Ultrasonic treatment device

Abstract

Even when processing a plurality of processed objects, the propagation and uniformity of ultrasonic waves can be improved more easily. The ultrasonic processing device of the present invention comprises: a processing tank capable of accommodating the processed object and a processing liquid for immersing the processed object; and an ultrasonic applying mechanism for applying ultrasonic waves to the processing liquid, wherein the processing tank has long axes with substantially the same cross-sectional shapes, and the wall surface up to the predetermined liquid level line of the processing liquid is composed of a concave curved surface, and the ultrasonic applying mechanism is arranged at a position where the angle (θ) formed by the normal line of the oscillation surface of the ultrasonic wave and the predetermined liquid level line of the processing liquid is 5° to 80°.

Description

Technical Field

[0001] The invention relates to an ultrasonic processing device. Background Art

[0002] Generally speaking, in the manufacturing process of various metal bodies such as steel plates and steel pipes, in order to remove dirt, scale, etc. existing on the surface of the metal body, a cleaning method is widely used in which the metal body is immersed in a cleaning tank containing a chemical solution (for example, an alkaline degreasing agent, a surfactant, a sulfuric acid solution, etc.), a rinse solution, etc. As a cleaning device for implementing such a cleaning method, there are, for example, a processing device using a high-pressure airflow nozzle and an ultrasonic processing device using ultrasonic waves.

[0003] Among them, various methods have been proposed in the past to improve the propagation and treatment performance of ultrasonic waves when performing various surface treatments such as cleaning treatments on large-sized products such as steel plates and steel pipes.

[0004] For example, the following patent document 1 proposes a technique in which a swinging member for rotating an ultrasonic vibrator is arranged inside a cleaning tank, and the ultrasonic vibrator is swung during the cleaning process of the object to be cleaned, thereby improving the cleaning performance based on ultrasonic waves. In addition, the following patent document 2 proposes a technique in which the object to be cleaned is rotated during the cleaning process of the object to be cleaned, and the ultrasonic vibrator is driven up and down, thereby improving the cleaning efficiency. In addition, the following patent document 3 proposes a technique in which a curved surface member for reflecting ultrasonic waves is arranged on the wall surface and / or bottom surface of the processing tank.

[0005] Prior art literature

[0006] Patent Literature

[0007] Patent Document 1: Japanese Patent Application Publication No. 2000-301087

[0008] Patent Document 2: Japanese Patent Application Publication No. 2013-202597

[0009] Patent Document 3: International Publication No. 2018 / 169050 Summary of the invention

[0010] Problem that the invention aims to solve

[0011] However, when various driving mechanisms are provided in the cleaning liquid holding portion of the cleaning tank as in the above-mentioned Patent Documents 1 and 2, it is required to select a treatment liquid that does not adversely affect the driving mechanism. In addition, the portion of the internal space of the cleaning tank corresponding to the provided driving mechanism cannot be effectively used, and the number of objects to be treated that can be treated simultaneously is reduced.

[0012] In addition, even when the technologies of Patent Documents 1 to 3 are used, when multiple objects to be processed are arranged in a processing tank, there is a possibility that the propagation and uniformity of the ultrasonic wave will be reduced. There is room for research to further improve the propagation and uniformity of the ultrasonic wave.

[0013] Thus, there is a desire for a technology that can more easily improve the propagation and uniformity of ultrasonic waves even when a plurality of objects are to be processed.

[0014] Therefore, the present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide an ultrasonic treatment device that can more simply improve the propagation and uniformity of ultrasonic waves even when treating a plurality of objects to be treated.

[0015] Solutions for solving problems

[0016] In order to solve the above-mentioned problem, the inventors of the present invention conducted in-depth research and obtained the following insights: by setting the shape of the surface of the inner surface of the treatment tank up to the predetermined liquid level height line of the treatment liquid (in other words, the portion in contact with the treatment liquid) to a concave surface, and irradiating ultrasonic waves toward the predetermined liquid level height line of the treatment liquid in the treatment tank, the propagation and uniformity of the ultrasonic waves can be further improved.

[0017] The gist of the present invention completed based on this finding is as follows.

[0018] (1) An ultrasonic treatment device, comprising: a treatment tank capable of accommodating a treatment object and a treatment liquid for immersing the treatment object; and an ultrasonic applying mechanism for applying ultrasonic waves to the treatment liquid, wherein the treatment tank has long axes with substantially the same cross-sectional shapes, and the wall surface up to a predetermined liquid level line of the treatment liquid is composed of a concave surface, and the ultrasonic applying mechanism is disposed at a position where an angle θ formed by a normal line of an oscillation plane of the ultrasonic wave and the predetermined liquid level line of the treatment liquid is 5° to 80°.

[0019] (2) The ultrasonic treatment device according to (1), wherein the ultrasonic applying mechanism is provided at a position where the angle θ is 25° to 70°.

[0020] (3) The ultrasonic treatment device according to (1) or (2), wherein the ultrasonic applying mechanism is not provided at a position where the angle θ is outside the range described in (1) or (2).

[0021] (4) The ultrasonic treatment device according to any one of (1) to (3), wherein a cross section of the treatment tank cut along a plane perpendicular to the major axis is a shape obtained by cutting away a portion of a substantially circular or substantially elliptical shape.

[0022] (5) An ultrasonic treatment device according to any one of (1) to (4), wherein, in a cross section obtained by cutting the treatment tank along a plane orthogonal to the long axis, the distance between inner walls at the predetermined liquid level height line is more than 90% of the maximum distance M between inner walls of the treatment tank in the cross section.

[0023] (6) An ultrasonic treatment device according to any one of (1) to (5), wherein, in a cross section obtained by cutting the treatment tank along a plane orthogonal to the long axis, a radius of curvature R of the concave surface is 1.0 to 25.0 times a length L of the oscillation surface of the ultrasonic applying mechanism in the cross section.

[0024] (7) The ultrasonic treatment device according to any one of (1) to (6), wherein the ultrasonic applying mechanism is provided so that a position thereof relative to the treatment tank can be changed according to a treatment amount of the treatment object.

[0025] (8) An ultrasonic treatment device according to any one of (1) to (7), wherein the treatment tank is constructed so that the length of the treatment tank in a direction parallel to the long axis can be made variable by connecting or disassembling treatment tank parts, and the cross-sectional shapes of the cross sections of the treatment tank parts obtained by cutting in a direction orthogonal to the long axis are substantially the same.

[0026] (9) The ultrasonic treatment device according to any one of (1) to (8), wherein the treatment tank is attachable to and detachable from a holder that holds the treatment tank.

[0027] (10) The ultrasonic treatment device according to any one of (1) to (9), wherein the portion of the support holding the treatment tank in contact with the treatment tank has an inherent acoustic reactance of 1×10 5 kg·m -2 ·sec -1 ~2×10 6 kg·m -2 ·sec -1 of raw materials.

[0028] (11) The ultrasonic treatment apparatus according to any one of (1) to (10), wherein an area of ​​a contact portion of the treatment tank with the support is 40% or less of an area of ​​an outer surface of the treatment tank.

[0029] (12) The ultrasonic treatment apparatus according to any one of (1) to (9), wherein the treatment tank is used in a state separated from the holder.

[0030] (13) The ultrasonic treatment device according to any one of (1) to (12), wherein a treatment liquid circulation path for circulating the treatment liquid is provided outside the treatment tank.

[0031] Effects of the Invention

[0032] As described above, according to the present invention, even when a plurality of objects to be processed are processed, the propagation and uniformity of ultrasonic waves can be improved more simply. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1A It is an explanatory diagram schematically showing the overall configuration of an ultrasonic treatment device according to an embodiment of the present invention.

[0034] Figure 1B is magnified in Figure 1A An explanatory diagram of a cross section of the ultrasonic treatment device according to the embodiment of the present invention cut along the AA cutting line.

[0035] Figure 2A It is an explanatory diagram for explaining an ultrasonic applying mechanism in the ultrasonic treatment device according to this embodiment.

[0036] Figure 2B It is an explanatory diagram for explaining an ultrasonic applying mechanism in the ultrasonic treatment device according to this embodiment.

[0037] Figure 3 It is an explanatory diagram for explaining the ultrasonic treatment device according to this embodiment.

[0038] Figure 4A It is an explanatory diagram for explaining the ultrasonic treatment device according to this embodiment.

[0039] Figure 4B It is an explanatory diagram for explaining the ultrasonic treatment device according to this embodiment.

[0040] Figure 5 It is an explanatory diagram for explaining the ultrasonic treatment device according to this embodiment.

[0041] Figure 6 It is an explanatory diagram for explaining the ultrasonic treatment device according to this embodiment. DETAILED DESCRIPTION

[0042] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings. In addition, in this specification and the accompanying drawings, components having substantially the same functional configuration are denoted by the same reference numerals, and repeated description is omitted.

[0043] <Overall structure of ultrasonic treatment device>

[0044] First, refer to Figure 1A and Figure 1B The overall structure of the ultrasonic treatment device according to the embodiment of the present invention will be briefly described. Figure 1A is an explanatory diagram schematically showing the overall structure of the ultrasonic treatment device of this embodiment, Figure 1B is magnified in Figure 1A AA section line of the ultrasonic treatment device of the present embodiment is cut. In addition, for ease of explanation, the size of each component in the figure is appropriately emphasized, and the actual size and ratio between components are not shown.

[0045] The ultrasonic treatment device 1 of the present embodiment is a device that applies ultrasonic waves to the treatment liquid 3 from the ultrasonic treatment mechanism 20 when the object to be treated is immersed in the treatment liquid 3 contained in (or filled with) the treatment tank 10, thereby performing the following treatment on the surface of the object to be treated (the part in contact with the treatment liquid). The ultrasonic treatment device 1 can be used when performing various treatments such as cleaning on the object to be treated, such as various metal bodies represented by steel materials, various non-metal bodies represented by plastic resin components, etc. For example, various metal bodies extending in a predetermined axial direction such as steel pipes, steel sections, steel bars, steel wires, etc. are used as the object to be treated. By using the ultrasonic treatment device 1 of the present embodiment, these metal bodies can be pickled, degreased, and then (after pickling, etc.) cleaned.

[0046] Among them, pickling treatment refers to the treatment of removing oxide scale formed on the surface of the metal body due to heat treatment, hot working, etc., and degreasing treatment refers to the treatment of removing oil components such as lubricants and processing oils used in processing, etc. These pickling treatments and degreasing treatments are pre-treatments performed before the metal body is subjected to surface finishing treatment (metal coating treatment, chemical conversion treatment, coating treatment, etc.). The pickling treatment is sometimes used to dissolve a portion of the base metal. In addition, the pickling treatment is also used in the dissolution of the metal body based on etching to improve the surface finishing quality. In addition, there are also cases where a degreasing treatment is provided before the pickling treatment, and the degreasing performance in the degreasing treatment sometimes affects the removal of the scale in the subsequent pickling treatment. Furthermore, the degreasing treatment is also used to improve the wettability, which is an oil management index of the finishing quality of the final product.

[0047] Furthermore, the ultrasonic treatment device 1 of the present embodiment described in detail below can be used not only in the cleaning process in the above-mentioned production line but also in cleaning of used pipes and pipes that need to be decontaminated regularly or irregularly.

[0048] Thus, the ultrasonic treatment device 1 of the present embodiment is mainly applicable to various surface treatments of a treated object such as a longitudinal body extending along a predetermined axial direction, and a longitudinal body having a surface treatment film (e.g., various oxide films, plating films, coating films after surface treatment finishing treatment, etc.) formed on the surface can be set as the treated object. In addition, the ultrasonic treatment device 1 of the present embodiment can set the treated object as a longitudinal body to which various intentionally formed films are attached in a film-like manner, for example, an oxide scale, oil, etc., which are not intentionally attached to the surface, as a longitudinal body to which unintentional surface attachments such as oxide scales and oil are attached in a film-like manner.

[0049] The following is described in detail by taking the following case as an example: there is a treatment tank 10 holding a treatment liquid, and a plurality of longitudinal bodies are assembled and immersed in the interior of the treatment tank 10. In this case, the assembly of the plurality of longitudinal bodies (the object to be treated) is immersed in the interior of the treatment tank 10 containing the treatment liquid 3 (or filled with the treatment liquid 3) by a driving mechanism (not shown) such as a crane that can move up and down. In addition, the assembly of the plurality of longitudinal bodies can also be immersed in the treatment tank 10 in a state of being entangled in a bundle by a wire, a net, etc. (not shown).

[0050] Below, for convenience, appropriate use Figure 1A and Figure 1B The description will be given using the coordinate system shown. Figure 1A The figure shown in the lower part of is a side view schematically showing the situation of observing the ultrasonic treatment device 1 from the positive direction side of the x-axis, Figure 1A The figure shown in the upper part of is a figure which schematically shows the upper surface of the ultrasonic treatment device 1 when viewed from the positive direction side of the z-axis.

[0051] like Figure 1A As shown in the example, the ultrasonic treatment device 1 of this embodiment includes a treatment tank 10 that holds a treatment liquid 3 and accommodates a treatment object S (in Figure 1A An example of a plurality of longitudinal bodies (not shown in the figure); and an ultrasonic applying mechanism 20, which applies ultrasonic waves to the processing liquid 3. Figure 1A It is clear from the coordinate system shown that the y-axis direction in the coordinate system is parallel to the long axis direction of the processing tank 10 , and the z-axis direction corresponds to the depth direction of the processing tank 10 .

[0052] In addition, for the convenience of explanation, the following uses the expressions "inner wall" and "outer wall" of the processing tank 10, but this expression is for convenience and does not mean that the processing tank 10 has a double-layer structure. In the following description, the surface (inner surface) of the surface of the processing tank 10 that can contact the processing liquid 3 is called the "inner wall", and the surface (outer surface) on the side opposite to the inner wall is called the "outer wall".

[0053] Among them, Figure 1A and Figure 1B As schematically shown, the treatment tank 10 of the ultrasonic treatment device 1 of this embodiment has long axes ( Figure 1A and Figure 1B The inner wall 101 of the treatment tank 10 has a concave curved surface, with the inner wall 101 being the axis corresponding to the y-axis direction, and the wall surface up to the predetermined liquid level line of the treatment liquid 3 (i.e., the portion in contact with the treatment liquid 3). In other words, with an eye on the curvature radius of the curved surface constituting the inner wall 101, the treatment tank 10 has a cross-sectional shape in which the direction of the curvature center is located in the inner direction of the treatment tank 10. Figure 1B The cross-sectional shape of the inner wall 101 shown in FIG. Figure 1A The AA section line can be realized when the processing tank 10 is cut in parallel with the x-axis at any position in the y-axis direction. The processing tank 10 is formed by the concave surface (recessed toward the inner wall 101) until the liquid level height predetermined line of the processing liquid 3 (at Figure 1B In the embodiment, the liquid level predetermined line is the same as the liquid level of the treatment liquid 3) and is located on the inner wall 101. Therefore, no matter where the ultrasonic applying mechanism 20 is set on the inner wall 101 or the outer wall 103, the positions of the troughs and nodes of the ultrasonic waveform can be made non-constant, and the propagation of the ultrasonic wave in the tank can be further improved.

[0054] exist Figure 1B In the figure, the cross-sectional shape of the case where the processing tank 10 has a shape obtained by cutting off a part of a roughly cylindrical shape along the y-axis direction (in other words, the cross-sectional shape obtained by cutting off a part of a circle) is cited as an example for illustration. However, as long as the inner wall 101 of the portion in contact with the processing liquid 3 is in the shape of a concave curved surface, the cross-sectional shape of the inner wall 101 of the processing tank 10 is not particularly limited. For example, it may also have a cross-sectional shape obtained by cutting off a part of a roughly elliptical shape. However, the use of a concave curved surface in a cross-sectional shape obtained by cutting off a part of a roughly circle makes the processing of the processing tank 10 simple, and is therefore preferred. In addition, in the processing tank 10 of the present embodiment, there is no special provision for the inner wall of the portion that is not in contact with the processing liquid 3, and it may be composed of a curved surface, or there may be a portion that is not a curved surface.

[0055] In addition, if Figure 1A As shown in the upper part of the ultrasonic treatment device 1 of this embodiment, an ultrasonic applying mechanism 20 is provided on the inner wall 101 side and the outer wall 103 side of the treatment tank 10. Figure 1AIn the embodiment, 5+4=9 ultrasonic applying mechanisms 20 are arranged along the y-axis direction on the inner wall 101 side of the processing tank 10 except near the two ends, and 3+3=6 ultrasonic applying mechanisms 20 are arranged on the outer wall 103 side near the two ends of the processing tank 10. However, the number and arrangement of the ultrasonic applying mechanisms 20 are not limited to Figure 1A In the example shown, the ultrasonic applying mechanism 20 may be appropriately set according to the shape and size of the processing tank 10. For example, the ultrasonic applying mechanism 20 may be provided only on one side of the processing tank 10, or may be provided on the other side of the processing tank 10. Figure 1A In this case, the ultrasonic applying mechanism 20 in the y-axis direction (the long axis direction of the treatment tank 10) is preferably arranged in a staggered configuration. Thus, the oscillated ultrasonic waves can be used more efficiently. In addition, when the ultrasonic applying mechanism 20 is arranged on both sides of the treatment tank 10, it can be as follows: Figure 1A The staggered arrangement shown in FIG. 1 can also be symmetrically arranged. Figure 1A As shown in FIG. 1 , the ultrasonic applying mechanism 20 may be provided along the x-axis direction of the inner wall 101 having a concave curved surface. Furthermore, the ultrasonic applying mechanism 20 may be provided only on the inner wall 101 side of the treatment tank 10 or only on the outer wall 103 side. Figure 1A In contrast, the ultrasonic applying mechanism 20 is not arranged near the two end portions of the processing tank 10, but is arranged on the inner wall 101 or the outer wall 103 of the processing tank except near the two end portions.

[0056] like Figure 1B As schematically shown, in the ultrasonic treatment device 1 of this embodiment, the ultrasonic applying mechanism 20 is arranged so that the normal line of the ultrasonic oscillation plane and the predetermined liquid level line of the treatment liquid 3 (at Figure 1B The angle θ formed by the predetermined liquid level height line and the liquid surface of the treatment liquid 3 is set to be greater than 5°. By making the oscillation surface of the ultrasonic wave of the ultrasonic applying mechanism 20 satisfy the above-mentioned relationship, the ultrasonic wave oscillates toward the liquid surface of the treatment liquid 3. As a result, the reflection efficiency of the ultrasonic wave at the liquid surface of the treatment liquid 3 is improved, and the second wave of sound waves (that is, the reflected wave of the ultrasonic wave at the liquid surface) returns to the treatment tank 10 and is further reflected at the inner wall 101 formed by the concave surface. As a result, the positions of the antinodes and nodes in the waveform of the ultrasonic wave do not further show a specific distribution, and are repeatedly reflected inside the treatment tank 10. By achieving such a propagation state of the ultrasonic wave, the propagation and uniformity of the ultrasonic wave can be further improved in the ultrasonic treatment device 1 of the present embodiment.

[0057] exist Figure 1B When the angle θ shown in FIG. 1 exceeds 80°, the object S (at Figure 1BThe probability that the ultrasonic wave (not shown) exists on the path of the first wave of the ultrasonic wave oscillating from the oscillation surface increases, and therefore the proportion of the ultrasonic wave reaching the liquid surface decreases. As a result, there is a possibility that the propagation and uniformity of the ultrasonic wave cannot be fully improved. From this point of view, in this embodiment, Figure 1B The ultrasonic applying mechanism 20 is arranged so that the angle θ shown is 80 degrees or less. The ultrasonic applying mechanism 20 preferably oscillates the ultrasonic wave toward the liquid surface instead of directly oscillating the ultrasonic wave toward the treatment object S, so that the ultrasonic wave is reflected at the liquid surface.

[0058] From the above-mentioned viewpoints, the angle θ formed by the normal line of the ultrasonic oscillation surface and the predetermined liquid level line of the treatment liquid 3 is set to 5° to 80°. The angle θ is preferably greater than 15°, more preferably greater than 25°, and further preferably greater than 30°. By setting it to such an angle, the efficiency of ultrasonic application can be further improved. On the other hand, when the angle θ exceeds 70°, there may be a possibility that the propagation and uniformity of the ultrasonic wave cannot be fully improved. The angle θ is preferably less than 70°, more preferably less than 65°, and further preferably less than 60°. By setting it to such an angle, the propagation and uniformity of the ultrasonic wave can be further improved.

[0059] In addition, in the ultrasonic treatment device 1 of the present embodiment, it is preferred that the ultrasonic applying mechanism 20 does not exist outside the range of the angle θ. In other words, it is preferred that the ultrasonic applying mechanism 20 is provided only within the range of the angle θ. By configuring the ultrasonic applying mechanism 20 in this way, the propagation and uniformity of the ultrasonic wave can be further improved.

[0060] In this embodiment, the plurality of ultrasonic applying mechanisms 20 may not have the same angle θ, but may have various angle θ values ​​within the above range. However, by setting the angle θ to the same value, installation costs can be reduced.

[0061] Figure 2A and Figure 2B It is an explanatory diagram schematically showing an example of the structure of the ultrasonic applying mechanism 20 according to the present embodiment.

[0062] like Figure 2A As shown, the ultrasonic applying mechanism 20 of this embodiment may also include, for example, an ultrasonic oscillator 201 and an ultrasonic vibrator 203. The ultrasonic oscillator 201 is a device that supplies power to the ultrasonic vibrator 203 at a desired power. In addition, the ultrasonic vibrator 203 converts the power output from the ultrasonic oscillator 201 into vibrations to oscillate ultrasonic waves of a desired frequency from an oscillation surface. By providing the ultrasonic vibrator 203 in the ultrasonic applying mechanism 20 with respect to the treatment tank 10, it is possible to oscillate ultrasonic waves relative to the treatment liquid 3.

[0063] In addition, if Figure 2B As shown, the ultrasonic applying mechanism 20 of this embodiment may also include, for example, an ultrasonic oscillator 201 and an immersion vibrator 211. Figure 2B As shown, the immersion vibrator 211 is formed by arranging a plurality of ultrasonic vibrators 203 inside a housing 205 and sealing the housing 205 by using a member formed of a predetermined material that allows ultrasonic waves to pass through so as to cover the oscillation surface of each ultrasonic vibrator 203. In this case, the member provided so as to cover the oscillation surface of each ultrasonic vibrator 203 becomes the oscillation surface of the immersion vibrator 211. In the case of the immersion vibrator 211, the interval and number of the ultrasonic vibrators 203 and the size of the oscillation surface are determined in consideration of the output stability and oscillation efficiency of ultrasonic waves. Figure 2A or Figure 2B The ultrasonic applying mechanism 20 may be provided on either or both of the inner wall 101 and the outer wall 103 .

[0064] The frequency of the ultrasonic wave output from the ultrasonic applying mechanism 20 is preferably, for example, 18 kHz to 200 kHz. When the frequency of the ultrasonic wave is less than 18 kHz, the ultrasonic wave changes to the audible range and can propagate into the liquid, but the attenuation becomes larger when propagating in the solid. Furthermore, there is a possibility that the ultrasonic wave is regarded as noise, resulting in a deterioration of the working environment. In addition, there is a situation where the propagation of the ultrasonic wave is hindered by the large-sized bubbles generated from the surface of the processed object S, resulting in a reduction in the effect of improving the processing properties of the ultrasonic wave. The frequency of the ultrasonic wave output from the ultrasonic applying mechanism 20 is more preferably above 18 kHz. On the other hand, when the frequency of the ultrasonic wave exceeds 200 kHz, there is a situation where the straightness of the ultrasonic wave becomes too strong when processing the processed object and the uniformity of the processing is reduced. The frequency of the ultrasonic wave output from the ultrasonic applying mechanism 20 is more preferably below 150 kHz, and further preferably below 100 kHz.

[0065] The frequency of the ultrasonic wave to be applied is preferably selected to an appropriate value within the above range according to the type of the object to be processed, etc., and two or more frequencies of ultrasonic waves may be applied according to the type of the object to be processed.

[0066] The ultrasonic wave applying mechanism 20 may also have a frequency sweep function that can sweep the frequency in a predetermined range around a certain selected ultrasonic wave frequency while applying the ultrasonic wave. Such a frequency sweep function can achieve the following further effects.

[0067] As a general property of ultrasonic waves, the following phenomenon is known: "When the wavelength of ultrasonic waves becomes 1 / 4 of the wavelength corresponding to the thickness of the irradiated object, the ultrasonic wave transmittance through the irradiated object is the maximum." Therefore, by applying ultrasonic waves while performing frequency scanning within an appropriate range, when the object to be treated is an object having a hollow portion such as a tubular body, for example, the ultrasonic waves transmitted into the tubular body can be increased, and the treatment efficiency of the ultrasonic treatment device 1 of this embodiment can be further improved.

[0068] In addition, in order to reliably reflect the ultrasonic wave, the inner wall 101 of the processing tank 10 is preferably formed of a material that can reflect the ultrasonic wave. More specifically, the inner wall 101 of the processing tank 10 is preferably formed of a material that has an inherent acoustic reactance of 1×10 7 kg·m -2 ·sec -1 ~2×10 8 kg·m -2 ·sec -1 The inner wall 101 is formed by using a raw material whose acoustic reactance is within the above range, and the inner wall 101 can more reliably reflect ultrasonic waves. In addition, the "raw material of the inner wall 101 of the processing tank 10" is the "raw material of the processing tank 10" when the processing tank 10 is made of one raw material (not a double-layer structure, etc.). The processing tank 10 may also be a double-layer structure, a three-layer structure, etc., in which case the "raw material of the inner wall 101 of the processing tank 10" refers to the "raw material of the inner wall 101 of the processing tank 10" as described.

[0069] As the acoustic impedance is 1×10 7 kg·m -2 ·sec -1 ~2×10 8 kg·m -2 ·sec -1 The following raw materials include, for example, various metals or metal oxides, various ceramics including non-oxide ceramics, etc. As a specific example of such raw materials, there is steel (intrinsic acoustic impedance [unit: kg·m -2 ·sec -1 ]:4.70×10 7 , below, the values ​​in brackets also represent the values ​​of inherent acoustic reactance), iron (3.78×10 7 ), nickel-chromium steel (3.98×10 7 ), stainless steel (SUS, 4.57×10 7 ), titanium (2.73×10 7 )、Zinc(3.00×10 7 ), nickel (5.35×10 7 ), aluminum (1.73×107 ), brass (4.06×10 7 ), hard aluminum (1.71×10 7 ), tungsten (1.03×10 8 ), glass (1.32×10 7 ), quartz glass (1.27×10 7 ), glass-lined (1.67×10 7 ), aluminum oxide (Al2O3, 3.84×10 7 )、ZrO2(3.91×10 7 ), silicon nitride (SiN, 3.15×10 7 ), silicon carbide (SiC, 3.92×10 7 ), tungsten carbide (WC, 9.18×10 7 ) etc. In the treatment tank 10 of the present embodiment, the raw material for forming the inner wall 101 may be appropriately selected according to the liquid property of the treatment liquid 3 to be maintained, the strength required by the treatment tank 10, etc., and various metals or metal oxides having the above-mentioned acoustic impedance are preferably used.

[0070] In addition, if Figure 1A As schematically shown, the ultrasonic treatment device 1 of the present embodiment is preferably provided with a treatment liquid circulation path 30 for circulating the treatment liquid 3 outside the treatment tank 10. The treatment liquid circulation path 30 includes, for example, an overflow portion 301 to which the treatment liquid 3 overflowing from the treatment tank 10 reaches; a partition plate 303 disposed inside the overflow portion 301; a treatment liquid suction port 305 disposed on, for example, the bottom surface of the overflow portion 301; a treatment liquid circulation pipe 307; and a treatment liquid circulation mechanism 309.

[0071] The treatment liquid 3 overflowing from the treatment tank 10 flows into the overflow portion 301, and is held by the portion of the overflow portion 301 located on the treatment tank 10 side until it reaches the height of the partition plate 303. When the treatment liquid 3 reaches the height of the partition plate 303, the treatment liquid 3 flows over the partition plate 303 to the side where the treatment liquid suction port 305 is located. The treatment liquid 3 that has reached the vicinity of the treatment liquid suction port 305 is sucked into the treatment liquid circulation pipe 307 by a treatment liquid circulation mechanism 309 such as a pump, and returns to the inside of the treatment tank 10.

[0072] In addition, a microbubble supply mechanism (not shown) for supplying microbubbles to the processing liquid may be provided in a part of the processing liquid circulation path 30. By providing the microbubble supply mechanism in the processing liquid circulation path 30, the processability of the processing liquid 3 can be further improved.

[0073] Above, while referring to Figure 1A and Figure 1B, while briefly describing the overall structure of the ultrasonic treatment device 1 according to the present embodiment.

[0074] <Regarding the Treatment Tank 10 and the Ultrasonic Wave Applying Mechanism 20>

[0075] Next, refer to Figure 1B to Figure 6 , while explaining in more detail the treatment tank 10 and the ultrasonic applying mechanism 20 in the ultrasonic treatment device 1 of the present embodiment. Figure 3 to Figure 6 It is an explanatory diagram for explaining the ultrasonic treatment device according to the present embodiment.

[0076] exist Figure 1B As shown, in the direction of the long axis of the processing tank 10 ( Figure 1B In any cross section obtained by cutting in a manner orthogonal to the y-axis direction in the processing tank 10, the depth direction ( Figure 1B z-axis direction) and the long axis direction ( Figure 1B The direction perpendicular to the y-axis in the Figure 1B The maximum inner wall distance between the processing tank 10 in the x-axis direction (in the x-axis direction) is marked as M. The maximum inner wall distance M is, for example, Figure 1B The cross-sectional shape obtained by cutting off a part of the cylindrical shape as shown corresponds to the size of the diameter of the circle constituting the cylinder. In this case, in the cross section, the direction perpendicular to the long axis direction of the processing tank 10 ( Figure 1B The liquid level predetermined line (in the x-axis direction) on Figure 1B The length M' of the liquid surface on the predetermined liquid surface height line is the same as the liquid surface of the treatment liquid 3, and is preferably more than 90% of the maximum inner wall distance M. The upper limit of the length M' of the liquid surface is not particularly specified, and may be consistent with the maximum inner wall distance M. In other words, the upper limit of the length M' of the liquid surface is 100% of the maximum inner wall distance M.

[0077] In this embodiment, as described above, emphasis is placed on reflecting the ultrasonic wave oscillating from the oscillation surface of the ultrasonic applying mechanism 20 at the liquid surface of the treatment liquid 3. From this point of view, the longer the length M' of the liquid surface is, the larger the ultrasonic wave reflection area can be achieved. Figure 1B In the case of the angle θ shown in FIG. 1 , the oscillation surface of the ultrasonic applying mechanism 20 faces the liquid surface (specifically, the normal line (of the oscillation surface) from the center of the length L of the oscillation surface intersects the predetermined line of the liquid surface of the treatment liquid), so even if the length M' of the liquid surface is shortened, the ultrasonic wave can be fully reflected at the liquid surface. Figure 1BIn the case of the angle θ shown, the oscillation surface of the ultrasonic applying mechanism 20 is more oriented toward the wall surface than toward the liquid surface, so it is preferable to maximize the length M' of the liquid surface while maintaining the ultrasonic reflection efficiency at the liquid surface. If M' / M is set to 90% or more, the ultrasonic wave oscillating from the oscillation surface directly collides with the liquid surface instead of the inner wall 101, and as a result, the ultrasonic reflection efficiency at the liquid surface becomes higher.

[0078] Based on the above viewpoint, the lower limit of the length M' of the liquid surface has been studied in depth. As a result, it has become clear that the reflection efficiency of the ultrasonic wave at the liquid surface can be maintained in an ideal state by making the length M' of the liquid surface more than 90% of the maximum inner wall distance M. Based on this viewpoint, the length M' of the liquid surface is preferably more than 90% of the maximum inner wall distance M. The length M' of the liquid surface is more preferably more than 93% of the maximum inner wall distance M, and further preferably more than 95% of the maximum inner wall distance M.

[0079] In addition, Figure 1B As shown, in the direction of the long axis of the processing tank 10 ( Figure 1B In the depth direction of the processing tank 10 ( Figure 1B In any cross section obtained by cutting the processing tank 10 in the z-axis direction, Figure 2A and Figure 2B The length of the oscillation surface of the ultrasonic applying mechanism 20 shown is marked as L. In this case, the curvature radius R of the concave surface of the inner wall 101 constituting the portion in contact with the treatment liquid 3 is preferably 1.0 to 25.0 times the length L of the oscillation surface. That is, it is preferred that R / L is 1.0 to 25.0. In the case where the curvature radius R is less than 1.0 times the length L of the oscillation surface, the distance to the object S to be processed becomes too close, and the distance for ultrasonic wave reflection at the liquid surface cannot be ensured. The curvature radius R of the concave surface of the inner wall 101 constituting the portion in contact with the treatment liquid 3 is more preferably 2.0 times or more of the length L of the oscillation surface, further preferably 3.0 times or more, and even more preferably 4.0 times or more. On the other hand, when the curvature radius R exceeds 25.0 times the length L of the oscillation surface, the distance from the ultrasonic oscillation to the liquid surface becomes longer, and therefore, diffusion of the ultrasonic wave caused by the diffraction phenomenon occurs, and the oscillating ultrasonic wave does not reach the liquid surface in its entirety, and the effect of the curvature radius is reduced. By satisfying the above relationship, the ultrasonic wave can be more reliably propagated to the entire treatment tank 10, and the ultrasonic wave can be more efficiently propagated to the treatment object S. The curvature radius R of the concave surface of the inner wall 101 constituting the portion in contact with the treatment liquid 3 is more preferably 20.0 times or less, further preferably 17.0 times or less, more preferably 14.0 times or less, and further preferably 11.0 times or less of the length L of the oscillation surface.

[0080] Among them, in the setting Figure 2A In the case of each ultrasonic vibrator 203 as shown, the length L of the oscillation surface is adjusted by changing the size of the oscillation surface of each ultrasonic vibrator 203. Figure 2B In the case of the submersible vibrator 211 shown above, the length L of the oscillation surface can be adjusted more easily by changing the number and arrangement interval of the ultrasonic vibrators 203 arranged in the housing 205 .

[0081] Generally speaking, the size of the effective vibrator when oscillating ultrasonic waves is determined at the time when the power of the ultrasonic oscillator 201 is set. Figure 2A In the case of each ultrasonic vibrator 201 shown in FIG. 1 , the length L of the oscillation surface can be fine-tuned by changing the aspect ratio, diameter, etc. of the oscillation surface, but the adjustment range is small. Figure 2A When adjusting the relationship between the length L of the oscillation surface and the radius of curvature R, it is easier to adjust the radius of curvature R within the allowable range than to adjust the length L of the oscillation surface. On the other hand, when it is difficult to change the size of the treatment tank 10, that is, R, the ultrasonic applying mechanism 20 having the length L of the oscillation surface such that R / L is within the preferred range may be used.

[0082] In addition, when the size (volume) of the processing tank 10 is set to a larger value, it is preferable to adjust the long axis direction ( Figure 1B However, even in this case, the length of the treatment tank 10 in the long axis direction is preferably set to be more than 1m. When the length in the long axis direction is less than 1m, in addition to the possibility that the size of the processed object S is excessively limited, the possibility that the difference in effect between the concave curved surface constituting the inner wall 101 and the inner wall in a general ultrasonic treatment device becomes smaller becomes higher. On the other hand, there is no particular upper limit for the length in the long axis direction. When it is extended in the long axis direction, it can be adjusted by increasing the number of ultrasonic applying mechanisms 20 configured.

[0083] In addition, it is also possible to prepare a processing tank part (not shown), the cross-sectional shapes of the cross sections obtained by cutting the processing tank 10 in the depth direction (z-axis direction) in a manner orthogonal to the long-axis direction are substantially the same, and have a predetermined length in the long-axis direction (y-axis direction) of the processing tank 10, and the processing tank 10 is configured so that the length in the long-axis direction can be changed by connecting or disassembling the processing tank parts. In this way, the processing tank 10 is set to a divisible structure, so that the length of the processing tank 10 in the long-axis direction can be adjusted more easily.

[0084] In addition, if Figure 3 As shown schematically, the ultrasonic applying mechanism 20 is preferably arranged at a position relative to the processing tank 10 so as to be able to be adjusted according to the processing object S (in Figure 3 More specifically, it is preferred that the ultrasonic applying mechanism 20 be positioned relative to the processing tank 10 so that the angle θ between the normal line of the oscillation surface and the liquid surface becomes smaller as the amount of the processed object S immersed in the processing liquid 3 increases.

[0085] like Figure 3 As shown schematically, the closer the ultrasonic applying mechanism 20 is to the bottom of the treatment tank 10 (for example, Figure 3 The larger the angle θ is (for example, Figure 3 The angle θ A ), the higher the proportion of the first wave of the ultrasonic wave that is shielded by the processed object S and does not reach the liquid surface. Therefore, by setting the ultrasonic applying mechanism 20 close to the liquid surface (for example, Figure 3 The setting position B in the embodiment of the present invention is set to reduce the angle θ (for example, Figure 3 The angle θ B ), it is possible to achieve the spread of ultrasonic waves to the object S to be processed while maintaining the proportion of the first wave reaching the liquid surface.

[0086] There is no particular limitation on the structure for changing the setting position of such an ultrasonic applying mechanism 20, and various structures can be appropriately adopted. For example, by providing a track (not shown) for moving and fixing the ultrasonic applying mechanism 20 on the inner wall 101 of the processing tank 10, the setting position of the ultrasonic applying mechanism 20 can be easily adjusted so that the angle θ becomes a desired value. In addition, if such a track mechanism is used, the proportion of space occupied in the processing tank 10 is also low, and various processing liquids 3 can be appropriately used by performing appropriate surface treatment on the track.

[0087] In addition, Figure 1A to Figure 3 In the figure, the ultrasonic applying mechanism 20 is mainly provided on the inner wall side of the treatment tank 10, but in the ultrasonic treatment device 1 of the present embodiment, it is also possible to Figure 4A The ultrasonic applying mechanism 20 is schematically shown as being arranged on the outer wall 103 side of the processing tank 10. In this case, in order to make the ultrasonic waves oscillated from the oscillation surface of the ultrasonic applying mechanism 20 propagate more reliably into the processing liquid 3, it is preferable to Figure 4A As shown, the ultrasonic applying mechanism 20 is provided in such a manner that the oscillation surface is shaped along the outer wall 103 of the processing tank 10. Figure 4A In the case shown, Figure 1BThe length L of the oscillation surface described in is the length of the arc of the oscillation surface along the outer wall 103 of the processing tank 10 .

[0088] In addition, when the ultrasonic applying mechanism 20 is set on the side of the outer wall 103 of the processing tank 10, the fixing method of the ultrasonic applying mechanism 20 is not particularly limited as long as the ultrasonic oscillation surface of the ultrasonic applying mechanism 20 can be kept in contact with the outer wall 103 of the processing tank 10.

[0089] However, when the ultrasonic applying mechanism 20 is fixed to the outer wall 103 of the treatment tank 10 via the adhesive layer 21 using various adhesives, in order to make the ultrasonic wave propagate more reliably to the treatment liquid 3, it is preferred that the thickness of the adhesive layer 21 be set to be less than 1 mm so as to be less affected by the adhesive raw material as possible. The ultrasonic vibration element portion of the ultrasonic applying mechanism 20 and the treatment tank 10 are preferably made of the same raw material or raw materials with similar inherent acoustic impedance, and are preferably fixed, bonded, or joined in a manner that does not have a gap or an air layer (including bubbles).

[0090] In addition, if Figure 5 As shown, the setting interval D of the ultrasonic applying mechanism 20 in the long axis direction (y-axis direction) of the processing tank 10 is preferably such that adjacent vibrators do not interfere with each other. In addition, there is no particular upper limit for setting the interval D, and it can be set at any interval. It can also be set in any direction (x-axis direction and y-axis direction) orthogonal to the depth direction of the processing tank 10 on the basis of maintaining the curvature radius R of the concave surface constituting the inner wall 101 to satisfy the above relationship.

[0091] As in Figure 6 The upper part of the schematic diagram shows that the treatment tank 10 of the present embodiment is preferably configured to be detachable relative to the support 40 that holds the treatment tank 10. In addition, the ultrasonic treatment device 1 of the present embodiment can also be used in a state where the treatment tank 10 is separated from the support 40 (in other words, it can also be called an independent state or a separated state), for example, by using a lifting mechanism (not shown) such as a crane to lift the treatment tank 10. By using the treatment tank 10 in such a state, the attenuation of the ultrasonic wave applied to the treatment liquid 3 can be more reliably suppressed while the object S to be treated is treated.

[0092] In addition, if Figure 6As shown in the lower part of the figure, the ultrasonic treatment device 1 of this embodiment can also be used in a state where the treatment tank 10 is held in the support 40. In this case, the ultrasonic wave that has passed through the treatment tank 10 may be attenuated at the portion in contact with the support 40 (in other words, the interface between the treatment tank 10 and the support 40). Therefore, in order to more reliably suppress the attenuation of the ultrasonic wave at the interface between the treatment tank 10 and the support 40, it is preferred that the portion of the support 40 in contact with the treatment tank 10 has an inherent acoustic reactance of 1×10 5 kg·m -2 ·sec -1 ~2×10 6 kg·m -2 ·sec -1 The following raw materials. Due to the existence of such raw materials, the difference between the inherent acoustic impedance of the raw material forming the processing tank 10 and the inherent acoustic impedance of the raw material forming the bracket 40 can be increased, and the attenuation of ultrasonic waves can be more reliably suppressed. As such raw materials, for example, silicone rubber (1×10 6 kg·m -2 ·sec -1 ), natural rubber (1.46×10 6 kg·m -2 ·sec -1 ), foamed polyethylene (1.7×10 6 kg·m -2 ·sec -1 ).

[0093] Furthermore, wood or plastic resins such as phenolic resin may be used as raw materials to form the bracket 40 itself. Although the inherent acoustic reactance of wood, phenolic resin or other plastic resins is slightly larger than that of the above-mentioned silicone rubber, natural rubber, and foamed polyethylene, they have sufficiently small inherent acoustic reactance compared to metals, and therefore, the ultrasonic attenuation at the interface between the treatment tank 10 and the bracket 40 can be more reliably suppressed.

[0094] In addition, the more parts that are in contact with the support 40, the easier it is to produce attenuation of ultrasonic waves. From this point of view, the area of ​​the contact part in the treatment tank 10 that is in contact with the support 40 is preferably 40% or less of the surface area of ​​the treatment tank 10. In addition, from the point of view of suppressing the attenuation of ultrasonic waves, the smaller the area of ​​the contact part is relative to the surface area of ​​the treatment tank 10, the better, and its lower limit is not particularly specified.

[0095] Above, while referring to Figure 1B to Figure 6 , while explaining in more detail the treatment tank 10 and the ultrasonic applying mechanism 20 in the ultrasonic treatment device 1 of the present embodiment.

[0096] As described above, according to the present embodiment, the inner wall 101 of the treatment tank 10 containing the treatment liquid 3 is a concave surface, and the ultrasonic applying mechanism 20 is arranged at a predetermined angle toward the liquid surface, so that the ultrasonic treatment device 1 can be realized in which ultrasonic waves are efficiently propagated from the entire treatment tank 10 to the treatment object S. In addition, in the ultrasonic treatment device 1, it is possible to perform efficient treatment by utilizing the reflection of ultrasonic waves from the liquid surface and the ultrasonic propagation from various angles of the inner wall 101 of the treatment tank 10 to the treatment object.

[0097] The ultrasonic treatment device 1 according to the present embodiment has been described in detail above.

[0098] Example

[0099] The ultrasonic treatment device of the present invention will be described in detail below while showing examples and comparative examples. The examples shown below are merely examples of the ultrasonic treatment device of the present invention, and the ultrasonic treatment device of the present invention is not limited to the examples shown below.

[0100] The thickness of the SUS material is 5 mm (intrinsic acoustic impedance: 4.57 × 10 7 kg·m -2 / sec -1 ) to form the processing tank 10. At this time, the depth of the processing tank 10 is ( Figure 1A The cross-sectional shape of the treatment tank 10 was changed based on the length of the y-axis direction in the treatment tank 10 being fixed to 5 m. The bracket 40 was made of steel and matched with the cross-sectional shape of the treatment tank 10. The area of ​​the outer surface of the treatment tank 10 that was in contact with the bracket 40 was set to 35%, and a 10 mm thick foamed polyethylene sheet (intrinsic acoustic impedance: 1.7×10 6 kg·m -2 ·sec -1 ) is pasted between the bracket 40 and the processing tank 10.

[0101] In Example 16 below, the case without the above-mentioned foamed polyethylene sheet was verified, in Example 17 below, the case with the contact area set to 50% was verified, and in Example 18 below, the case with the contact area set to 50% and without the above-mentioned foamed polyethylene sheet was verified. In Example 19 below, the case with the use of a phenolic resin support 40, the contact area set to 50%, and without the above-mentioned foamed polyethylene sheet was verified, and in Example 20 below, the case with the use of a wooden support 40, the contact area set to 50%, and without the above-mentioned foamed polyethylene sheet was verified.

[0102] A used waste oil well pipe with an outer diameter of 100 mm and a length of 2 to 4 m was used as the treated object S, and was immersed in a treatment tank 10 containing a treatment liquid for 3 minutes to wash away the scale remaining in the pipe. As the treatment liquid, tap water with a liquid temperature of 30° C. was used. At this time, the ratio of the length M' of the liquid surface to the maximum inner wall distance M (M' / M) was adjusted by the height of the liquid surface of the treatment liquid and was constant at 85%, 90% or 100%.

[0103] The power of the ultrasonic oscillator of the ultrasonic applying mechanism 20 is 1200W, and eight ultrasonic vibrators are fixed to the inner wall side or the outer wall side of the processing tank 10 at intervals of 0.5m. In addition, the ultrasonic vibrator of the ultrasonic applying mechanism 20 installed on the inner wall side of the processing tank 10 is Figure 2B The SUS-made immersion vibrator 211 (width 0.4m×length 0.3m×thickness 0.08m) is shown. Figure 1B The length L of the oscillation surface shown is set to 0.3m. In addition, the ultrasonic vibrator 203 of the ultrasonic applying mechanism 20 provided on the outer wall side of the processing tank 10 uses an ultrasonic vibrator with a diameter of 0.09m×thickness of 0.15m. In addition, the ultrasonic vibrator 203 provided on the outer wall side is provided at a position of 5°, 25°, 30°, 45°, 60°, 70° or 80°. In the following embodiments 9 to 11 and 14, the ultrasonic vibrators 203 are alternately arranged at the positions of 30° and 60°, 0° and 60°, or 30° and 90° with an angle θ staggered. In addition, the frequency of the applied ultrasonic wave is set to 18kHz to 192kHz.

[0104] Three used waste oil well pipes as the treated objects S were bundled and hung in the center of the treatment tank 10 by a crane and immersed in the center of the treatment tank 10. On this basis, the treatment tank 10 itself was not welded to the support 40 but placed on the support 40, and the cleaning was carried out, and the ultrasonic intensity was measured, and the cleaning evaluation was performed. In addition, in Example 6 shown below, the treatment tank 10 itself was further lifted by a crane, and the treatment tank 10 itself was separated from the support 40. The ultrasonic intensity was measured, and the cleaning evaluation was performed.

[0105] For the ultrasonic intensity measurement, an ultrasonic level meter (19001D manufactured by Japan Kaijiyo Co., Ltd.) was used to measure the ultrasonic intensity (mV) of 10 points and 2 rows in the longitudinal direction of the center of the treatment tank. In the long axis direction (y-axis direction) of the treatment tank 10, 10 points separated by a measurement interval of 0.4m along the y-axis direction from the end were used as measurement points. In the cross section (xz plane) of the treatment tank 10, two points separated by 0.2m from the cross section center position of the treatment tank 10 were used as measurement points. A total of 20 measurement points were set in the entire treatment tank 10. The 20 measured values ​​obtained were averaged and the standard deviation σ was calculated. At this time, the relative ultrasonic intensity (the measurement result of Comparative Example 1, that is, the relative intensity when the measured ultrasonic intensity is set to 1 under the premise of irradiation with the vibrator arranged on the side of the groove in the square groove and the object to be treated S is set) and the standard deviation σ were calculated to compare the propagation of ultrasonic waves to the object to be treated S and the treatment tank.

[0106] In addition, in this experimental example, the scale removal rate on the inner surface of the tube was measured, and the measured removal rate was evaluated as the water washing performance. More specifically, the scale on the inner surface of the tube before and after water washing was photographed using a fiberscope, and the scale removal rate was calculated using a binary image. The ratio of the scale removal amount removed under each condition to the remaining scale before water washing was set as the scale removal rate. The evaluation criteria for water washing performance in the following Table 1 are as follows.

[0107] Removal rate of residual oxide film

[0108] 100% or less~95% or more:A

[0109] Less than 95% to more than 90%: B

[0110] Less than 90% to more than 85%: C

[0111] Less than 85% to more than 80%: D

[0112] Less than 80% to more than 60%: E

[0113] Less than 60% to more than 40%: F

[0114] Less than 40%: G

[0115] That is, scores A, B, and C mean very good water washability, score D means good water washability, score E means slightly poor water washability, and scores F and G mean poor water washability. Scores A to D were considered acceptable.

[0116] The setting conditions of the treatment tank 10 and the ultrasonic applying mechanism 20 and the obtained results are shown in Table 1 below.

[0117] In the column of "Inner wall cross-sectional shape" in Table 1 below, "parallel" means that the bottom surface of the processing tank 10 is parallel to the liquid surface, and "inclined" means that the bottom surface of the processing tank 10 is inclined relative to the liquid surface (however, it is not a curved surface). In addition, in the column of "angle θ", "vertical" means that the ultrasonic vibrator of the ultrasonic applying mechanism 20 is set on the bottom surface of the processing tank 10 (square tank) (that is, θ = 90°), and "parallel" means that the ultrasonic vibrator (immersion vibrator 211) of the ultrasonic applying mechanism 20 is set on the side of the processing tank 10 (square tank) (that is, θ = 0°).

[0118] [Table 1]

[0119] Table 1

[0120]

[0121] As can be seen from Table 1, in the example corresponding to the comparative example of the present invention, the relative ultrasonic intensity is a relatively small value, and the cleaning performance is also unqualified. On the other hand, in the example corresponding to the embodiment of the present invention, the relative ultrasonic intensity is a large value, and the standard deviation of the ultrasonic intensity is also small, and excellent cleaning performance is shown.

[0122] The preferred embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to this example. Anyone with common knowledge in the technical field to which the present invention belongs can think of various variations or modifications within the scope of the technical ideas described in the claims, which is obvious, and these are of course understood to belong to the protection scope of the present invention.

[0123] Description of Reference Numerals

[0124] 1. Ultrasonic treatment device; 3. Treatment liquid; 10. Treatment tank; 20. Ultrasonic applying mechanism; 21. Adhesive layer; 30. Treatment liquid circulation path; 40. Bracket; 101. Inner wall; 103. Outer wall; 201. Ultrasonic oscillator; 203. Ultrasonic vibrator; 205. Shell; 211. Immersed vibrator; 301. Overflow; 303. Partition plate; 305. Treatment liquid suction port; 307. Treatment liquid circulation piping; 309. Treatment liquid circulation mechanism.

Claims

1. An ultrasonic treatment device, comprising: a processing tank capable of containing a processed object and a processing liquid for immersing the processed object; and an ultrasonic applying mechanism for applying ultrasonic waves to the treatment liquid, The processing tank has long axes with substantially the same cross-sectional shape, and the wall surface up to the predetermined liquid level line of the processing liquid is composed of a concave curved surface. The ultrasonic applying mechanism is arranged at a position where the angle (θ) formed by the normal line of the ultrasonic oscillation plane and the predetermined liquid surface line of the treatment liquid is 25° to 70° and is not arranged at a position where the angle (θ) is outside the range of 25° to 70°. In the cross-section obtained by cutting the treatment tank along a plane orthogonal to the long axis, the radius of curvature (R) of the concave surface is 1.0 to 25.0 times the length (L) of the oscillation surface of the ultrasonic applying mechanism in the cross-section, and the distance between the inner walls at the predetermined liquid level height line is more than 90% of the maximum distance between the inner walls (M) of the treatment tank in the cross-section.

2. The ultrasonic treatment device according to claim 1, wherein: A cross section obtained by cutting the processing tank along a plane perpendicular to the major axis has a shape obtained by cutting away a part of a substantially circle or a substantially ellipse.

3. The ultrasonic treatment device according to claim 1 or 2, wherein: The ultrasonic applying mechanism is provided so that a position thereof with respect to the processing tank can be changed according to a processing amount of the processed object.

4. The ultrasonic treatment device according to claim 1 or 2, wherein: The processing tank is constructed so that the length of the processing tank in a direction parallel to the long axis can be made variable by connecting or disassembling processing tank parts, and the cross-sectional shapes of the cross sections of the processing tank parts obtained by cutting in a direction orthogonal to the long axis are substantially the same.

5. The ultrasonic treatment device according to claim 1 or 2, wherein: The processing tank is attachable to and detachable from a bracket that holds the processing tank.

6. The ultrasonic treatment device according to claim 1 or 2, wherein: The inherent acoustic impedance of the portion of the support holding the processing tank in contact with the processing tank is 1×10 5 kg·m -2 ·sec -1 ~2×10 6 kg·m -2 ·sec -1 of raw materials.

7. The ultrasonic treatment device according to claim 1 or 2, wherein: The area of ​​the contact portion of the processing tank that contacts the support is less than 40% of the area of ​​the outer surface of the processing tank.

8. The ultrasonic treatment device according to claim 1 or 2, wherein: The processing tank is used in a state separated from the support.

9. The ultrasonic treatment device according to claim 1 or 2, wherein: A treatment liquid circulation path for circulating the treatment liquid is provided outside the treatment tank.

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