Array substrate, display panel and electronic device

Abstract

The application provides an array substrate, a display panel and an electronic device, the array substrate comprises a test structure, the test structure at least comprises a first test structure, the first test structure is used for testing the electrical property of a flexible substrate of the array substrate, and the first test structure comprises: a flexible substrate; a barrier layer arranged on the flexible substrate; a test electrode layer comprising a first test electrode and a second test electrode, the first test electrode is in contact with the barrier layer, and the second test electrode is in contact with the flexible substrate. By arranging the test structure in the array substrate, when the electrical property of the flexible substrate is tested, an external test probe is used to input a test voltage to the first test electrode and the second test electrode, the test structure is used for monitoring the electrical property of the flexible substrate of the array substrate, the performance of a thin film transistor device in the array substrate is facilitated to be researched, and the design of the array substrate is facilitated.

Description

Technical Field

[0001] The present application relates to the field of display, and in particular to an array substrate, a display panel and an electronic device. Background Art

[0002] With the advancement of display technology, flexible display panels have become a core development in the display field. Currently, polyimide is widely used as the substrate material for flexible substrates. Its electrical properties have a significant impact on the performance and stability of thin-film transistor devices. However, current production lines are unable to monitor the electrical properties of flexible substrates. Summary of the Invention

[0003] The present invention provides an array substrate, a display panel and an electronic device for monitoring the electrical properties of a flexible substrate.

[0004] To solve the above problems, the technical solutions provided by the present invention are as follows:

[0005] The present invention provides an array substrate, the array substrate including a test structure, the test structure including at least a first test structure, the first test structure being used to test the electrical properties of a flexible substrate of the array substrate, the first test structure including:

[0006] Flexible substrate;

[0007] a barrier layer, disposed on the flexible substrate;

[0008] The test electrode layer includes a first test electrode and a second test electrode, wherein the first test electrode contacts the barrier layer, and the second test electrode contacts the flexible substrate.

[0009] Optionally, in some embodiments of the present invention, the flexible substrate includes a first organic substrate, a second organic substrate, and an inorganic substrate located between the first and second organic substrates, wherein the second organic substrate is located between the barrier layer and the inorganic substrate. The first test electrode is disposed on and in contact with the barrier layer; the second test electrode is in contact with the first organic substrate and is insulated from the second organic substrate.

[0010] Optionally, in some embodiments of the present invention, the first test structure includes a first opening, the first opening passes through the barrier layer, the second organic substrate and the inorganic substrate, the second test electrode is arranged on the first organic substrate and is located in the first opening, the second test electrode is in direct contact with the first organic substrate and is spaced apart from the second organic substrate.

[0011] Optionally, in some embodiments of the present invention, the first test structure includes a second opening, the second opening passes through the barrier layer, the second organic substrate, the inorganic substrate and the first organic substrate, the second test electrode is located in the first opening, the second test electrode is in direct contact with the first organic substrate, and is spaced apart from the second organic substrate.

[0012] Optionally, in some embodiments of the present invention, the test structure further includes a second test structure, and the second test structure is used to test the electrical properties of the second organic substrate, and the second test structure includes:

[0013] the second organic substrate;

[0014] the barrier layer;

[0015] A third test electrode and a fourth test electrode are provided in the test electrode layer, the third test electrode contacts the barrier layer, and the fourth test electrode contacts the second organic substrate.

[0016] Optionally, in some embodiments of the present invention, the first test electrode and the third test electrode are the same test electrode.

[0017] Optionally, in some embodiments of the present invention, the test structure further includes a third test structure, and the third test structure is used to test the electrical properties of the first organic substrate, and the third test structure includes:

[0018] the first organic substrate;

[0019] the inorganic substrate;

[0020] A fifth test electrode and a sixth test electrode are provided in the test electrode layer, the fifth test electrode contacts the inorganic substrate, and the sixth electrode contacts the first organic substrate.

[0021] Optionally, in some embodiments of the present invention, the array substrate includes the flexible substrate, the barrier layer, the thin film transistor layer, the planarization layer, and the electrode layer arranged in sequence, the thin film transistor layer includes an active layer, a gate layer, and a source-drain layer; the test electrode layer and any one of the source-drain layer, the gate layer, and the electrode layer are the same film layer.

[0022] The present invention further provides a display panel, comprising the array substrate provided by any one embodiment of the present invention.

[0023] The present invention further provides an electronic device, comprising the array substrate provided by any embodiment of the present invention.

[0024] The present invention provides an array substrate, a display panel, and an electronic device. The present invention provides a test structure within the array substrate. When testing the electrical properties of a flexible substrate, an external test probe is used to input a test voltage to the first test electrode and the second test electrode, thereby characterizing the electrical properties of the flexible substrate, such as volume resistance, surface resistance, dielectric constant, and electrostatic accumulation value. In this way, the test structure can be used to monitor the electrical properties of the flexible substrate of the array substrate, which facilitates performance research of thin-film transistor devices within the array substrate and is beneficial to the design of the array substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The following detailed description of the specific embodiments of the present application in conjunction with the accompanying drawings will make the technical solutions and other beneficial effects of the present application apparent.

[0026] Figure 1 A schematic diagram of a first structure of an array substrate provided by an embodiment of the present invention;

[0027] Figure 2 A schematic diagram of a second structure of an array substrate provided by an embodiment of the present invention;

[0028] Figure 3 A schematic diagram of a second structure of an array substrate provided by an embodiment of the present invention;

[0029] Figure 4 A third structural schematic diagram of an array substrate provided in an embodiment of the present invention;

[0030] Figure 5 This is a schematic diagram of the fourth structure of the array substrate provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0031] The following will be combined with the specific embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments and / or examples of the present invention. Obviously, the embodiments and / or examples described below are only part of the embodiments and / or examples of the present invention, rather than all the embodiments and / or examples. Based on the embodiments and / or examples in the present invention, all other embodiments and / or examples obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0032] Directional terms used in this disclosure, such as [upper], [lower], [left], [right], [front], [back], [inner], [outer], and [side], are used solely to refer to directions in the accompanying drawings. Therefore, the directional terms used are intended to illustrate and understand the present disclosure, not to limit it. Terms such as "first," "second," and the like are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features being referenced. Therefore, a feature designated as "first," "second," and the like may explicitly or implicitly include one or more of such features.

[0033] In view of the fact that the existing technology cannot monitor the electrical properties of the flexible substrate, the present invention provides an array substrate to solve this problem.

[0034] In one embodiment, see Figure 1 , Figure 1 FIG. 1 shows a first structural diagram of an array substrate provided by an embodiment of the present invention. Figure 1 As shown, the array substrate provided in the embodiment of the present invention includes a test structure, which includes at least a first test structure 1. The first test structure 1 is used to test the electrical performance of the flexible substrate 10 of the array substrate. The first test structure 1 includes:

[0035] Flexible substrate 10;

[0036] a barrier layer 20 , provided on the flexible substrate 10 ;

[0037] The test electrode layer 30 includes a first test electrode 301 and a second test electrode 302 . The first test electrode 301 contacts the barrier layer 20 , and the second test electrode 302 contacts the flexible substrate 10 .

[0038] The embodiment of the present invention provides a test structure in the array substrate and utilizes the test structure to monitor the electrical performance of the flexible substrate of the array substrate, thereby facilitating the performance research of the thin film transistor device in the array substrate and facilitating the design of the array substrate.

[0039] The first test structure 1 tests the electrical properties of the flexible substrate 10 by inputting a test voltage to the first test electrode 301 and the second test electrode 302 through a test probe, thereby characterizing the electrical properties of the flexible substrate 10, such as volume resistance, surface resistance, dielectric constant, and electrostatic accumulation value.

[0040] For details, please refer to Figure 1, the array substrate includes a thin film transistor area and a test area, the array substrate includes a thin film transistor T in the thin film transistor area, and the test structure is located in the test area. In the thin film transistor area, the array substrate includes the flexible substrate 10, the barrier layer 20, the thin film transistor layer, and the electrode layer 50. The thin film transistor layer is provided on the barrier layer 20, and includes an active layer 41, a first insulating layer 42, a gate layer 43, a second insulating layer 44, a source and drain layer 45, and a planarization layer 46 stacked in sequence, the active layer 42 includes the active area of ​​the thin film transistor, the gate layer 43 includes the gate of the thin film transistor, and the source and drain layer 45 includes the source and drain of the thin film transistor. The thin film transistor layer can also be arranged in other ways, such as a bottom gate structure, a double gate structure, a double source and drain layer structure, etc., Figure 1 This is only used to explain the array substrate provided by the embodiment of the present invention and does not limit the array substrate. The electrode layer 50 is provided on the thin film transistor layer and is connected to the source or the drain through a via hole.

[0041] In one embodiment, the flexible substrate 10 may be a single-layer flexible substrate made of organic material, or a flexible substrate made of multiple film layers. Figure 1 Taking the flexible substrate shown in FIG. 1 as an example, the array substrate provided by the present invention is described in detail. The flexible substrate 10 includes a first organic substrate 11, an inorganic substrate 12, and a second organic substrate 13. The inorganic substrate 12 is positioned between the first organic substrate 11 and the second organic substrate 13, and the second organic substrate 13 is positioned between the barrier layer 20 and the inorganic substrate 12. The inorganic substrate 12 is typically an inorganic film layer such as silicon nitride, silicon oxide, or silicon oxynitride. The barrier layer is also typically made of silicon nitride, silicon oxide, or silicon oxynitride.

[0042] In one embodiment, the test structure includes a first test structure 1, a second test structure 2, and a third test structure 3. The first test structure 1 is used to test the electrical properties of the flexible substrate 10, the second test structure 2 is used to test the electrical properties of the second organic substrate 13, and the third test structure 3 is used to test the electrical properties of the first organic substrate 11.

[0043] The first test electrode 301 of the first test structure 1 is disposed on the barrier layer 20 and in contact with the barrier layer 20 ; the second test electrode 302 is in contact with the first organic substrate 11 and insulated from the second organic substrate 13 .

[0044] In one embodiment, see Figure 2 , Figure 2A second structural diagram of an array substrate provided by an embodiment of the present invention is shown. Figure 1 Schematic diagram of the first amplified structure of the first test structure 1. Figure 2 As shown, the first test structure 1 includes a first opening 307 that penetrates the barrier layer 20, the inorganic substrate 12, and the second organic substrate 13. The second test electrode 302 is disposed on the first organic substrate 11 and located within the first opening 307. The second test electrode 302 is in direct contact with the first organic substrate 11 and is insulated from the second organic substrate 13. Specifically, the thickness of the second test electrode 302 is less than that of the inorganic substrate 12.

[0045] Furthermore, the first test structure 1 further includes an organic filling layer 70 . The organic filling layer 70 is disposed on the first test electrode 301 , covers the first test electrode 301 , the second test electrode 302 , and the barrier layer 20 , and fills the first opening 307 .

[0046] In another embodiment, see Figure 3 , Figure 3 A third structural diagram of an array substrate provided by an embodiment of the present invention is shown. Figure 1 Schematic diagram of a second enlarged structure of the first test structure 1 in FIG. The first test structure 1 includes a second opening 308 that penetrates the barrier layer 20, the first organic substrate 11, the inorganic substrate 12, and the second organic substrate 13. The second test electrode 302 is located within the second opening 308. The second test electrode 302 is in direct contact with the first organic substrate 11 and is insulated from the second organic substrate 13. Specifically, the thickness of the second test electrode 302 is less than the combined thickness of the first organic substrate 11 and the inorganic substrate 12.

[0047] like Figure 1 As shown, the second test structure 2 includes: the second organic substrate 13, the barrier layer 20, a third test electrode 303 and a fourth test electrode 304. The third test electrode 303 and the fourth test electrode 304 are arranged in the test electrode layer 30, the third test electrode 303 is in contact with the barrier layer 20, and the fourth test electrode 304 is in contact with the second organic substrate 13.

[0048] In one embodiment, see Figure 4 , Figure 4 A fourth structural diagram of an array substrate provided by an embodiment of the present invention is shown. Figure 1The fourth test electrode 304 is provided on the barrier layer 20 and contacts the second organic substrate 13 via a via hole penetrating the barrier layer 20 or a via hole penetrating the barrier layer 20 and the second organic substrate 13.

[0049] In another embodiment, see Figure 5 , Figure 5 A fifth structural diagram of an array substrate provided by an embodiment of the present invention is shown, specifically Figure 1 Schematic diagram of a second enlarged structure of the second test structure 2 in FIG. The second test structure 2 includes a third opening 309 that extends through the barrier layer 20. The fourth test electrode 304 is disposed on the second organic substrate 13 and located within the third opening 309, directly contacting the second organic substrate 13. In other embodiments, the third opening 309 may extend through the barrier layer 20 and the second organic substrate 13, such that the fourth test electrode 304 is disposed on the inorganic substrate 12 and directly contacting the second organic substrate 13.

[0050] Since the first test electrode 301 and the third test electrode 303 are both provided on the barrier layer 20 , the first test electrode 301 and the third test electrode 303 can be the same test electrode, which can reduce the number of test electrodes, reduce the area of ​​the test area, and simplify the preparation process.

[0051] like Figure 1 As shown, the third test structure 3 includes: the first organic substrate 11, the inorganic substrate 12, a fifth test electrode 305, and a sixth test electrode 306. The fifth test electrode 305 and the sixth test electrode 306 are disposed within the test electrode layer 30. The fifth test electrode 305 contacts the inorganic substrate 12, and the sixth test electrode 306 contacts the first organic substrate 11. In one embodiment, the fifth test electrode 305 and the fourth test electrode 304 are the same test electrode, and the sixth test electrode 306 and the second test electrode 302 are the same test electrode.

[0052] In one embodiment, the test electrode layer 30 is the same film layer as any one of the gate layer 43, the source / drain electrode layer 45, and the electrode layer 50. Preferably, the test electrode layer 30 is the same film layer as the source / drain electrode layer 45. When the test electrode layer 30 is the gate layer 43 or the source / drain electrode layer 45, the organic filling layer 70 and the planarization layer 46 may be the same film layer.

[0053] In one embodiment, when the array substrate is applied to an OLED display panel, the array substrate further includes a pixel definition layer 60 , and the organic filling layer 70 and the pixel definition layer 60 are the same film layer.

[0054] Accordingly, an embodiment of the present invention provides a display panel, comprising an array substrate provided by an embodiment of the present invention. Because the display panel comprises the array substrate provided by an embodiment of the present invention, it possesses the technical features and effects of any array substrate provided by any embodiment of the present invention. For details, please refer to the above-mentioned specific embodiments, which will not be described in detail here. The display panel includes an OLED display panel, an LCD display panel, a micro LED display panel, and the like.

[0055] The present invention also provides an electronic device including the array substrate provided in the present invention. The electronic device protected by the present invention is any electronic device applicable to the array substrate provided in the present invention, including but not limited to the display panel described above.

[0056] In summary, the embodiments of the present invention provide an array substrate, a display panel, and an electronic device. The present invention sets a test structure in the array substrate. When testing the electrical properties of the flexible substrate, an external test probe is used to input a test voltage to the first test electrode and the second test electrode, thereby characterizing the electrical properties of the flexible substrate, such as the volume resistance, surface resistance, dielectric constant, and electrostatic accumulation value. In this way, the test structure can be used to monitor the electrical properties of the flexible substrate of the array substrate, which facilitates the performance research of the thin film transistor device in the array substrate and is beneficial to the design of the array substrate.

[0057] The array substrate, display panel and electronic device provided in the embodiments of the present invention are introduced in detail above. Specific examples are used herein to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea. At the same time, for those skilled in the art, according to the ideas of the present invention, there may be changes in the specific implementation methods and application scopes. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. An array substrate, characterized in that: The test structure includes at least a first test structure, and the first test structure is used to test the electrical performance of the flexible substrate of the array substrate. The first test structure includes: Flexible substrate; a barrier layer, disposed on the flexible substrate; a test electrode layer, comprising a first test electrode and a second test electrode, wherein the first test electrode contacts the barrier layer, and the second test electrode contacts the flexible substrate; wherein the orthographic projection of the first test electrode on the flexible substrate does not overlap with the orthographic projection of the second test electrode on the flexible substrate; The flexible substrate includes a first organic substrate, a second organic substrate, and an inorganic substrate located between the first organic substrate and the second organic substrate, the second organic substrate is located between the barrier layer and the inorganic substrate, the first test electrode is arranged on the barrier layer and in contact with the barrier layer, and the second test electrode is in contact with the first organic substrate and insulated from the second organic substrate.

2. The array substrate according to claim 1, wherein: The first test structure includes a first opening, which passes through the barrier layer, the second organic substrate and the inorganic substrate. The second test electrode is arranged on the first organic substrate and located in the first opening. The second test electrode is in direct contact with the first organic substrate and is spaced apart from the second organic substrate.

3. The array substrate according to claim 2, wherein: The first test structure includes a second opening, which passes through the barrier layer, the second organic substrate, the inorganic substrate and the first organic substrate. The second test electrode is located in the first opening. The second test electrode is in direct contact with the first organic substrate and is spaced apart from the second organic substrate.

4. The array substrate according to claim 1, wherein: The test structure further includes a second test structure, which is used to test the electrical properties of the second organic substrate. The second test structure includes: the second organic substrate; the barrier layer; A third test electrode and a fourth test electrode are provided in the test electrode layer, the third test electrode contacts the barrier layer, and the fourth test electrode contacts the second organic substrate.

5. The array substrate according to claim 4, wherein: The first test electrode and the third test electrode are the same test electrode.

6. The array substrate according to claim 4, wherein: The test structure further includes a third test structure, which is used to test the electrical properties of the first organic substrate. The third test structure includes: the first organic substrate; the inorganic substrate; A fifth test electrode and a sixth test electrode are provided in the test electrode layer, the fifth test electrode contacts the inorganic substrate, and the sixth test electrode contacts the first organic substrate.

7. The array substrate according to claim 1, wherein: The array substrate includes the flexible substrate, the barrier layer, the thin film transistor layer, the planarization layer, and the electrode layer arranged in sequence, the thin film transistor layer includes an active layer, a gate layer, and a source-drain layer; the test electrode layer is the same film layer as any one of the source-drain layer, the gate layer, and the electrode layer.

8. A display panel, characterized in that: The display panel includes the array substrate according to any one of claims 1 to 7.

9. An electronic device, characterized in that: The electronic device comprises the array substrate according to any one of claims 1 to 7.

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