A polishing liquid concentration online measuring device and polishing liquid supply system

Abstract

The invention discloses an online measuring device for polishing liquid concentration and a polishing liquid supply system, comprising: a sampling dish for obtaining polishing liquid online; a lifting mechanism connected to the sampling dish and used to drive the sampling dish to lift; the lifting mechanism is used to be arranged in a polishing liquid container so that the sampling dish can be immersed below the liquid surface of the polishing liquid container; a force sensor is connected between the sampling dish and the lifting mechanism; a controller is respectively connected to the lifting mechanism and the force sensor, and the controller pre-stores the volume of the sampling dish and the density of water, and is used to calculate the concentration of the polishing liquid according to the detection signal of the force sensor, the volume of the sampling dish and the density of water when the lifting mechanism lifts the sampling dish above the liquid surface. The online measurement of the polishing liquid concentration can be realized, which is conducive to real-time online monitoring of the polishing liquid concentration during the entire polishing process, thereby improving the polishing quality and efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of polishing liquid concentration detection, and more specifically, to an online polishing liquid concentration measuring device. In addition, the present invention also relates to a polishing liquid supply system including the above-mentioned online polishing liquid concentration measuring device. Background Art

[0002] In the field of inertial confinement fusion research, large-scale high-power laser devices have important applications. High-power laser devices put forward requirements close to the manufacturing limit level in terms of the number and quality of large-aperture optical elements.

[0003] Polishing fluid is one of the indispensable and important materials in the ultra-precision polishing system of optical components. Its parameters directly affect the surface quality and processing efficiency of optical components. For example, the concentration parameters of the polishing fluid are closely related to the removal efficiency, surface scratches, etc. Therefore, the concentration measurement of the polishing fluid is very important.

[0004] In the prior art, an off-line measurement method is adopted, that is, after manual timed sampling, the sampled polishing liquid is evaporated, and then the evaporated solid particles are weighed, and the polishing liquid concentration is calculated after weighing.

[0005] However, this offline measurement method requires deep human intervention, manual extraction of polishing liquid and offline processing, which is cumbersome and time-poor, and brings many inconveniences to the measurement of polishing liquid concentration.

[0006] In summary, how to provide an online measurement device for polishing liquid concentration to achieve online measurement of polishing liquid concentration is a problem that needs to be solved urgently by those skilled in the art. Summary of the invention

[0007] In view of this, an object of the present invention is to provide an online measurement device for polishing liquid concentration, which can realize online measurement of polishing liquid concentration.

[0008] Another object of the present invention is to provide a polishing liquid supply system including the above-mentioned polishing liquid concentration online measuring device, which can realize real-time online monitoring of the polishing liquid concentration.

[0009] In order to achieve the above object, the present invention provides the following technical solutions:

[0010] A polishing liquid concentration online measuring device, comprising:

[0011] Sampling dish, used to obtain polishing liquid online;

[0012] A lifting mechanism connected to the sampling dish and used to drive the sampling dish to rise and fall; the lifting mechanism is used to be arranged in the polishing liquid container so that the sampling dish can be immersed below the liquid surface of the polishing liquid container;

[0013] A force sensor connected between the sampling dish and the lifting mechanism;

[0014] A controller is connected to the lifting mechanism and the force sensor, respectively. The controller pre-stores the volume of the sampling dish and the density of water, and is used to calculate the concentration of the polishing liquid based on the detection signal of the force sensor, the volume of the sampling dish and the density of water when the lifting mechanism lifts the sampling dish above the liquid surface.

[0015] Optionally, it also includes:

[0016] A temperature sensor is disposed inside the sampling dish and is used to detect the temperature of the polishing liquid obtained by the sampling dish, and the temperature sensor is connected to the controller;

[0017] The controller also pre-stores a corresponding relationship between temperature and water density, and the controller is further used to obtain the water density corresponding to the temperature value according to the temperature value detected by the temperature sensor and the corresponding relationship.

[0018] Optionally, the lifting mechanism comprises:

[0019] A lead screw shaft connected to the sampling dish through the force sensor;

[0020] A nut gear, threadedly connected to the screw shaft;

[0021] A driving gear meshes with the nut gear for transmission;

[0022] A rotation driving mechanism, connected to the driving gear and the controller respectively, and used to drive the driving gear to rotate;

[0023] The anti-rotation device can slide relatively with the screw shaft along the lifting direction of the screw shaft, and limits the screw shaft along the circumferential direction of the screw shaft.

[0024] Optionally, a base is further included, and the nut gear, the rotation drive mechanism and the anti-rotation device are all installed on the base, and the base is used to be installed in the polishing liquid container.

[0025] Optionally, one of the detent and the screw shaft is provided with a long groove, and the other is provided with a protrusion extending into the long groove.

[0026] Optionally, the screw shaft is connected to the base via a sliding bearing.

[0027] Optionally, a telescopic sealing tube is connected between the base and the sampling dish, the force sensor and the lead screw shaft are respectively located in the telescopic sealing tube, and the telescopic direction of the telescopic sealing tube is the lifting direction of the sampling dish.

[0028] Optionally, both ends of the nut gear are connected to the base via support bearings respectively.

[0029] Optionally, the base comprises:

[0030] A seat body, the top of which is open, wherein the screw nut gear, the driving gear, the rotary drive mechanism and the anti-rotation device are all arranged inside the seat body;

[0031] The end cover is arranged on the top of the seat body.

[0032] A polishing liquid supply system includes a polishing liquid container and any one of the above-mentioned online polishing liquid concentration measuring devices. The lifting mechanism of the online polishing liquid concentration measuring device is arranged in the polishing liquid container so that the sampling dish of the online polishing liquid concentration measuring device can be immersed below the liquid surface of the polishing liquid container.

[0033] The polishing liquid concentration online measuring device provided by the present invention is installed in the polishing liquid container when in use. When the polishing liquid concentration needs to be measured, the controller controls the lifting mechanism to drive the sampling dish to move upward, so that the sampling dish floats out of the liquid surface and is located above the liquid surface. At this time, the sampling dish is full of polishing liquid. The force sensor measures the weight of the polishing liquid filled in the sampling dish and transmits the weight to the controller. The controller can calculate the concentration of the polishing liquid according to the weight, the volume of the sampling dish and the density of water, so as to realize the online measurement of the polishing liquid concentration. When one collection is completed, the controller controls the lifting mechanism to drive the sampling dish to immerse below the liquid surface of the polishing liquid container, and makes the sampling dish move up and down quickly below the liquid surface, so as to fully mix the original liquid in the sampling dish with other liquids in the polishing liquid container, so as to prepare for the next online sampling.

[0034] It can be seen that the polishing liquid concentration online measurement device can be directly applied to the polishing liquid supply system to perform real-time online monitoring of the polishing liquid concentration during the entire polishing process, thereby improving the polishing quality and efficiency.

[0035] The polishing liquid supply system provided by the present invention includes the above-mentioned polishing liquid concentration online measuring device and has the above-mentioned beneficial effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0037] Figure 1 A schematic structural diagram of an online polishing liquid concentration measurement device provided in a specific embodiment of the present invention.

[0038] Figure 1 The reference numerals in the figures are as follows:

[0039] 1 is a sampling dish, 2 is a force sensor, 3 is a temperature sensor, 41 is a lead screw shaft, 42 is a screw nut gear, 43 is a driving gear, 44 is a rotary drive mechanism, 45 is a stopper, 46 is a base, 461 is a seat body, 462 is an end cover, 47 is a sliding bearing, 48 is a telescopic sealing tube, and 49 is a supporting bearing. DETAILED DESCRIPTION

[0040] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0041] The core of the present invention is to provide an online measuring device for polishing liquid concentration, which can realize online measurement of polishing liquid concentration. Another core of the present invention is to provide a polishing liquid supply system including the above-mentioned online measuring device for polishing liquid concentration, which can realize real-time online monitoring of polishing liquid concentration.

[0042] Please refer to Figure 1 , which is a schematic diagram of the structure of an online measurement device for polishing liquid concentration provided in a specific embodiment of the present invention.

[0043] An embodiment of the present invention provides an online measurement device for the concentration of a polishing liquid, comprising a sampling dish 1, a lifting mechanism, a force sensor 2 and a controller; the sampling dish 1 is used to obtain the polishing liquid online; the lifting mechanism is connected to the sampling dish 1 and is used to drive the sampling dish to rise and fall; the lifting mechanism is used to be arranged in a polishing liquid container so that the sampling dish 1 can be immersed below the liquid surface of the polishing liquid container; the force sensor 2 is connected between the sampling dish 1 and the lifting mechanism; the controller is respectively connected to the lifting mechanism and the force sensor 2, and the controller pre-stores the volume of the sampling dish 1 and the density of water, and is used to calculate the concentration of the polishing liquid according to the detection signal of the force sensor 2, the volume of the sampling dish 1 and the density of water when the lifting mechanism lifts the sampling dish 1 above the liquid surface.

[0044] When in use, the online measuring device for the polishing liquid concentration is installed in the polishing liquid container. When the polishing liquid concentration needs to be measured, the controller controls the action of the lifting mechanism to drive the sampling dish 1 to move upward, so that the sampling dish 1 floats out of the liquid surface and is located above the liquid surface. At this time, the sampling dish 1 is full of polishing liquid, and the force sensor 2 measures the weight of the polishing liquid in the sampling dish 1 and transmits the weight to the controller. The controller can calculate the concentration of the polishing liquid based on the weight, the volume of the sampling dish 1 and the density of water.

[0045] It is understandable that the method by which the controller calculates the concentration of the polishing liquid according to the weight of the polishing liquid in the sampling dish 1, the volume of the sampling dish 1 and the density of water belongs to the prior art. Specifically, the mass of the polishing liquid in the sampling dish 1 is defined as m1, the volume of the sampling dish 1 is defined as V, and the density of water is defined as ρ0. If the sampling dish 1 is filled with water without adding polishing material, the mass of the water in the sampling dish 1 is m0. Since the volume of the polishing material remains almost unchanged after being dissolved in the water, the concentration of the polishing liquid can be calculated according to the following formula:

[0046]

[0047] The mass m1 of the polishing liquid in the sampling dish 1 can be obtained according to the weight of the polishing liquid filled in the sampling dish 1 measured by the force sensor 2 .

[0048] It can be seen that the embodiment of the present invention applies the above calculation method to the controller, and through the polishing liquid concentration online measurement device, the online measurement of the polishing liquid concentration can be achieved. When one collection is completed, the controller controls the lifting mechanism to drive the sampling dish 1 to immerse below the liquid surface of the polishing liquid container, and quickly move the sampling dish 1 up and down below the liquid surface, so as to fully mix the original liquid in the sampling dish 1 with other liquids in the polishing liquid container, and prepare for the next online sampling. That is, the polishing liquid concentration online measurement device can be directly applied to the polishing liquid supply system to perform real-time online monitoring of the polishing liquid concentration during the entire polishing process, thereby improving the polishing quality and efficiency.

[0049] In addition, considering that the temperature of the polishing liquid is different, the corresponding water density is different. Therefore, in order to achieve density compensation, in some embodiments, the online measurement device for the polishing liquid concentration also includes a temperature sensor 3. The temperature sensor 3 is arranged inside the sampling dish 1, and is used to detect the temperature of the polishing liquid obtained by the sampling dish 1. The temperature sensor 3 is connected to the controller to transmit the temperature value detected by the temperature sensor 3 to the controller. The controller also pre-stores the corresponding relationship between the temperature and the density of water. The controller is also used to obtain the density of water corresponding to the temperature value according to the temperature value detected by the temperature sensor 3 and the corresponding relationship between the temperature and the density of water, so as to achieve compensation for the density of water, so that the measurement result is more accurate.

[0050] It should be noted that the above embodiment does not limit the specific connection method of the force sensor 2 with the sampling dish 1 and the lifting mechanism, as long as the connection of the force sensor 2 with the sampling dish 1 and the lifting mechanism can be achieved. In some embodiments, the force sensor 2 is fixed to the sampling dish 1 and the lifting mechanism respectively by threaded connection.

[0051] In addition, the above embodiments do not limit the fixing method of the temperature sensor 3 . In some embodiments, the temperature sensor 3 is adhered to the inner wall of the sampling dish 1 .

[0052] It should be noted that the above embodiment does not limit the specific structure of the lifting mechanism, as long as the lifting of the sampling dish 1 can be achieved.

[0053] In some embodiments, the lifting mechanism includes a screw shaft 41, a screw nut gear 42, a driving gear 43, a rotation drive mechanism 44 and a stopper 45. The screw shaft 41 is connected to the sampling dish 1 through the force sensor 2; the screw nut gear 42 is threadedly connected to the screw shaft 41; the driving gear 43 is meshed with the screw nut gear 42 for transmission; the rotation drive mechanism 44 is respectively connected to the driving gear 43 and the controller, and is used to drive the driving gear 43 to rotate; the stopper 45 can slide relative to the screw shaft 41 along the lifting direction of the screw shaft 41, and limit the screw shaft 41 along the circumference of the screw shaft 41, that is, the stopper 45 limits the rotation of the screw shaft 41, so that the screw shaft 41 only rises and falls, and does not rotate.

[0054] When the polishing liquid concentration needs to be measured, the controller controls the rotation drive mechanism 44 to rotate, so that the rotation drive mechanism 44 drives the driving gear 43 to rotate, and the driving gear 43 drives the screw gear 42 to rotate, so that the internal thread of the screw gear 42 pushes the screw shaft 41 to move upward in a straight line, and lifts the sampling dish 1. When one collection is completed, the controller controls the rotation drive mechanism 44 to rotate in the opposite direction, and through the transmission of the driving gear 43, the screw gear 42 and the screw shaft 41, the sampling dish 1 is lowered and sunk below the liquid surface of the polishing liquid container; and by controlling the rotation drive mechanism 44 to rotate forward and reverse, the sampling dish 1 is moved up and down quickly below the liquid surface, so that the original liquid in the sampling dish 1 is fully mixed with other liquids in the polishing liquid container.

[0055] In some embodiments, the rotation driving mechanism 44 is a servo motor, and the driving gear 43 is mounted on the output shaft of the servo motor.

[0056] Considering the convenience of installing the polishing liquid concentration online measuring device, in some embodiments, the polishing liquid concentration online measuring device further includes a base 46, and the screw nut gear 42, the rotation drive mechanism 44 and the stopper 45 are all installed on the base 46, and the base 46 is used to be installed in the polishing liquid container. That is, the base 46 plays the role of installing and carrying the screw nut gear 42, the rotation drive mechanism 44 and the stopper 45, and at the same time, it also plays the role of fixing the entire polishing liquid concentration online measuring device.

[0057] In addition, the present embodiment does not limit the specific matching structure between the stopper 45 and the screw shaft 41, as long as the stopper 45 can play a limiting role. In some embodiments, one of the stopper 45 and the screw shaft 41 is provided with a long slot, and the other is provided with a protrusion extending into the long slot. It can be understood that the long slot has a certain length to meet the lifting and lowering stroke requirements of the screw shaft 41, and when the screw shaft 41 is lifted or lowered, the protrusion can slide in the long slot; in addition, under the matching limit of the protrusion and the long slot, the screw shaft 41 can be prevented from rotating.

[0058] In some embodiments, the screw shaft 41 is provided with a long slot, and the detent 45 is provided with a protrusion for extending into the long slot.

[0059] Considering the stability of the lifting and lowering of the screw shaft 41, in some embodiments, the screw shaft 41 is connected to the base 46 through a sliding bearing 47. That is to say, in this embodiment, the screw shaft 41 is not only supported on the screw mother gear 42, but also supported on the base 46 through the sliding bearing 47. When the screw shaft 41 is lifted and lowered, the screw shaft 41 slides relative to the sliding bearing 47, and the sliding bearing 47 can guide the lifting and lowering movement of the screw shaft 41, so that the movement of the screw shaft 41 is stable.

[0060] In addition, in order to prevent the force sensor 2 and the lead screw shaft 41 from being exposed, in some embodiments, a telescopic sealing tube 48 is connected between the base 46 and the sampling dish 1, and the force sensor 2 and the lead screw shaft 41 are respectively located in the telescopic sealing tube 48, and the telescopic direction of the telescopic sealing tube 48 is the lifting direction of the sampling dish 1. In other words, the present embodiment realizes the sealing of the force sensor 2 and the lead screw shaft 41 by providing the telescopic sealing tube 48, which has a certain protective effect on the force sensor 2 on the one hand, and on the other hand, realizes the sealing of the lead screw shaft 41 (moving part) to ensure the reliability of the lifting and lowering of the lead screw shaft 41.

[0061] In some embodiments, two ends of the telescopic sealing tube 48 are bonded to the bottom of the sampling dish 1 and the base 46 respectively.

[0062] In addition, considering the reliability of the rotation of the nut gear 42 , in some embodiments, both ends of the nut gear 42 are connected to the base 46 via support bearings 49 to ensure the rotation of the nut gear 42 .

[0063] In addition, in the above-mentioned embodiments, the specific structure of the base 46 is not limited.

[0064] In order to achieve sealing of the moving parts, in some embodiments, the base 46 includes a seat body 461 and an end cover 462. The top of the seat body 461 is open, and the nut gear 42, the driving gear 43, the rotation drive mechanism 44 and the stopper 45 are all arranged inside the seat body 461; the end cover 462 is covered on the top of the seat body 461 to protect the nut gear 42, the driving gear 43, the rotation drive mechanism 44 and the stopper 45.

[0065] In addition to the above-mentioned online measuring device for polishing liquid concentration, the present invention also provides a polishing liquid supply system including the online measuring device for polishing liquid concentration disclosed in the above-mentioned embodiment, the polishing liquid supply system also includes a polishing liquid container, and the lifting mechanism of the online measuring device for polishing liquid concentration is arranged in the polishing liquid container so that the sampling dish 1 of the online measuring device for polishing liquid concentration is immersed below the liquid surface of the polishing liquid container. Please refer to the prior art for the structure of other parts of the polishing liquid supply system, which will not be repeated in this article.

[0066] The focus of this embodiment is to apply the polishing liquid concentration online measurement device disclosed in any of the above embodiments in the polishing liquid container of the polishing liquid supply system to realize real-time online monitoring of the polishing liquid concentration during the entire polishing process, thereby improving the polishing quality and efficiency.

[0067] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0068] The above is a detailed introduction to the polishing liquid concentration online measuring device and the polishing liquid supply system provided by the present invention. This article uses specific examples to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the present invention, the present invention can also be improved and modified, and these improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. A polishing liquid concentration online measurement device, characterized in that: include: A sampling dish (1), used for obtaining polishing liquid online; A lifting mechanism connected to the sampling dish (1) and used for driving the sampling dish (1) to move up and down; the lifting mechanism is used to be arranged in the polishing liquid container so that the sampling dish (1) can be immersed below the liquid surface of the polishing liquid container; A force sensor (2) connected between the sampling dish (1) and the lifting mechanism; a controller connected to the lifting mechanism and the force sensor (2), respectively; the controller pre-stores the volume of the sampling dish (1) and the density of water, and is used to calculate the concentration of the polishing liquid based on the detection signal of the force sensor (2), the volume of the sampling dish (1) and the density of water when the lifting mechanism lifts the sampling dish (1) above the liquid surface; The lifting mechanism comprises: A lead screw shaft (41) connected to the sampling dish (1) via the force sensor (2); A screw nut gear (42) threadedly connected to the screw shaft (41); A driving gear (43) meshes with the screw nut gear (42) for transmission; A rotation driving mechanism (44), connected to the driving gear (43) and the controller respectively, and used for driving the driving gear (43) to rotate; A rotation stopper (45) is slidable relative to the screw shaft (41) along the lifting direction of the screw shaft (41) and limits the screw shaft (41) along the circumferential direction of the screw shaft (41); A base (46), the screw gear (42), the rotation drive mechanism (44) and the anti-rotation device (45) are all installed on the base (46), and the base (46) is used to be installed in the polishing liquid container; The screw shaft (41) is connected to the base (46) via a sliding bearing (47); A telescopic sealing tube (48) is connected between the base (46) and the sampling dish (1), the force sensor (2) and the lead screw shaft (41) are respectively located in the telescopic sealing tube (48), and the telescopic direction of the telescopic sealing tube (48) is the lifting direction of the sampling dish (1); The controller calculates the concentration of the polishing liquid according to the following formula: Wherein, m1 is the mass of the polishing liquid in the sampling dish (1), V is the volume of the sampling dish (1), ρ0 is the density of water, and m0 is the mass of the water in the sampling dish (1) when the sampling dish (1) is filled with water without adding polishing material; m1 is obtained by the weight of the polishing liquid in the sampling dish (1) measured by the force sensor (2).

2. The polishing liquid concentration online measuring device according to claim 1, characterized in that: Also includes: A temperature sensor (3) is arranged inside the sampling dish (1) and is used to detect the temperature of the polishing liquid obtained by the sampling dish (1); the temperature sensor (3) is connected to the controller; The controller also pre-stores a corresponding relationship between temperature and water density, and is further used to obtain the water density corresponding to the temperature value based on the temperature value detected by the temperature sensor (3) and the corresponding relationship.

3. The polishing liquid concentration online measuring device according to claim 1 or 2, characterized in that: One of the detent (45) and the screw shaft (41) is provided with a long groove, and the other is provided with a protrusion extending into the long groove.

4. The polishing liquid concentration online measuring device according to claim 1 or 2, characterized in that: Both ends of the nut gear (42) are connected to the base (46) via support bearings (49) respectively.

5. The polishing liquid concentration online measuring device according to claim 1 or 2, characterized in that: The base (46) comprises: The seat body (461) has an open top, and the screw thread gear (42), the driving gear (43), the rotation drive mechanism (44) and the anti-rotation device (45) are all arranged inside the seat body (461); The end cover (462) is disposed on the top of the base body (461).

6. A polishing liquid supply system, comprising a polishing liquid container, characterized in that: It also includes the polishing liquid concentration online measuring device according to any one of claims 1 to 5, wherein the lifting mechanism of the polishing liquid concentration online measuring device is arranged in the polishing liquid container so that the sampling dish (1) of the polishing liquid concentration online measuring device is immersed below the liquid surface of the polishing liquid container.

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