Wafer splitting conveying and cutting mechanism

Abstract

The present invention discloses a wafer splitting conveying and cutting mechanism, including a film placing mechanism, a film shifting mechanism, a film cutting mechanism and a film sticking mechanism. The composite film is in a controlled state in the film placing mechanism, the film shifting mechanism, the film cutting mechanism and the film sticking mechanism, and the composite film is kept tensioned all the time. Under the joint action of the anti-static driving roller and the electromagnetic brake connected to the air expansion shaft, the composite film is always in a tensioned state in the film placing mechanism. When the film shifting mechanism is working, it is ensured that the composite film is always controlled by the upper adsorption device or the lower moving suction cup during the movement process. The driving and pressing mechanism in the film placing mechanism can adjust the composite film between the film placing mechanism and the film shifting mechanism to always be in a tensioned state. The film shifting mechanism ensures that the composite film is always in a tensioned state during the conveying process. The rodless cylinder and the guide cylinder in the cutting mechanism can control the cutting knife to accurately cut the composite film.

Description

Technical Field

[0001] The invention belongs to the technical field of silicon carbide wafer splitting, and in particular relates to a wafer splitting conveying and cutting mechanism. Background Art

[0002] The silicon carbide wafer undergoes laser hidden cutting processing. The laser beam is focused inside the wafer, and the wafer at the focus position forms an instantaneous high temperature, forming a series of criss-crossing damage layers inside the wafer. The silicon carbide wafer has a high hardness and cannot be cracked by film expansion. Suitable equipment is required to break it one by one along the wafer cutting path. The chip surface is sensitive to debris. During the cracking process, a layer of PE film is attached to the wafer surface to prevent the cracking knife of the cracking mechanism from directly contacting the wafer surface, and to prevent the debris generated during the cracking process from splashing and contaminating the chip.

[0003] At present, the film used in film lamination is a composite film. The composite film passes through a film placing mechanism, a film moving mechanism, a film cutting mechanism and a film laminating mechanism. The film attached to the wafer is a PE film. The area of ​​the cut PE film is often larger than the wafer disc, which makes it inconvenient to put the wafer disc back into the silo box. Summary of the invention

[0004] In order to solve the above technical problems, the present invention provides a wafer splitting conveying and cutting mechanism capable of precisely cutting a composite film.

[0005] The specific plan is as follows:

[0006] The wafer splitting conveying and cutting mechanism includes a film placing mechanism, a film moving mechanism, a film cutting mechanism and a film pasting mechanism. The composite film is in a controlled state in the film placing mechanism, the film moving mechanism, the film cutting mechanism and the film pasting mechanism to keep the composite film always taut.

[0007] The film unwinding mechanism includes a film unwinding roller system arranged on a film unwinding fixing frame, and the film unwinding roller system includes an anti-static driving roller, an air expansion shaft and an electromagnetic brake connected to the air expansion shaft; the air expansion shaft is used to fix the composite film roll, the anti-static driving roller drives the composite film to be transported, and the electromagnetic brake connected to the anti-static driving roller and the air expansion shaft cooperate with each other to tighten the composite film.

[0008] The film placing rollers arranged on the film placing fixing frame are arranged in the following order according to the moving direction of the composite film: an air inflation shaft is used to fix the composite film roll, an electromagnetic brake is connected to the end of the air inflation shaft, a first driven reversing roller reverses the composite film for the first time, an anti-static driving roller drives the composite film to move, a tensioning pressing roller is used to tension the composite film so that the composite film contacts the anti-static driving roller, and a second driven reversing roller outputs the composite film to the lower moving suction cup.

[0009] The tensioning roller is controlled by a driving pressing mechanism, which includes a pressing cylinder seat, a driving pressing cylinder, a tensioning pressing plate, a guide rail, a tensioning roller door-type fixing seat and a tensioning roller; the pressing cylinder seat is fixed to the top of the film placing fixing frame; the driving pressing cylinder is fixed to the top of the pressing cylinder seat, and the piston rod of the driving pressing cylinder penetrates the pressing cylinder seat and enters the inside of the film placing fixing frame; the guide rail is fixed to the side wall of the fixing frame, and the direction of the guide rail is consistent with the direction of the piston rod of the driving pressing cylinder; the tensioning roller door-type fixing seat is fixed to the end of the piston rod of the driving pressing cylinder and slides in the guide rail; the tensioning roller is rotatably connected to the tensioning roller door-type fixing seat.

[0010] The film moving mechanism includes an upper adsorption device that moves up and down and a lower moving suction cup that moves horizontally. The lower moving suction cup reciprocates along the moving direction of the composite film, so that the lower moving suction cup moves with the PE film. The upper adsorption device and the lower moving suction cup continuously control the movement of the composite film.

[0011] The upper adsorption device is driven by the vertical servo module to move up and down through the adjustable pressure-type movable seat, the lower movable suction cup drives the composite film to move to the film cutting position, and the upper adsorption device moves downward, so that the upper adsorption device and the lower movable suction cup adsorb the composite film at the same time. After the film cutting is completed, the upper adsorption device moves upward, the lower movable suction cup is reset, and the upper adsorption device moves downward, so that the upper adsorption device and the lower movable suction cup adsorb the composite film at the same time again. The upper adsorption device comprises: an upper negative pressure source, an adsorption linear bearing and a fixed position suction cup, the upper negative pressure source is arranged on the adjustable pressure type movable seat, the adsorption linear bearing comprises an adsorption linear bearing sleeve and an adsorption linear bearing shaft, the adsorption linear bearing sleeve is fixed on the top of the adjustable pressure type movable seat, the adsorption linear bearing shaft passes through the adsorption linear bearing sleeve, an adsorption linear bearing shaft limit block is arranged on the top of the adsorption linear bearing shaft, and the direction of the adsorption linear bearing is consistent with the moving direction of the adjustable pressure type movable seat; a suction cup floating mounting plate is arranged at the bottom, a spring is arranged between the suction cup floating mounting plate and the adjustable pressure type movable seat, the fixed position suction cup is connected to the bottom of the suction cup floating mounting plate, and the fixed position suction cup is connected to the upper negative pressure source through the upper airway; the upper adsorption device also comprises a movable adsorption Rolling mechanism, the mobile adsorption rolling mechanism includes: a floating roller cylinder, a floating plate, a floating roller door-type fixed seat, a floating linear bearing and a floating roller; the floating roller cylinder is fixedly connected to the adjustable pressure type movable seat, the floating plate is fixed to the end of the piston rod of the floating roller cylinder, and the moving direction is consistent with the moving direction of the adjustable pressure type movable seat, floating linear bearings are arranged on both sides of the floating plate, the floating linear bearings include a floating linear bearing sleeve and a floating linear bearing shaft, the floating linear bearing sleeve is fixed to the floating plate, the floating linear bearing shaft passes through the floating linear bearing sleeve, the top of the floating linear bearing shaft is provided with a floating linear bearing shaft limit block, the bottom is connected to the floating roller door-type fixed seat, and the floating roller is rotatably connected to the floating roller door-type fixed seat. The floating cylinder controls the floating plate to move up and down, and the limit block of the floating linear bearing shaft drives the entire floating roller door-type fixed seat and the floating roller to move up and down, and the pressure of the floating roller on the PE film is the gravity of the floating roller door-type fixed seat and the floating roller.

[0012] The end of the adjustable pressure type movable seat is connected with a film cutting mechanism, which includes a rodless cylinder, a guide rod cylinder and a cutting knife. The rodless cylinder is installed at the end of the adjustable pressure type movable seat. The guide rod direction of the rodless cylinder is perpendicular to the running direction of the composite film. The guide rod is slidably connected with the guide rod cylinder, and the output end of the guide rod cylinder is connected with the cutting knife. After the lower movable suction cup moves into place along the moving direction of the composite film, the cutting knife cuts the PE film through the guide rod cylinder. The upper adsorption device moves upward to complete the handover between the upper adsorption device and the lower movable suction cup, and the lower movable suction cup is reset to return to the initial state.

[0013] The lower movable suction cup is provided with a lower negative pressure source, and the top of the lower movable suction cup is divided into a discharge position and a pick-up position. The tops of the discharge position and the pick-up position are both provided with air holes, and the air holes are connected to the lower negative pressure source through the lower adsorption air channel, and the air holes of the discharge position and the pick-up position are connected to different lower negative pressure sources.

[0014] The film sticking mechanism includes: a mobile servo module, a mobile adsorption base and a mobile adsorption device installed on a frame, the mobile adsorption base is installed in a component that moves up and down of the mobile servo module, the mobile adsorption device is installed on the mobile adsorption base, the mobile adsorption device includes a mobile adsorption linear bearing, a mobile adsorption negative pressure source and a mobile adsorption fixed position suction cup, the mobile adsorption linear bearing includes a mobile adsorption linear bearing sleeve and a mobile adsorption linear bearing shaft, the mobile adsorption linear bearing sleeve is fixed on the mobile adsorption base, the mobile adsorption linear bearing shaft passes through the mobile adsorption linear bearing sleeve, a mobile adsorption limit block is arranged on the top of the mobile adsorption linear bearing shaft, a mobile adsorption fixed position suction cup is connected to the bottom, and the mobile adsorption negative pressure source is connected to the mobile adsorption fixed position suction cup through a mobile adsorption airway.

[0015] A rolling mechanism is provided on the mobile adsorption base, and the rolling mechanism includes a rolling cylinder, a rolling floating plate, a rolling linear bearing, a roller gate seat and a roller. The rolling cylinder is fixed on the mobile adsorption base, and the rolling floating plate is connected to the end of the rolling cylinder piston rod; the rolling linear bearing includes a rolling linear bearing sleeve and a rolling linear bearing shaft, the rolling linear bearing sleeve is fixed on the top of the rolling floating plate, the rolling linear bearing shaft passes through the rolling linear bearing sleeve, a rolling limit block is provided on the top of the rolling linear bearing shaft, and the bottom is connected to the roller seat, and the roller is rotatably connected in the roller gate seat; the rolling cylinder controls the roller floating plate to move up and down, and drives the entire roller gate seat and the roller to move up and down through the rolling limit block of the roller linear bearing shaft, and the pressure of the roller on the PE film is the gravity of the roller gate fixed seat and the roller.

[0016] The present invention discloses a wafer splitting conveying and cutting mechanism, including a film placing mechanism, a film shifting mechanism, a film cutting mechanism and a film pasting mechanism. The composite film is in a controlled state in the film placing mechanism, the film shifting mechanism, the film cutting mechanism and the film pasting mechanism, and the composite film is kept in tension all the time. Under the joint action of an anti-static driving roller and an electromagnetic brake connected to an air expansion shaft, the composite film is always in a tensioned state in the film placing mechanism. When the film shifting mechanism is working, it is ensured that the composite film is always controlled by an upper adsorption device or a lower moving suction cup during the moving process. The driving and pressing mechanism in the film placing mechanism can adjust the composite film between the film placing mechanism and the film shifting mechanism to always be in a tensioned state. The film shifting mechanism ensures that the composite film is always in a tensioned state during the conveying process. The rodless cylinder and the guide cylinder in the cutting mechanism can control the cutting knife to accurately cut the composite film. The film pasting mechanism pastes the PE film after cutting on the wafer, and the roller pressing mechanism in the film pasting mechanism can paste the PE film more firmly. The circular cutting mechanism can cut off the excess PE film to ensure that there will be no obstruction when the wafer is put back into the silo. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the structure of the present invention;

[0018] Figure 2 It is a structural schematic diagram of the unwinding mechanism;

[0019] Figure 3 It is a top view of the unwinding mechanism;

[0020] Figure 4 It is a structural schematic diagram of the driving pressing mechanism;

[0021] Figure 5 is a side view of the driving pressing mechanism;

[0022] Figure 6 It is a structural schematic diagram of the membrane transfer mechanism;

[0023] Figure 7 is a side view of the membrane transfer mechanism;

[0024] Figure 8 is a schematic structural diagram of an upper adsorption device;

[0025] Fig. 9 is a side view of the upper adsorption device;

[0026] Fig.10 is a bottom view of the first embodiment of the upper adsorption device;

[0027] Fig.11 is a bottom view of the second embodiment of the upper adsorption device;

[0028] Fig.12 is a top view of the first embodiment of the lower movable suction cup;

[0029] Fig.13 is a top view of the second embodiment of the lower movable suction cup;

[0030] Fig.14 It is a structural schematic diagram of the film sticking mechanism;

[0031] 100, film placing mechanism, 110, film placing fixing frame, 120, film placing roller system, 121, anti-static driving roller, 1211, electromagnetic brake, 122, first driven reversing roller, 123, second driven reversing roller, 124, air expansion shaft, 130, driving pressing mechanism, 131, pressing cylinder seat, 132, driving pressing cylinder, 133, tensioning pressing plate, 134, guide rail, 135, tensioning pressing roller door type fixing seat, 136, tensioning pressing roller, 200, vertical servo module, 300, horizontal servo module, 400, film shifting mechanism, 410, upper adsorption device, 411, adjustable pressure type moving seat, 412, upper negative pressure source, 413, adsorption linear bearing, 414, fixed position suction cup, 415, adsorption linear bearing shaft limit block, 420, lower moving suction cup, 421 , material discharge position, 422, material picking position, 430, mobile adsorption roller mechanism, 431, floating roller cylinder, 432, floating plate, 433, floating roller door-type fixed seat, 434, floating linear bearing, 435, floating roller, 500, film pasting mechanism, 510, mobile servo module, 511, mobile horizontal servo module, 512, mobile vertical servo module, 520, mobile adsorption base, 530, mobile adsorption device, 531, mobile adsorption linear bearing, 532, mobile adsorption fixed position suction cup, 533, mobile adsorption limit block, 540, roller mechanism, 541, roller cylinder, 542, roller floating plate, 543, roller linear bearing, 544, roller door-type seat, 545, roller, 600, frame, 700, film cutting mechanism, 800, air floating platform. DETAILED DESCRIPTION

[0032] The following will be combined with the accompanying drawings in the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the implementation of the present invention, not all of the implementations. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] like Figures 1 to 14As shown, the present invention discloses a wafer splitting conveying and cutting mechanism, comprising a film placing mechanism 100, a film shifting mechanism 400, a film cutting mechanism 700 and a film pasting mechanism 500, characterized in that the composite film is in a controlled state in the film placing mechanism 100, the film shifting mechanism 400, the film cutting mechanism 700 and the film pasting mechanism 500, and is always kept taut. After the composite film roll is unrolled by the film placing mechanism 100, it is conveyed to the cutter position by the film shifting mechanism 400, and the PE film is cut by the film cutting mechanism 700, and the PE film is pasted on the surface of the wafer by the film pasting mechanism 500. The release film refers to a film with a distinguishable surface, and the release film is not sticky or slightly sticky after contacting with a specific material under limited conditions. The side of the PE film with glue contacts the release film, so that there is adhesion between the release film and the PE film, so that the composite film can be transported on the film placing mechanism and the film shifting mechanism without separating the release film from the PE film. After the PE film is cut, the film sticking mechanism 500 is ensured to adsorb the PE film, so that the cut PE film is separated from the release film. The release film is moved into the drain groove on the frame 600 by the film moving mechanism 400.

[0034] The film unwinding mechanism 100 includes a film unwinding roller system 120 disposed on a film unwinding fixing frame 110, and the film unwinding roller system 120 includes an anti-static driving roller 121, an air expansion shaft 124, and an electromagnetic brake 1211 connected to the air expansion shaft 124; the air expansion shaft 124 is used to fix the composite film roll, the anti-static driving roller 121 drives the composite film to be transported, and the electromagnetic brake 1211 connected to the anti-static driving roller 121 and the air expansion shaft 124 cooperate with each other to tighten the composite film. The film unwinding roller system 120 conveys the composite film out of the film unwinding mechanism 100. During the conveying process, in order to avoid the composite film from wrinkling and winding, the composite film is always kept in a tensioned state by the anti-static driving roller 121 and the electromagnetic brake 1211.

[0035] The film placing roller system 120 on the film placing fixing frame 110 is respectively arranged according to the moving direction of the composite film, the air inflation shaft 124 is used to fix the composite film roll, the end of the air inflation shaft 124 is connected to the electromagnetic brake 1211, the first driven reversing roller 122 reverses the composite film for the first time, the anti-static driving roller 121 drives the composite film to move, the tensioning roller 136 is used to tension the composite film so that the composite film contacts the anti-static driving roller 121, and the second driven reversing roller 123 outputs the composite film to the lower movable suction cup 420.

[0036] The tensioning roller 136 is controlled by a driving pressing mechanism 130, which includes a pressing cylinder seat 131, a driving pressing cylinder 132, a tensioning pressing plate 133, a guide rail, a tensioning roller 136 door-type fixing seat and a tensioning roller 136; the pressing cylinder seat 131 is fixed on the top of the film placing fixing frame 110; the driving pressing cylinder 132 is fixed on the top of the pressing cylinder seat 131, and the piston rod of the driving pressing cylinder 132 passes through the pressing cylinder seat 131 and enters the interior of the film placing fixing frame 110; the guide rail 134 is fixed on the side wall of the fixing frame, and the direction of the guide rail 134 is consistent with the direction of the piston rod of the driving pressing cylinder 132; the tensioning roller door-type fixing seat 135 is fixed on the end of the piston rod of the driving pressing cylinder 132, and slides in the guide rail 134; the tensioning roller 136 is rotatably connected to the tensioning roller door-type fixing seat 135. Driving the pressing mechanism 130 can further control a state of the composite film in the unwinding mechanism.

[0037] The wafer film transfer mechanism 400 includes an upper adsorption device 410 that moves up and down and a lower movable suction cup 420 that moves horizontally. The lower movable suction cup 420 reciprocates along the moving direction of the composite film, so that the lower movable suction cup 420 moves with the composite film. The upper adsorption device 410 and the lower movable suction cup 420 continuously control the movement of the composite film. The lower movable suction cup 420 receives the composite film transmitted by the film placing mechanism 100. The composite film is adsorbed by the lower movable suction cup 420 and continues to be transported along the moving direction of the composite film. The driving pressing mechanism 130 can adjust the composite film between the film placing mechanism 100 and the film transfer mechanism 400, so that the composite film still maintains a controlled state between the film placing mechanism 100 and the film transfer mechanism 400, so that the composite film is always in a tensioned state.

[0038] The upper adsorption device 410 is driven by the vertical servo module 200 to move up and down through the adjustable pressure type moving seat 411, and the lower moving suction cup 420 drives the composite film to move to the film cutting position, and the upper adsorption device 410 moves down, so that the upper adsorption device 410 and the lower moving suction cup 420 adsorb the composite film at the same time. After the film cutting is completed, the upper adsorption device 410 moves up, the lower moving suction cup 420 is reset, and the upper adsorption device 410 moves down, so that the upper adsorption device 410 and the lower moving suction cup 420 adsorb the composite film again at the same time. The mutual cooperation between the lower moving suction cup 420 and the upper adsorption device 410 ensures that the composite film is always controlled during the conveying process, so that the composite film always maintains a tensioned state.

[0039] The upper adsorption device 410 includes: an upper negative pressure source 412, an adsorption linear bearing 413 and a fixed position suction cup, the upper negative pressure source 412 is arranged on the adjustable pressure type movable seat 411, the adsorption linear bearing 413 includes an adsorption linear bearing sleeve and an adsorption linear bearing shaft, the adsorption linear bearing sleeve is fixed on the top of the adjustable pressure type movable seat 411, the adsorption linear bearing shaft passes through the adsorption linear bearing sleeve, an adsorption linear bearing shaft limit block 415 is arranged on the top of the adsorption linear bearing shaft, the direction of the adsorption linear bearing 413 is consistent with the moving direction of the adjustable pressure type movable seat 411; a suction cup floating mounting plate is arranged at the bottom, a spring is arranged between the suction cup floating mounting plate and the adjustable pressure type movable seat 411, the fixed position suction cup 414 is connected to the bottom of the suction cup floating mounting plate, and the fixed position suction cup 414 is connected to the upper negative pressure source 412 through the upper airway.

[0040] In one embodiment, the fixed suction cup 414 may be a plate-mounted structure that is larger than the width of the composite film, so that when the upper adsorption device 410 adsorbs the composite film, it can ensure that the composite film is subjected to uniform force.

[0041] In another embodiment, the fixed position suction cup 414 can also be a small circular suction cup. Multiple fixed position suction cups 414 and adsorption linear bearings 413 can be set, and the adsorption linear bearings 413 are evenly distributed on the edge of the adjustable pressure movable seat 411, so that the upper adsorption device 410 can ensure that the force on the composite film is uniform when adsorbing the composite film.

[0042] The end of the adjustable pressure movable seat 411 is connected with a film cutting mechanism 700, which includes a rodless cylinder, a guide rod cylinder and a cutting knife. The rodless cylinder is installed at the end of the adjustable pressure movable seat 411. The guide rod direction of the rodless cylinder is perpendicular to the running direction of the composite film. The guide rod is slidably connected to the guide rod, and the output end of the guide rod cylinder is connected with a cutting knife. After the lower movable suction cup 420 moves into position along the moving direction of the composite film, the cutting knife cuts the PE film through the guide rod cylinder. The upper adsorption device 410 moves up to complete the handover between the upper adsorption device 410 and the lower movable suction cup 420, and the lower movable suction cup 420 is reset to return to the initial state. When the film transfer mechanism 400 conveys the composite film to the film cutting position, the cutting knife controlled by the rodless cylinder and the guide rod cylinder can accurately cut the PE film and retain the release film. The release film is moved out of the lower movable suction cup 420 by the lower movable suction cup 420 when the next cycle of film transfer is carried out.

[0043] The upper adsorption device 410 also includes a mobile adsorption roller pressing mechanism 430, which includes: a floating roller cylinder 431, a floating plate 432, a floating roller door-type fixed seat 433, a floating linear bearing 434 and a floating roller 435; the floating roller cylinder 431 is fixedly connected to the adjustable pressure type movable seat 411, the floating plate 432 is fixed to the end of the piston rod of the floating roller cylinder 431, and the moving direction is consistent with the moving direction of the adjustable pressure type movable seat 411, and floating linear bearings 434 are arranged on both sides of the floating plate 432. The floating linear bearing 434 includes a floating linear bearing sleeve and a floating linear bearing shaft. The floating linear bearing sleeve is fixed on the floating plate 432, and the floating linear bearing shaft passes through the floating linear bearing sleeve. A floating linear bearing shaft limit block is arranged on the top of the floating linear bearing shaft, and the bottom is connected to the floating roller door-type fixed seat 433. The floating roller 435 is rotatably connected to the floating roller door-type fixed seat 433. The floating roller cylinder 431 controls the floating plate 432 to move up and down, and drives the entire floating roller gate-type fixing seat 433 and the floating roller 435 to move up and down through the limit block of the floating linear bearing shaft. The pressure of the floating roller 435 on the composite film is the gravity of the floating roller gate-type fixing seat 433 and the floating roller 435. When the end of the composite film is conveyed by the lower moving suction cup 420, there is a certain angle between the composite film and the lower moving suction cup 420. The floating roller 435 relies on its own gravity to press the composite film to the lower moving suction cup 420, so that the air between the composite film and the lower moving suction cup 420 is discharged, so that when the composite film is adsorbed by the lower moving suction cup 420, no wrinkles will appear.

[0044] The lower movable suction cup 420 is provided with a lower negative pressure source, and the top of the lower movable suction cup 420 is divided into a discharge position 421 and a pick-up position 422. The tops of the discharge position 421 and the pick-up position 422 are both provided with air holes, and the air holes are connected to the lower negative pressure source through the lower adsorption air channel, and the air holes of the discharge position 421 and the pick-up position 422 are connected to different lower negative pressure sources.

[0045] In one embodiment, the air holes on the top of the lower suction cup are evenly distributed at the receiving position, and air holes are also opened at the adjacent positions of the discharge position 421 and the material taking position 422, and a lower negative pressure source is set. When the film is transferred, the composite film located at the discharge position 421 and the material taking position 422 is always adsorbed.

[0046] The film sticking mechanism 500 includes: a mobile servo module 510, a mobile adsorption base 520 and a mobile adsorption device 530 installed on a frame 600, the mobile adsorption base 520 is installed in a component that moves up and down of the mobile servo module 510, the mobile adsorption device 530 is installed on the mobile adsorption base 520, the mobile adsorption device 530 includes a mobile adsorption linear bearing 531, a mobile adsorption negative pressure source and a mobile adsorption fixed position suction cup 532, the mobile adsorption linear bearing 531 includes a mobile adsorption linear bearing sleeve and a mobile adsorption linear bearing shaft, the mobile adsorption linear bearing sleeve is fixed on the mobile adsorption base 520, the mobile adsorption linear bearing shaft passes through the mobile adsorption linear bearing sleeve, a mobile adsorption limit block 533 is arranged on the top of the mobile adsorption linear bearing shaft, a mobile adsorption fixed position suction cup 532 is connected to the bottom, and the mobile adsorption negative pressure source is connected to the mobile adsorption fixed position suction cup 532 through a mobile adsorption airway. When the mobile adsorption fixed position suction cup 532 adsorbs the PE film at the material taking position 422, the PE film can be completely separated from the lower moving mechanism, and the mobile servo module 510 is moved to the air floating platform 800, and then the film is attached. During the whole process, the PE film is completely adsorbed under the mobile adsorption fixed position suction cup 532, and there will be no wrinkles or curling.

[0047] The mobile servo module 510 includes a mobile vertical servo module 512 and a mobile horizontal servo module 511 . The mobile horizontal servo module 511 is mounted on the frame 600 . The mobile vertical servo module 512 is slidably connected to the mobile horizontal servo module 511 . The mobile adsorption base 520 is slidably connected to the mobile vertical servo module 512 .

[0048] The mobile adsorption base 520 is provided with a rolling mechanism 540, which includes a rolling cylinder 541, a rolling floating plate 542, a rolling linear bearing 543, a roller gate seat 544 and a roller 545. The rolling cylinder 541 is fixed on the mobile adsorption base 520, and the rolling floating plate 542 is connected to the end of the piston rod of the rolling cylinder 541; the rolling linear bearing 543 includes a rolling linear bearing sleeve and a rolling linear bearing shaft, and the rolling linear bearing sleeve is fixed to the rolling floating plate 542. At the top of plate 542, the roller linear bearing shaft passes through the roller linear bearing sleeve. The top of the roller linear bearing shaft is provided with a roller limit block, and the bottom is connected to the roller seat. The roller is rotatably connected in the roller gate seat 544. The roller cylinder 541 controls the roller floating plate 542 to move up and down, and drives the entire roller gate seat 544 and roller 545 to move up and down through the roller limit block of the roller linear bearing shaft. The pressure of roller 545 on the PE film is the gravity of roller gate seat 544 and roller 545. When the film sticking mechanism 500 is reset, roller 545 can rely on its own gravity to apply pressure to the PE film attached to the surface of the wafer, which can make the PE film stick more firmly. Prevent detachment.

[0049] Working process: install the whole roll of composite film on the air expansion shaft 124, pass the end of the composite film from the bottom of the first driven reversing roller 122 to the top of the anti-static driving roller 121, then pass from the bottom of the tensioning roller 136, pass from the top of the second driven reversing roller 123, and enter the film transfer mechanism 400. The lower moving suction cup 420 moves the adsorbed composite film. During the movement, the mobile adsorption roller pressing mechanism 430 can tightly contact the composite film with the lower moving suction cup 420. The lower moving suction cup 420 moves the adsorbed composite film to the film cutting position. The film cutting mechanism 700 can accurately cut the PE film and retain the release film through the cutting knife controlled by the rodless cylinder and the guide rod cylinder. The release film is moved out of the lower moving suction cup 420 and enters the drain groove when the lower moving suction cup 420 performs the next cycle of film transfer. After the film attaching mechanism 500 removes the cut PE film, the upper adsorption device 410 moves the composite film upward, the lower movable suction cup 420 is reset, and then the upper adsorption device 410 drives the composite film to move downward to the suction cup 420, and the lower movable suction cup 420 re-adsorbs the composite film. The film attaching mechanism 500 attaches the square PE film to the wafer surface, and when the film attaching mechanism is reset, the roller pressing mechanism 540 tightly attaches the square PE film to the wafer surface.

[0050] The present invention discloses a wafer splitting conveying and cutting mechanism. Under the joint action of an anti-static driving roller 121 and an electromagnetic brake 1211 connected to an air expansion shaft 124, the composite film is always in a tensioned state in the film placing mechanism 100. When the film transfer mechanism 400 is working, it is ensured that the composite film is always controlled by an upper adsorption device 410 or a lower moving suction cup 420 during the movement. The driving pressing mechanism 130 in the film placing mechanism 100 can adjust the composite film between the film placing mechanism 100 and the film transfer mechanism 400 to always be in a tensioned state. The film transfer mechanism 400 ensures that the composite film is always in a tensioned state during the conveying process. The rodless cylinder and the guide rail cylinder in the cutting mechanism can control the cutting knife to accurately cut the composite film. The film pasting mechanism 500 pastes the PE film after cutting on the wafer, and the roller pressing mechanism 540 in the film pasting mechanism 500 can paste the PE film more firmly.

[0051] The technical means disclosed in the scheme of the present invention are not limited to the technical means disclosed in the above-mentioned implementation mode, but also include technical schemes composed of any combination of the above-mentioned technical features. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications are also regarded as the protection scope of the present invention.

Claims

1. Wafer splitting conveying and cutting mechanism, including film placing mechanism, film moving mechanism, film cutting mechanism and film sticking mechanism, characterized in that: The composite film is in a controlled state in the film placing mechanism, the film moving mechanism, the film cutting mechanism and the film sticking mechanism, so as to keep the composite film always taut; the composite film comprises a PE film and a release film; The film unwinding mechanism comprises a film unwinding roller system arranged on a film unwinding fixing frame, and the film unwinding roller system comprises an anti-static driving roller, an air expansion shaft and an electromagnetic brake connected to the air expansion shaft; the air expansion shaft is used to fix the composite film roll, the anti-static driving roller drives the composite film to be transported, and the electromagnetic brake connected to the anti-static driving roller and the air expansion shaft cooperate with each other to tighten the composite film; The film moving mechanism includes an upper adsorption device that moves up and down and a lower moving suction cup that moves horizontally. The lower moving suction cup reciprocates along the moving direction of the composite film, so that the lower moving suction cup moves with the PE film; the upper adsorption device and the lower moving suction cup continuously control the movement of the composite film; The upper adsorption device is driven by the vertical servo module to move up and down through the adjustable pressure type moving seat, the lower moving suction cup drives the composite film to move to the film cutting position, and the upper adsorption device moves down, so that the upper adsorption device and the lower moving suction cup adsorb the composite film at the same time. After the film cutting is completed, the upper adsorption device moves up, the lower moving suction cup is reset, and the upper adsorption device moves down, so that the upper adsorption device and the lower moving suction cup adsorb the composite film again at the same time; The upper adsorption device comprises: an upper negative pressure source, an adsorption linear bearing and a fixed position suction cup, the upper negative pressure source is arranged on the adjustable pressure type movable seat, the adsorption linear bearing comprises an adsorption linear bearing sleeve and an adsorption linear bearing shaft, the adsorption linear bearing sleeve is fixed on the top of the adjustable pressure type movable seat, the adsorption linear bearing shaft passes through the adsorption linear bearing sleeve, an adsorption linear bearing shaft limit block is arranged on the top of the adsorption linear bearing shaft, and the direction of the adsorption linear bearing is consistent with the moving direction of the adjustable pressure type movable seat; a suction cup floating mounting plate is arranged at the bottom, a spring is arranged between the suction cup floating mounting plate and the adjustable pressure type movable seat, the fixed position suction cup is connected to the bottom of the suction cup floating mounting plate, and the fixed position suction cup is connected to the upper negative pressure source through the upper airway; the upper adsorption device also comprises a mobile adsorption roller pressing mechanism, the mobile adsorption roller pressing mechanism comprises: a floating pressing roller cylinder, a floating plate, a floating pressing roller door-type fixing seat, a floating straight Linear bearing and floating pressure roller; the floating pressure roller cylinder is fixedly connected to the adjustable pressure type moving seat, the floating plate is fixed to the end of the piston rod of the floating pressure roller cylinder, and the moving direction is consistent with the moving direction of the adjustable pressure type moving seat. Floating linear bearings are arranged on both sides of the floating plate, and the floating linear bearings include a floating linear bearing sleeve and a floating linear bearing shaft. The floating linear bearing sleeve is fixed to the floating plate, and the floating linear bearing shaft passes through the floating linear bearing sleeve. A floating linear bearing shaft limit block is arranged on the top of the floating linear bearing shaft, and the bottom is connected to the floating pressure roller door-type fixed seat, and the floating pressure roller is rotatably connected to the floating pressure roller door-type fixed seat; the floating cylinder controls the floating plate to move up and down, and drives the entire floating pressure roller door-type fixed seat and the floating pressure roller to move up and down through the limit block of the floating linear bearing shaft, and the pressure of the floating pressure roller on the PE film is the gravity of the floating pressure roller door-type fixed seat and the floating pressure roller.

2. The wafer splitting conveying and cutting mechanism according to claim 1, characterized in that: The film placing rollers arranged on the film placing fixing frame are arranged in the following order according to the moving direction of the composite film: the air expansion shaft is used to fix the composite film roll, the end of the air expansion shaft is connected with an electromagnetic brake, the first driven reversing roller reverses the composite film for the first time, the anti-static driving roller drives the composite film to move, the tensioning roller is used to tension the composite film so that the composite film contacts the anti-static driving roller, and the second driven reversing roller outputs the composite film to the lower moving suction cup; the tensioning roller is controlled by a driving pressing mechanism, and the driving pressing mechanism includes a pressing cylinder seat , driving the downward pressure cylinder, the tensioning downward pressure plate, the guide rail, the tensioning pressure roller door-type fixing seat and the tensioning pressure roller; the downward pressure cylinder seat is fixed on the top of the film placing fixing frame; the driving downward pressure cylinder is fixed on the top of the downward pressure cylinder seat, and the piston rod of the driving downward pressure cylinder penetrates the downward pressure cylinder seat and enters the inside of the film placing fixing frame; the guide rail is fixed on the side wall of the fixing frame, and the direction of the guide rail is consistent with the direction of the piston rod of the driving downward pressure cylinder; the tensioning pressure roller door-type fixing seat is fixed on the end of the piston rod of the driving downward pressure cylinder and slides in the guide rail; The tensioning roller is rotatably connected to the tensioning roller door-type fixing seat.

3. The wafer splitting conveying and cutting mechanism according to claim 1, characterized in that: The end of the adjustable pressure type movable seat is connected with a film cutting mechanism, which includes a rodless cylinder, a guide rod cylinder and a cutting knife. The rodless cylinder is installed at the end of the adjustable pressure type movable seat. The guide rod direction of the rodless cylinder is perpendicular to the running direction of the composite film. The guide rod is slidably connected with the guide rod cylinder, and the output end of the guide rod cylinder is connected with the cutting knife. After the lower movable suction cup moves into place along the moving direction of the composite film, the cutting knife cuts the PE film through the guide rod cylinder. The upper adsorption device moves upward to complete the handover between the upper adsorption device and the lower movable suction cup, and the lower movable suction cup is reset to return to the initial state.

4. The wafer splitting conveying and cutting mechanism according to claim 3, characterized in that: The lower movable suction cup is provided with a lower negative pressure source, and the top of the lower movable suction cup is divided into a discharge position and a pick-up position. The tops of the discharge position and the pick-up position are both provided with air holes, and the air holes are connected to the lower negative pressure source through the lower adsorption air channel, and the air holes of the discharge position and the pick-up position are connected to different lower negative pressure sources.

5. The wafer splitting conveying and cutting mechanism according to claim 4, characterized in that: The film sticking mechanism includes: a mobile servo module, a mobile adsorption base and a mobile adsorption device installed on a frame, the mobile adsorption base is installed in a component that moves up and down of the mobile servo module, the mobile adsorption device is installed on the mobile adsorption base, the mobile adsorption device includes a mobile adsorption linear bearing, a mobile adsorption negative pressure source and a mobile adsorption fixed position suction cup, the mobile adsorption linear bearing includes a mobile adsorption linear bearing sleeve and a mobile adsorption linear bearing shaft, the mobile adsorption linear bearing sleeve is fixed on the mobile adsorption base, the mobile adsorption linear bearing shaft passes through the mobile adsorption linear bearing sleeve, a mobile adsorption limit block is arranged on the top of the mobile adsorption linear bearing shaft, a mobile adsorption fixed position suction cup is connected to the bottom, and the mobile adsorption negative pressure source is connected to the mobile adsorption fixed position suction cup through a mobile adsorption airway.

6. The wafer splitting conveying and cutting mechanism according to claim 5, characterized in that: A rolling mechanism is provided on the mobile adsorption base, and the rolling mechanism includes a rolling cylinder, a rolling floating plate, a rolling linear bearing, a roller gate seat and a roller. The rolling cylinder is fixed on the mobile adsorption base, and the rolling floating plate is connected to the end of the rolling cylinder piston rod; the rolling linear bearing includes a rolling linear bearing sleeve and a rolling linear bearing shaft, the rolling linear bearing sleeve is fixed on the top of the rolling floating plate, the rolling linear bearing shaft passes through the rolling linear bearing sleeve, a rolling limit block is provided on the top of the rolling linear bearing shaft, and the bottom is connected to the roller seat, and the roller is rotatably connected in the roller gate seat; the rolling cylinder controls the roller floating plate to move up and down, and drives the entire roller gate seat and the roller to move up and down through the rolling limit block of the roller linear bearing shaft, and the pressure of the roller on the PE film is the gravity of the roller gate fixed seat and the roller.

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