Heating device, heat utilization system and film heating element

Abstract

The present invention provides a new heating device and heat utilization system that utilizes an inexpensive, clean, and safe energy source, as well as a film-shaped heating element that serves as an inexpensive, clean, and safe energy source. The heating device 10 comprises: a hollow sealed container 11; a cylinder 12, which is provided in a hollow portion 26 formed by the inner surface of the sealed container 11; a heating element 13, which is provided on the outer surface of the cylinder 12 and generates heat by absorbing and releasing hydrogen contained in a hydrogen-based gas supplied to the hollow portion 26; and a flow path 14, which is formed by the inner surface of the cylinder 12 and is provided for the flow of a fluid for heat exchange with the heating element 13. The heating element 13 comprises: a base formed of a hydrogen storage metal or the like, and a multilayer film provided on the base. The multilayer film comprises: a first layer formed of a hydrogen storage metal or the like and having a thickness of less than 1000 nm, and a second layer formed of a hydrogen storage metal or the like different from the first layer and having a thickness of less than 1000 nm.

Description

Technical Field

[0001] The invention relates to a heating device, a heat utilization system and a film-shaped heating element. Background Art

[0002] In recent years, a heat generation phenomenon has been reported in which heat is generated by absorbing and releasing hydrogen using hydrogen storage metals (e.g., see Non-Patent Document 1). Hydrogen can be generated from water, so it is inexhaustible and inexpensive as a resource, and since it does not produce greenhouse gases such as carbon dioxide, it is a clean energy source. In addition, the heat generation phenomenon generated by using hydrogen storage metals is different from nuclear fission reactions and does not have a chain reaction, so it is considered safe. The heat generated by the absorption and release of hydrogen can be converted into electricity for use in addition to being used directly as heat, so it is expected to be an effective energy source.

[0003] Prior Art Literature

[0004] Non-patent literature

[0005] Non-patent literature 1: A.Kitamura, A.Takahashi, K.Takahashi, R.Seto, T.Hatano, Y.Iwamura, T.Itoh, J.Kasagi, M.Nakamura, M.Uchimura, H.Takahashi, S.Sumitomo, T.Hioki, T.Motohiro, Y.Furuyama, M.Kishida, H.Matsune, "Excess heat evolution from nanocomposite samples under exposure to hydrogen isotope gases”, International Journal of Hydrogen Energy 43(2018)16187-16200. Summary of the Invention

[0006] [Problems to be solved by the invention]

[0007] However, the mainstream energy sources are still thermal power generation or nuclear power generation. Therefore, from the perspective of environmental and energy issues, there is a demand for a new heating device and heat utilization system that has never been seen before, which uses a cheap, clean and safe energy source.

[0008] Therefore, an object of the present invention is to provide a new heating device and heat utilization system that utilize an inexpensive, clean, and safe energy source, as well as a film-shaped heating element that serves as an inexpensive, clean, and safe energy source.

[0009] [Technical means to solve the problem]

[0010] The heating device of the present invention comprises: a hollow sealed container; a cylinder arranged in a hollow portion formed by the inner surface of the sealed container; a heating element arranged on the outer surface of the cylinder, which generates heat by absorbing and releasing hydrogen contained in the hydrogen-based gas supplied to the hollow portion; and a flow path formed by the inner surface of the cylinder, for the flow of fluid for heat exchange with the heating element; and the heating element comprises: a base formed by a hydrogen storage metal, a hydrogen storage alloy or a proton conductor, and a multilayer film arranged on the base; the multilayer film comprises: a first layer formed by a hydrogen storage metal or a hydrogen storage alloy and having a thickness of less than 1000 nm, and a second layer formed by a hydrogen storage metal, a hydrogen storage alloy or a ceramic different from the first layer and having a thickness of less than 1000 nm.

[0011] The heat utilization system of the present invention includes the heat generating device and a fluid utilization device that utilizes the fluid heated by the heat generating element.

[0012] The film-like heating element of the present invention has a film-like base formed of a hydrogen storage metal, a hydrogen storage alloy or a proton conductor and a film-like multilayer film arranged on the base, wherein the multilayer film has a first layer formed of a hydrogen storage metal or a hydrogen storage alloy and having a thickness of less than 1000 nm, and a second layer formed of a hydrogen storage metal, a hydrogen storage alloy or a ceramic different from the first layer and having a thickness of less than 1000 nm.

[0013] [Effects of the Invention]

[0014] According to the present invention, since a heat generating element that generates heat by absorbing and releasing hydrogen is used as an energy source, energy can be supplied inexpensively, cleanly, and safely. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the heat generating device according to the first embodiment.

[0016] Figure 2 This is a perspective view showing a partially broken closed container.

[0017] Figure 3 It is a cross-sectional view of a closed container.

[0018] Figure 4 This is an explanatory diagram used to explain the flow of fluid in a closed container.

[0019] Figure 5 It is a cross-sectional view showing the structure of a heating element having a first layer and a second layer.

[0020] Figure 6 This is an explanatory diagram for explaining the generation of excess heat.

[0021] Figure 7This is a schematic diagram of a heat generating device according to a second embodiment.

[0022] Figure 8 This is a schematic diagram of a heat generating device according to a third embodiment.

[0023] Figure 9 This is a graph showing the relationship between entropy and pressure in a Rankine cycle including a heat generating device and a steam turbine according to the third embodiment.

[0024] Figure 10 This is a graph showing the relationship between entropy and temperature in a Rankine cycle including a heat generating device and a steam turbine according to the third embodiment.

[0025] Figure 11 This is a graph showing the relationship between entropy and enthalpy of a Rankine cycle including the heat generating device and steam turbine according to the third embodiment.

[0026] Figure 12 This is a schematic diagram of a heat generating device according to a fourth embodiment.

[0027] Figure 13 This is a schematic diagram of a heat generating device according to a fifth embodiment.

[0028] Figure 14 This is a schematic diagram of a heat generating device according to a sixth embodiment.

[0029] Figure 15 This is a graph showing the state of heat exchange in the boiler according to the sixth embodiment.

[0030] Figure 16 This is a graph showing the relationship between entropy and pressure in a Rankine cycle including a heat generating device and a steam turbine according to the sixth embodiment.

[0031] Figure 17 This is a graph showing the relationship between entropy and temperature in a Rankine cycle including a heat generating device and a steam turbine according to the sixth embodiment.

[0032] Figure 18 This is a graph showing the relationship between entropy and enthalpy of a Rankine cycle including a heat generating device and a steam turbine according to the sixth embodiment.

[0033] Figure 19 It is a cross-sectional view showing the structure of a heating element having a first layer, a second layer, and a third layer.

[0034] Figure 20 It is a cross-sectional view showing the structure of a heating element having a first layer, a second layer, a third layer, and a fourth layer.

[0035] Figure 21 It is a three-dimensional diagram of a cylinder in which multiple heating elements are installed.

[0036] Figure 22 This is a schematic diagram of a heating element manufacturing apparatus for manufacturing a heating element.

[0037] Figure 23 This is a perspective view of a heating unit formed by connecting cylindrical bodies each having a heating element.

[0038] Figure 24 This is a three-dimensional diagram of a film-shaped heating element.

[0039] Figure 25 This is a schematic diagram of a film heating element manufacturing apparatus for manufacturing a film heating element.

[0040] Figure 26 This is a cross-sectional view showing the structure of a film-like heating element having a passivation film. DETAILED DESCRIPTION

[0041] [First embodiment]

[0042] Figure 1 In the figure, the heating device 10 includes a sealed container 11, a cylinder 12, a heating element 13, a flow path 14, a fluid circulation unit 15, and a control unit 16. In the heating device 10, the heating element 13 is provided outside the cylinder 12, and the flow path 14 is provided inside the cylinder 12. The heating element 13 heats the fluid flowing through the flow path 14 to generate a high-temperature fluid.

[0043] The fluid includes at least one of a liquid and a gas. As a fluid, one with excellent thermal conductivity and stable chemical properties is preferred. As a gas, for example, helium, argon, chlorofluorocarbons, hydrogen, nitrogen, water vapor, air, carbon dioxide, etc. As a liquid, for example, water, molten salt (KNO3 (40%)-NaNO3 (60%), etc.), liquid metal (Pb, etc.), etc. can be mentioned. In addition, as a fluid, a mixed phase fluid in which solid particles are dispersed in a gas or liquid can also be used. The solid particles are metals, metal compounds, alloys, ceramics, etc. As metals, for example, copper, nickel, titanium, cobalt, etc. can be mentioned. As metal compounds, for example, oxides, nitrides, silicides, etc. of the above metals can be mentioned. As alloys, for example, stainless steel, chrome-molybdenum steel, etc. can be mentioned. As ceramics, for example, alumina, etc. can be mentioned. The type of fluid can be appropriately selected according to the purpose of the heating device 10.

[0044] In this embodiment, water is used as the fluid. In the heat generating device 10, the heat generating element 13 heats water flowing through the flow path 14 to generate high-temperature and high-pressure water (hereinafter referred to as high-temperature and high-pressure water).

[0045] The sealed container 11 is configured to accommodate the cylindrical body 12 and the heating element 13. The sealed container 11 has a hollow cylindrical shape. In this example, the sealed container 11 is cylindrical, but it can also be configured in various shapes such as an elliptical cylinder or an angular column. The height of the sealed container 11 is, for example, 13 to 15 meters. The diameter of the sealed container 11 is, for example, 3.1 meters. The size of the sealed container 11 is not particularly limited and can be appropriately designed.

[0046] The sealed container 11 is formed of a material having heat resistance and pressure resistance. The material of the sealed container 11 can be appropriately selected according to the conditions of use (such as temperature or pressure, etc.). As the material of the sealed container 11, for example, carbon steel, austenitic stainless steel, heat-resistant non-ferrous alloy steel, etc. can be used. As austenitic stainless steel, for example, SUS304L, SUS316L, SUS310S, etc., which are standardized in JIS (Japanese Industrial Standards) can be cited. For example, as the material of the sealed container 11, carbon steel is used when the operating temperature is below 350°C, SUS304L is used when the operating temperature exceeds 350°C, SUS316L or SUS310S is used when the operating temperature is 600-700°C, and a non-ferrous alloy that meets the heat resistance requirements is used when the operating temperature exceeds 700°C.

[0047] The sealed container 11 includes a main body 17 formed in a cylindrical shape, a fluid inflow chamber 18 provided at one end of the main body 17, and a fluid outflow chamber 19 provided at the other end of the main body 17. In the sealed container 11, the side of the main body 17 on which the fluid inflow chamber 18 is provided is the lower side, and the side of the main body 17 on which the fluid outflow chamber 19 is provided is the upper side.

[0048] The main body 17 has a gas inlet 21 serving as the inlet for the hydrogen-based gas and a gas outlet 22 serving as the outlet for the hydrogen-based gas. In this example, the main body 17 is cylindrical, but various shapes, such as an elliptical cylinder or a rectangular column, are also possible. The fluid inflow chamber 18 has a fluid inlet 23 serving as the inlet for the fluid. The fluid outflow chamber 19 has a fluid outlet 24 serving as the outlet for the fluid.

[0049] A hydrogen-based gas refers to a gas containing hydrogen isotopes. As a hydrogen-based gas, at least one of deuterium gas and protium gas can be used. Protium gas includes a naturally occurring mixture of protium and deuterium, namely, a mixture containing 99.985% protium and 0.015% deuterium. In the following description, protium and deuterium are referred to as "hydrogen" when not distinguishing between them.

[0050] Inside the sealed container 11, a hollow portion 26 is provided for accommodating the cylindrical body 12 and the heating element 13. The hollow portion 26 is formed by the inner surface of the sealed container 11. Specifically, the hollow portion 26 is a cylindrical space defined by the inner surface of the main body 17 and the outer surface of the heating element 13 described below.

[0051] The hollow portion 26 is connected to a gas supply portion 27 via a gas inlet 21. The gas supply portion 27 is composed of a gas tank for storing hydrogen-based gas, a pipe connecting the gas tank and the hollow portion 26, and a valve for adjusting the flow rate of the hydrogen-based gas or the pressure in the pipe, and supplies the hydrogen-based gas to the hollow portion 26, although this is not shown.

[0052] The hollow portion 26 is connected to a gas exhaust portion 28 via the gas outlet 22. The gas exhaust portion 28 is composed of a vacuum pump, a pipe connecting the vacuum pump and the hollow portion 26, and a valve for adjusting the flow rate of the hydrogen-based gas or the pressure in the pipe, and performs vacuum exhaust of the hollow portion 26, although this is not shown.

[0053] The cylinder 12 is disposed in the hollow portion 26 of the sealed container 11. The cylinder 12 is a hollow tube. The interior of the cylinder 12 is controlled to a predetermined pressure by the control unit 16 described below. In this embodiment, the pressure is controlled so that water does not vaporize at approximately 300°C but remains in a liquid state. The pressure inside the cylinder 12 is 100 bar in this embodiment, but this is not limited to this and can be appropriately designed.

[0054] The cylinder 12 is formed of a material having heat resistance and pressure resistance. The material of the cylinder 12 can be appropriately selected according to the conditions of use (such as temperature or pressure, etc.). As the material of the cylinder 12, the same material as the sealed container 11, i.e. carbon steel, austenitic stainless steel, heat-resistant non-ferrous alloy steel, etc. can be used. The shape of the cylinder 12 can be set to various shapes such as cylindrical, elliptical cylindrical, angular columnar, etc. The various sizes of the cylinder 12 are not particularly limited and can be appropriately designed. For example, the cylinder 12 can be set to a cylindrical shape with a length of 10m, a thickness (wall thickness) of 0.005 to 0.010m, and a diameter of 0.05m. The thickness is preferably appropriately designed based on the temperature and pressure of the fluid flowing through the inside of the cylinder 12 (the flow path 14 described below). The cylinder 12 can be formed into a desired length by, for example, connecting a plurality of pipes in series. The number of cylinders 12 is not particularly limited, as long as it is more than one. For example, 800 cylinders 12 can also be set in the sealed container 11. In this embodiment, a plurality of cylinders 12 are provided in the hollow portion 26. That is, the heat generating device 10 is a heat generating device having a plurality of cylinders 12 provided in the hollow portion 26. Figure 1 In order to simplify the drawings, only one of the multiple cylinders 12 is shown, and the other cylinders 12 are omitted.

[0055] The heating element 13 is provided on the outer surface of the cylindrical body 12. Therefore, the heating element 13 is cylindrical. In this embodiment, one heating element 13 is provided on each of the plurality of cylindrical bodies 12. In other words, the heating device 10 is a heating device including a plurality of heating elements 13.

[0056] The heating element 13 is arranged in the hollow portion 26 and is in contact with the hydrogen-based gas supplied to the hollow portion 26. The thickness (wall thickness) of the heating element 13 is not particularly limited and can be appropriately designed to obtain the output required as the heating device 10, for example, it is set to 0.005 to 0.010 μm. The heating element 13 is provided on the entire outer surface of one cylindrical body 12. In addition, a plurality of heating elements 13 can be provided on the outer surface of one cylindrical body 12 at intervals.

[0057] The heating element 13 generates heat by absorbing and releasing hydrogen contained in the hydrogen-based gas. The hydrogen-based gas is supplied to the hollow portion 26, causing the heating element 13 to absorb the hydrogen contained in the hydrogen-based gas. Heating the heating element 13 while the hollow portion 26 is evacuated raises the temperature of the heating element 13 to a temperature above the heating temperature, thereby generating heat (hereinafter referred to as excess heat).

[0058] When the heating device 10 begins operating, the water (fluid) heated by the heating unit 33 (described below) heats the heating element 13 to a predetermined temperature, thereby generating excess heat. This embodiment assumes that the heating element 13 generates excess heat by being heated to, for example, 270°C to 300°C. The temperature of the heating element 13 generating excess heat is, for example, within a range of 300°C to 1500°C.

[0059] The flow path 14 is provided inside the cylinder 12. The flow path 14 is formed by the inner surface of the cylinder 12. The flow path 14 allows the fluid for heat exchange with the heating element 13 to pass through. The flow path 14 is not connected to the hollow portion 26. Therefore, the fluid and hydrogen-based gas are prevented from flowing between the flow path 14 and the hollow portion 26.

[0060] The heated fluid flows into the flow path 14, and the heating element 13 is heated via the cylinder 12. As a result, the heating element 13 generates excess heat and heats the fluid flowing through the flow path 14 via the cylinder 12. As a result, a high-temperature, high-pressure fluid is generated in the flow path 14, and the high-temperature, high-pressure fluid flows out of the flow path 14. In the case of this embodiment, the water flowing into the flow path 14 is heated by the heating element 13 that generates excess heat, and becomes high-temperature, high-pressure water of, for example, 300°C, and then flows out of the flow path 14. In addition, there is a case where a part of the water in the flow path 14 turns into water vapor.

[0061] The fluid circulation unit 15 includes a circulation line 30 connected to the flow path 14 to circulate the fluid between the inside and outside of the cylinder 12. The circulation line 30 connects the fluid inlet 23 of the fluid inflow chamber 18 and the fluid outlet 24 of the fluid outflow chamber 19 outside the closed container 11.

[0062] The circulation line 30 is provided with a cooling unit 32 for cooling the fluid and a heating unit 33 for heating the fluid. In other words, the heat generating device 10 further includes the cooling unit 32 and the heating unit 33.

[0063] In this embodiment, in addition to the cooling unit 32 and the heating unit 33, the circulation line 30 is also equipped with a liquid storage tank 36 for storing water and a pump 40 for circulating the water. Furthermore, pressure gauges PI, thermometers TI, and flow meters FI are installed at various locations in the circulation line 30. The number of pressure gauges PI, thermometers TI, and flow meters FI is not particularly limited, but preferably one or more. In the circulation line 30, pressure gauges PI, thermometers TI, cooling unit 32, thermometers TI, liquid storage tank 36, pump 40, thermometers TI, heating unit 33, thermometers TI, and flow meters FI are installed in this order at various locations between the fluid outlet 24 and the fluid inlet 23 of the sealed container 11. The thermometer TI is installed at the liquid storage tank 36.

[0064] The cooling unit 32 is electrically connected to the control unit 16 and driven by the control unit 16. The cooling unit 32 cools the high-temperature, high-pressure water flowing out of the flow path 14. In the cooling unit 32, the high-temperature, high-pressure water at 300°C is cooled to 270°C, for example.

[0065] In this example, the cooling unit 32 functions as a boiler. In the cooling unit 32, which functions as a boiler, heat is exchanged between high-temperature, high-pressure water and boiler water, which serves as a heat medium. This boiler water generates high-temperature, high-pressure steam (hereinafter referred to as superheated steam). This superheated steam is supplied to a steam turbine, which then generates electricity through a generator connected to the steam turbine.

[0066] The heating unit 33 is electrically connected to the control unit 16 and is driven and controlled by the control unit 16. The heating unit 33 heats water as a fluid flowing into the flow path 14.

[0067] The heating unit 33 is, for example, an electric furnace that generates heat by supplying electricity. Alternatively, the heating unit 33 may be a fuel furnace that generates heat by burning fuel. When the heating device 10 starts operating, water is heated to, for example, 270°C in the heating unit 33. The fluid heated by the heating unit 33 flows into the flow path 14, whereby the heating element 13 is heated to a specified temperature, thereby generating excess heat. In other words, the heating unit 33 functions as a startup heater, i.e., when the heating device 10 starts operating, the heating element 13 is heated to a specified temperature.

[0068] In this embodiment, the heating unit 33 is directly installed in the circulation line 30, but it can also be installed in a branch line branching from the circulation line 30. When the heating unit 33 is installed in the branch line, part or all of the fluid flowing through the circulation line 30 is directed to the branch line, and the fluid heated by the heating unit 33 is returned to the circulation line 30. This allows the heated fluid to flow into the flow path 14. By connecting the circulation line 30 and the branch line via a valve, the flow rate of water flowing into the branch line can be controlled.

[0069] The operation of the cooling unit 32 and the heating unit 33 is controlled so that the temperature of the fluid flowing into the flow path 14 is maintained within a specified range during operation of the heating device 10. For example, if the heating element 13 generates excess heat, the temperature of the water flowing into the flow path 14 is maintained at approximately 270°C. This maintains a substantially constant temperature for the heating element 13, and stabilizes the temperature and flow rate of the high-temperature, high-pressure water flowing out of the flow path 14.

[0070] The control unit 16 is electrically connected to each component of the heating device 10 and controls the operation of each component. The control unit 16 includes, for example, a central processing unit (CPU), a storage unit such as read-only memory (ROM) or random access memory (RAM). The CPU executes various computations using, for example, programs and data stored in the storage unit.

[0071] The control unit 16 performs the following control: temperature reduction control, which drives the cooling unit 32 and causes the fluid cooled by the cooling unit 32 to flow into the flow path 14, thereby lowering the temperature of the heating element 13; and temperature increase control, which drives the heating unit 33 and causes the fluid heated by the heating unit 33 to flow into the flow path 14, thereby raising the temperature of the heating element 13. The control unit 16 switches between temperature reduction control and temperature increase control based on the temperature of the fluid flowing through the circulation line 30, thereby adjusting the temperature of the fluid flowing into the flow path 14.

[0072] The control unit 16 controls the temperature, pressure, flow rate, etc. of each part of the heating device 10 based on the detection results of the thermometer TI, the detection results of the pressure gauge PI, and the detection results of the flow meter FI. For example, when the heating element 13 generates excess heat at 270 to 300°C, the control unit 16 controls the temperature of the fluid flowing into the flow path 14 to 270°C and the pressure to 100 bar. The enthalpy of the fluid flowing into the flow path 14 is 283 kcal / kg and 28.3×10 8kcal / h. The water flowing into flow path 14 is heated to 300°C by heating element 13, becoming high-temperature, high-pressure water before flowing out of flow path 14. Furthermore, since the saturation temperature of water at a pressure of 100 bar is 311°C, the water flowing into flow path 14 does not become steam even if the temperature rises to 300°C.

[0073] Figure 2 This is a perspective view showing a portion of the sealed container 11 being broken off. Figure 2 In FIG. 1 , one of the plurality of cylindrical bodies 12 and heating elements 13 is partially broken away to illustrate the interior thereof.

[0074] like Figure 2 As shown, the fluid circulation unit 15 has an external fluid line 45 in addition to the circulation line 30. Each cylinder 12 provided in the hollow portion 26 of the closed container 11 is heated by the heat of the fluid flowing through the flow path 14 provided therein or the heat of the heating element 13 provided on the outer surface thereof, and the temperature rises, thereby thermally expanding. On the other hand, the main body 17 of the closed container 11 is not in contact with the cylinder 12 and the heating element 13, and the temperature rise is suppressed compared to the cylinder 12, so the thermal expansion is smaller than that of the cylinder 12. Therefore, thermal stress is generated in the plurality of cylinders 12 and the main body 17 of the closed container 11. The external fluid line 45 is a component used to prevent damage caused by this thermal stress.

[0075] External fluid line 45 is provided on the outer surface of sealed container 11 and connected to circulation line 30, allowing a portion of the fluid to pass through. External fluid line 45 comprises: a plurality of first pipes 47 provided on the outer surface of sealed container 11; a first annular pipe 48 connecting one end of each of the plurality of first pipes 47; a second annular pipe 49 connecting the other ends of each of the plurality of first pipes 47; a plurality of second pipes 50 connecting the first annular pipes 48 to fluid inflow chamber 18; and a plurality of third pipes 51 connecting the second annular pipes 49 to fluid outflow chamber 19.

[0076] The plurality of first pipes 47 extend respectively in the up-down direction (Z direction in the figure) of the sealed container 11. The first annular pipe 48 is provided on a flange at one end of the main body 17 of the sealed container 11. The second annular pipe 49 is provided on a flange at the other end of the main body 17 of the sealed container 11. The first annular pipe 48 and the second annular pipe 49 are components that form the pipe into an annular shape along the outer periphery of the main body 17, and are configured to allow fluid to circulate inside. The plurality of second pipes 50 guide the fluid in the fluid inflow chamber 18 to the first annular pipe 48. The fluid in the first annular pipe 48 moves to the second annular pipe 49 through the plurality of first pipes 47. The plurality of third pipes 51 guide the fluid in the second annular pipe 49 to the fluid outflow chamber 19. The number of the first pipes 47, the second pipes 50 and the third pipes 51 is not particularly limited and can be changed appropriately.

[0077] like Figure 3 As shown, a plurality of first pipes 47 are arranged at equal intervals in the circumferential direction of the sealed container 11. In this embodiment, the cross-sectional shape of each first pipe 47 is semicircular, but the cross-sectional shape is not limited thereto and may be rectangular, semi-elliptical, or the like. Figure 3 It is a cross-sectional view of the main body 17 of the sealed container 11 along the XY plane.

[0078] In the hollow portion 26, a plurality of cylinders 12 are arranged at equal intervals to form a staggered shape. In other words, for three adjacent cylinders 12, the shape formed by connecting the centers of the cylinders 12 to each other is an equilateral triangle ( Figure 3 The distance between the centers of the adjacent cylinders 12 is 0.15 m.

[0079] use Figure 4 The flow of fluid in sealed container 11 will be described. Fluid flowing through circulation line 30 flows from fluid inlet 23 into fluid inflow chamber 18. A portion of the fluid in fluid inflow chamber 18 flows from one end of the plurality of cylinders 12 to flow path 14. In flow path 14, the fluid is heated by heating element 13. The heated fluid in flow path 14 flows from the other end of the plurality of cylinders 12 to fluid outflow chamber 19 and flows out of fluid outlet 24 into circulation line 30.

[0080] The remaining portion of the fluid in the fluid inflow chamber 18 flows into the plurality of second pipes 50. The fluid in the plurality of second pipes 50 is guided to the plurality of first pipes 47 via the first loop pipe 48. In the plurality of first pipes 47, the radiant heat from the heating element 13 heats the fluid. The fluid heated in the plurality of first pipes 47 is guided to the fluid outflow chamber 19 via the second loop pipe 49 and the plurality of third pipes 51, where it merges with the fluid heated in the flow path 14.

[0081] The external fluid line 45, sealed container 11, cylinder 12, heating element 13, and flow path 14 constitute a heating module 55. The heating device 10 of this embodiment includes one heating module 55, but the number of heating modules 55 is not particularly limited and may be two or more.

[0082] use Figure 5 The details of the heating element 13 will be described. Figure 5 As shown, the heating element 13 includes a base 57 and a multilayer film 58 .

[0083] The base 57 is provided on the outer surface of the cylinder 12 . Figure 5The cylinder 12 is omitted in the figure. The base 57 is formed of a hydrogen storage metal, a hydrogen storage alloy or a proton conductor. As the hydrogen storage metal, for example, Ni, Pd, V, Nb, Ta, Ti, etc. can be used. As the hydrogen storage alloy, for example, LaNi5, CaCu5, MgZn2, ZrNi2, ZrCr2, TiFe, TiCo, Mg2Ni, Mg2Cu, etc. can be used. As the proton conductor, for example, BaCeO3 series (for example, Ba(CeO3)) can be used. 0.95 Y 0.05 )O 3-6 ), SrCeO3 system (for example Sr(Ce 0.95 Y 0.05 )O 3-6 ), CaZrO3 system (such as CaZr 0.95 Y 0.05 O 3-α ), SrZrO3 system (such as SrZr 0.9 Y 0.1 O 3-α ), βAl2O3, βGa2O3, etc.

[0084] The multilayer film 58 is provided on the surface of the base 57. The multilayer film 58 is formed of a first layer 59 and a second layer 60. The first layer 59 is formed of a hydrogen storage metal or a hydrogen storage alloy, and the second layer 60 is formed of a hydrogen storage metal, hydrogen storage alloy, or ceramic different from the first layer 59. A dissimilar material interface 61 is formed between the base 57, the first layer 59, and the second layer 60.

[0085] The first layer 59 is formed of, for example, any one of Ni, Pd, Cu, Mn, Cr, Fe, Mg, Co, and alloys thereof. The alloy forming the first layer 59 preferably contains two or more of Ni, Pd, Cu, Mn, Cr, Fe, Mg, and Co. As the alloy forming the first layer 59, alloys obtained by adding additional elements to Ni, Pd, Cu, Mn, Cr, Fe, Mg, and Co may also be used.

[0086] The second layer 60 is formed of, for example, any one of Ni, Pd, Cu, Mn, Cr, Fe, Mg, Co, alloys thereof, and SiC. The alloy forming the second layer 60 preferably contains two or more of Ni, Pd, Cu, Mn, Cr, Fe, Mg, and Co. As the alloy forming the second layer 60, alloys obtained by adding additional elements to Ni, Pd, Cu, Mn, Cr, Fe, Mg, and Co may also be used.

[0087] As the combination of the first layer 59 and the second layer 60, when the element types are expressed in the form of "first layer 59 - second layer 60 (second layer 60 - first layer 59)", Pd-Ni, Ni-Cu, Ni-Cr, Ni-Fe, Ni-Mg, and Ni-Co are preferred. When the second layer 60 is made of ceramic, "first layer 59 - second layer 60" is preferably Ni-SiC.

[0088] The thickness of the first layer 59 and the thickness of the second layer 60 are preferably less than 1000 nm. If the thickness of each of the first layer 59 and the second layer 60 is 1000 nm or more, hydrogen is less likely to permeate the multilayer film 58. In addition, by having the thickness of each of the first layer 59 and the second layer 60 be less than 1000 nm, a nanostructure that does not exhibit bulk properties can be maintained. The thickness of each of the first layer 59 and the second layer 60 is more preferably less than 500 nm. By having the thickness of each of the first layer 59 and the second layer 60 be less than 500 nm, a nanostructure that does not exhibit bulk properties can be maintained.

[0089] Figure 5 In the figure, the multilayer film 58 has a structure in which the first layer 59 and the second layer 60 are alternately stacked on the surface of the base 57. The first layer 59 and the second layer 60 are each 5 layers. In addition, the number of layers of the first layer 59 and the second layer 60 can also be appropriately changed. The multilayer film 58 can also have a structure in which the second layer 60 and the first layer 59 are alternately stacked on the surface of the base 57. As the multilayer film 58, it is sufficient to have more than one first layer 59 and one second layer 60, and it is sufficient to form more than one heterogeneous material interface 61.

[0090] like Figure 6 As shown, the dissimilar substance interface 61 allows hydrogen atoms to pass through. Figure 6 This is a schematic diagram showing the following movement of hydrogen atoms. That is, the first layer 59 and the second layer 60 formed by the hydrogen storage metal with a face-centered cubic structure absorb hydrogen, and then the first layer 59 and the second layer 60 are heated. At this time, the hydrogen atoms in the metal lattice of the first layer 59 move through the heterogeneous material interface 61 to the metal lattice of the second layer 60.

[0091] By supplying hydrogen-based gas to the sealed container 11, the heating element 13 absorbs hydrogen using the base 57 and the multilayer film 58. Even if the supply of hydrogen-based gas to the sealed container 11 is stopped, the heating element 13 maintains a state in which hydrogen is absorbed in the base 57 and the multilayer film 58. When the heating element 13 begins to be heated by the fluid, the hydrogen absorbed in the base 57 and the multilayer film 58 is released, and quantum diffusion is performed while hopping inside the multilayer film 58. It is known that hydrogen is relatively light, and quantum diffusion is gradually performed while hopping at the position occupied by hydrogen in a certain substance A and substance B (octahedral or tetrahedral position). The heating element 13 is heated in a vacuum state, whereby hydrogen passes through the heterogeneous material interface 61 due to quantum diffusion, thereby generating excess heat above the temperature of the fluid.

[0092] An example of a method for manufacturing the heating element 13 will be described. The heating element 13 can be manufactured using, for example, a sputtering method. A base 57 is formed on the outer surface of the cylindrical body 12, and then the first layer 59 and the second layer 60 are alternately formed on the base 57, thereby obtaining the heating element 13. When forming the base 57, it is preferably formed thicker than the first layer 59 and the second layer 60, and the material of the base 57 can be Ni, for example. The first layer 59 and the second layer 60 are preferably formed continuously under a vacuum state. As a result, a natural oxide film is not formed between the first layer 59 and the second layer 60, but only a heterogeneous material interface 61 is formed. The manufacturing method of the heating element 13 is not limited to the sputtering method, and a vapor deposition method, a wet method, a thermal spraying method, an electroplating method, etc. can be used.

[0093] The heating method using the heating device 10 includes the following steps: a hydrogen storage step in which a hydrogen-based gas is supplied to the hollow portion 26 of the sealed container 11, thereby causing the heating element 13 to absorb hydrogen contained in the hydrogen-based gas; and a hydrogen release step in which the hydrogen absorbed by the heating element 13 is released by evacuating the hollow portion 26 of the sealed container 11 and heating the heating element 13. The hydrogen storage step and the hydrogen release step may be repeated.

[0094] As described above, the heating device 10 generates a high-temperature fluid (high-temperature, high-pressure water) by exchanging heat between the heating element 13 provided on the outer surface of the cylinder 12 and the fluid (water) flowing in the flow path 14 formed by the inner surface of the cylinder 12. The high-temperature, high-pressure water as a high-temperature fluid can be used to generate superheated steam in the boiler (cooling part 32). The superheated steam generated in the boiler can be used for a steam turbine. Since the heating element 13 uses hydrogen to generate heat, greenhouse gases such as carbon dioxide are not generated. In addition, since the hydrogen used to generate heat for the heating element 13 can be generated from water, the price is low. Furthermore, since the heat generated by the heating element 13 is different from the nuclear fission reaction and there is no chain reaction, it is considered safe. Therefore, the heating device 10 uses the heating element 13 as an energy source and can supply energy cheaply, cleanly and safely.

[0095] In the heat generating device 10, by providing an external fluid line 45 on the outer surface of the main body 17 of the sealed container 11, even when the main body 17 is heated by radiant heat from the heating element 13, the heat of the main body 17 can be transferred to the fluid flowing through the external fluid line 45, thereby suppressing thermal expansion of the main body 17. Furthermore, in the heat generating device 10, by providing a flow path 14 inside the cylindrical body 12, even when the cylindrical body 12 is heated by the heating element 13, the heat of the cylindrical body 12 can be transferred to the fluid flowing through the flow path 14, thereby suppressing thermal expansion of the cylindrical body 12. In the heat generating device 10, even when the cylindrical body 12 and the main body 17 thermally expand, the extension of the cylindrical body 12 is the same as that of the main body 17, thereby preventing damage caused by thermal stress.

[0096] In the heat generating device 10 , the temperature of the fluid circulating in the circulation line 30 is maintained constant by switching between temperature reduction control and temperature increase control by the control unit 16 , thereby stabilizing the heat generation of the heat generating element 13 .

[0097] [Second embodiment]

[0098] In the first embodiment, the water flowing into the flow path 14 is heated by the heating element 13 to generate high-temperature, high-pressure water. However, in the second embodiment, the water flowing into the flow path 14 is heated by the heating element 13 to generate superheated steam, which is then used as hydraulic fluid for the steam turbine to generate power. Components identical to those used in the first embodiment are designated by the same reference numerals, and their descriptions are omitted.

[0099] like Figure 7 As shown, the heating device 70 is the same as the heating device 10 of the first embodiment, and has a heating module 55. The heating device 70 is configured to allow liquid (water) as a fluid to flow into the flow path 14, and to allow gas (water vapor) as a fluid to flow out of the flow path 14. Specifically, when the heating device 70 starts to operate, the water as a fluid is heated by the heating unit 33. The water heated by the heating unit 33 flows into the flow path 14, thereby heating the heating element 13 through the cylinder 12. As a result, the heating element 13 generates excess heat. Then, excess heat is generated by the heating element 13, and the water flowing through the flow path 14 is heated through the cylinder 12. As a result, superheated steam is generated in the flow path 14, and the superheated steam flows out of the flow path 14. In addition, sometimes the water in the flow path 14 does not all turn into water vapor, but a part of it flows out of the flow path 14 while remaining in the state of water. Figure 7 1 shows a state where, after water and water vapor flow out of the flow path 14, water accumulates below the fluid outflow chamber 19, while water vapor moves to the upper portion of the fluid outflow chamber 19. Furthermore, the fluid outflow chamber 19 is provided with a pressure gauge PI, a thermometer TI, and a liquid level gauge LI for detecting the liquid level in the fluid outflow chamber 19.

[0100] In this embodiment, the pressure inside cylinder 12 is controlled at 90 bar. When heating element 13 generates excess heat at 270-300°C, controller 16 controls the temperature of the fluid flowing into flow path 14 to 270°C and the pressure to 90 bar. The water flowing into flow path 14 is heated by heating element 13, becoming superheated steam at, for example, 304°C, and then flows out of flow path 14.

[0101] In the second embodiment, a cooling unit 32, a heating unit 33, and a steam turbine 71 are provided in the circulation line 30. The cooling unit 32 cools the steam vapor exhausted from the steam turbine 71, causing it to condense. The lower the cooling temperature in the cooling unit 32, the lower the back pressure on the steam turbine 71, and the higher the power generation efficiency of the generator connected to the steam turbine 71. The back pressure on the steam turbine 71 is controlled to, for example, 0.05 bar, and can be determined based on the cooling method used by the cooling unit 32 and the heat medium. The heating unit 33 is provided in a branch line 30a that branches off from the circulation line 30. The branch line 30a is connected to the circulation line 30 via a valve (not shown). When the heating device 70 starts operating, some or all of the water flowing through the circulation line 30 flows into the branch line 30a, is heated by the heating unit 33, and then returns to the circulation line 30. As a result, the water heated to, for example, 270°C by the heating unit 33 flows into the flow path 14, generating excess heat in the heating element 13.

[0102] The steam turbine 71 is a fluid utilization device that uses the superheated steam flowing out of the flow path 14 as hydraulic fluid. The steam turbine 71 has a rotating shaft connected to a generator. The generator rotates about the rotating shaft when supplied with superheated steam. The generator generates electricity by rotating the steam turbine 71.

[0103] In the circulation line 30 of the heating device 70, in addition to the cooling unit 32, the heating unit 33, and the steam turbine 71, there are also a steam tank 72, a liquid storage tank 73, a deaerator 74, a preheater 75, control valves 76a, 76b and pumps 77a, 77b. Figure 7 In the circulation line 30, a control valve 76a, a steam drum 72, a steam turbine 71, a cooling unit 32, a liquid storage tank 73, a pump 77a, a deaerator 74, a pump 77b, a preheater 75, a heating unit 33, and a control valve 76b are provided in this order from the fluid outlet 24 of the sealed container 11. The deaerator 74, the preheater 75, the control valves 76a and 76b, and the pumps 77a and 77b are electrically connected to the control unit 16.

[0104] The steam tank 72 is a member for temporarily storing water vapor generated in the flow path 14. The steam tank 72 is connected to the deaerator 74 via the deaeration pipe 30b, and is connected to the preheater 75 via the preheating pipe 30c.

[0105] The liquid storage tank 73 is used to store water condensed by the cooling unit 32. A thermometer TI is provided in the liquid storage tank 73. The liquid storage tank 73 is connected to a water supply source and is supplied with water from the supply source, although this is not shown.

[0106] The deaerator 74 uses steam supplied from the steam drum 72 via the deaeration pipe 30b to remove oxygen contained in the water flowing into the flow path 14. Deaeration of the water prevents corrosion of the boiler. The water deaerated by the deaerator 74 is directed to the preheater 75.

[0107] The preheater 75 preheats the water flowing into the flow path 14 using the steam supplied from the steam tank 72 via the preheating pipe 30 c. The water is preheated in the preheater 75 to, for example, 270° C. The water preheated by the preheater 75 flows into the flow path 14 .

[0108] Control valve 76a regulates the flow rate or pressure of water vapor flowing out of flow path 14. Control valve 76b regulates the flow rate or pressure of water flowing into flow path 14. Pump 77a is a component for transferring water from liquid storage tank 73 to deaerator 74. Pump 77b is a component for transferring water from deaerator 74 to preheater 75.

[0109] As described above, the heating device 70 generates a high-temperature fluid (superheated steam) by exchanging heat between the heating element 13 provided on the outer surface of the cylinder 12 and the fluid (water) flowing through the flow path 14 formed by the inner surface of the cylinder 12. The superheated steam as a high-temperature fluid can be used for the steam turbine 71. The heating device 70 described above and the steam turbine 71 as a fluid utilization device constitute a heat utilization system 79. Therefore, the heating device 70 and the heat utilization system 79 utilize the heating element 13 as an energy source, and can supply energy inexpensively, cleanly, and safely.

[0110] As a fluid utilization device, a steam turbine 71 is suitable when the fluid flowing out of flow path 14 is water vapor (superheated steam), as in this embodiment. By using a steam turbine 71 as a fluid utilization device, the thermal energy generated by the heat generation device 70 can be recovered as electrical energy. Furthermore, when the fluid flowing out of flow path 14 is a gas other than water vapor (e.g., air, chlorofluorocarbons, helium, etc.), a gas turbine can be used as a fluid utilization device. Alternatively, the fluid flowing out of flow path 14 can be supplied to a separately installed boiler, where superheated steam is generated, and this superheated steam is supplied to a steam turbine to generate electricity. Furthermore, as a fluid utilization device, a preheater that preheats the combustion air can be used in a combustion device that generates heat by burning fuel with combustion air. Examples of combustion devices include boilers, rotary kilns, metal heat treatment furnaces, metalworking heating furnaces, hot blast furnaces, kiln firing furnaces, oil refining towers, retorting furnaces, and drying furnaces.

[0111] [Third embodiment]

[0112] The heat generating device 70 of the second embodiment includes a single heat generating module 55, but in the third embodiment, multiple heat generating modules 55 are connected. This example describes a case where three heat generating modules 55 are connected, but the number of heat generating modules 55 is not particularly limited and can be increased or decreased to obtain the desired output. Components identical to those used in the aforementioned embodiments are denoted by the same reference numerals, and their descriptions are omitted.

[0113] like Figure 8 As shown in FIG. 8 , the heating device 80 includes three heating modules 55a to 55c. The configuration of each heating module 55a to 55c is the same as that of the heating module 55 of the first embodiment, and therefore, description thereof will be omitted. Figure 8 Although not shown, the heating device 80 includes a control unit 16, and the operation of each unit is controlled by the control unit 16. The hollow portion 26 is connected to a gas supply unit 27 and a gas discharge unit 28.

[0114] The heat generating device 80 further includes a distribution pipe 81 and a collection pipe 82. The distribution pipe 81 is connected to the circulation line 30 to distribute fluid to each heat generating module 55a-55c. The collection pipe 82 is connected to the circulation line 30 to collect the fluid flowing out of each heat generating module 55a-55c.

[0115] The heating device 80 has a structure in which three heating modules 55a to 55c are connected in parallel via a distribution pipe 81 and a collection pipe 82. Furthermore, the three heating modules 55a to 55c are not limited to being connected in parallel, but can also be connected in series. When the three heating modules 55a to 55c are connected in series, the distribution pipe 81 and the collection pipe 82 are not used. Instead, the fluid outlet 24 of the heating module 55a is connected to the fluid inlet 23 of the heating module 55b, and the fluid outlet 24 of the heating module 55b is connected to the fluid inlet 23 of the heating module 55c. Thus, the fluid in the circulation line 30 passes through the heating modules 55a, 55b, and 55c in sequence, and returns to the circulation line 30 again.

[0116] The three heat generating modules 55a to 55c are detachable from the distribution pipe 81 and the collecting pipe 82. The distribution pipe 81 is provided with a control valve 76b corresponding to each of the heat generating modules 55a to 55c.

[0117] The heating device 80 has the same configuration as the heating device 70 of the second embodiment, except that it includes three heating modules 55a to 55c and is connected by a distribution pipe 81 and a collection pipe 82. Therefore, the superheated steam generated by the heating device 80 is used in the steam turbine 71.

[0118] As described above, the heat generating device 80 includes three heat generating modules 55a to 55c, so that high output can be achieved. In addition, the heat generating device 80 has excellent maintainability because each heat generating module 55a to 55c is detachable and can be easily replaced.

[0119] The heat generating device 80 and the steam turbine 71 as a fluid utilizing device constitute a heat utilizing system 89. Since the heat generating device 80 and the heat utilizing system 89 utilize the heat generating element 13 as an energy source, energy can be supplied inexpensively, cleanly, and safely.

[0120] The power generation efficiency of the steam turbine when operating using the heat generating device 80 was calculated. The steam pressure was set to 80 to 100 bar, the exhaust pressure of the steam discharged from the steam turbine was set to 0.05 bar, the exhaust temperature was set to 32°C, and the exhaust humidity was set to 15%. The relationship between steam pressure and power generation efficiency is shown in Table 1.

[0121] [Table 1]

[0122] Steam temperature [℃] 312 304 296 Steam pressure [bar] 100 90 80 Steam flow ratio 59.7 59.9 60.2 Exhaust pressure [bar] 0.05 0.05 0.05 Exhaust humidity [%] 15 15 15 Turbine efficiency [%] 53 54 56 Power generation efficiency [%] 20.6 21.1 21.6

[0123] Lower steam pressures lower the saturation temperature and increase the amount of water vapor generated. Furthermore, as the steam flow rate increases, the enthalpy drop is further suppressed, resulting in improved steam turbine power generation efficiency. For example, it is known that at a steam pressure of 80 bar, the steam temperature is 296°C. Therefore, assuming that the heating element 13 generates excess heat at a heating temperature of approximately 300°C, the steam pressure is preferably greater than 80 bar. At a steam pressure of 90 bar, the steam temperature reaches 304°C, resulting in excess heat generated by the heating element 13 and a steam turbine power generation efficiency of 21.1%.

[0124] Figure 9 Graph showing the relationship between entropy and pressure of the Rankine cycle including the heat generating device 80 and the steam turbine 71 of the third embodiment. Figure 9 In the figure, the horizontal axis represents entropy and the vertical axis represents pressure. Figure 10 Graph showing the relationship between entropy and temperature of the Rankine cycle including the heat generating device 80 and the steam turbine 71 of the third embodiment. Figure 10 In the figure, the horizontal axis represents entropy and the vertical axis represents temperature. Figure 11 Graph showing the relationship between entropy and enthalpy of the Rankine cycle including the heat generating device 80 and the steam turbine 71 of the third embodiment. Figure 11 In the equation, the horizontal axis represents entropy and the vertical axis represents enthalpy. Figures 9 to 11In the figure, A represents the state of the fluid at the inlet of the steam turbine 71, B represents the state of the fluid at the outlet of the steam turbine 71, C represents the state of the fluid in the cooling section 32, D represents the state of the fluid in the pump 77a, E represents the state of the fluid at the inlet of the preheater 75, F represents the state of the fluid at the outlet of the preheater 75, G represents the state of the fluid that has reached the saturation temperature in the flow path 14, and H represents the state of the fluid flowing out of the flow path 14.

[0125] [Fourth embodiment]

[0126] The fourth embodiment is configured to use gas as a fluid. In this example, the case of using air as a fluid is described, but gases other than air can also be used. For the same components as those in the above-mentioned embodiments, the same reference numerals are used and descriptions thereof are omitted.

[0127] like Figure 12 As shown, the heating device 90 is the same as the heating device 10 of the first embodiment, and is provided with a heating module 55. The heating device 90 is configured to allow gas as a fluid to flow into the flow path 14, and to allow gas as a fluid to flow out from the flow path 14. Specifically, when the heating device 90 starts to operate, the air as a fluid is heated by the heating portion 33. The air heated by the heating portion 33 flows into the flow path 14, whereby the heating element 13 is heated via the cylinder 12. As a result, the heating element 13 generates excess heat. Then, the excess heat is generated by the heating element 13, and the air flowing through the flow path 14 is heated via the cylinder 12. As a result, high-temperature air (hereinafter referred to as high-temperature air) is generated in the flow path 14, and the high-temperature air flows out from the flow path 14.

[0128] The fourth embodiment uses air as the fluid, allowing the heating element 13 to generate excess heat under a lower pressure than when using water. For example, assuming that the heating element 13 is heated to a high temperature of approximately 500°C, generating excess heat, the temperature of the air flowing into the flow path 14 is set to, for example, 500°C and the pressure is set to, for example, 1 bar. The temperature of the high-temperature air flowing out of the flow path 14 is set to, for example, 700°C and the pressure is set to, for example, 1 bar. The air and the temperature and pressure of the high-temperature air are not limited to those described above.

[0129] In the fourth embodiment, a cooling unit 92 is provided in the circulation line 30 instead of the cooling unit 32 in the first embodiment. Also, a heating unit 33 is provided in the circulation line 30 as in the first embodiment. Description of the heating unit 33 is omitted.

[0130] The cooling unit 92 is electrically connected to the control unit 16 and driven by the control unit 16. The cooling unit 92 cools the high-temperature air as the fluid flowing out of the flow path 14. In the cooling unit 92, the high-temperature air of 700°C is cooled to 300°C, for example.

[0131] In this example, cooling unit 92 functions as a boiler. Cooling unit 92, acting as a boiler, exchanges heat between high-temperature air and boiler water, serving as a heat medium, generating superheated steam from the boiler water. For example, in cooling unit 92, with the pressure maintained at 130 bar, heat is exchanged between 250°C boiler water and 700°C high-temperature air, generating 560°C superheated steam. The superheated steam generated in the boiler can be supplied to a steam turbine, which drives a generator to generate electricity.

[0132] In the fourth embodiment, the circulation line 30 is provided with, in addition to the cooling unit 92 and the heating unit 33, a buffer tank 94 for storing air, a blower 96 for conveying air, a thermometer TI, a pressure gauge PI, a flow meter FI, and the like.

[0133] As described above, the heating device 90 generates a high-temperature fluid (high-temperature air) by exchanging heat between the heating element 13 disposed on the outer surface of the cylinder 12 and the fluid (air) flowing through the flow path 14 formed by the inner surface of the cylinder 12. The high-temperature air, which is a high-temperature fluid, can be used to generate superheated steam in the boiler (cooling unit 92). The superheated steam generated in the boiler can be used in a steam turbine. Therefore, the heating device 90 uses the heating element 13 as an energy source, so it can supply energy inexpensively, cleanly, and safely.

[0134] [Fifth embodiment]

[0135] The fifth embodiment is configured to generate superheated steam in a boiler using high-temperature air and use the superheated steam as hydraulic fluid for a steam turbine to generate electricity. Components identical to those in the above embodiments are denoted by the same reference numerals and their descriptions are omitted.

[0136] like Figure 13 As shown, the heating device 100, like the heating device 90 of the fourth embodiment, includes a single heating module 55. A preheater 75 is provided in the circulation line 30 of the heating device 100, and air sent by the blower 96 is preheated by the preheater 75. The heating device 100 has the same configuration as the heating device 90 of the fourth embodiment, except that the preheater 75 is provided in the circulation line 30.

[0137] The heat generating device 100 is connected to a heat recovery line 101 . The heat recovery line 101 is connected to a cooling unit 92 as a boiler provided in the circulation line 30 , and is configured to circulate boiler water through the cooling unit 92 .

[0138] The heat recovery line 101 is provided with a control valve 102 , a steam tank 103 , a steam turbine 104 , a condenser 105 , a liquid storage tank 106 , a pump 107 , a buffer tank 108 , a deaerator 109 , a pump 110 , and a preheater 111 .

[0139] Control valve 102 regulates the flow rate and pressure of steam flowing out of cooling unit 92, which serves as a boiler. Steam tank 103 temporarily stores steam. A thermometer TI is provided in steam tank 103. The temperature of the steam stored in steam tank 103 is set to, for example, 560°C and the pressure is set to, for example, 130 bar.

[0140] The steam tank 103 is connected to the buffer tank 108 via preheating pipes 101a and 101b. The preheating pipe 101a is connected to the preheater 111. The preheating pipe 101b is connected to the preheater 75. A portion of the water vapor stored in the steam tank 103 is supplied to the preheater 111 via the preheating pipe 101a and to the preheater 75 via the preheating pipe 101b.

[0141] The steam turbine 104 is a fluid utilization device that uses the superheated steam stored in the steam tank 103 as hydraulic fluid. The steam turbine 104 has a rotating shaft connected to a generator and rotates about the shaft when supplied with superheated steam. The generator generates electricity through the rotation of the steam turbine 104. The steam discharged from the steam turbine 104 has its temperature reduced to, for example, 32.9°C and its pressure reduced to 0.05 bar. This steam contains fine mist droplets.

[0142] The steam turbine 104 is configured to extract a portion of steam from an extraction section installed midway within the turbine. The extraction section of the steam turbine 104 is connected to a deaerator 109 via an extraction pipe 101c. Steam extracted from the extraction section of the steam turbine 104 flows through the extraction pipe 101c and is supplied to the deaerator 109. The steam flowing through the extraction pipe 101c has a temperature of, for example, 251°C and a pressure of, for example, 12 bar.

[0143] Condenser 105 cools and condenses the steam discharged from steam turbine 104. Liquid storage tank 106 stores the boiler water condensed by condenser 105. Pump 107 transfers the boiler water from liquid storage tank 106 to buffer tank 108. The boiler water transferred by pump 107 has a temperature of, for example, 32.9°C and a pressure of, for example, 1 bar.

[0144] Buffer tank 108 is used to store boiler water. It is supplied with boiler water delivered from liquid storage tank 106, boiler water generated by cooling water vapor flowing through preheating pipe 101a using preheater 111, and boiler water generated by cooling water vapor flowing through preheating pipe 101b using preheater 75. The boiler water stored in buffer tank 108 is delivered to deaerator 109. The boiler water delivered to deaerator 109 has a temperature of, for example, 87.5°C and a pressure of, for example, 2 bar.

[0145] The deaerator 109 uses steam supplied from the exhaust section of the steam turbine 104 via the exhaust pipe 101c to remove oxygen from the boiler water delivered from the buffer tank 108. The deaerator 109 is equipped with a thermometer TI and a pressure gauge PI. The pump 110 delivers the boiler water deaerated by the deaerator 109 to the preheater 111. The boiler water delivered by the pump 110 has a temperature of, for example, 120°C and a pressure of, for example, 2 bar.

[0146] The preheater 111 preheats boiler water supplied to the cooling unit 92 by exchanging heat between steam flowing through the preheating pipe 101a and boiler water supplied from the deaerator 109. The steam flowing through the preheating pipe 101a is cooled by the heat exchange in the preheater 111, condensed into boiler water, and then supplied to the buffer tank 108. The steam flowing through the preheating pipe 101a has a temperature of, for example, 560°C and a pressure of, for example, 130 bar. The boiler water supplied to the buffer tank 108 through the preheater 111 has a temperature of, for example, 120°C and a pressure of, for example, 2 bar.

[0147] The preheater 75 preheats the air flowing into the flow path 14 by exchanging heat between the steam flowing through the preheating pipe 101b and the air delivered by the blower 96. The steam flowing through the preheating pipe 101b is cooled by the heat exchange in the preheater 75, condensed into boiler water, and then delivered to the buffer tank 108. The steam flowing through the preheating pipe 101b has a temperature of, for example, 560°C and a pressure of, for example, 130 bar. The boiler water delivered to the buffer tank 108 through the preheater 75 has a temperature of, for example, 120°C and a pressure of, for example, 2 bar.

[0148] In the cooling unit 92 serving as a boiler, for example, 250°C and 130 bar boiler water supplied from the preheater 111 exchanges heat with 700°C high-temperature air flowing out of the flow path 14 , thereby generating superheated steam at 560°C and 130 bar from the boiler water.

[0149] As described above, the heating device 100 generates a high-temperature fluid (high-temperature air) similarly to the heating device 90 of the fourth embodiment. This high-temperature air, serving as a high-temperature fluid, can be used to generate superheated steam within the boiler (cooling unit 92). The heating device 100 described above and the steam turbine 104, serving as a fluid utilization device, form a heat utilization system 119. Because the heating device 100 and heat utilization system 119 utilize the heating element 13 as an energy source, they can provide energy inexpensively, cleanly, and safely.

[0150] [Sixth embodiment]

[0151] The heat generating device 100 of the fifth embodiment includes a single heat generating module 55, but the sixth embodiment utilizes a plurality of heat generating modules 55 connected together. This example describes a case where three heat generating modules 55a to 55c are connected together. However, the number of heat generating modules 55 is not particularly limited and can be increased or decreased to achieve the desired output. Components identical to those used in the aforementioned embodiments are designated by the same reference numerals, and their descriptions are omitted.

[0152] like Figure 14 As shown, the heating device 120 includes three heating modules 55a to 55c. Figure 14 Although not shown, the heating device 120 includes a control unit 16, which controls the operation of each component. A gas supply unit 27 and a gas exhaust unit 28 are connected to the hollow portion 26. The heating device 120 has three heating modules 55a to 55c connected in parallel via a distribution pipe 81 and a collection pipe 82. However, the three heating modules 55a to 55c can also be connected in series.

[0153] The heating device 120 has the same configuration as the heating device 100 of the fifth embodiment, except that it includes three heating modules 55a-55c and is connected by a distribution pipe 81 and a collection pipe 82. Furthermore, the heating device 120 is connected to the heat recovery line 101, which is equipped with a steam turbine 104 and other components. Therefore, the high-temperature air generated by the heating device 120 is used to generate superheated steam within the boiler (cooling unit 92).

[0154] As described above, the heat generating device 120 includes three heat generating modules 55a to 55c, thereby achieving high output. In addition, the heat generating device 120 is easy to replace because each heat generating module 55a to 55c is detachable. This makes the heat generating modules 55a to 55c easy to replace, thus providing excellent maintainability.

[0155] The heat generating device 120 and the steam turbine 104 as a fluid utilizing device constitute a heat utilizing system 129. Since the heat generating device 80 and the heat utilizing system 129 utilize the heat generating element 13 as an energy source, energy can be supplied cheaply, cleanly, and safely.

[0156] Figure 15 It is a graph showing the state of heat exchange in the boiler (cooling unit 92) according to the sixth embodiment. Figure 15 The figure shows the decrease in temperature of the high-temperature air and the increase in temperature of the boiler water when the pressure in the boiler is set to 130 bar and the high-temperature air and the boiler water as the heat medium are brought into indirect contact by convection in the boiler. Figure 15 In this chart, the vertical axis represents the temperatures of boiler water and air. The horizontal axis represents the various components within the boiler. "SH inlet" represents the inlet of the boiler's superheater (SH), "SH out / EVA in" represents the area between the superheater outlet and the evaporator (EVA) inlet, "EVA out / ECO in" represents the area between the evaporator outlet and the economizer (ECO) inlet, and "ECO out" represents the economizer outlet. "Boiler air" refers to high-temperature air. "Boiler steam" refers to boiler water or steam. High-temperature air, at 700°C, is supplied to the boiler's superheater. After heat exchange with boiler water, it becomes 300°C air and is discharged from the economizer. Boiler water, at 250°C, is supplied to the boiler's economizer. There, it is heated to 331°C, its saturation temperature at 130 bar, and then becomes steam in the evaporator. This steam is further heated in the superheater, becoming superheated steam at 560°C, before being discharged from the boiler.

[0157] Figure 16 Graph showing the relationship between entropy and pressure of the Rankine cycle including the heat generating device 120 and the steam turbine 104 according to the sixth embodiment. Figure 16 In the figure, the horizontal axis represents entropy and the vertical axis represents pressure. Figure 17 A graph showing the relationship between entropy and temperature of a Rankine cycle including the heat generating device 120 and the steam turbine 104 according to the sixth embodiment. Figure 17 In the figure, the horizontal axis represents entropy and the vertical axis represents temperature. Figure 18 Graph showing the relationship between entropy and enthalpy of the Rankine cycle including the heat generating device 120 and the steam turbine 104 of the sixth embodiment. Figure 18 In the equation, the horizontal axis represents entropy and the vertical axis represents enthalpy. Figures 16 to 18In the figure, A represents the state of the heat medium at the inlet of the steam turbine 104, B represents the state of the heat medium in the exhaust section of the steam turbine 104, C represents the state of the heat medium leaving the exhaust section of the steam turbine 104, D represents the state of the heat medium at the outlet of the steam turbine 104, E represents the state of the heat medium in the condenser 105, F represents the state of the heat medium in the pump 107, G represents the state of the heat medium at the outlet of the buffer tank 108, H represents the state of the heat medium at the outlet of the deaerator 109, I represents the state of the heat medium in the preheater 111, J represents the state of the heat medium starting to exchange heat in the boiler (cooling section 92), K represents the state of the heat medium that reaches the saturation temperature in the boiler, and L represents the state of the heat medium in the superheater in the boiler.

[0158] The present invention is not limited to the above-described embodiments, and can be appropriately modified within the scope of the present invention.

[0159] The heating element 13 of each embodiment has a structure in which a multilayer film 58 composed of a first layer 59 and a second layer 60 is provided on the surface of a base 57, but the structure of the heating element is not limited thereto.

[0160] For example, Figure 19 As shown, the heating element 133 has a base 57 and a multilayer film 134. In addition to the first layer 59 and the second layer 60, the multilayer film 134 also has a third layer 135. The description of the base 57, the first layer 59 and the second layer 60 is omitted. The third layer 135 is formed of a hydrogen storage metal, hydrogen storage alloy or ceramic that is different from the first layer 59 and the second layer 60. The thickness of the third layer 135 is preferably less than 1000 nm. Figure 19 In the embodiment, the first layer 59, the second layer 60, and the third layer 135 are stacked on the surface of the base 57 in this order. Alternatively, the first layer 59, the second layer 60, and the third layer 135 may be stacked on the surface of the base 57 in this order. Specifically, the multilayer film 134 has a stacked structure in which the first layer 59 is provided between the second layer 60 and the third layer 135. The multilayer film 134 only needs to have one or more third layers 135. The dissimilar substance interface 136 formed between the first layer 59 and the third layer 135, like the dissimilar substance interface 61, allows hydrogen atoms to pass through.

[0161] The third layer 135 is formed of, for example, any one of Ni, Pd, Cu, Cr, Fe, Mg, Co, alloys thereof, SiC, CaO, Y2O3, TiC, and LaB6. The alloy forming the third layer 135 preferably includes an alloy of two or more of Ni, Pd, Cu, Cr, Fe, Mg, and Co. As the alloy forming the third layer 135, alloys obtained by adding additional elements to Ni, Pd, Cu, Cr, Fe, Mg, and Co may also be used.

[0162] In particular, the third layer 135 is preferably formed by any one of CaO, Y2O3, TiC, LaB6, SrO, and BaO. The heating element 133 having the third layer 135 formed by any one of CaO, Y2O3, TiC, LaB6, SrO, and BaO increases the amount of hydrogen absorbed, and the amount of hydrogen that passes through the heterogeneous material interface 61 and the heterogeneous material interface 136 increases, which can achieve high output of excess heat. The thickness of the third layer 135 formed by any one of CaO, Y2O3, TiC, LaB6, SrO, and BaO is preferably less than 10nm. Thus, the multilayer film 134 allows hydrogen atoms to pass through easily. The third layer 135 formed by any one of CaO, Y2O3, TiC, LaB6, SrO, and BaO may not be formed into a complete film shape, but may be formed into an island distribution shape. In addition, the first layer 59 and the third layer 135 are preferably formed continuously under a vacuum state. As a result, no natural oxide film is formed between the first layer 59 and the third layer 135 , and only the different-substance interface 136 is formed.

[0163] As a combination of the first layer 59, the second layer 60 and the third layer 135, if the types of elements are expressed in the form of "first layer 59-third layer 135-second layer 60", Pd-CaO-Ni, Pd-Y2O3-Ni, Pd-TiC-Ni, Pd-LaB6-Ni, Ni-CaO-Cu, Ni-Y2O3-Cu, Ni-TiC-Cu, Ni-LaB6-Cu, Ni-Co-Cu, Ni-CaO-Cr, Ni-Y2O3-Cr, Ni-TiC-Cr, Ni-L aB6-Cr, Ni-CaO-Fe, Ni-Y2O3-Fe, Ni-TiC-Fe, Ni-LaB6-Fe, Ni-Cr-Fe, Ni-CaO-Mg, Ni-Y2O3-Mg, Ni-TiC-Mg, Ni-La B6-Mg, Ni-CaO-Co, Ni-Y2O3-Co, Ni-TiC-Co, Ni-LaB6-Co, Ni-CaO-SiC, Ni-Y2O3-SiC, Ni-TiC-SiC, Ni-LaB6-SiC.

[0164] like Figure 20As shown, the heating element 143 has a base 57 and a multilayer film 144. The multilayer film 144 has a fourth layer 145 in addition to the first layer 59, the second layer 60 and the third layer 135. The fourth layer 145 is formed of a hydrogen storage metal, hydrogen storage alloy or ceramic that is different from the first layer 59, the second layer 60 and the third layer 135. The thickness of the fourth layer 145 is preferably less than 1000 nm. Figure 20 In the embodiment, the first layer 59, the second layer 60, the third layer 135, and the fourth layer 145 are stacked on the surface of the base 57 in this order. Alternatively, the first layer 59, the second layer 60, the third layer 135, the first layer 59, and the fourth layer 145 may be stacked on the surface of the base 57 in this order. Specifically, the multilayer film 144 has a stacked structure in which the second layer 60, the third layer 135, and the fourth layer 145 are stacked in any order, with the first layer 59 provided between the second layer 60, the third layer 135, and the fourth layer 145. The multilayer film 144 only needs to have one or more fourth layers 145. The dissimilar substance interface 146 formed between the first layer 59 and the fourth layer 145 allows hydrogen atoms to pass therethrough, similarly to the dissimilar substance interface 61 and the dissimilar substance interface 136 .

[0165] The fourth layer 145 is formed of, for example, any one of Ni, Pd, Cu, Cr, Fe, Mg, Co, alloys thereof, SiC, CaO, Y2O3, TiC, and LaB6. The alloy forming the fourth layer 145 preferably includes an alloy of two or more of Ni, Pd, Cu, Cr, Fe, Mg, and Co. As the alloy forming the fourth layer 145, alloys obtained by adding additional elements to Ni, Pd, Cu, Cr, Fe, Mg, and Co may also be used.

[0166] In particular, the fourth layer 145 is preferably formed of any one of CaO, Y2O3, TiC, LaB6, SrO, and BaO. The heating element 143 having the fourth layer 145 formed of any one of CaO, Y2O3, TiC, LaB6, SrO, and BaO has an increased hydrogen storage capacity, and the amount of hydrogen that passes through the heterogeneous material interface 61, the heterogeneous material interface 136, and the heterogeneous material interface 146 increases, which can achieve high output of excess heat. The thickness of the fourth layer 145 formed of any one of CaO, Y2O3, TiC, LaB6, SrO, and BaO is preferably less than 10nm. As a result, the multilayer film 144 allows hydrogen atoms to pass through easily. The fourth layer 145 formed of any one of CaO, Y2O3, TiC, LaB6, SrO, and BaO may not be formed into a complete film shape, but may be formed into an island distribution shape. Furthermore, the first layer 59 and the fourth layer 145 are preferably formed continuously in a vacuum state. Thus, no natural oxide film is formed between the first layer 59 and the fourth layer 145, and only the interface 146 of different substances is formed.

[0167] As a combination of the first layer 59, the second layer 60, the third layer 135 and the fourth layer 145, if the type of element is represented by "first layer 59-fourth layer 145-third layer 135-second layer 60", Ni-CaO-Cr-Fe, Ni-Y2O3-Cr-Fe, Ni-TiC-Cr-Fe, and Ni-LaB6-Cr-Fe are preferred.

[0168] The configuration of various multilayer films such as the multilayer film 58 , the multilayer film 134 , and the multilayer film 144 , for example, the ratio of the thickness of each layer, the number of layers, and the material can be appropriately changed according to the temperature used.

[0169] In the above embodiments, one heating element 13 is provided on the entire outer surface of one cylinder 12, but it may also be provided on the entire outer surface of one cylinder 12. Figure 21 As shown in FIG, a plurality of heating elements 13 are provided on the outer surface of a cylinder 12 at intervals. Since there are gaps between the heating elements 13, even when the cylinder 12 thermally expands, the heating elements 13 can be prevented from being damaged. In addition, a plurality of heating elements 133 can be provided on the outer surface of a cylinder 12 at intervals (refer to FIG. Figure 19 ). A plurality of heating elements 143 may be provided on the outer surface of one cylinder 12 at intervals (refer to Figure 20 ).

[0170] In the above embodiments, the external fluid line 45 includes a plurality of first pipes 47, but a single first pipe 47 may cover the entire outer surface of the main body 17. Alternatively, a single first pipe 47 may be spirally wound along the outer surface of the main body 17.

[0171] The first annular pipe 48 may have a through hole connected to the fluid inflow chamber 18. Since the first annular pipe 48 and the fluid inflow chamber 18 are directly connected via the through hole, the second pipe 50 may be omitted.

[0172] The second annular pipe 49 may have a through hole connected to the fluid outflow chamber 19. Since the second annular pipe 49 and the fluid outflow chamber 19 are directly connected via the through hole, the third pipe 51 may be omitted.

[0173] The fluid heated by any one of the heating elements 13, 133, and 143 can be used as a thermal energy source to separate carbon dioxide (CO2) from exhaust gases emitted from combustion devices such as boilers. By supplying the fluid heated by the heating element to a carbon dioxide separation and recovery device that performs a chemical absorption method or a physical adsorption method, the CO2 contained in the exhaust gas can be recovered. The chemical absorption method is to allow an absorbing liquid such as an aqueous solution of an amine compound to absorb the CO2 contained in the exhaust gas, and then heat the absorbing liquid that has absorbed the CO2, thereby releasing the CO2 from the absorbing liquid. The physical adsorption method is to allow an adsorbent such as activated carbon or zeolite to adsorb the CO2 contained in the exhaust gas, and then heat the adsorbent that has adsorbed the CO2, thereby separating the CO2 from the adsorbent. As a thermal energy source for heating the absorbing liquid that has absorbed the CO2 in the chemical absorption method, a fluid heated by the heating element can be used. In addition, as a thermal energy source for heating the adsorbent that has adsorbed the CO2 in the physical adsorption method, a fluid heated by the heating element can be used.

[0174] By utilizing a fluid heated by a heating element as a thermal energy source, CO2 separated and recovered by a carbon dioxide separation and recovery device, etc., reacts with hydrogen (H2) to convert it into methane (CH4). By utilizing a catalyst that causes CO2 and H2 to react (methanation reaction), a raw gas containing CO2 and H2 is brought into contact with the catalyst, and CH4 is generated from the raw gas. However, if the temperature of the raw gas is low, the reaction cannot proceed sufficiently. Therefore, regarding the thermal energy source for heating the raw gas containing CO2 and H2, the methanation reaction can be carried out by utilizing a fluid heated by a heating element as a thermal energy source.

[0175] In the IS cycle, which uses thermal energy to produce hydrogen from water, or the ISN cycle, which uses thermal energy to produce ammonia (NH3) from water and nitrogen (N2), a fluid heated by a heating element can be used as a thermal energy source. In the IS cycle, water, iodine (I), and sulfur (S) react to generate hydrogen iodide (HI), which is thermally decomposed to generate hydrogen. As a thermal energy source for thermally decomposing hydrogen iodide, a fluid heated by a heating element can be used. In the ISN cycle, nitrogen reacts with the hydrogen iodide generated in the IS cycle to generate ammonium iodide (NH4I), which is thermally decomposed to generate ammonia. As a thermal energy source for thermally decomposing ammonium iodide, a fluid heated by a heating element can be used.

[0176] Figure 22 The heat generating element manufacturing apparatus 150 uses sputtering to manufacture the heat generating element 13. In this example, the heat generating element manufacturing apparatus 150 implements DC (Direct Current) magnetron sputtering as the sputtering method to directly form the heat generating element 13 on the outer surface of the cylindrical body 12.

[0177] The heat generating element manufacturing apparatus 150 includes: a loading chamber 151 for loading the cylindrical body 12; a preheating chamber 152 for preheating the cylindrical body 12; a sputter etching chamber 153 for sputter etching the surface of the cylindrical body 12; a base forming chamber 154 for forming the base 57 on the cylindrical body 12; a first layer forming chamber 155 for forming the first layer 59 on the base 57; a second layer forming chamber 156 for forming the second layer 60 on the base 57; and an unloading chamber 157 for unloading the cylindrical body 12. In this example, the heat generating element manufacturing apparatus 150 loads a plurality of cylindrical bodies 12 into the loading chamber 151 and directly forms the heat generating element 13 on the outer surface of each cylindrical body 12. However, it is also possible to load a single cylindrical body 12 into the loading chamber 151 and directly form the heat generating element 13 on the outer surface of the cylindrical body 12.

[0178] In this example, the heat generating body manufacturing device 150 comprises: a first gate valve 161, which is arranged between the loading chamber 151 and the preheating chamber 152; a second gate valve 162, which is arranged between the preheating chamber 152 and the sputtering etching chamber 153; a third gate valve 163, which is arranged between the sputtering etching chamber 153 and the base forming chamber 154; a fourth gate valve 164, which is arranged between the base forming chamber 154 and the first layer forming chamber 155; a fifth gate valve 165, which is arranged between the first layer forming chamber 155 and the second layer forming chamber 156; and a sixth gate valve 166, which is arranged between the second layer forming chamber 156 and the unloading chamber 157; and the loading chamber 151, the preheating chamber 152, the sputtering etching chamber 153, the base forming chamber 154, the first layer forming chamber 155, the second layer forming chamber 156 and the unloading chamber 157 are separated from each other. The heat generating element manufacturing apparatus 150 further includes a conveying mechanism for conveying the cylindrical body 12 from the loading chamber 151 to the unloading chamber 157 and a rotating mechanism for rotating the cylindrical body 12 about the central axis of the cylindrical body 12 , although these are not shown in the figure.

[0179] The first gate valve 161 opens and closes the first loading / unloading section 171 between the loading chamber 151 and the preheating chamber 152. The second gate valve 162 opens and closes the second loading / unloading section 172 between the preheating chamber 152 and the sputtering / etching chamber 153. The third gate valve 163 opens and closes the third loading / unloading section 173 between the sputtering / etching chamber 153 and the susceptor formation chamber 154. The fourth gate valve 164 opens and closes the fourth loading / unloading section 174 between the susceptor formation chamber 154 and the first layer formation chamber 155. The fifth gate valve 165 opens and closes the fifth loading / unloading section 175 between the first layer formation chamber 155 and the second layer formation chamber 156. The sixth gate valve 166 opens and closes the sixth loading / unloading section 176 between the second layer formation chamber 156 and the unloading chamber 157.

[0180] The heat generating device manufacturing apparatus 150 includes a first vacuum generating unit 181 for vacuum-exhausting the loading chamber 151; a second vacuum generating unit 182 for vacuum-exhausting the preheating chamber 152; a third vacuum generating unit 183 for vacuum-exhausting the sputtering and etching chamber 153; a fourth vacuum generating unit 184 for vacuum-exhausting the susceptor formation chamber 154; a fifth vacuum generating unit 185 for vacuum-exhausting the first layer formation chamber 155; a sixth vacuum generating unit 186 for vacuum-exhausting the second layer formation chamber 156; and a seventh vacuum generating unit 187 for vacuum-exhausting the unloading chamber 157. For example, a dry vacuum pump or a turbomolecular pump is used for the first to seventh vacuum generating units 181 to 187.

[0181] The loading chamber 151 has a loading section 191 for loading the cylindrical body 12. After the cylindrical body 12 is loaded into the loading section 191, the loading section 191 and the first gate valve 161 are closed and then vacuumed by the first vacuum generating section 181. After the vacuum is exhausted from the loading chamber 151, the first gate valve 161 is opened, and the cylindrical body 12 is transferred from the loading chamber 151 to the preheating chamber 152 via the first loading / unloading section 171.

[0182] The preheating chamber 152 is vacuum-exhausted to, for example, about 1E-3 Pa by the second vacuum generating portion 182 while the first grid valve 161 and the second grid valve 162 are closed. The preheating chamber 152 has a heating portion 192, which heats the cylinder 12 while rotating the cylinder 12. The heating portion 192 removes moisture adsorbed on the surface of the cylinder 12 by heating the cylinder 12 so that the surface temperature of the cylinder 12 becomes, for example, 200 to 350°C. The heating portion 192 is not particularly limited as long as it can heat the cylinder 12 to the required temperature. For example, a lamp heating method, an infrared heating method, an induction heating method, etc. can be used. After heating, the second grid valve 162 is opened, and the cylinder 12 is transported from the preheating chamber 152 to the sputtering etching chamber 153 via the second loading and unloading portion 172.

[0183] The sputter etching chamber 153 is vacuum-exhausted by the third vacuum generating unit 183 while the second gate valve 162 and the third gate valve 163 are closed. The sputter etching chamber 153 has a sputter etching electrode 193, which performs sputter etching of the cylinder 12 while rotating the cylinder 12. The sputter etching electrode 193 adjusts the Ar gas flow rate to set the Ar pressure to about 0.1 to 1 Pa, and applies a high frequency (RF; Radio Frequency) of 13.56 MHz to remove organic matter or metal oxides on the surface of the cylinder 12. After sputter etching, the third gate valve 163 is opened, and the cylinder 12 is transferred from the sputter etching chamber 153 to the base forming chamber 154 via the third loading and unloading unit 173.

[0184] The susceptor forming chamber 154 is vacuum-exhausted by the fourth vacuum generating portion 184 while the third gate valve 163 and the fourth gate valve 164 are closed. The susceptor forming chamber 154 has a susceptor forming sputtering electrode 194, which forms the susceptor 57 on the cylinder 12 while rotating the cylinder 12. The susceptor forming sputtering electrode 194 has a target material (not shown) of a hydrogen storage metal, a hydrogen storage alloy or a proton conductor that forms the susceptor 57. The front of the target material faces the cylinder 12. In this example, a magnet (not shown) is arranged on the back of the target material. The susceptor forming sputtering electrode 194 adjusts the flow rate of Ar gas to set the Ar pressure to about 0.1 to 1 Pa, and applies a DC power of about 0.1 to 500 kW / m2, thereby forming the susceptor 57 on the cylinder 12. The thickness of the susceptor 57 can be controlled by adjusting the magnitude of the DC power and the rotation speed of the cylinder 12. After the susceptor 57 is formed, the fourth gate valve 164 is opened, and the cylindrical body 12 is transferred from the susceptor forming chamber 154 to the first layer forming chamber 155 via the fourth loading and unloading section 174 .

[0185] The first layer forming chamber 155 is vacuum-exhausted to, for example, about 1E-5Pa through the fifth vacuum generating portion 185 while the fourth gate valve 164 and the fifth gate valve 165 are closed. The first layer forming chamber 155 has a first layer film-forming sputtering electrode 195, and while the cylinder 12 is rotated, the first layer 59 is formed on the base 57 through the first layer film-forming sputtering electrode 195. The first layer film-forming sputtering electrode 195 has a target material (not shown) of a hydrogen storage metal or a hydrogen storage alloy that forms the first layer 59. The front of the target material is opposite to the base 57. In this example, a magnet (not shown) is arranged on the back of the target material. The first layer film-forming sputtering electrode 195 sets the pressure of Ar to about 0.1 to 1Pa by, for example, adjusting the flow rate of Ar gas, and applying 0.1 to 500kW / m 2 A DC power of approximately 1000 W is applied to form the first layer 59 on the base 57. The thickness of the first layer 59 can be controlled by adjusting the magnitude of the DC power and the rotational speed of the drum 12. After the first layer 59 is formed, the fifth gate valve 165 is opened, and the drum 12 is transferred from the first layer forming chamber 155 to the second layer forming chamber 156 via the fifth loading and unloading section 175.

[0186] The second layer forming chamber 156 is vacuum-exhausted to, for example, about 1E-5Pa through the sixth vacuum generating portion 186 while the fifth gate valve 165 and the sixth gate valve 166 are closed. The second layer forming chamber 156 has a second layer film-forming sputtering electrode 196, and while the cylinder 12 is rotated, the second layer 60 is formed on the base 57 through the second layer film-forming sputtering electrode 196. The second layer film-forming sputtering electrode 196 has a target material (not shown) of a hydrogen storage metal, a hydrogen storage alloy or a ceramic that forms the second layer 60. The front of the target material faces the base 57. In this example, a magnet (not shown) is arranged on the back of the target material. The second layer film-forming sputtering electrode 196 sets the pressure of Ar to about 0.1 to 1Pa by, for example, adjusting the flow rate of Ar gas, and applies 0.1 to 500kW / m 2 A DC power of about 1000 W is applied to form the second layer 60 on the susceptor 57. When ceramics are used as a target for forming the second layer 60, the second layer forming sputtering electrode 196 is configured to apply RF. In the second layer forming chamber 156, a multilayer film 58 consisting of the first layer 59 and the second layer 60 is formed on the surface of the susceptor 57 (see FIG. Figure 5 In this manner, the heating element 13 is formed directly on the outer surface of the cylinder 12. The thickness of the second layer 60 can be controlled by adjusting the amount of DC power and the rotational speed of the cylinder 12. After the second layer 60 is formed, the sixth gate valve 166 is opened, and the cylinder 12 is transferred from the second layer forming chamber 156 to the unloading chamber 157 via the sixth loading and unloading section 176.

[0187] The unloading chamber 157 includes a discharge portion 197 for discharging the cylindrical body 12. The sixth vacuum generating portion 186 is opened to the atmosphere when the discharge portion 197 and the sixth gate valve 166 are closed. The cylindrical body 12 with the heating element 13 formed thereon can be taken out of the unloading chamber 157 at atmospheric pressure via the discharge portion 197.

[0188] As described above, in the heat generating element manufacturing apparatus 150, the loading chamber 151, preheating chamber 152, sputtering and etching chamber 153, susceptor forming chamber 154, first layer forming chamber 155, second layer forming chamber 156, and unloading chamber 157 are separated by the first to sixth gate valves 161 to 166, so that the susceptor 57, first layer 59, and second layer 60 can be continuously formed under a vacuum state. Therefore, the heat generating element manufacturing apparatus 150 can directly form the heat generating element 13 on the outer surface of the cylinder 12, without forming a natural oxide film between the first layer 59 and the second layer 60, and only forming a foreign substance interface 61.

[0189] exist Figure 22In the heat generating device 150, the first to seventh vacuum generating units 181 to 187 are provided for vacuum exhausting each processing chamber separately. However, a vacuum generating unit may be shared by several processing chambers. When a vacuum generating unit is shared by several processing chambers, the pressure in each processing chamber can be controlled by adjusting the flow rate of Ar gas using, for example, a damping valve.

[0190] The rotation speed of the cylinder 12 is set based on the thickness of the etching or film forming, the etching rate or the film forming rate. When the thickness of the etching or film forming is set to X (nm) and the etching rate or the film forming rate is set to Y (nm / min), the rotation speed Z (rpm) of the cylinder 12 ideally satisfies Z>10×(Y / X). The reason is that the uniformity of the film thickness (thickness unevenness) of the heating element 13 can be suppressed to less than 10%. For example, when X=10 (nm) and Y=50 (nm / min), Z>50 (rpm).

[0191] Figure 23 The heating unit 200 is formed by connecting cylindrical bodies 12 each containing a heating element 13. The cylindrical bodies 12 are connected, for example, by welding. The output of the heating unit 200 can be varied by changing the number of cylindrical bodies 12 each containing a heating element 13. In the heating unit 200, gaps are provided between the heating elements 13, preventing them from breaking even when the cylindrical bodies 12 thermally expand.

[0192] The heating element manufacturing apparatus 150 is configured to carry a plurality of short cylindrical bodies 12 with a length of, for example, 50 to 2 meters, thereby miniaturizing the entire apparatus. The heating unit 200 can also be configured by connecting short cylindrical bodies 12 each having a heating element 13 formed thereon.

[0193] The heating element manufacturing apparatus 150 is not limited to manufacturing the heating element 13 having a structure in which the multilayer film 58 is formed on the base 57. The heating element manufacturing apparatus can also manufacture the heating element 133 having a structure in which the multilayer film 134 is formed on the base 57 or the heating element 143 having a structure in which the multilayer film 144 is formed on the base 57.

[0194] The heat generating element manufacturing apparatus for manufacturing the heat generating element 133 includes, in addition to the first layer forming chamber 155 and the second layer forming chamber 156, a third layer forming chamber having a third layer film-forming sputtering electrode for forming the third layer 135 on the base 57. The third layer film-forming sputtering electrode includes a target material of a hydrogen storage metal or a hydrogen storage alloy for forming the third layer 135. The third layer film-forming sputtering electrode can control the thickness of the third layer 135 by adjusting the magnitude of the DC power and the rotation speed of the cylinder 12, similarly to the first layer film-forming sputtering electrode or the second layer film-forming sputtering electrode.

[0195] The heat generating element manufacturing apparatus for manufacturing the heat generating element 143 includes, in addition to the first layer forming chamber 155, the second layer forming chamber 156, and the third layer forming chamber, a fourth layer forming chamber having a fourth layer film-forming sputtering electrode for forming the fourth layer 145 on the base 57. The fourth layer film-forming sputtering electrode includes a target material of a hydrogen storage metal or a hydrogen storage alloy for forming the fourth layer 145. The fourth layer film-forming sputtering electrode can control the thickness of the fourth layer 145 by adjusting the magnitude of the DC power and the rotational speed of the cylinder 12, similarly to the first layer film-forming sputtering electrode or the second layer film-forming sputtering electrode.

[0196] The thickness of the base 57 constituting the heating elements 13, 133, and 143 is not particularly limited and can be varied as appropriate. By thinning the base 57 to form a film, and providing the multilayer films 58, 134, and 144 on the film-like base 57, a film-like heating element (hereinafter referred to as a film-like heating element) can be formed. The film-like heating element will be described in detail below.

[0197] like Figure 24 As shown, the film-shaped heating element 213 is wound on the outer surface of the cylinder 12. Figure 24 In the embodiment, the film heating element 213 is spirally wound on the outer surface of the cylinder 12 without any gaps, but it can also be spirally wound on the outer surface of the cylinder 12 with gaps therebetween. In addition, the film heating element 213 can also be spirally wound on the outer surface of the cylinder 12 in a manner such that at least a portion of the film heating elements 213 adjacent to each other in the direction of the central axis C of the cylinder 12 overlap in the radial direction of the cylinder 12.

[0198] The film-shaped heating element 213 has the same characteristics as the heating element 13 (refer to Figure 5 ) The same structure. That is, the film heating element 213 has a base 57 and a multilayer film 58. The base 57 and the multilayer film 58 constituting the film heating element 213 are film-shaped.

[0199] The thickness of the base 57 is preferably in the range of 1 μm to 5000 μm, more preferably in the range of 100 μm to 600 μm. The thickness of the multilayer film 58 is preferably in the range of 0.02 μm to 10 μm, more preferably in the range of 2 μm to 6 μm. The thickness of the film heating element 213 is preferably in the range of 1.02 μm to 5010 μm, more preferably in the range of 102 μm to 606 μm. The thickness of the base 57, the thickness of the multilayer film 58 and the thickness of the film heating element 213 are not limited to the above values ​​and can be appropriately designed to obtain the output required as a heating device using the film heating element 213.

[0200] In this example, the film-shaped heating element 213 has the same structure as the heating element 13, but may also have the same structure as the heating element 133 (see Figure 19) has the same structure as the base 57 and the multilayer film 134. In addition, the film-shaped heating element 213 may also have the same structure as the heating element 143 (reference Figure 20 ) has the same structure, that is, it has a base 57 and a multilayer film 144. The multilayer film 134 or the multilayer film 144 constituting the film-like heating element 213 is film-shaped.

[0201] The film heating element 213 and the cylinder 12 are joined together by spot welding, for example. For example, the film heating element 213 is wound around the outer surface of the cylinder 12 while spot welding is performed at equal intervals in the direction of the central axis C of the cylinder 12 to join the film heating element 213 and the cylinder 12. The spot-welded portion becomes hot, but the diameter of the spot-welded portion is about 1 mm, and the high-temperature state lasts for several seconds, so the characteristics of the film heating element 213 are hardly deteriorated. In addition, the joining portion of the film heating element 213 and the cylinder 12 is not particularly limited.

[0202] As described above, the film heating element 213 has a base 57 and a multilayer film 58, and therefore has the same function and effect as the heating element 13. That is, the film heating element 213 uses hydrogen to generate heat, and therefore does not produce greenhouse gases such as carbon dioxide. In addition, the hydrogen used to generate heat for the film heating element 213 can be generated from water, so it is inexpensive. Furthermore, the heat generated by the film heating element 213 is different from a nuclear fission reaction and does not cause a chain reaction, so it is considered safe. Therefore, the film heating element 213 can be used as a cheap, clean and safe energy source. Furthermore, the film heating element 213 has flexibility and excellent followability to curved surfaces by making the base 57 and the multilayer film 58 film-shaped.

[0203] Figure 25 The film heating element manufacturing apparatus 215 uses sputtering to manufacture the film heating element 213. In this example, the film heating element manufacturing apparatus 215 employs DC magnetron sputtering as the sputtering method. The film heating element manufacturing apparatus 215 forms a multilayer film 58 on the surface of the substrate 57 while continuously conveying the long film-like substrate 57 in a roll-to-roll manner.

[0204] The film heating element manufacturing apparatus 215 includes: an unwinding chamber 217 for unwinding the long film-shaped base 57; a film forming chamber 218 for forming a multilayer film 58 on the base 57; and a winding chamber 219 for winding the base 57 on which the multilayer film 58 is formed.

[0205] In this example, the film heating element manufacturing device 215 is composed of a single vacuum chamber 220, which has: a first partition plate 221, which separates the unwinding chamber 217 from the film forming chamber 218; a second partition plate 222, which separates the film forming chamber 218 from the winding chamber 219; and a third partition plate 223, which separates the unwinding chamber 217 from the winding chamber 219.

[0206] The vacuum chamber 220 includes a first vacuum generating section 224 for vacuum exhausting the unwinding chamber 217 and a second vacuum generating section 225 for vacuum exhausting the film forming chamber 218. The first vacuum generating section 224 reduces the pressure of the unwinding chamber 217 to, for example, about 1E-4 Pa. The second vacuum generating section 225 reduces the pressure of the film forming chamber 218 to, for example, about 1E-5 Pa, which is lower than that of the unwinding chamber 217. The first vacuum generating section 224 and the second vacuum generating section 225 use, for example, a dry vacuum pump or a turbomolecular pump. Sputtering gas is introduced into the interior of the vacuum chamber 220 after decompression. In this example, the sputtering gas is argon (Ar) gas, but known gases can also be used. By adjusting the flow rate of Ar gas, the pressure of Ar inside the vacuum chamber 220 can be adjusted. The shape and material of the vacuum chamber 220 are not particularly limited as long as they can withstand the decompression state.

[0207] The unwinding chamber 217 includes a unwinding reel 226 on which the long film-like base 57 is wound; a first transport reel unit 227 for transporting the base 57 unwound from the unwinding reel 226; and a heating unit 228 for heating the base 57 transported by the first transport reel unit 227. The unwinding reel 226 is driven by a motor (not shown) to rotate. The first transport reel unit 227 is composed of, for example, a tension adjustment reel and a tension measurement reel.

[0208] The heating unit 228 heats the surface of the susceptor 57 to a temperature of, for example, 200 to 350° C., thereby removing moisture adsorbed on the surface of the susceptor 57. The heating unit 228 is not particularly limited as long as it can heat the susceptor 57 to a desired temperature. For example, a lamp heating method, an infrared heating method, an induction heating method, etc. can be used.

[0209] The film forming chamber 218 has: a film forming roll 229, which transports the base 57 unloaded from the unloading chamber 217; a sputtering etching electrode 230, which sputters and etches the surface of the base 57; first-layer film forming sputtering electrodes 231A and 231B, which form the first layer 59 on the base 57; and second-layer film forming sputtering electrodes 232A and 232B, which form the second layer 60 on the base 57.

[0210] The film-forming roll 229 has a motor (not shown) and is driven to rotate by the motor. A refrigerant, whose temperature has been regulated outside the vacuum chamber 220, circulates inside the film-forming roll 229. Therefore, in the film-forming chamber 218, the base 57 is controlled to a fixed temperature (e.g., within the range of 50 to 300°C). The tension measuring roll of the first transport roll section 227 measures the tension based on the difference in circumferential speed between the film-forming roll 229 and the unwinding roll 226. The measurement data from the tension measuring roll is fed back to the unwinding roll 226 to control the circumferential speed of the unwinding roll 226.

[0211] The sputtering etching electrode 230, the first layer film-forming sputtering electrodes 231A and 231B, and the second layer film-forming sputtering electrodes 232A and 232B are arranged at a position facing the surface of the susceptor 57 conveyed by the film-forming roll 229. The sputtering etching electrode 230, the first layer film-forming sputtering electrodes 231A and 231B, and the second layer film-forming sputtering electrodes 232A and 232B have a protective plate on the front side facing the surface of the susceptor 57.

[0212] The sputter etching electrode 230 adjusts the flow rate of Ar gas to set the Ar pressure to about 0.1 to 1 Pa, and applies 13.56 MHz RF to remove organic matter, metal oxides, and the like on the surface of the susceptor 57 .

[0213] The first layer film-forming sputtering electrode 231A and the first layer film-forming sputtering electrode 231B have the same structure as each other. The first layer film-forming sputtering electrodes 231A and 231B have a target material (not shown) of a hydrogen storage metal or a hydrogen storage alloy that forms the first layer 59. The front surface of the target material faces the base 57. In this example, a magnet (not shown) is arranged on the back surface of the target material. The first layer film-forming sputtering electrodes A and 231B are configured to adjust the flow rate of Ar gas to set the pressure of Ar to about 0.1 to 1 Pa, and apply 0.1 to 500 kW / m 2 A DC power of about 1000W is applied to form a first layer 59 on the base 57. The thickness of the first layer 59 can be controlled by adjusting the magnitude of the DC power and the transport speed of the base 57.

[0214] The second layer film forming sputtering electrode 232A and the second layer film forming sputtering electrode 232B have the same structure as each other. The second layer film forming sputtering electrodes 232A and 232B have a target material (not shown) of a hydrogen storage metal, hydrogen storage alloy or ceramic that forms the second layer 60. The front of the target material faces the base 57. In this example, a magnet (not shown) is arranged on the back of the target material. The second layer film forming sputtering electrodes 232A and 232B are set to an Ar pressure of about 0.1 to 1 Pa by adjusting the flow rate of Ar gas, and applying 0.1 to 500 kW / m 2 A DC power of approximately 100 Ω is applied to form the second layer 60 on the susceptor 57. Furthermore, when ceramic is used as a target for forming the second layer 60, the second layer forming sputtering electrodes 232A and 232B are configured to apply RF. The thickness of the second layer 60 can be controlled by adjusting the DC power and the transport speed of the susceptor 57.

[0215] exist Figure 25 In FIG, the hollow arrow indicates the moving direction of the base 57. Figure 25In the embodiment, the first layer-forming sputtering electrode 231A, the second layer-forming sputtering electrode 232A, the first layer-forming sputtering electrode 231B, and the second layer-forming sputtering electrode 232B are arranged in this order from the upstream side toward the downstream side in the moving direction of the susceptor 57. Therefore, the first layer-forming sputtering electrode 231A forms the first layer 59 on the surface of the susceptor 57. The second layer-forming sputtering electrode 232A forms the second layer 60 on the surface of the first layer 59 formed by the first layer-forming sputtering electrode 231A. The first layer-forming sputtering electrode 231B forms the first layer 59 on the surface of the second layer 60 formed by the second layer-forming sputtering electrode 232A. The second layer-forming sputtering electrode 232B forms the second layer 60 on the surface of the first layer 59 formed by the first layer-forming sputtering electrode 231B. In this manner, a multilayer film 58 consisting of a first layer 59 and a second layer 60 is formed on the surface of the susceptor 57 in the film forming chamber 218. In the following description, when the first film-forming sputtering electrode 231A and the first film-forming sputtering electrode 231B are not distinguished, they are referred to as the first film-forming sputtering electrode 231. When the second film-forming sputtering electrode 232A and the second film-forming sputtering electrode 232B are not distinguished, they are referred to as the second film-forming sputtering electrode 232. If there are at least one first film-forming sputtering electrode 231 and one second film-forming sputtering electrode 232, a multilayer film 58 having at least one first layer 59 and at least one second layer 60, and having at least one heterogeneous material interface 61, can be obtained. The number of first layers 59 , the number of second layers 60 , and the number of different substance interfaces 61 can be changed by changing the number of first layer-forming sputtered electrodes 231 and the number of second layer-forming sputtered electrodes 232 .

[0216] The winding chamber 219 includes: a second conveying roll section 233 for conveying the base 57 conveyed from the film forming chamber 218; and a winding roll 234 for winding the base 57 conveyed by the second conveying roll section 233. The film-like object wound by the winding roll 234 is the film-like heating element 213. The second conveying roll section 233 is composed of, for example, a tension adjustment roll and a tension measuring roll. The winding roll 234 has a motor not shown and is rotated by the drive of the motor. The tension based on the difference in peripheral speed between the winding roll 234 and the film forming roll 229 can be measured by the tension measuring roll of the second conveying roll section 233. The measurement data measured by the tension measuring roll is fed back to the winding roll 234 to control the peripheral speed of the winding roll 234. The film-like heating element 213 can be obtained by returning the interior of the vacuum chamber 220 to atmospheric pressure and then taking out the take-up roll 234 from the take-up chamber 219 .

[0217] As described above, the film heating element manufacturing device 215 can continuously form the first layer 59 and the second layer 60 on the base 57 under a vacuum state by alternately arranging the first layer film-forming sputtering electrode 231 and the second layer film-forming sputtering electrode 232 from the upstream side toward the downstream side of the moving direction of the long film-shaped base 57. Therefore, the film heating element manufacturing device 215 can manufacture a long film heating element 213 in which no natural oxide film is formed between the first layer 59 and the second layer 60, but only a heterogeneous material interface 61 is formed. The long film heating element 213 is flexible and has excellent followability for curved surfaces such as concave and convex shapes. In addition, the long film heating element 213 can be cut into the required length for use, so it can be applied to more purposes.

[0218] Alternatively, a plurality of short film-like heating elements 213 may be prepared by cutting a long film-like heating element 213 into predetermined lengths, and the plurality of short film-like heating elements 213 may be arranged on the outer surface of one cylindrical body 12 at intervals.

[0219] The film-like heating element manufacturing device 215 can implement continuous processing or step-by-step processing. The continuous processing is to continuously perform heating using the heating unit 228, sputter etching using the sputter etching electrode 230, and film formation using the first layer film-forming sputtering electrode 231 and the second layer film-forming sputtering electrode 232, while the step-by-step processing is to separately perform heating using the heating unit 228, sputter etching using the sputter etching electrode 230, and film formation using the first layer film-forming sputtering electrode 231 and the second layer film-forming sputtering electrode 232. In the case of continuous processing, heating, sputter etching and film formation are continuously performed until the film formation of a long film-like base 57 is completed. In the case of step-by-step processing, for example, the time for heating, sputter etching and film formation can be independently set by turning the power on / off (ON / OFF) or adjusting the input power. In addition, the time for film formation can also be set by opening and closing the baffle that shields the target material.

[0220] The film heating element manufacturing apparatus 215 is not limited to manufacturing the film heating element 213 having the structure of the multilayer film 58 formed on the base 57. The film heating element manufacturing apparatus can also manufacture a film heating element having the structure of the multilayer film 134 or the multilayer film 144 formed on the base 57.

[0221] A film heating element manufacturing apparatus for manufacturing a film heating element having a structure in which a multilayer film 134 is formed on a base 57 includes, in addition to a first-layer film-forming sputtering electrode 231 and a second-layer film-forming sputtering electrode 232, a third-layer film-forming sputtering electrode for forming a third layer 135 on the base 57. The third-layer film-forming sputtering electrode includes a target material of a hydrogen storage metal or a hydrogen storage alloy for forming the third layer 135. The third-layer film-forming sputtering electrode can control the thickness of the third layer 135 by adjusting the magnitude of the DC power and the transport speed of the base 57, similarly to the first-layer film-forming sputtering electrode 231 or the second-layer film-forming sputtering electrode 232.

[0222] A film heating element manufacturing apparatus for manufacturing a film heating element having a structure in which a multilayer film 144 is formed on a base 57 includes, in addition to a first layer film-forming sputtering electrode 231, a second layer film-forming sputtering electrode 232, and a third layer film-forming sputtering electrode, a fourth layer film-forming sputtering electrode for forming a fourth layer 145 on the base 57. The fourth layer film-forming sputtering electrode includes a target material of a hydrogen storage metal or a hydrogen storage alloy for forming the fourth layer 145. The fourth layer film-forming sputtering electrode can control the thickness of the fourth layer 145 by adjusting the magnitude of the DC power and the transport speed of the base 57, similarly to the first layer film-forming sputtering electrode 231 or the second layer film-forming sputtering electrode 232.

[0223] Figure 26 The film-like heating element 243 shown has, in addition to the base 57 and the multilayer film 58, a passivation film 244, which is arranged on the surface of the multilayer film 58 to protect the surface of the multilayer film 58. The passivation film 244 is made of a material that allows hydrogen to pass through, such as SiO2, SiN, etc. The passivation film 244 can be formed by, for example, a CVD (Chemical Vapor Deposition) method. By providing the film-like heating element 243 with the passivation film 244, damage to the multilayer film 58 can be suppressed. The passivation film 244 can also be arranged on the surface of the multilayer film 134 or the multilayer film 144.

[0224] [Explanation of symbols]

[0225] 10, 70, 80, 90, 100, 120: Heating device

[0226] 11: Sealed container

[0227] 12: Cylinder

[0228] 13, 133, 143: heating element

[0229] 14: Flow path

[0230] 15: Fluid circulation unit

[0231] 16: Control Department

[0232] 26: Hollow part

[0233] 30: Circulation pipeline

[0234] 32,92: Cooling section

[0235] 33: Heating unit

[0236] 45: External fluid lines

[0237] 55, 55a~55c: heating module

[0238] 57: Base

[0239] 58, 134, 144: Multilayer films

[0240] 59: Level 1

[0241] 60: Layer 2

[0242] 61, 136, 146: Interface of heterogeneous substances

[0243] 71, 104: Steam turbine (fluid utilization device)

[0244] 79, 89, 119, 129: Heat utilization system

[0245] 101: Heat recovery pipeline

[0246] 135: Layer 3

[0247] 145: 4th floor

[0248] 150: Heating element manufacturing device

[0249] 213, 243: Membrane heating element

[0250] 215: Film heating element manufacturing device.

Claims

1. A heating device comprising: Hollow, airtight containers; a cylindrical body, disposed in a hollow portion formed by the inner surface of the sealed container; a heating element provided on the outer surface of the cylindrical body and generating heat by absorbing and releasing hydrogen contained in the hydrogen-based gas supplied to the hollow portion; a flow path formed by the inner surface of the cylinder, for the flow of a fluid for heat exchange with the heating element; a fluid circulation unit having a circulation line connected to the flow path to circulate the fluid between the inside and outside of the cylinder; a cooling unit, provided in the circulation line, for cooling the fluid; a heating unit, disposed in the circulation line, for heating the fluid; and a control unit for performing temperature reduction control and temperature increase control, wherein the temperature reduction control is to drive the cooling unit to reduce the temperature of the heating element by the cooled fluid, and the temperature increase control is to drive the heating unit to increase the temperature of the heating element by the heated fluid; and The heating element comprises: a base formed of a hydrogen storage metal, a hydrogen storage alloy or a proton conductor, and a multilayer film provided on the base; The multilayer film includes a first layer formed of a hydrogen storage metal or a hydrogen storage alloy and having a thickness of less than 1000 nm, and a second layer formed of a hydrogen storage metal, hydrogen storage alloy or ceramic different from the first layer and having a thickness of less than 1000 nm.

2. The heating device according to claim 1, comprising: a plurality of cylinders, including the cylinder, Each of the plurality of cylinders has a heating element. In the hollow portion, the plurality of cylinders are arranged at equal intervals from one another in a staggered manner. 3 . The heat generating device according to claim 1 , wherein the plurality of heat generating elements are arranged on the outer surface of the cylindrical body at intervals from each other. 4 . The heat generating device according to claim 1 , wherein the fluid circulation portion further comprises an external fluid pipeline, the external fluid pipeline being provided on an outer surface of the sealed container and connected to the circulation pipeline to allow a portion of the fluid to circulate.

5. The heat generating device according to claim 4, wherein the sealed container comprises: a main body formed in a cylindrical shape; a fluid inflow chamber provided at one end of the main body; and a fluid outflow chamber provided at the other end of the main body. The fluid inflow chamber has a fluid inlet as an inlet of the fluid, The fluid outflow chamber has a fluid outlet serving as an outlet for the fluid, The circulation line connects the fluid inlet and the fluid outlet outside the closed container. The external fluid pipeline comprises: a first pipe provided on the outer surface of the closed container; a first ring pipe connecting one ends of the first pipe; and a second ring pipe connecting the other ends of the first pipe. a second pipe connecting the first annular pipe and the fluid inflow chamber; and a third pipe connecting the second annular pipe and the fluid outflow chamber.

6. The heat generating device according to claim 1, wherein the first layer is formed of any one of Ni, Pd, Cu, Mn, Cr, Fe, Mg, Co, and alloys thereof. The second layer is formed of any one of Ni, Pd, Cu, Mn, Cr, Fe, Mg, Co, alloys thereof, and SiC.

7. The heating device according to claim 6, wherein the multilayer film has, in addition to the first layer and the second layer, a third layer, which is formed of a hydrogen storage metal, hydrogen storage alloy or ceramic different from the first layer and the second layer and has a thickness of less than 1000 nm.

8. The heat generating device according to claim 7, wherein the third layer is formed of any one of CaO, Y2O3, TiC, LaB6, SrO, and BaO.

9. The heating device according to claim 8, wherein the multilayer film has, in addition to the first layer, the second layer and the third layer, a fourth layer, which is formed of a hydrogen storage metal, hydrogen storage alloy or ceramic different from the first layer, the second layer and the third layer and has a thickness of less than 1000 nm.

10. The heat generating device according to claim 9, wherein the fourth layer is formed of any one of Ni, Pd, Cu, Cr, Fe, Mg, Co, alloys thereof, SiC, CaO, Y2O3, TiC, LaB6, SrO, and BaO.

11. The heat generating device according to any one of claims 1 to 10, wherein the base and the multilayer film are film-shaped, and The heating element is wound around the outer surface of the cylinder.

12. A heat utilization system comprising: The heating device according to any one of claims 1 to 11; and The fluid utilizing device utilizes the fluid heated by the heating element.

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