Panel repair method

Through the use of the panel repair device, the outline defects of the display panel are detected and repaired, and the panel defect problems that are difficult to repair in the prior art are solved, and the yield of the panel is improved.

CN114631050BActive Publication Date: 2025-04-01SAMSUNG DISPLAY CO LTD
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Patent Information

Application Number
CN202080074820.9
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Priority Date
2019-11-28
Filing Date
2020-08-31
Publication Date
2025-04-01
Estimated Expiration
2040-08-31

AI Technical Summary

Technical Problem

When manufacturing display panels, the cutting process may cause damage to the profile of the unit panel, resulting in the formation of defective parts, which is difficult for the prior art to effectively repair these defects.

Method used

A panel repair device is adopted, which includes a defect detection unit, an ink ejection needle, a control unit and a light irradiation unit. By detecting the defect portion of the panel, the primary ink is ejected and temporarily cured, and the secondary ink is ejected and cured with the primary ink is then achieved to achieve defect repair.

Benefits of technology

This method can effectively repair the contour defects of the panel, improve the yield of the panel, and reduce the panel discard caused by the defect.

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Abstract

The panel repair method includes the following steps: detecting a defective portion of the panel; providing primary ink ejected from an ink jet needle to a first portion of the defective portion; spreading the primary ink in a direction parallel to a flat surface of the panel; temporarily solidifying the primary ink; providing secondary ink ejected from the ink jet needle to a second portion of the defective portion; and solidifying the primary ink and the secondary ink, wherein the second portion of the defective portion is arranged around the first portion.
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Description

Technical Field

[0001] The invention relates to a panel repair device and a panel repair method. Background Art

[0002] Generally, a display panel used in a display device includes: a first substrate; a second substrate facing the first substrate; and an image display layer disposed between the first substrate and the second substrate. The image display layer may include a liquid crystal layer, an electrowetting layer, an electrophoretic layer, or an organic light emitting layer.

[0003] When manufacturing a display panel, a mother panel is prepared, which includes a first substrate and a second substrate and an image display layer disposed between the first substrate and the second substrate. The mother panel is cut into a plurality of unit panels. Each of the unit panels is used as a display panel. When a cutting process is performed on the mother panel, the outline of the unit panel defined as the cutting portion may be damaged. The unit panel with a damaged outline may be discarded. Summary of the invention

[0004] Technical issues

[0005] An object of the present invention is to provide a panel repairing device and a panel repairing method which can easily repair a defective portion of a panel.

[0006] Technical Solution

[0007] A panel repair method according to an embodiment of the present invention includes: detecting a defective portion of a panel; providing primary ink ejected from an ink jet needle to a first portion of the defective portion; spreading the primary ink in a direction parallel to a plane of the panel; temporarily solidifying the primary ink; providing secondary ink ejected from the ink jet needle to a second portion of the defective portion that is disposed adjacent to the first portion; and solidifying the primary ink and the secondary ink.

[0008] A panel repair method according to an embodiment of the present invention includes: providing primary ink ejected from an ink ejection needle to a defective portion of a panel; bringing the ink ejection needle into contact with the primary ink; moving the ink ejection needle in a direction parallel to a plane of the panel to spread the primary ink; temporarily curing the primary ink; providing secondary ink ejected from the ink ejection needle to the defective portion; and curing the primary ink and the secondary ink.

[0009] A panel repair device according to an embodiment of the present invention includes: a defect detection unit configured to detect a defective portion, wherein the defective portion is defined as a recessed portion at an edge of a panel; an ink ejection needle configured to eject ink having a black color; a control unit configured to move the ink ejection needle above the defective portion according to position information of the defective portion provided from the defect detection unit; and a light irradiation unit configured to emit light to the defective portion, wherein, after providing primary ink ejected from the ink ejection needle to the defective portion, the control unit moves the ink ejection needle in a downward direction so that the ink ejection needle contacts the primary ink, and moves the ink ejection needle in a direction parallel to the plane of the panel.

[0010] Beneficial Effects

[0011] The panel repairing apparatus and the panel repairing method according to the embodiments of the present invention can improve the yield of the panel by easily repairing a defective portion formed on the outline of the panel. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 is a view showing a panel repairing device according to an embodiment of the present invention.

[0013] Figure 2 is a view showing a mother panel.

[0014] Figure 3 is shown by cutting Figure 2 FIG. 1 is a view of one unit panel among a plurality of unit panels formed by a mother panel shown in FIG.

[0015] Figure 4 It is schematically shown Figure 3 A view of the construction of a cross section of a unit panel is shown in FIG.

[0016] Figure 5 It shows that the setting Figure 4 FIG. 1 is a view showing a cross-sectional structure of a pixel in a display area.

[0017] Figure 6 is a flow chart for illustrating a panel repair method according to an embodiment of the present invention.

[0018] Figure 7 It is used to illustrate Figure 1 A view of an operation of detecting panel defects in a panel repair apparatus is shown in FIG. Figure 8 It is magnified Figure 7 A perspective view of a defective portion of a defective portion shown in FIG.

[0019] Fig. 9 and Fig.10 It is used to illustrate Figure 1 A view showing the operation of surface pretreatment in a panel repair apparatus.

[0020] Fig.11 , Fig.12 and Fig.13 It is used to illustrate Figure 1 A view of the operation of ejecting primary ink in the panel repairing device is shown in FIG.

[0021] Fig.14 and Fig.15 It is used to illustrate Figure 1 A view of an operation of spreading primary ink in a panel repairing apparatus is shown in FIG.

[0022] Fig.16 It is used to illustrate Figure 1 A view of an operation of temporarily curing primary ink in a panel repairing apparatus is shown in FIG.

[0023] Fig.17 and Fig.18 It is used to illustrate Figure 1 A view of the operation of ejecting secondary ink in the panel repairing device is shown in FIG.

[0024] Fig.19 It is used to illustrate Figure 1 A view of the operation of curing the primary ink and the secondary ink in the panel repairing apparatus shown in FIG.

[0025] Fig. 20 It is shown by Fig.19 A view of the defective portion of the primary ink and secondary ink repair is shown in FIG.

[0026] Fig.21 is by using Figure 1 FIG. 1 is an exploded perspective view of a display device manufactured by repairing a panel of the display device shown in FIG. 1 .

[0027] Fig. 22 It is shown Fig.21 A view of the construction of a pixel is shown in FIG.

[0028] Figure 23 to Figure 28 is shown by using Figure 1 A view of a method of repairing a defect of a color filter of a first substrate using a panel repairing apparatus is shown. DETAILED DESCRIPTION

[0029] In the specification, it will be understood that when an element (or region, layer, portion, etc.) is referred to as being "on", "connected to" or "coupled to" another element, the element (or region, layer, portion, etc.) can be directly set on, directly connected to or directly coupled to the other element, or an intervening element may be set between them.

[0030] The same reference numerals always represent the same elements. In addition, in the drawings, in order to effectively describe the technical contents, the thickness, ratio and size of the elements are exaggerated.

[0031] The term "and / or" includes all of one or more combinations that can be defined by the relevant components.

[0032] Although the terms first, second, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another element. For example, without departing from the scope of the present disclosure, a first element may be referred to as a second element, and similarly, a second element may also be referred to as a first element. Unless the context clearly states otherwise, the singular also includes the plural.

[0033] In addition, terms such as "below", "lower", "above", and "upper" may be used to describe the relationship of components shown in the drawings. These terms have relative concepts and are described based on the directions indicated in the drawings.

[0034] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as those commonly understood by those skilled in the art to which the present disclosure belongs. In addition, terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant art, and will not be interpreted in an idealized or overly formal sense unless explicitly defined as such herein.

[0035] It will be understood that when the terms “include” or “comprising” are used in this specification, it indicates the presence of the stated features, integers, steps, operations, elements, components or combinations thereof, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components or combinations thereof.

[0036] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0037] Figure 1 is a view showing a panel repairing device according to an embodiment of the present invention.

[0038] Reference Figure 1 , the panel repairing apparatus PRA according to an embodiment of the present invention may include a stage STG, an ink storage unit STO, an ink ejection unit IDP, a light irradiation unit LEP, a defect detection unit DET, and a control unit CON.

[0039] The panel DP to be repaired may be disposed on the stage STG. The panel DP may have a plane defined by the first direction DR1 and the second direction DR2. Hereinafter, the third direction DR3 is defined as a direction perpendicularly crossing the plane defined by the first direction DR1 and the second direction DR2.

[0040] The panel DP may be defined as a display panel DP used in a display device. A mother panel is cut into a plurality of unit panels, and each of the unit panels may be used as a panel DP.

[0041] The ink storage unit STO, the ink ejection unit IDP, the light irradiation unit LEP, and the defect detection unit DET may be disposed above the panel DP. The control unit CON may control operations of the ink storage unit STO, the ink ejection unit IDP, the light irradiation unit LEP, and the defect detection unit DET.

[0042] The defect detection unit DET may detect defects of the panel DP. The defect detection unit DET may capture an image of the panel DP, analyze the captured image, and detect defects formed in the panel DP. For this operation, the defect detection unit DET may include a camera.

[0043] Hereinafter, a defect formed in the panel DP may be defined as a defect portion. For example, the defect portion may be formed on the outline of the panel DP. The defect portion may be defined as a concave portion at the edge of the panel DP.

[0044] The defect detection unit DET may detect the position of a defective portion formed in the panel DP and transmit the position to the control unit CON. The control unit CON may control the movement of the ink ejection unit IDP and the light irradiation unit LEP in response to the position information about the defective portion received from the defect detection unit DET. The ink ejection unit IDP and the light irradiation unit LEP may be moved to the position where the defective portion is formed by the control of the control unit CON and may be disposed above the defective portion.

[0045] The ink storage unit STO may store ink having a predetermined color. For example, ink having black may be stored in the ink storage unit STO. However, the embodiment is not limited thereto, and ink having various colors may be stored in the ink storage unit STO. For example, red ink, green ink, blue ink, and black ink may be stored in the ink storage unit STO. Although not shown, the ink storage unit STO may include a plurality of storage units for storing red ink, green ink, blue ink, and black ink, respectively.

[0046] The ink ejection unit IDP may be connected to the ink storage unit STO. The control unit CON may control the ink storage unit STO so that the ink stored in the ink storage unit STO is supplied to the ink ejection unit IDP. Although not shown, a valve for controlling the supply of ink may be provided in the ink storage unit STO, and the valve may be connected to the ink ejection unit IDP. The control unit CON may control the opening / closing operation of the valve to control the supply of ink.

[0047] The ink ejection unit IDP may eject ink and provide ink to the defective portion. The control unit CON may control the amount of ink ejected from the ink ejection unit IDP. The ink ejection unit IDP may include a body portion BD and an ink ejection needle PIN. The body portion BD may be connected to an ink storage unit STO and receive ink from the ink storage unit STO. The ink ejection needle PIN may be connected to the body portion BD and eject ink received from the body portion BD.

[0048] The ink ejection needle PIN may be used to spread the ink provided on the defective portion. For this operation, the control unit CON may control the operation of the ink ejection needle PIN so that the ink ejection needle PIN reciprocates in a direction parallel to the upper surface of the panel DP. This operation will be described in detail later.

[0049] After providing ink on the defective portion, the light irradiation unit LEP may generate light and emit the light to the ink disposed on the defective portion. The ink may be photocured.

[0050] Figure 2 is a view showing a mother panel. Figure 3 is shown by cutting Figure 2 FIG. 1 is a view of one unit panel among a plurality of unit panels formed by a mother panel shown in FIG.

[0051] Reference Figure 2 , the mother panel M_PAN may include: a first substrate SUB1; a second substrate SUB2 facing the first substrate SUB1; and an image display layer (not shown) disposed between the first substrate SUB1 and the second substrate SUB2. The first substrate SUB1 and the second substrate SUB2 may include glass substrates. The image display layer may be a liquid crystal layer, an electrowetting layer, an electrophoretic layer, or an organic light emitting layer. Hereinafter, the image display layer is described as a liquid crystal layer.

[0052] The mother panel M_PAN may include a plurality of unit panels U_PAN The plurality of unit panels U_PAN may have a rectangular shape having long sides extending in the first direction DR1 and short sides extending in the second direction DR2.

[0053] Each of the unit panels U_PAN may include: a display area DA including a plurality of pixels (not shown); and an encapsulation layer SLT disposed to surround the display area DA. The encapsulation layer SLT may be substantially disposed between the first substrate SUB1 and the second substrate SUB2.

[0054] The mother panel M_PAN may be cut by the cutting unit 10 along a plurality of cutting lines CL1 , CL2 , and CL3 extending along a boundary of the unit panel U_PAN The cutting unit 10 may include a wheel unit 11 and a wheel support 12 supporting the wheel unit 11 .

[0055] The cutting lines CL1, CL2, and CL3 may include a plurality of first cutting lines CL1, a plurality of second cutting lines CL2, and a plurality of third cutting lines CL3. The boundaries between the display areas DA adjacent to each other of the unit panel U_PAN may be shared. The first cutting line CL1 may extend along a common boundary of the plurality of unit panels U_PAN.

[0056] The first cutting line CL1 may be disposed at the center between the display areas DA adjacent to each other in the first direction DR1 and may extend in the second direction DR2. Also, the first cutting line CL1 may be disposed at the center between the display areas DA adjacent to each other in the second direction DR2 and may extend in the first direction DR1.

[0057] The second cutting line CL2 may extend along a boundary of the encapsulation layer SLT adjacent to the outline of the mother panel M_PAN. The second cutting line CL2 may extend in the first direction DR1 along a boundary of the encapsulation layer SLT adjacent to the outline of the mother panel M_PAN extending in the first direction DR1. In addition, the second cutting line CL2 may extend in the second direction DR2 along a boundary of the encapsulation layer SLT adjacent to the outline of the mother panel M_PAN extending in the second direction DR2.

[0058] The third cutting lines CL3 may extend in the first direction DR1. Each of the third cutting lines CL3 may extend in the first direction DR1 and may be disposed between the outline of the mother panel M_PAN and the second cutting lines CL2 adjacent to each other in the second direction DR2. The third cutting lines CL3 may be disposed in one-to-one correspondence with the second cutting lines CL2 extending in the first direction DR1. Each of the third cutting lines CL3 may be spaced apart from the corresponding second cutting line CL2 in the second direction DR2.

[0059] The wheel unit 11 moves while rotating and may cut the mother panel M_PAN along the first, second, and third cutting lines CL1, CL2, and CL3. The mother panel M_PAN may be cut along the first, second, and third cutting lines CL1, CL2, and CL3 to form a unit panel U_PAN.

[0060] For example, Figure 3 Shown in Figure 2 A unit panel U_PAN disposed at the second row and the second column among the unit panels U_PAN shown in FIG.

[0061] Reference Figure 3 The unit panel U_PAN may have a plane defined by a first direction DR1 and a second direction DR2. The unit panel U_PAN may include: a first substrate SUB1; a second substrate SUB2 facing the first substrate SUB1; and a liquid crystal layer (not shown) disposed between the first substrate SUB1 and the second substrate SUB2.

[0062] Each of the first and second substrates SUB1 and SUB2 may have a rectangular shape having long sides extending in the first direction DR1 and short sides extending in the second direction DR2. A length of the first substrate SUB1 with respect to the second direction DR2 may be greater than a length of the second substrate SUB2 with respect to the second direction DR2.

[0063] Long sides of the unit panel U_PAN may be formed by cutting along first, second and third cutting lines CL1, CL2 and CL3 extending in the first direction DR1. Short sides of the unit panel U_PAN may be formed by cutting along first and second cutting lines CL1 and CL2 extending in the second direction DR2.

[0064] The long sides of the first substrate SUB1 of the unit panel U_PAN may be formed by cutting along the first cutting line CL1 and the third cutting line CL3 extending in the first direction DR1. The long sides of the second substrate SUB2 of the unit panel U_PAN may be formed by cutting along the first cutting line CL1 and the second cutting line CL2 extending in the first direction DR1. The area of ​​the first substrate SUB1 between the second cutting line CL2 and the third cutting line CL3 extending in the first direction DR1 may be defined as a pad area PD_A.

[0065] Short sides of the first and second substrates SUB1 and SUB2 of the unit panel U_PAN may be formed by cutting along first and second cutting lines CL1 and CL2 extending in the second direction DR2 .

[0066] The cutting order of the first, second, and third cutting lines CL1, CL2, and CL3 may be variously set. In addition, the first substrate SUB1 may be cut first along the first, second, and third cutting lines CL1, CL2, and CL3, or the second substrate SUB2 may be cut first.

[0067] For example, the first cutting line CL1 may be cut earlier than the second cutting line CL2 and the third cutting line CL3, or the second cutting line CL2 may be cut earlier than the first cutting line CL1 and the third cutting line CL3. The third cutting line CL3 may be cut earlier than the first cutting line CL1 and the second cutting line CL2. In addition, the first substrate SUB1 may be cut earlier than the second substrate SUB2, or the second substrate SUB2 may be cut earlier than the first substrate SUB1.

[0068] According to the cutting order, the positions of the first substrate SUB1 and the second substrate SUB2 may be changed. When the first substrate SUB1 is cut first, the first substrate SUB1 may be disposed above the second substrate SUB2. When the second substrate SUB2 is cut first, the second substrate SUB2 may be disposed above the first substrate SUB1.

[0069] When the mother panel M_PAN is cut along the first cutting line CL1, the second cutting line CL2, and the third cutting line CL3, the outline of the unit panel U_PAN may be damaged. The defective portion of the above-mentioned panel DP may be a concave portion formed when a portion of the edge of the unit panel U_PAN appears in the form of a fragment. Specifically, the defective portion may be mainly generated in the edge of the first substrate SUB1 and the edge of the second substrate SUB2.

[0070] The defective portions formed in the first substrate SUB1 and the second substrate SUB2 may be caused by Figure 1 The panel repair device PRA shown in FIG.

[0071] Figure 4 It is schematically shown Figure 3 A view of the construction of a cross section of a unit panel is shown in FIG. Figure 5 It shows that the setting Figure 4 FIG. 1 is a view showing a cross-sectional structure of a pixel in a display area.

[0072] In the following, Figure 4 The unit panel U_PAN in is called panel DP.

[0073] Reference Figure 4, when viewed in a plan view defined by the first direction DR1 and the second direction DR2, a plane area of ​​the panel DP may include a display area DA and a non-display area NDA located around the display area DA. The panel DP may include: a first substrate SUB1; a second substrate SUB2 disposed on the first substrate SUB1; a liquid crystal layer LC disposed between the first substrate SUB1 and the second substrate SUB2; and an encapsulation layer SLT disposed between the first substrate SUB1 and the second substrate SUB2.

[0074] The encapsulation layer SLT may be disposed in the non-display area NDA. The first substrate SUB1 and the second substrate SUB2 may be attached to each other through the encapsulation layer SLT. The liquid crystal layer LC may be sealed between the first substrate SUB1 and the second substrate SUB2 through the encapsulation layer SLT. The liquid crystal layer LC may include liquid crystal molecules LM.

[0075] Reference Figure 4 and Figure 5 , the pixel PX may be arranged in the display area DA. For example, Figure 5 One pixel PX is shown, but basically, a plurality of pixels PX may be provided in the display area DA.

[0076] Reference Figure 5 , the pixel PX may include a transistor TR disposed on the first base substrate BS1 and a liquid crystal capacitor Clc connected to the transistor TR. The liquid crystal capacitor Clc may include: a pixel electrode PE; a common electrode CE disposed on the pixel electrode PE; and a liquid crystal layer LC disposed between the pixel electrode PE and the common electrode CE. The liquid crystal layer LC may serve as a dielectric.

[0077] The first substrate SUB1 may include: a first base substrate BS1 and a transistor TR disposed on the first base substrate BS1. The first base substrate BS1 may include a pixel area PA and a non-pixel area NPA located around the pixel area PA. The transistor TR may be disposed in the non-pixel area NPA. The first base substrate BS1 may include a transparent glass substrate. However, the embodiment is not limited thereto, and the first base substrate BS1 may include a transparent plastic substrate.

[0078] The gate electrode GE of the transistor TR may be disposed on the first base substrate BS1. The first insulating layer INS1 may be disposed on the first base substrate BS1 to cover the gate electrode GE. The first insulating layer INS1 includes an inorganic material and may be defined as a gate insulating layer.

[0079] The semiconductor layer SM of the transistor TR may be disposed on the first insulating layer INS1 covering the gate electrode GE. Although not shown, the semiconductor layer SM may include an active layer and an ohmic contact layer.

[0080] The source electrode SE and the drain electrode DE of the transistor TR may be disposed to be spaced apart from each other on the semiconductor layer SM and the first insulating layer INS1 adjacent to the semiconductor layer SM. The semiconductor layer SM may form a conductive channel between the source electrode SE and the drain electrode DE.

[0081] The second insulating layer INS2 may be disposed on the first insulating layer INS1 to cover the transistor TR. The second insulating layer INS2 may include an inorganic material and may be defined as a passivation layer. The second insulating layer INS2 may cover a portion of the semiconductor layer SM that is exposed upward between the source electrode SE and the drain electrode DE.

[0082] The color filter CF may be disposed on the second insulating layer INS2. The color filter CF may provide color to light transmitted through the pixel PX. The color filter CF may include one of a red color filter, a green color filter, and a blue color filter.

[0083] The contact hole CH may be defined in the color filter CF and the second insulating layer INS2. The contact hole CH may overlap the non-pixel area NPA adjacent to the pixel area PA. The contact hole CH may be defined to pass through the color filter CF and the second insulating layer INS2 and may expose a predetermined area of ​​the drain electrode DE.

[0084] The pixel electrode PE may be disposed on the color filter CF. The pixel electrode PE may overlap the pixel area PA and extend toward the transistor TR. The pixel electrode PE may be electrically connected to the drain electrode DE of the transistor TR via the contact hole CH.

[0085] The pixel electrode PE may include a transparent conductive material. For example, the pixel electrode PE may include a transparent conductive material such as indium tin oxide (ITO), indium zinc oxide (IZO), and indium tin zinc oxide (ITZO). Although not shown, an alignment layer may be provided on the color filter CF to cover the pixel electrode PE.

[0086] The second substrate SUB2 may include a second base substrate BS2, a black matrix BM, a third insulating layer INS3, and a common electrode CE. The black matrix BM, the third insulating layer INS3, and the common electrode CE may be disposed under the second base substrate BS2. The second base substrate BS2 may face the first base substrate BS1 and have the same material as the first base substrate BS1.

[0087] The black matrix BM may overlap the non-pixel area NPA and may be disposed under the second base substrate BS2. The black matrix BM may have a black color and block unnecessary light when forming an image. The black matrix BM may prevent light leakage due to abnormal behavior of liquid crystal molecules occurring at the edge of the pixel area PA, or prevent color mixing occurring between the pixel areas PA.

[0088] The third insulating layer INS3 may be disposed under the second base substrate BS2 to cover the black matrix BM. The common electrode CE may be disposed under the third insulating layer INS3. The common electrode CE may include a transparent conductive material. For example, the common electrode CE may include a transparent conductive material such as indium tin oxide (ITO), indium zinc oxide (IZO), and indium tin zinc oxide (ITZO). Although not shown, an alignment layer may be disposed under the common electrode CE.

[0089] Figure 6 is a flow chart for illustrating a panel repair method according to an embodiment of the present invention.

[0090] Reference Figure 6 , you can use Figure 1 The panel repair apparatus PRA shown in FIG. 1 repairs the defective portion of the panel DP. For example, in operation (S110), the defective portion of the panel DP may be detected by using the defect detection unit DET. At least one or more defective portions may be formed in the panel DP.

[0091] In operation (S120), the surface of the defective part may be pre-treated by emitting light to the surface of the defective part. This process may be defined as surface pre-treatment (surface treatment). Through the pre-treatment process, the surface of the defective part may have a lyophilic property. In operation (S130), primary ink may be provided to the first part of the defective part. The position of the first part of the defective part will be described in detail later.

[0092] After the primary ink is provided onto the first portion, the primary ink may be spread in a direction parallel to a plane of the panel DP in operation ( S140 ). Figure 1 The ink ejection needle PIN shown in FIG. 1 can be used to spread the primary ink, and the operation of the ink ejection needle PIN to spread the primary ink will be described in detail later.

[0093] In operation (S150), light may be emitted to the primary ink disposed on the defective portion, and thus the primary ink may be temporarily cured. Temporary curing may be defined as a process of curing ink to a level before the ink is completely cured.

[0094] In operation (S160), the secondary ink may be provided to a second portion of the defective portion adjacent to the first portion. In operation (S170), light may be emitted to the primary ink and the secondary ink disposed on the defective portion, and thus, the primary ink and the secondary ink may be cured.

[0095] In the following, reference will be made to Figures 7 to 20 The panel repair method is described in more detail and will be described together as needed Figure 6 .

[0096] Figure 7 It is used to illustrate Figure 1 A view of an operation of detecting panel defects in a panel repair apparatus is shown in FIG. Figure 8 It is magnified Figure 7 A perspective view of a defective portion of a defective portion shown in FIG.

[0097] Reference Figure 6 and Figure 7 In operation (S110), the panel DP is set on the stage STG, and then the defect detection unit DET can detect a defect portion DPT formed in the panel DP by the control of the control unit CON. As described above, the defect portion DPT can be defined as a concave portion formed at the edge of the panel DP. The defect detection unit DET can check the position of the defect portion DPT and send position information about the defect portion DPT to the control unit CON.

[0098] Reference Figure 8 , when the cutting process is performed, the defect portion DPT may be defined at the edge of the second substrate SUB2. Specifically, the defect portion DPT may be defined at the edge of the upper surface of the second substrate SUB2. When the cutting process is performed, a portion of the edge of the upper surface of the second substrate SUB2 appears in the form of a fragment, and thus, the defect portion DPT may be formed at the edge of the upper surface of the second substrate SUB2. However, the embodiment is not limited thereto, and the defect portion DPT may be defined at the edge of the first substrate SUB1.

[0099] For example, one defect portion DPT is formed in the second substrate SUB2. However, two or more defect portions DPT may be formed at the edges of the first and second substrates SUB1 and SUB2. The defect portion DPT may be substantially formed at the edges of the first and second base substrates BS1 and BS2.

[0100] Fig. 9 and Fig.10 It is used to illustrate Figure 1 A view showing the operation of surface pretreatment in a panel repair apparatus.

[0101] Fig.10 It is along Figure 8 A cross-sectional view of the second substrate SUB2 taken along line II'. Fig.12 , Fig.13 and Figures 16 to 20 Each of the descriptions in Fig.10 The corresponding cross section of the second substrate SUB2.

[0102] Reference Figure 6 , Fig. 9 and Fig.10, a defect portion DPT may be formed in the non-display area NDA. In operation (S120), the control unit CON may move the light irradiation unit LEP above the defect portion DPT according to the position information about the defect portion DPT received from the defect detection unit DET. The light irradiation unit LEP may emit light L to the defect portion DPT to pre-process the surface of the defect portion DPT. The light L generated in the light irradiation unit LEP may be ultraviolet light.

[0103] When ultraviolet light is provided to the surface of the defective portion DPT, the surface of the defective portion DPT can be modified to be lyophilic. The surface of the defective portion DPT pretreated by light L has a lyophilic property, so the ink can be well adsorbed to the defective portion DPT. The principle of surface modification according to ultraviolet light is as follows.

[0104] When electrons or ions (such as ultraviolet light) with high energy collide with a glass substrate or a plastic substrate, free radicals or ions may be generated due to these collisions. When ozone, oxygen, nitrogen, moisture, etc. near the free radicals or ions react with carbon, hydrogen, etc. on the surface of the substrate, highly polar functional groups such as carbonyl, carboxyl, hydroxyl, cyano, etc. may be generated. As a result, the surface of the substrate can be chemically modified to be hydrophilic (i.e., lyophilic).

[0105] The light irradiation unit LEP may generate light within a first time period. The first time period may be set to 5 seconds to 10 seconds. The light irradiation unit LEP may provide light L to the defective portion DPT three times to sufficiently pre-treat the surface of the defective portion DPT. That is, the total irradiation time of the light L emitted to the surface of the defective portion DPT may be 15 seconds to 30 seconds. However, the embodiment is not limited thereto, and the light L may be provided to the defective portion DPT three or more times.

[0106] Fig.11 , Fig.12 and Fig.13 It is used to illustrate Figure 1 A view of the operation of ejecting primary ink in the panel repairing device is shown in FIG.

[0107] Reference Figure 6 , Fig.11 , Fig.12 and Fig.13 In operation (S130), the control unit CON may move the ink ejecting unit IDP above the defective portion DPT according to the position information on the defective portion DPT received from the defect detecting unit DET.

[0108] The ink stored in the ink storage unit STO may be supplied to the ink ejection unit IDP, and the ink ejection unit IDP may eject the primary ink INK1 and supply the primary ink INK1 to the defective portion DPT. For example, the primary ink INK1 ejected from the ink ejection needle PIN may be supplied to the surface of the defective portion DPT.

[0109] The defective portion DPT may include a first portion PT1 and a second portion PT2 disposed near the first portion PT1. The first portion PT1 may be defined in a lower region of the defective portion DPT, and the second portion PT2 may be defined in a region of the defective portion DPT disposed above the first portion PT1. The primary ink INK1 ejected from the ink ejection needle PIN may be provided onto the first portion PT1.

[0110] Fig.14 and Fig.15 It is used to illustrate Figure 1 A view of an operation of spreading primary ink in a panel repairing apparatus is shown in FIG.

[0111] For example, Fig.14 and Fig.15 A side view of the defect portion DPT when viewed in the first direction DR1 is shown.

[0112] Reference Figure 6 , Fig.14 and Fig.15 , the first portion PT1 may be disposed at the central area of ​​the lower portion of the defective portion DPT. The primary ink INK1 is provided on the first portion PT1, and in operation (S140), the primary ink INK1 may be spread in the second direction DR2 by the ink ejection needle PIN. The second direction DR2 may be defined as a direction parallel to the plane of the panel DP.

[0113] Specifically, refer to Fig.14 , the ink ejection unit IDP may be moved downward, and the ink ejection needle PIN may contact the primary ink INK1. The control unit CON may move the ink ejection needle PIN downward so that the ink ejection needle PIN contacts the primary ink INK1. The lower portion of the ink ejection needle PIN may be disposed within the primary ink INK1.

[0114] Reference Fig.15 , the control unit CON may reciprocate the ink ejection needle PIN in the second direction DR2. When the ink ejection needle PIN reciprocates in the second direction DR2, the primary ink INK1 may be diffused in the second direction DR2. Therefore, the primary ink INK1 may be more uniformly disposed on the lower portion of the defective portion DPT.

[0115] Fig.16 It is used to illustrate Figure 1A view of an operation of temporarily curing primary ink in a panel repairing apparatus is shown in FIG.

[0116] Reference Figure 6 and Fig.16 In operation (S150), the control unit CON may move the light irradiation unit LEP above the defective portion DPT. The light irradiation unit LEP may emit light L to the primary ink INK1. The primary ink INK1 may be temporarily cured by the light L. The light L may be emitted to the primary ink INK1 once to temporarily cure the primary ink INK1. That is, the light L may be emitted to the primary ink INK1 for 5 to 10 seconds.

[0117] Fig.17 and Fig.18 It is used to illustrate Figure 1 A view of the operation of ejecting secondary ink in the panel repairing device is shown in FIG.

[0118] Reference Figure 6 , Fig.17 and Fig.18 , in operation (S160), the control unit CON may move the ink ejection unit IDP above the defective portion DPT. The ink ejection unit IDP may eject the secondary ink INK2 and provide the secondary ink INK2 to the defective portion DPT. The secondary ink INK2 ejected from the ink ejection needle PIN may be provided on the second portion PT2. That is, the primary ink INK1 and the secondary ink INK2 may be provided to different areas of the defective portion DPT, respectively.

[0119] The primary ink INK1 provided on the first portion PT1 may be used as a dam. Instead of providing the primary ink INK1 to the first portion PT1, ink having a total amount of the primary ink INK1 and the secondary ink INK2 may be simultaneously provided to the defective portion DPT. In this case, the ink flows downward along the side surface below the defective portion DPT of the second substrate SUB2.

[0120] However, in an embodiment of the present invention, a predetermined amount of primary ink INK1 is first provided on the first portion PT1 and the predetermined amount of primary ink INK1 is temporarily solidified. Subsequently, secondary ink INK2 may be provided on the second portion PT2. In this case, the primary ink INK1 provided earlier may serve as a dam to prevent the secondary ink INK2 from flowing downward along the side surface of the second substrate SUB2.

[0121] The primary ink INK1 and the secondary ink INK2 may be supplied to the first portion PT1 and the second portion PT2 , and thus the defect portion DPT may be filled with the primary ink INK1 and the secondary ink INK2 .

[0122] Fig.19 It is used to illustrate Figure 1 A view of the operation of curing the primary ink and the secondary ink in the panel repairing apparatus shown in FIG.

[0123] Reference Figure 6 and Fig.19 In operation (S170), the control unit CON may move the light irradiation unit LEP above the defective portion DPT. The light irradiation unit LEP may emit light L to the primary ink INK1 and the secondary ink INK2 disposed on the defective portion DPT. The primary ink INK1 and the secondary ink INK2 may be cured by the light L.

[0124] The light irradiation unit LEP may emit light L to the primary ink INK1 and the secondary ink INK2 three times to fully cure the primary ink INK1 and the secondary ink INK2. That is, the total irradiation time of the light L emitted to the primary ink INK1 and the secondary ink INK2 may be 15 seconds to 30 seconds. However, the embodiment is not limited thereto, and the light L may be provided to the primary ink INK1 and the secondary ink INK2 three or more times.

[0125] As described above, the light L may include ultraviolet light, but the type of light may not be limited thereto. For example, various types of light capable of performing the above-described pre-processing and curing the primary ink INK1 and the secondary ink INK2 may be generated in the light irradiation unit LEP.

[0126] Fig. 20 It is shown by Fig.19 A view of the defective portion of the primary ink and secondary ink repair is shown in FIG.

[0127] Reference Fig. 20 , the solidified ink INK may be disposed on the defect portion DPT, and thus, the second substrate SUB2 may be repaired. As a result, the panel DP may be repaired. The ink INK may include the solidified primary ink INK1 and the solidified secondary ink INK2.

[0128] The primary ink INK1 and the secondary ink INK2 may have the same color as the non-display area NDA. Figure 5 The black matrix BM shown in the figure may be arranged to overlap with the non-display area NDA. In this case, the primary ink INK1 and the secondary ink INK2 may include black. Therefore, the defective portion DPT may be prevented from being seen. The primary ink INK1 and the secondary ink INK2 may include an acrylic or imide polymer material having a black color.

[0129] The method for repairing the defective portion DPT formed in the second substrate SUB2 has been described exemplarily, but the embodiment is not limited thereto. The panel repair apparatus PRA may repair the defective portion DPT formed in the first substrate SUB1. In this case, the first substrate SUB1 is disposed above the second substrate SUB2, and the defective portion DPT of the first substrate SUB1 may be repaired.

[0130] Fig.21 is by using Figure 1 FIG. 4 is an exploded perspective view of a display device manufactured by repairing a panel with a panel repairing apparatus shown in FIG.

[0131] exist Fig.21 In the present invention, the panel DP may be defined as a display panel DP for displaying an image.

[0132] Reference Fig.21 , the display device DD may include a display panel DP, a gate driver GDR, a data driver DDR, a printed circuit board PCB, and a backlight unit BLU.

[0133] The backlight unit BLU may generate light and provide the generated light to the display panel DP. The backlight unit BLU may be an edge-type backlight unit or a direct-type backlight unit. The display panel DP may generate an image by using the light provided from the backlight unit BLU. The generated image may be provided to a user through the upper portion of the display panel DP.

[0134] The display panel DP may include a first substrate SUB1, a second substrate SUB2, and a liquid crystal layer LC. A plurality of pixels PX, a plurality of gate lines GL1 to GLm, and a plurality of data lines DL1 to DLn may be arranged in the first substrate SUB1. Here, m and n are positive integers. For ease of description, Fig.21 Only one pixel PX is shown, but basically, a plurality of pixels PX may be disposed in the first substrate SUB1.

[0135] The gate lines GL1 to GLm and the data lines DL1 to DLn may be insulated from each other while crossing each other. The gate lines GL1 to GLm may extend in a first direction DR1 and may be connected to a gate driver GDR. The data lines DL1 to DLn may extend in a second direction DR2 and may be connected to a data driver DDR. The pixels PX may be connected to the gate lines GL1 to GLm and the data lines DL1 to DLn.

[0136] The gate driver GDR may be disposed in a predetermined region of the first substrate SUB1 adjacent to one of the short sides of the first substrate SUB1. The gate driver GDR may be formed simultaneously with the transistors of the pixel PX through the same process, and may be disposed on the first substrate SUB1 in the form of an amorphous silicon TFT gate driver circuit (ASG) or an oxide silicon TFT gate driver circuit (OSG).

[0137] However, the embodiment is not limited thereto. The gate driver GDR may be formed in the form of a plurality of driving chips and mounted to a flexible printed circuit board, and may be connected to the first substrate SUB1 via the flexible printed circuit board. Alternatively, the gate driver GDR may be formed in the form of a plurality of driving chips and mounted to the first substrate SUB1 in a chip on glass (COG) manner.

[0138] The data driver DDR may include at least one source driving chip S-IC disposed on at least one flexible circuit board FPCB. Fig.21 Four source driving chips S-IC and four flexible circuit boards FPCB are exemplarily shown, but the number of the source driving chips S-IC and the flexible circuit boards FPCB is not limited thereto according to the size of the display panel DP.

[0139] The source driver chip S-IC may be mounted to the flexible circuit board FPCB, and the side (or side) of the flexible circuit board FPCB may be connected to an area of ​​the display panel DP adjacent to one side of the display panel DP. The one side of the display panel DP may be defined as one of the long sides of the display panel DP. The side of the flexible circuit board FPCB may be connected to the pad area PD_A adjacent to one side of the display panel DP. The other side of the flexible circuit board FPCB may be connected to the printed circuit board PCB.

[0140] The source driver chip S-IC may be connected to the first substrate SUB1 and the printed circuit board PCB via the flexible circuit board FPCB. The connection method may be defined as a tape carrier package (TCP) method.

[0141] A timing controller (not shown) may be provided on a printed circuit board PCB. The timing controller may be mounted on the printed circuit board PCB in the form of an integrated circuit chip and connected to a gate driver GDR and a data driver DDR via a flexible circuit board FPCB. The timing controller may output a gate control signal, a data control signal, and image data.

[0142] The gate driver GDR may receive a gate control signal from the timing controller and generate a plurality of gate signals in response to the gate control signal. The gate driver GDR may sequentially output the gate signals. The gate signals may be provided to the pixels PX in rows via the gate lines GL1 to GLm. As a result, the pixels PX may be driven in rows.

[0143] The data driver DDR may receive image data and a data control signal from the timing controller. The data driver DDR may generate and output a data voltage in an analog form corresponding to the image data in response to the data control signal. The data voltage may be provided to the pixel PX via the data lines DL1 to DLn.

[0144] The pixels PX may receive data voltages through the data lines DL1 to DLn in response to gate signals provided through the gate lines GL1 to GLm. The pixels PX may display grayscales corresponding to the data voltages, thereby displaying images.

[0145] Fig. 22 It is shown Fig.21 A view of the construction of a pixel is shown in FIG.

[0146] For example, Fig. 22 The pixel PX connected to the gate line GLi and the data line DLj is shown.

[0147] Reference Fig. 22 , the pixel PX may include a transistor TR connected to the gate line GLi and the data line DLj, a liquid crystal capacitor Clc connected to the transistor TR, and a storage capacitor Cst connected in parallel with the liquid crystal capacitor Clc. The storage capacitor Cst may be omitted. Here, i and j are positive integers.

[0148] The transistor TR disposed on the first substrate SUB1 may include a gate electrode connected to the gate line GLi, a source electrode connected to the data line DLj, and a drain electrode connected to the liquid crystal capacitor Clc and the storage capacitor Cst. The gate electrode, the source electrode, and the drain electrode may be Figure 5 The gate electrode GE, the source electrode SE and the drain electrode DE are shown in FIG.

[0149] Already in Figure 5 The structure of the liquid crystal capacitor Clc is described in detail in , so its description will be omitted.

[0150] exist Fig. 22 In the embodiment, the pixel electrode PE has a non-slit structure, but the embodiment is not limited thereto. The pixel electrode PE may have a slit structure including a trunk portion having a cross shape and a plurality of branch portions radially extending from the trunk portion.

[0151] The common electrode CE is disposed on the second substrate SUB2, but the embodiment is not limited thereto. The common electrode CE may be disposed on the first substrate SUB1. In this case, at least one of the pixel electrode PE and the common electrode CE may have a slit.

[0152] The storage capacitor Cst may include a pixel electrode PE, a storage electrode (not shown) branched from a storage line (not shown), and an insulating layer disposed between the pixel electrode PE and the storage electrode. The storage line may be disposed on the first substrate SUB1 and may be formed simultaneously with the gate lines GL1 to GLm in the same layer. The storage electrode may partially overlap the pixel electrode PE.

[0153] The transistor TR is turned on in response to a gate signal provided via the gate line GLi. A data voltage received via the data line DLj may be provided to the pixel electrode PE of the liquid crystal capacitor Clc via the turned-on transistor TR. A common voltage may be applied to the common electrode CE.

[0154] Due to the voltage level difference between the data voltage and the common voltage, an electric field may be formed between the pixel electrode PE and the common electrode CE. Liquid crystal molecules of the liquid crystal layer LC may be driven by the electric field formed between the pixel electrode PE and the common electrode CE. The transmittance may be adjusted by the liquid crystal molecules driven by the electric field, and an image may be displayed.

[0155] A storage voltage having a uniform voltage level may be applied to the storage line. However, the embodiment is not limited thereto, and a common voltage may be applied to the storage line. The storage capacitor Cst may be used to compensate for the amount of charge of the liquid crystal capacitor Clc.

[0156] Figure 23 to Figure 28 is shown by using Figure 1 A view of a method of repairing a defect of a color filter of a first substrate using a panel repairing apparatus is shown.

[0157] Figure 23 to Figure 28 The example shows Figure 5 Corresponding cross-section. In the following, the Figure 1 and Figure 5 .

[0158] Reference Figure 5 , Fig.23 and Fig.24 When the first substrate SUB1 is manufactured, color ink may be provided on the second insulating layer INS2 to form a color filter CF. The color ink may be cured to manufacture the color filter CF.

[0159] When manufacturing the color filter CF, defect portions DPT1 and DPT2 may be formed in the upper surface of the color filter CF. For example, a portion of the upper surface of the color filter CF may be recessed, and a first defect portion DPT1 may be defined. In addition, when the contaminant particles PRT disposed in the upper surface of the color filter CF are removed, a second defect portion DPT2 having a recessed shape due to the removed contaminant particles PRT may be defined.

[0160] Reference Figure 1 and Fig.25 , the defect detection unit DET may check the positions of the first defect portion DPT1 and the second defect portion DPT2, and provide the positions of the first defect portion DPT1 and the second defect portion DPT2 to the control unit CON. According to the positions of the first defect portion DPT1 and the second defect portion DPT2, the control unit CON may move the ink ejection unit IDP above the first defect portion DPT1 and the second defect portion DPT2. The color ink C-INK having the same color as the color filter CF may be stored in the ink storage unit STO.

[0161] The color ink C-INK may be supplied to the ink ejection unit IDP, and the color ink C-INK ejected from the ink ejection needle PIN may be supplied to the first defective portion DPT1 and the second defective portion DPT2. The ink ejection unit IDP may be disposed over one of the first defective portion DPT1 and the second defective portion DPT2 and eject ink, and then moved over the other and eject ink.

[0162] However, the embodiment is not limited thereto, and the ink ejection unit IDP may be provided in plural, and the plurality of ink ejection units IDP may eject the color ink C-INK to the first defective portion DPT1 and the second defective portion DPT2 at the same time.

[0163] Reference Fig.26 and Fig. 27 , the color ink C-INK is supplied to the first defective portion DPT1, and then the ink ejection needle PIN is brought into contact with the color ink C-INK. The ink ejection needle PIN can be reciprocated in the horizontal direction by the control of the control unit CON. The horizontal direction can be the first direction DR1 or the second direction DR2. This operation is similar to the above Fig.14 and Fig.15 The operations shown in are basically the same.

[0164] According to the movement of the ink ejection needle PIN, the color ink C-INK can be spread more easily in the horizontal direction in the first defect portion DPT1. Therefore, the color ink C-INK can be more uniformly provided on the first defect portion DPT1.

[0165] The operation for spreading the color ink C-INK provided on the first defect portion DPT1 has been exemplarily described. However, the color ink C-INK provided on the second defect portion DPT2 can also be spread more easily by the ink ejection needle PIN in the same manner.

[0166] Reference Fig.28 , the control unit CON may move the light irradiation unit LEP over the first defect portion DPT1 and the second defect portion DPT2. The light irradiation unit LEP may emit light L to the color ink C-INK disposed on the first defect portion DPT1 and the second defect portion DPT2. The color ink C-INK may be cured by the light L, and thus, the color filter CF of the first substrate SUB1 may be repaired.

[0167] Although the embodiments of the present disclosure have been described, it is understood that various changes and modifications may be made by those skilled in the art within the spirit and scope of the present disclosure as claimed. In addition, the embodiments disclosed in the present disclosure are not intended to limit the technical concepts of the present disclosure, and all technical concepts including the claims and their equivalents should be interpreted as being included within the scope of the rights in the present disclosure.

[0168] Industrial Applicability

[0169] Defects of a display panel can be easily repaired to improve the yield of the display panel, and therefore, the present invention has high industrial applicability.

Claims

1. A panel repair method, the panel repair method comprising: Detect defective parts of the panel; emitting light to the defective portion to pre-treat the surface of the defective portion so that the surface of the defective portion is modified to be lyophilic; supplying primary ink ejected from an ink ejection needle onto a first portion of the defective portion; spreading the primary ink in a direction parallel to a plane of the panel; temporarily curing the primary ink; supplying the secondary ink ejected from the ink ejection needle to a second portion of the defective portion disposed adjacent to the first portion; and The primary ink and the secondary ink are cured.

2. The panel repair method according to claim 1, wherein: The step of spreading the primary ink comprises: contacting the ink ejection needle with the primary ink; and The ink ejection needle is reciprocated in the direction parallel to the plane to spread the primary ink.

3. The panel repair method according to claim 1, wherein: The step of temporarily curing the primary ink includes emitting the light to the primary ink to temporarily cure the primary ink.

4. The panel repair method according to claim 3, wherein: The light is emitted to the primary ink once.

5. The panel repair method according to claim 3, wherein: The step of curing the primary ink and the secondary ink includes emitting the light to the primary ink and the secondary ink to cure the primary ink and the secondary ink.

6. The panel repair method according to claim 5, wherein: The light is emitted to the primary ink and the secondary ink at least three times.

7. The panel repair method according to claim 1, wherein: The light is provided to the defective portion at least three times to pre-treat the surface of the defective portion.

8. The panel repair method according to claim 1, wherein: The light includes ultraviolet light.

9. The panel repair method according to claim 1, wherein: The defective portion is defined as a recessed portion at an edge of the panel.

10. The panel repair method according to claim 9, wherein: The second portion is disposed above the first portion.

11. The panel repair method according to claim 9, wherein: The first portion is disposed at a central area of ​​a lower portion of the defective portion.

12. The panel repair method according to claim 1, wherein: The primary ink and the secondary ink include black.

13. The panel repair method according to claim 1, wherein: The primary ink and the secondary ink include acrylic or imide polymer materials.

14. The panel repair method according to claim 1, wherein: The panel includes a display area and a non-display area around the display area, the defective portion is disposed in the non-display area, and the primary ink and the secondary ink have the same color as the non-display area.

15. The panel repair method according to claim 1, wherein: The panel comprises: first base; a second substrate facing the first substrate; and An image display layer is disposed between the first substrate and the second substrate, The defect portion is formed at an edge of the first substrate or an edge of the second substrate.

16. A panel repair method, comprising: emitting light to a defective portion of a panel to pre-treat a surface of the defective portion so that the surface of the defective portion is modified to be lyophilic; supplying primary ink ejected from an ink ejection needle to the defective portion; contacting the ink ejection needle with the primary ink; moving the ink ejection needle in a direction parallel to a plane of the panel to spread the primary ink; temporarily curing the primary ink; supplying the secondary ink ejected from the ink ejection needle to the defective portion; and The primary ink and the secondary ink are cured.

17. The panel repair method according to claim 16, wherein: The defect portion is defined as a recessed portion at an edge of the panel, and the primary ink and the secondary ink are respectively supplied to different regions of the defect portion.

18. The panel repair method according to claim 17, wherein: The defective parts include: a first portion to which the primary ink is provided; and A second portion exists above the first portion, and the secondary ink is provided to the second portion.

Citation Information

Patent Citations

  • Substrate repairing method and repairing device, and substrate repaired by using the same

    JP2005300940A