Test probe structure

Abstract

The present invention discloses a test probe structure, including a body, a support plate located below the body, a probe for contacting a chip to be tested and a moving point contact probe, when the probe contacts the chip to be tested, the moving point contact probe rotates with the support plate away from the static point contact probe, and the dynamic and static point contact probes change from an initial state of mutual contact to a state of mutual separation, the middle of the support plate is connected to the body through a second elastic member arranged vertically, a first pin shaft perpendicular to the length direction of the support plate is installed in the area above the support plate between the probe and the second elastic member through an adapter, a lower end of a first elastic member in a stretched state is connected to the first pin shaft, and the upper end of the first elastic member is connected to a fourth pin shaft in the body and located above the second pin shaft and the third pin shaft. The present invention solves the problem of unstable and inconsistent test data during long-term use due to the fatigue of the probe station.

Description

Technical Field

[0001] The invention relates to a testing probe structure, belonging to the technical field of chip testing. Background Art

[0002] In the test process of a single laser chip (LD) in optical communication, the stability of the probe plays a very important role. Since the size of a single chip is very small (generally in the range of 300μm), the test probe will more or less push the position or angle of the chip to shift during contact with the chip. Once the position and angle of the chip change, it will directly affect the stability of subsequent test indicators and the test efficiency. In addition, the pressure stability of the test probe will also directly feed back to the stability of the test value. For mass production testing, a probe needs to detect a large number of chips, and the same chip needs to be tested multiple times. The stability and durability of the powered probe assembly will directly affect the consistency and reproducibility of the test data. Therefore, during the test process, very stringent requirements are placed on the long-term stability of the test probe structure. Summary of the invention

[0003] The inventors found that the change in pressure of the probe on the chip will cause a change in contact resistance, thereby affecting the consistency of the test data. During a long test process, if the pressure change is too large, it will be impossible to distinguish whether the change in the test result is caused by the chip itself or the machine, resulting in the loss of comparability of the test results. Based on the above findings, the purpose of the present invention is to provide a test probe structure, which solves the problem of unstable and inconsistent test data during long-term use due to the fatigue of the probe station.

[0004] To achieve the above-mentioned purpose, the technical solution adopted by the present invention is: a test probe structure, comprising a body, a support plate located below the body, a probe for contacting a chip to be tested and a moving point contact probe, the probe and the moving point contact probe are respectively installed at both ends of the support plate, the middle part of the support plate is connected to the body through a second elastic member arranged vertically, a static point contact probe is arranged on one side of the lower end surface of the body, which is located above the dynamic point contact probe and corresponds to the dynamic point contact probe, when the probe contacts the chip to be tested, the dynamic point contact probe rotates with the support plate away from the static point contact probe, and the dynamic and static point contact probes change from an initial state of contact with each other to a state of separation from each other;

[0005] A first pin shaft perpendicular to the length direction of the support plate is installed in the area above the support plate between the probe and the second elastic member through an adapter seat, and a second pin shaft and a third pin shaft parallel to the first pin shaft are arranged on the lower protrusion located on the other side of the lower end surface of the body, and the second pin shaft and the third pin shaft are located above the first pin shaft and on both sides thereof, and both ends of the second pin shaft and the third pin shaft extend from the front and rear sides of the lower protrusion respectively, and the first bearing and the second bearing are installed at both ends of the second pin shaft, and the third bearing and the fourth bearing are installed at both ends of the third pin shaft, the first bearing and the third bearing located at the front side of the lower protrusion are fitted with the outer circumferential surface of one end of the first pin shaft, and the second bearing and the fourth bearing located at the rear side of the lower protrusion are fitted with the outer circumferential surface of the other end of the first pin shaft, the lower end of a first elastic member in a stretched state is connected to the first pin shaft, and the upper end of the first elastic member is connected to the fourth pin shaft in the body and located above the second pin shaft and the third pin shaft, so that the moving circles of the first bearing, the second bearing, the third bearing and the fourth bearing are kept in pressure-holding contact with the outer circumferential surface of the first pin shaft;

[0006] A hanging rod is installed in the area of ​​the support plate between the moving point contact probe and the adapter, a hanging hole is provided on the main body, two ends of the second elastic member are respectively connected to the hanging rod and the hanging hole, the second elastic member is a spring, and the hanging rod is provided in the through hole of the support plate.

[0007] The further improved scheme in the above technical scheme is as follows:

[0008] 1. In the above solution, a cantilever is installed at one end of the support plate away from the moving point contact probe, and the probe is installed on the end of the cantilever away from the support plate through a probe seat.

[0009] 2. In the above solution, the cantilever further includes a vertical plate and a horizontal plate connected to the upper end of the vertical plate, the lower end of the vertical plate is connected to the support plate, and a probe seat is installed at one end of the horizontal plate away from the vertical plate.

[0010] Due to the application of the above technical solution, the present invention has the following advantages compared with the prior art:

[0011] 1. The test probe structure of the present invention is characterized in that a first pin shaft perpendicular to the length direction of the support plate is installed on a rotatable support plate on which the probe is installed, and a second and a third pin shaft fixed on the body are arranged on both sides above the first pin shaft, and then four bearings fitted with the first pin shaft are installed on both ends of the second and third pin shafts, and finally the first pin shaft on the support plate and the fourth pin shaft in the body are tightened by a first elastic member, so that the outer rings of the four bearings maintain a pressing contact with the outer circumferential surface of the first pin shaft and can rotate relatively, thereby eliminating the fatigue problem existing in the prior art, facilitating the accurate setting of position parameters in the horizontal and vertical directions, and maintaining the stability of the initial pressure setting value after long-term and high-frequency use, thereby improving the stability, repeatability, comparability and consistency of the detection data, and also overcoming the defect that the probe has a slight jitter in the vertical direction when the probe is separated from the chip, thereby facilitating shortening the time between adjacent detections, improving the detection efficiency and avoiding unnecessary damage to the chip; it also eliminates the slight rotational offset of the probe in the horizontal direction, ensuring the accuracy of the detection data, and further improving the stability, repeatability, comparability and consistency of the detection data.

[0012] 2. The test probe structure of the present invention has a support plate located in the area between the moving point contact probe and the adapter seat, and a hanging rod is installed thereon; a lifting rod is located in the guide channel of the main body; the two ends of the second elastic member are respectively connected to the hanging rod and the lower end of the lifting rod; the lower end of a rotating rod is connected to the upper end of the lifting rod, and is used to drive the lifting rod to move in the vertical direction, so as to facilitate the adjustment of the downward pressure of the probe, thereby greatly expanding the application objects and realizing the accuracy of the pressure of the probe on the chip when testing different chips, and having a wide range of adaptability; further, the surface of the guide channel in contact with the lifting rod is provided with at least one pair of positioning pins and positioning line grooves for the positioning pins to be embedded, which can effectively prevent the lifting rod from rotating when adjusting by the rotating rod, thereby ensuring the accuracy and stability of the adjustment. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Attached Figure 1 It is a structural front view of the test probe structure of the present invention;

[0014] Attached Figure 2 It is a partial structural schematic diagram of the test probe structure of the present invention;

[0015] Attached Figure 3 for Figure 2 Schematic diagram of the structure in the figure;

[0016] Attached Figure 4 A partial structural cross-sectional view of a test probe structure of the present invention in one direction;

[0017] Attached Figure 5 A cross-sectional view of a local structure of the test probe structure of the present invention in another direction;

[0018] Attached Figure 6 A bottom view of a partial structure of a test probe structure of the present invention;

[0019] Attached Figure 7 It is a structural schematic diagram of one end of the support plate in the test probe structure of the present invention;

[0020] Attached Figure 8 It is a cross-sectional view of the local structure in Example 2 of the test probe structure of the present invention.

[0021] In the above drawings: 1. body; 2. support plate; 31. dynamic point contact probe; 32. static point contact probe; 4. cantilever; 41. vertical plate; 42. horizontal plate; 5. probe seat; 51. probe; 6. adapter seat; 61. front baffle; 62. rear baffle; 7. first through hole; 8. guide groove; 9. first pin shaft; 10. lower protrusion; 11. second pin shaft; 12. third pin shaft; 13. first bearing; 14. second bearing; 15. third bearing; 16. fourth bearing; 17. vertical through hole; 18. first elastic member; 19. fourth pin shaft; 20. hanging rod; 21. lifting rod; 211. hanging hole; 22. guide channel; 23. second elastic member; 24. rotating rod; 251. positioning pin; 252. positioning line groove. DETAILED DESCRIPTION

[0022] In the description of this patent, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention; the terms "first", "second", and "third" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance; in addition, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be a connection between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in this patent can be understood according to specific circumstances.

[0023] Embodiment 1: A test probe structure, comprising a body 1, a support plate 2 located below the body 1, a probe 51 for contacting a chip to be tested and a moving point contact probe 31, wherein the probe 51 and the moving point contact probe 31 are respectively mounted at both ends of the support plate 2, the middle portion of the support plate 2 is connected to the body 1 via a second elastic member 23 vertically arranged, and a static point contact probe 32 located above the moving point contact probe 31 and corresponding to the moving point contact probe 31 is arranged on one side of the lower end surface of the body 1;

[0024] A first pin shaft 9 perpendicular to the length direction of the support plate 2 is installed in the area above the support plate 2 between the probe 51 and the second elastic member 23 through an adapter seat 6. A second pin shaft 11 and a third pin shaft 12 parallel to the first pin shaft 9 are arranged on the lower protrusion 10 located on the other side of the lower end surface of the body 1. The second pin shaft 11 and the third pin shaft 12 are located above the first pin shaft 9 and on both sides thereof, and both ends of the second pin shaft 11 and the third pin shaft 12 extend from the front and rear sides of the lower protrusion 10. The first bearing 13 and the second bearing 14 are installed at both ends of the second pin shaft 11, and the third bearing 15 is installed at both ends of the third pin shaft 12. , and the fourth bearing 16. The first bearing 13 and the third bearing 15 located on the front side of the lower protrusion 10 are fitted with the outer circumferential surface of one end of the first pin shaft 9, and the second bearing 14 and the fourth bearing 16 located on the rear side of the lower protrusion 10 are fitted with the outer circumferential surface of the other end of the first pin shaft 9. The lower end of a first elastic member 18 in a stretched state is connected to the first pin shaft 9, and the upper end of the first elastic member 18 is connected to the fourth pin shaft 19 in the body 1 and located above the second pin shaft 11 and the third pin shaft 12, so that the moving circles of the first bearing 13, the second bearing 14, the third bearing 15 and the fourth bearing 16 are kept in pressure-holding contact with the outer circumferential surface of the first pin shaft 9.

[0025] The support plate 2 is provided with a hanging rod 20 in the area between the moving point contact probe 31 and the adapter 6, the body 1 is provided with a hanging hole 211, and the two ends of the second elastic member 23 are respectively connected to the hanging rod 20 and the hanging hole 211; the hanging rod 20 is provided in the through hole of the support plate 2; the first elastic member 18 and the second elastic member 23 are both springs;

[0026] A cantilever 4 is installed at the end of the support plate 2 away from the moving point contact probe 31, and the probe 51 is installed on the end of the cantilever 4 away from the support plate 2 through a probe seat 5; the cantilever 4 further includes a vertical plate 41 and a horizontal plate 42 connected to the upper end of the vertical plate 41, the lower end of the vertical plate 41 is connected to the support plate 2, and the probe seat 5 is installed at the end of the horizontal plate 42 away from the vertical plate 41.

[0027] Embodiment 2: A test probe structure comprises a main body 1, a support plate 2 located below the main body 1, a probe 51 for contacting a chip to be tested and a moving point contact probe 31, wherein the probe 51 and the moving point contact probe 31 are respectively mounted at both ends of the support plate 2, the middle portion of the support plate 2 is connected to the main body 1 via a second elastic member 23 arranged vertically, a static point contact probe 32 located above the moving point contact probe 31 and corresponding to the moving point contact probe 31 is arranged on one side of the lower end surface of the main body 1, when the probe contacts the chip to be tested, the moving point contact probe rotates with the support plate away from the static point contact probe, and the moving and static point contact probes change from an initial state of contact with each other to a state of separation from each other, and after receiving a signal of separation of the moving and static point contact probes, the chip test control system performs a power-on operation to make the probe electrically conductive with the chip, and then tests various parameters of the chip;

[0028] A first pin shaft 9 perpendicular to the length direction of the support plate 2 is installed in the area above the support plate 2 between the probe 51 and the second elastic member 23 through an adapter seat 6. A second pin shaft 11 and a third pin shaft 12 parallel to the first pin shaft 9 are arranged on the lower protrusion 10 located on the other side of the lower end surface of the body 1. The second pin shaft 11 and the third pin shaft 12 are located above the first pin shaft 9 and on both sides thereof, and both ends of the second pin shaft 11 and the third pin shaft 12 extend from the front and rear sides of the lower protrusion 10. The first bearing 13 and the second bearing 14 are installed at both ends of the second pin shaft 11, and the third bearing 15 is installed at both ends of the third pin shaft 12. , and the fourth bearing 16. The first bearing 13 and the third bearing 15 located on the front side of the lower protrusion 10 are fitted with the outer circumferential surface of one end of the first pin shaft 9, and the second bearing 14 and the fourth bearing 16 located on the rear side of the lower protrusion 10 are fitted with the outer circumferential surface of the other end of the first pin shaft 9. The lower end of a first elastic member 18 in a stretched state is connected to the first pin shaft 9, and the upper end of the first elastic member 18 is connected to the fourth pin shaft 19 in the body 1 and located above the second pin shaft 11 and the third pin shaft 12, so that the moving circles of the first bearing 13, the second bearing 14, the third bearing 15 and the fourth bearing 16 are kept in pressure-holding contact with the outer circumferential surface of the first pin shaft 9.

[0029] The support plate 2 is provided with a hanging rod 20 in the area between the moving point contact probe 31 and the adapter 6, a lifting rod 21 is located in the guide channel 22 of the body 1, two ends of the second elastic member 23 are respectively connected to the upper end of the hanging rod 20 and the lower end of the lifting rod 21, and a rotating rod 24 is connected at the lower end to the upper end of the lifting rod 21 for driving the lifting rod 21 to move in the vertical direction;

[0030] The surface of the guide channel 22 contacting the lifting rod 21 is provided with two pairs of positioning pins 251 and positioning line grooves 252 for the positioning pins 251 to be embedded in, and the two positioning pins 251 and the two positioning line grooves 252 are symmetrically arranged;

[0031] The positioning pin 251 is located on the side surface of the lifting rod 21, and the positioning line groove 252 is located on the inner wall of the guide channel 22;

[0032] The adapter seat 6 installed on the upper surface of the support plate 2 has a front baffle 61 and a rear baffle 62 arranged front and rear, and each of the front baffle 61 and the rear baffle 62 has a first through hole 7, and both ends of the first pin shaft 9 are respectively located in the first through holes 7 of the front baffle 61 and the rear baffle 62;

[0033] The front baffle plate 61 and the rear baffle plate 62 are both provided with two guide grooves 8 located on both sides of the first through hole 7, and the two ends of the second pin shaft 11 and the third pin shaft 12 are respectively embedded in the corresponding guide grooves 8;

[0034] The first bearing 13 and the third bearing 15 are located between the lower protrusion 10 and the front baffle 61, and the second bearing 14 and the fourth bearing 16 are located between the lower protrusion 10 and the rear baffle 62 respectively;

[0035] The upper end of the first elastic member 18 located in the vertical through hole 17 of the lower protrusion 10 is connected to the middle area of ​​the first pin shaft 9 located between the front baffle plate 61 and the rear baffle plate 62 .

[0036] When the above-mentioned test probe structure is adopted, the probe station is generally installed on a driving mechanism (such as a three-axis motion platform), and the probe station is moved to make the probe contact with the chip to be tested. While the probe applies downward pressure to the chip, it is subjected to an upward reaction force from the chip, driving the support plate to rotate, and the moving point contact probe installed on the support plate moves downward, and changes from an initial state of contact with the static point contact probe to a state of separation from the static point contact probe, indicating that the probe has applied appropriate pressure to the chip. At this time, the control system of the chip test performs a power-on operation to make the probe electrically conductive with the chip and test various parameters of the chip. After the test is completed, the support plate rotates in the opposite direction under the action of the second elastic member and returns to its initial horizontal position, and at the same time the moving point contact probe contacts the static point contact probe;

[0037] In the process of long-term testing of a large number of chips and reciprocating rotation of the support plate, the first elastic member makes the first pin shaft installed on the support plate fit with the four bearings installed on both sides and ends of the first pin shaft and on the main body, while ensuring that the support plate can rotate smoothly with the first pin shaft as a fulcrum, the first pin shaft is accurately limited, so that the support plate can only rotate without deviation in other directions; the fatigue problem existing in the prior art of using spring pieces is eliminated, which is conducive to accurately setting the position parameters in the horizontal and vertical directions, and can still maintain the stability of the initial pressure setting value after long-term and high-frequency use, thereby improving the stability, repeatability, comparability and consistency of the detection data, and also overcoming the defect that the probe has a slight vertical jitter when the probe is separated from the chip, which is conducive to shortening the time between adjacent detections, thereby improving the detection efficiency and avoiding unnecessary damage to the chip;

[0038] Furthermore, the slight rotational deviation of the probe in the horizontal direction is also eliminated, which ensures the accuracy of the test data and further improves the stability, repeatability, comparability and consistency of the test data;

[0039] In addition, it is convenient to adjust the downward pressure of the probe, thereby greatly expanding the application objects, realizing the accuracy of the probe pressure on the chip when testing different chips, and having a wide range of adaptability; further, the surface where the guide channel contacts the lifting rod is provided with at least one pair of positioning pins and positioning line grooves for the positioning pins to be embedded, which can effectively avoid the lifting rod from rotating when adjusting by the rotating rod, thereby ensuring the accuracy and stability of the adjustment.

[0040] The test probe structure of the present invention can be extended to other industries for semiconductor chip testing, and its use is not limited to the optical communication industry. All industries that need the test probe structure can be expanded and used simultaneously, and its adaptability is wide.

[0041] The above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with the technology to understand the content of the present invention and implement it accordingly, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A test probe structure, comprising a body (1), a support plate (2) located below the body (1), a probe (51) for contacting a chip to be tested, and a moving point contact probe (31), characterized in that: The probe (51) and the moving point contact probe (31) are respectively mounted on both ends of the support plate (2); the middle of the support plate (2) is connected to the body (1) via a second elastic member (23) arranged vertically; a static point contact probe (32) is arranged on one side of the lower end surface of the body (1) and is located above the moving point contact probe (31) and corresponds to the moving point contact probe (31); when the probe (51) contacts the chip to be tested, the moving point contact probe (31) rotates with the support plate (2) away from the static point contact probe (32), and the moving and static point contact probes (31; 32) change from an initial state of contact with each other to a state of separation from each other; A first pin shaft (9) perpendicular to the length direction of the support plate (2) is installed in the area above the support plate (2) between the probe (51) and the second elastic member (23) through an adapter seat (6); a second pin shaft (11) and a third pin shaft (12) parallel to the first pin shaft (9) are arranged on the lower protrusion (10) located on the other side of the lower end surface of the body (1); the second pin shaft (11) and the third pin shaft (12) are located above the first pin shaft (9) and on both sides thereof, and both ends of the second pin shaft (11) and the third pin shaft (12) extend from the front and rear sides of the lower protrusion (10); the first bearing (13) and the second bearing (14) are installed at both ends of the second pin shaft (11); and the third bearing (15) is installed at both ends of the third pin shaft (12). ), a fourth bearing (16), a first bearing (13) and a third bearing (15) located on the front side of the lower protrusion (10) are fitted with the outer circumferential surface of one end of the first pin shaft (9), a second bearing (14) and a fourth bearing (16) located on the rear side of the lower protrusion (10) are fitted with the outer circumferential surface of the other end of the first pin shaft (9), a lower end of a first elastic member (18) in a stretched state is connected to the first pin shaft (9), an upper end of the first elastic member (18) is connected to a fourth pin shaft (19) located in the body (1) and above the second pin shaft (11) and the third pin shaft (12), so that the respective moving circles of the first bearing (13), the second bearing (14), the third bearing (15) and the fourth bearing (16) are kept in press-holding contact with the outer circumferential surface of the first pin shaft (9); A hanging rod (20) is installed in the area of ​​the support plate (2) between the moving point contact probe (31) and the adapter (6); a hanging hole (211) is provided on the body (1); two ends of the second elastic member (23) are respectively connected to the hanging rod (20) and the hanging hole (211); the second elastic member (23) is a spring; and the hanging rod (20) is arranged in a through hole of the support plate (2).

2. The test probe structure according to claim 1, characterized in that: A cantilever (4) is mounted on one end of the support plate (2) away from the moving point contact probe (31), and the probe (51) is mounted on the end of the cantilever (4) away from the support plate (2) via a probe seat (5).

3. The test probe structure according to claim 2, characterized in that: The cantilever (4) further comprises a vertical plate (41) and a horizontal plate (42) connected to the upper end of the vertical plate (41); the lower end of the vertical plate (41) is connected to the support plate (2); and a probe seat (5) is installed at one end of the horizontal plate (42) away from the vertical plate (41).

Images