Support member, catheter support device and treatment device

By adopting a combined design of elastic members and block members in the catheter support device, the problem of flexible material damage is solved, and the stable connection of the catheter and durability under high frequency movement are achieved, ensuring processing quality and environmental protection.

CN114607734BActive Publication Date: 2024-12-10JUNKOSHA
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Patent Information

Application Number
CN202210349055.8
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Priority Date
2018-10-18
Filing Date
2019-01-18
Publication Date
2024-12-10
Estimated Expiration
2039-01-18

AI Technical Summary

Technical Problem

The flexible material in the existing catheter support device is prone to breakage after a long or multiple reciprocating movements, causing the catheter to lose its support function, affecting the quality of the treatment and possibly causing air pollution.

Method used

Using a support member composed of elastic members and block members, the design of fixed and deformable regions of the block members limits and allows bending of the elastic members to ensure stable connection and transmission characteristics of the conduit and extend the life of the support member.

Benefits of technology

It provides a catheter support member with high durability and excellent reliability, which can maintain stable connection of the catheter during high frequency movement, prevent damage and contamination, and improve the production efficiency and product quality of the treatment device.

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Abstract

The object of the present invention is to provide a support member, a catheter support device and a processing device with excellent durability. The support member of the present invention includes an elastic member and a plurality of block members formed on the elastic member. The support member can be deformed from a shape in which the end faces of the block members are in contact with each other to a shape in which the end faces of the block members are separated from each other. The elastic member includes a fixed area that is fixed to the bottom surface of the block member to limit deformation, and the support member includes a buckling suppression unit that suppresses buckling at a position near the fixed area of ​​the elastic member.
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Description

[0001] This application is a divisional application of the following application:

[0002] Invention name: Support member, catheter support device and treatment device equipped with the catheter support device

[0003] International filing date: January 18, 2019

[0004] International application number: PCT / JP2019 / 001566

[0005] National application number: 201980008913.9 Technical Field

[0006] The present invention relates to a conduit support device that is integrated with a conduit and supports the conduit, for example, it relates to a support member that supports a conduit used in a robot travel device installed in a machining line, a semiconductor manufacturing device, a display device manufacturing device such as a flat panel display, or various processing devices such as an electronic component mounting device, a conduit support device, and a processing device equipped with the conduit support device. Background Art

[0007] In various processing devices such as machining lines, semiconductor manufacturing devices, display device manufacturing devices, and electronic component mounting devices, a robot travel device is installed for holding and transporting workpieces such as processing materials, wafers, and substrates. In the robot travel device, a travel carriage that reciprocates on a track is equipped with, for example, a robot that loads and unloads workpieces. By operating the hand of the robot's arm, the workpiece can be held by the hand and removed from each processing machine.

[0008] The traveling trolley of such a robot traveling device is connected with cables for transmitting electric energy, electric light and other signals, and hoses for conveying gas or liquid or transmitting pressure via gas or liquid (hereinafter, these cables and hoses are referred to as "conduits"). It is necessary to maintain a stable connection of the conduit relative to the traveling trolley that repeatedly reciprocates and changes its position. Therefore, a conduit support device is used to support the conduit by bending a conduit of a fixed length into a U-shape formed by two opposite straight portions and a curved portion connecting the two straight portions, and to change the length of the opposite straight portions according to the position of the traveling trolley to maintain a stable connection of the conduit. Such a support device can also keep the radius of curvature of the conduit above a certain level during the process of changing the position of the traveling trolley. In this way, the transmission characteristics and conveyance of the conduit can be ensured and damage to the conduit can be prevented.

[0009] Patent document 1 describes a catheter support device that can be bent into a U-shape. The catheter support device described in patent document 1 includes a support member having a flexible material and a non-linked solid body mounted on the flexible material. The flexible material is made of, for example, stainless steel or spring steel, and the non-linked solid body is made of, for example, a metal material or a resin material having high compression resistance. The support member has the following structure: bending in a certain direction is restricted by making the non-linked solid bodies contact each other, and on the other hand, bending in the opposite direction is enabled by making the non-linked solid bodies separate from each other. Thus, a support member with high flexibility, low mechanical noise, small bending radius, long service life, and substantially no generation of particulate matter can be provided.

[0010] Prior art literature

[0011] Patent Literature

[0012] Patent Document 1: Japanese Patent No. 4157096 Summary of the invention

[0013] Problems to be solved by the invention

[0014] However, the inventor of the present application has found that the conduit support member described in Patent Document 1 has the following hidden dangers: the flexible material may be damaged after being used for a certain period of time or after a certain number of reciprocating movements. If the flexible material is damaged during use, it loses its function as a support member, and not only cannot properly perform the treatment being carried out, but there is also a hidden danger that the conduit is damaged, which may damage the quality of the treated object being treated, or cause pollution of the surrounding air due to dust, etc.

[0015] The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a catheter support member, a catheter support device, and a treatment device having excellent reliability.

[0016] Solutions for solving problems

[0017] In order to solve the above-mentioned problem, the supporting member described in the scheme of the present application comprises: an elastic member having a first surface extending along a first direction; and a plurality of block members fixed to the elastic member, each having a bottom surface opposite to the first surface of the elastic member and an end surface intersecting the first direction. The supporting member is characterized in that the supporting member can be deformed from a first shape in which the end surfaces of the plurality of block members are connected to each other to a second shape in which the end surfaces of the plurality of block members are separated from each other and the supporting member is bent in a direction with the first surface of the elastic member as the outside. The elastic member includes a first area for limiting deformation by being fixed to the bottom surface of the block member, and the supporting member includes a flexure suppression unit for suppressing the occurrence of flexure at a position near the first area of ​​the elastic member.

[0018] In addition, the supporting member described in the scheme of the present application comprises: an elastic member having a first surface extending along a first direction; and a plurality of block members fixed to the elastic member, each having a bottom surface opposite to the first surface of the elastic member and an end surface intersecting the first direction. The supporting member is characterized in that the supporting member can be deformed from a first shape in which the end surfaces of the plurality of block members are connected to each other to a second shape in which the end surfaces of the plurality of block members are separated from each other and the supporting member is bent in a direction with the first surface of the elastic member as the outside. The elastic member includes: a first area that limits deformation by being fixed to the bottom surface of the block member; and a second area that is connected to the bottom surface of the block member in the first shape and is separated from the bottom surface of the block member in the second shape.

[0019] Furthermore, the supporting member is characterized in that a ratio of a total length of the first regions of the elastic member to a total length of the elastic member is 75% or less.

[0020] In addition, the supporting member is characterized in that the elastic member also includes a third region separated from the bottom surface of the block member in the first shape and separated from the bottom surface of the block member in the second shape, and the proportion of the second region to the total length of the second region and the third region is greater than 10%.

[0021] Furthermore, the supporting member is characterized in that the elastic member is a plate-like member made of SUS301 or SUS304 and having a thickness of 0.1 mm or more.

[0022] Furthermore, the supporting member is characterized in that the block member is composed of a polymer material having a compressive elastic modulus of 1000 MPa or more in a state where no filler is included.

[0023] In addition, the supporting member described in the scheme of the present application comprises: an elastic member, which has a restoring force, has a first surface, and extends along a first direction; and a plurality of block members, which are fixed to the elastic member, and respectively have a bottom surface opposite to the first surface of the elastic member and an end surface intersecting the first direction. The supporting member is characterized in that the supporting member can be deformed from a first shape in which the end surfaces of the plurality of block members are connected to each other to a second shape in which the end surfaces of the plurality of block members are separated from each other and the supporting member is bent in a direction with the first surface of the elastic member as the outside. The elastic member comprises: a plurality of fixed areas, which limit deformation by being fixed to the bottom surface of the block member; and a plurality of deformable areas, which can be bent in the second shape, the total length of the plurality of fixed areas accounts for less than 75% of the total length of the elastic member, and the supporting member comprises a minimum curvature radius limiting portion that limits the minimum curvature radius of the supporting member.

[0024] In addition, the supporting member is characterized in that the multiple block members include a first block member and a second block member adjacent to the first block member, and the minimum curvature radius limiting portion includes: a first abutment surface formed on the first block member; and a second abutment surface formed on the second block member, which is connected to the first abutment surface when the distance between the first block member and the second block member becomes a specified size as the supporting member bends.

[0025] Thus, it is possible to provide a catheter support member, a catheter support device, and a treatment device that are excellent in durability. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 This is a diagram conceptually showing a first embodiment of a supporting member according to the present invention.

[0027] Figure 2 This is a diagram conceptually illustrating a mounting portion of a block member of a support member according to the present invention.

[0028] Figure 3 This is a diagram conceptually showing a second embodiment of the support member of the present invention.

[0029] Figure 4 This is a diagram conceptually showing a third embodiment of the support member of the present invention.

[0030] Figure 5 This is a diagram conceptually showing a fourth embodiment of the support member of the present invention.

[0031] Figure 6 It is a diagram conceptually showing a fifth embodiment of the support member of the present invention.

[0032] Figure 7 It is a diagram conceptually showing a sixth embodiment of the supporting member of the present invention.

[0033] Figure 8 It is a diagram conceptually showing a seventh embodiment of the supporting member of the present invention.

[0034] Fig. 9 This is a diagram conceptually showing an eighth embodiment of the support member of the present invention.

[0035] Fig.10 This is a diagram for explaining a method for manufacturing a supporting member according to the present invention.

[0036] Fig.11 This is a diagram for explaining a method for manufacturing a supporting member according to the present invention.

[0037] Fig.12 It is a diagram conceptually showing a ninth embodiment of the supporting member of the present invention.

[0038] Fig.13 It is a diagram conceptually showing a tenth embodiment of the support member of the present invention.

[0039] Fig.14 This is a diagram conceptually showing an eleventh embodiment of the support member of the present invention.

[0040] Fig.15 It is a diagram conceptually showing a block member of an eleventh embodiment of the supporting member of the present invention.

[0041] Fig.16 It is a cross-sectional view conceptually showing a block member of an eleventh embodiment of the support member of the present invention.

[0042] Fig.17 It is a diagram conceptually showing a twelfth embodiment of the support member of the present invention.

[0043] Fig.18 It is a diagram conceptually showing a block member of a twelfth embodiment of the supporting member of the present invention.

[0044] Fig.19 It is a cross-sectional view conceptually showing a block member of a twelfth embodiment of the support member of the present invention.

[0045] Fig. 20 It is a diagram conceptually showing a thirteenth embodiment of the support member of the present invention.

[0046] Fig.21 It is a diagram conceptually showing a thirteenth embodiment of the support member of the present invention.

[0047] Fig. 22 It is a cross-sectional view conceptually showing the catheter support device of the present invention.

[0048] Fig.23 This is a diagram conceptually showing the processing device of the present invention.

[0049] Fig.24 It is a figure which shows the conventional supporting member. DETAILED DESCRIPTION

[0050] The following is a description of the embodiments of the catheter support member and the catheter support device described in the solution of the present application. It should be noted that the embodiments described below do not limit the invention involved in the solution, and the combination of features described in the embodiments is not necessarily required for the solution of the invention. In addition, various embodiments in each embodiment can be freely combined within the scope of not impairing the technical significance of the present invention.

[0051] The supporting member described in the scheme of the present application comprises: an elastic member; and a plurality of block members arranged and fixed on the upper surface of the elastic member, and having end faces. The end faces of each block member of the supporting member are in contact with the end faces of other adjacent block members, thereby forming a straight shape (first shape) of the supporting member. The end faces of each block member of the supporting member are separated from the end faces of other adjacent block members, thereby forming a curved shape (second shape) of the supporting member. The elastic member includes a fixed area (first area) fixed to the bottom surface of the block member to limit deformation. The supporting member includes a buckling suppression unit that suppresses the occurrence of buckling near the fixed area of ​​the elastic member. By having such a structure, a catheter supporting member, a catheter supporting device and a processing device with excellent reliability can be provided.

[0052] The supporting member CG includes an elastic member EE and a plurality of block members BE arranged on the upper surface thereof. Figure 1 FIG. 1 is a diagram conceptually showing a supporting member in a first embodiment of the present invention. Figure 1 (a) is a view of the supporting member viewed from the upper surface. Figure 1 (b) and Figure 1 (c) is Figure 1 (a) is a cross-sectional view of the support member at the position of X-X. Figure 1 In (a), the elastic member EE is actually hidden by the block member BE and cannot be seen, but for the sake of convenience, the width of the elastic member EE is shown by two dotted lines. Figure 1 (b) is a diagram showing a case where the supporting member CG is in a straight line shape. Figure 1 (c) is a diagram showing a supporting member in a bent shape. As will be described in detail later, in the catheter supporting device, a catheter is formed along the supporting member, and in the catheter supporting device, the shape of the catheter is restricted by the shape of the supporting member.

[0053] The elastic member EE is a long strip member with flexibility. Figure 1 The elastic member EE and the supporting member CG are configured to extend in the left-right direction (first direction) and bend in the plate thickness direction. Thus, the elastic member EE and the supporting member CG can form the shape of both the straight portion and the curved portion in the letter U shape. In addition, the elastic member EE is not only flexible, but also has a bending elastic modulus of a size that can support its own weight, the weight of the block member and the catheter. Thus, even when the force caused by these weights is applied to the elastic member EE, the curvature radius R of the position corresponding to the curved portion of the letter U can be maintained above a certain value, which can prevent the catheter from breaking or collapsing.

[0054] The flexibility and bending elastic modulus of the elastic member EE can also be adjusted according to the type of applied material, the thickness of the applied member, the cross-sectional shape, etc. Preferably, the elastic member has flexibility that does not break even if it is subjected to 10,000 flexion and extension deformations between a curved shape with a curvature radius of 100 mm and a straight shape. In addition, preferably, the elastic member has a bending elastic modulus such that the deflection amount caused by its own weight in a cantilever beam structure with a length of 100 mm is less than 50 mm, preferably less than 30 mm. It is particularly preferred that the supporting member CG has a bending elastic modulus such that when the elastic member EE is located at the bottom and the plurality of block-shaped members BE are located at the top, the deflection amount caused by its own weight in a cantilever beam structure with a length of 100 mm is less than 50 mm.

[0055] In addition, the elastic member EE can be configured to undergo plastic deformation when the radius of curvature is less than 30 mm. From the perspective of the durability of the elastic member and the supporting member, a larger elastic deformation range is better. However, the catheter sometimes undergoes irreversible changes in characteristics due to the curvature radius being less than a certain value. In the case where changes accompanying irreversible changes in the characteristics of the catheter occur during the use of the catheter support device CU, by adopting an elastic member EE that undergoes plastic deformation, changes in the characteristics of the catheter can be discovered at an early stage, and repair, replacement, and other treatments of the catheter support device CU can be promoted.

[0056] Alternatively, the elastic member EE may be configured so as to be plastically deformed when the radius of curvature is 15 mm or less, or may be configured so as to be broken when the radius of curvature is 5 mm or less.

[0057] The elastic member EE can be made of a polymer material or a metal material. For example, it can be a resin such as polyamide, or an iron-containing alloy such as stainless steel / carbon steel, or a copper alloy such as phosphor bronze / beryllium copper. By using a material generally used as a leaf spring, plastic deformation caused by bending can be suppressed. As an example, a plate-shaped member composed of SUS301 or SUS304 with a thickness of 0.1 mm or more and 0.4 mm or less can be used as the elastic member EE.

[0058] Alternatively, the elastic member EE may be made of a conductive material such as a polymer material in which metal or conductive powder is dispersed. For example, by grounding at least one end of the conductive elastic member, the charging of the support member and the resulting electrical influence on the catheter can be reduced.

[0059] The elastic member has the property of a spring. That is, the elastic member has a restoring force, and although it will be deformed by an external force, it will return to its original shape when the external force disappears. In addition, as the external force increases, the amount of deformation also increases, and as the amount of deformation increases, the restoring force generated also increases. The elastic member with this property does not require structures such as shafts and bearings, and the structure of a support member with a variable shape can be realized with a simple structure. In addition, since the curved shape of the support member can be formed only by an area with a larger curvature R in a manner that does not include an area with a very small curvature R, the physical pressure applied to the catheter, etc. during bending can be reduced.

[0060] The block member BE includes a material with a large compressive elastic modulus and is a solid material firmly fixed on the upper surface of the elastic member EE. For example, a polymer material such as liquid crystal polymer (LCP), polyoxymethylene (POM), polyetheretherketone (PEEK), polybutylene terephthalate (PBT) can be used as the material of the block member BE. In addition, by mixing glass fillers in the polymer material, the compressive elastic modulus can be increased. In addition, low friction can be achieved by mixing polytetrafluoroethylene (PTFE). Alternatively, metal materials such as aluminum, iron or alloys containing them, wooden materials, etc. can also be used.

[0061] It is preferred that a material having a compressive elastic modulus of 1000 MPa or more in a state without filler, and a material having a compressive elastic modulus of 4000 MPa or more is used as the polymer material. It is preferred that a material having a compressive elastic modulus of 6000 MPa or more in a state containing filler, and a material having a compressive elastic modulus of 20000 MPa or more is more preferred. A material having not only a large compressive elastic modulus but also a light weight is used as the block component BE, especially a cured product of a polymer material by injection molding, a metal plate or a material obtained by welding a bent metal plate, or a material composed of a combination of these materials. In this embodiment, the block component adopts a glass-reinforced polyamide cured product obtained by injection molding.

[0062] In this embodiment, the plurality of block members BE have the same shape and size. The plurality of block members are assembled on the elastic member EE in a straight line. The block members are assembled on the elastic member EE in the same direction and at the same intervals.

[0063] use Figure 1 (a) and Figure 1 (b) of the present invention will explain the supporting member CG in a straight line shape. On the upper surface EUS of the elastic member EE, a plurality of block members BE are arranged along the long dimension direction (first direction) of the elastic member EE. Figure 1Only three block components are shown in the figure, but the number of block components should be at least the number that the supporting component CG can form a U-shape including a straight portion and a curved portion, and can be appropriately determined from tens to more than thousands according to the required length of the supporting component (determined by the required moving distance of the catheter supporting device).

[0064] Each block member BE includes: an end surface BES including one end and the other end; a bottom surface BBS facing the upper surface EUS of the elastic member EE; and an upper surface BUS, which is a surface on the opposite side of the bottom surface. The bottom surface BBS includes: a contact portion BCP in contact with the upper surface EUS of the elastic member EE; and an escape portion BEP at a predetermined distance from the upper surface EUS. On the other hand, the upper surface EUS of the elastic member EE includes a contact region ECR as a region in contact with the contact portion BCP.

[0065] When in a straight line shape, the end faces BES of the plurality of block members BE are in contact with the end faces BES of other adjacent block members BE. As a result, the bending of the support member CG in the direction with the block member BE as the inner side (hereinafter, the bending in the downward convex direction when there is a block member on the elastic member like this is referred to as concave bending, and the bending in the upward convex direction is referred to as convex bending) is restricted. That is, even when a stress in the direction of concave bending (for example, gravity caused by the weight of the support member or the catheter) acts, the support member CG and the support device including the support member CG can maintain a straight line shape.

[0066] It should be noted that the straight line shape does not necessarily have to be completely straight. For example, it may have a slight curvature in the direction of a convex curve (for example, a radius of curvature of 800 mm or more, preferably 1000 mm or more) without elastic deformation due to its own weight.

[0067] In addition, the end surface BES does not necessarily need to be the surface located at the position farthest from the center position of the block member. For example, the block member may include a protruding shape region extending outward from the end surface of the block member.

[0068] The end faces of the respective block members BE are separated from each other, thereby forming a convex curve within the range of elastic deformation of the elastic member EE (see Figure 1 (c)). At this time, the contact area ECR of the elastic member EE is formed with a fixed area ECR1 that maintains contact with the contact portion BCP of the block member and a semi-fixed area ECR2 that is separated from the contact portion BCP of the block member. If viewed from another angle, the semi-fixed area ECR2 of the elastic member EE is configured to restrict bending in a certain direction by contact with the bottom surface of the block member, but can bend in the opposite direction to the certain direction.

[0069] By having such a structure, the support member CG in this embodiment can suppress buckling and provide high durability. The reason why the durability is improved is explained using the prior art. Fig.24 Patent document 1 is Figure 2 The support member 10 shown in the figure has a plurality of non-interlocking solid bodies 14 mounted on a flexible material 12. In the support member 10, the flexible material 12 is composed of two regions: a region where the non-interlocking solid bodies 14 are mounted to restrict deformation (hereinafter referred to as a "deformation restriction region") and a region where the non-interlocking solid bodies are not mounted and can be deformed freely (hereinafter referred to as a "free deformation region"). In such a structure, when the support member 10 is bent in the direction of convex bending, its bending shape is composed only of the free deformation region with a limited length. Therefore, in the flexible material 12, a sharp warping occurs locally in the free deformation region, especially at the end of the free deformation region.

[0070] In the following, for the sake of distinction, the visible warping of an elastic member that covers the length of a certain number (e.g., 10) or more non-linked solid objects (block members) is referred to as bending, and the invisible warping of an elastic member that occurs locally at a location other than the assembly portion of the non-linked solid objects is referred to as buckling. The radius of curvature of the buckling is smaller than the radius of curvature of the bending, that is, the shape has a sharp warping, and the occurrence of buckling may cause the elastic member to break or accelerate fatigue and deterioration of the elastic member. In particular, when the elastic member has the above-mentioned prescribed bending modulus of elasticity and has a restoring force, when buckling with a small radius of curvature occurs locally, it may sometimes have a great impact on the reliability of the elastic member.

[0071] The inventor of the present application who discovered this problem first considered suppressing the occurrence of buckling by reducing the deformation restriction area and increasing the free deformation area. In addition, the inventor studied forming an elastic body with a smaller elastic modulus than the non-linked solid material between the flexible material and the non-linked solid material, thereby causing the flexible material to warp in the area where the non-linked solid material is installed. However, as a result of experiments and studies, it was found that these methods may cause new problems.

[0072] When a catheter support device is used in a processing device, a large force may sometimes be applied to the non-linked solid of the support member in a direction parallel to the direction in which the flexible material extends. For example, as the end of the straight-line shape portion in the U-shape of the support member, in the non-linked solid at a position adjacent to the curved shape portion, one end on the straight-line shape portion side contacts other adjacent non-linked solids and is subjected to pressure by the non-linked solids, while on the other hand, the other end on the curved shape portion side does not contact another adjacent non-linked solid. Therefore, sometimes a large stress may be applied to the non-linked solid from the straight-line shape portion side toward the curved shape portion. Alternatively, since the shape of the support device is instantly distorted when the catheter support device is deformed at high speed, there is also a risk of applying stress in the direction in which the flexible material extends to a specific non-linked solid.

[0073] At this time, in the supporting member with a reduced deformation limiting area as described above, and the supporting member with an elastic body formed between the flexible material and the non-linked solid object, the non-linked member can easily tilt greatly. The non-linked solid object that tilts greatly can cause the flexible material at the adjacent position near its assembly part to bend. Furthermore, sometimes it can abut against the upper surface or lower surface of other adjacent non-linked solid objects. In such a case, sometimes the flexible material at the adjacent position near the assembly part of these non-linked solid objects can also bend.

[0074] In this regard, in the supporting member of the present application, the elastic member has a semi-fixed region ECR2. This region does not limit the bending of the elastic member EE in the direction of convex bending. Therefore, for bending in the direction of convex bending, the same effect as the case where the fixed region is reduced can be obtained. Moreover, even in the case of reducing the fixed region, the semi-fixed region ECR2 can suppress the inclination of the block member BE relative to the elastic member EE. Thus, a supporting member that suppresses the occurrence of buckling and greatly improves durability is provided.

[0075] In addition, in the straight shape, the contact area between the block member BE and the elastic member EE can be increased, so the resistance to bending in the concave bending direction can also be increased. Therefore, it can also be applied to a processing device with a large moving distance.

[0076] In the present embodiment, the fixed region ECR1 is formed at a position between two semi-fixed regions ECR2. The fixed region ECR1 and the two semi-fixed regions ECR2 are formed at a position between two avoidance portions BEP where the inner block member does not contact the elastic member when the supporting member CG is in a straight line shape. In this way, by adopting a structure that reduces the limitation of the deformation of the elastic member in stages from the fixed region, a supporting member that can perform smooth movements and has excellent durability can be obtained. Furthermore, a symmetrical structure centered on the fixed region is formed. By setting it in this way, vibration can be suppressed even during high-speed movements, and stable movements can be obtained. However, the arrangement does not have to be limited to this. For example, the avoidance portion BEP may not be provided and the semi-fixed region of a block member may be adjacent to the semi-fixed region of an adjacent block member. Alternatively, the following structure may be adopted: on the upper surface EUS of the elastic member EE, a fixed region is formed on one side in the region opposite to the contact portion BCP of the block member, and a semi-fixed region is formed on the other side.

[0077] It should be noted that the elastic member in the fixed area can be fixed in relative position and shape relative to the bottom surface of the block member contacted by the fixed area. For example, in the fixed area, the elastic member does not need to be in a strict straight line shape, and when fixed in a curved shape, the curved shape can be maintained.

[0078] In the long dimension direction of the elastic member, the total length of the plurality of fixed areas preferably accounts for less than 75% of the total length of the elastic member, more preferably less than 50%, and particularly preferably less than 45%. Such a supporting member can ensure the deformable area (semi-fixed area and / or area opposite to the escape portion) of the elastic member over a certain length when bent. On the other hand, when the fixed area is extremely reduced, it will be difficult to ensure the assembly strength of the block member and the anti-tilt characteristics of the block member, so the length of the fixed area preferably accounts for more than 15% of the total length of the elastic member.

[0079] Furthermore, the ratio of the semi-fixed region to the region other than the fixed region of the elastic member, that is, the region deformable when the supporting member is bent, can be set to 10% or more, preferably 30% or more, and particularly preferably 70% or more.

[0080] It should be noted that the total length of the elastic member from one end to the other end included in the supporting member is not necessarily used as the total length of the elastic member each time the above ratio is calculated. For example, a length sufficient for the total length of a block member of equal length of 1 m may be selected and regarded as the total length of the elastic member. In particular, in the supporting member, when the block member is formed by repeating the same shape, a length that is an integer multiple of the length of the repeated pattern may be selected and regarded as the total length of the elastic member.

[0081] At least the deformable region of the elastic member has uniform bending elasticity in the long dimension of the elastic member. Such a structure is provided by, for example, a leaf spring having the same width and thickness in the entire long dimension.

[0082] Figure 2 It is a diagram conceptually showing a mounting portion of a support member in the first embodiment of the present invention. Figure 2 (a) is a side view, Figure 2 (b) is a view observed from the lower surface side of the elastic member EE, Figure 2 (c) is Figure 2 (b) The cross-sectional view at the Y-Y position, Figure 2 (d) is Figure 2 (b) Cross-sectional view at the ZZ position.

[0083] In the present embodiment, the block member BE includes a lower surface side support portion BLS formed on the lower surface side of the elastic member EE. The lower surface side support portion clamps the elastic member EE together with the contact portion CP of the bottom surface BBS of the block member, thereby having the function of assembling the block member to the elastic member. The lower surface side support portion BLS and the main body of the block member are fixed to each other via a connecting unit. The lower surface side support portion BLS can be integrally formed of the same material as the block member BE, or can be formed of a material different from the block member BE. The connecting unit between the lower surface side support portion BLS and the block member BE can be formed in an area outside the elastic member EE, and / or can also be formed through a through hole provided in the elastic member EE. The connecting unit can be integrally formed of the same material as the block member BE and / or the lower surface side support portion BLS, or can also be formed of other materials such as screws and rivets.

[0084] The area and shape of the lower surface side support portion are important. In the area where the lower surface side support portion is formed, the bending of the elastic member is restricted, except for the case of the scheme described later. Therefore, in order to form the semi-fixed area, when viewed from the bottom surface, the size of the lower surface side support portion needs to be sufficiently smaller than the size of the contact portion BCP of the upper surface side of the elastic member with the block member BE, and the semi-fixed area needs to be formed in an appropriate position.

[0085] In addition, if Figure 2As shown in (b), by arranging multiple connection units in a direction perpendicular to the long dimension direction (first direction) of the elastic member EE, the size of the semi-fixed area and the size of the connection strength can be taken into account. The number of connection units is not limited to two as shown in the figure, but can be three or more, and can be arranged in two sections or staggered. The shape when viewed from above is not limited to a circle, but can also be an ellipse or rectangle with a long dimension direction in a direction perpendicular to the first direction. Alternatively, multiple ellipses or rectangles with a long dimension direction in a direction parallel to the first direction can be arranged in a direction perpendicular to the first direction.

[0086] When through holes are formed in the elastic member as described above, the width of the elastic member in the area near the formation area of ​​these through holes (the distance between the two sides of the elastic member parallel to the long dimension of the elastic member) can be set to be larger than the width of the elastic member in other areas (not shown). Alternatively, the width of the elastic member at the contour position of the lower surface side support portion can be set to be larger than the width of the elastic member in other areas (not shown). In this way, it is possible to suppress the reduction of local strength caused by the formation of through holes and the deterioration of the elastic member caused by the concentration of stress.

[0087] In this embodiment, the block member BE is assembled to the elastic member by injection molding of a resin material. The resin constituting the block member BE is formed so as to also wrap around the side surface and the lower surface ELS of the elastic member EE, as shown in FIG. Figure 2 As shown in (c), the elastic member EE is surrounded from four directions over a certain length. The portion of the elastic member including the fixed region ECR1 is restricted by the resin in deformation in both the convex bending direction and the concave bending direction. The elastic member EE also has a region adjacent to both sides of the portion and having resin formed on the upper surface and the side surface but no resin formed on the lower surface. This region includes a semi-fixed region ECR2, and the bending in the concave bending direction is restricted by the resin on the upper surface side, but the bending in the convex bending direction is not restricted by any resin.

[0088] It should be noted that the elastic member EE may have a recess or a through hole in the fixing region ECR1, and injection molding is performed in a manner of filling the recess or the through hole with the resin, thereby improving the assembly strength against the stress in the direction parallel to the first direction.

[0089] In addition, it is not necessary to form a side support portion that contacts the side surface of the elastic member EE. However, since the side support portion at a position adjacent to the fixed region ECR1 has the effect of stabilizing the assembly, and the side support portion at a position adjacent to the semi-fixed region ECR2 has the effect of maintaining the shape when bent, it is ideal to include any one or both of these side support portions.

[0090] Figure 3This is a diagram conceptually showing a second embodiment of the support member of the present invention. Figure 3 (a) represents a cross section of a supporting member in a straight line shape, Figure 3 (b) shows a cross section of a support member in a curved shape. The connection unit between the block member BE and the lower surface side support portion BLS is shown by a dotted line, but it is not necessarily located in this cross section (unless otherwise specified, Figure 4 The same is true in the following figures). In this embodiment, at least a portion of the upper surface of the lower surface side support portion BLS formed on the lower surface side of the elastic member EE is composed of a curved surface, which is different from the other embodiments. By setting it in this way, the semi-fixed area ECR2 can be formed larger. In addition, by adjusting the position and shape of the upper surface of the lower surface side support portion BLS, the minimum radius of curvature of the bending of the bottom surface of each block member and the elastic member EE in its surrounding area can be limited. In this way, the lower surface side support portion BLS in this embodiment functions as a unit that limits the upper limit of the bending amount, thereby suppressing the occurrence of buckling caused by uneven bending in the long dimension direction of the support member CG that is difficult to see with the naked eye. It should be noted that as long as the side of the upper surface of the lower surface side support portion BLS that is close to the end face BES of the block member is lower than the side of the fixed area of ​​the elastic member, it does not have to be a curved surface, and it can also be other shapes such as steps.

[0091] Figure 4 This is a diagram conceptually showing a third embodiment of the support member of the present invention. Figure 4 (a) represents a cross section of a supporting member in a straight line shape, Figure 4 (b) shows a cross section of a supporting member in a curved shape. In this embodiment, a low elastic layer ELL is formed between the lower surface ELS of the elastic member and the upper surface of the lower surface side supporting portion BLS, which is different from other embodiments. The low elastic layer ELL has an elastic modulus smaller than that of the lower surface side supporting portion BLS and the elastic member EE. For example, polyurethane resin, vinyl chloride, fluororubber, etc. can be used as the low elastic layer ELL. Thus, even if the area of ​​the upper surface of the lower surface side supporting portion BLS is set large, as long as it is within a certain range, the restriction on the bending of the elastic member EE in the convex bending direction can be reduced. It should be noted that the low elastic layer ELL only needs to be formed in the area corresponding to the upper surface of the lower surface side supporting portion BLS, and does not need to be formed on the entire surface of the lower surface ELS of the elastic member. However, by forming the low elastic layer ELL by coating and sticking it to the entire lower surface of the elastic member before assembling the block member, the manufacturability of the supporting member can be improved.

[0092] Figure 5 This is a diagram conceptually showing a fourth embodiment of the support member of the present invention. Figure 5(a) shows a cross section of a supporting member in a straight line shape, Figure 5 (b) represents a cross-section of the supporting member in a bent shape. In this embodiment, a high rigidity layer BHL having an elastic modulus higher than that of the main body of the block member is formed on the end face BES of the block member, which is different from the other embodiments. The high rigidity layer may also be formed on the side surface of the block member (the surface parallel to the first direction) not shown in the figure. The high rigidity layer BHL is composed of a high hardness material such as a polymer material such as PEEK, or a metal such as carbon steel. Even in the case of a high rigidity layer with a large specific gravity, by limiting it to local use, a supporting member with minimal weight increase and suppressed elastic deformation and wear of the block member can be provided.

[0093] In this embodiment, a cover having a recessed portion inside is formed by bending a plate made of SUS304 and aluminum, and the cover is set to a shape covering a main body of a block member made of a polymer material. In particular, when the cover member has a certain thickness along the long dimension direction (first direction) of the elastic member EE, as described later, the elastic member can be formed into a straight shape, thereby providing high productivity and reliability.

[0094] In addition, the high rigidity layer BHL is not limited to the shape of covering the polymer material, for example, one or more columnar high rigidity layers BHL may be embedded and fixed in the block component body composed of the polymer material in a direction parallel to the first direction, or may be fixed to the block component body via an adhesive layer.

[0095] In addition, the high rigidity layer BHL is preferably exposed at both ends of the block member BE as shown in the figure, but is not limited thereto. For example, both ends of the block member BE may also be composed of a polymer material constituting the main body of the block member. The high rigidity layer BHL only needs to be formed to increase the compressive elastic modulus of the block member with respect to the compressive stress in the direction parallel to the first direction.

[0096] Figure 6 It is a diagram conceptually showing a fifth embodiment of the support member of the present invention. Figure 6 (a) shows a cross section of a supporting member in a straight line shape, Figure 6 (b) shows a cross section of the supporting member in a bent shape. In this embodiment, a recess is formed in the semi-fixed region ECR2 of the elastic member, and a protrusion that can fit into the recess is formed on the bottom surface of the block member BE at a position corresponding to the recess, which is different from other embodiments.

[0097] When the supporting member is in a straight shape, by engaging these convex parts with the concave parts, the assembly strength of the block member with respect to the stress in the first direction can be improved. Moreover, when the elastic member EE bends in the direction of the convex bending, the convex part and the concave part move relative to each other in the direction of separation, thereby not restricting the bending. It should be noted that the convex part can also be formed on the semi-fixed area ECR2 side of the elastic member and the concave part can be formed on the bottom surface side of the block member. In addition, the concave part can also be a through hole.

[0098] Figure 7 It is a diagram conceptually showing a sixth embodiment of the supporting member of the present invention. Figure 7 (a) shows a cross section of a supporting member in a straight line shape, Figure 7 (b) represents the cross section of the supporting member in a bent shape. In the present embodiment, a convex portion (or concave portion) is formed on the end face BES of a certain block member, and a concave portion (or convex portion) is formed on the end face (surface opposite to the end face BES of the block member) of other block members adjacent to the block member in a manner that meshes with the convex portion (or concave portion), which is different from other embodiments. The convex portion (or concave portion) is preferably a truncated cone, a prism, or the like, whose cross section is circular, quadrilateral, or the like when observed from a first direction, but may also be a shape whose cross section has a long dimension direction. For example, if the cross-sectional shape extends in a direction parallel to the width direction of the elastic member EE, it is possible to suppress the situation where the block member abuts against the upper surface and the lower surface, and if the cross-sectional shape extends in a direction perpendicular to the upper surface of the elastic member EE, it is possible to effectively improve the rigidity of the supporting member with respect to torsion.

[0099] Figure 8 It is a diagram conceptually showing a seventh embodiment of the supporting member of the present invention. Figure 8 (a) shows a cross section of a supporting member in a straight line shape, Figure 8 (b) shows a cross section of the support member in a bent shape. Figure 8 (a) and Figure 8 In (b), for convenience of explanation, only the block member BE located in the center of the figure is shown with a dotted line to represent the cross-sectional structure. Figure 8 (c) is a top view of the block component. Figure 8 (d) is related to Figure 8 (c) Top view of the block components in different forms. Figure 8 (c) and Figure 8 In (d) , for convenience of explanation, the width of the elastic member EE is indicated by a dotted line, and the fixed region ECR1 and the semi-fixed region ECR2 of the elastic member EE are indicated by hatching.

[0100] In the present supporting member, the block member BE is formed by bending a metal plate. The block member BE has a top plate including a rectangular upper surface BUS, and the top plate includes a first side S1 parallel to the first direction of the elastic member EE and a second side S2 perpendicular to the first direction ( Figure 8 (c) and Figure 8 (d)). The first side is the intersection of the side surface BSS of the block member BE and the upper surface BUS, and is formed by bending a flat plate. The second side is the intersection of the end surface BES of the block member BE and the upper surface BUS. It can also be formed by bending the side, but in this embodiment, the side of the metal plate is directly used as the material. The second side S2 may partially include a concave portion or a convex portion, and the area adjacent to the concave portion and the area including the convex portion have a column BMP that is bent downward and extends downward to a position that can contact the elastic member EE. The top end surface of the column BMP contacts the semi-fixed area ECR2 of the elastic member when it is in a straight shape, and is separated from the elastic member when it is in a bent shape.

[0101] In the present embodiment, a fixed area ECR1 formed at the center of the block member is separated from a semi-fixed area ECR2 formed near the end of the block member. By setting the distance between the fixed area and the semi-fixed area to be large, the anti-tilt effect of the block member can be more effectively reflected. In addition, when observed from the first direction, the block member has a quadrilateral structure including three sides formed by bending a raw metal plate and one side composed of an elastic member. Through the effect of the shape of such a structure, the block member can take into account both high compression elasticity and lightness. It should be noted that when observed from the first direction, it is not limited to a quadrilateral, as long as it is larger than a triangle. In addition, it may also be that, within the range of not limiting the bending of the elastic member in the direction of convex bending, the side of the elastic member EE also has a side composed of a metal plate.

[0102] In addition, it can also be, Figure 8 As shown in (d), a part of the metal plate or the column is made to protrude to the outside of the end face of the block member, and at least a part of the semi-fixed area ECR2 is formed on the outside of the end face of the block member. At this time, preferably, the adjacent block members have recessed portions retreated to the inner side of the end face of the block member at corresponding positions. By avoiding interference between the above-mentioned protruding areas and adjacent block members and having mutually meshing portions, deformation in the lateral and torsional directions can be suppressed. It should be noted that the protruding area may also have a column extending vertically downward from the upper surface BUS, but preferably, the column is shaped to extend in an oblique downward direction and enter the area overlapping with the adjacent block member.

[0103] Fig. 91 is a diagram conceptually showing an eighth embodiment of the support structure of the present invention. As shown in the side view (a), in this embodiment, different block members have fixed areas and semi-fixed areas, respectively. The buckling suppression effect achieved by the block member including the semi-fixed area also affects the nearby block member that does not include the semi-fixed area. Therefore, the support structure including the block member having only the fixed area and the block member having the semi-fixed area provides improved durability.

[0104] In addition, as shown in the bottom view (b), in the same block member, the fixed area and the semi-fixed area are arranged side by side (in a direction perpendicular to the first direction). In this case, as shown in the figure, the elastic member EE includes two elastic members, and the plurality of block members BE can be assembled in a manner that straddles the first elastic member EE1 and the second elastic member EE2, respectively. It should be noted that the two elastic members are arranged in an adjacent manner on the same plane and extend along the first direction. Moreover, a structure in which the fixed area and the semi-fixed area are also adjacent to each other in the first direction is particularly preferred. By staggering the arrangement as shown in the figure, a particularly stable durability improvement effect can be obtained. In addition, by regularly arranging the fixed area and the semi-fixed area, an average effect of reducing the deviation of the position of the supporting member can be obtained.

[0105] Fig.10 This is a diagram illustrating an example of a method for manufacturing a supporting member of the present invention. First, a through hole is formed in an elastic member at a first pitch (not shown). Next, the elastic member formed with the through hole is introduced into an injection mold including a plurality of cavities. In the present embodiment, the injection mold has six cavities, each of which is separated by a distance equivalent to the first pitch. After the leaf spring is fed from the lower right of the figure in the direction of the arrow and the elastic member is supplied to all six cavities, a resin as the main body of the block member is injected into each cavity to fill the cavity with the resin. At this time, it is better to form a resin portion on the lower surface side of a part of the elastic member and to form no resin on the lower surface side of other areas of the elastic member (for example, the lower surface of the elastic member is close to the mold so that the resin does not enter). The resin portion formed in the said part of the area can be set as the lower surface side supporting portion BLS. In addition, the area of ​​the elastic member EE that contacts the lower surface side supporting portion BLS can be set as the fixed area ECR1. In addition, the region where the resin on the upper surface side is formed but the resin on the lower surface side is not formed in the elastic member EE in the cavity can be set as the semi-fixed region ECR2. Note that, in this figure, the cavity shape having the side support part in contact with the side surface of the elastic member EE is shown.

[0106] Here, the elastic member is arranged in the mold in a state where the upper surface is bent to form an outer periphery. By setting it in this way, resin molding can be performed in a state where the distance between the block members is zero when a plurality of block members BE are set to a straight line shape. It is also possible to cut in a manner where a plurality of block members are formed together in an unbent state and then separated into independent block members, but this will result in allowing the supporting member to bend in a concave direction corresponding to the cut portion. In such a case, a spacer of a specified thickness can also be formed on the end face of the block member. For example, by using the thickness of the high-rigidity member of the fourth embodiment as the spacer, in addition to improving reliability, excellent productivity can also be obtained.

[0107] After the resin is solidified at least to the extent that it can be taken out of the mold, the leaf spring is sent forward to a distance corresponding to the six block components, and then the six block components are formed. By repeating this process, the support component can be efficiently manufactured. It should be noted that the fixed area and the semi-fixed area do not have to be defined only by the lower surface side support portion. For example, it is also possible to fix it in a manner that does not damage the adhesion of the fixed area and deform the elastic member of the semi-fixed area for physical peeling. In addition, it is also possible that for a specified area of ​​the elastic member, a difference in adhesion strength is generated by controlling the surface roughness, activating / inactivating or adhesion enhancing / reducing agents such as grease, thereby forming a fixed area and a semi-fixed area. Alternatively, more than one of these methods may be combined.

[0108] Fig.11 This is a diagram illustrating an example of a method for manufacturing a supporting member in an eighth embodiment of the present invention. In this embodiment, a mold is prepared in which cavities are arranged at a pitch that is twice the first pitch for forming draw strips. Furthermore, the block member formed in each cavity has a fixed area and a semi-fixed area adjacent to the fixed area in a direction perpendicular to the first direction. For example, the semi-fixed area includes, for example, a slit structure into which an elastic member can be inserted from the lateral direction (perpendicular to the first direction), and after the elastic member is inserted into the slit, a wedge shorter than the length of the slit in the first direction can be wedged into the lower surface side of the elastic member, or a convex portion corresponding to the wedge can be formed in the slit in advance. The fixing method is not limited thereto, as long as the inclination of the block member can be suppressed even when a stress in the first direction is applied and the bending of the elastic member corresponding to the convex bending of the supporting member is allowed. By combining the elastic member formed with two block members obtained from the mold in the manner shown in the figure, a supporting member such as the one shown in the figure can be easily obtained. Fig. 9 (b) shows a block structure in which fixed areas and semi-fixed areas are arranged alternately.

[0109] Fig.12This is a diagram conceptually showing the ninth embodiment of the supporting member of the present invention. In this embodiment, the supporting member CG has a connecting portion TE that connects the block members to each other. The connecting portion is limited in such a way that the curvature radius of the position between a certain block member and other block members does not reach below a certain value. In this way, the connecting portion TE acts as a bending limit limiting unit, thereby providing a supporting member CG that suppresses the occurrence of buckling and has excellent durability and high reliability.

[0110] In the case where the elastic member EE has the property of being a spring, even without such a connecting portion TE, the bending shape of the supporting member can be determined based on the relationship between the bending elastic modulus and the external force. However, due to collisions with other members, hooking during movement, etc., external stress may be accidentally or temporarily applied to a specific position of the supporting member. Alternatively, the durability of a specific position of the supporting member may deteriorate due to the uneven quality and characteristics of the various components constituting the supporting member, or the specific position may be continuously worn out due to the hardness and weight distribution of the supported member. When the local strength of the elastic member EE deteriorates due to such reasons, the deformation at that position will increase even if the external force is the same, thereby further accelerating the degradation and eventually breaking due to buckling. In response to this, in the supporting member of the present embodiment, even in the case of a large external stress being applied locally and a local strength degradation occurring, the minimum curvature radius of the bend is limited by the connecting portion TE to suppress further degradation. The entire curvature of the support member is formed by bending at other locations only at a curvature radius larger than the specified minimum curvature radius, so that the durability of the support member can be improved and a curved shape in which the curved shapes of each portion are more evenly distributed can be obtained.

[0111] In the case where the elastic member is composed of a material having a certain elastic modulus or more, such as metal used for leaf springs, or a material having a restoring force, the risk of relative position shift between block members is small, so the proportion of the deformable area (semi-fixed area and / or area opposite to the escape portion) in the long dimension direction of the elastic member can be set large. In a supporting member using such an elastic member, the curved shape of the supporting member can be formed by a large range of deformation of the elastic member, so high reliability can be obtained. On the other hand, in the case of accidental or temporary application of large external stress, or in the case of bending with a smaller radius of curvature than normal operation due to local large external stress, such a material may be more damaged than a material with a small elastic modulus.

[0112] In this regard, by combining a unit that limits the minimum curvature radius with a supporting member that can independently form a certain curvature radius through the spring elasticity and restoring force of the elastic member, a supporting member with high reliability for both normal operation and accidental / temporary operation can be provided.

[0113] In addition, in this embodiment, the elastic member EE not only determines the bending shape of the supporting member, but also has a vibration suppression function. In a supporting member with a connecting portion, sometimes the instantaneous switching operation of the connecting portion to function or not causes vibration when the supporting member is working. In this regard, the shape recovery force brought about by the bending and bending elasticity of the elastic member EE can appropriately slow down the deformation speed before the connecting portion functions, thereby reducing vibration.

[0114] The connecting portion is formed between at least two block members, and physically connects a certain block member with other block members in a linkage manner. For example, it can be a belt with both ends attached to the upper surfaces of the two block members. Its length is a length that is redundant or does not generate tension when the supporting member is in a straight line shape. And, its length is a length that loses the redundancy or generates tension when the supporting member is in a limited curved shape or the curved shape between the block members is in a limited curved shape. In addition, in the case where the supporting member has a semi-fixed area, when it is set to lose the redundant length after the upper surface of the elastic member EE and the lower surface of the block member BE are separated in the semi-fixed area, in addition to improving reliability, it can also suppress the generation of vibration, so it is preferred.

[0115] In the present embodiment, the connecting portion only needs to be flexible, and in addition to being in a strip shape, it is suitable to be in a rope shape or a fiber shape. The material of the connecting portion is preferably a material having excellent strength, sliding properties, and low dust emission, and examples thereof include fluororesins and polyamide resins. It is not limited to polymer materials, and may also be a metal wire or the like. However, as long as the bending of the elastic member EE can be suppressed by the connecting portion, it is not necessary to determine the bending shape solely by this. Therefore, by providing a flexible connecting portion in a manner that does not seek excessive strength, the connecting portion can be provided to be small and lightweight. For example, with respect to the breaking strength when tensile stress is applied to the first direction, the breaking strength of the connecting portion may be smaller than that of the elastic member EE. Furthermore, the weight per unit length in the first direction may be smaller than that of the elastic member EE. In addition, the connecting portion is preferably smaller than the bending modulus of elasticity of the elastic member, and more preferably smaller than the bending modulus of elasticity of the catheter bag CP that accommodates the support member.

[0116] Preferably, as shown by the dotted line in the figure, a recess (groove BD) whose bottom surface extends along the first direction is formed on the upper surface BUS of the block member BE, and the connecting portion TE is preferably formed in the recess. Alternatively, a convex portion can be provided at a position where the connecting portion TE is not formed in the upper surface BUS. By arranging the connecting portion at a relatively low position, the amount of redundant outward extension of the connecting portion TE can be reduced when the supporting member is in a straight shape, and the contact with the catheter bag CP (not shown) that accommodates the supporting member can be suppressed. It is particularly preferred that the groove depth (or convex height) is such that the connecting portion will not contact the catheter bag even if the supporting member is in a straight shape. In addition, at the end of the pasting area pasted to the upper surface BUS of the block member BE, the pasting is performed in a manner that is not parallel to the upper surface of the elastic member but includes an inclination in a direction close to the cross-sectional member, thereby reducing the frequency and / or possibility of contact with the catheter bag (not shown).

[0117] The connection portion TE is configured to pass through the inner side of the contour of the block member when the supporting member is in a bent shape. For example, the connection portion has a bending point TEB as shown on the upper surface BUS. In other words, when the supporting member is in a bent shape, the connection portion TE passes through an arbitrary point TP1 on the block member and a point TP2 on the end face of the block member, and the distance from TP2 to the upper surface of the elastic member is smaller than the distance from TP1 to the upper surface of the elastic member. Not only is the connection portion TE formed on the upper surface BUS of the block member BE, but the bending portion is also set in a manner close to the shape of the elastic member when bent, thereby shortening redundancy and reducing the risk of biting between block members.

[0118] As long as the connection portion has an elastic modulus that does not inhibit the occurrence of buckling, that is, as long as it is within the range that can limit the bending limit, a relatively low elastic material such as a spring or rubber can be used. In addition, it is not limited to being formed on the upper surface of the block member, and can also be formed inside, on the side or on the bottom surface (avoidance portion BEP).

[0119] For example, after the block member BE is assembled on the elastic member EE, the connecting portion is affixed so as to straddle a plurality of block members while the supporting member is set to a shape having a predetermined minimum bending radius, thereby obtaining the structure of the present embodiment. In addition, a connecting portion in a state including a free amount corresponding to the redundancy may be affixed to a supporting member having a straight shape, or a block member preliminarily connected by a connecting portion may be assembled to the elastic member EE.

[0120] Fig.13This is a diagram conceptually showing the tenth embodiment of the supporting member of the present invention. In this embodiment, the block member BE has a main body portion that serves as an area on the contact area ECR of the elastic member EE, and the connecting portion TE is composed of a cantilever beam-shaped one-end side extension portion BUP extending from the main body of the block member in the long dimension direction of the supporting member. By providing a connecting portion with a fixed shape in this way, the bending limit can be stabilized and a specified supporting member can be obtained. In addition, the number of steps when assembling the supporting member can be reduced. Preferably, the one-end side extension portion BUP is composed of the same material as the block member BE and is configured integrally with the block member BE. In such a structure, the block member BE does not include a bonding interface such as an adhesive surface, so that a supporting member with high dimensional stability in addition to excellent reliability and durability can be obtained.

[0121] like Fig.13 As shown in (a), the one-end side extension portion BUP extends to a position overlapping with another block member adjacent to one end side of the block member. The one-end side extension portion BUP includes a contact area TCR in the area overlapping with the other block member. Fig.13 As shown in (b), when the supporting member is greatly bent and the distance D between the block member and the other block member reaches a predetermined size, the contact area TCR contacts the contact area TCR of the other block member, restricting the distance D from increasing further.

[0122] As a result, the radius of curvature of the support member including the local radius of curvature is limited to a certain value or less, that is, a support member CG which suppresses the occurrence of buckling and has excellent durability and reliability is provided.

[0123] like Fig.13 (a) and Fig.13 As shown in (b), the block member BE may also include a second end extension portion BLP extending from the main body in the long dimension direction of the support member at the other end side of the block member BE and including a contact area TCR. The contact area TCR having the first end extension portion BUP contacts the contact area TCR formed at the second end extension portion BLP of the adjacent block member, thereby limiting the amount of bending to a certain value or less.

[0124] Preferably, the one end side extension portion and the other end side extension portion are as follows: Fig.13 As shown in FIG. 1 , one side is formed in the area above the block member (away from the elastic member EE side), and the other side is formed below (close to the elastic member EE). Thus, both the strength of the block member and the wear suppression of the extension portion can be taken into account. However, this is not limited to this, and the extension portions may be arranged in parallel with the upper surface of the elastic member EE, or the extension portion of one side may be sandwiched by the extension portion of the other side.

[0125] Preferably, the contact area TCR formed on one end side of the block member and the contact area TCR formed on the other end side each have mutually parallel surfaces. For example, when the support member is bent, in a block member, when a rotational deviation occurs when viewed from the normal direction of the upper surface of the elastic member EE, the contact area TCR contacts the contact area TCR of the adjacent block member, and the mutually parallel surfaces are in close contact with each other, thereby correcting the rotational deviation. In this way, a support member with high motion accuracy is provided.

[0126] In the present embodiment, the end face BES of the block member BE that defines the linear shape of the support member CG is formed on the side of the block member main body and the top end face of the one end side extension BUP. However, in the linear shape, these two faces do not necessarily have to be in contact with the adjacent block member, and can be set to a shape in which either of the two faces can be in contact. In the present embodiment, it is preferred that the side of the block member main body, which has a large thickness and is expected to have a small deformation amount relative to the compressive stress, is set as the end face BES that defines the linear shape of the support member CG.

[0127] In this embodiment, the contact region ECR of the upper surface of the elastic member EE that contacts the block member BE is composed only of the fixed region ECR1 that is fixed to the bottom surface of the block member to limit deformation. Even in the case where the contact region ECR does not include the semi-fixed region ECR2 as described above, the connecting portion TE that functions as a bending limit limiting unit of the support member will limit the minimum curvature radius of the support member, thereby obtaining a support member with high durability and reliability. However, it goes without saying that higher durability and reliability can be obtained by including the semi-fixed region ECR2.

[0128] By configuring the support member CG so that the contact area of ​​a block member is parallel to the contact area of ​​an adjacent block member when the support member CG is at the bending limit defined by the connection portion TE, the occurrence of wear and damage can be suppressed. Fig.13 (a) and Fig.13 As shown in (b), the two contact regions TCR of each block member BE may also include contact surfaces that are not parallel to each other, and the intersection line of each contact surface may also be formed at a position farther from the bottom surface side of the block member when viewed from the block member than the bottom surface. Alternatively, preferably, the intersection line is at a position farther from the lower surface of the elastic member EE when viewed from the block member.

[0129] Fig.14 (a) and Fig.14(b) is a diagram conceptually showing the eleventh embodiment of the supporting member of the present invention, showing an arbitrary section of the supporting member CG. In this embodiment, the one-end side extension BUP is formed in a manner that the wall thickness in the up-down direction is thick at any section parallel to the long dimension direction (first direction) of the supporting member. Thus, the one-end extension BUP is not only used as a connecting portion TE, but can also be used as an end surface BES forming area that limits the straight line shape. Preferably, the connecting portion TE that limits the minimum radius of curvature when the supporting member is bent and the end surface TES that limits the straight line shape are both arranged at a position with a large distance from the elastic member EE. By setting the one-end extension to a thick wall, the one-end extension having this feature can be arranged on the upper surface of the block member. If the thickness of the one-end extension BUP in the direction perpendicular to the upper surface of the elastic member at any section perpendicular to the upper surface of the elastic member and parallel to the first direction is set to TBUP, then TBUP is preferably more than 30% of the maximum thickness of the main body of the block member at the same section, and more preferably more than 45%.

[0130] In this embodiment, the end surface of the one-end extension portion BUP includes a convex portion consisting of a vertical surface perpendicular to the upper surface of the elastic member EE and inclined surfaces formed above and below the vertical surface. The other end of the block member includes a concave surface having a position and shape corresponding to the convex portion. By configuring in this way, the accuracy of the height direction of the adjacent block member can be improved when the support member CG is in a straight line shape.

[0131] use Fig.15 and Fig.16 The block member BE of this embodiment is described. Fig.15 middle, Fig.15 (c) is from Fig.14 The block member BE of this embodiment is viewed from the same direction. If it is taken as the main view, then Fig.15 (a) is a top view, Fig.15 (b) is the left view, Fig.15 (d) is the right view. Fig.16 (a) means Fig.15 The cross section of block member BE at position AA′ in Fig.16 (b) means Fig.15 In these drawings, the elastic member EE and the lower surface side support portion of the block member formed on the lower surface side thereof are omitted from illustration.

[0132] The block member BE has a guide portion BG and a guide groove BGD. The guide portion BGP is as shown in FIG. Fig.15 (b) and Fig.15 As shown in (c), the guide groove BGD includes a side wall extending in the up-down direction (a direction intersecting the bottom surface BBS of the block member). Fig.15 (a) and Fig.15 As shown in (d), it includes side walls extending in the up-down direction. The side walls of the guide portion BGP are configured to be substantially parallel to the side walls of the opposing guide groove BGD when assembled as described later, and are preferably configured to be perpendicular to the bottom surface of the block member. The width of the guide groove BGD (the distance between the side walls) is preferably greater than 1.005 times and less than 1.1 times the width of the guide portion BGP.

[0133] The support member CG using the block member is assembled in such a manner that the guide portion BGP of the block member is inserted into the guide groove BGD of the adjacent block member. In the present embodiment, it is configured such that at least a portion of the guide portion is located in the guide groove not only when the support member is in a straight shape, but also when the support member is in a curved shape. Thus, regardless of the shape of the support member, positional offset and rotational offset between the block members can be suppressed. In the case where the moving stroke of the support member exceeds 2m, there is a risk of the catheter support device CU falling over due to the weight of the carried catheter. In response to this, by having the structure of the present embodiment, the risk of falling over can be reduced even with a long stroke exceeding 2m.

[0134] use Fig.17 , Fig.18 as well as Fig.19 , the twelfth embodiment of the present invention is described. Fig.17 (a) represents a supporting member CG in a straight line shape, Fig.17 (b) shows the supporting member CG in a bent shape. Fig.18 is a diagram showing a single block member BE (including elastic member EE), in which Fig.18 (c) is the main view, Fig.18 (a) is a top view, Fig.18 (b) is the left view, Fig.18 (d) is the right view, Fig.18 (e) is a bottom view. Fig.19 (a) is a diagram for explaining the thin-walled portion BDP formed on the left side surface. Fig.19 (b) shows Fig.19 A cross-sectional view taken along the dashed-dotted line in (a).

[0135] In this embodiment, the block member BE has an extended region that is erected downward at the top of the one-end extension portion BUP. The surface of the one-end side of the extended region includes an end surface BES. Fig.17 As shown in (a), when the support member CG is in a straight line shape, the end surface BES contacts the end surface of the adjacent block member BE. The block member BE includes an extended region erected upward at the tip of the other end side extension portion BLP.

[0136] The extension region on one end side includes a contact region TCR on the surface opposite to the end surface BES. The extension region on the other end side also includes another contact region TCR. Fig.17 As shown in (b), when the support member CG reaches a predetermined maximum bending, the contact area TCR on one end side contacts the contact area TCR on the other end side of the adjacent block member, thereby suppressing further bending of the support member CG.

[0137] In this embodiment, a claw portion BTN is formed near the top of the extension region on one end side, and a receiving portion BTD is formed near the root of the extension region on the other end side. The support member CG is assembled in such a manner that the claw portion BTN is embedded in the receiving portion BTD of the adjacent block member. Thus, even if an unexpected external stress is applied to the support member CG during assembly, etc., it is possible to prevent the mutually facing abutting surfaces from shifting in the vertical direction.

[0138] Reference Fig.17 (a), a slit is formed between the extended area on the other end side and the main body of the block member in the upper part of the receiving part BTD. In the left-right direction in the figure, the minimum width of the groove is formed to be smaller than the maximum thickness of the claw part BTN. In this way, the displacement of the abutting surfaces in the vertical direction can be more reliably prevented. It should be noted that during assembly, by elastically deforming the block member, insertion and extraction can be performed without the need for special equipment or operation.

[0139] like Fig.18 (e), Fig.19 (a) and Fig.19 As shown in (b), a thin-walled portion BDP is partially formed in an extended region formed at the top of the one-end extension portion BUP. That is, the extended region includes a thick-walled portion formed near the upper surface of the block member BE and a thin-walled portion formed below the thick-walled portion.

[0140] By having a thick wall portion near the upper surface, high compression elasticity can be maintained and light weight can be achieved. The thin wall portion can also connect two adjacent contact areas TCR. Thus, the mechanical strength of the contact area TCR can be enhanced. The thin wall portion can also be formed between two adjacent claws BTN. Thus, the operability of embedding during assembly can be improved and the generation of microcracks caused by mechanical pressure during assembly can be suppressed.

[0141] The extension region of the other end side extension portion BLP has a support plate BSB. By reinforcing the mechanical strength of the extension region, stable operation and high durability can be obtained.

[0142] use Fig. 20 , Fig.21 A thirteenth embodiment of the present invention will be described. Fig. 20(a) represents a supporting member CG in a straight line shape, Fig. 20 (c) shows the supporting member CG in a bent shape. Fig. 20 (b) and Fig. 20 The (d) are respectively Fig. 20 (a) and Fig. 20 (c) corresponds to a cross-sectional view of the support member CG. Fig. 20 (a) is the main view, Fig.21 (a) is a top view, Fig.21 (b) is the right view. Fig. 20 (b) and Fig. 20 (d) is Fig.21 (a) is a cross-sectional view of the B-B position, Fig.21 (c) is Fig. 20 (a) and Fig.21 (a) is a cross-sectional view of the A-A position.

[0143] The block member BE includes an extension region that is erected downward from the top of the extension portion BUP at one end. The surface at one end of the extension region includes an end surface BES. Fig. 20 As shown in (a), when the support member CG is in a straight line shape, the end surface BES contacts the end surface BES of the adjacent block member BE. The block member BE includes an extended region erected upward at the tip of the other end side extension portion BLP.

[0144] The extension region on one end side includes a contact region TCR on the surface opposite to the end surface BES. The extension region on the other end side also includes another contact region TCR. In this embodiment, the top end of each extension region is bent inward, and a contact region TCR is formed on the inner peripheral surface of the bend. Fig. 20 (c) and Fig. 20 As shown in (d), when the support member CG reaches the predetermined maximum bending, the contact area TCR on one end side contacts the contact area TCR on the other end side of the adjacent block member. Through these contact areas, the minimum radius of curvature of the support member CG is limited, which plays a role in high reliability. In addition, the extended area bent inward at the top end will inhibit the block member from tilting, or even if it tilts, it will make it difficult for the contact area to disengage.

[0145] In this embodiment, the block member BE has a pair of plate-like parts formed from the main body of the block member BE to BUP. The configuration is such that an extension area erected upward at the top of the other end extension part BLP is embedded in the area surrounded by the pair of plate-like parts, the extension area on one end side, and the main body of the block member. The inner wall surface of the pair of plate-like parts appropriately controls the movement of the extension area on the other end side, thereby suppressing the bending and twisting of the supporting member.

[0146] In addition, in the present embodiment, the fixing region ECR1 is not formed in the main body portion of the block member BE but is formed in the lower surface of the other end side extending portion BLP.

[0147] Fig. 22 (a) and Fig. 22 (b) is a cross-sectional view conceptually showing an example of a catheter support device CU using a support member CG. The catheter support device includes a catheter bag CP having a plurality of insertion passages. By inserting the support member CG into the insertion passages at both ends of the cross section of the catheter bag CP and inserting the catheter CT into each insertion passage therebetween, an integrated flat catheter support device CU is formed. The catheter bag CP is made of a fluororesin (PTFE, etc.) that can suppress the generation of polyvinyl chloride resin and dust. The catheter bag CP can be made of a composite material bonded with a plurality of resin films. The insertion passage of the support member is not limited to the two ends, but can also be an insertion passage located between a plurality of catheters CT, and the number of insertion passages of the support member can be either one or more than three. The number of catheters in each insertion passage and the number of insertion passages for the catheter to be inserted can also be any number. In addition, the catheter and the cable for transmitting electrical energy and the hose for transmitting fluid can exist separately or mixedly. In addition, the catheter support device CU is not limited to the flat type as shown in the figure, and even a cylindrical type can be applied to the support member CG.

[0148] Furthermore, the catheter CT and the supporting member CG may be inserted through the insertion passage of the preformed catheter bag CP, or may be formed by lamination. Alternatively, a portion of the catheter CT and the catheter supporting member CG may be formed by lamination and the remaining portion may be inserted through the insertion passage.

[0149] Fig.23 1 is a conceptual representation of an example of a processing device PU having a catheter support device CU. The processing device PU has a workbench PUS on its main body, and a processing object (not shown) is arranged on the workbench PUS. Fig.23 (a) and Fig.23 As shown in (b), the treatment device PU includes a treatment head PUH that can move relative to the object to be treated. One end of the catheter support device CU is connected to the main body of the treatment device as a fixed end, and the other end is connected to the treatment head PUH. According to the position of the treatment head PUH, the catheter support device CU formed in a U shape moves the position of the curved portion equivalent to the U letter and changes the length of the two opposing straight portions, thereby maintaining a stable connection between the main body and the treatment head PUH.

[0150] Furthermore, in the catheter support device CU of the present application, the support member does not fall or shift due to damage, so a high-quality product can be obtained. In addition, the elastic member EE is prevented from deteriorating, including when the processing device PU is running or stopped, so a processing device PU with a short stop time and high productivity can be provided. Furthermore, the vibration of the processing head during movement is suppressed, so excellent productivity can be obtained even for processing that requires positional accuracy.

[0151] The object to be processed can be a sheet / plate-shaped object such as a semiconductor wafer, a flat panel display, or a three-dimensional structure such as a mechanical component. As the processing head PUH, there can be listed a holding component for holding the object to be processed for transportation, a processing component for physically and / or chemically treating the object to be processed, or an electromagnetic wave irradiation / detection component for irradiating electromagnetic waves to the object to be processed or detecting electromagnetic waves from the object to be processed. In the catheter support device CU, the elastic member of the internal support member CG is formed in a U-shape in a manner closer to the inside than the block member. Depending on the position of the processing head, the area corresponding to the straight portion of the U can be, for example, 0.1 to 5 m in length. In the present embodiment, the maximum moving distance (stroke) of the processing component is 3 m, and the catheter support device CU is formed to be able to follow within this distance range. The radius of curvature of the bend at the position corresponding to the bending portion of the U is preferably greater than 0.02 m, and preferably less than 0.3 m. In addition, in the catheter support device CU, the area corresponding to the straight portion above the U-shaped shape can be slightly deflected downward by its own weight when the device stops, and the deflection amount of the support device is preferably 50 mm or less, and particularly preferably 30 mm or less. Here, the deflection amount of the support device is set to the maximum value of the distance from the straight line connecting the position where the catheter support device is connected to the treatment head PUH and the position of the boundary (inflection point) between the curved portion and the straight portion of the U-shaped shape to any point on the upper surface of the catheter support device.

[0152] In addition, the catheter support device CU is not limited to being used in the direction where the gravity direction intersects the straight portion as shown in the figure, but can also be used in the direction where the straight portion is parallel to the gravity direction. In this case, the curved portion can be located above or below the straight portion.

[0153] In this way, in the conduit support device CU including the support member CG, the breakage of the elastic member is suppressed, and high reliability is provided. In addition, in the processing device including such a conduit support device CU, not only the breakage is suppressed, but also the pollution of the processed object and the environment caused by dust and leakage caused by the breakage is suppressed, or the processing efficiency can be improved by a long travel distance and a long life.

[0154] Industrial Applicability

[0155] The support member, the conduit support device, and the processing device of the present invention can be applied to, for example, a robot travel device incorporated in a machining line, a semiconductor manufacturing device, a flat panel display manufacturing device, an electronic component mounting device, and the like.

Claims

1. A supporting member comprising: an elastic member having a first surface; and a plurality of block members having a contact portion contacting the first surface of the elastic member, The supporting member is characterized in that The plurality of block members are arranged in a straight line on the first surface of the elastic member along the extending direction of the elastic member, The support member is deformable from a first shape to a second shape that is more curved than the first shape, The contact portion of the block member comprises: a first contact portion, wherein a distance between the first surface and the first contact portion remains unchanged as the supporting member deforms; as well as The distance between the second contact portion and the first surface changes as the support member deforms.

2. The support member according to claim 1, characterized in that A distance between the second contact portion of the block member and the first surface of the elastic member in the first shape is smaller than a distance between the second contact portion of the block member and the first surface of the elastic member in the second shape.

3. The supporting member according to claim 1 or 2, characterized in that: A block pitch of the plurality of block members in the first shape in the extending direction of the elastic member is smaller than a block pitch of the plurality of block members in the second shape in the extending direction of the elastic member.

4. The supporting member according to claim 1 or 2, characterized in that: The plurality of block members include a first block member and a second block member adjacent to the first block member, the first block member and the second block member respectively having end faces, When the supporting member is in the first shape, the end surface of the first block member is in contact with the end surface of the second block member. When the support member is in the second shape, the end surface of the first block member is separated from the end surface of the second block member.

5. The support member according to claim 4, characterized in that The end surface of the first block member includes a convex portion, and the end surface of the second block member includes a concave portion. When the support member is in the first shape, the convex portion of the first block member is engaged with the concave portion of the second block member.

6. The supporting member according to claim 1 or 2, characterized in that: The plurality of block members include a first block member and a second block member adjacent to the first block member, The first block member has a guide portion, and the guide portion has a side wall extending in a direction intersecting with a bottom surface of the first block member. The second block member has a guide groove having a side wall extending in a direction intersecting with a bottom surface of the second block member. The supporting member is configured so that the guide portion of the first block member is inserted into the guide groove of the second block member. When the support member is in the first shape and when the support member is in the second shape, at least a portion of the guide portion of the first block member is located in the guide groove of the second block member.

7. The supporting member according to claim 1 or 2, characterized in that: The elastic member further includes: a second surface, which is a surface on the opposite side of the first surface; and a third surface, which is located between the first surface and the second surface. The plurality of block members have side support portions facing the third surface of the elastic member, The side support portion is formed at least at a position adjacent to the second contact portion.

8. The supporting member according to claim 1 or 2, characterized in that: The elastic member is a plate-shaped member having a thickness of 0.1 mm or more and having a property of acting as a spring.

9. The supporting member according to claim 1 or 2, characterized in that: The elastic member is a plate-shaped member that breaks when bent to a curvature radius of 5 mm or less.

10. The supporting member according to claim 1 or 2, characterized in that: The elastic member has such flexibility that it does not break even when it is deformed 10,000 times between a curved shape with a curvature radius of 100 mm and a straight shape.

11. The supporting member according to claim 1 or 2, characterized in that: The bulk member comprises a polymer material.

12. The support member according to claim 11, characterized in that The polymer material of the block member has a compressive elastic modulus of 1000 MPa or more.

13. The supporting member according to claim 1 or 2, characterized in that: The support member further includes, on the block member, a high rigidity layer having a higher elastic modulus than that of the block member.

14. The support member according to claim 13, characterized in that The high rigidity layer is formed so as to increase the compressive elastic modulus of the block member with respect to the compressive stress in the direction parallel to the extending direction of the elastic member.

15. The supporting member according to claim 1 or 2, characterized in that: The elastic member has a second surface which is a surface opposite to the first surface. The supporting member further comprises: a supporting portion formed on the second surface side of the elastic member and sandwiching the elastic member together with one of the plurality of block members; A distance from an upper surface of the support portion on the elastic member side to the first contact portion of one of the plurality of block members is smaller than a distance from the upper surface of the support portion to the second contact portion of one of the plurality of block members.

16. The supporting member according to claim 1 or 2, characterized in that: The plurality of block members include a top plate formed of a metal plate, The top plate includes a first side parallel to the extending direction of the elastic member and a second side intersecting the first side of the top plate. The top plate includes a column extending from the second side of the top plate toward the elastic member. The support member is configured such that, when the support member is in a first shape, a top end of the column can contact a first surface of the elastic member.

17. The supporting member according to claim 1 or 2, characterized in that: The plurality of block members include a first block member and a second block member adjacent to the first block member, The support member further includes a connecting portion that connects the first block member and the second block member and defines a bending limit of the elastic member in the second shape of the support member.

18. The support member according to claim 17, characterized in that The connecting portion extends from a main body of the block member in a longitudinal direction and is formed integrally with the block member.

19. The support member according to claim 18, characterized in that The connecting portion of the first block member includes a contact area with the second block member. In the second shape of the supporting member, when the distance between the first block member and the second block member reaches a specified size, the contact area contacts, thereby limiting further expansion of the block spacing.

20. The support member according to claim 18 or 19, characterized in that The connecting portion of the first block member extends along the extending direction of the elastic member to a position overlapping with the second block member.

21. A catheter support device, characterized in that: include: A support member as claimed in any one of claims 1 to 20; catheter; as well as The supporting member and the catheter are inserted into the catheter bag.

22. The catheter support device according to claim 21, characterized in that The conduits include cables for transmitting electrical energy and / or hoses for transmitting fluids.

23. The catheter support device according to claim 21 or 22, characterized in that: The catheter bag is composed of a composite material to which a plurality of resin films are laminated.

24. The catheter support device according to claim 21 or 22, characterized in that: The catheter bag contains fluororesin.

25. A processing device, characterized in that: Comprising a catheter support device as claimed in any one of claims 21 to 24.

26. The processing device according to claim 25, characterized in that The processing device comprises: a workbench for placing the processed object; and a processing head capable of moving relative to the processed object and capable of holding, physically processing, chemically processing, irradiating with electromagnetic waves or detecting electromagnetic waves on the processed object. The catheter support device includes a linear region and a curved region, and the length of the linear region changes in accordance with the relative movement.