A transmission device for wafer regeneration

Abstract

The present invention relates to the field of wafer technology, and specifically to a transmission device for wafer regeneration and a transmission method thereof, comprising a conveyor belt, and also comprising a disassembly and assembly mechanism, a positioning mechanism and a shifting mechanism, wherein the disassembly and assembly mechanism is fixedly mounted on both sides of the outer wall of the conveyor belt, a feeding mechanism is fixedly mounted on the top of the disassembly and assembly mechanism, and protective shock-absorbing mechanisms are arranged on both sides of the inner wall of the feeding mechanism. In the present invention, a shifting mechanism, a pressurized discharging mechanism and a fixed supporting mechanism are arranged, and a connecting pipe is fixed to the bottom of a supporting plate through a pin shaft and a clamp, so that the position of the oil outlet nozzle is aligned with the top of a slide rail, and the position of the oil outlet nozzle can be more conveniently adjusted according to different usage conditions to adapt to different usage conditions, and more conveniently, and then the cylinder is opened to drive the push rod to slowly press the piston downward, so that the lubricating oil in the lubricating oil tank slowly drips out through the oil outlet nozzle, and the downward pressing speed of the piston can be adjusted more quickly and conveniently according to usage requirements.

Description

Technical Field

[0001] The present invention relates to the field of wafer technology, and in particular to a transmission device for wafer regeneration. Background Art

[0002] Wafer refers to the silicon wafer used to make silicon semiconductor circuits. Its original material is silicon. After high-purity polysilicon is dissolved, silicon crystal seeds are added, and then slowly pulled out to form cylindrical single crystal silicon. After grinding, polishing, and slicing, the silicon crystal rod forms a silicon wafer, that is, a wafer. The main processing methods of wafers are sheet processing and batch processing, that is, processing one or more wafers at the same time. As the semiconductor feature size becomes smaller and smaller, the processing and measurement equipment becomes more and more advanced, resulting in new data characteristics in wafer processing. At the same time, the reduction in feature size increases the impact of the number of particles in the air on the quality and reliability of the wafer after processing during wafer processing. As the cleanliness improves, the number of particles also has new data characteristics. During the wafer regeneration process, the wafer needs to be transferred and shifted to facilitate subsequent processing.

[0003] The above patent technology has the following problems:

[0004] (1) Existing transmission equipment is usually unable to more conveniently position and fix the wafer during use. The wafer is easily displaced during the transmission process, causing the wafer to deviate from its original trajectory, affecting the transportation effect.

[0005] (2) Existing transmission equipment cannot fully lubricate specific parts of the equipment according to the equipment's usage requirements during use. The equipment is prone to jamming after long-term use, causing a certain degree of damage to the wafer during transportation, affecting subsequent use.

[0006] Therefore, there is an urgent need to design a wafer regeneration transmission device and a transmission method thereof that can solve the above problems. Summary of the invention

[0007] In order to solve the problems existing in the prior art, the present invention provides a transmission device for wafer regeneration, including a conveyor belt, and also including a disassembly and assembly mechanism, a positioning mechanism and a shifting mechanism. The disassembly and assembly mechanism is fixedly installed on both sides of the outer wall of the conveyor belt, a feeding mechanism is fixedly installed on the top of the disassembly and assembly mechanism, and protective shock-absorbing mechanisms are arranged on both sides of the inner wall of the feeding mechanism. The positioning mechanism is fixedly installed on both sides of the inner wall of the conveyor belt, and the shifting mechanism is fixedly installed on both sides of the top of the conveyor belt. The shifting mechanism includes two second mounting plates fixedly installed on both sides of the top of the conveyor belt, two screw slides respectively fixedly installed on the top of the two second mounting plates, and two support frames respectively fixedly installed on the top of the sliding blocks of the two screw slides, a pressurized discharging mechanism is fixedly installed on the top of the support frame, and a fixed supporting mechanism is fixedly connected to one side of the pressurized discharging mechanism.

[0008] Preferably, the disassembly and assembly mechanism includes two connecting plates respectively fixedly installed on both sides of the outer wall of the conveyor belt, two card slots respectively opened on one side of the two connecting plates, two card blocks respectively installed on the inner sides of the two card slots and two chassis respectively fixedly installed on one side of the two card blocks.

[0009] Preferably, the loading mechanism includes two electric turntables respectively fixedly mounted on the top of the two chassis, two first mounting plates respectively fixedly mounted on the top of the two electric turntables, two electric lifting sleeves respectively fixedly mounted on the top of the two first mounting plates, two mechanical arms respectively fixedly mounted on the telescopic ends of the two electric lifting sleeves, and two mechanical claws respectively fixedly mounted on one side of the two mechanical arms.

[0010] Preferably, the protective shock-absorbing mechanism comprises four connecting blocks respectively fixedly mounted on the inner sides of the two mechanical claws, four telescopic sleeves respectively fixedly mounted on one side of the four connecting blocks, a plurality of fixed blocks respectively fixedly mounted inside the four telescopic sleeves, four telescopic plates respectively fitted on the inner sides of the four telescopic sleeves, four clamping plates respectively fixedly mounted on one side of the four telescopic plates and four limiting grooves respectively opened on one side of the four clamping plates, and a telescopic spring is connected between each of the fixed blocks and the telescopic plates.

[0011] Preferably, the positioning mechanism includes a plurality of mounting blocks respectively fixedly mounted on both sides of the inner wall of the conveyor belt, a plurality of electric push rods respectively fixedly mounted on one side of the plurality of mounting blocks, two slide rails respectively fixedly mounted on the telescopic ends of the plurality of electric push rods, a plurality of rotating shafts respectively fixedly mounted on the top of the two slide rails, and a plurality of rollers respectively connected to one side of the plurality of rotating shafts.

[0012] Preferably, the pressurized discharging mechanism includes two lubricating oil tanks respectively fixedly mounted on the tops of two support frames, eight mounting grooves respectively opened on both sides of the tops of the two lubricating oil tanks, and eight hydraulic rods respectively fixedly mounted inside the eight mounting grooves.

[0013] Preferably, the pressurized discharging mechanism also includes two tank covers respectively fixedly mounted on the telescopic ends of the eight hydraulic rods, two cylinders respectively fixedly mounted on the tops of the two tank covers, two push rods respectively fixedly connected to the output ends of the two cylinders, two pistons respectively fixedly connected to the bottom ends of the two push rods and two oil outlets respectively opened at the bottoms of the two lubricating oil tanks.

[0014] Preferably, the fixed support mechanism includes two connecting pipes fixedly connected to one side of the two oil outlets and two oil outlet nozzles fixedly connected to one end of the two connecting pipes, two support plates fixedly installed on one side of the two support frames, four pins respectively installed on the top of the two support plates and four clamps respectively installed on one side of the four pins.

[0015] The beneficial effects of the present invention are:

[0016] First, the present invention is provided with a positioning mechanism, the wafer is moved to the top of the conveyor belt by a mechanical claw, the conveyor belt drives the wafer to both sides of the roller, the electric push rod is turned on to make multiple electric push rods drive the two slide rails to move inward respectively until the rollers contact the two sides of the wafer, and as the wafer moves, the rollers on both sides of the wafer drive the rollers to rotate through the rotating shaft, so that the wafer can be positioned and fixed more conveniently, and the position of the wafer is prevented from shifting during transportation, which affects the subsequent processing of the wafer by mechanical equipment. At the same time, the setting of the electric push rod can more conveniently adjust the distance between the two slide rails, so as to adjust the distance between the two slide rails according to wafers of different sizes, so as to adapt to different usage conditions, and effectively improve the use effect of the device;

[0017] Secondly, the present invention is provided with a shifting mechanism, a pressurized discharging mechanism and a fixed supporting mechanism, and the connecting pipe is fixed to the bottom of the supporting plate by a pin shaft and a clamp, so that the position of the oil outlet nozzle is aligned with the top of the slide rail, and the position of the oil outlet nozzle can be more conveniently adjusted according to different usage conditions, so as to adapt to different usage conditions, and it is more convenient. Then, the cylinder is opened to drive the push rod to slowly press the piston downward, so that the lubricating oil in the lubricating oil tank slowly drips out through the oil outlet nozzle, and the downward pressing speed of the piston can be adjusted more quickly and conveniently according to the needs of use, thereby adjusting the flow rate of the lubricating oil, and it is more convenient to use. During the process, open the screw slide so that the sliding block of the screw slide drives the support frame to move back and forth, thereby moving the lubricating oil tank and the oil nozzle back and forth, which can more conveniently lubricate the various rotating shafts on the top of the slide rail evenly, make the loading more uniform, ensure that the rotating shaft and the roller always remain flexible, and effectively prevent the equipment from getting stuck due to long-term use, which may cause damage during the wafer transmission process and affect subsequent use. When the lubricating oil in the lubricating oil tank is used up, open the hydraulic rod so that the hydraulic rod drives the tank cover to move upward, so that it is more convenient to add material to the inside of the lubricating oil tank without manual opening, and it is more convenient and quicker to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a three-dimensional structural schematic diagram of the present invention;

[0019] Figure 2 It is a schematic diagram of the disassembly and assembly mechanism and the feeding mechanism of the present invention;

[0020] Figure 3 It is a schematic diagram of the structure of the protective shock absorbing mechanism of the present invention;

[0021] Figure 4 It is a schematic diagram of the structure of the displacement mechanism and the fixed support mechanism of the present invention;

[0022] Figure 5 It is a schematic structural diagram of the pressurized discharging mechanism of the present invention;

[0023] Figure 6 The present invention Figure 3 The enlarged structural diagram at A in the middle;

[0024] Figure 7 The present invention Figure 1 Enlarged structural diagram at B in the middle.

[0025] Description of reference numerals:

[0026] 1. Conveyor belt; 2. Disassembly and assembly mechanism; 21. Connecting plate; 22. Card slot; 23. Card block; 24. Chassis; 3. Feeding mechanism; 31. Electric turntable; 32. First mounting plate; 33. Electric lifting sleeve rod; 34. Mechanical arm; 35. Mechanical claw; 4. Protective shock absorption mechanism; 41. Connecting block; 42. Telescopic sleeve; 43. Fixed block; 44. Telescopic spring; 45. Telescopic plate; 46. Clamp; 47. Limiting slot; 5. Positioning mechanism; 51. Mounting block; 5 2. Electric push rod; 53. Slide rail; 54. Rotating shaft; 55. Roller; 6. Shifting mechanism; 61. Second mounting plate; 62. Screw slide; 63. Support frame; 7. Pressurized discharge mechanism; 71. Lubricating oil tank; 72. Mounting groove; 73. Hydraulic rod; 74. Tank cover; 75. Cylinder; 76. Push rod; 77. Piston; 78. Oil outlet; 8. Fixed support mechanism; 81. Connecting pipe; 82. Oil outlet nozzle; 83. Support plate; 84. Pin; 85. Clamp. DETAILED DESCRIPTION

[0027] In order to make the above-mentioned objects, features and advantages of the present invention more understandable, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below. Example

[0028] like Figure 1-Figure 7As shown, the present invention provides a transmission device for wafer regeneration, including a conveyor belt 1, and also including a disassembly and assembly mechanism 2, a positioning mechanism 5 and a shifting mechanism 6. The disassembly and assembly mechanism 2 is fixedly installed on both sides of the outer wall of the conveyor belt 1, and a feeding mechanism 3 is fixedly installed on the top of the disassembly and assembly mechanism 2. Protective shock-absorbing mechanisms 4 are arranged on both sides of the inner wall of the feeding mechanism 3. The positioning mechanism 5 is fixedly installed on both sides of the inner wall of the conveyor belt 1, and the shifting mechanism 6 is fixedly installed on both sides of the top of the conveyor belt 1. The shifting mechanism 6 includes two second mounting plates 61 fixedly installed on both sides of the top of the conveyor belt 1, two screw slides 62 respectively fixedly installed on the tops of the two second mounting plates 61, and two support frames 63 respectively fixedly installed on the tops of the sliding blocks of the two screw slides 62, a pressurized discharge mechanism 7 is fixedly installed on the top of the support frame 63, and a fixed support mechanism 8 is fixedly connected to one side of the pressurized discharge mechanism 7.

[0029] The above specific implementation scheme: during use, open the screw slide 62 so that the sliding block of the screw slide 62 drives the support frame 63 to move back and forth, thereby making the lubricating oil tank 71 and the oil nozzle 82 move back and forth, which can more conveniently lubricate the various rotating shafts 54 on the top of the slide rail 53 evenly, making the loading more uniform, ensuring that the rotating shaft 54 ​​and the roller 55 always remain flexible, and effectively preventing the equipment from getting stuck due to long-term use, causing damage during the wafer transmission process, affecting subsequent use.

[0030] Specifically, the disassembly and assembly mechanism 2 includes two connecting plates 21 respectively fixedly installed on both sides of the outer wall of the conveyor belt 1, two card slots 22 respectively opened on one side of the two connecting plates 21, two card blocks 23 respectively installed on the inner sides of the two card slots 22 and two chassis 24 respectively fixedly installed on one side of the two card blocks 23. By providing the connecting plates 21, the card slots 22, the card blocks 23 and the chassis 24, the feeding mechanism 3 can be disassembled and assembled more conveniently, so as to facilitate subsequent inspection and maintenance, and it is more convenient to use.

[0031] Specifically, the loading mechanism 3 includes two electric turntables 31 respectively fixedly mounted on the top of the two chassis 24, two first mounting plates 32 respectively fixedly mounted on the top of the two electric turntables 31, two electric lifting sleeves 33 respectively fixedly mounted on the top of the two first mounting plates 32, two mechanical arms 34 respectively fixedly mounted on the telescopic ends of the two electric lifting sleeves 33, and two mechanical claws 35 respectively fixedly mounted on one side of the two mechanical arms 34. By providing the electric turntable 31, the first mounting plate 32, the electric lifting sleeves 33, the mechanical arms 34 and the mechanical claws 35, the wafers can be loaded and taken more conveniently, and the mechanical arms 34 are respectively arranged on both sides, which effectively improves the utilization efficiency of the device.

[0032] Specifically, the protective shock-absorbing mechanism 4 comprises four connecting blocks 41 respectively fixedly mounted on the inner sides of the two mechanical claws 35, four telescopic sleeves 42 respectively fixedly mounted on one side of the four connecting blocks 41, a plurality of fixed blocks 43 respectively fixedly mounted inside the four telescopic sleeves 42, four telescopic plates 45 respectively cooperatedly mounted on the inner sides of the four telescopic sleeves 42, four clamping plates 46 respectively fixedly mounted on one side of the four telescopic plates 45, and four limiting grooves 47 respectively opened on one side of the four clamping plates 46. A telescopic spring 44 is connected between each fixed block 43 and the telescopic plate 45. By providing the connecting blocks 41, telescopic sleeves 42, fixed blocks 43, telescopic springs 44, telescopic plates 45, clamping plates 46 and limiting grooves 47, it is easier to protect the wafer during the loading process to prevent the wafer from being subjected to pressure, resulting in damage and affecting subsequent use.

[0033] Specifically, the positioning mechanism 5 includes a plurality of mounting blocks 51 respectively fixedly mounted on both sides of the inner wall of the conveyor belt 1, a plurality of electric push rods 52 respectively fixedly mounted on one side of the plurality of mounting blocks 51, two slide rails 53 respectively fixedly mounted on the telescopic ends of the plurality of electric push rods 52, a plurality of rotating shafts 54 respectively fixedly mounted on the top of the two slide rails 53, and a plurality of rollers 55 respectively connected to one side of the plurality of rotating shafts 54. By providing the mounting blocks 51, the electric push rods 52, the slide rails 53, the rotating shafts 54 and the rollers 55, the wafer can be positioned and fixed more conveniently to prevent the position of the wafer from shifting during transportation and affecting the subsequent processing of the wafer by mechanical equipment. At the same time, the provision of the electric push rods 52 can more conveniently adjust the distance between the two slide rails 53, so as to adjust the distance between the two slide rails 53 according to wafers of different sizes, so as to adapt to different usage conditions, and effectively improve the use effect of the device.

[0034] Specifically, the pressurized discharging mechanism 7 includes two lubricating oil tanks 71 respectively fixedly mounted on the top of the two support frames 63, eight mounting grooves 72 respectively opened on both sides of the top of the two lubricating oil tanks 71, and eight hydraulic rods 73 respectively fixedly mounted inside the eight mounting grooves 72. By providing the lubricating oil tanks 71, the mounting grooves 72, the hydraulic rods 73 and the tank covers 74, the lubricating oil tanks 71 can be more conveniently filled without manual opening, and the use is more convenient and quick.

[0035] Specifically, the pressurized discharging mechanism 7 also includes two tank covers 74 respectively fixedly mounted on the telescopic ends of the eight hydraulic rods 73, two cylinders 75 respectively fixedly mounted on the tops of the two tank covers 74, two push rods 76 respectively fixedly connected to the output ends of the two cylinders 75, two pistons 77 respectively fixedly connected to the bottom ends of the two push rods 76, and two oil outlets 78 respectively opened at the bottoms of the two lubricating oil tanks 71. By providing the cylinder 75, the push rod 76, the piston 77 and the oil outlet 78, the downward pressure speed of the piston 77 can be adjusted more quickly and conveniently according to the needs of use, thereby adjusting the flow rate of the lubricating oil, which is more convenient to use.

[0036] Specifically, the fixed support mechanism 8 includes two connecting pipes 81 fixedly connected to one side of the two oil outlets 78 and two oil nozzles 82 fixedly connected to one end of the two connecting pipes 81, two support plates 83 fixedly installed on one side of the two support frames 63, four pins 84 respectively installed on the top of the two support plates 83 and four clamps 85 respectively installed on one side of the four pins 84. By providing the connecting pipes 81, the oil nozzles 82, the support plates 83, the pins 84 and the clamps 85, the position of the oil nozzles 82 can be adjusted more conveniently according to different usage conditions so as to adapt to different usage conditions and be more convenient.

[0037] Working principle: first, turn on the external power supply, push the chassis 24 so that the chassis 24 drives the card block 23 to engage and connect with the card slot 22, so that the chassis 24 is fixedly installed on both sides of the conveyor belt 1, and then turn on the electric turntable 31 to drive the mechanical arm 34 and the mechanical claw 35 to rotate and move, so that the two sides of the mechanical claw 35 move to both sides of the wafer to clamp the wafer. When the two clamping plates 46 contact the two sides of the wafer respectively, the clamping plates 46 drive the telescopic spring 44 to contract inward, thereby buffering and effectively preventing the wafer from being damaged. Then, the wafer is moved to the top of the conveyor belt 1 through the mechanical claw 35, so that the conveyor belt 1 drives the wafer to both sides of the roller 55, turn on the electric push rod 52 so that multiple electric push rods 52 drive the two slide rails 53 to move inward respectively until the roller 55 contacts the two sides of the wafer. As the wafer moves, the rollers 55 on both sides of the wafer are driven to rotate through the rotating shaft 54, and then the connecting pipe 81 is connected through the pin shaft. 84 and clamp 85 are fixed to the bottom of support plate 83, so that the position of oil nozzle 82 is aligned with the top of slide rail 53, and then the cylinder 75 is opened to drive the push rod 76 to slowly press the piston 77 downward, so that the lubricating oil inside the lubricating oil tank 71 slowly drips out through the oil nozzle 82, and then during use, the screw slide 62 is opened to make the sliding block of the screw slide 62 drive the support frame 63 to move back and forth, so that the lubricating oil tank 71 and the oil nozzle 82 move back and forth. Finally, when the lubricating oil inside the lubricating oil tank 71 is used up, the hydraulic rod 73 is opened to make the hydraulic rod 73 drive the tank cover 74 to move upward, so as to more conveniently add material to the inside of the lubricating oil tank 71. The model of the electric turntable 31 is: DG60-5, the model of the electric push rod 52 is: YS-NZ100-12A, the model of the screw slide 62 is: PKH40, and the model of the cylinder 75 is: XYDHA24-800.

[0038] The above-mentioned embodiments only express one or more implementation methods of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the invention patent. It should be pointed out that for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be based on the attached claims.

Claims

1. A wafer regeneration transmission device, comprising a conveyor belt (1), characterized in that: The utility model also comprises a disassembly and assembly mechanism (2), a positioning mechanism (5) and a shifting mechanism (6), wherein the disassembly and assembly mechanism (2) is fixedly mounted on both sides of the outer wall of the conveyor belt (1), a feeding mechanism (3) is fixedly mounted on the top of the disassembly and assembly mechanism (2), and a protective shock absorbing mechanism (4) is arranged on both sides of the inner wall of the feeding mechanism (3), the positioning mechanism (5) is fixedly mounted on both sides of the inner wall of the conveyor belt (1), and the shifting mechanism (6) is fixedly mounted on both sides of the top of the conveyor belt (1), and the shifting mechanism (6) comprises two second mounting plates (61) fixedly mounted on both sides of the top of the conveyor belt (1), two screw slides (62) respectively fixedly mounted on the tops of the two second mounting plates (61), and two splitting mechanisms (61) and a plurality of second mounting plates (61) fixedly mounted on the tops of the two second mounting plates (61). The support frame (63) is fixedly mounted on the top of the sliding block of the two screw slides (62), and a pressurized discharge mechanism (7) is fixedly mounted on the top of the support frame (63), and a fixed support mechanism (8) is fixedly connected to one side of the pressurized discharge mechanism (7); the disassembly and assembly mechanism (2) comprises two connecting plates (21) respectively fixedly mounted on both sides of the outer wall of the conveyor belt (1), two card slots (22) respectively opened on one side of the two connecting plates (21), two card blocks (23) respectively mounted on the inner sides of the two card slots (22), and two chassis (24) respectively fixedly mounted on one side of the two card blocks (23); the feeding mechanism (3) comprises two The present invention relates to a conveyor belt (24) having an electric turntable (31) on the top of the conveyor belt (24), two first mounting plates (32) respectively fixedly mounted on the tops of the two electric turntables (31), two electric lifting sleeves (33) respectively fixedly mounted on the tops of the two first mounting plates (32), two mechanical arms (34) respectively fixedly mounted on the telescopic ends of the two electric lifting sleeves (33), and two mechanical claws (35) respectively fixedly mounted on one side of the two mechanical arms (34); the positioning mechanism (5) comprises a plurality of mounting blocks (51) respectively fixedly mounted on both sides of the inner wall of the conveyor belt (1), a plurality of electric push rods (52) respectively fixedly mounted on one side of the plurality of mounting blocks (51), and two mechanical claws (35) respectively fixedly mounted on the one side of the plurality of mechanical claws (35). The electric push rod (52) comprises a slide rail (53) at the telescopic end, a plurality of rotating shafts (54) respectively fixedly mounted on the top of the two slide rails (53), and a plurality of rollers (55) respectively connected to one side of the plurality of rotating shafts (54); the fixed support mechanism (8) comprises two connecting pipes (81) respectively fixedly connected to one side of the two oil outlets (78), two oil outlet nozzles (82) respectively fixedly connected to one end of the two connecting pipes (81), two supporting plates (83) respectively fixedly mounted on one side of the two supporting frames (63), four pins (84) respectively matched and mounted on the top of the two supporting plates (83), and four clamps (85) respectively matched and mounted on one side of the four pins (84).

2. The wafer regeneration transmission device according to claim 1, characterized in that: The protective shock absorbing mechanism (4) comprises four connecting blocks (41) respectively fixedly mounted on the inner sides of the two mechanical claws (35), four telescopic sleeves (42) respectively fixedly mounted on one side of the four connecting blocks (41), a plurality of fixed blocks (43) respectively fixedly mounted inside the four telescopic sleeves (42), four telescopic plates (45) respectively mounted in cooperation with the inner sides of the four telescopic sleeves (42), four clamping plates (46) respectively fixedly mounted on one side of the four telescopic plates (45), and four limiting grooves (47) respectively opened on one side of the four clamping plates (46), and a telescopic spring (44) is connected between each of the fixing blocks (43) and the telescopic plates (45).

3. The wafer regeneration transmission device according to claim 1, characterized in that: The pressurized discharge mechanism (7) comprises two lubricating oil tanks (71) respectively fixedly mounted on the tops of the two support frames (63), eight mounting grooves (72) respectively opened on both sides of the tops of the two lubricating oil tanks (71), and eight hydraulic rods (73) respectively fixedly mounted inside the eight mounting grooves (72).

4. The wafer regeneration transmission device according to claim 3, characterized in that: The pressurized discharge mechanism (7) further comprises two tank covers (74) respectively fixedly mounted on the telescopic ends of the eight hydraulic rods (73), two cylinders (75) respectively fixedly mounted on the tops of the two tank covers (74), two push rods (76) respectively fixedly connected to the output ends of the two cylinders (75), two pistons (77) respectively fixedly connected to the bottom ends of the two push rods (76), and two oil outlets (78) respectively opened at the bottoms of the two lubricating oil tanks (71).

Images