror can swing around a second axis along a Y-axis intersecting the X-axis as a center axis; a magnet that generates a magnetic field acting on the first driving coil and the second driving coil; a computing portion that inputs a first current signal used to cause the mirror to swing around the X-axis as a center axis at a first target swing angle and a first target frequency into the first driving coil, and inputs a first current signal used to cause the mirror to swing around the Y-axis as a center axis at a second target swing angle and a first target frequency into the first driving coil, and inputs a first current signal used to cause the mirror to swing around the Y-axis as a center axis at a second target swing angle and a first target frequency into the first driving coil. A second current signal oscillating at two target frequencies is input into the second driving coil. The data acquisition method is a data acquisition method used in an optical scanning system, in which a calculation unit pre-acquires data for generating a first current signal and a second current signal. The data acquisition method comprises: a process of fixing the position of the mirror device relative to the magnet; and a process of acquiring first data and second data while the position of the mirror device relative to the magnet is fixed, wherein the first data is used to correct a change in the swing angle of the mirror relative to a change in the frequency of the current signal input into each of the first driving coil and the second driving coil, and the second data is used to correct at least one of a deviation of the mirror oscillating about the first axis from the Y axis and a deviation of the mirror oscillating about the second axis from the X axis.

[0022] In this data acquisition method, the first data and the second data are acquired in a state where the position of the mirror device relative to the magnet is fixed. Therefore, the first data and the second data that are inconsistent for each cell can be acquired with high accuracy.

[0023] The data acquisition method of one aspect of the present disclosure may also include: a step of acquiring third data for correcting the change in the swing angle of the reflector relative to the change in the use temperature of the reflector device and the magnet, while the position of the reflector device relative to the magnet is fixed. Thus, the third data can be acquired with high precision. In addition, as described above, the change in the swing angle of the reflector relative to the change in the use temperature of the reflector device and the magnet is mainly caused by the temperature characteristics of the magnet, and therefore, the third data acquired with high precision can be used in other optical scanning devices, other optical scanning systems, etc.

[0024] Effects of the Invention

[0025] According to the present disclosure, a method for manufacturing an optical scanning system, a method for manufacturing an optical scanning device, and a data acquisition method can be provided, which can realize high-precision operation by swinging a reflective mirror in a linear mode with each of a first axis and a second axis as a center axis. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 This is a structural diagram of an optical scanning system according to one embodiment.

[0027] Figure 2 : is a graph showing the relationship between the frequency of the current signal and the standard value of the swing angle of the reflection mirror.

[0028] Figure 3 The diagram shows the deviation of the reflecting mirror from the Y axis when the reflecting mirror oscillates about the first axis as the center axis and the deviation of the reflecting mirror from the X axis when the reflecting mirror oscillates about the second axis as the center axis.

[0029] Figure 4 It is a graph showing the relationship between the operating temperature and the swing angle of the reflecting mirror.

[0030] Figure 5 is Figure 1 FIG. 1 is a flow chart of a method for generating a first current signal and a second current signal implemented in the optical scanning system.

[0031] Figure 6 is a graph showing the verification results of the embodiment.

[0032] Figure 7 is a graph showing the verification results of the embodiment.

[0033] Figure 8 is a graph showing the verification results of the comparative example.

[0034] Fig. 9 is a graph showing the verification results of the comparative example.

[0035] Fig.10 yes Figure 1 A flow chart of a method for manufacturing an optical scanning system is shown.

[0036] Fig.11 yes Figure 1 A cross-sectional view and a top view of a portion of the optical scanning device are shown. DETAILED DESCRIPTION

[0037] Hereinafter, the embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. In addition, the same reference numerals are given to the same or corresponding parts in each figure, and the repeated parts are omitted.

[0038] [Structure of optical scanning system]

[0039] Figure 1 The optical scanning system 100 shown is a system used, for example, in a 3D printer, an optical coherence tomography scanner, a laser scanning microscope, etc. Figure 1 As shown, the optical scanning system 100 includes an optical scanning device 1 , a computer device 10 , and a light source 20 .

[0040] The computer device 10 is, for example, a PC (Personal Computer), and has: an operation device (operation unit) 11, a storage device (storage unit) 12, and an input receiving unit 13. The operation device 11 is composed of, for example, a CPU (Central Processing Unit) or the like. The storage device 12 is composed of, for example, an HD (Hard Disk) or the like. The input receiving unit 13 is composed of, for example, a keyboard, a mouse, a GUI (Graphical User Interface) or the like. The light source 20 is composed of, for example, an LD (Laser Diode), an LED (Light Emission Diode) or the like. The optical scanning device 1 can be electrically connected to the computer device 10. The optical scanning device 1 can scan the laser L emitted from the light source 20 in each direction parallel to the X-axis and in the direction parallel to the Y-axis intersecting the X-axis. In addition, in the present embodiment, the X-axis and the Y-axis are orthogonal.

[0041] [Structure of optical scanning device]

[0042] The optical scanning device 1 includes a mirror device 2 , a magnet 3 , a temperature sensor 4 , a calculation device (calculation unit) 5 , and a storage device (storage unit) 6 .

[0043] The reflector device 2 is, for example, a device formed by MEMS (Micro Electro Mechanical Systems) technology using an SOI (Silicon on Insulator) substrate. The reflector device 2 includes a first movable portion 21, a second movable portion 22, and a support portion 23. A reflector 24 and a first drive coil 25 are provided on the first movable portion 21. A second drive coil 26 is provided on the second movable portion 22.

[0044] The second movable portion 22 supports the first movable portion 21 in such a manner that the reflector 24 can swing around the first axis A1 along the X-axis as the center axis. In the present embodiment, the second movable portion 22 is formed in a frame shape in such a manner as to surround the first movable portion 21, and is connected to the first movable portion 21 via a pair of torsion bars 27 arranged on the first axis A1. The support portion 23 supports the second movable portion 22 in such a manner that the reflector 24 can swing around the second axis A2 along the Y-axis as the center axis. In the present embodiment, the support portion 23 is formed in a frame shape in such a manner as to surround the second movable portion 22, and is connected to the second movable portion 22 via a pair of torsion bars 28 arranged on the second axis A2.

[0045] The reflector 24 reflects the laser light L emitted from the light source 20. The reflector 24 is, for example, a metal film formed on the surface of the first movable portion 21. The first drive coil 25 is, for example, a metal wiring embedded in the first movable portion 21, and extends in a spiral shape along the outer edge of the first movable portion 21. The second drive coil 26 is, for example, a metal wiring embedded in the second movable portion 22, and extends in a spiral shape along the outer edge of the second movable portion 22.

[0046] The magnet 3 generates a magnetic field that acts on the first drive coil 25 and the second drive coil 26. Fig.11 As shown in (a) and (b), the magnet 3 is formed by arranging a plurality of magnet members 3a in a Halbach array, and the magnet 3 is held by, for example, a packet-shaped holding member 31, thereby forming a magnet unit 30. In addition, for example, the reflector device 2 is fixed to the magnet unit 30 via a base 32 formed of ceramics, thereby forming a device structure S. Specifically, the base 32 is fixed to the holding member 31 by, for example, bonding, so as to block the opening 31a formed in the holding member 31, and the reflector device 2 is fixed to the base 32 by, for example, bonding. In the device structure S, the direction of the magnetic field B generated by the magnet 3 forms an angle of 45° with respect to each of the X-axis and the Y-axis. In addition, in Fig.11 In the device structures S shown in (a) and (b), the mirror device 2 and the magnet 3 are fixed indirectly (via the holding member 31 and the base 32), but the mirror device 2 may be directly fixed to the magnet 3.

[0047] The temperature sensor 4 measures the operating temperature of the reflector device 2 and the magnet 3 (including data corresponding to the operating temperature). The operating temperature of the reflector device 2 and the magnet 3 (hereinafter referred to as "operating temperature") is the temperature of the area where the reflector device 2 and the magnet 3 are arranged in the optical scanning device 1, the temperature of the component connected to the magnet 3, the temperature of the magnet 3, etc., and is their temperature when the optical scanning device 1 is in operation. In this embodiment, the temperature sensor 4 is a resistor (wiring) provided on the support portion 23 of the reflector device 2. As an example, the resistor is configured as a coil and extends in a spiral shape along the outer edge of the support portion 23. The resistor is composed of a material whose resistance value changes according to temperature (for example, a metal material such as tungsten, aluminum, gold, silver, copper or aluminum alloy). In the optical scanning device 1, the storage device 6 stores the relationship between the temperature and the resistance value of the temperature sensor 4, and the computing device 5 obtains the operating temperature based on the relationship and the resistance value of the temperature sensor 4. That is, in this case, the resistance value of the temperature sensor 4 is data corresponding to the operating temperature.

[0048] The computing device 5 is composed of, for example, an FPGA (field-programmable gate array) or the like. The computing device 5 inputs the first current signal to the first driving coil 25, for example, via a constant current circuit (not shown in the figure). The computing device 5 inputs the second current signal to the second driving coil 26, for example, via a constant current circuit (not shown in the figure). The computing device 5 obtains the operating temperature (a signal indicating the operating temperature) from the temperature sensor 4, for example, via an amplifier (not shown in the figure). The storage device 6 is, for example, a non-volatile memory such as an EEPROM (Electrically Erasable Programmable Read-Only Memory). The storage device 6 stores various data.

[0049] The first current signal input to the first driving coil 25 is a current signal for causing the reflector 24 to swing at a first target swing angle and a first target frequency in a linear mode with the X-axis as the center axis. The second current signal input to the second driving coil 26 is a current signal for causing the reflector 24 to swing at a second target swing angle and a second target frequency in a linear mode with the Y-axis as the center axis. In this embodiment, the first target frequency is lower than the resonance frequency of the reflector 24 swinging around the first axis A1 as the center axis, and the second target frequency is lower than the resonance frequency of the reflector 24 swinging around the second axis A2 as the center axis.

[0050] When the first current signal is input to the first driving coil 25, a Lorentz force is applied to the first driving coil 25 by interaction with the magnetic field generated by the magnet 3. By utilizing the balance between the Lorentz force and the elastic force of the pair of torsion bars 27, the reflector 24 can be swung in a linear mode with the X-axis as the center axis. When the second current signal is input to the second driving coil 26, a Lorentz force is applied to the second driving coil 26 by interaction with the magnetic field generated by the magnet 3. By utilizing the balance between the Lorentz force and the elastic force of the pair of torsion bars 28, the reflector 24 can be swung in a linear mode with the Y-axis as the center axis.

[0051] [Method of Generating First Current Signal and Second Current Signal]

[0052] First, refer to Figure 2 , Figure 3 and Figure 4 , for a device structure S having a reflector device 2 and a magnet 3 (refer to Figure 1 and Fig.11 In this embodiment, the reflector device 2 is fixed to the magnet unit 30 (see FIG. 1 ) including the magnet 3 by, for example, bonding. Fig.11 ), thereby assembling the device structure S.

[0053] Figure 2(a) and (b) are graphs showing the relationship between the frequency of the current signal and the standard value of the swing angle of the reflector 24. Figure 2 In (a) and (b), the solid line shows the relationship between the frequency of the current signal input to the first drive coil 25 and the standard value of the swing angle of the reflector 24 swinging around the first axis A1 as the center axis, and the dotted line shows the relationship between the frequency of the current signal input to the second drive coil 26 and the standard value of the swing angle of the reflector 24 swinging around the second axis A2 as the center axis. Figure 2 In (b), Figure 2 In (a), a portion of the current signal having a frequency of 100 Hz or less is shown enlarged.

[0054] The standard value of the swing angle of the reflector 24 here is a value standardized by setting the swing angle of the reflector 24 to 1 when the frequency of the current signal is a reference frequency (for example, 0 Hz) while setting the amplitude of the current signal to a constant and changing the frequency of the current signal. The resonance frequency of the reflector 24 swinging around the first axis A1 is about 1000 Hz, and the resonance frequency of the reflector 24 swinging around the second axis A2 is about 470 Hz. Therefore, when the frequency of the current signal is below 100 Hz, the reflector 24 swings in a linear mode (that is, the swing angle of the reflector 24 is proportional to the amplitude of the current signal). Ideally, the standard value of the swing angle of the reflector 24 should be 1. However, if Figure 2 As shown in (b), in reality, the standard value of the swing angle of the reflector 24 is not 1. For example, when the optical scanning system 100 is applied to a 3D printer, an optical coherence tomography scanner, a laser scanning microscope, etc., it is necessary to suppress the error with respect to the target swing angle to, for example, less than ±0.1°. In this case, it is necessary to correct the change in the standard value of the swing angle of the reflector 24 with respect to the change in the frequency of the current signal.

[0055] Figure 3 1 is a diagram showing the deviation of the reflective mirror 24 from the Y axis when the reflective mirror 24 oscillates around the first axis A1 as the center axis and the deviation of the reflective mirror 24 from the X axis when the reflective mirror 24 oscillates around the second axis A2 as the center axis. Figure 3 In FIG. 1 , the solid line shows the deviation of the reflecting mirror 24 from the Y axis when the reflecting mirror 24 oscillates about the first axis A1 as the center axis, and the dotted line shows the deviation of the reflecting mirror 24 from the X axis when the reflecting mirror 24 oscillates about the second axis A2 as the center axis.

[0056] When a current signal is not input to the second drive coil 26 but a current signal is input to the first drive coil 25, and the laser L is incident on the reflector 24 in a direction perpendicular to the X-axis and the Y-axis, the scanning direction of the laser L reflected by the reflector 24 sometimes deviates from the Y-axis. The deviation of the scanning direction of the laser L from the Y-axis in this case is equivalent to the deviation of the reflector 24 swinging around the first axis A1 from the Y-axis. When a current signal is not input to the first drive coil 25 but a current signal is input to the second drive coil 26, and the laser L is incident on the reflector 24 in a direction perpendicular to the X-axis and the Y-axis, the scanning direction of the laser L reflected by the reflector 24 sometimes deviates from the X-axis. The deviation of the scanning direction of the laser L from the X-axis in this case is equivalent to the deviation of the reflector 24 swinging around the second axis A2 from the X-axis. In addition, the deviation of the reflecting mirror 24 swinging around the first axis A1 as the center axis from the Y axis is equivalent to the deviation of the scanning direction of the laser L scanned by the reflecting mirror 24 swinging around the first axis A1 as the center axis from the Y axis, and the deviation of the reflecting mirror 24 swinging around the second axis A2 as the center axis from the X axis is equivalent to the deviation of the scanning direction of the laser L scanned by the reflecting mirror 24 swinging around the second axis A2 as the center axis from the X axis.

[0057] In the device structure S, it is ideal that the direction of the magnetic field generated by the magnet 3 forms an angle of 45° with respect to each of the X-axis and the Y-axis. Figure 3 As shown, when the device structure S is configured in a manner to eliminate the deviation of the reflector 24 swinging around the second axis A2 as the center axis from the X axis, a deviation θ of the reflector 24 swinging around the first axis A1 as the center axis from the Y axis is generated. This deviation θ is inconsistent due to the misalignment when the reflector device 2 is fixed to the magnet unit 30 including the magnet 3. For example, when the light scanning system 100 is applied to a 3D printer, an optical coherence tomography scanner, a laser scanning microscope, etc., it is necessary to suppress the error relative to the target swing angle to, for example, less than ±0.1°. In this case, it is necessary to correct the deviation θ of the reflector 24 swinging around the first axis A1 as the center axis from the Y axis.

[0058] Figure 4 Graph 2 is a graph showing the relationship between the operating temperature and the swing angle of the reflective mirror 24 swinging around the first axis A1 as the center axis. Figure 4 As shown in FIG. 1 , when the operating temperature is 25°C, even if a current value that causes the swing angle of the reflector 24 to be 10° is input to the first driving coil 25, when the operating temperature changes, the swing angle of the reflector 24 also changes. That is, the swing angle of the reflector 24 swinging around the first axis A1 as the center axis changes according to the change in the operating temperature. Similarly, the swing angle of the reflector 24 swinging around the second axis A2 as the center axis also changes according to the change in the operating temperature.

[0059] For example, when the optical scanning system 100 is applied to a 3D printer, an optical coherence tomography scanner, a laser scanning microscope, etc., it is necessary to suppress the error relative to the target swing angle to, for example, less than ±0.1°. In this case, it is necessary to correct the change in the swing angle of the reflector 24 relative to the change in the use temperature. In addition, the change in the swing angle of the reflector 24 relative to the change in the use temperature is mainly due to the change in the magnetic field generated by the magnet 3 according to the change in the use temperature. The resonant frequency of the swinging reflector 24, the Q value of the resonant frequency, etc. also affect the change in the swing angle of the reflector 24 relative to the change in the use temperature. When the degree of influence of the change in the magnetic field relative to the change in the use temperature is set to 1, the degree of these influences is, for example, about 1 / 100.

[0060] Based on the above insights into the characteristics of the device structure S, in the optical scanning system 100, the first data, the second data, and the third data are acquired in the manufacturing process of the optical scanning device 1, the first data is stored in the storage device 12 of the computer device 10, and the second data and the third data are stored in the storage device 6 of the optical scanning device 1 (details will be described later). The first data is data for correcting the change in the standard value of the swing angle of the reflector 24 relative to the change in the frequency of the current signal. The second data is data for correcting the deviation θ of the reflector 24 swinging around the first axis A1 as the center axis from the Y axis. The third data is data for correcting the change in the swing angle of the reflector 24 relative to the change in the use temperature. In addition, the first data can also be called data for correcting the "resonance frequency component of induced excitation (ringing)" contained in the first target swing angle of the reflector 24 swinging around the X axis as the center axis and the second target swing angle of the reflector 24 swinging around the Y axis as the center axis. The first data may also be referred to as data for correcting “swing angle-frequency characteristics” indicating the relationship between the swing angle and the frequency of the reflecting mirror 24 that swings around the first axis A1 and the second axis A2 as center axes.

[0061] Below, refer to Figure 5 , a method for generating the first current signal and the second current signal implemented in the optical scanning system 100 is described. In addition, the first current signal is a current signal input to the first driving coil 25, that is, a current signal for swinging the reflector 24 around the X-axis as the center axis at the first target swing angle and the first target frequency in the linear mode. In addition, the second current signal is a current signal input to the second driving coil 26, that is, a current signal for swinging the reflector 24 around the Y-axis as the center axis at the second target swing angle and the second target frequency in the linear mode.

[0062] First, the user inputs a first target swing angle and a first target frequency, and a second target swing angle and a second target frequency using the input receiving unit 13 of the computer device 10. That is, the input receiving unit 13 receives the input of the first target swing angle and the first target frequency, and the second target swing angle and the second target frequency (S01).

[0063] Next, the computing device 11 of the computer device 10 computes the standard value of the first torque and the standard value of the second torque (data based on the first target swing angle and the first target frequency, the second target swing angle and the second target frequency, and the first data) based on the first target swing angle and the first target frequency, the second target swing angle and the second target frequency, and the first data (data for correcting the change in the standard value of the swing angle of the reflector 24 relative to the change in the frequency of the current signal), and generates the standard value of the first torque and the standard value of the second torque (S02). At this time, the computing device 11 obtains the first target swing angle and the first target frequency, and the second target swing angle and the second target frequency from the input receiving unit 13, and obtains the first data from the storage device 12.

[0064] The standard value of the first torque is equivalent to the torque generated in the pair of torsion bars 27 when the current signal is input to the first drive coil 25 instead of the second drive coil 26, and is calculated according to formula (1). The standard value of the second torque is equivalent to the torque generated in the pair of torsion bars 28 when the current signal is input to the second drive coil 26 instead of the first drive coil 25, and is calculated according to formula (2).

[0065] [Mathematical formula 1]

[0066]

[0067] [Mathematical formula 2]

[0068]

[0069] In formula (1), T′ 1X : Standard value of the first torque, θ 1X : The first target swing angle. In formula (2), T′ 2Y : Standard value of the second torque, θ 2Y : The second target swing angle. In addition, "(t)" represents the function of time, and "(f)" represents the function of frequency. In addition, "F" represents the implementation of Fourier transform, "F －1 ” indicates the implementation of inverse Fourier transform.

[0070] Therefore, in formula (1), θ 1X (t) corresponds to a signal determined by the first target swing angle and the first target frequency, M′1X (f) corresponds to "the change in the standard value of the swing angle of the reflector 24 relative to the change in the frequency of the current signal input to the first drive coil 25" (i.e., the first data) when the current signal is input to the first drive coil 25 instead of the second drive coil 26. In addition, in formula (2), θ 2Y (t) corresponds to a signal determined by the second target swing angle and the second target frequency, M′ 2Y (f) is equivalent to "the change in the standard value of the swing angle of the reflector 24 relative to the change in the frequency of the current signal input to the second driving coil 26" (i.e., the first data) when the current signal is input to the second driving coil 26 instead of the first driving coil 25.

[0071] Next, the computing device 5 of the optical scanning device 1 computes the first current signal and the second current signal based on the standard value of the first torque and the standard value of the second torque, the use temperature, the second data (data for correcting the deviation θ of the reflector 24 that oscillates around the first axis A1 as the center axis from the Y axis) and the third data (data for correcting the change in the swing angle of the reflector 24 with respect to the change in the use temperature), and generates the first current signal and the second current signal (S03). At this time, the computing device 5 obtains the standard value of the first torque and the standard value of the second torque from the computing device 11 of the computer device 10, obtains the use temperature from the temperature sensor 4, and obtains the second data and the third data from the storage device 6.

[0072] As an example, when focusing on the first movable part 21, the first driving coil 25, and a pair of torsion bars 27, the relationship of equation (3) holds true in the current signal input to the first driving coil 25, the torque generated in the pair of torsion bars 27, and the magnetic field acting on the first driving coil 25.

[0073] [Mathematical formula 3]

[0074]

[0075] In formula (3), I: current signal, T: torque, L: distance between a pair of torsion bars 27 and the first drive coil 25 in a direction parallel to the Y axis, B: magnetic field, B′: standard value of the magnetic field, θ: swing angle. In formula (3), M(f) is equivalent to the change in the swing angle of the reflector 24 relative to the change in the frequency of the current signal input to the first drive coil 25, and M′(f) is equivalent to the change in the standard value of the swing angle of the reflector 24 relative to the change in the frequency of the current signal input to the first drive coil 25. In addition, "(θ(t))" is expressed as a function of the swing angle of the reflector 24.

[0076] Based on the relationship of formula (3), the first current signal is calculated according to formula (4). Based on the relationship of formula (3), the second current signal is calculated according to formula (5).

[0077] [Formula 4]

[0078]

[0079] [Mathematical formula 5]

[0080]

[0081] In formula (4) and formula (5), I 1 : The first current signal, I 2 : second current signal, ΔT: difference between operating temperature and reference temperature (e.g., 25°C) (hereinafter referred to as "temperature difference"). In addition, "(t, ΔT)" is expressed as a function of time and temperature difference, and "(ΔT)" is expressed as a function of temperature difference. In addition, "(θ 1X (t))" is expressed as a function of a signal determined by the first target swing angle and the first target frequency, "(θ 2Y (t))" is expressed as a function of a signal determined by the second target swing angle and the second target frequency.

[0082] In formula (4) and formula (5), B′ 1Y (θ 1X (t)) is the "standard value of the component of the magnetic field acting on the first driving coil 25 along the Y axis" (equivalent to the second data) when the current signal is input to the first driving coil 25 without inputting the current signal to the second driving coil 26. For example, the cubic polynomial (a) of formula (6) 1 、a 2 、a 3 : constant). In formula (5), B′ 2X (θ 2Y (t)) is the "standard value of the component of the magnetic field acting on the second driving coil 26 along the X-axis" (equivalent to the second data) when the current signal is input to the second driving coil 26 instead of the first driving coil 25. For example, the cubic polynomial (b) of formula (7) 1 , b 2 , b 3 : constant). In formula (5), B′ 1X (θ 2Y (t)) is the "standard value of the component of the magnetic field acting on the first driving coil 25 along the X-axis" (equivalent to the second data) when the current signal is input to the first driving coil 25 instead of the second driving coil 26. For example, the cubic polynomial (c 1、c 2 、c 3 : Constant) represents.

[0083] [Mathematical formula 6]

[0084]

[0085] [Formula 7]

[0086]

[0087] [Mathematical formula 8]

[0088]

[0089] In formula (4) and formula (5), G 1X (ΔT) is a coefficient (corresponding to the third data) for correcting the temperature characteristic of the "standard value of the swing angle of the reflector 24 swinging around the X-axis as the center axis" when the current signal is not input to the second drive coil 26 but to the first drive coil 25. For example, the quadratic polynomial (d 1 d 2 : constant). In formula (5), G 2Y (ΔT) is a coefficient (corresponding to the third data) for correcting the temperature characteristic of the "standard value of the swing angle of the reflector 24 swinging around the Y axis" when the current signal is not input to the first drive coil 25 but to the second drive coil 26, for example, the quadratic polynomial (e) of formula (10) is 1 、e 2 : constant). In formula (5), G 1Y (ΔT) is a coefficient (corresponding to the third data) for correcting the temperature characteristic of the "standard value of the swing angle of the reflector 24 swinging around the Y axis" when the current signal is not input to the second drive coil 26 but to the first drive coil 25. For example, the quadratic polynomial (g 1 , g 2 : Constant) represents.

[0090] [Mathematical formula 9]

[0091] G 1X (ΔT) = d 2 ΔT 2 +d 1 ΔT+1…(9)

[0092] [Formula 10]

[0093] G 2Y (ΔT) = e 2 ΔT2 +e 1 ΔT+1…(10)

[0094] [Mathematical formula 11]

[0095] G 1Y (ΔT) = g 2 ΔT 2 +g 1 ΔT+1…(11)

[0096] [Functions and effects of optical scanning system and optical scanning device]

[0097] The present inventors have found that, when the reflector 24 is oscillated in a linear mode with each of the first axis A1 and the second axis A2 as the center axis, the change in the standard value of the oscillation angle of the reflector 24 with respect to the change in the frequency of the current signal input to each of the first drive coil 25 and the second drive coil 26 is not consistent for each individual (i.e., for each combination of the reflector device 2 and the magnet 3); the deviation of the reflector 24 from the Y axis when oscillating with the first axis A1 as the center axis and the deviation of the reflector 24 from the X axis when oscillating with the second axis A2 as the center axis are not consistent for each individual; and the change in the oscillation angle of the reflector 24 with respect to the change in the use temperature is mainly caused by the temperature characteristics of the magnet 3. Therefore, by configuring the optical scanning system 100 as described above and generating the first current signal and the second current signal as described above, the reflector 24 can be oscillated with the X axis as the center axis at the first target oscillation angle and the first target frequency, and the reflector 24 can be oscillated with the Y axis as the center axis at the second target oscillation angle and the second target frequency. Therefore, according to the optical scanning system 100 , when the reflection mirror 24 is swung in a linear mode with each of the first axis A1 and the second axis A2 as a central axis, a high-precision operation can be achieved.

[0098] In addition, in the optical scanning system 100, the storage device 12 of the computer device 10 stores the first data, and the computing device 11 of the computer device 10 obtains the first data from the storage device 12. In addition, the storage device 6 of the optical scanning device 1 stores the second data and the third data, and the computing device 5 of the optical scanning device 1 obtains the second data and the third data from the storage device 6. This can simplify the system structure.

[0099] In addition, in the optical scanning system 100, the input receiving unit 13 of the computer device 10 receives inputs of the first target oscillation angle and the first target frequency, and the second target oscillation angle and the second target frequency, and the computing device 11 of the computer device 10 obtains the first target oscillation angle and the first target frequency, and the second target oscillation angle and the second target frequency from the input receiving unit 13. Thus, the user can easily set the first target oscillation angle and the first target frequency, and the second target oscillation angle and the second target frequency.

[0100] In addition, in the optical scanning system 100, the second data is data for correcting the deviation of the reflective mirror 24 swinging around the first axis A1 as the center axis from the Y axis when the second axis A2 is regarded as the Y axis, and the computing device 5 of the optical scanning device 1 generates the second current signal in a manner that corrects the deviation of the reflective mirror 24 swinging around the first axis A1 as the center axis from the Y axis. As a result, the processing load of the computing device 5 when generating the first current signal and the second current signal can be reduced.

[0101] Furthermore, according to the optical scanning device 1 , for the same reason as described above, when the reflection mirror 24 is swung in a linear mode with each of the first axis A1 and the second axis A2 as a center axis, a high-precision operation can be achieved.

[0102] In addition, in the optical scanning device 1, the temperature sensor 4 measures the operating temperature, and the calculation device 5 acquires the operating temperature from the temperature sensor 4. Thus, an appropriate operating temperature can be acquired.

[0103] Here, refer to Figure 6 and Figure 7 The following describes the embodiments. Figure 6 (a) shows the target action waveform of the reflector 24 that oscillates around the Y axis. Figure 7 (a) shows the target action waveform of the reflector 24 that swings around the X-axis as the center axis. Any target action waveform is determined by the target swing angle (±10°) and the target frequency (40Hz) input by the user. In these cases, when the first current signal is generated using equation (4) and the first current signal is input to the first drive coil 25, and the second current signal is generated using equation (5) and the second current signal is input to the second drive coil 26, the actual action waveform of the reflector 24 that swings around the Y-axis as the center axis is as follows: Figure 6 As shown in (b), the actual action waveform of the reflector 24 that oscillates with the X axis as the center axis is as follows: Figure 7 For any actual action waveform, such as Figure 6 (c) and Figure 7As shown in (c), the errors with respect to the target action waveform (the errors with respect to the target swing angle) are all suppressed to less than ±0.05° (excluding the rising period (1 ms) and the falling period (1 ms) in each action waveform).

[0104] Next, refer to Figure 8 and Fig. 9 , a comparative example is described. Figure 8 (a) shows the target action waveform of the reflector 24 that oscillates around the Y axis. Fig. 9 (a) shows the target motion waveform of the reflector 24 swinging around the X axis. Any target motion waveform is determined by the target swing angle (±10°) and target frequency (40 Hz) input by the user, which is consistent with the target motion waveform in FIG. Figure 6 (a) and Figure 7 In these cases, when the current signal is generated without using the first data, the second data, and the third data and the current signal is input to each of the first drive coil 25 and the second drive coil 26, the actual action waveform of the reflector 24 that swings around the Y axis is as follows: Figure 8 As shown in (b), the actual action waveform of the reflector 24 that oscillates with the X axis as the center axis is as follows: Fig. 9 For any actual action waveform, Figure 8 (c) and Fig. 9 As shown in (c), the error with respect to the target action waveform (the error with respect to the target swing angle) greatly exceeds ±0.1° (excluding the rising period (1 ms) and the falling period (1 ms) in each action waveform).

[0105] The above embodiments and comparative examples have proven the effectiveness of the optical scanning system 100. In the optical scanning system 100, the user only needs to input data related to the target action waveform to obtain an actual action waveform with an error of less than ±0.1° relative to the target action waveform. Therefore, the optical scanning system 100 is very convenient for the user.

[0106] [Method of manufacturing optical scanning system, etc.]

[0107] Reference Fig.10, a manufacturing method of the optical scanning system 100 is described. First, a process (S11) of assembling a plurality of device structures S each having a reflector device 2 and a magnet 3 is implemented. In the present embodiment, the reflector device 2 is fixed to the magnet unit 30 including the magnet 3 by, for example, bonding, thereby assembling the plurality of device structures S. That is, here, a process of fixing the position of the reflector device 2 relative to the magnet 3 is implemented. In the present embodiment, the position of the reflector device 2 relative to the magnet 3 is irreversibly fixed (that is, in a manner that makes it impossible to remove the reflector device 2 from the magnet unit 30 including the magnet 3, or to adjust the installation state of the reflector device 2 relative to the magnet unit 30 including the magnet 3). In addition, each of the plurality of device structures S, if it has at least a reflector device 2 and a magnet 3, may have at least one of the temperature sensor 4, the computing device 5, and the storage device 6, or may not have at least one of the temperature sensor 4, the computing device 5, and the storage device 6.

[0108] Next, a process (S12) of acquiring first data (data for correcting the change in the standard value of the swing angle of the reflector 24 with respect to the change in the frequency of the current signal) and second data (data for correcting the deviation θ of the reflector 24 swinging around the first axis A1 from the Y axis) is performed for each of the plurality of device structures S. That is, here, the process of acquiring the first data and the second data is performed in a state where the position of the reflector device 2 relative to the magnet 3 is fixed. The first data and the second data are acquired by actually operating the reflector device 2 in each of the plurality of device structures S in a state where the position of the reflector device 2 relative to the magnet 3 is fixed.

[0109] Next, a process (S13) of acquiring third data (data for correcting the change in the swing angle of the reflector 24 with respect to the change in the use temperature) is performed for a representative device structure S among the plurality of device structures S. That is, here, the process of acquiring the third data is performed in a state where the position of the reflector device 2 relative to the magnet 3 is fixed. The third data is acquired by actually operating the reflector device 2 in a state where the position of the reflector device 2 relative to the magnet 3 is fixed in the representative device structure S. In addition, the process of S12 and the process of S13 may be performed either first or simultaneously.

[0110] Next, a process of storing the first data, the second data, and the third data is performed (S14). Specifically, the first data acquired for each of the plurality of device structures S is stored in the storage device 12 of the computer device 10 that constitutes the optical scanning system 100 together with each of the plurality of device structures S, while maintaining the correspondence between each of the plurality of device structures S and the first data. The second data acquired for each of the plurality of device structures S is stored in the storage device 6 of the optical scanning device 1 that constitutes the optical scanning system 100 together with each of the plurality of device structures S, while maintaining the correspondence between each of the plurality of device structures S and the second data. The third data acquired for the representative device structure S is stored in the storage device 6 of the optical scanning device 1 that constitutes the optical scanning system 100 together with each of the plurality of device structures S.

[0111] Next, a process (S15) of configuring the operation device 11 of the computer device 10 and the operation device 5 of the optical scanning device 1 is implemented. Specifically, the operation device 11 of the computer device 10 is configured in a manner to generate a standard value of the first torque and a standard value of the second torque based on the first target swing angle and the first target frequency, the second target swing angle and the second target frequency, and the first data. The operation device 5 of the optical scanning device 1 is configured in a manner to obtain the standard value of the first torque and the standard value of the second torque, and to generate a first current signal and a second current signal based on the standard value of the first torque and the standard value of the second torque, the operating temperature, and the second data and the third data. In addition, the process of S15 is a programmed process, and therefore, it can also be implemented at any timing, and the configuration of the operation device 11 of the computer device 10 and the configuration of the operation device 5 of the optical scanning device 1 can also be implemented at different timings.

[0112] Through the above, a plurality of optical scanning systems 100 are manufactured. In addition, the above method of manufacturing the optical scanning system 100 includes a method of manufacturing the optical scanning device 1 and a data acquisition method for acquiring the first data, the second data, and the third data in advance.

[0113] In this embodiment, the manufacturing method of the optical scanning device 1 includes: a process of assembling a plurality of device structures S; a process of acquiring first data and second data for each of the plurality of device structures S; a process of acquiring third data for a representative device structure S among the plurality of device structures S; a process of storing the second data acquired for each of the plurality of device structures S in a storage device 6 that constitutes the optical scanning device 1 together with each of the plurality of device structures S while maintaining a correspondence between each of the plurality of device structures S and the second data, and storing the third data acquired for the representative device structure S in the storage device 6 that constitutes the optical scanning device 1 together with each of the plurality of device structures S; and a process of forming a computing device 5 by acquiring a standard value of a first torque and a standard value of a second torque, and generating a first current signal and a second current signal based on the standard value of the first torque and the standard value of the second torque, a usage temperature, and the second data and the third data.

[0114] In addition, in this embodiment, the data acquisition method also includes: a process of fixing the position of the mirror device 2 relative to the magnet 3; a process of acquiring first data and second data while the position of the mirror device 2 relative to the magnet 3 is fixed; and a process of acquiring third data while the position of the mirror device 2 relative to the magnet 3 is fixed.

[0115] [Operation and Effect of Method of Manufacturing Optical Scanning System, etc.]

[0116] The present inventors have found that, when the reflector 24 is swung in a linear mode with each of the first axis A1 and the second axis A2 as the center axis, the change in the standard value of the swung angle of the reflector 24 with respect to the change in the frequency of the current signal input to each of the first drive coil 25 and the second drive coil 26 is not consistent for each individual (i.e., for each combination of the reflector device 2 and the magnet 3); the deviation of the reflector 24 from the Y axis when swung with the first axis A1 as the center axis and the deviation of the reflector 24 from the X axis when swung with the second axis A2 as the center axis are not consistent for each individual; and the change in the swung angle of the reflector 24 with respect to the change in the use temperature is mainly caused by the temperature characteristics of the magnet 3. Therefore, by manufacturing the optical scanning system 100 as described above, in the manufactured optical scanning system 100, the reflector 24 can be swung with the X axis as the center axis at the first target swung angle and the first target frequency, and the reflector 24 can be swung with the Y axis as the center axis at the second target swung angle and the second target frequency. In addition, third data for correcting the change in the swing angle of the reflector 24 with respect to the change in the use temperature is obtained for a representative device structure S among the plurality of device structures S, and the third data obtained for the representative device structure S is stored in the storage device 6 that constitutes the optical scanning device 1 together with each of the plurality of device structures S. As described above, the change in the swing angle of the reflector 24 with respect to the change in the use temperature is mainly caused by the temperature characteristics of the magnet 3 (the magnetic field generated by the magnet 3 changes according to the change in the use temperature). As described above, according to the manufacturing method of the optical scanning system 100, it is possible to manufacture an optical scanning system 100 that can achieve high-precision operation when the reflector 24 is swung in a linear mode with each of the first axis A1 and the second axis A2 as the center axis.

[0117] In addition, in the manufacturing method of the optical scanning system 100, the computing device 11 of the computer device 10 is configured to generate the standard value of the first torque and the standard value of the second torque based on the first target swing angle and the first target frequency, the second target swing angle and the second target frequency, and the first data. In addition, the computing device 5 of the optical scanning device 1 is configured to obtain the standard value of the first torque and the standard value of the second torque, and to generate the first current signal and the second current signal based on the standard value of the first torque and the standard value of the second torque, the operating temperature, and the second data and the third data. Through these, it is possible to easily obtain accurate first current signals and second current signals in the manufactured optical scanning system 100.

[0118] In addition, according to the manufacturing method of the optical scanning device 1, for the same reasons as described above, it is possible to manufacture the optical scanning device 1 that can achieve high-precision operation when the reflection mirror 24 is swung in a linear mode with each of the first axis A1 and the second axis A2 as the center axis.

[0119] In addition, in the data acquisition method, the first data and the second data are acquired in a state where the position of the mirror device 2 relative to the magnet 3 is fixed. Therefore, the first data and the second data that are not consistent for each individual can be acquired with high accuracy.

[0120] In addition, in the data acquisition method, the third data is acquired in a state where the position of the reflector device 2 relative to the magnet 3 is fixed. Thus, the third data can be acquired with high precision. In addition, as described above, the change in the swing angle of the reflector 24 with respect to the change in the use temperature of the reflector device 2 and the magnet 3 is mainly caused by the temperature characteristics of the magnet 3. Therefore, the third data acquired with high precision can be used in other optical scanning devices 1, other optical scanning systems 100, etc.

[0121] In particular, the first data, the second data, and the third data are acquired while the position of the reflector device 2 relative to the magnet 3 is irreversibly fixed. Therefore, even after the optical scanning device 1 leaves the factory, the characteristics of the optical scanning device 1 do not change. As a result, high-precision control can be implemented in the optical scanning device 1.

[0122] [Modifications]

[0123] The present disclosure is not limited to the above-mentioned embodiments. For example, in the above-mentioned embodiments, the second data is data for correcting the deviation of the reflector 24 swinging around the first axis A1 as the center axis from the Y axis when the second axis A2 is regarded as the Y axis, and the second current signal is generated in a manner to correct the deviation of the reflector 24 swinging around the first axis A1 as the center axis from the Y axis. However, the second data may also be data for correcting the deviation of the reflector 24 swinging around the second axis A2 as the center axis from the X axis when the first axis A1 is regarded as the X axis, in which case the first current signal may also be generated in a manner to correct the deviation of the reflector 24 swinging around the second axis A2 as the center axis from the X axis. Thus, the second data only needs to be data for correcting at least one of the deviation of the reflector 24 swinging around the first axis A1 as the center axis from the Y axis and the deviation of the reflector 24 swinging around the second axis A2 as the center axis from the X axis.

[0124] In addition, as described above, the change in the swing angle of the reflector 24 with respect to the change in the use temperature is mainly due to the change in the magnetic field generated by the magnet 3 according to the change in the use temperature. Therefore, as the third data for correcting the change in the swing angle of the reflector 24 with respect to the change in the use temperature, data for correcting the change in the magnetic field of the magnet 3 with respect to the change in the use temperature may be used. In addition, as the third data (data for correcting the change in the swing angle of the reflector 24 with respect to the change in the use temperature), attention may be paid to the change in the standard value of the swing angle of the reflector 24 with respect to the change in the use temperature. The standard value of the swing angle of the reflector 24 here refers to a value standardized by setting the swing angle of the reflector 24 when the use temperature is a reference temperature (for example, 25° C.) as 1 when the current value is set to be constant.

[0125] In the optical scanning system 100 of the above-described embodiment, the computing device 5 and the computing device 11 constitute a computing unit, and the storage device 6 and the storage device 12 constitute a storage unit. However, for example, the computing device 5 and the storage device 6 may not be provided in the optical scanning device 1, and only the computing device 11 of the computer device 10 may constitute a computing unit, and only the storage device 12 of the computer device 10 may constitute a storage unit.

[0126] In the optical scanning system 100 of the above-described embodiment, the first data, the second data, and the third data are stored in the storage unit composed of the storage device 6 and the storage device 12. However, at least one of the first data, the second data, and the third data may be stored in, for example, a server provided outside the optical scanning system 100. In this case, the computing unit composed of the computing device 5 and the computing device 11 may also obtain at least one of the first data, the second data, and the third data from the server.

[0127] In addition, in the optical scanning system 100 of the above-mentioned embodiment, the computing unit composed of the computing device 5 and the computing device 11 obtains the first target swing angle and the first target frequency, and the second target swing angle and the second target frequency from the input receiving unit 13 of the computer device 10. However, the computing unit composed of the computing device 5 and the computing device 11 may obtain the first target swing angle and the first target frequency, and the second target swing angle and the second target frequency from another computer device provided outside the optical scanning system 100, for example.

[0128] In addition, in the above-mentioned embodiment, the temperature sensor 4 is provided in the reflector device 2, but the temperature sensor 4 may be provided separately from the reflector device 2. In this case, for example, a thermistor, a thermocouple, etc. can be used as the temperature sensor 4. In addition, the optical scanning device 1 may not include the temperature sensor 4, and the temperature sensor for measuring the use temperature may be provided outside the optical scanning device 1. In addition, in the above-mentioned embodiment, the optical scanning system 100 includes the light source 20, but the light source 20 may be provided outside the optical scanning system 100. In addition, in the above-mentioned embodiment, the light source 20 is provided outside the optical scanning device 1, but the optical scanning device 1 may also include the light source 20.

[0129] The target drive waveform determined by the first target swing angle and the first target frequency and the target drive waveform determined by the second target swing angle and the second target frequency may have waveforms other than rectangular waves. In this case, the first current signal and the second current signal may have waveforms other than rectangular waves.

[0130] In addition, in the manufacturing method of the optical scanning system of the above-mentioned embodiment, the first data (data for correcting the change in the standard value of the swing angle of the reflector 24 relative to the change in the frequency of the current signal) is obtained by actually operating the reflector device 2, but the first data can also be obtained theoretically (through calculation) based on the resonant frequency of the reflector 24 and its Q value.

[0131] In addition, as long as the first data is data for correcting the change in the swing angle of the reflector 24 with respect to the change in the frequency of the current signal, the first data may be data for correcting the change in the "standardized swing angle of the reflector 24 (i.e., the standard value of the swing angle of the reflector 24)" with respect to the change in the frequency of the current signal as in the above-mentioned embodiment, or may be data for correcting the change in the "unstandardized swing angle of the reflector 24" with respect to the change in the frequency of the current signal. However, when the change in the standard value of the swing angle of the reflector 24 with respect to the change in the frequency of the current signal is used as in the above-mentioned embodiment, the operation in the operation device 11 can be facilitated.

[0132] In addition, as long as the third data is data for correcting the change in the swing angle of the reflector 24 with respect to the change in the use temperature, it may be data for correcting the change in the "unstandardized swing angle of the reflector 24" with respect to the change in the use temperature as in the above-mentioned embodiment, or it may be data for correcting the change in the "standardized swing angle of the reflector 24 (i.e., the standard value of the swing angle of the reflector 24)" with respect to the change in the use temperature. However, when the change in the standard value of the swing angle of the reflector 24 with respect to the change in the use temperature is used, the calculation in the calculation device 5 can be facilitated.

[0133] In addition, in the above embodiment, the third data is acquired for the representative device configuration S, but the third data may be acquired for each of the plurality of device configurations S. In this case, the second data and the third data acquired for each of the plurality of device configurations S may be stored in the storage device 6 that constitutes the optical scanning device 1 together with each of the plurality of device configurations S, while maintaining the correspondence between each of the plurality of device configurations S and the second data and the third data. As in the above embodiment, when the third data is acquired for the representative device configuration S, the process of acquiring the third data can be facilitated in the manufacturing method of the optical scanning system, the manufacturing method of the optical scanning device, and the data acquisition method, and as a result, the optical scanning system 100 and the optical scanning device 1 that can achieve high-precision operation can be efficiently manufactured. When the third data is acquired for each of the plurality of device configurations S, high-precision operation can be performed in the computing device 5, and as a result, the optical scanning system 100 and the optical scanning device 1 that can achieve higher-precision operation can be manufactured.

[0134] In addition, in the above-mentioned embodiment, the first current signal is directly input into the first driving coil 25, and the second current signal is directly input into the second driving coil 26, but the first current signal can also be input into the first driving coil 25 and the second driving coil 26 by applying a voltage to each of the first driving coil 25 and the second driving coil 26.

[0135] In addition, the optical scanning device 1 and the optical scanning system 100 are not limited to devices that scan the laser light L two-dimensionally, and may be devices that scan the laser light L one-dimensionally. For example, the optical scanning device 1 and the optical scanning system 100 may be configured in such a manner that the laser light L is scanned one-dimensionally along the Y axis by swinging the first movable portion 21 around the first axis A1 along the X axis as the center axis, and the deviation of the laser light L from the direction along the Y axis is corrected by swinging the second movable portion 22 around the second axis A2 along the Y axis as the center axis. In this case, the first current signal input to the first driving coil 25 is a current signal for swinging the reflector 24 around the X axis as the center axis at a "first target swing angle of a value greater than 0" and a "first target frequency of a value greater than 0", and the second current signal input to the second driving coil 26 is a current signal for swinging the reflector 24 around the Y axis as the center axis at a "second target swing angle of 0" and a "second target frequency of 0" (i.e., for not swinging the reflector 24 around the Y axis). In addition, the optical scanning device 1 and the optical scanning system 100 may be configured in such a manner that the laser light L is scanned one-dimensionally along the X-axis by swinging the second movable portion 22 around the second axis A2 along the Y-axis as the center axis, and the deviation of the laser light L from the direction along the X-axis is corrected by swinging the first movable portion 21 around the first axis A1 along the X-axis as the center axis. In this case, the second current signal input to the second driving coil 26 is a current signal for swinging the reflector 24 around the Y-axis as the center axis at a "second target swing angle of a value greater than 0" and a "second target frequency of a value greater than 0", and the first current signal input to the first driving coil 25 is a current signal for swinging the reflector 24 around the X-axis as the center axis at a "first target swing angle of 0" and a "first target frequency of 0" (that is, for not swinging the reflector 24 around the X-axis as the center axis). As described above, the second current signal for causing the reflector 24 to swing with the Y-axis as the center axis at the second target swing angle and the second target frequency includes: a current signal for causing the reflector 24 to swing with the Y-axis as the center axis at the "second target swing angle of 0" and the "second target frequency of 0" (i.e., for not causing the reflector 24 to swing with the Y-axis as the center axis). In addition, the first current signal for causing the reflector 24 to swing with the X-axis as the center axis at the first target swing angle and the first target frequency includes: a current signal for causing the reflector 24 to swing with the X-axis as the center axis at the "first target swing angle of 0" and the "first target frequency of 0" (i.e., for not causing the reflector 24 to swing with the X-axis as the center axis).

[0136] In addition, the first data and the second data acquired for each of the plurality of device configurations S, and the third data acquired for the representative device configuration S may also be stored in a storage unit provided for the plurality of device configurations S while maintaining the correspondence between each of the plurality of device configurations S and the first data and the second data. In addition, the first data, the second data, and the third data acquired for each of the plurality of device configurations S may also be stored in a storage unit provided for the plurality of device configurations S while maintaining the correspondence between each of the plurality of device configurations S and the first data, the second data, and the third data.

[0137] Description of Reference Numerals

[0138] 1…optical scanning device, 2…mirror device, 3…magnet, 4…temperature sensor, 5…computing device (computing unit), 6…storage device (storage unit), 11…computing device (computing unit), 12…storage device (storage unit), 21…first movable part, 22…second movable part, 23…support part, 24…mirror, 25…first driving coil, 26…second driving coil, 100…optical scanning system, A1…first axis, A2…second axis, S…device structure.

Claims

1. A method for manufacturing an optical scanning system, wherein: The optical scanning system comprises: A reflector device comprising a first movable portion provided with a reflector and a first driving coil, a second movable portion provided with a second driving coil and supporting the first movable portion in a manner that the reflector can swing around a first axis along an X-axis as a center axis, and a supporting portion supporting the second movable portion in a manner that the reflector can swing around a second axis along a Y-axis intersecting the X-axis as a center axis; a magnet that generates a magnetic field that acts on the first drive coil and the second drive coil; A temperature sensor for measuring the operating temperature of the reflector device and the magnet; a calculation unit that inputs a first current signal for causing the reflector to swing about the X-axis as a center axis at a first target swing angle and a first target frequency into the first driving coil, and inputs a second current signal for causing the reflector to swing about the Y-axis as a center axis at a second target swing angle and a second target frequency into the second driving coil; as well as a storage unit storing data, The manufacturing method of the optical scanning system comprises: a step of assembling a plurality of device structures each including the reflector device and the magnet; a process of acquiring first data and second data for each of the plurality of device structures, wherein the first data is used to correct a change in a swing angle of the reflector relative to a change in a frequency of a current signal input to each of the first drive coil and the second drive coil, and the second data is used to correct at least one of a deviation of the reflector from the Y axis when the reflector is swung around the first axis as a center axis when a current signal is input to the first drive coil instead of the second drive coil, and a deviation of the reflector from the X axis when the reflector is swung around the second axis as a center axis when a current signal is input to the second drive coil instead of the first drive coil; A step of acquiring, for at least one device structure among the plurality of device structures, third data for correcting a change in a swing angle of the reflecting mirror with respect to a change in the use temperature; and A process of storing the first data and the second data obtained for each of the multiple device structures in the storage unit that constitutes the light scanning system together with each of the multiple device structures while maintaining the corresponding relationship between each of the multiple device structures and the first data and the second data, and storing the third data obtained for at least one device structure in the storage unit that constitutes the light scanning system together with each of the multiple device structures.

2. The method for manufacturing an optical scanning system according to claim 1, wherein: In the step of acquiring the third data, the third data is acquired for a representative device structure among the plurality of device structures. In the process of saving the first data, the second data and the third data, the first data and the second data obtained for each of the multiple device structures are saved in the storage unit that constitutes the light scanning system together with each of the multiple device structures while maintaining the correspondence between each of the multiple device structures and the first data and the second data, and the third data obtained for the representative device structure is saved in the storage unit that constitutes the light scanning system together with each of the multiple device structures.

3. The method for manufacturing an optical scanning system according to claim 1, wherein: In the step of acquiring the third data, the third data is acquired for each of the plurality of device structures. In the process of saving the first data, the second data and the third data, the first data, the second data and the third data acquired for each of the plurality of device structures are saved in the storage unit that constitutes the light scanning system together with each of the plurality of device structures while maintaining the corresponding relationship between each of the plurality of device structures and the first data, the second data and the third data.

4. The method for manufacturing an optical scanning system according to any one of claims 1 to 3, wherein: It also includes: a process of constituting the calculation unit in a manner of generating the first current signal and the second current signal based on the first target swing angle and the first target frequency, the second target swing angle and the second target frequency, the operating temperature, and the first data, the second data, and the third data stored in the storage unit.

5. A method for manufacturing an optical scanning device, wherein: The optical scanning device comprises: A reflector device comprising a first movable portion provided with a reflector and a first driving coil, a second movable portion provided with a second driving coil and supporting the first movable portion in a manner that the reflector can swing around a first axis along an X-axis as a center axis, and a supporting portion supporting the second movable portion in a manner that the reflector can swing around a second axis along a Y-axis intersecting the X-axis as a center axis; a magnet that generates a magnetic field that acts on the first drive coil and the second drive coil; a computing device for inputting a first current signal for causing the reflector to swing about the X-axis as a center axis at a first target swing angle and a first target frequency into the first driving coil, and for inputting a second current signal for causing the reflector to swing about the Y-axis as a center axis at a second target swing angle and a second target frequency into the second driving coil; as well as a storage device storing data, The manufacturing method of the optical scanning device comprises: a step of assembling a plurality of device structures each including the reflector device and the magnet; a step of acquiring second data for each of the plurality of device structures, wherein the second data is used to correct at least one of a deviation of the reflector from the Y axis when the reflector is swung about the first axis as the center axis when a current signal is input to the first drive coil instead of the second drive coil, and a deviation of the reflector from the X axis when the reflector is swung about the second axis as the center axis when a current signal is input to the second drive coil instead of the first drive coil; A step of acquiring, for at least one of the plurality of device structures, third data for correcting a change in a swing angle of the reflector with respect to a change in a use temperature of the reflector device and the magnet; and A process of storing the second data obtained for each of the multiple device structures in the storage device that constitutes the light scanning device together with each of the multiple device structures while maintaining the corresponding relationship between each of the multiple device structures and the second data, and storing the third data obtained for at least one device structure in the storage device that constitutes the light scanning device together with each of the multiple device structures.

6. The method for manufacturing an optical scanning device according to claim 5, wherein: In the step of acquiring the third data, the third data is acquired for a representative device structure among the plurality of device structures. In the process of saving the second data and the third data, the second data obtained for each of the multiple device structures is saved in the storage device that constitutes the light scanning device together with each of the multiple device structures while maintaining the correspondence between each of the multiple device structures and the second data, and the third data obtained for the representative device structure is saved in the storage device that constitutes the light scanning device together with each of the multiple device structures.

7. The method for manufacturing an optical scanning device according to claim 5, wherein: In the step of acquiring the third data, the third data is acquired for each of the plurality of device structures. In the process of saving the second data and the third data, the second data and the third data obtained for each of the multiple device structures are saved in the storage device that constitutes the optical scanning device together with each of the multiple device structures, while maintaining the correspondence between each of the multiple device structures and the second data and the third data.

8. The method for manufacturing an optical scanning device according to any one of claims 5 to 7, wherein: Also available: A step of acquiring first data for each of the plurality of device structures, wherein the first data is used to correct a change in a swing angle of the reflector relative to a change in a frequency of a current signal input to each of the first drive coil and the second drive coil; and The process of the computing device is constituted in a manner of acquiring data based on the first target swing angle and the first target frequency, the second target swing angle and the second target frequency, and the first data, and generating the first current signal and the second current signal based on the acquired data and the operating temperature, and the second data and the third data stored in the storage device.

9. The method for manufacturing an optical scanning device according to any one of claims 5 to 8, wherein: The optical scanning device further includes a temperature sensor for measuring the operating temperature.

10. A data acquisition method, wherein: The optical scanning system has: A reflector device comprising a first movable portion provided with a reflector and a first driving coil, a second movable portion provided with a second driving coil and supporting the first movable portion in a manner that the reflector can swing around a first axis along an X-axis as a center axis, and a supporting portion supporting the second movable portion in a manner that the reflector can swing around a second axis along a Y-axis intersecting the X-axis as a center axis; a magnet that generates a magnetic field that acts on the first drive coil and the second drive coil; as well as a calculation unit, which inputs a first current signal for causing the reflector to swing with the X-axis as the center axis at a first target swing angle and a first target frequency into the first driving coil, and inputs a second current signal for causing the reflector to swing with the Y-axis as the center axis at a second target swing angle and a second target frequency into the second driving coil, The data acquisition method is a data acquisition method used in the optical scanning system, in which the computing unit pre-acquires data for generating the first current signal and the second current signal. The data acquisition method comprises: The step of fixing the position of the reflector device relative to the magnet; A process of acquiring first data and second data while fixing the position of the reflector device relative to the magnet, wherein the first data is used to correct a change in a swing angle of the reflector relative to a change in a frequency of a current signal input to each of the first drive coil and the second drive coil, and the second data is used to correct at least one of a deviation of the reflector from the Y axis when the reflector is swung around the first axis as a center axis when a current signal is input to the first drive coil instead of the second drive coil, and a deviation of the reflector from the X axis when the reflector is swung around the second axis as a center axis when a current signal is input to the second drive coil instead of the first drive coil.

11. The data acquisition method according to claim 10, wherein: The method further comprises the step of acquiring third data for correcting a change in a swing angle of the reflector with respect to a change in a use temperature of the reflector device and the magnet, while the position of the reflector device relative to the magnet is fixed.

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