A TFT testing device and its testing method

Abstract

The present invention discloses a testing device, particularly a TFT testing device, comprising: a testing box, the testing box is disposed on a base, a first support rod is disposed on the base, a second support rod is disposed on the first support rod, a third support rod is disposed on the second support rod, and a suction cup is disposed on the third support rod. The TFT thin film to be tested is moved by a negative pressure adsorption device, reducing the damage to the thin film caused by rigid grasping, so as to reduce the damage to the TFT during the testing process; at the same time, the device enables the negative pressure adsorption device to conveniently pick up and put down the TFT thin film through the linkage of different pipelines and piston cylinders, and is convenient to use.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor testing equipment, and particularly relates to a TFT testing device and a testing method thereof. Background Art

[0002] TFT (Thin Film Transistor) can be used in the fingerprint recognition area of the ultrasonic fingerprint module series. The TFT and the ultrasonic fingerprint module body are assembled together through the "bonding" process to form a complete ultrasonic fingerprint module chip. The testing of TFT products is mainly to improve the testing yield of the complete module after the ultrasonic module body and the TFT are bonded by controlling the yield of TFT products. Therefore, it is necessary to test TFT products before "bonding" the TFT and the ultrasonic module body. At present, the existing TFT product testing devices on the market have poor use effects and low testing efficiency. Summary of the Invention

[0003] In order to solve the problems existing in the above-mentioned prior art, the present invention provides a TFT testing device to solve the current technical problems.

[0004] The technical solution adopted by the present invention to solve its technical problems is as follows:

[0005] The present invention provides a TFT testing device, including: a testing box, the testing box is arranged on a base, a first support rod is arranged on the base, a second support rod is arranged on the first support rod, a third support rod is arranged on the second support rod, and a suction cup is arranged on the third support rod.

[0006] Preferably, an adsorption block is arranged below the testing box, a plurality of through holes are arranged on the adsorption block, a first conduit is connected to the through holes on the adsorption block, and the first conduit is connected to a vacuum generator.

[0007] Preferably, a hose is connected to the suction cup, the hose is connected to a second conduit, and the second conduit is connected to a vacuum generator.

[0008] Preferably, a first valve is arranged on the first conduit, and a second valve is arranged on the second conduit.

[0009] Preferably, a piston cylinder is connected between the first conduit and the second conduit, a piston is slidably arranged in the piston cylinder, the piston is connected to the base through a telescopic rod, and a sealing ring is arranged between the telescopic rod and the bottom of the piston cylinder through which the telescopic rod passes.

[0010] Preferably, a heat dissipation device is arranged outside the adsorption block.

[0011] Preferably, a first motor is provided between the base and the first support rod, and a second motor is provided between the second support rod and the third support rod.

[0012] Preferably, a track is provided on the first support rod, a slider is provided in the track, and the second support rod is provided on the slider.

[0013] Preferably, a plurality of probes for testing are provided on the test box.

[0014] A test method for a TFT test device, characterized in that it includes the following steps:

[0015] S1: Turn on the vacuum generator; shorten the telescopic rod so that the piston is at the bottommost of the piston cylinder;

[0016] S2: Open the first valve and the second valve;

[0017] S3: Adjust the positions of the first motor, the second motor and the slider so that the suction cup adsorbs the TFT film to be tested, and then continue to adjust the positions of the first motor, the second motor and the slider, and place the TFT film to be tested adsorbed on the suction cup on the adsorption block. At this time, close the second valve and quickly extend the telescopic rod so that the instantaneous pressure at the adsorption block is less than the pressure at the suction cup, and adsorb the TFT film to be tested onto the adsorption block;

[0018] S4: Continue to adjust the positions of the first motor, the second motor and the slider so that the suction cup moves away from the test box, and then close the cover of the test box to test the TFT film;

[0019] S5: After the test is completed, open the cover of the test box, continue to adjust the positions of the first motor, the second motor and the slider, place the suction cup on the tested TFT film, then open the second valve, close the first valve, and quickly shorten the telescopic rod so that the instantaneous pressure at the adsorption block is greater than the pressure at the suction cup, and adsorb the TFT film to be tested onto the suction cup;

[0020] S6: Continue to adjust the positions of the first motor, the second motor and the slider, move the tested TFT film to the designated position, then close the second valve, remove the tested TFT film to complete the test of one TFT film. Finally, execute S2 to enter the next cycle and perform the test on the next TFT film.

[0021] The beneficial effects of the present invention are: the TFT film to be tested is moved by the negative pressure adsorption device, reducing the damage to the film caused by rigid grasping, so as to reduce the damage to the TFT during the test; at the same time, the device enables the negative pressure adsorption device to easily pick up and put down the TFT film through the linkage of different pipelines and the piston cylinder, which is convenient to use. Description of the Drawings

[0022] The above aspects and advantages of the present invention will become apparent and be readily understood from the description of the embodiments in conjunction with the following drawings, where:

[0023] Figure 1 is a schematic structural view of a TFT test device according to an embodiment of the present invention;

[0024] Figure 2 is another schematic structural view of a TFT test device according to an embodiment of the present invention;

[0025] Figure 3 is a front view structural schematic of a TFT test device according to an embodiment of the present invention;

[0026] Figure 4 is a top view structural schematic of a TFT test device according to an embodiment of the present invention;

[0027] Figure 5 is a side view structural schematic of a TFT test device according to an embodiment of the present invention.

[0028] Description of reference numerals:

[0029] In Figures 1 - 5 it, base 1; test box 2; first support rod 3; second support rod 4; third support rod 5; suction cup 6; hose 7; adsorption block 8; second valve 9; second conduit 10; piston cylinder 11; vacuum generator 12; telescopic rod 13; first valve 14; first conduit 15; first motor 16; second motor 17; probe 18. Detailed implementation manners

[0030] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0031] The present invention provides a TFT test device, including: a test box 2, the test box 2 is arranged on a base 1, a first support rod 3 is arranged on the base 1, a second support rod 4 is arranged on the first support rod 3, a third support rod 5 is arranged on the second support rod 4, and a suction cup 6 is arranged on the third support rod 5. The test box 2 is a plastic box as shown in the figure, and a probe 18 is arranged on its cover plate. The position of the probe 18 is set according to the pin position of the TFT thin film to be tested. The probe 18 penetrates through the cover plate and is connected to the required test instrument. No improvement is made to it in this application. An LED lamp for testing is also arranged on the lower surface of the cover plate. The first support rod 3, the second support rod 4, and the third support rod 5 are all metal rods, and the suction cup 6 is an ordinary suction cup.

[0032] Below the test box 2, there is an adsorption block 8. The adsorption block 8 is provided with a number of through holes, and a first conduit 15 is connected to the through holes on the adsorption block 8. The first conduit 15 is connected to a vacuum generator 12. The adsorption block 8 is a copper block. Both the first conduit 15 and the second conduit 10 are metal tubes. The vacuum generator 12 can be a vacuum pump, and both the first conduit 15 and the second conduit 10 are connected to the intake port of the vacuum pump.

[0033] A hose 7 is connected to the suction cup 6. The hose 7 is connected to the second conduit 10, and the second conduit 10 is connected to the vacuum generator 12. The hose 7 is a steel wire hose 7.

[0034] A first valve 14 is provided on the first conduit 15, and a second valve 9 is provided on the second conduit 10. Both the first valve 14 and the second valve 9 are solenoid valves.

[0035] A piston cylinder 11 is connected between the first conduit 15 and the second conduit 10. A piston is slidably arranged in the piston cylinder 11. The piston is connected to the base 1 through a telescopic rod 13. The telescopic rod 13 penetrates through the bottom of the piston cylinder 11, and a sealing ring is provided between the telescopic rod 13 and the bottom of the piston cylinder 11. The piston cylinder 11 is a metal cylinder. The telescopic rod 13 is a cylinder.

[0036] A heat dissipation device is provided outside the adsorption block 8. The heat dissipation device is a number of evenly distributed copper sheets.

[0037] A first motor 16 is provided between the base 1 and the first support rod 3, and a second motor 17 is provided between the second support rod 4 and the third support rod 5. Both the first motor 16 and the second motor 17 are servos, which are used to rotate the first support rod 3 and the third support rod 5.

[0038] A track is provided on the first support rod 3. A slider is arranged in the track, and a second support rod 4 is arranged on the slider. The track is a power guide rail.

[0039] A number of probes 18 for testing are provided on the test box 2.

[0040] The test method of the TFT test device is characterized in that it includes the following steps:

[0041] S1: Turn on the vacuum generator 12; shorten the telescopic rod 13 to make the piston located at the bottommost of the piston cylinder 11;

[0042] S2: Turn on the first valve 14 and the second valve 9;

[0043] S3: Adjust the positions of the first motor 16, the second motor 17 and the slider so that the suction cup 6 adsorbs the TFT film to be tested. Then continue to adjust the positions of the first motor 16, the second motor 17 and the slider, and place the TFT film adsorbed on the suction cup 6 on the adsorption block 8. At this time, close the second valve 9 and quickly extend the telescopic rod 13 so that the instantaneous pressure at the adsorption block 8 is less than the pressure at the suction cup 6, and adsorb the TFT film to be tested onto the adsorption block 8;

[0044] S4: Continue to adjust the positions of the first motor 16, the second motor 17 and the slider so that the suction cup 6 moves away from the test box 2. Then close the cover plate of the test box 2 to test the TFT film;

[0045] S5: After the test is completed, open the cover plate of the test box 2. Continue to adjust the positions of the first motor 16, the second motor 17 and the slider, and place the suction cup 6 on the tested TFT film. Then open the second valve 9 and close the first valve 14, and quickly shorten the telescopic rod 13 so that the instantaneous pressure at the adsorption block 8 is greater than the pressure at the suction cup 6, and adsorb the tested TFT film onto the suction cup 6;

[0046] S6: Continue to adjust the positions of the first motor 16, the second motor 17 and the slider, move the tested TFT film to the designated position. Then close the second valve 9 and remove the tested TFT film to complete the test of one TFT film. Finally, execute S2 to enter the next cycle and perform the test on the next TFT film.

[0047] The TFT film to be tested is moved by the negative pressure adsorption device, reducing the damage to the film caused by rigid grasping, so as to reduce the damage to the TFT during the test process; at the same time, the device makes the negative pressure adsorption device convenient to pick up and put down the TFT film through the linkage of different pipelines and the piston cylinder 11, which is convenient to use.

[0048] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A TFT test device, comprising: Test box, characterized in that: the test box is arranged on a base, a first support rod is arranged on the base, a second support rod is arranged on the first support rod, a third support rod is arranged on the second support rod, and a suction cup is arranged on the third support rod; an adsorption block is arranged below the test box, a number of through holes are arranged on the adsorption block, a first conduit is connected to the through holes on the adsorption block, and the first conduit is connected to a vacuum generator; a hose is connected to the suction cup, the hose is connected to a second conduit, and the second conduit is connected to the vacuum generator; a first valve is arranged on the first conduit, and a second valve is arranged on the second conduit; a piston cylinder is connected between the first conduit and the second conduit, a piston is arranged to slide relative to each other within the piston cylinder, the piston is connected to the base through a telescopic rod, the telescopic rod penetrates through the bottom of the piston cylinder and a sealing ring is arranged between the telescopic rod and the bottom of the piston cylinder; a heat dissipation device is arranged outside the adsorption block; a first motor is arranged between the base and the first support rod, and a second motor is arranged between the second support rod and the third support rod.

2. The TFT test device according to claim 1, wherein: A track is arranged on the first support rod, a slider is arranged within the track, and the second support rod is arranged on the slider.

3. The TFT testing device according to claim 1, wherein: A number of probes for testing are arranged on the test box.

4. The testing method of the TFT testing device according to claim 1, characterized in that: Including the following steps: S1: Turn on the vacuum generator; Shorten the telescopic rod so that the piston is at the bottommost position within the piston cylinder; S2: Open the first valve and the second valve; S3: Adjust the positions of the first motor, the second motor and the slider so that the suction cup adsorbs the TFT thin film to be tested, and then continue to adjust the positions of the first motor, the second motor and the slider, place the TFT thin film adsorbed on the suction cup on the adsorption block, at this time close the second valve, quickly extend the telescopic rod so that the instantaneous pressure at the adsorption block is less than the pressure at the suction cup, and adsorb the TFT thin film to be tested onto the adsorption block; S4: Continue to adjust the positions of the first motor, the second motor and the slider so that the suction cup moves away from the test box, and then close the cover of the test box to test the TFT thin film; S5: After the test is completed, open the cover of the test box, continue to adjust the positions of the first motor, the second motor and the slider, place the suction cup on the tested TFT thin film, then open the second valve, close the first valve, quickly shorten the telescopic rod so that the instantaneous pressure at the adsorption block is greater than the pressure at the suction cup, and adsorb the tested TFT thin film onto the suction cup; S6: Continue to adjust the positions of the first motor, the second motor and the slider, move the tested TFT thin film to the designated position, then close the second valve, remove the tested TFT thin film to complete the test of one TFT thin film. Finally, execute S2 to enter the next cycle and perform the test on the next TFT thin film.

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