A preparation system and production method for determining the growth interface shape during crystal growth
By introducing infrared thermal imager and driving components detection mechanisms into the crystal growth preparation system, the problem of confirming the shape of the single crystal rod growth interface is solved, and comprehensive and accurate confirmation of the growth interface is achieved.
Patent Information
- Application Number
- CN202210382635.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2022-04-13
- Publication Date
- 2025-05-02
- Estimated Expiration
- 2042-04-13
AI Technical Summary
During the crystal growth process, the growth interface of the single crystal rod is easily affected by the pulling speed and the convection of the melt. The shape and size of the growth interface cannot be fully confirmed by observing the meniscus alone.
A preparation system including an upper furnace barrel and a furnace cover is designed, with a built-in detection mechanism. The detection mechanism consists of an embedded groove, a solid ring, a heat insulation plate, an infrared thermal imager and a clamping assembly. The thermal imaging is carried out through an infrared thermal imager, and combined with the driving component and the connecting unit to achieve a comprehensive confirmation of the growth interface.
Through the combination of thermal imaging technology of infrared thermal imagers and the driving components, the growth interface shape of the single crystal rod can be accurately determined, solving the problem of the growth interface being affected by the pulling speed and melt convection, and improving the accuracy of the confirmation of the interface shape.
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Figure CN114858286B_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of single crystal production, and in particular to a preparation system and a production method for determining the shape of a growth interface in a crystal growth process. Background Art
[0002] A single crystal is a crystal in which the particles are arranged regularly and periodically in three-dimensional space, or in other words, the whole crystal is composed of the same spatial lattice in three-dimensional direction, and the arrangement of particles in the space of the whole crystal is long-range orderly. The whole lattice of a single crystal is continuous and has important industrial applications; due to the entropy effect, the solid microstructure is not ideal, such as impurities, non-uniform strain and crystal defects. Ideal single crystals of a certain size are extremely rare in nature and difficult to produce in the laboratory.
[0003] When polycrystals are grown by the Czochralski method inside a growth furnace, the size of the meniscus is observed through an observation window to confirm the growth interface of the single crystal rod. However, during the growth process of the single crystal rod, the growth interface is easily affected by the pulling speed and the convection of the melt. The shape and size of the growth interface cannot be ultimately determined by observing the meniscus alone. Therefore, the above problem needs to be solved. Summary of the invention
[0004] In view of the shortcomings of the prior art, the present invention provides a preparation system and production method for determining the shape of the growth interface during the crystal growth process, which solves the problem that the single crystal growth interface is affected by the pulling speed and the convection of the melt during the crystal growth process, and the final growth interface shape cannot be fully confirmed by only observing the meniscus.
[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: a preparation system for determining the shape of the growth interface during the crystal growth process, comprising an upper furnace drum and a furnace cover, the interior of the upper furnace drum is connected to the interior of the furnace cover, and a detection mechanism is arranged inside the upper furnace drum.
[0006] The detection mechanism includes an embedded groove and a fixed ring, the embedded groove is provided on the inner wall of the upper furnace drum, the inner surface of the embedded groove is fixedly connected to the outer surface of the fixed ring, the inner wall of the fixed ring is provided with a movable groove, a heat insulation board is provided inside the movable groove, the heat insulation board is connected to the fixed ring through a clamping assembly, the heat insulation board rotates inside the movable groove through a driving assembly, a heat insulation sleeve is provided on the outer surface of the heat insulation board, an infrared thermal imager is movably connected to the inner wall of the heat insulation sleeve, a baffle is clamped on the inner wall of the heat insulation sleeve, the outer surface of the infrared thermal imager is movably connected to the outer surface of the baffle, and the outer surface of the baffle is fixedly connected to the inside of the heat insulation board through penetration;
[0007] The clamping assembly includes symmetrically arranged clamping plates and ball grooves, the outer surfaces of the two clamping plates are fixedly connected to the inner surface of the movable groove, the bottom of the upper clamping plate is provided with an upper clamping groove, and the top of the lower clamping plate is provided with a lower clamping groove, the inner surface of the heat insulation plate is rotatably connected to the inner surface of the upper clamping groove, and the outer surface of the heat insulation plate is rotatably connected to the inner surface of the lower clamping groove, the ball grooves are respectively provided at the top and bottom of the heat insulation plate, and the inner surface of the ball grooves is movably connected with balls, the outer surface of the upper balls is movably connected to the inner surface of the upper clamping groove, and the outer surface of the lower balls is movably connected to the inner surface of the lower clamping groove.
[0008] Preferably, the driving assembly includes a driving motor and an annular rack, the annular rack is arranged outside the insulation board, the outer surface of the annular rack is rotatably connected to the inner surface of the movable groove, and the annular rack is respectively connected to the insulation sleeve and the insulation board through a connecting unit.
[0009] Preferably, a cushion block is fixedly connected to the bottom of the driving motor, and the bottom of the cushion block is fixedly connected to the bottom of the inner wall of the movable groove.
[0010] Preferably, the output end of the driving motor is fixedly connected with a driving gear, and the outer surface of the driving gear is meshed with the outer surface of the annular rack.
[0011] Preferably, the connecting unit includes symmetrically arranged half racks and limiting grooves, one side of the outer surfaces of the two half racks fit each other, the outer surfaces of the two half racks are movably connected to the outer surface of the insulation board, and the limiting grooves are opened on the outer surface of the insulation sleeve.
[0012] Preferably, a connecting groove is provided on the outer surface of the half rack on the right side, and the inner surface of the connecting groove is movably connected to the outer surface of the heat insulation sleeve.
[0013] Preferably, a limiting strip is fixedly connected to the inner surface of the connecting groove, and the outer surface of the limiting strip is snap-fitted to the inner surface of the limiting groove.
[0014] Preferably, outer surfaces of the two half racks are fixedly connected with connecting plates, and the two connecting plates are fitted to each other by clamping with bolts and nuts.
[0015] The present invention also discloses a production method for determining the shape of a growth interface during a crystal growth process, which specifically comprises the following steps:
[0016] S1. Equipment installation: first, an embedded groove is opened at the connection between the upper furnace drum and the furnace cover, and then the driving motor is fixedly connected to the inner wall of the movable groove on the fixed ring through a gasket, and then the two half racks are sleeved on the outer surfaces of the insulation board and the insulation sleeve, and through the connection between the connecting groove and the insulation sleeve, the connection between the limit groove and the limit bar, and the clamping action of the connecting plate through bolts and nuts, so as to firmly sleeve it on the outer surface of the insulation board and form an annular rack, and then the insulation board is connected to the two clamping plates through the connection with the upper clamping groove and the lower clamping groove, and the two clamping plates are connected to the fixed ring through the inner wall of the movable groove, so that the annular rack is inside the movable groove and meshes with the driving gear on the output end of the driving motor, and then the fixed ring is connected to the embedded groove to complete the installation;
[0017] S2. Interface detection: After the equipment is installed, when the vertical pulling furnace uses the vertical pulling method to grow single crystals, first observe the meniscus of the single crystal rod during the growth process through the observation window on the furnace cover to obtain the growth interface size. Then, when the single crystal rod continues to grow and enter the upper furnace tube, the heat radiation of the single crystal rod is sensed by the infrared thermal imager through the baffle, and thermal radiation imaging is performed. The outer diameter of the single crystal rod is determined through the thermal radiation imaging diagram, thereby determining the growth interface of the single crystal rod;
[0018] S3. Comprehensive confirmation: After the growth interface of the single crystal rod is determined by a single thermal imaging, the driving motor is energized to drive the driving gear to rotate, and the teeth of the driving gear and the annular rack are meshed, so that the heat insulation plate drives the infrared thermal imager to rotate through the heat insulation sleeve, and the outer diameter of the single crystal rod is comprehensively thermally imaged, thereby comprehensively confirming the growth interface.
[0019] Preferably, the infrared thermal imager and the drive motor mentioned in S1-S3 are both electrically connected to an external control circuit.
[0020] Beneficial Effects
[0021] The present invention provides a preparation system and production method for determining the growth interface shape during crystal growth. Compared with the prior art, it has the following beneficial effects:
[0022] (1) The preparation system and production method for determining the growth interface shape during the crystal growth process, the detection mechanism includes an embedded groove and a solid ring, the embedded groove is opened on the inner wall of the upper furnace drum, the inner surface of the embedded groove is fixedly connected to the outer surface of the solid ring, the inner wall of the solid ring is opened with a movable groove, the inside of the movable groove is provided with a heat insulation board, the heat insulation board is connected to the solid ring through a clamping component, the heat insulation board rotates inside the movable groove through a driving component, the outer surface of the heat insulation board is provided with a heat insulation sleeve, the inner wall of the heat insulation sleeve is movably connected with an infrared thermal imager, the inner wall of the heat insulation sleeve is clamped with a baffle, and the infrared The outer surface of the external thermal imager is movably connected to the outer surface of the baffle, and the outer surface of the baffle is fixedly connected to the inside of the heat insulation board through penetration; the clamping assembly includes symmetrically arranged clamping plates and ball grooves, the outer surfaces of the two clamping plates are fixedly connected to the inner surface of the movable groove, the bottom of the upper clamping plate is provided with an upper clamping groove, the top of the lower clamping plate is provided with a lower clamping groove, the inner surface of the heat insulation board is rotatably connected to the inner surface of the upper clamping groove, the outer surface of the heat insulation board is rotatably connected to the inner surface of the lower clamping groove, the ball grooves are respectively provided at the top and bottom of the heat insulation board, and the inner surface of the ball groove is movably connected to the inner surface of the upper clamping groove. The movable connection is provided with a ball, the outer surface of the upper ball is movably connected to the inner surface of the upper clamping groove, and the outer surface of the lower ball is movably connected to the inner surface of the lower clamping groove. By setting a detection mechanism, firstly, by setting multiple infrared thermal imagers, the detection range is made the same as the inner diameter of the upper furnace drum, so as to facilitate the confirmation of the growth interface of single crystal rods of different sizes. Secondly, during the growth process of the single crystal rod, when the formed single crystal rod enters the upper furnace drum, the infrared thermal imager forms a thermal image through the thermal radiation of the single crystal rod, and the growth interface of the single crystal rod can be finally confirmed by the size of the thermal image. shape, and the combination of the fixing ring, the heat insulation plate and the heat insulation sleeve can protect the infrared thermal imager components, so that the infrared thermal imager senses thermal radiation through the baffle, thereby avoiding the infrared thermal imager from being damaged by high temperature, and the upper and lower clamping plates not only clamp and limit the heat insulation plate, but also reduce the wear of the heat insulation plate when rotating by arranging balls to extend the service life. The combination of the above structures solves the problem that the single crystal growth interface is affected by the pulling speed and the convection of the melt during the crystal growth process, and the final growth interface shape cannot be fully confirmed by observing the meniscus alone.
[0023] (2) The preparation system and production method for determining the growth interface shape during the crystal growth process, the driving component includes a driving motor and an annular rack, the annular rack is arranged outside the heat insulation board, the outer surface of the annular rack is rotatably connected to the inner surface of the movable groove, the annular rack is respectively connected to the heat insulation sleeve and the heat insulation board through a connecting unit, the bottom of the driving motor is fixedly connected to a pad, the bottom of the pad is fixedly connected to the bottom of the inner wall of the movable groove, the output end of the driving motor is fixedly connected to a driving gear, the outer surface of the driving gear is meshed with the outer surface of the annular rack, by setting the driving component, when the infrared heat After the imager forms a thermal image through the thermal radiation of the single crystal rod to finally confirm the growth interface, the drive motor is energized to drive the drive gear to rotate, and the teeth of the drive gear and the annular rack are engaged, so that the annular rack drives the infrared thermal imager to move through the insulation plate and the insulation sleeve, thereby detecting the surroundings of the single crystal rod to obtain multiple sets of data to enhance the scientific nature of the final confirmation of the growth interface. The combination of the above structures solves the problem that the single crystal growth interface is affected by the pulling speed and the convection of the melt during the crystal growth process, and the final growth interface shape cannot be fully confirmed by observing the meniscus alone.
[0024] (3) The preparation system and production method for determining the growth interface shape during the crystal growth process, the connection unit includes symmetrically arranged half racks and limiting grooves, one side of the outer surfaces of the two half racks fits each other, the outer surfaces of the two half racks are movably connected to the outer surface of the insulation board, the limiting groove is opened on the outer surface of the insulation sleeve, the outer surface of the right half rack is opened with a connecting groove, the inner surface of the connecting groove is movably connected to the outer surface of the insulation sleeve, the inner surface of the connecting groove is fixedly connected to the limiting strip, the outer surface of the limiting strip is snap-fitted with the inner surface of the limiting groove, the outer surfaces of the two half racks The two surfaces are fixedly connected with a connecting plate, and the two connecting plates are fitted together by clamping bolts and nuts. By setting a connecting unit, firstly, the two half racks can be tightly fitted on the outside of the insulation board through the clamping action of the connecting plate, bolts and nuts, thereby forming a whole with the insulation board. At the same time, the connection between the connecting groove and the insulation sleeve as well as the limit groove and the limit strip not only facilitates the connection between the half racks and the insulation sleeve, thereby facilitating the movement of the insulation sleeve, but also limits the half racks to a certain extent, thereby enhancing the stability of the half racks, and is easy to disassemble for later maintenance and replacement. BRIEF DESCRIPTION OF THE DRAWINGS
[0025] Figure 1 This is a split diagram of the internal structure of the present invention;
[0026] Figure 2 This is a disassembled diagram of the internal structure of the solid ring of the present invention;
[0027] Figure 3 For the present invention Figure 2 A partial enlarged view of the middle A;
[0028] Figure 4 For the present invention Figure 2 A partial enlarged view of point B in the middle;
[0029] Figure 5 The external structure stereogram of the half rack of the present invention;
[0030] Figure 6 This is a disassembled diagram of the external structure of the clamping plate of the present invention;
[0031] Figure 7 This is a disassembled diagram of the external structure of the heat insulation board of the present invention;
[0032] Figure 8 It is a three-dimensional diagram of the external structure of the heat insulation sleeve of the present invention;
[0033] Fig. 9 This is a disassembled diagram of the internal structure of the heat insulation sleeve of the present invention;
[0034] Fig.10 The figure is a flow chart of the method of the present invention.
[0035] In the figure: 1-upper furnace drum, 2-furnace cover, 3-detection mechanism, 31-embedded groove, 32-fixed ring, 33-movable groove, 34-heat insulation board, 35-clamping assembly, 351-clamping plate, 352-ball groove, 353-upper clamping groove, 354-lower clamping groove, 355-ball, 36-driving assembly, 361-driving motor, 362-annular rack, 363-connecting unit, 3631-half rack, 3632-limiting groove, 3633-connecting groove, 3634-limiting strip, 3635-connecting plate, 3636-bolt, 3637-nut, 364-pad, 365-driving gear, 37-heat insulation sleeve, 38-infrared thermal imager, 39-baffle. DETAILED DESCRIPTION
[0036] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0037] See also Figure 1-10The present invention provides a technical solution: a preparation system for determining the shape of the growth interface during the crystal growth process, comprising an upper furnace drum 1 and a furnace cover 2, the interior of the upper furnace drum 1 is connected to the interior of the furnace cover 2, and a detection mechanism 3 is arranged inside the upper furnace drum 1; the detection mechanism 3 comprises an embedded groove 31 and a solid ring 32, the solid ring 32 is made of a material that is resistant to high temperature and has good heat insulation, the embedded groove 31 is arranged on the inner wall of the upper furnace drum 1, the inner surface of the embedded groove 31 is fixedly connected to the outer surface of the solid ring 32, the inner wall of the solid ring 32 is provided with a movable groove 33, and a heat insulation board 34 is arranged inside the movable groove 33, the heat insulation board 34 is made of a material that is resistant to high temperature and has good heat insulation, and the heat insulation board 34 is The clamping assembly 35 is connected to the fixed ring 32, and the heat insulation plate 34 rotates inside the movable groove 33 through the driving assembly 36. The outer surface of the heat insulation plate 34 is provided with a heat insulation sleeve 37, and the inner wall of the heat insulation sleeve 37 is movably connected with an infrared thermal imager 38. A plurality of infrared thermal imagers 38 are provided so that the sensing range is the same as the inner diameter length of the upper furnace drum 1. The inner wall of the heat insulation sleeve 37 is clamped with a baffle 39, which facilitates the infrared thermal imager 38 to sense thermal radiation and the hot air flow inside the upper furnace drum 1 into the movable groove 33. The outer surface of the infrared thermal imager 38 is movably connected to the outer surface of the baffle 39, and the outer surface of the baffle 39 is fixedly connected to the inside of the heat insulation plate 34 through.The clamping assembly 35 includes a symmetrically arranged clamping plate 351 and a ball groove 352. The clamping plate 351 is made of a material that is resistant to high temperature and has good heat insulation. The outer surfaces of the two clamping plates 351 are fixedly connected to the inner surface of the movable groove 33. An upper clamping groove 353 is provided at the bottom of the upper clamping plate 351, and a lower clamping groove 354 is provided at the top of the lower clamping plate 351. The inner surface of the insulation plate 34 is rotatably connected to the inner surface of the upper clamping groove 353, and the outer surface of the insulation plate 34 is rotatably connected to the inner surface of the lower clamping groove 354. The ball grooves 352 are respectively provided at the top and bottom of the insulation plate 34, and the inner surface of the ball groove 352 is movably connected with a ball 355, which can reduce the movement of the insulation plate 34 The wear during movement is reduced, and the depth of the ball groove 352 is greater than or equal to the radius length of the ball 355 to enhance the stability of the ball 355. The outer surface of the upper ball 355 is movably connected to the inner surface of the upper clamping groove 353, and the outer surface of the lower ball 355 is movably connected to the inner surface of the lower clamping groove 354. The driving component 36 includes a driving motor 361 and an annular rack 362. The driving motor 361 is made of a servo motor and has high temperature resistance and explosion-proof performance. The annular rack 362 is arranged on the outside of the insulation board 34, and the outer surface of the annular rack 362 is rotatably connected to the inner surface of the movable groove 33. The annular rack 362 is connected to the insulation sleeve 37 and the insulation board 34 through the connecting unit 363. The bottom of the driving motor 361 is fixedly connected with a cushion block 364, and the cushion block 364 is made of a material that is resistant to high temperatures and has poor heat transfer properties. The bottom of the cushion block 364 is fixedly connected to the bottom of the inner wall of the movable groove 33, and the output end of the driving motor 361 is fixedly connected with a driving gear 365. The outer surface of the driving gear 365 is meshed with the outer surface of the annular rack 362. The connecting unit 363 includes symmetrically arranged half racks 3631 and limiting grooves 3632. One side of the outer surfaces of the two half racks 3631 fits each other. The outer surfaces of the two half racks 3631 are movably connected to the outer surface of the insulation board 34. The limiting grooves 3632 are provided on the outer surface of the insulation sleeve 37. The outer surface of the right half rack 3631 is meshed with the outer surface of the annular rack 362. A connection groove 3633 is provided on the surface, the inner surface of the connection groove 3633 is movably connected to the outer surface of the heat insulation sleeve 37, the inner size of the connection groove 3633 is matched with the outer size of the heat insulation sleeve 37, the inner surface of the connection groove 3633 is fixedly connected to a limit strip 3634, the outer surface of the limit strip 3634 is snap-fitted with the inner surface of the limit slot 3632, the outer size of the limit strip 3634 is matched with the inner size of the limit slot 3632, the outer surfaces of the two half racks 3631 are fixedly connected to a connection plate 3635, the two connection plates 3635 are clamped together by bolts 3636 and nuts 3637, and the bolts 3636 penetrate and movably connect with the inside of the connection plate 3635. ;
[0038] The present invention also discloses a production method for determining the shape of a growth interface during a crystal growth process, which specifically comprises the following steps:
[0039] S1. Equipment installation: First, an embedded groove 31 is opened at the connection between the upper furnace drum 1 and the furnace cover 2, and then the driving motor 361 is fixedly connected to the inner wall of the movable groove 33 on the fixed ring 32 through the pad 364, and then the two half racks 3631 are sleeved on the outer surfaces of the insulation board 34 and the insulation sleeve 37, and through the connection between the connecting groove 3633 and the insulation sleeve 37, the connection between the limit groove 3632 and the limit bar 3634, and the clamping effect of the connecting plate 3635 through the bolt 3636 and the nut 3637, Thus, the annular rack 362 is firmly sleeved on the outer surface of the heat insulation plate 34 and formed, and then the heat insulation plate 34 is connected to the two clamping plates 351 through the connection with the upper clamping groove 353 and the lower clamping groove 354, and the two clamping plates 351 are connected to the fixed ring 32 through the inner wall of the movable groove 33, and the annular rack 362 is placed inside the movable groove 33 and meshed with the driving gear 365 on the output end of the driving motor 361, and then the fixed ring 32 is connected to the embedded groove 31 to complete the installation;
[0040] S2, interface detection: After the equipment is installed, when the vertical pulling furnace uses the vertical pulling method to grow single crystals, first observe the meniscus of the single crystal rod during the growth process through the observation window on the furnace cover 2 to obtain the growth interface size. Then, when the single crystal rod continues to grow and enters the upper furnace tube 1, the heat radiation of the single crystal rod is sensed by the infrared thermal imager 38 through the baffle 39, and thermal radiation imaging is performed. The outer diameter size of the single crystal rod is determined through the thermal radiation imaging diagram, thereby determining the growth interface of the single crystal rod;
[0041] S3. Comprehensive confirmation: After the growth interface of the single crystal rod is determined by a single thermal imaging, the driving motor 361 is energized to drive the driving gear to rotate, and the teeth of the driving gear 365 and the annular rack 362 are meshed, so that the heat insulation plate 34 drives the infrared thermal imager 38 to rotate through the heat insulation sleeve 37, and the outer diameter of the single crystal rod is comprehensively thermally imaged, so as to comprehensively confirm the growth interface.
[0042] In the present invention, the infrared thermal imager 38 and the driving motor 361 mentioned in S1-S3 are both electrically connected to the external control circuit.
[0043] Meanwhile, the contents not described in detail in this specification belong to the prior art known to those skilled in the art.
[0044] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.
[0045] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A preparation system for determining the shape of a growth interface during a crystal growth process, comprising an upper furnace drum (1) and a furnace cover (2), wherein the interior of the upper furnace drum (1) is connected to the interior of the furnace cover (2), and characterized in that: A detection mechanism (3) is provided inside the upper furnace drum (1); The detection mechanism (3) comprises an embedded groove (31) and a fixed ring (32); the embedded groove (31) is provided on the inner wall of the upper furnace drum (1); the inner surface of the embedded groove (31) is fixedly connected to the outer surface of the fixed ring (32); the inner wall of the fixed ring (32) is provided with a movable groove (33); a heat insulation board (34) is provided inside the movable groove (33); the heat insulation board (34) is connected to the fixed ring (32) via a clamping assembly (35); the heat insulation board (34) is connected to the fixed ring (32) via a clamping assembly (35); 4) the driving assembly (36) is rotated inside the movable groove (33), the outer surface of the heat insulation board (34) is provided with a heat insulation sleeve (37), the inner wall of the heat insulation sleeve (37) is movably connected to the infrared thermal imager (38), the inner wall of the heat insulation sleeve (37) is clamped with a baffle (39), the outer surface of the infrared thermal imager (38) is movably connected to the outer surface of the baffle (39), and the outer surface of the baffle (39) is fixedly connected to the inside of the heat insulation board (34); The clamping assembly (35) comprises symmetrically arranged clamping plates (351) and ball grooves (352); the outer surfaces of the two clamping plates (351) are fixedly connected to the inner surface of the movable groove (33); the bottom of the upper clamping plate (351) is provided with an upper clamping groove (353); the top of the lower clamping plate (351) is provided with a lower clamping groove (354); the inner surface of the heat insulation plate (34) is rotatably connected to the inner surface of the upper clamping groove (353); the outer surface of the heat insulation plate (34) is rotatably connected to the inner surface of the lower clamping groove (354); the ball grooves (352) are respectively provided at the top and bottom of the heat insulation plate (34); the inner surface of the ball grooves (352) is movably connected to balls (355); the outer surface of the upper balls (355) is movably connected to the inner surface of the upper clamping groove (353); and the outer surface of the lower balls (355) is movably connected to the inner surface of the lower clamping groove (354).
2. A preparation system for determining the shape of a growth interface during crystal growth according to claim 1, characterized in that: The driving assembly (36) comprises a driving motor (361) and an annular rack (362); the annular rack (362) is arranged outside the heat insulation plate (34); the outer surface of the annular rack (362) is rotatably connected to the inner surface of the movable groove (33); the annular rack (362) is respectively connected to the heat insulation sleeve (37) and the heat insulation plate (34) through a connecting unit (363).
3. A preparation system for determining the shape of a growth interface during crystal growth according to claim 2, characterized in that: A cushion block (364) is fixedly connected to the bottom of the driving motor (361), and the bottom of the cushion block (364) is fixedly connected to the bottom of the inner wall of the movable groove (33).
4. A preparation system for determining the shape of a growth interface during crystal growth according to claim 2, characterized in that: The output end of the driving motor (361) is fixedly connected to a driving gear (365), and the outer surface of the driving gear (365) is meshed with the outer surface of the annular rack (362).
5. A preparation system for determining the shape of a growth interface during crystal growth according to claim 2, characterized in that: The connection unit (363) comprises symmetrically arranged half racks (3631) and limiting grooves (3632), one side of the outer surfaces of the two half racks (3631) are in contact with each other, the outer surfaces of the two half racks (3631) are movably connected to the outer surface of the insulation board (34), and the limiting grooves (3632) are provided on the outer surface of the insulation sleeve (37).
6. A preparation system for determining the shape of a growth interface during crystal growth according to claim 5, characterized in that: A connecting groove (3633) is provided on the outer surface of the half rack (3631) on the right side, and the inner surface of the connecting groove (3633) is movably connected to the outer surface of the heat insulation sleeve (37).
7. A preparation system for determining the shape of a growth interface during crystal growth according to claim 6, characterized in that: The inner surface of the connection groove (3633) is fixedly connected to the limiting strip (3634), and the outer surface of the limiting strip (3634) is snap-fitted to the inner surface of the limiting groove (3632).
8. A preparation system for determining the shape of a growth interface during crystal growth according to claim 5, characterized in that: The outer surfaces of the two half racks (3631) are both fixedly connected with connecting plates (3635), and the two connecting plates (3635) are clamped together by bolts (3636) and nuts (3637).
9. A production method for determining the shape of the growth interface during crystal growth, comprising the following steps: S1. Equipment installation: First, an embedded groove (31) is formed at the connection between the upper furnace drum (1) and the furnace cover (2), and then the drive motor (361) is fixedly connected to the inner wall of the movable groove (33) on the fixed ring (32) through the pad (364), and then the two half racks (3631) are sleeved on the outer surfaces of the insulation plate (34) and the insulation sleeve (37), and the connection groove (3633) is connected to the insulation sleeve (37), the limit groove (3632) is connected to the limit bar (3634), and the connection plate (3635) is clamped by the bolts (3636) and the nuts (3637). The heat insulating plate (34) is used to firmly sleeve on the outer surface of the heat insulating plate (34) and form an annular rack (362), and then the heat insulating plate (34) is connected to the two clamping plates (351) through the connection with the upper clamping groove (353) and the lower clamping groove (354), and the two clamping plates (351) are connected to the fixed ring (32) through the inner wall of the movable groove (33), and the annular rack (362) is located inside the movable groove (33) and meshed with the driving gear (365) on the output end of the driving motor (361), and then the fixed ring (32) is connected to the embedded groove (31) to complete the installation; S2, interface detection: After the equipment is installed, when the vertical pulling furnace uses the vertical pulling method to grow single crystals, the meniscus of the single crystal rod during the growth process is first observed through the observation window on the furnace cover (2) to obtain the size of the growth interface. Then, when the single crystal rod continues to grow and enters the upper furnace tube (1), the heat radiation of the single crystal rod is sensed by the infrared thermal imager (38) through the baffle (39), and thermal radiation imaging is performed. The outer diameter size of the single crystal rod is determined through the thermal radiation imaging image, thereby determining the growth interface of the single crystal rod; S3. Comprehensive confirmation: After the growth interface of the single crystal rod is determined by a single thermal imaging, the driving motor (361) is energized to drive the driving gear to rotate, and the teeth of the driving gear (365) and the annular rack (362) are meshed, so that the heat insulation plate (34) drives the infrared thermal imager (38) to rotate through the heat insulation sleeve (37), and the outer diameter of the single crystal rod is comprehensively thermally imaged, thereby comprehensively confirming the growth interface.
10. A production method for determining the shape of the growth interface during crystal growth according to claim 9, characterized in that: The infrared thermal imager (38) and the drive motor (361) mentioned in S1-S3 are both electrically connected to the external control circuit.
Citation Information
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