A fast mirror system based on eddy current sensor transmissive applications

Abstract

The application relates to a fast mirror system based on a transmissive application of an eddy current sensor, which comprises a detector seat, a working mirror body, a mirror seat, a flexible hinge, a voice coil motor, an inner ring seat, an outer ring seat, a rotating ring, an eddy current sensor and a controller; the working mirror body is fixedly connected with the mirror seat; the mirror seat is fixedly connected with the inner ring seat through the flexible hinge; the inner ring seat is fixedly connected with the outer ring seat through the flexible hinge; the outer ring seat is fixedly connected with the rotating ring; the rotating ring is fixedly connected with the inner ring seat and the outer ring seat through the flexible hinge; the outer ring seat is fixedly connected with the detector seat; four eddy current sensors are assembled in the detector seat to collect angle information when the mirror seat rotates; the application has the characteristics of high bandwidth and high precision, can realize the ability of reflecting and transmitting light paths of the working mirror body, provides more possibilities and operability for application environments of a light path stabilization system, and provides a good selection scheme in the directions of light path stabilization and system light path design.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of fast steering mirror, more particularly, a fast steering mirror system based on eddy current sensor transmissive application. BACKGROUND

[0002] Fast steering mirror is an important component working between light source or receiver and target for adjusting and stabilizing optical system visual axis or light beam pointing, which has the advantages of small volume, compact structure, high precision, high bandwidth, etc., and has been widely used in space laser communication, astronomical telescope, optical stabilization, visual axis stabilization, precision acquisition, aiming and tracking, deep space exploration, high-precision laser processing equipment and laser system carrying, etc.

[0003] Since the fast steering mirror system is mainly used in the optical path, in the optical detection field, it is often necessary to set a half-reflective and half-transmissive optical mirror in the optical path system to reflect and transmit the collection of different optical signal or other signal collection. The use of fast steering mirror system in the mirror to stabilize the optical path is a problem to be solved. This design can save the design space of the large system and make the optical path design more operable.

[0004] The traditional fast steering mirror system uses an optical path sensor to collect position information, but the optical path sensor itself needs to be sensitive to the position change information of the external working mirror, which is often arranged behind the working mirror, affecting the transmission function of the working mirror.

[0005] Similarly, the traditional four-around arranged shaft assembly is heavy, has large friction and large volume, which has a great influence on the response bandwidth of the fast steering mirror. It is impossible to arrange a fast steering mirror system with high response frequency, small volume and easy maintenance in such a compact large system optical path design environment.

[0006] In summary, how to realize a small volume, high bandwidth and transmissive fast steering mirror system has become a necessary research direction. SUMMARY

[0007] The technical problem to be solved by the application is to provide a small volume, large angle rotation, high bandwidth and transmissive fast steering mirror rotation mechanism, which can realize the rotation of the azimuth and pitch axes.

[0008] To achieve the above purpose, the application provides the following technical scheme:

[0009] A fast steering mirror system based on eddy current sensor transmissive application, comprising a detector seat 1.1, a working mirror 1.10, a mirror seat 1.7, a rotating ring 1.9 and an eddy current sensor 1.3.

[0010] The working mirror body 1.10 is assembled on the mirror seat 1.7;

[0011] The detector seat 1.1 is fixedly connected with the eddy current sensor 1.3;

[0012] The working mirror body 1.10 performs azimuth rotation motion around the X axis, and the rotating ring 1.9 performs pitch rotation motion around the Y axis together with the mirror seat 1.7.

[0013] Further, the fast mirror system based on the transmissive application of the eddy current sensor further comprises a flexible hinge 1.5, a voice coil motor 1.8, an inner ring seat 1.6, and an outer ring seat 1.4.

[0014] The flexible hinge 1.5, the inner ring seat 1.6, and the outer ring seat 1.4 constitute a rotation shaft system and are distributed in the overall four directions to serve as a two-dimensional rotation shaft system of the entire fast mirror system.

[0015] The mirror seat 1.7 is fixedly assembled with the rotor of the voice coil motor 1.8.

[0016] The mirror seat 1.7 is fixed with the inner ring seat 1.6, and the inner ring seat 1.6 is fixed at the rotor end of the flexible hinge 1.5 to ensure that the mirror seat 1.7 realizes the rotation function.

[0017] The outer ring seat 1.4 is fixed with the stator end of the flexible hinge 1.5.

[0018] The rotating ring 1.9 is fixed at two symmetrical ends of the outer ring seat 1.4 and is fixed at the other two ends in the direction perpendicular to the two ends to the inner ring seat 1.6.

[0019] Further, the detector seat 1.1 is provided with a flange, and the flange surface has high flatness to ensure the parallelism of the working mirror body 1.10 and the flange surface at the zero locking position.

[0020] The zero locking position is the zero locking position after power-on.

[0021] Further, the working mirror body is assembled in the mirror seat by gluing to ensure that the main mirror surface parameters and the mirror seat do not separate and move.

[0022] After the mirror seat 1.7 is fixed with the inner ring seat 1.6, the mirror seat 1.7 is assembled on the rotor of the flexible hinge 1.5 to realize the rotation motion in the inner azimuth direction.

[0023] The mirror seat 1.7 is provided with a high-flatness sensing surface on the back surface for detecting position information of the eddy current sensor.

[0024] Further, the flexible hinge 1.5 is internally provided with a cross-shaped spring.

[0025] Further, the voice coil motor 1.8 rotor is fixedly assembled with the mirror seat 1.7, and the voice coil motor 1.8 stator is fixedly assembled with the detector seat 1.1, and the voice coil motor 1.8 is a linear reciprocating motor.

[0026] The voice coil motor 1.8 is provided with two groups and is arranged on the back of the mirror seat 1.7.

[0027] Further, the inner ring seat 1.6 is fixed with the rotor of the flexible hinge 1.5, the end face of the inner ring seat 1.6 is limited by a baffle, the side face of the inner ring seat 1.6 is fixed in a clamping manner, and the flange face of the inner ring seat 1.6 is provided with a fixing hole.

[0028] The outer ring seat 1.4 is fixed with the stator of the flexible hinge 1.5, the end face of the outer ring seat 1.4 is limited by a baffle, the side face of the outer ring seat 1.4 is fixed in a clamping manner, and the flange face of the outer ring seat 1.4 is provided with a fixing hole and a process hole.

[0029] Further, the outer ring seat 1.4 is fixedly assembled with the detector seat 1.1.

[0030] Further, the rotating ring 1.9 is provided with flanges around, one pair of flange faces are fixed with the outer ring seat 1.4, and the other pair of flange faces in the orthogonal direction are fixed with the inner ring seat 1.6.

[0031] Further, the eddy current sensor 1.3 is fixed on the detector seat 1.1, the eddy current sensor 1.3 is provided with four, is arranged around the detector seat 1.1, the arrangement position needs to be calculated according to the actual application stroke, and the span is increased as much as possible under the condition of meeting the stroke, so that the sensing resolution is improved.

[0032] Further, the quick mirror system based on the transmissive application of the eddy current sensor further comprises a controller.

[0033] The controller is used for power supply and control of the whole quick mirror system, and the quick mirror system realizes the functions of rotation angle, swing scanning and positioning through closed-loop circuit control.

[0034] The transmissive quick mirror system disclosed by the application mainly comprises a detector seat, a working mirror body, a mirror seat, a flexible hinge, a voice coil motor, an inner ring seat, an outer ring seat, a rotating ring, an eddy current sensor and a controller.

[0035] The detector seat is mainly applied to fixing an external optical system environment and fixing an eddy current sensor and a voice coil motor stator internally, the mounting flange face has high flatness, and the parallelism of the mirror surface and the flange face in the zero locking position needs to be ensured.

[0036] The working mirror body is assembled in the mirror seat and needs to be ensured to be separated from the mirror seat through a gluing process and to have no separation and movement phenomenon.

[0037] The mirror seat is used for fixing the working mirror body, and is also an inner rotating ring, which is fixed on the rotor of the flexible hinge after being fixed with the inner ring seat, realizes the rotary motion in the inner azimuth direction, and is provided with a high flatness inductive surface on the back surface, which is used for detecting the position information of the eddy current sensor.

[0038] The flexible hinge is used for forming the rotary shaft system together with the inner ring seat and the outer ring seat, the inside of the flexible hinge is a cross spring, and the flexible hinge has the advantages of large angle, no friction and small volume.

[0039] The voice coil motor is fixedly arranged with the mirror seat and the detector seat, is a linear reciprocating motor, two groups of the motor are arranged on the back surface of the mirror seat, and are used for driving the mirror holder to rotate in the azimuth direction and the pitching direction, and the mirror seat can only rotate in the rotary direction due to the limiting effect of the flexible hinge when the motor rotor is pushed and pulled, and the two-dimensional rotation ability is realized.

[0040] The inner ring seat and the outer ring seat are fixed with the rotor of the flexible hinge, the end surface is provided with a baffle for limiting, the side surface is fixed in the clamping mode, and the flange surface is provided with a fixed through hole; the outer ring seat is fixed with the stator of the flexible hinge, the end surface is provided with a baffle for limiting, the side surface is fixed in the clamping mode, and the flange surface is provided with a fixed through hole and a process hole, so that the whole can be conveniently disassembled.

[0041] The rotating ring is provided with a mounting flange around, one pair of surfaces are fixed with the outer ring seat of the mirror seat shaft system, and the other pair of surfaces are fixed with the inner ring seat of the outer pitching shaft system, and the design concept needs to consider the modal frequency, the stiffness attribute and the lightweight design.

[0042] The eddy current sensor is fixed on the detector seat and is arranged around the detector, the arrangement position needs to be calculated according to the actual application stroke, the span is increased as much as possible under the condition of meeting the stroke, so that the inductive resolution is improved.

[0043] The controller is used for power supply and control of the whole fast reflecting mirror system, realizes the functions of rotation angle, swing scanning and positioning through closed loop circuit control.

[0044] Compared with the prior art, the present application has the beneficial effects that:

[0045] The application is a fast mirror system based on an eddy current sensor, which can be used in a light path transmission mode. The transmission function of the working mirror of the fast mirror is increased in a low bandwidth sacrifice mode, and the stability of various light paths is realized. In the light path design, more possibilities are provided, and the design space of the large optical system is saved. The flexible hinge used in the application provides good support effect in the radial and axial directions, has the characteristics of no friction and high coaxiality in the rotation direction, and has small volume, which is beneficial to the overall design of the fast mirror system, can reduce the overall volume of the fast mirror and improve the control bandwidth. BRIEF DESCRIPTION OF DRAWINGS

[0046] In order to clearly illustrate the examples of the application, the system designed in the application is described in the form of drawings below, the fast mirror system involved in the application is described, and the structure composition and design consideration are specifically introduced. The following description is only a case of a design process, and the concept involved in the application can derive many kinds of similar design results.

[0047] Figure 1 is a two-dimensional sectional view of the structure of the fast mirror system based on the eddy current sensor transmissive application described in the application;

[0048] Figure 2 is a three-dimensional perspective view of the structure of the fast mirror system based on the eddy current sensor transmissive application described in the application;

[0049] Figure 3 is a distribution schematic diagram of the eddy current sensor;

[0050] Figure 4 is a flexible hinge structure form schematic diagram;

[0051] Figure 5 is a flexible hinge, inner ring seat, outer ring seat assembly schematic diagram;

[0052] In the figure:

[0053] 1.1 detector seat, 1.2 rear cover; 1.3 eddy current sensor, 1.4 outer ring seat, 1.5 flexible hinge, 1.6 inner ring seat, 1.7 mirror seat, 1.8 voice coil motor, 1.9 rotating ring, 1.10 working mirror body;

[0054] 1.3.1 limit A;

[0055] 4.1 azimuth axis rotation sensor, 4.2 pitch axis rotation sensor;

[0056] 4.2.1 limit B;

[0057] 5.1 fastening screw A, 5.2 fastening screw B;

[0058] 6.1 bearing support column, 6.2 cross spring flexible piece. DETAILED DESCRIPTION

[0059] The embodiment of the application discloses a kind of fast mirror systems, this fast mirror system uses flexible hinge as the axis of rotary motion, uses voice coil motor as driving component, eddy current sensor as angle information acquisition unit, realizes the two-dimensional rotation function of fast mirror.It has the characteristics of small size, high bandwidth, high precision, etc., the outstanding, this type fast mirror system can realize the ability of light path reflection, transmission, stable light path simultaneously.

[0060] The embodiments of the application will be described below with reference to the drawings, to make detailed and clear introduction to the actual design of the application.Obviously, the described embodiments can only illustrate the design concept of the application from a part, and cannot cover all embodiments. Based on the embodiments in the application, all other embodiments obtained by those skilled in the art without creative design belong to the scope of protection of the application.

[0061] The application relates to a fast mirror system based on eddy current sensor transmissive application. Based on flexible hinge, and according to the layout arranged in four directions, the angle information acquisition of voice coil motor driving and eddy current sensor is used to realize the special application of the fast mirror. The fast mirror comprises a detector seat, a working mirror body, a mirror seat, a flexible hinge, a voice coil motor, an inner ring seat, an outer ring seat, a rotating ring, an eddy current sensor and a controller.

[0062] The detector seat is fixedly connected with the eddy current sensor and comprises a fixed flange for external assembly, which is used for cooperation and installation with a photoelectric system in an actual application scene.

[0063] The working mirror body can realize reflection and transmission functions, and is assembled in the mirror seat.

[0064] The mirror seat is fixedly assembled with the voice coil motor rotor.

[0065] The mirror seat is fixed with the inner ring seat, and the inner ring seat is fixed at the rotor end of the flexible hinge, so as to ensure that the mirror seat realizes the rotation function.

[0066] The stator end of the flexible hinge is fixed with the outer ring seat, and the outer ring seat is fixedly assembled with the rotating ring.

[0067] The rotating ring is fixed at two symmetrical ends of the outer ring seat, and the other two ends in the direction perpendicular to the two ends are fixed with the inner ring seat, and the inner ring is used to fix the rotor end of the flexible hinge.

[0068] The stator end of the flexible hinge is fixed with the outer ring seat, and the outer ring seat is fixedly assembled with the detector seat.

[0069] The rotary shaft system composed of the flexible hinge, the inner ring seat and the outer ring seat is distributed in the whole circumferential direction and is used as the two-dimensional rotary shaft system of the whole fast mirror system, and the arrangement in this way can avoid the middle space and facilitate the fast mirror to realize the function of transmitting light path.

[0070] The eddy current sensor is distributed in the circumferential direction of the detector seat and is arranged orthogonally, the travel of the fast mirror and the sensitive travel of the eddy current sensor are calculated, and the resolution of the eddy current sensor is calculated to reasonably arrange the position of the eddy current sensor.

[0071] The rotating ring is used as the stator of one axis and the rotor of another axis in the equipment and needs to have the characteristics of high strength and high modal response frequency, but since it is used as the rotor of the outer ring rotation, the mass is too large to seriously affect the response bandwidth of the equipment, so the lightweight design is made on the rotating ring to realize the characteristics of high strength and low inertia.

[0072] The inner ring seat and the outer ring seat are used to fix the flexible hinge in the way of clamping, and the both ends are provided with fixed baffles to limit the flexible hinge, and the process holes are arranged on the outer ring seat to realize the function of separately disassembling the shaft system assembly after the assembly of the inner ring seat, the outer ring seat and the flexible hinge, and facilitate the assembly and the later maintenance.

[0073] The mirror seat is used to fix the working mirror body and has the functions of the inner ring rotor and the sensor measurement surface, and since it is indirectly fixed with the rotor end of the flexible hinge, the stress deformation of the mirror seat caused by the different expansion coefficients of other parts can be avoided, and the change of the mirror surface shape is avoided.

[0074] The mirror seat is used to fix the working mirror body and has the functions of the inner ring rotor and the sensor measurement surface, and since it is directly fixed with the mirror, the position information of the real working mirror body can be sensed by the eddy current sensor, the excessive error is avoided, and the control accuracy of the whole system is provided.

[0075] The fast mirror system is externally provided with a controller to supply power to the voice coil motor of the fast mirror system, collect the position signal of the eddy current sensor, perform closed-loop control and realize the function requirements of the fast mirror system.

[0076] Referring to Figures 1 to 5 As shown in the figure, the main parts of the present application include the detector seat 1.1, the rear cover 1.2, the eddy current sensor 1.3, the outer ring seat 1.4, the flexible hinge 1.5, the inner ring seat 1.6, the mirror seat 1.7, the voice coil motor 1.8, the rotating ring 1.9 and the working mirror body 1.10.

[0077] As Figure 1 and Figure 5 shown, the flexible hinge 1.5 is respectively inserted into the inner part of the outer ring seat 1.4 and the inner ring seat 1.6 and is attached to the limiting end face; asFigure 5 , fastening screw A at 5.1, fastening screw B at 5.2, using fastening screws to hold the flexible hinge 1.5, completing the assembly of the rotating shaft system components, the same operation steps, ready for four shaft system components for system assembly.

[0078] Referring to Figure 1 , four eddy current sensors 1.3 are assembled on the detector seat 1.1, and the fixed position is calculated and designed according to specific use requirements, to ensure that the span is as large as possible under the condition of meeting the stroke requirement, so as to improve the resolution of the sensor;

[0079] Referring to Figure 3 , 4.2 is a pair of pitch axis rotation sensors, and 4.1 is a pair of azimuth axis rotation sensors. When the mirror seat 1.7 rotates around the X axis, the azimuth axis rotation sensor 4.1 senses the height difference on both sides, and determines the azimuth rotation angle through calculation and calibration data. Similarly, when the mirror seat 1.7 rotates around the Y axis, the pitch axis rotation sensor 4.2 senses the height difference on both sides, and determines the pitch rotation angle through calculation and calibration data.

[0080] In particular, Figure 1 and Figure 3 respectively marked limit B 4.2.1 and limit A 1.3.1, the embodiment of the present application provides two kinds of limiting design methods to protect the sensing probe of the eddy current sensor 1.3, to avoid the phenomenon of sensor bumping and damage in the state of power-off transportation or power-on out-of-control.

[0081] As shown in Figure 1 , the eddy current sensor 1.3, the rear cover 1.2 and the voice coil motor 1.8 are assembled on the detector seat 1.1, and the working mirror body 1.10 is fixed on the mirror seat 1.7 by gluing or pressing, and the four axes described above are arranged around the rotating ring 1.9, and the mirror seat 1.7 and the rotating ring 1.9 are fixed on the detector seat 1.1.

[0082] Referring to Figure 2 , the working mirror body 1.10 rotates around the X axis along the X1 direction, and the rotating ring 1.9 rotates around the Y axis along the Y1 direction together with the mirror seat 1.7, thereby realizing the two-dimensional rotation motion capability of the present application.

[0083] Referring to Figure 3The detector seat 1.1 and the mirror seat 1.7 are hollow designs, which are used to avoid the light path of the working mirror body 1.10; in particular, when the fast mirror system of the embodiment needs to perform the pitching and rotating motion, the rotating inertia is relatively large, the rotating ring 1.9 is reasonably designed, the overall stiffness and the overall modal response frequency are ensured, and sufficient lightweight design is made, so that the rotating inertia in the rotating motion is reduced, and the realization of the high bandwidth performance of the whole system is ensured.

[0084] As shown in Figure 4 The embodiment of the present application designs a flexible hinge, wherein the middle part is a cross spring flexible piece 6.2, and the outside is a bearing support column 6.1. The bearing support column 6.1 is designed at the upper and lower ends, and is fixed at the two ends of the cross spring flexible piece 6.2. When the upper half is fixed, the lower half can rotate around the Z axis with the cross spring flexible piece 6.2, and the rotation direction is opposite to that of Z1. When designing, the position of the cross spring flexible piece 6.2 needs to be reasonably arranged, and the width and thickness thereof need to be reasonably designed. Through simulation analysis, the cross spring flexible piece 6.2 is suitable for various application environments of the fast mirror system, the bearing support column 6.1 has sufficient stiffness, and the reaction force of the cross spring flexible piece 6.2 does not affect the output of the voice coil motor 1.8. The flexible hinge has the characteristics of good bearing capacity and no friction in rotation. Through fatigue analysis, the rotation life is approximately infinite within a certain angle range. In the design of the fast mirror system, the newly designed rotating support part has high reliability and can be designed in a small space.

[0085] Obviously, the above-mentioned embodiments are only examples for clearly illustrating the present application, and are not a limitation on the embodiments.

[0086] For those skilled in the art, other different forms of changes or variations can be made on the basis of the above description. Here, all the embodiments are not enumerated, and the obvious changes or variations derived therefrom are still within the protection scope of the present application.

[0087] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto. Any modification, equivalent replacement and improvement made by those skilled in the art within the technical range disclosed by the present application, which is within the spirit and principle of the present application, should be covered within the protection scope of the present application. Meanwhile, the contents not described in detail in the specification are all the existing technology known by those skilled in the art.

Claims

1. A fast mirror system based on eddy current sensor transmissive application, characterized in that: it comprises a detector seat (1.1), a working mirror body (1.10), a mirror seat (1.7), a rotating ring (1.9), and an eddy current sensor (1.3); the working mirror body (1.10) is assembled on the mirror seat (1.7); the detector seat (1.1) is fixedly connected with the eddy current sensor (1.3); the working mirror body (1.10) performs azimuth rotation around the X-axis, and the rotating ring (1.9) performs pitching rotation around the Y-axis together with the mirror seat (1.7); it further comprises a flexible hinge (1.5), a voice coil motor (1.8), an inner ring seat (1.6), and an outer ring seat (1.4); the flexible hinge (1.5), the inner ring seat (1.6), and the outer ring seat (1.4) constitute a rotation shaft system and are distributed in the four directions of the whole, serving as a two-dimensional rotation shaft system of the whole fast mirror system; the mirror seat (1.7) is fixedly assembled with the rotor of the voice coil motor (1.8); the mirror seat (1.7) is fixed with the inner ring seat (1.6), which is fixed at the rotor end of the flexible hinge (1.5), so as to ensure that the mirror seat (1.7) realizes the rotation function; the outer ring seat (1.4) is fixed with the stator end of the flexible hinge (1.5); the rotating ring (1.9) is fixed with the outer ring seat (1.4) at the two symmetrical ends, and is fixed with the inner ring seat (1.6) at the other two ends which are orthogonal to the two ends; the working mirror body is assembled in the mirror seat by adhesive, so as to ensure that the main mirror surface parameters and the mirror seat do not separate and move; after the mirror seat (1.7) and the inner ring seat (1.6) are fixed, they are assembled on the rotor of the flexible hinge (1.5), so as to realize the rotation movement in the inner azimuth direction; the back of the mirror seat (1.7) is provided with a high flatness sensing surface for detecting the position information of the eddy current sensor; the flexible hinge (1.5) is internally provided with cross-shaped springs; the detector seat (1.1) is provided with a flange, and the flange surface has high enough flatness, so as to ensure that the working mirror body (1.10) and the flange surface are parallel at the zero position; the inner ring seat (1.6) is fixed with the rotor of the flexible hinge (1.5), the end surface of the inner ring seat (1.6) is provided with a baffle for limiting, the side surface of the inner ring seat (1.6) is fixed in a clamping manner, and the flange surface of the inner ring seat (1.6) is provided with a fixing hole; the outer ring seat (1.4) is fixed with the stator of the flexible hinge (1.5), the end surface of the outer ring seat (1.4) is provided with a baffle for limiting, the side surface of the outer ring seat (1.4) is fixed in a clamping manner, and the flange surface of the outer ring seat (1.4) is provided with a fixing hole and a process hole. 2.The fast mirror system based on eddy current sensor transmissive application according to claim 1, characterized in that: the rotor of the voice coil motor (1.8) is fixedly assembled with the mirror seat (1.7), the stator of the voice coil motor (1.8) is fixedly assembled with the detector seat (1.1), and the voice coil motor (1.8) is a linear reciprocating motor; two groups of the voice coil motor (1.8) are arranged on the back of the mirror seat (1.7). ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ 3. The fast mirror system based on eddy current sensor transmissive application according to claim 1, characterized in that: The outer ring seat (1.4) is fixedly assembled with the detector seat (1.1).

4. The fast mirror system based on eddy current sensor transmissive application according to claim 3, characterized in that: The rotating ring (1.9) is installed with flanges around, a pair of flange faces are fixed with the outer ring seat (1.4), and the other pair of flange faces in the orthogonal direction are fixed with the inner ring seat (1.6).

5. The fast mirror system based on eddy current sensor transmissive application according to any one of claims 1 to 4, characterized in that: The eddy current sensor (1.3) is fixed on the detector seat (1.1), four of the eddy current sensors (1.3) are arranged around the detector seat (1.1), the arrangement position is calculated according to the actual application stroke, and the span is increased as much as possible under the condition of meeting the stroke, so as to improve the sensing resolution.

6. A fast mirror system based on eddy current sensor transparent application according to claim 1, characterized in that, Further comprising a controller; The controller is used for power supply and control of the whole fast mirror system, and the fast mirror system realizes the functions of rotation angle, swing scanning and positioning through closed loop circuit control.

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