Positioning fixture and installation method for excimer laser preionization tube

Abstract

The present invention relates to a positioning fixture and an installation method for a preionization tube of an excimer laser. The positioning fixture comprises a base and a step member extending upward from the base. The base comprises a base side surface. The step member comprises a protruding portion protruding from a top of the base. The step member comprises a first side surface and a second side surface opposite to the first side surface. At least two positioning members are formed extending from the second side surface. Each positioning member comprises a cylinder and a rectangular positioning strip integrally extending and formed on the cylinder. The positioning fixture is suitable for being arranged on a step end surface of an anode base of an excimer laser and can accurately maintain the distance between the terminal end surface of the preionization tube and the step end surface. The positioning fixture can also limit the axial and radial movement of the preionization tube, so that the preionization tube can be quickly and accurately positioned, thereby ensuring the assembly quality of the preionization tube.

Description

Technical Field

[0001] The present invention relates to the technical field of excimer lasers, in particular to a positioning tool and an installation method for an excimer laser preionization tube. Background Art

[0002] During the assembly of an excimer laser, the positioning of the pre-ionization tube in the anode assembly is a problem. Traditionally, the pre-ionization tube positioning method involves pre-positioning the tube manually and indirectly using the flat surface of a material. A screw is then inserted through a through-hole on the anode base to tighten the pre-ionization tube and lock it in place. Because the outer surface of the pre-ionization tube is a smooth cylindrical surface, it can easily rotate during positioning, resulting in the notches at both ends of the pre-ionization tube not facing upward. Inaccurate positioning of the pre-ionization tube can affect the subsequent installation of related components. Therefore, to accurately position the pre-ionization tube, it must be disassembled and fixed multiple times to adjust its position. This method requires a significant amount of time and effort and can also easily damage the pre-ionization tube. Summary of the Invention

[0003] Based on this, an object of the present invention is to provide a positioning fixture and installation method for an excimer laser preionization tube. The positioning fixture has a simple structure and is easy to use. It can quickly and accurately position the preionization tube, thereby simplifying the installation steps of the preionization tube and shortening the installation time, and can ensure the assembly quality of the preionization tube.

[0004] A positioning fixture for an excimer laser preionization tube, the positioning fixture having a base and a step member extending upward from the base, the base having a base side surface, the base side surface being arranged on a side of the base close to the step member, the step member having a protruding portion protruding from the top of the base, and the step member having a first side surface and a second side surface opposite to the first side surface, the second side surface being located on a side of the step member away from the base, the second side surface extending to form at least two positioning members, each of the positioning members being composed of a cylinder and a positioning member integrally extending and formed on the cylinder The positioning fixture is composed of a positioning block, and is suitable for being arranged on the step structure of the anode base of the excimer laser. It can form a state in which the base side surface of the base is supported by the step end surface of the anode base and the second side surface of the step member is supported by the terminal end surface of the pre-ionization tube of the excimer laser, so that the distance between the terminal end surface of the pre-ionization tube and the step end surface is equal to the distance from the second side surface to the base side surface; and it can also form a state in which the cylinder is inserted into the pre-ionization tube and the positioning block is located in the notch of the pre-ionization tube, so as to limit the rotational movement of the pre-ionization tube.

[0005] In one embodiment of the present invention, the distance between the second side surface and the side surface of the base is set to 0.5 mm.

[0006] In one embodiment of the present invention, the positioning block is a cubic structure.

[0007] In one embodiment of the present invention, the positioning tool further has a reinforcing rib, which integrally connects the base and the step member and is used to support the step member. The base is also provided with a weight-reducing hole.

[0008] In one embodiment of the present invention, the positioning tool is an integrally formed plastic part.

[0009] In another aspect, the present invention further provides a method for installing an excimer laser preionization tube, comprising the following steps:

[0010] S1. Setting the preionization tube on the anode base of the excimer laser;

[0011] S2. Placing a positioning fixture at each end of the anode base, such that the base side of the positioning fixture abuts against the stepped end surface of the anode base and the second side of the positioning fixture abuts against the terminal end surface of the pre-ionization tube, and such that when the cylindrical body of the positioning fixture is inserted into the pre-ionization tube and the positioning block of the positioning fixture is located in the notch of the pre-ionization tube, the pre-ionization tube is positioned between the two positioning fixtures; and

[0012] S3. Locking and fixing the pre-ionization tube and the anode base by using a plurality of locking pieces.

[0013] In one embodiment of the present invention, step S3 further includes the steps of:

[0014] S31, preliminarily fixing the pre-ionization tube and the anode base one by one in the corresponding through holes of the anode base using a plurality of the locking members in order from the middle to both sides of the anode base; and

[0015] S32. After the initial fixation, tighten the locking pieces one by one to complete the final fixation of the pre-ionization tube and the anode base.

[0016] In one embodiment of the present invention, the method for installing a preionization tube for an excimer laser further comprises the step of: S4, removing the positioning fixture, and completing the assembly of the preionization tube when confirming that the preionization tube has no relative movement.

[0017] In one embodiment of the present invention, in step S2, the distance between the end faces at both ends of the pre-ionization tube and the corresponding step end faces is maintained at 0.5 mm by the corresponding positioning fixtures.

[0018] In one embodiment of the present invention, step S1 further includes the following steps:

[0019] S11, assembling two anode ceramic sheets on both sides of the anode main electrode, so that an assembly area is formed between each anode ceramic sheet and the anode main electrode;

[0020] S12, placing the assembled structure of the anode ceramic sheet and the anode main electrode in the anode base, and fixing the anode main electrode and the anode base with screws; and

[0021] S13, steadily inserting the pre-ionization tube into the assembly area formed by assembling the corresponding anode main electrode and the anode ceramic sheet.

[0022] The positioning fixture of the present invention can achieve the following beneficial technical effects: when used to assemble the preionization tube, the positioning fixture can accurately maintain the distance between the terminal end face of the preionization tube and the stepped end face of the anode base at 0.5 mm, and the positioning block of the positioning fixture can prevent the preionization tube from rotating, ensuring that the notch of the preionization tube is facing upward, thereby achieving rapid and accurate positioning of the preionization tube and ensuring the assembly quality of the preionization tube. At the same time, it also avoids the damage to the preionization tube caused by multiple disassembly and assembly due to inaccurate positioning of the preionization tube in the prior art, effectively protecting the preionization tube. In addition, the positioning fixture is an integrally molded plastic part with a simple structure, light and compact, and easy to operate. It is understandable that the present invention also provides a method for installing a preionization tube for an excimer laser that is fast to install, simple to operate, and has good assembly quality.

[0023] Further objects and advantages of the present invention will be fully apparent from an understanding of the following description and accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the three-dimensional structure of the positioning tool according to a preferred embodiment of the present invention.

[0025] Figure 2 This is a schematic diagram of the use of the positioning fixture according to the preferred embodiment of the present invention for assembling a pre-ionization tube.

[0026] Figure 3 Schematic diagram of the three-dimensional structure of the excimer laser anode assembly according to the preferred embodiment of the present invention.

[0027] Figure 4 Schematic diagram of a portion of the structure of the excimer laser anode assembly according to the preferred embodiment of the present invention.

[0028] Figure 5 Schematic diagram of a portion of the structure of the excimer laser anode assembly according to the preferred embodiment of the present invention.

[0029] Figure 6 4 is a flowchart of the installation method of the excimer laser preionization tube according to the preferred embodiment of the present invention.

[0030] Explanation of the accompanying drawings: positioning tool 10; base 11; base side 111; weight-reducing hole 110; step member 12; protruding portion 121; first side 122; second side 123; positioning member 124; cylinder 1241; positioning block 1242; reinforcing rib 13; excimer laser anode assembly 20; anode base 21; step structure 211; step end face 212; through hole 210; anode main electrode 22; pre-ionization tube 23; notch 231; locking member 24; anode ceramic sheet 25. DETAILED DESCRIPTION

[0031] The following description is intended to disclose the present invention and enable those skilled in the art to implement the present invention. The preferred embodiments described below are provided for illustrative purposes only, and those skilled in the art will readily appreciate other obvious variations. The basic principles of the present invention defined in the following description may be applied to other embodiments, variations, improvements, equivalents, and other technical solutions that do not depart from the spirit and scope of the present invention.

[0032] Those skilled in the art should understand that, in the disclosure of the present invention, the terms "vertical", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like to indicate orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the above terms should not be understood as limiting the present invention.

[0033] It is to be understood that the term "one" should be understood as "at least one" or "one or more", that is, in one embodiment, the number of an element may be one, while in another embodiment, the number of the elements may be multiple, and the term "one" should not be understood as a limitation on the quantity.

[0034] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections, or mutual communication; direct connections or indirect connections through an intermediate medium; and internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0035] like Figure 1 and Figure 2 As shown in FIG. 1 , the specific structure of the positioning tool 10 according to a preferred embodiment of the present invention is explained. Figure 1 As shown, the positioning tool 10 has a base 11 and a step member 12 extending upward from the base 11, the base 11 has a base side 111, the base side 111 is arranged on the side of the base 11 close to the step member 12, the step member 12 has a protruding portion 121 protruding from the top of the base 11, and the step member 12 has a first side 122 and a second side 123 opposite to the first side 122, the second side 123 is located on the side of the step member 12 away from the base 11, and the second side 123 extends to form at least two positioning members 124, each of the positioning members 124 is composed of a cylinder 1241 and a positioning block 1242 integrally extending and formed on the cylinder 1241.

[0036] like Figure 2 As shown, the specific manner in which the positioning fixture 10 is used to position and assemble the preionization tube 23 is illustrated. The positioning fixture 10 is disposed on the step structure 211 of the anode base 21 of the excimer laser, and forms a state in which the base side surface 111 of the base 11 abuts against the step end surface 212 of the anode base 21, and the second side surface 123 of the step member 12 abuts against the terminal end surface of the preionization tube 23 of the excimer laser, so that the distance between the terminal end surface of the preionization tube 23 and the step end surface 212 is equal to the distance from the second side surface 123 to the base side surface 111. At the same time, the cylindrical body 1241 is inserted into the preionization tube 23, and the positioning block 1242 is located in the notch 231 of the preionization tube 23, so as to limit the rotational movement of the preionization tube 23.

[0037] It can be understood that the positioning fixture 10 of the present invention is an integrally formed part, that is, the distance between the second side surface 123 of the step part 12 and the base side surface 111 is fixed. Therefore, when the positioning fixture 10 is arranged on the step structure 211 of the anode base 21, the distance between the terminal end face of the pre-ionization tube 23 and the step end face 212 is accurately maintained by the positioning fixture 10, so that the assembly requirements of the pre-ionization tube 23 on the anode base 21 can be accurately met.

[0038] In particular, in this embodiment of the present invention, the distance between the second side surface 123 of the step member 12 and the base side surface 111 of the base 11 is set to 0.5 mm. Therefore, when the positioning fixture 10 is set on the step structure 211 of the anode base 21, the distance between the terminal end face of the pre-ionization tube 23 and the step end face 212 can be accurately maintained at 0.5 mm.

[0039] It should be understood that, in some embodiments of the present invention, the distance between the second side surface 123 of the step member 12 and the base side surface 111 of the base 11 can be specifically set according to the actual installation requirements of the pre-ionization tube 23 of the anode assembly of the excimer laser, that is, the distance between the second side surface 123 of the step member 12 and the base side surface 111 of the base 11 can be set to other values, and the present invention does not impose any restrictions on this.

[0040] It can be understood that the diameter of the cylinder 1241 of the positioning member 124 is slightly smaller than the diameter of the pre-ionization tube 23, so that the cylinder 1241 can be inserted into the pre-ionization tube 23, the width of the positioning block 1242 is smaller than the width of the notch 231 of the pre-ionization tube 23, and the overall height of the positioning block 1242 and the cylinder 1241 is slightly larger than the diameter of the pre-ionization tube 23, so that when the cylinder 1241 is inserted into the pre-ionization tube 23, the positioning block 1242 is smaller than the width of the notch 231 of the pre-ionization tube 23. The upper surface of the positioning block 1242 can be located above the notch 231. In other words, when the cylinder 1241 is inserted into the pre-ionization tube 23, the positioning block 1242 protrudes from the notch 231. The positioning block 1242 can limit the rotational movement of the pre-ionization tube 23, that is, limit the radial movement of the pre-ionization tube 23. In this way, when the pre-ionization tube 23 is locked via the locking member 24, the pre-ionization tube 23 will not rotate, thereby avoiding damage to the pre-ionization tube 23.

[0041] It should also be understood that the positioning block 1242 can not only limit the rotational movement of the pre-ionization tube 23 , but also ensure that the notch 231 of the pre-ionization tube 23 faces upward, which is beneficial for the subsequent assembly operation of the excimer laser anode assembly 20 .

[0042] Particularly, in this embodiment of the present invention, the positioning block 1242 is a quadrilateral structure, preferably a rectangular parallelepiped structure.

[0043] It is worth mentioning that the positioning tool 10 also has a reinforcing rib 13, which integrally connects the base 11 and the step member 12 for supporting the step member 12. The base 11 is also provided with a weight-reducing hole 110 to reduce the weight of the positioning tool 10.

[0044] It is also worth mentioning that the positioning fixture 10 is an integrally molded plastic part, thus being simple in structure, lightweight, compact, and easy to operate. Furthermore, after the preionization tube 23 is positioned and assembled, the positioning member 124 can be removed from the excimer laser anode assembly 20 and reused multiple times.

[0045] In this embodiment of the present invention, two positioning fixtures 10 are used to position the preionization tube 23. The two positioning fixtures 10 are respectively arranged on the step structures 211 at both ends of the anode base 21. The preionization tube 23 can be quickly and accurately positioned between the two positioning fixtures 10. In other words, the movement of the preionization tube 23 along its axial direction is restricted by the two positioning fixtures 10. Moreover, the radial movement of the preionization tube 23 is restricted by the positioning member 124 of the preionization positioning fixture. Therefore, the axial movement and radial movement of the preionization tube 23 are both fixed by the preionization positioning fixture. After the preionization tube 23 is positioned, the locking member 24 is tightened to lock and fix the preionization tube 23, thereby completing the assembly of the preionization tube 23, thereby ensuring the assembly quality of the preionization tube 23.

[0046] like Figures 3 to 5 As shown, the present invention further provides an excimer laser anode assembly 20, which uses the positioning fixture 10 to position and install a pre-ionization tube 23. The excimer laser anode assembly 20 includes the anode base 21, an anode main electrode 22 disposed on the anode base 21, and pre-ionization tubes 23 disposed on both sides of the anode electrode. The two ends of the anode base 21 are respectively formed with step structures 211 and step end surfaces 212. The notch 231 of the pre-ionization tube 23 faces upward, and the distance between the end surfaces of the two ends of the pre-ionization tube 23 and the corresponding step end surfaces 212 is 0.5 mm to prevent the pre-ionization tube 23 from being damaged by collision.

[0047] It's worth noting that notches 231 are provided at each end of the preionization tube 23 to accommodate other components of the excimer laser. When the positioning fixture 10 is positioned on the stepped structure 211 of the anode base 21, the positioning blocks 1242 of the positioning fixture 10 orient the notches 231 of the preionization tube 23 upward, restricting the rotational movement of the preionization tube 23 and facilitating the locking and positioning of the preionization tube 23.

[0048] In addition, it is worth mentioning that a plurality of through holes 210 are provided at the bottom of the anode base 21 along its length direction, and the excimer laser anode assembly 20 also includes a plurality of locking members 24 corresponding to the through holes 210 , and the locking members 24 are used to lock the positioning fixture 10 through the through holes 210 after the pre-ionization tube 23 is positioned by the positioning fixture 10 .

[0049] In this preferred embodiment of the present invention, the pre-ionization tube 23 is a ceramic tube, and the locking member 24 is a ceramic tube top screw.

[0050] Furthermore, the excimer laser anode assembly 20 further includes two anode ceramic sheets 25 , and the pre-ionization tube 23 and the anode main electrode 22 are disposed between the two anode ceramic sheets 25 .

[0051] It is worth mentioning that the two anode ceramic sheets 25 have an L-shaped cross-section.

[0052] It is understandable that in other embodiments of the present invention, the outermost end surface of the anode base 21 and the work surface may be used as an assembly reference to set the pre-ionization tube 23 positioning member 124 to position the pre-ionization tube 23, and the present invention is not limited to this.

[0053] like Figure 6 As shown, the present invention also provides a method for installing a pre-ionization tube of an excimer laser, comprising the following steps:

[0054] S1, placing the pre-ionization tube 23 on the anode base 21;

[0055] S2. Stably placing one positioning fixture 10 at each end of the anode base 21, respectively, so that the base side surface 111 of the positioning fixture 10 abuts against the stepped end surface 212 of the anode base 21 and the second side surface 123 of the positioning fixture 10 abuts against the terminal end surface of the pre-ionization tube 23, and so that the cylindrical body 1241 of the positioning fixture 10 is inserted into the pre-ionization tube 23 and the positioning block 1242 of the positioning fixture 10 is located in the notch 231 of the pre-ionization tube 23, so that the pre-ionization tube 23 is positioned between the two positioning fixtures 10; and

[0056] S3. The pre-ionization tube 23 and the anode base 21 are locked and fixed by using a plurality of locking members 24 .

[0057] It is worth mentioning that the step S1 specifically includes the following steps:

[0058] S11, assembling the two anode ceramic sheets 25 on both sides of the anode main electrode 22, respectively, so that an assembly area is formed between each anode ceramic sheet 25 and the anode main electrode 22;

[0059] S12, placing the assembled structure of the anode ceramic sheet 25 and the anode main electrode 22 in the anode base 21, and fixing the anode main electrode 22 and the anode base 21 with screws; and

[0060] S13 , smoothly inserting the pre-ionization tube 23 into the assembly area formed by assembling the corresponding anode main electrode 22 and the anode ceramic sheet 25 , so that the pre-ionization tube 23 is placed on the anode base 21 .

[0061] It is understandable that, in step S13 , the pre-ionization tube 23 should be smoothly placed into the assembly area to avoid collision between the pre-ionization tube 23 and the anode main electrode 22 or the anode ceramic sheet 25 and thus damage.

[0062] In particular, in step S2, the distance between the terminal end faces at both ends of the pre-ionization tube 23 and the corresponding stepped end faces 212 is maintained at 0.5 mm by the corresponding positioning fixtures 10, so that after the pre-ionization tube 23 and the anode base 21 are locked and fixed by the multiple locking members 24, the distance between the terminal end faces of the pre-ionization tube 23 and the stepped end face 212 of the anode base 21 after final assembly can be maintained at 0.5 mm, thereby ensuring that the pre-ionization tube 23 is not easily damaged.

[0063] Furthermore, the step S3 specifically includes the steps of:

[0064] S31, preliminarily fixing the preionization tube 23 and the anode base 21 one by one in the corresponding through holes 210 of the anode base 21 using a plurality of the locking members 24 in a sequence from the middle to both sides of the anode base 21; and

[0065] S32 . After the initial fixation, tighten the locking members 24 one by one to complete the final fixation of the pre-ionization tube 23 and the anode base 21 .

[0066] It is worth mentioning that the locking member 24 can be pre-assembled in the through hole 210 of the anode base 21 , and the head of the locking member 24 is temporarily not exposed to prevent interference with the assembly of the pre-ionization tube 23 .

[0067] It should be understood that the pre-ionization tube 23 is a ceramic tube with a relatively thin thickness, and is very likely to break and be damaged when subjected to concentrated force. Therefore, when fixing the pre-ionization tube 23 and the anode base 21 using the multiple locking members 24, it is first necessary to slowly tighten the multiple locking members 24 one by one to achieve preliminary fixation between the pre-ionization tube 23 and the anode base 21, and then slowly tighten each locking member 24 one by one to complete the final fixation of the pre-ionization tube 23 and the anode base 21, thereby preventing the pre-ionization tube 23 from being damaged due to local force.

[0068] It is worth mentioning that the method for installing the preionization tube 23 of the excimer laser further includes the step: S4, removing the positioning fixture 10, and completing the assembly of the preionization tube 23 when confirming that the preionization tube 23 has no relative movement.

[0069] In this preferred embodiment of the present invention, the pre-ionization tube 23 is a ceramic tube, and the locking member 24 is a ceramic tube top screw.

[0070] In summary, the present invention provides a positioning fixture 10 and a method for installing a preionization tube that are simple in structure and easy to use, capable of quickly and accurately positioning a preionization tube 23 to ensure the assembly quality of the preionization tube 23. When used to assemble the preionization tube 23, the positioning fixture 10 can precisely maintain the distance between the terminal end face of the preionization tube 23 and the stepped end face 212 of the anode base 21 at 0.5 mm. Furthermore, the positioning block 1242 of the positioning fixture 10 prevents the preionization tube 23 from rotating, ensuring that the notch 231 of the preionization tube 23 faces upward, thereby achieving rapid and accurate positioning of the preionization tube 23 and ensuring the assembly quality of the preionization tube 23. This also avoids damage to the preionization tube 23 caused by multiple disassembly and assembly due to inaccurate positioning of the preionization tube 23 in the prior art, effectively protecting the preionization tube 23.

[0071] The technical features of the above embodiments can be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0072] The above embodiments merely represent preferred embodiments of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent. It should be noted that a person skilled in the art would be able to make various modifications and improvements without departing from the spirit of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the patent for this invention shall be determined by the appended claims.

Claims

1. A method for installing an excimer laser preionization tube, wherein the method is performed using a positioning fixture (10) for the excimer laser preionization tube, and wherein: The positioning tool (10) has a base (11) and a step member (12) extending upward from the base (11), the base (11) has a base side (111), the base side (111) is arranged on a side of the base (11) close to the step member (12), the step member (12) has a protruding portion protruding from the top of the base (11), and the step member (12) has a first side (122) and a second side (123) opposite to the first side (122), the second side (123) is located on a side of the step member (12) away from the base (11), at least two positioning members (124) are formed by extending outward on the second side (123), and each positioning member (124) is composed of a cylinder (1241) and a positioning block (1242) integrally extending and formed on the cylinder (1241); The installation method of the excimer laser preionization tube comprises the following steps: S1, placing the preionization tube (23) on the anode base (21) of the excimer laser; S2, placing one positioning fixture (10) at each end of the anode base (21), so that the base side surface (111) of the positioning fixture (10) abuts against the step end surface (212) of the anode base (21) and the second side surface (123) of the positioning fixture (10) abuts against the terminal end surface of the pre-ionization tube (23), and when the cylindrical body (1241) of the positioning fixture (10) is inserted into the pre-ionization tube (23) and the positioning block (1242) of the positioning fixture (10) is located in the notch (231) of the pre-ionization tube (23), the pre-ionization tube (23) is positioned between the two positioning fixtures (10); S3. The pre-ionization tube (23) and the anode base (21) are locked and fixed by a plurality of locking members (24).

2. The method for installing an excimer laser preionization tube according to claim 1, wherein: The distance between the second side surface (123) and the base side surface (111) is set to 0.5 mm.

3. The method for installing an excimer laser preionization tube according to claim 1, wherein: The positioning block (1242) is a cubic structure.

4. The method for installing an excimer laser preionization tube according to claim 1, wherein: The positioning tool (10) also has a reinforcing rib (13), which integrally connects the base (11) and the step member (12) and is used to support the step member (12). The base (11) is also provided with a weight-reducing hole (110).

5. The method for installing an excimer laser preionization tube according to claim 1, wherein: The positioning tool (10) is an integrally formed plastic part.

6. The method for installing an excimer laser preionization tube according to claim 1, wherein: The step S3 further comprises the steps of: S31, preliminarily fixing the preionization tube (23) and the anode base (21) one by one in the corresponding through holes (210) of the anode base (21) using a plurality of locking members (24) in a sequence from the middle of the anode base (21) to both sides; and S32. After the initial fixation, the locking members (24) are tightened one by one to complete the final fixation of the pre-ionization tube (23) and the anode base (21).

7. The method for installing an excimer laser preionization tube according to claim 1, wherein: The method further comprises the step of: S4, removing the positioning tool (10), and completing the assembly of the pre-ionization tube (23) when confirming that the pre-ionization tube (23) has no relative movement.

8. The method for installing an excimer laser preionization tube according to claim 1, wherein: In step S2, the distance between the end faces at both ends of the pre-ionization tube (23) and the corresponding step end faces (212) is maintained at 0.5 mm by the corresponding positioning fixtures (10).

9. The method for installing an excimer laser preionization tube according to any one of claims 1 or 6-8, characterized in that: The step S1 further comprises the following steps: S11, assembling two anode ceramic sheets (25) on both sides of the anode main electrode (22), respectively, so that an assembly area is formed between each of the anode ceramic sheets (25) and the anode main electrode (22); S12, placing the assembled whole structure of the anode ceramic sheet (25) and the anode main electrode (22) in the anode base (21), and fixing the anode main electrode (22) and the anode base (21) together by screws; and S13, smoothly inserting the pre-ionization tube (23) into the assembly area formed by assembling the corresponding anode main electrode (22) and the anode ceramic sheet (25).

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