System and method for automated material handling management

Abstract

An automated material handling system (AMHS) interface management system is configured to facilitate the exchange of wafer batch information between different AMHS systems. The AMHS interface management system receives wafer batch information from a first AMHS system in a first format and transforms the wafer batch information into a format associated with a second AMHS system. The AMHS interface management system uses a handshake area between the first AMHS system and the second AMHS system. The handshake area includes one or more transport vehicles that facilitate the movement of wafer batches between the first AMHS system and the second AMHS system.

Description

Technical Field

[0001] The embodiment of the present invention relates to an interface management system for an automated material handling system and a method for using the same. Background Art

[0002] The following content relates to automated material handling systems, manufacturing execution systems, and cross-system fabrication. The manufacture of semiconductor devices involves a series of process steps that are often performed in a certain order using various high-tech production and measurement machines within a certain period of time. In a wafer manufacturing facility or "fab", the main function of the wafer logistics system is to deliver the wafer to each of the machines at the right time and to track the location and status of the wafer throughout the process. Automated material handling systems (automated material handling systems, "AMHS") and / or manufacturing execution systems (manufacturing execution systems, "MES") are applied to wafer fabrication plants to perform automated functions more efficiently, consistently, and safely than can be performed manually. Manufacturing processes often require cross-floor and cross-phase transport within a single fab and / or cross-fab transport between fabs. This includes using different AMHS within the same fab or using various AMHS across different fabs. Summary of the invention

[0003] An automated material handling system interface management system according to an embodiment of the present invention includes a handshake control system, a first automated material handling system, and a second automated material handling system. The handshake control system includes a processor that communicates with a memory; the first automated material handling system communicates with the handshake control system; and the second automated material handling system communicates with the handshake control system. The memory stores instructions that are executed by the processor to enable the processor to: receive wafer batch information from the first automated material handling system in a first format associated with the first automated material handling system, and transform the wafer batch information from the first format associated with the first automated material handling system into a second format associated with the second automated material handling system.

[0004] A method for interface management of an automated material handling system according to an embodiment of the present invention comprises: receiving wafer batch information of a wafer batch in a first automated material handling system at a handshake control system, wherein the wafer batch information is in a first format associated with the first automated material handling system; transforming the wafer batch information from the first format into a second format associated with a second automated material handling system; and transmitting the transformed wafer batch information to the control system of the second automated material handling system via an associated network.

[0005] An automated material handling system interface management system according to an embodiment of the present invention comprises a first automated material handling control system, a second automated material handling control system, a handshake control system, and at least one handshake transport vehicle of a suspended conveyor located in the handshake area. The first automated material handling control system controls the first automated material handling system area and communicates with an associated network; the second automated material handling control system controls the second automated material handling system area and communicates with the associated network, wherein the first automated material handling control system and the second automated material handling control system are different. The handshake control system controls the handshake area between the first automated material handling system area and the second automated material handling system area to facilitate the transfer of wafer batches between the first automated material handling system area and the second automated material handling system area, and the handshake control system communicates with the first automated material handling control system and the second automated material handling control system through the associated network. The at least one hand-grip transport vehicle is configured to transport the wafer batch between a first transfer area adjacent to the first automated material handling system area and a second transfer area adjacent to the second automated material handling system area, wherein the hand-grip control system also includes a processor that communicates with a memory storing instructions, the instructions being executed by the processor so that the processor: receives production scheduling data indicating that a wafer batch needs to be transferred between the first automated material handling system area and the second automated material handling system area, identifies a hand-grip transport vehicle for transferring the wafer batch based on the performance of the at least one hand-grip transport vehicle, and receives wafer batch information from the first automated material handling control system in a first format associated with the first automated material handling control system. The method comprises the steps of: receiving the wafer batch information from the first transfer area and the second transfer area, converting the wafer batch information from the first format associated with the first automated material handling control system into the second format associated with the second automated material handling control system, receiving sensor data from at least one sensor located in each of the following: the first transfer area and the second transfer area, and the entrance and exit of the corresponding automated material handling control system carts entering and exiting the first transfer area and the second transfer area, retrieving the wafer batch from the first transfer area by the identified hand-grip cart based on the received sensor data, transmitting the converted wafer batch information to the second automated material handling control system, and transmitting the wafer batch from the first transfer area to the second transfer area by the identified hand-grip cart. BRIEF DESCRIPTION OF THE DRAWINGS

[0006] The various aspects of the present disclosure will be best understood by reading the following detailed description in conjunction with the accompanying drawings. It should be noted that, in accordance with standard practice in the industry, various features are not drawn to scale. In fact, the size of various features may be arbitrarily increased or reduced for clarity of discussion.

[0007] Figure 1 is a schematic diagram illustrating at least a portion of a manufacturing facility according to one embodiment of the present application, wherein the manufacturing facility includes a plurality of different AMHS systems and an AMHS interface management system.

[0008] Figure 2 It is a block diagram of a handshake control system of an AMHS interface management system according to an embodiment of the present application.

[0009] Figure 3 is a representative image of wafer batch information of different AMHS / MES systems according to one embodiment of the present application.

[0010] Figure 4 FIG. 4 is a flowchart illustrating a method for AMHS interface management according to an embodiment of the present application.

[0011] Figure 5 FIG. 4 is a flowchart illustrating a method for AMHS interface management according to an embodiment of the present application. DETAILED DESCRIPTION

[0012] The following disclosure provides many different embodiments or examples for implementing the different features of the provided subject matter. Specific examples of components and arrangements are set forth below to simplify the present disclosure. Of course, these are merely examples and are not intended to be limiting. For example, in the following description, forming a first feature on or on a second feature may include an embodiment in which the first feature and the second feature are formed to be in direct contact, and may also include an embodiment in which an additional feature may be formed between the first feature and the second feature so that the first feature and the second feature may not be in direct contact. In addition, the present disclosure may reuse reference numbers and / or letters in various examples. This repetition is for simplicity and clarity, and does not itself represent the relationship between the various embodiments and / or configurations discussed.

[0013] Additionally, for ease of description, spatially relative terms such as "beneath," "below," "lower," "above," and "upper" may be used herein to describe the relationship of one element or feature illustrated in a figure to another (other) element or feature. The spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The device may have other orientations (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may be interpreted accordingly.

[0014] Semiconductor foundry can include multiple manufacturing plants. During the manufacturing process, for different steps of the manufacturing process, wafer batches can be transmitted between the multiple manufacturing plants. "Cross-plant transmission" involves the transmission of wafer batches (e.g., wafer carriers, wafer carrier groups, etc.) from one manufacturing plant to another. It should be noted that different manufacturing plants may occupy different physical spaces (e.g., different buildings or different floors or suites in the same building) and / or may constitute self-contained sub-manufacturing production lines (sub-processing lines) and differ. In general, different manufacturing plants may reside in the same building or in different buildings. "Transfer across AMHS" involves the transmission of wafer batches from one AMHS to another AMHS, regardless of whether the AMHS is a different system in a single manufacturing plant or a system in different manufacturing plants. Each manufacturing plant may include multiple work stages and / or multiple floors. In this regard, in some embodiments, the manufacturing plant may be referred to as a "gigafab". "Transfer across work stages" involves the transmission of wafer batches from one work stage to another.

[0015] Each work stage of the manufacturing plant includes a plurality of bays, which may include process tools or equipment. The equipment in each bay may be interconnected by an intrabay overhead transport ("OHT") system. The bays may be interconnected with other bays by an interbay OHT system. As is well known to those skilled in the relevant art, the intrabay OHT system and the interbay OHT system include an overhead track, on which the OHT transporter often transports wafer carriers containing wafer batches of wafers to be processed to and from the equipment in the bay through a buffer store (stocker). In addition to or in place of the OHT system, each manufacturing plant may include an intrabay overhead shuttle ("OHS") system and / or an interbay OHS system. Each manufacturing plant may also include a cross-layer transport system. The cross-layer transport system may include an elevator and / or other mechanisms for implementing cross-layer transfer of wafer carriers.

[0016] When the wafer carrier containing the wafer is to be transmitted, the manufacturing execution system ("MES") determines that the wafer carrier should be transmitted to the destination in the manufacturing plant. However, typical MES systems are limited to a single manufacturing plant and cannot handle cross-plant transmission requests and / or cross-AMHS transmission requests. The MES system of a manufacturing plant often cannot communicate with the MES system of the AMHS of different manufacturing plants. In this regard, different manufacturing plants may have different AMHS suppliers and communication protocols, such as different MES systems with different data formats / structures, etc. In other cases, different AMHS suppliers may use the same MES system but the versions of the MES system are different, so that different data formats / structures may exist between the MES systems of the same type. When wafer batches require process support from different manufacturing plants (that is, under the control of different AMHS and / or MES), wafer batch information handshake may have problems due to not supporting the exchange of wafer batch information between different vendor-based systems.

[0017] Now refer to Figure 1 , shows a schematic diagram illustrating at least a portion of a manufacturing facility according to an embodiment of the present application, wherein the manufacturing facility includes a plurality of different AMHS systems and an AMHS interface management system 100. Figure 1As shown in FIG. 1 , according to various embodiments disclosed herein, the AMHS interface management system 100 includes a handshake control system 106 configured to control operations within a handshake zone 120. The manufacturing facility also illustrates a first manufacturing plant / area A 114 operating according to an AMHS A control system 108 and a second manufacturing plant / area B 116 operating according to an AMHS B control system 110. It should be understood that the manufacturing plant / area A 114 and the manufacturing plant / area B 116 are shown for illustrative purposes and may correspond to individual manufacturing plants, multiple manufacturing plants, multiple floors of a manufacturing plant, or any similar thing that are operated using the AMHS A control system 108 or the AMHS B control system 110. In addition, it should be understood by those skilled in the art that the illustrated "manufacturing plant / area A" 114 and "manufacturing plant / area B" 116 may correspond to separate buildings or structures, wherein the handshake zone 120 is located between such buildings or structures. The AMHS interface management system 100 performs data communication with the AMHS A control system 108 and the AMHS B control system 110 via the communication network 104 .

[0018] It should be understood that the communication network 104 can be a distributed computing environment (e.g., a computer network), which represents any distributed communication system capable of enabling the exchange of data between two or more electronic devices. It should also be understood that such a computer network includes, but is not limited to, for example, a virtual local area network, a wide area network, a personal area network, a local area network, the Internet, an intranet, or any suitable combination thereof. Therefore, such a computer network includes a physical layer and a transport layer, as exemplified by various conventional data transport mechanisms (such as, for example, but not limited to, Token-Ring, Ethernet, or other wireless-based data communication mechanisms or wire-based data communication mechanisms). In addition, the AMHS interface management system 100 can communicate data with the handshake area 120 and the network through a suitable communication link, and the communication link may include, for example, any suitable data communication (such as wireless communication (such as Bluetooth, WiMax, 802.11a, 802.11b, 802.11g, 802.11(x), proprietary communication network, infrared, optical, public switched telephone network or any suitable wireless data transmission system) or wired communication) channel.

[0019] Figure 1A first manufacturing plant / area A 114 is depicted under the operation of an AMHS A control system 108 according to various embodiments of the present application. As understood in the art, the first manufacturing plant / area A 114 uses a first AMHS system (denoted as AMHS A) in conjunction with a first MES system 150. That is, the AMHS A manufacturing plant / area A 114 and the devices and components described below are controlled by the AMHS A control system 108 implementing the aforementioned AMHS system and MES system 150.

[0020] like Figure 1 As shown in , the manufacturing plant / area A 114 is divided into three different components or areas, designated as area A1 118A, area A2 118B, and area A3 118C. Each of these areas A1 118A, area A2 118B, and area A3 118C may represent a different manufacturing plant, production line, work stage, work station, process, etc. of the manufacturing facility that operates under the overall control of the AMHS A control system 108 and the associated MES system 150. Each area A1 118A, area A2 118B, and area A3 118C may include one or more process tools 130, such as process reaction chambers, buffer storage, and other equipment that can be operated according to the AMHS A control system 108. It should be understood by those skilled in the art that in Figure 1 A single process tool 130 is shown in each of the zones A1 118A, A2 118B, and A3 118C for exemplary purposes only, and a plurality of process tools 130 may be used in each of the zones A1 118A, A2 118B, and A3 118C. For exemplary purposes, a controller is shown for each of the zones A1 118A, A2 118B, and A3 118C. Figure 1 112A, A2 112B, and A3 112C. It should be understood that controller A1 112A, controller A2 112B, and controller A3 112C may be different devices that communicate with various devices in each corresponding zone A1 118A, zone A2 118B, and zone A3 118C, may be components of the AMHS A control system 108, or any suitable combination thereof. In some embodiments, each controller A1 112A, controller A2 112B, and controller A3 112C includes a processor that communicates with a memory and various interfacing components that are configured to command, control, and / or communicate with the process tools 130 located in each corresponding zone A1 118A, zone A2 118B, and zone A3 118C.

[0021] A vehicle (VHL) designated as VHL A1 122A in the zone A1 118A, VHL A2 122B in the zone A2 118B, and VHL A3 122C in the zone A3 118C is further illustrated in each zone A1 118A, zone A2 118B, and zone A3 118C. It should be understood that these vehicles VHL A1 122A, VHL A2 122B, and VHL A3 122C may represent a single vehicle or multiple vehicles in each zone A1 118A, zone A2 118B, and zone A3 118C, depending on the size and configuration of each of the VHL A1 122A, VHL A2 122B, and VHL A3 122C. Furthermore, it should be understood by those skilled in the art that the carts VHL A1 122A, VHL A2 122B, and VHL A3 122C may correspond to OHT carts configured to transport wafer carriers or wafer batches 134 between zones A1 118A, A2 118B, and A3 118C and / or between process tools 130 located within each zone A1 118A, A2 118B, and A3 118C.

[0022] For illustration purposes, Figure 1 Rather than illustrating multiple tracks that would be understood to exist within a fabrication facility, a single track 142 is illustrated extending through fabrication plant / area A 114. Track 142 is illustrated as extending across area A1 118A, area A2 118B, and area A3 118C, enabling carts VHL A1 122A, VHL A2 122B, and VHL A3 122C to transfer wafer lots 134 between process tools 130 and areas A1 118A, A2 118B, and A3 118C. In alternative embodiments, multiple tracks may be used within fabrication plant / area A 114 or within each individual area A1 118A, A2 118B, and A3 118C, depending on the various needs of fabrication. Figure 1 As shown in FIG. 1 , the track 142 extends out of the manufacturing plant / area A 114 under the control of the AMHS A control system 108 and at least a portion extends into the handing area 120. In some embodiments, the track 142 extends into the transfer area 136 of the handing area 120, such as Figure 1 According to such an embodiment, VHL A1 122A, VHL A2 122B, and VHL A3 122C may move along track 142 to carry (or pick up) wafer carriers (wafer lots 134) into or out of transfer area 136, as discussed in more detail below.

[0023] Figure 1The facilities illustrated in also include a second manufacturing plant / area operated according to a second AMHS system. For the purpose of explanation, the second manufacturing plant / area is represented as AMHS B manufacturing plant / area B 116 in the accompanying drawings. As understood in the art, the second manufacturing plant / area B 116 uses the second AMHS system (represented as AMHS B) in conjunction with the second MES system 152. That is, AMHS B manufacturing plant / area B 116 and the devices and components described below are controlled by the AMHS B control system 110 implementing the aforementioned AMHS B system and MES system 152. It should be understood by those skilled in the art that AMHS A manufacturing plant / area A114 and AMHS B manufacturing plant / area B 116 may correspond to a manufacturing plant / area provided or produced by different suppliers (i.e., equipment manufacturers, control system manufacturers, etc.). In addition, MES system 150 and MES system 152 may be different versions of the same MES system (e.g., version 1.0 of MES system 150 and version 1.2 of MES system 152) or completely different MES systems (e.g., MES system 150 produced by supplier A and MES system produced by supplier B).

[0024] like Figure 1 As shown in FIG, manufacturing plant / area B 116 is presented as a single area of ​​the manufacturing facility that operates according to the AMHS B control system 110. Therefore, manufacturing plant / area B 116 may include one or more process tools 130, such as process reaction chambers, buffer storage, and other equipment that can operate according to the AMHS B control system 110 and the associated MES system 152. Although in FIG. Figure 1 In the example, two process tools 130 are shown, but it should be understood that any number of process tools 130 may exist in the manufacturing plant / area B 116, and Figure 1 The representations depicted in are intended for exemplary purposes only. In contrast to the multiple zone fab / zone A 114, fab / zone B 116 uses the AMHS B control system 110 instead of separate controllers A1 112A, A2 112B, and A3 112C.

[0025] Fabrication plant / area B 116 further illustrates carts (VHL) designated as VHL B1 124A and VHL B2 124B. It should be understood that, depending on the size and configuration of carts VHL B1 124A and VHL B2 124B, these carts VHL B1 124A and VHL B2 124B may represent a single cart or a plurality of carts within fabrication plant / area B 116. Furthermore, it should be understood by those skilled in the art that carts VHL B1 124A and VHL B2 124B may correspond to OHT carts configured to transport wafer carriers or wafer lots 134 between process tools 130 located within fabrication plant / area B 116. As will be understood by those skilled in the art, an OHT system may employ a plurality of tracks and carts depending on the size, shape, and location of the fabrication plant / area. Thus, although in Figure 1 116, however, it will be appreciated by those skilled in the art that there may be multiple overhead tracks along which VHL B1 124A and VHL B2 124B traverse. Track 142 is illustrated as extending across the entirety of fabrication plant / area B 116, enabling VHL B1 124A and VHL B2 124B to transfer wafer lots 134 between process tools 130.

[0026] According to one embodiment, Figure 1 The track 144 illustrated in FIG. 1 extends out of the manufacturing plant / area B 116 under the control of the AMHS B control system 110 and at least a portion extends into the handing area 120. In some embodiments, the track 144 extends into the transfer area 138 of the handing area 120, such as Figure 1 According to such an embodiment, VHL B1 124A and VHL B2 124B may move along track 144 to carry (or pick up) wafer carriers (wafer lots 134) into or out of transfer area 138, as discussed in more detail below.

[0027] According to one embodiment of the present application, located between manufacturing plant / area A 114 and manufacturing plant / area B 116 is an AMHS interface management system 100. As described above, the AMHS interface management system 100 includes a portion of the manufacturing facility designated as a handshake area 120. The handshake area 120 may correspond to an open location between manufacturing plant / area A 114 and manufacturing plant / area B 116, a closed structure similar to a manufacturing plant, a separate building, etc. The handshake area 120 includes a transfer area 136 near manufacturing plant / area A 114 and a transfer area 138 near manufacturing plant / area B 116.

[0028] The AMHS interface management system 100 may also include one or more transport vehicles VHL C1 126A and VHL C2 126B that may be operated within the handshake area 120 and in accordance with the handshake control system 106. Figure 1 , the handshake zone 120 includes at least one track 146 extending into the transfer zone 136 and the transfer zone 138, so that the VHL C1 126A and / or VHL C2 126B transfers can move into and out of such transfer zones 136, 138. According to one embodiment, the transfer zones 136 and 138 can be implemented as part of the structure of the manufacturing plant / area A 114 and the manufacturing plant / area B 116, wherein the control of the devices in the transfer zone 136 or the transfer zone 138 can be retained by the AMHS A control system 108, the AMHS B control system 110. According to another embodiment, when a transport vehicle (VHL A1 122A, VHL A2 122B, VHL A3 122C or VHL B1 124A, VHL B2 124B) moves to the corresponding transfer area 136, transfer area 138, control of such transport vehicle VHL A1 122A, VHL A2 122B, VHL A3 122C or VHL B1 124A, VHL B2 124B may be transmitted to the handshake control system 106.

[0029] The transfer zones 136 and 138 may include one or more sensors 140 positioned to track the movement of the trucks VHL A1 122A, VHL A2 122B, VHL A3 122C, or VHL B1 124A, VHL B2 124B into and out of the transfer zones 136 and 138. In such an embodiment, the handshake control system 106 may receive data from the sensors 140 and use the data to perform various tracking, monitoring, and control functions, as discussed in more detail below.

[0030] Now go to Figure 2 , shows an exemplary block diagram of a suitable handshake control system 106 according to one embodiment of the present application.

[0031] The various components of the handshake control system 106 may be connected together via a data / control bus 208. The processor 202 of the handshake control system 106 communicates with an associated database 220 via a communication link 214. Suitable communication links 214 may include, for example, a public switched telephone network, a proprietary communication network, infrared, optical, or other suitable wired data communication or wireless data communication. The database 220 can be implemented on a component of the handshake control system 106, such as stored in a local memory 204 (i.e., stored on a hard drive, a virtual drive, etc.) or stored on a remote memory accessible to the handshake control system 106.

[0032] The associated database 220 represents any organized data set for one or more purposes (e.g., wafer batch information, traffic flow information, process tool information, transport vehicle status information, manufacturing information, material information, one or more lookup tables, transformation information, etc.). According to an exemplary embodiment, the database 220 stores a transformation algorithm for transforming between different AMHS formats used by different suppliers / manufacturers and a variety of algorithms for transforming between different MES systems, different versions of the same original MES system, etc. In other embodiments, the database 220 stores a database or a lookup table of commands, terms and instructions in a commercial / proprietary format, which can be searched by the handshake control system 106 to transform wafer batch information from one AMHS / MES to another AMHS / MES. It should be understood by those skilled in the art that during the operation of the AMHS interface management system (subject system) 100, such information can be updated by machine learning. The implementation of the associated database 220 can be performed on any mass storage device (e.g., a magnetic storage drive, a hard disk drive, an optical storage device, a flash memory device, or a suitable combination thereof). The associated database 220 may be implemented as a component of the handshake control system 106 (e.g., resident in the memory 204, etc.). In one embodiment, the associated database 220 may include data corresponding to production schedules, OHT information, transport vehicle information (e.g., speed, location, status, etc.), wafer lot information, priority information, AMHS / MES format conversion information, etc.

[0033] The handshake control system 106 may include one or more input / output (I / O) interface devices 224 and I / O interface devices 226 for communicating with external devices. The I / O interface device 226 may communicate with one or more of a display device 216 (for displaying information, such as an estimated destination) and a user input device 218 (such as a keyboard or a touch screen or a writable screen for entering text) and / or a cursor control device (such as a mouse, a trackball, etc., for transmitting user input information and command selections to the processor 202) via the communication link 212. The I / O interface device 224 can communicate with external devices (such as the AMHS A control system 108, the AMHS B control system 110, the transport vehicle (VHL A1 122A, VHL A2 122B, VHLA3 122C, VHL B1 124A, VHL B2 124B, VHL C1 126A, VHL C2 126B), and the sensor 140) through the communication network 104 or directly through any suitable wired communication channel or wireless communication channel.

[0034] It should be understood that Figure 2 The handshake control system 106 illustrated in the example can be implemented using a distributed computing environment (e.g., a computer network), which represents any distributed communication system capable of enabling the exchange of data between two or more electronic devices. It should also be understood that such a computer network includes, but is not limited to, for example, a virtual local area network, a wide area network, a personal area network, a local area network, the Internet, an intranet, or any suitable combination thereof. Therefore, such a computer network includes a physical layer and a transport layer, as illustrated by various conventional data transport mechanisms (such as, for example, but not limited to, a token ring network, Ethernet, or other wireless-based data communication mechanisms or wired-based data communication mechanisms). In addition, although in Figure 2 Although illustrated as a set of networked components in FIG. 1 , the handshake control system 106 can be implemented on a stand-alone device suitable for interacting with the AMHS interface management system 100 described herein.

[0035] The handshake control system 106 may include one or more of a computer server, a workstation, a personal computer, a cellular phone, a tablet computer, a pager, a combination thereof, or other computing devices capable of executing instructions for carrying out the exemplary methods.

[0036] According to an exemplary embodiment, the handshake control system 106 includes hardware, software, and / or any suitable combination thereof configured to interact with an associated user, networked device, networked storage, remote device, or the like.

[0037] The memory 204 may represent any type of non-transitory computer readable medium, such as a random access memory (RAM), a read only memory (ROM), a disk or tape, an optical disk, a flash memory, or a holographic memory. In one embodiment, the memory 204 includes a combination of a random access memory and a read only memory. In some embodiments, the processor 202 and the memory 204 may be combined in a single chip. The I / O interface device (network interface) 224 and the I / O interface device (network interface) 226 enable the computer to communicate with other devices through a computer network, and may include a modulator / demodulator (MODEM). The memory 204 may store data processed in the method and instructions for implementing the exemplary method.

[0038] The digital processor 202 can be implemented in various ways, such as by a single-core processor, a dual-core processor (or more generally by a multi-core processor), a digital processor and a cooperating math coprocessor, a digital controller, etc. In addition to controlling the operation of the handshake control system 106, the digital processor 202 also executes instructions 206 stored in the memory 204 for implementing the method stated below. It should be understood that the components of the handshake control system 106 can represent similar components present in the AMHS A control system 108, the controller A1 112A, the controller A2 112B, and the controller A3 112C and the AMHS B control system 110. In addition, it should be understood by those skilled in the art that, although illustrated as separate networked components, each of the aforementioned devices can exist on a single device, and the various devices in each of the AMHS A manufacturing plant / area A 114, the AMHSB manufacturing plant / area B 116, and the handshake area 120 are networked.

[0039] Return to Figure 2 , the instructions 206 stored in the memory 204 may include a transformation component 222 configured to transform wafer lot information associated with the wafer lot 134 from one AMHS / MES combination to another AMHS / MES combination, such as from the AMHS A / MES system 150 to the AMHS B / MES system 152. Figure 3An illustrative example of wafer lot information 300 used by AMHS A / MES system 150 and wafer lot information 302 used by AMHS B / MES system 152 is provided, where MES system 150 and MES system 152 are different manufacturing execution systems. Transformation component 222 of handshake control system 106 is configured to transform data structures, formats, and instruction sets from MES system 150 in AMHS A into data structures, formats, and instruction sets used by MES system 152 in AMHS B. In some embodiments, transformation component 222 can use database 220 to retrieve relevant commands to help transform wafer lot information 300 into wafer lot information 302.

[0040] like Figure 2 126B, VHL A1 122A, VHL A2 122B, VHL A3 122C, VHL B1 124A, VHL B2 124B, VHL C1 126A, and VHL C2 126B are tracked as they move into and out of the handshake area 120, i.e., as the transport vehicles VHL A1 122A, VHL A2 122B, VHL A3 122C enter and exit the transfer area 136, and the transport vehicles VHL B1 124A, VHL B2 124B, VHL C1 126A, and VHL C2 126B are tracked as they move into and out of the handshake area 120. 124B enters and exits the transfer area 138 and the position of the carriers VHL C1 126A, VHL C2 126B as they move throughout the handgrip area 120. According to one embodiment, the tracking component 228 receives sensor data from sensors 140 located at the entrances of the transfer areas 136, 138, making it possible to determine which carriers VHL A1 122A, VHL A2 122B, VHL A3 122C, VHL B1 124A, VHL B2 124B have entered / left, the speed at which the carriers VHL A1 122A, VHL A2 122B, VHL A3 122C, VHL B1 124A, VHL B2 124B place or retrieve wafer batches 134 from the transfer areas 136, 138, etc.

[0041] Instruction 206 also includes a scheduling component 230, which is configured to access AMHS A fab / area A 114 production schedules (e.g., from AMHS A control system 108) and AMHS B fab / area B 116 production schedules (e.g., from AMHS B control system 110) to determine any transmission requirements / requests. Scheduling component 230 is also configured to determine one or more transport vehicles (VHL C1 126A, VHL C2 126B) that are empty (i.e., can be used to help the cross-working phase / cross-plant / cross-AMHS transmission of wafer batch 134) in handshake area 120. Then scheduling component 230 determines which transport vehicle VHL C1 126A, VHLC2 126B can be used for transmission. This determination can depend on the speed, capacity and / or other attributes of each specific transport vehicle. Thereafter, the fastest of the available carts VHL C1 126A, VHL C2 126B is then scheduled / assigned to retrieve the wafer lot 134 to be transferred.

[0042] As used herein, the term "software" is intended to encompass any set or collection of instructions executable by a computer or other digital system to configure the computer or other digital system to perform the tasks intended by the software. As used herein, the term "software" is intended to encompass instructions stored in storage media such as RAM, hard disks, optical disks, and is also intended to encompass so-called "firmware" (i.e., software stored on ROM), etc. Such software may be organized in a variety of ways and may include software components organized as libraries, Internet-based programs stored on remote servers, etc., source code, interpreted code, object code, directly executable code, etc. The software may be intended to call system-level code or calls to other software residing on a server or other location to perform certain functions.

[0043] Now go to Figure 4 , an exemplary flow chart depicting a method 400 for AMHS interface management according to one embodiment of the present application is shown. The method 400 begins at operation 402, where the processor 202 or other suitable component associated with the handshake control system 106 receives a production schedule from each AMHS A control system 108, AMHS B control system 110. According to one embodiment, the processor 202 analyzes the production schedule of each AMHS A control system 108, AMHS B control system 110 through the scheduling component 230 to identify each cross-work stage / cross-AMHS / cross-factory transfer of the required wafer batch 134 at operation 404.

[0044] At operation 406, the processor 202 or other suitable component associated with the handgrip control system 106 identifies a cart VHL C1 126A or VHL C2 126B that is currently empty (i.e., not conveying / carrying a wafer carrier) and available to effectuate a transfer. Next, at operation 408, the handgrip control system 106 dispatches the identified cart VHL C1 126A or VHL C2 126B to the transfer zone 136 or transfer zone 138 corresponding to the location where the wafer batch 134 is received. In some embodiments, if there are multiple available carts, operation 406 identifies the best available cart based on information such as the distance each cart needs to travel to effectuate a transfer, the carrying capacity of each available cart, priority information for transfers and other concurrent transfers, and transportation information of the AMHS. In some such embodiments, a machine learning technique, such as an artificial neural network (ANN), may be trained to select the best available transport vehicle based on this information, optionally including real-time transportation information about the AMHS and real-time delivery schedules currently being implemented and to be implemented for the AMHS.

[0045] At operation 410, the assigned transporter VHL C1 126A or VHL C2 126B retrieves the wafer lot 134 from the transfer area 136, transfer area 138. At operation 412, the transformation component 222 or other suitable component associated with the handshake control system 106 retrieves / receives the wafer lot information corresponding to the wafer lot 134 to be transferred. At operation 414, the assigned transporter VHL C1 126A or VHL C2 126B moves the track 146 of the OHT from one transfer area (e.g., from the transfer area 136) to another transfer area (e.g., to the transfer area 138) (or vice versa) in the handshake area 120. At operation 416, the transformation component 222 transforms the wafer lot information corresponding to the wafer lot 134 being transferred from the originating AMHS / MES to the receiving AMHS / MES through the database 220. It should be understood that the transformation implemented herein maintains the commands associated with the wafer batch information so that the receiving AMHS / MES can implement the required manufacturing. Then, at operation 418, the transformed wafer batch information is transmitted from the handshake control system 106 to the receiving AMHS A control system 108 or AMHS B control system 110. The assigned transporter VHL C1 126A or VHL C2 126B that then transports the wafer batch 134 places the wafer batch 134 in the transfer area 136 or transfer area 138 of the receiving AMHS / MES.

[0046] Now refer to Figure 5 , showing a second embodiment of the method 500 for AMHS interface management according to the present application. Figure 5 , the method 500 begins at operation 502, where the tracking component 228 or other suitable component associated with the handshake control system 106 collects status data from the OHT (e.g., handshake trucks VHL C1 126A and VHL C2 126B and trucks from AMHS A plant / area A 114 and AMHS B plant / area B 116 that have entered and / or left the corresponding transfer area 136, transfer area 138). It should be understood that such status data includes, but is not limited to, for example, the speed of the truck, the time spent in the transfer area, the direction of travel, the type of truck, etc. At operation 504, the handshake control system 106 retrieves scheduling data from each AMHS A control system 108 and AMHS B control system 110. According to various embodiments, the scheduling data may be collected from different fab scheduling systems resident on the respective AMHS A control system 108, AMHS B control system 110, fab scheduling systems operating independently of the AMHS A control system 108, AMHS B control system 110, centralized scheduling systems, or any suitable combination thereof. According to one embodiment, the scheduling data includes, but is not limited to, for example, scheduling requests, wafer lot priorities, etc.

[0047] At operation 506, the handshake control system 106 retrieves AMHS status data from each AMHS A control system 108, AMHS B control system 110. According to one embodiment, the AMHS status data includes, but is not limited to, for example, location, time, equipment, wafer batch information, carrier, transmission priority, transportation status, etc. It should be understood that the OHT status data, the fab scheduling data, and the AMHS status data may be stored in a database 220 or a memory 204 associated with the handshake control system 106. It should also be understood by those skilled in the art that the above examples are intended to be non-limiting, and other types of information related to OHT, AMHS, and manufacturing scheduling are contemplated for use herein.

[0048] At operation 508, the handshake control system 106 analyzes the collected data to determine whether it needs to be transferred. That is, the handshake control system 106 determines whether the wafer batch 134 needs to be moved from AMHS A manufacturing plant / area A 114 to AMHS B manufacturing plant / area B 116 (or vice versa) to complete production. It should be understood that such a determination can be based on, but not limited to, the availability of a specific process tool 130 in different manufacturing plants / areas A 114 and manufacturing plants / areas B 116, the priority associated with a specific wafer batch 134, the scheduled maintenance of a specific process tool 130 in the manufacturing plant / area A 114 and manufacturing plant / area B 116, etc. When the operation 508 is negatively determined, the operation returns to operation 502, and the handshake control system 106 continues to monitor and capture the aforementioned data at operation 502.

[0049] When the determination at operation 508 is positive (i.e., it is necessary to transfer the wafer lot 134 from one fab / area A 114, fab / area B 116 across work stages / across AMHSs / across factories to another fab / area A 114, fab / area B 116), the operation proceeds to operation 510, where the handshake control system 106 determines the appropriate transporter VHL C1 126A, VHL C2 126B within the handshake area 120 to perform the transfer. According to one embodiment, the transporter VHL C1 126A or VHL C2 126B may be selected based on the speed, availability, and past performance of the transporter VHL C1 126A or VHL C2 126B (e.g., based on OHT status data and previous transfer determinations (described below)). That is, the handshake control system 106 can predict or forecast which truck VHL C1 126A or VHL C2 126B can serve future cross-work phase / cross-AMHS / cross-plant functions with reliability, speed and quality. At operation 512, the handshake control system 106 begins tracking the performance of the selected truck VHL C1 126A or VHL C2 126B.

[0050] At operation 514, the selected carrier VHL C1 126A or VHL C2 126B is directed to the transfer area 136 or transfer area 138 within the handholding area 120 to retrieve the wafer batch 134 that needs to be transported across work stages / across AMHSs / across factories. It should be understood that the selected carrier VHL C1 126A or VHL C2 126B can be located outside the transfer area 136 or transfer area 138 to avoid conflict with another carrier (e.g., from the originating AMHS A fab / area A 114 or AMHS B fab / area B 116) located in the transfer area 136 or transfer area 138 (assuming that the OHT system used allows such positioning).

[0051] At operation 516, the handshake control system 106 receives sensor data from at least one sensor 140 located within the transfer area 136, 138 indicating that the transport vehicle has entered the transfer area 136, 138. For example, VHL A1 122A has entered the transfer area 136 from AMHS A manufacturing plant / area A 114, or VHL B1 124A has entered the transfer area 138 from AMHS B manufacturing plant / area B 116. The handshake control system 106 then receives sensor data from at least one of the sensors 140 indicating that the transport vehicle has left the transfer area 136, 138 at operation 518. According to one embodiment, the dwell time of the transport vehicle in the transfer area 136, 138 and the associated speed and status can be collected by the handshake control system 106 and used for future scheduling requests. Next, at operation 520, the handgrip control system 106 determines whether the wafer batch 134 has been placed in the transfer area 136, the transfer area 138 through one or more sensors 140. When it is determined that the wafer batch 134 has not been placed, the operation proceeds to operation 522, where an alarm indicating failure is generated. Figure 5 The operation returns to operation 502 to continue managing cross-work stage / cross-AMHS / cross-plant transfers.

[0052] Upon successful placement of the wafer lot 134 at operation 520, operations proceed to operation 524 where the handhold truck VHL C1 126A or VHL C2 126B retrieves the wafer lot 134 from the transfer area 136, transfer area 138. At operation 526, the handhold control system 106 retrieves / receives wafer lot information associated with the wafer lot 134 being transferred via the transformation component 222 or other suitable component associated with the handhold control system 106. At operation 528, the wafer lot information is transformed from the originating AMHS / MES format to the receiving AMHS / MES format via the transformation component 222 of the handhold control system 106. At operation 530, the transformed wafer lot information is transmitted from the handgrip control system 106 to the receiving AMHS control system, i.e., to the AMHS A control system 108 (originated from the AMHS B fab / area B 116) or to the AMHS B control system 110 (originated from the AMHS A fab / area A 114). Next, at operation 532, the selected transport vehicle VHL C1 126A or VHLC2 126B is guided to move from one transport area 136, 138 to another transport area 136, 138 through the handgrip area 120.

[0053] Next, at operation 534, the wafer batch 134 is placed by the selected transport vehicle VHL C1 126A, VHL C2 126B in a transfer zone 136, 138 adjacent to the receiving AMHS A fabrication plant / area A 114, AMHS B fabrication plant / area B 116. It should be understood that when the transport vehicle VHL C1 126A, VHL C2 126B transfers the wafer batch 134 from one transfer zone 136, 138 to another transfer zone 136, 138, the speed, performance, etc. of the transport vehicle VHL C1 126A, VHL C2 126B obtained during the monitoring of the transport vehicle VHL C1 126A, VHL C2 126B can be used by the handshake control system 106 to determine which transport vehicle VHL C1 126A, VHL C2 126B to use in future transfer requests. The handshake control system 106 then determines at operation 536 whether the wafer batch 134 has been retrieved. In some embodiments, when the transport vehicle of AMHS A manufacturing plant / area A 114, AMHS B manufacturing plant / area B 116 receiving the wafer batch 134 moves through the transfer area 136, the transfer area 138, this determination can be completed based on the output of the sensor 140, or alternatively based on the output of other sensors (not shown), which can be configured to optically, thermally, magnetically determine the presence or absence of the wafer batch 134 after placement by weight, limit switch, pressure switch, radio frequency tag or other suitable means. When a negative determination is made, the operation continues to operation 522, and an alarm indicating that a problem has occurred can be issued at operation 522. When a positive determination is made, the operation returns to operation 502, and the handshake control system 106 continues to operate as described above.

[0054] According to a first exemplary embodiment, the AMHS A control system 108 and the AMHS B control system 110 are provided by separate suppliers. In this embodiment, the MES system 150 and the MES system 152 are different manufacturing execution systems, thereby using unrelated data formats and instructions. Therefore, the transformation component 222 of the handshake control system 106 is configured to transform the wafer batch information of the wafer batch 134 from the AMHS / MES system 150 format / structure to the AMHS / MES system 152 format / structure according to the cross-work stage / cross-AMHS / cross-factory path, and vice versa (i.e., AMHS A to AMHS B or AMHS B to AMHS A).

[0055] According to a second exemplary embodiment, the AMHS A control system 108 and the AMHS B control system 110 are provided by separate suppliers. In this embodiment, the MES system 150 and the MES system 152 are different versions of the same manufacturing execution system. Therefore, the transformation component 222 of the handshake control system 106 is configured to transform the wafer batch information of the wafer batch 134 from the MES system 150 format / structure to the MES system 152 format / structure according to the cross-work stage / cross-AMHS / cross-factory path, and vice versa (i.e., AMHS A to AMHS B or AMHS B to AMHS A).

[0056] According to a third embodiment, the AMHS A control system 108 and the AMHS B control system 110 are provided by separate suppliers. In this embodiment, the MES system 150 and the MES system 152 are the same version of the manufacturing execution system, so that the same data format and instructions are used. Therefore, the conversion component 222 of the handshake control system 106 is configured to convert the wafer batch information of the wafer batch 134 from the AMHS A format / structure to the AMHS B format / structure according to the cross-work stage / cross-AMHS / cross-factory path, and vice versa (i.e., AMHS A to AMHS B or AMHS B to AMHS A).

[0057] According to another embodiment, the system and method described above can realize the exchange of wafer batch information between different supplier-based manufacturing execution systems and automated material handling systems. In addition, when the wafer batch moves between two supplier-based MES / AHMS systems, the above system and method prevent the loss of wafer batch information. It should be understood by those skilled in the art that the system and method described herein expand manufacturing flexibility by enabling wafer batches to be easily processed in different manufacturing plants of different suppliers that can use different MES systems. In addition, as shown above, the system and method described herein provide real-time monitoring of wafer batches when each wafer batch is transported between MES / AHMS systems in the following manner: insert an interface system between two or more supplier AMHS / MES systems when the wafer batch moves from one supplier AMHS / MES system to the next supplier AMHS / MES system to transform and convert wafer batch information (including data format and data structure).

[0058] It should be understood that various embodiments disclosed herein enable the handshake control system 106 to coordinate the interaction between two centralized systems, where both AMHS A and AMHS B use centralized control systems. Embodiments also enable the handshake control system 106 to coordinate the interaction between two decentralized (i.e., distributed) AMHS systems (e.g., multiple individual controllers within each AMHS system). Yet another embodiment provides the handshake control system 106 to connect a pair of centralized AMHS systems to a decentralized AMHS system, where either AMHS A or AMHS B uses a centralized control system and the other AMHS uses a distributed control system. In various embodiments, the sensor 140 implemented as a pass sensor provides feedback about which carrier VHL A1 122A, VHL A2 122B, VHL A3 122C, VHL B1 124A, VHL B2 124B, VHL C1 126A, and VHL C2 126B is located in a particular transfer zone 136, 138, and in conjunction with the associated database 220 enables the handshake control system 106 to dynamically balance the amount of carriers (VHL) in this zone. According to one embodiment, the handshake control system 106 is configured to perform real-time analysis of the data from the sensor and other information (e.g., network, wireless, wi-fi information) to ensure the quality of the transfer in the interface (i.e., the handshake zone 120). The handshake control system 106 can also be configured to create a transport priority list to sort the incoming (i.e., input) interface priority by wafer lot priority evaluation results.

[0059] According to one embodiment, an automated material handling system ("AMHS") interface management system is provided, the system including a handshake control system, the handshake control system including a processor in communication with a memory. The system also includes: a first AMHS system in communication with the handshake control system; and a second AMHS system in communication with the handshake control system. The memory is configured to store instructions, the instructions being executed by the processor to cause the processor to: receive wafer batch information from the first AMHS system in a first format associated with the first AMHS system; and transform the wafer batch information from the first format associated with the first AMHS system into a second format associated with the second AMHS system.

[0060] An automated material handling system interface management system according to an embodiment of the present invention, wherein the first automated material handling system uses a first manufacturing execution system and the second automated material handling system uses a second manufacturing execution system.

[0061] In an automated material handling system interface management system according to an embodiment of the present invention, the first manufacturing execution system and the second manufacturing execution system are the same.

[0062] In an automated material handling system interface management system according to an embodiment of the present invention, the first manufacturing execution system is a first version and the second manufacturing execution system is a second version.

[0063] An automated material handling system interface management system according to an embodiment of the present invention, wherein the handshake control system is configured to control operations within a handshake zone, and the handshake zone is located between the first automated material handling system and the second automated material handling system.

[0064] An automated material handling system interface management system according to an embodiment of the present invention further includes at least one transport vehicle of a suspended conveyor located in the handshake area and communicating with the handshake control system.

[0065] In an automated material handling system interface management system according to an embodiment of the present invention, the at least one transport vehicle in the handover zone is configured to transfer wafer batches between the first automated material handling system and the second automated material handling system through the handover zone.

[0066] In an automated material handling system interface management system according to an embodiment of the present invention, the handshake zone includes a first transfer zone associated with the first automated material handling system and a second transfer zone associated with the second automated material handling system.

[0067] An embodiment of the present invention provides an automated material handling system interface management system, wherein the first automated material handling system includes at least one transport vehicle configured to transport the wafer batch into and out of the first transport area, and wherein the second automated material handling system includes at least one transport vehicle configured to transport the wafer batch into and out of the second transport area.

[0068] An embodiment of the present invention provides an automated material handling system interface management system, wherein the at least one transport vehicle in the handshake zone is configured to move to each of the first transfer zone and the second transfer zone.

[0069] An automated material handling system interface management system according to an embodiment of the present invention further includes at least one sensor located in the first conveying area, configured to sense the movement of at least one corresponding transport vehicle of the first automated material handling system entering and exiting the first conveying area; and at least one sensor located in the second conveying area, configured to sense the movement of at least one corresponding transport vehicle of the second automated material handling system entering and exiting the second conveying area.

[0070] According to another embodiment, a method for AMHS interface management is provided. The method includes: receiving wafer batch information of a wafer batch located in a first AMHS at a handshake control system, the wafer batch information being in a first format associated with the first AMHS. The method also includes: transforming the wafer batch information from the first format into a second format associated with the second AMHS. In addition, the method includes: transmitting the transformed wafer batch information to a control system of the second AMHS via an associated network.

[0071] A method for managing the interface of an automated material handling system according to an embodiment of the present invention further includes: receiving a production schedule from the first automated material handling system, the production schedule indicating that the chip batch needs to be transferred from the first automated material handling system to the second automated material handling system; identifying a transport vehicle of an overhead conveyor located in a handover area that can be used to transfer the chip batch from the first automated material handling system to the second automated material handling system; and using the identified transport vehicle to transfer the chip batch through the handover area.

[0072] A method for interface management of an automated material handling system according to an embodiment of the present invention further includes: placing the wafer batch in a first conveying area adjacent to the first automated material handling system by at least one transport vehicle of a suspended conveyor of the first automated material handling system; retrieving the wafer batch from the first conveying area by the identified transport vehicle; and placing the wafer batch in a second conveying area adjacent to the second automated material handling system.

[0073] An embodiment of the present invention provides a method for interface management of an automated material handling system, wherein the first format is a first manufacturing execution system and the second format is a second manufacturing execution system.

[0074] In an embodiment of the present invention, a method for managing interfaces of an automated material handling system is provided, wherein the first manufacturing execution system and the second manufacturing execution system are the same.

[0075] In an embodiment of the present invention, a method for managing interfaces of an automated material handling system is provided, wherein the first manufacturing execution system is a first version and the second manufacturing execution system is a second version.

[0076] According to another embodiment, an automated material handling system ("AMHS") interface management system is provided, the system comprising: a first AMHS control system, a second AMHS control system, a handshake control system, and at least one handshake transport vehicle. The first AMHS control system is configured to control a first AMHS zone and communicate with an associated network. The second AMHS control system is configured to control a second AMHS zone and communicate with the associated network, wherein the first AMHS system and the second AMHS system are different. The handshake control system controls a handshake zone between the first AMHS zone and the second AMHS zone to facilitate the transfer of wafer batches between the first AMHS zone and the second AMHS zone. The handshake control system communicates with the first AMHS system and the second AMHS system through the associated network. The at least one handshake transport vehicle is a component of an overhead conveyor within the handshake zone, and is configured to transfer the wafer batch between a first transfer zone adjacent to the first AMHS zone and a second transfer zone adjacent to the second AMHS zone. The handshake control system also includes a processor in communication with a memory storing instructions, the instructions being executed by the processor to cause the processor to: receive production scheduling data indicating that a wafer batch needs to be transferred between the first AMHS area and the second AMHS area; and identify a handshake transport vehicle for transferring the wafer batch based on handshake transport vehicle performance. The instructions also cause the processor to: receive wafer batch information from the first AMHS system in a first format associated with the first AMHS system; and transform the wafer batch information from the first format associated with the first AMHS system to a second format associated with the second AMHS system. In addition, the instructions cause the processor to: receive sensor data from at least one sensor located in each of the following: the first transfer area and the second transfer area, the entrance and exit of the corresponding AMHS transport vehicle entering and exiting the first transfer area and the second transfer area; and retrieve the wafer batch from the first transfer area by the identified handshake transport vehicle based on the received sensor data. In addition, the instructions stored in the memory cause the processor to: transmit the transformed wafer lot information to the second AMHS control system; and transmit the wafer lot from the first transfer area to the second transfer area via the identified handgrip transporter.

[0077] An embodiment of the present invention provides an automated material handling system interface management system, wherein the first format is a first manufacturing execution system and the second format is a second manufacturing execution system.

[0078] An embodiment of the present invention provides an automated material handling system interface management system, wherein the first manufacturing execution system and the second manufacturing execution system are the same, or wherein the first manufacturing execution system and the second manufacturing execution system are different versions of the same manufacturing execution system.

[0079] Some portions of the detailed description herein are presented in terms of algorithms and symbolic representations of operations on data bits performed by conventional computer components, including a central processing unit (CPU), memory storage devices of the CPU, and connected display devices. These algorithmic descriptions and representations are used by those skilled in the art of data processing to most effectively convey the substance of their work to others skilled in the art. An algorithm is generally considered to be a self-consistent sequence of steps that lead to a desired result. The steps require physical manipulation of physical quantities. Usually, although not necessarily, these quantities are in the form of electrical or magnetic signals capable of being stored, transferred, combined, compared, and otherwise manipulated. It has proven convenient at times, primarily for reasons of common usage, to refer to these signals as bits, values, elements, symbols, characters, terms, numbers, and the like.

[0080] However, it should be understood that all of these terms and all similar terms are associated with the appropriate physical quantities and are merely convenient labels applied to these quantities. Unless otherwise specifically stated and apparent from a reading of the discussion herein, it should be understood that throughout this specification, discussions using terms such as "processing" or "computing" or "calculating" or "determining" or "displaying" refer to the actions and processes of a computer system or similar electronic computing device that manipulates data represented as physical (electronic) quantities within the computer system's registers and memories and transforms the data into other data similarly represented as physical quantities within the computer system's memories or registers or other such information storage devices, information transmission devices, or information display devices.

[0081] Exemplary embodiments also relate to apparatus for carrying out the operations discussed herein. The apparatus may be specially constructed for the required purposes, or the apparatus may comprise a general purpose computer selectively activated or reconfigured by a computer program stored in the computer. Such a computer program may be stored in a computer readable storage medium, such as, but not limited to, any type of disk, including floppy disks, optical disks, compact disc read only memory (CD-ROM), and magneto-optical disks, read-only memory (ROM), random access memory (RAM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), magnetic or optical cards, or any type of medium suitable for storing electronic instructions, and each is coupled to a computer system bus.

[0082] The algorithms and displays presented herein are not inherently related to any particular computer or other device. Various general purpose systems may be used with the program in accordance with the teachings herein, or it may prove convenient to construct a more specialized device to implement the methods set forth herein. The structure of various such systems is apparent from the above description. In addition, the exemplary embodiments are not set forth with reference to any particular programming language. It should be understood that the teachings of the exemplary embodiments set forth herein may be implemented using a variety of programming languages.

[0083] A machine-readable medium includes any mechanism for storing or transmitting information in a form readable by a machine (e.g., a computer). For example, machine-readable media include: read-only memory ("ROM"); random access memory ("RAM"); magnetic disk storage media; optical storage media; flash memory devices; and electrical, optical, acoustic, or other forms of propagation signals (e.g., carrier waves, infrared signals, digital signals, etc.), to name a few.

[0084] The methods exemplified throughout the specification may be implemented in a computer program product that can be executed on a computer. The computer program product may include a non-transitory computer-readable recording medium, such as a disk, hard disk drive, etc., on which a control program is recorded. Common forms of non-transitory computer-readable media include, for example: a floppy disk, a floppy disk, a hard disk, a magnetic tape, or any other magnetic storage medium; a CD-ROM, a Digital Video Disk (DVD), or any other optical medium; a RAM, a PROM, an EPROM, a flash EPROM, or other memory chip; or a cassette tape or any other tangible medium from which a computer can read and use it.

[0085] Alternatively, the method may be implemented in a transient medium (such as a transmissive carrier wave), wherein the control program is implemented as a data signal using the transmission medium (such as an acoustic or light wave, such as that generated during radio wave and infrared data communications, etc.).

[0086] The features of several embodiments are summarized above so that those skilled in the art can better understand the various aspects of the present disclosure. Those skilled in the art should understand that they can easily use the present disclosure as a basis for designing or modifying other processes and structures to implement the same purposes and / or achieve the same advantages as the embodiments described herein. Those skilled in the art should also recognize that these equivalent constructions do not depart from the spirit and scope of the present disclosure, and they can make various changes, substitutions and modifications to them without departing from the spirit and scope of the present disclosure.

Claims

1. An automated material handling system ("AMHS") interface management system, comprising: A handshake control system including a processor in communication with a memory; a first automated material handling system in communication with the handshake control system; as well as a second automated material handling system, in communication with the handshake control system, wherein the memory stores instructions, the instructions being executed by the processor to cause the processor to: receiving wafer lot information from the first automated material handling system in a first format associated with the first automated material handling system, and The wafer lot information is transformed from the first format associated with the first automated material handling system to a second format associated with the second automated material handling system.

2. The automated material handling system interface management system of claim 1, wherein the first automated material handling system uses a first manufacturing execution system and the second automated material handling system uses a second manufacturing execution system.

3. The automated material handling system interface management system of claim 2, wherein the first manufacturing execution system and the second manufacturing execution system are the same. 4 . The automated material handling system interface management system of claim 3 , wherein the first manufacturing execution system is a first version and the second manufacturing execution system is a second version.

5. The automated material handling system interface management system of claim 1, wherein the handshake control system is configured to control operations within a handshake zone, wherein the handshake zone is located between the first automated material handling system and the second automated material handling system.

6. The automated material handling system interface management system according to claim 5, wherein: Also included is at least one transporter of an overhead conveyor positioned in the handgrip zone and in communication with the handgrip control system.

7. The automated material handling system interface management system of claim 6, wherein the at least one transport vehicle of the handing zone is configured to transfer wafer lots between the first automated material handling system and the second automated material handling system through the handing zone.

8. The automated material handling system interface management system of claim 7, wherein the handshake zone comprises a first transfer zone associated with the first automated material handling system and a second transfer zone associated with the second automated material handling system.

9. An automated material handling system interface management system according to claim 8, wherein the first automated material handling system includes at least one transport vehicle configured to transport the wafer batch into and out of the first transfer area, and wherein the second automated material handling system includes at least one transport vehicle configured to transport the wafer batch into and out of the second transfer area.

10. The automated material handling system interface management system of claim 9, wherein the at least one transport vehicle of the handshake zone is configured to move into each of the first transfer zone and the second transfer zone.

11. The automated material handling system interface management system according to claim 10, further comprising: at least one sensor located in the first transfer zone, configured to sense movement of a corresponding at least one transport vehicle of the first automated material handling system into and out of the first transfer zone; as well as At least one sensor located in the second transfer zone is configured to sense movement of a corresponding at least one transport vehicle of the second automated material handling system into and out of the second transfer zone.

12. A method for interface management of an automated material handling system, wherein: include: receiving wafer lot information for a wafer lot in a first automated material handling system at a handshake control system, the wafer lot information being in a first format associated with the first automated material handling system; transforming the wafer lot information from the first format into a second format associated with a second automated material handling system; as well as The transformed wafer lot information is transmitted to the control system of the second automated material handling system through an associated network.

13. The method for interface management of an automated material handling system according to claim 12, wherein: Also includes: receiving a production schedule from the first automated material handling system, the production schedule indicating a need to transfer the wafer lot from the first automated material handling system to the second automated material handling system; identifying a cart of an overhead conveyor located in a handholding area that is available for transferring the wafer lot from the first automated material handling system to the second automated material handling system; as well as The wafer lot is transferred through the handing area using the identified cart.

14. The method for interface management of an automated material handling system according to claim 13, wherein: Also includes: placing the wafer batch in a first transfer zone adjacent to the first automated material handling system by at least one transporter of an overhead conveyor of the first automated material handling system; retrieving the wafer batch from the first transfer area by the identified transport vehicle; as well as The wafer lot is placed in a second transfer area adjacent to the second automated material handling system.

15. The method for automated material handling system interface management of claim 14, wherein the first format is a format used by a first manufacturing execution system and the second format is a format used by a second manufacturing execution system.

16. The method for automated material handling system interface management of claim 15, wherein the first manufacturing execution system and the second manufacturing execution system are the same.

17. The method for automated material handling system interface management of claim 16, wherein the first manufacturing execution system is a first version and the second manufacturing execution system is a second version.

18. An automated material handling system ("AMHS") interface management system comprising: a first automated material handling control system that controls the first automated material handling system zone and communicates with an associated network; a second automated material handling control system controlling a second automated material handling system zone and in communication with the associated network, wherein the first automated material handling control system and the second automated material handling control system are different; a handshake control system for controlling a handshake area between the first automated material handling system area and the second automated material handling system area to facilitate the transfer of wafer batches between the first automated material handling system area and the second automated material handling system area, the handshake control system communicating with the first automated material handling control system and the second automated material handling control system via the associated network; at least one handgrip cart of an overhead conveyor located in the handgrip area, the at least one handgrip cart configured to transfer the wafer batch between a first transfer area adjacent to the first automated material handling system area and a second transfer area adjacent to the second automated material handling system area, The handshake control system further comprises a processor in communication with a memory storing instructions, the instructions being executable by the processor to cause the processor to: receiving production schedule data indicating that wafer batches need to be transferred between the first automated material handling system area and the second automated material handling system area, identifying a hand-holding cart for transferring the wafer lot based on the at least one hand-holding cart capability, receiving wafer lot information from the first automated material handling control system in a first format associated with the first automated material handling control system, converting the wafer lot information from the first format associated with the first automated material handling control system to a second format associated with the second automated material handling control system, receiving sensor data from at least one sensor located in each of: the first transfer zone and the second transfer zone, an entrance and an exit of a corresponding automated material handling control system vehicle entering and exiting the first transfer zone and the second transfer zone, retrieving the wafer batch from the first transfer area by the identified handgrip cart based on the received sensor data, transmitting the transformed wafer batch information to the second automated material handling control system, and The wafer lot is transferred from the first transfer area to the second transfer area by the identified handgrip carrier.

19. The automated material handling system interface management system of claim 18, wherein the first format is a format used by a first manufacturing execution system and the second format is a format used by a second manufacturing execution system.

20. The automated material handling system interface management system of claim 19, wherein the first MES and the second MES are the same, or wherein the first MES and the second MES are different versions of the same MES.

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