Probe tower structure for chip testing with height conveniently adjusted

By designing grooves and mounting holes for the base and fixing seat in the probe tower structure, and combining inclined grooves with roller bearings, the problems of complex probe tower structure and inconvenient height adjustment are solved, thus achieving stable installation of the probe and convenient height adjustment.

CN114994515BActive Publication Date: 2025-12-05HUIKEN TECH CO LTD
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Patent Information

Application Number
CN202210826512.8
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-07-13
Publication Date
2025-12-05
Estimated Expiration
2042-07-13

AI Technical Summary

Technical Problem

Existing probe towers have complex structures, difficult probe mounting plates, and difficult probe insertion. They are also inconvenient to adjust in height and can easily damage the chip.

Method used

A probe tower structure including a base and a mounting base was designed. Multiple grooves and mounting holes were set on the base and the mounting base to realize the assembly and positioning of the probe fixing plate. The inclined groove and roller bearing are used to facilitate height adjustment.

Benefits of technology

It simplifies the manufacturing process of the probe mounting plate, improves the probe insertion efficiency, avoids probe damage and chip crushing, and enables highly convenient adjustment.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application discloses a probe tower structure for chip testing with height convenient to adjust, which comprises a base, a fixing seat connected below the base, two third grooves and two fifth grooves formed on the upper surface of the base, a first mounting hole arranged in the third groove, a second mounting hole arranged in the fifth groove, two third mounting holes and two fourth mounting holes arranged on the fixing seat, a first bottom plate arranged in the third groove, a plurality of first probe fixing plates connected below the first bottom plate, a plurality of first probe insertion holes arranged on the first bottom plate and the first probe fixing plates, a second bottom plate arranged in the fifth groove, a plurality of second probe fixing plates connected below the second bottom plate, a plurality of second probe insertion holes arranged on the second bottom plate and the second probe fixing plates, probes inserted into the first probe insertion holes and the second probe insertion holes, and a plurality of up-and-down inclined inclined grooves arranged on the side of the fixing seat. The probe tower structure is convenient and simple to adjust in height.
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Description

Technical Field

[0001] This invention relates to the field of chip testing technology, specifically to a chip testing probe tower structure with easily adjustable height. Background Technology

[0002] With the rapid development of technology, the chip industry is growing at an increasingly fast pace. Miniaturization and multifunctionality are the development trends of the modern chip industry. Since chip manufacturing involves hundreds of steps, errors in any step can lead to device failure; therefore, chip testing is crucial. Chip testing requires placing the chip on a testing machine for inspection. Existing testing machines include a testing platform, a lower coupling plate, an upper coupling plate, and a test head. A probe tower is installed below the test head, and the chip is tested using probes mounted on the probe tower. However, existing probe tower structures are complex, the probe mounting plate is difficult to manufacture, probe insertion is challenging, and the height of the probe tower is often adjusted via the test head during chip testing, which is inconvenient and can easily damage the chip and probes. Summary of the Invention

[0003] The purpose of this invention is to provide a probe tower structure for chip testing with easily adjustable height, so as to solve the problems mentioned in the background art.

[0004] To achieve the above objectives, the present invention provides the following technical solution: a chip testing probe tower structure with easily adjustable height, comprising a base, a fixing seat connected below the base, and a through-hole formed in the middle of both the base and the fixing seat. Two third grooves and two fifth grooves are formed on the upper surface of the base. The two third grooves are symmetrically arranged on both sides of the through-hole of the base, and the two fifth grooves are located in the middle of the two third grooves and at opposite ends of the third grooves. Each third groove contains a first mounting hole penetrating the base, and each fifth groove contains a second mounting hole penetrating the base. The fixing seat has two third mounting holes corresponding to the two first mounting holes. The mounting base has two fourth mounting holes corresponding to the two second mounting holes. A first base plate is installed in the third groove. Multiple first probe fixing plates are connected below the first base plate. The multiple first probe fixing plates are respectively installed in the first mounting holes and the third mounting holes. Both the first base plate and the first probe fixing plates have multiple first probe insertion holes. A second base plate is installed in the fifth groove. Multiple second probe fixing plates are connected below the second base plate. The multiple second probe fixing plates are respectively installed in the second mounting holes and the fourth mounting holes. Both the second base plate and the second probe fixing plates have multiple second probe insertion holes. Probes are inserted into both the first probe insertion holes and the second probe insertion holes. The side of the mounting base has multiple vertically inclined grooves.

[0005] Further preferably, a plurality of fourth grooves are provided along the inner sidewall of the first mounting hole, and a plurality of seventh grooves that cooperate with the fourth grooves are provided along the inner sidewall of the third mounting hole, which facilitates the positioning and limiting of the first probe fixing plate and prevents the first probe fixing plate from shaking in the first mounting hole and the third mounting hole.

[0006] Further preferably, each of the first probe fixing plates has multiple protruding ridges on its outer side wall that cooperate with the fourth and seventh grooves to ensure that the first probe fixing plate is firmly fixed.

[0007] Further preferably, the fourth groove, the seventh groove, and the protrusion are all designed with an arc shape to facilitate the installation of the first probe fixing plate; the protrusion and the first base plate are provided with corresponding through first connecting holes for connecting the first probe fixing plate and the first base plate.

[0008] Further preferably, both the second base plate and the second probe fixing plate are provided with multiple corresponding through second connecting holes to realize the connection between the second base plate and the second probe fixing plate; both the first connecting hole and the second connecting hole are provided with bolts, and bolt connection is adopted, which is simple and convenient.

[0009] Further preferably, the upper surface of the base is provided with a first groove, the first groove is provided with a second groove, and the third and fifth grooves are both provided in the second groove. Through the structure of the first and second grooves, it is ensured that the installation of the first base plate and the second base plate will not hinder the connection between the base and the chip test head, and the connection of the base is guaranteed to be stable.

[0010] Further preferably, the length of the third groove is greater than the length of the fifth groove, and multiple sixth grooves are provided on the sides of the two third grooves away from the center hole of the base. The sixth grooves are connected to the third grooves and are used for the installation of the limiting block to limit the first base plate installed in the third groove and ensure that the first base plate is firmly fixed.

[0011] Further preferably, each of the plurality of sixth grooves is provided with a circular first positioning hole for positioning the limiting block installed in the sixth groove; the fixed base is provided with a plurality of second positioning holes that cooperate with the first positioning holes for connecting and positioning the base and the fixed base.

[0012] Further preferably, the fixing base has a circular structure, and the inclined groove is provided on the side of the fixing base. There are four inclined grooves, which are evenly arranged along the circumference of the fixing base. The fixing base has an opening at the lower end of the inclined groove that communicates with the inclined groove. The inclined groove structure enables connection with the roller bearing on the upper coupling plate of the chip tester, thereby adjusting the height of the fixing base to achieve the chip testing height. The four inclined grooves ensure smooth lifting and lowering of the fixing base, and the opening facilitates the insertion of the roller bearing into the inclined groove, which is convenient for the assembly of the probe tower structure with the upper coupling plate.

[0013] Further preferably, the base is a rectangular structure, and the central hole of the base and the fixing seat is a rectangular hole, which maximizes the clearance space and ensures that the chip will not be damaged by pressure; multiple limiting pins are provided below the fixing seat to limit the fixing seat and the upper coupling plate of the test machine when the height of the fixing seat is adjusted, so as to prevent the chip and probe from being damaged by pressure.

[0014] Beneficial effects: The chip testing probe tower structure of the present invention, which allows for convenient height adjustment, assembles the first base plate and multiple first probe fixing plates into a single unit, and the second base plate and multiple second probe fixing plates into a single unit. This facilitates the installation and fixing of probes, and also simplifies the processing of the first and second probe fixing plates, reducing the processing difficulty of the multiple first probe insertion holes on the first probe fixing plate and the multiple second probe insertion holes on the second probe fixing plate. Simultaneously, it facilitates the insertion of probes into the holes of the first and second probe insertion holes, ensuring that the probes do not bend during insertion. The insertion process is simplified, effectively improving probe insertion efficiency. Multiple first and second probe fixing plates create obstacles between the probes, ensuring their fixation and preventing them from sliding or falling. This eliminates the need for additional fixing structures, reducing the processing and assembly difficulty of the probe tower structure. The inclined groove design ensures stable mounting of the fixing base, smooth lifting, and prevents damage to the chip and probes. The height of the fixing base can be adjusted by rolling the roller bearing within the inclined groove, thus achieving the overall height adjustment of the probe tower structure to meet the requirements for chip testing. Height adjustment is convenient and simple. Attached Figure Description

[0015] Figure 1 This is an exploded structural diagram of a chip testing probe tower structure with easily adjustable height disclosed in an embodiment of the present invention;

[0016] Figure 2 This is an isometric structural diagram of a chip testing probe tower structure with easily adjustable height disclosed in an embodiment of the present invention.

[0017] Figure 3 This is a bottom view of the chip testing probe tower structure with easily adjustable height disclosed in an embodiment of the present invention.

[0018] Figure 4 This is a schematic diagram of the mating structure of the base and the fixing seat as disclosed in the embodiments of the present invention;

[0019] Figure 5 This is a schematic diagram of the cooperation between the base and the fixed seat as disclosed in an embodiment of the present invention from another angle;

[0020] Figure 6 This is a schematic diagram of the assembly structure of the first base plate, the first probe fixing plate, and the probe disclosed in the embodiments of the present invention;

[0021] Figure 7 As disclosed in the embodiments of the present invention Figure 6 Enlarged structural diagram at point A;

[0022] Figure 8 This is a schematic diagram of the assembly structure of the second base plate, the second probe fixing plate, and the probe disclosed in the embodiments of the present invention;

[0023] Figure 9 This is a schematic diagram of the assembly structure of the probe tower and the roller bearing disclosed in the embodiment of the present invention.

[0024] Reference numerals: 1-Base, 11-First groove, 12-Second groove, 13-Third groove, 14-First mounting hole, 15-Fourth groove, 16-Fifth groove, 17-Second mounting hole, 18-Sixth groove, 19-First positioning hole, 2-Fixed seat, 21-Third mounting hole, 22-Seventh groove, 23-Fourth mounting hole, 24-Second positioning hole, 25-Slanted groove, 26-Opening, 3-First base plate, 4-First probe fixing plate, 41-First probe insertion hole, 42-Protruding ridge, 43-First connecting hole, 5-Second base plate, 6-Second probe fixing plate, 61-Second probe insertion hole, 62-Second connecting hole, 7-Probe, 8-Bolt, 9-Roller bearing. Detailed Implementation

[0025] The following are specific embodiments of the present invention, which are described in conjunction with the accompanying drawings. However, the present invention is not limited to these embodiments.

[0026] like Figure 1-9As shown, a chip testing probe tower structure with adjustable height includes a base 1 and a mounting base 2 connected to the bottom of the base 1. Both the base 1 and the mounting base 2 have a central hole with a rectangular structure extending vertically through the center. The base 1 is used to connect to the chip testing head, and the mounting base 2 is used to mount the probe 7. The central holes on the base 1 and the mounting base 2 ensure that the chip is not damaged during testing. The upper surface of the base 1 has two third grooves 13 and two fifth grooves 16. The third grooves 13 have a first mounting hole 14 penetrating the base 1, and the fifth grooves 16 have a second mounting hole 17 penetrating the base 1. The mounting base 2 has two third mounting holes 21 and two fourth mounting holes 23. The two first mounting holes 14 and the two third mounting holes 21 are vertically aligned, and the two second mounting holes 17 and the two fourth mounting holes 23 are vertically aligned. The first base plate 3 is installed and positioned through the third groove 13, the second base plate 5 is installed and positioned through the fifth groove 16, the multiple first probe fixing plates 4 are installed and positioned through the first mounting holes 14 and the third mounting holes 21, and the multiple second probe fixing plates 6 are installed and positioned through the second mounting holes 17 and the fourth mounting holes 23.

[0027] In this application, the first base plate 3 is used to connect multiple first probe fixing plates 4 and is integrated with the multiple first probe fixing plates 4 as a whole. The second base plate 5 is used to connect multiple second probe fixing plates 6 and is integrated with the multiple second probe fixing plates 6 as a whole, which facilitates the installation of the probe 7. At the same time, the design of multiple first probe fixing plates 4 and multiple second probe fixing plates 6 not only facilitates the processing of the first probe fixing plates 4 and the second probe fixing plates 6, but also facilitates the processing of the multiple first probe insertion holes 41 on the first probe fixing plate 4 and the multiple second probe insertion holes 61 on the second probe fixing plate 6 (the hole diameters of the first probe insertion holes 41 and the second probe insertion holes 61 are very small), reducing the processing difficulty of the first probe fixing plates 4 and the second probe fixing plates 6; at the same time, it facilitates the insertion of the probe 7 into the first probe fixing plate 4. The probe 7 is prevented from bending or breaking during insertion within the probe insertion hole 41 and the second probe insertion hole 61 on the second probe fixing plate 6, and the insertion efficiency of the probe 7 is effectively improved. When multiple first probe fixing plates 4 are assembled into a whole and multiple second probe fixing plates 6 are assembled into a whole, a very small misalignment will occur between two adjacent first probe fixing plates 4 and two adjacent second probe fixing plates 6, which will form an obstacle to the probe 7 inserted in the first probe insertion hole 41 and the second probe insertion hole 61. The obstruction formed by multiple first probe fixing plates 4 and multiple second probe fixing plates 6 is greater, which can fix the probe 7 and prevent the probe 7 from sliding up and down or falling off. There is no need to add a fixing structure to the probe 7, which reduces the processing and assembly difficulty of the probe tower structure.

[0028] In this application, two third grooves 13 are symmetrically arranged on both sides of the central hole of the base 1, and two fifth grooves 16 are located in the middle of the two third grooves 13 and respectively located at both ends of the third grooves 13. The symmetrical arrangement of the two fifth grooves 16 on both sides of the central hole of the base 1 ensures the test connection for the chip. The side of the fixing seat 2 is provided with multiple vertically inclined grooves 25, which can realize the adjustment of the height position of the fixing seat 2. The lower part of the probe tower structure is connected to the upper coupling plate of the chip tester, and the upper coupling plate is provided with roller bearings 9 that cooperate with the inclined grooves 25. By the rolling of the roller bearings 9 in the inclined grooves 25, the contact surfaces of the roller bearings 9 and the inclined grooves 25 are at different heights, thereby realizing the height adjustment of the fixing seat 25, and thus realizing the height adjustment of the probe tower structure to achieve the height required for chip testing.

[0029] In this application, multiple fourth grooves 15 are provided along the inner sidewall of the first mounting hole 14, and multiple seventh grooves 22 are provided along the inner sidewall of the third mounting hole 21. Multiple protrusions 42 are provided on the outer sidewall of each first probe fixing plate 4. The grooves 15 and the seventh grooves 22 cooperate with each other and cooperate with the protrusions 42 on the first probe fixing plate 4 to ensure that the first probe fixing plate 4 is accurately positioned in the first mounting hole 14 and the third mounting hole 21 and will not wobble. Furthermore, the fourth grooves 15, the seventh grooves 22 and the protrusions 42 are all designed with arc-shaped structures to ensure that the first probe fixing plate 4 is inserted into the first mounting hole 14 and the third mounting hole 21 more smoothly and reduce the assembly difficulty.

[0030] In this application, both the protruding ridge 42 and the first base plate 3 are provided with corresponding through first connecting holes 43, which facilitates the connection between the first probe fixing plate 4 and the first base plate 3 via bolts 8. Furthermore, the first connecting holes 43 are located on the protruding ridge 42, effectively improving the structural strength of the first connecting holes 43. The second base plate 5 and the second probe fixing plate 6 are each provided with multiple corresponding through second connecting holes 62, enabling the second base plate 5 and the second probe fixing plate 6 to be connected via bolts 8, making the connection simple and convenient.

[0031] In this application, a first groove 11 is provided on the upper surface of the base 1, a second groove 12 is provided in the first groove 11, and a third groove 13 and a fifth groove 16 are both provided in the second groove 12. The first groove 11 and the second groove 12 both serve to avoid each other, ensuring that the first base plate 3 and the second base plate 5 will not affect the connection between the base 1 and the chip test head after installation.

[0032] In this application, the length of the third groove 13 is greater than the length of the fifth groove 16. Multiple sixth grooves 18 are provided on the sides of both third grooves 13 away from the central hole of the base 1, and the sixth grooves 18 communicate with the third grooves 13. The sixth grooves 18 are used for installing a limiting block (not shown in the figure). By the limiting block installed in the sixth groove 18 abutting against the first base plate 3 installed in the third groove 13, the first base plate 3 is limited in the width direction, ensuring that the first base plate 3 and the first probe fixing plate 4 and probe 7 connected to it will not shake, and ensuring that the first base plate 3 is firmly fixed. Each of the multiple sixth grooves 18 has a circular first positioning hole 19. The fixing base 2 has multiple second positioning holes 24 that cooperate with the first positioning holes 19. The positioning and connection of the base 1 and the fixing base 2 are achieved through the first positioning holes 19 and the second positioning holes 24.

[0033] In this application, the mounting base 2 has a circular structure, which facilitates the adjustment of the height of the mounting base 2; the inclined groove 25 is set on the side of the mounting base 2, and there are four inclined grooves 25. The four inclined grooves 25 are evenly arranged along the circumference of the mounting base 2 to ensure the structural stability of the mounting base 2 and its smooth lifting process. The probe 7 fixed on the mounting base 2 will not damage the chip or itself; the mounting base 2 has an opening 26 at the lower end of the inclined groove 25, which communicates with the inclined groove 25, so that the roller bearing 9 on the upper coupling plate connected below the mounting base 2 can be installed into the inclined groove 25. When the roller bearing 9 rotates to the lowest point of the inclined groove 25, the roller bearing 9 will not separate from the inclined groove, ensuring the connection between the probe tower structure and the chip testing machine.

[0034] In this application, the base 1 has a rectangular structure, and the central hole of the base 1 and the fixing seat 2 is a rectangular hole, which can maximize the exposure of the clearance space and ensure the safety of the chip; the fixing seat 2 is provided with multiple limiting pins at the bottom, which are used to limit the distance between the fixing seat 2 and the upper coupling plate, to prevent damage to the chip and probe, and to ensure the testing effect of the chip.

[0035] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A probe tower structure for chip testing with easy height adjustment, characterized by: The utility model provides a chip test device, including base (1), the lower side of base (1) is connected with fixed base (2), the middle of base (1) and fixed base (2) are all provided with the center hole that penetrates up and down, the upper surface of base (1) is provided with two third recess (13) and two fifth recess (16), two third recess (13) are symmetrically arranged in the both sides of the center hole of base (1), two fifth recess (16) are located in the middle of two third recess (13) and are divided and are located in the both ends of third recess (13), two fifth recess (16) are symmetrically arranged in the both sides of the center hole of base (1), be equipped with the first installation hole (14) that penetrates base (1) in third recess (13), be equipped with the second installation hole (17) that penetrates base (1) in fifth recess (16), be equipped with two third installation hole (21) with two first installation hole (14) corresponding on fixed base (2), be equipped with two fourth installation hole (23) with two second installation hole (17) corresponding on fixed base (2), be equipped with first bottom plate (3) in third recess (13), the lower side of first bottom plate (3) is connected with a plurality of first probe fixed plate (4), a plurality of first probe fixed plate (4) are respectively installed in first installation hole (14) and third installation hole (21), both are equipped with a plurality of first probe jack (41) on first bottom plate (3) and first probe fixed plate (4), be equipped with second bottom plate (5) in fifth recess (16), the lower side of second bottom plate (5) is connected with a plurality of second probe fixed plate (6), a plurality of second probe fixed plate (6) are respectively installed in second installation hole (17) and fourth installation hole (23), both are equipped with a plurality of second probe jack (61) on second bottom plate (5) and second probe fixed plate (6), be inserted with probe (7) in first probe jack (41) and second probe jack (61), the side of fixed base (2) is equipped with a plurality of up and down inclined chute (25), the chute (25) is used for with the cooperation of the roller bearing (9) on the upper coupling board of chip testing machine, through the rolling of roller bearing (9) in chute (25), make the height of the contact surface of roller bearing (9) and chute (25) different, realize the height adjustment of fixed base (25), the dislocation of adjacent two first probe fixed plate (4) and adjacent two second probe fixed plate (6) can form the hindrance to probe (7) inserted in first probe jack (41) and second probe jack (61), the hindrance of a plurality of first probe fixed plate (4) and a plurality of second probe fixed plate (6) to probe (7) can realize the fixed of probe 7.

2. The probe tower structure for testing a chip with a height-adjustable convenience according to claim 1, wherein: A plurality of fourth recesses (15) are provided along the inner side wall of the first installation hole (14), and a plurality of seventh recesses (22) are provided along the inner side wall of the third installation hole (21) and cooperate with the fourth recesses (15).

3. The probe tower structure for testing a chip with a height-adjustable convenience according to claim 2, wherein: The outer side wall of each first probe fixing plate (4) is provided with a plurality of convex edges (42) matched with the fourth groove (15) and the seventh groove (22).

4. The probe tower structure for testing a chip with a height-adjustable convenience according to claim 3, wherein: The fourth groove (15), the seventh groove (22) and the convex edge (42) are designed in a circular arc structure, and the convex edge (42) and the first bottom plate (3) are both provided with a first connecting hole (43) penetrating in correspondence.

5. The probe tower structure for testing a chip with a height-adjustable convenience according to claim 4, wherein: The second bottom plate (5) and the second probe fixing plate (6) are both provided with a plurality of second connecting holes (62) penetrating in correspondence, and the first connecting hole (43) and the second connecting hole (62) are both provided with a bolt (8).

6. The probe tower structure for testing a chip with height adjustment convenience according to claim 1, wherein: The upper surface of the base (1) is provided with a first groove (11), the first groove (11) is provided with a second groove (12), and the third groove (13) and the fifth groove (16) are both arranged in the second groove (12).

7. The probe tower structure for testing a chip with a height-adjustable convenience according to claim 6, wherein: The length of the third groove (13) is greater than that of the fifth groove (16), and the side of the third groove (13) away from the center hole of the base (1) is provided with a plurality of sixth grooves (18) in communication with the third groove (13).

8. The probe tower structure for testing a chip with a height-adjustable convenience according to claim 7, wherein: A plurality of first positioning holes (19) are arranged in the sixth groove (18), and the fixing seat (2) is provided with a plurality of second positioning holes (24) matched with the first positioning hole (19).

9. The probe tower structure for testing a chip with a height-adjustable convenience according to claim 1, wherein: The fixing seat (2) is a circular structure, the chute (25) is arranged on the side of the fixing seat (2), the chute (25) has four, the four chutes (25) are uniformly arranged along the circumference of the fixing seat (2), and the fixing seat (2) is provided with an opening (26) communicated with the chute (25) at the lower end of the chute (25).

10. The probe tower structure for testing a chip with a height-adjustable convenience according to claim 1, wherein: The base (1) is a rectangular structure, the center holes of the base (1) and the fixing seat (2) are rectangular holes, and a plurality of limiting pins are arranged below the fixing seat (2).

Citation Information

Patent Citations

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  • Chip test probe tower structure with height convenient to adjust

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  • Semiconductor chip test socket

    JP2007278909A