Probe measurement control method, processing method and device

Abstract

The present invention provides a control method, a processing method and a device for probe measurement, wherein the control method for probe measurement includes: when controlling M measuring probes and N early warning probes to scan the surface to be measured, the early warning probes detect obstacles on the surface to be measured and obtain corresponding obstacle detection signals, wherein the M measuring probes and the N early warning probes are distributed in sequence along the scanning motion direction; N and M are both integers greater than or equal to 1; according to the obstacle detection signal, the measuring probes are controlled to cross the detected obstacles. The early warning probes can identify obstacles, and when obstacles are detected, an early warning is generated for the measuring probes, so that the measuring probes can adjust their height before reaching the obstacles, without reducing the lateral speed to avoid hitting the obstacles, thereby increasing the measurement speed; the present invention can achieve high-speed and accurate surface scanning measurement.

Description

Technical Field

[0001] The present invention relates to the field of micro-nano measurement, and in particular to a control method, a processing method and a device for probe measurement. Background Art

[0002] The measurement and imaging of surface physical and chemical properties in the micro-nano field is a very common technology in scientific research and industrial applications. Its importance is self-evident. However, how to perform the measurement quickly and accurately has always been a challenge.

[0003] Especially in the chip industry, the manufacture of chips with 5-nanometer technology nodes has been realized, and the manufacture of chips with 3-nanometer technology nodes has been successfully developed, but the measurement technology of the chip industry is far behind. Not only are the detection methods insufficient, but the speed of achieving nano-level surface measurement is often very slow, which cannot meet the level of online detection or even random inspection in the chip industry.

[0004] In the prior art, the Scanning Probe Microscope (SPM) can measure sub-nanometer longitudinal and lateral resolutions, especially three-dimensional structures of a few nanometers to tens of nanometers. However, its measurement speed is very slow. It is estimated that it takes at least 30 days to fully measure a chip (DIE) on a wafer. One of the main reasons for the slow measurement speed is that the probe must be only a few nanometers to tens of nanometers away from the surface to measure the nanometer-level three-dimensional morphology. In order to avoid the probe colliding with the three-dimensional structure of the surface to be measured and affecting the measurement accuracy, the probe must move at an extremely slow speed during the measurement process.

[0005] In existing scanning probe microscopy technology, such as atomic force microscopy, during the commonly used amplitude modulation mode measurement process, the probe makes a mechanical vibration of a certain amplitude near its intrinsic resonance frequency, and the interaction between the needle tip and the surface to be measured will change the amplitude of the probe vibration. The change in amplitude is used as a feedback signal to adjust the distance between the needle tip and the surface to be measured to restore the vibration amplitude of the probe to the set value, thereby achieving tracking of the surface morphology to be measured. In this process, several key parameters that affect the measurement are as follows:

[0006] 1) The intrinsic resonance frequency of the needle tip is fo

[0007] Depending on the structural design of the probe, this frequency can generally reach 1MHz to 25MHz. The sampling frequency of the needle tip electronic signal is limited by the needle tip vibration frequency. If the sampling frequency of the needle tip electronic signal is set equal to one needle tip vibration cycle, the maximum time of one measurement point is 1 microsecond to 0.4 microsecond.

[0008] 2) Parallel motion speeds Vx and Vy of the needle tip in the scanning direction

[0009] In the absence of obstacles, this speed can be very fast. Its driving device can be a piezoelectric ceramic or a voice coil motor. The ultimate movement speed can exceed 1m / s, that is, one microsecond can move 1 micron. Assuming that 1000 sampling points are measured during the movement, the measurement time of each point is 1 microsecond, and the spacing is 10 nanometers, the required lateral movement speed is 10mm / s. This lateral speed is completely possible with the current driving mechanism.

[0010] 3) The slowest movement speed is the longitudinal movement speed of the needle tip when it descends and rises, especially the reaction speed of the feedback loop when encountering an obstacle.

[0011] The main factor restricting the scanning speed of the scanning probe microscope comes from the longitudinal feedback speed of the needle tip. During the scanning process of a conventional scanning probe microscope, the needle tip moves up and down quickly under the control of the feedback loop to track the surface undulations. However, due to the response time of the feedback circuit and the limitations of the mechanical structure of the scanner, the bandwidth of the entire feedback process is greatly restricted. If a faster lateral speed is maintained, the needle tip will not be able to provide timely feedback in the longitudinal direction, which can easily cause a collision between the needle tip and the three-dimensional structure of the sample surface, resulting in damage to the needle tip or the sample surface structure. In order to cooperate with the longitudinal feedback of the needle tip, the lateral scanning speed must be reduced accordingly, which affects the overall scanning speed.

[0012] Beam deflection is a well-known method for measuring cantilever deflection, which is widely used in atomic force microscopy. A position-sensitive photodetector is used to capture the deflection of the laser reflection beam to measure the vibration amplitude of the cantilever probe when scanning the sample surface, so that the atomic force microscope can reach atomic resolution. However, since the beam deflection sensor is not integrated with the cantilever, it needs to be adjusted frequently. In addition, it is relatively complicated to use a single optical sensor to measure the deflection of the cantilever array. In this regard, attempts have been made to use micro-electromechanical systems or MEMS processes to realize micro-cantilevers with integrated sensors. A silicon cantilever based on a piezoresistive and electrothermal conversion actuation method is known from DE102017202455A1, which uses a dual-material electrothermal drive to generate the deflection of the cantilever, and the piezoresistance measured from the Wheatstone bridge is used to sense and read the deflection signal of the cantilever.

[0013] An active piezoresistive cantilever array is known from EP2171425B1, in which several individual piezoresistive cantilevers are arranged into an array to independently control the drive and reading feedback of a single needle tip cantilever to achieve surface morphology, physical and chemical analysis, but it still cannot fundamentally and effectively achieve a very high scanning speed.

[0014] The authors A. Ahmad, T. Ivannov, T. Angelov and I. Rangelow proposed an "adaptive scan" process for high-speed scanning technology in the literature, "Fast atomic force microscopy with self-transduced, self-sensing cantilever", DOI: 10.1117 / 1.JMM.14.3.031209. Its working principle is to continuously detect the difference (error) between the actual amplitude of the probe and the set value during high-speed scanning. Once it is detected that the error is greater than the set value, that is, when a large obstacle is encountered, the scanning speed is immediately reduced. When the error returns to the normal range, high-speed scanning can be returned to. In simple terms, it is to maintain high-speed scanning in flat areas and only reduce the scanning speed when encountering obstacles. This technology can greatly improve the overall scanning speed. However, when the density of obstacles on the sample surface is large, it is necessary to continuously adjust the scanning speed during the scanning process, which still has a great impact on the overall scanning speed. In addition, during the speed change process, it is also difficult to ensure that the collision between the probe and the obstacle is completely avoided.

[0015] The existing fast scanning probe microscope can achieve a maximum feedback speed of 10mm / s in the longitudinal direction, and the feedback bandwidth of the feedback loop can exceed 100kHz (i.e., the response time is 10μs). When the above parameters are met, the scanner drives the probe to move 100nm in the longitudinal direction within one feedback cycle. If the obstacle to be crossed exceeds 100nm, sufficient feedback time must be provided by reducing the lateral scanning speed. Assuming that the height of the obstacle is 1000nm, the required feedback time must be increased by 10 times, and accordingly, the lateral scanning speed must be reduced by 10 times, and so on. It can be seen that large obstacles, although their number may be small, have a huge impact on the scanning speed.

[0016] The present invention achieves early warning of front obstacles along the scanning direction by arranging M+N probes with a certain height gradient along the scanning direction, providing sufficient time for the rear probe to cross the obstacle (equivalent to pre-feedback of the obstacle), thereby realizing continuous and rapid measurement. Summary of the invention

[0017] The present invention provides a control method, a processing method and a device for probe measurement to solve the problem of slow micro-nano measurement speed.

[0018] According to a first aspect of the present invention, there is provided a method for controlling probe measurement, comprising:

[0019] When controlling M measuring probes and N early warning probes to scan the surface to be measured, obstacles on the surface to be measured are detected by the early warning probes to obtain corresponding obstacle detection signals, wherein the M measuring probes and the N early warning probes are sequentially distributed along the scanning motion direction; N and M are both integers greater than or equal to 1;

[0020] According to the obstacle detection signal, the measuring probe is controlled to cross the detected obstacle.

[0021] Optionally, the longitudinal measurement range of the early warning probe tip matches the height of the obstacle to be detected, and the longitudinal measurement range of the measuring probe tip when the crossing is not implemented matches the height required for scanning the surface to be measured when there is no obstacle.

[0022] Optionally, the obstacle detection signal represents the height and position of the detected obstacle;

[0023] According to the obstacle detection signal, controlling the measuring probe to cross the detected obstacle comprises:

[0024] Determine the crossing parameter of the measuring probe according to the height and position of the detected obstacle, the current height and position of the measuring probe, and the movement speed of the measuring probe, wherein the crossing parameter represents the lifting time, height difference, and crossing distance or crossing time required for the measuring probe to cross the corresponding obstacle;

[0025] According to the crossing parameter, the measuring probe is controlled to cross the corresponding obstacle.

[0026] Optionally, after controlling the measuring probe to cross the corresponding obstacle according to the crossing parameter, the method further includes:

[0027] The measuring probe is controlled to return to the longitudinal measuring range of the needle tip when the crossing is not performed, or: the measuring probe is controlled to cross another obstacle.

[0028] Optionally, N is an integer greater than or equal to 2, and the longitudinal measurement ranges of the needle tips of different early warning probes are different and overlap when the crossing is not implemented;

[0029] Along the scanning motion direction, the N warning probes are distributed in sequence, and the lower limit values ​​of the corresponding longitudinal measurement ranges increase in sequence, and the upper limit values ​​also increase in sequence;

[0030] For any i-th early warning probe, after obtaining the obstacle detection signal of the i-th early warning probe, the method further includes:

[0031] According to the obstacle detection signal of the i-th early warning probe, the k-th early warning probe is controlled to cross the obstacle detected by the i-th early warning probe; wherein k<i, 1<i≤M.

[0032] Optionally, before controlling the measuring probe and the early warning probe to scan the surface to be measured, the method further includes:

[0033] Determine the jth scan line as the current scan line, where j ≥ 1;

[0034] The measuring probe and the early warning probe are determined from the M+N probes according to the arrangement order of the M+N probes along the scanning motion direction of the current scanning line.

[0035] Optionally, before determining the j-th scan line as the current scan line, the method further includes:

[0036] Taking the j-1th scanning line as the current scanning line, controlling the M+N probes to scan the surface to be measured, and completing the scanning required for the j-1th scanning line;

[0037] The M+N probes are controlled to move to the first scanning line.

[0038] Optionally, the scanning movement direction of the j-th scanning line and the scanning movement direction of the j-1-th scanning line are two opposite directions;

[0039] Controlling the M+N probes to move to the j-th scanning line specifically includes:

[0040] The M+N probes are controlled to move to the outside of the starting point of the j-th scanning line along a translation direction, wherein the translation direction is perpendicular to the scanning movement direction of the j-th scanning line.

[0041] Optionally, according to the arrangement order of the M+N probes along the scanning motion direction of the current scanning line, before determining the measuring probe and the early warning probe among the M+N probes, the method further includes:

[0042] Determine the intended initial height of each measuring probe and warning probe;

[0043] Controlling each probe to enter the current scanning line in sequence;

[0044] After each probe enters the first scanning point of the current scanning line, the probe is controlled to move to the corresponding predetermined initial height.

[0045] Optionally, the control method for probe measurement further includes: before sequentially controlling each probe to enter the current scanning line, further including:

[0046] The reference heights of the M+N probes are determined.

[0047] Optionally, determining the reference heights of the M+N probes includes:

[0048] Controlling the M+N probes to descend so that the probes contact the surface of the ultra-flat reference sample;

[0049] Record the height value of each probe as the reference height of the corresponding probe.

[0050] Optionally, determining the reference heights of the M+N probes includes:

[0051] Select any point on the surface to be measured as a reference point;

[0052] Controlling the M+N probes to move above the reference point in sequence, and controlling them to descend until they contact the reference point;

[0053] The height value of each probe when it contacts the reference point is recorded as the reference height of the corresponding probe.

[0054] Optionally, the control method for probe measurement further includes:

[0055] Before any p-th probe enters the first scanning point of the j-th scanning line, if the p+1-th probe does not detect an obstacle, the p-th probe is controlled to move to the corresponding predetermined initial height;

[0056] If the p+1th probe detects an obstacle, the pth probe is controlled to cross the corresponding obstacle;

[0057] The p-th probe and the p+1-th probe are the p-th probe and the p+1-th probe distributed along the scanning motion direction of the current scanning line among the N probes.

[0058] Optionally, before controlling the M measuring probes and the N early warning probes to scan the surface to be measured, the method further includes:

[0059] Determining a scanning motion direction of a probe array formed by a plurality of probes; wherein the probe array comprises a plurality of rows of probes, each row of probes being used to enter a corresponding scanning line;

[0060] According to the arrangement order of the probes in the probe array along the scanning motion direction, the measuring probes and the early warning probes are determined in each row of probes.

[0061] According to a second aspect of the present invention, there is provided a method for processing probe measurement, comprising: when or after controlling the probe using the method for controlling probe measurement according to the first aspect of the present invention and its optional solutions,

[0062] According to the measurement results of different probes on the same scanning point, the target measurement result of the corresponding scanning point is determined.

[0063] Optionally, the probe measurement processing method further includes:

[0064] According to the measurement results of different probes on the same scanning point, the deviation information of the probe measurement is determined.

[0065] According to a third aspect of the present invention, there is provided a probe measurement device, comprising: a scanning control module, and a plurality of probes, wherein the plurality of probes comprises M measurement probes and N early warning probes;

[0066] The scanning control module is configured to interact with each probe by signals to obtain the measurement result of the probe and control the movement of the probe to execute the probe measurement control method described in the first aspect of the present invention and its optional solutions.

[0067] Optionally, a result output module is further included, and the result output module is configured to be able to interact with the scanning control module through signals to obtain measurement results from the scanning control module and output the measurement results in a specified format.

[0068] Optionally, when at a predetermined initial height, an angle between a line connecting the needle tips of the M+N probes and a corresponding scanning motion direction is a specified angle.

[0069] Optionally, the scanning control module includes a first control unit, which includes a probe control unit corresponding to each probe and a joint control and data processing unit.

[0070] The joint control and data processing unit is electrically connected to the probe control unit to control the movement of the corresponding probe along the longitudinal direction through the probe control unit and receive the measurement result of each probe.

[0071] Optionally, the scanning control module further includes a second control unit, and the second control unit is used to control the M measurement probes and the N early warning probes to move along the scanning movement direction.

[0072] Optionally, the scanning control module further includes a third control unit, and the third control unit is used to control the M measurement probes and the N early warning probes to move along a translation direction perpendicular to the scanning movement direction.

[0073] Optionally, the plurality of probes include:

[0074] A probe for measuring the three-dimensional topography of the surface to be measured.

[0075] Optionally, the plurality of probes further include at least one of the following:

[0076] Probes for measuring electrical information of the object to be tested;

[0077] A probe for measuring mechanical information of an object to be measured;

[0078] A probe for measuring magnetic information of an object to be measured;

[0079] A probe for measuring optical information of an object to be measured;

[0080] A probe for measuring acoustic information of an object to be measured;

[0081] A probe used to measure the composition of the material being measured.

[0082] In the above options, each probe can measure the three-dimensional topography of the surface to be measured. At the same time, according to the actual application scenario, probes with different physical or chemical properties can be used to obtain different measurement data, or the physical and chemical properties of the surface to be measured can be measured simultaneously.

[0083] The control method, processing method and device of probe measurement provided by the present invention are as follows: since the M measurement probes and the N early warning probes are distributed in sequence along the scanning movement direction, during the scanning movement, the early warning probe will arrive at various positions in the scanning movement direction earlier than the measurement probe, and obstacles can be identified based on the early warning probe. When an obstacle is detected, an early warning is generated for the measurement probe, so that the measurement probe can be adjusted before reaching the obstacle, without reducing the lateral speed to avoid hitting the obstacle, thereby improving the measurement speed.

[0084] At the same time, since the same measurement site will be scanned by all probes in succession, the measurement data of each probe more or less contains the information of the measurement site. Based on the present invention, if the measurement data of the early warning probe and the measurement probe are combined, a more accurate measurement result can be obtained.

[0085] Therefore, the present invention can quickly realize the scanning measurement of the surface to be measured with nanometer precision, and can help to make the measurement result more accurate. BRIEF DESCRIPTION OF THE DRAWINGS

[0086] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0087] Figure 1 FIG. 1 is a flow chart of a control method for probe measurement in one embodiment of the present invention. Figure 1 ;

[0088] Figure 2a Schematic diagram of probe arrangement in one embodiment of the present invention Figure 1 ;

[0089] Figure 2b This is a second schematic diagram of probe arrangement in one embodiment of the present invention;

[0090] Figure 2c Schematic diagram of probe arrangement in one embodiment of the present invention Figure 3 ;

[0091] Figure 2d Schematic diagram of probe arrangement in one embodiment of the present invention Figure 4 ;

[0092] Figure 3 is a schematic diagram of the process of step S102 in one embodiment of the present invention Figure 1 ;

[0093] Figure 4 is a schematic diagram of adjusting the height of the probe in one embodiment of the present invention;

[0094] Figure 5 is a graph showing the relationship between the height of the probe tip from the surface to be measured and the measured signal in one embodiment of the present invention;

[0095] Figure 6 is a second flow chart of step S102 in one embodiment of the present invention;

[0096] Figure 7 2 is a flow chart of a control method for probe measurement in one embodiment of the present invention;

[0097] Figure 8 FIG. 1 is a flow chart of a control method for probe measurement in one embodiment of the present invention. Figure 3 ;

[0098] Fig. 9 FIG. 1 is a flow chart of a control method for probe measurement in one embodiment of the present invention. Figure 4 ;

[0099] Fig.10 is a flow chart of step S107 in one embodiment of the present invention;

[0100] Fig.11 FIG. 1 is a flow chart of a control method for probe measurement in one embodiment of the present invention. Figure 5 ;

[0101] Fig.12 is a schematic diagram of the process of step S111 in one embodiment of the present invention Figure 1 ;

[0102] Fig.13 is a second flow chart of step S1111 in one embodiment of the present invention;

[0103] Fig.14 FIG. 1 is a flow chart of a control method for probe measurement in one embodiment of the present invention. Figure 6 ;

[0104] Fig.15 FIG. 1 is a flow chart of a control method for probe measurement in one embodiment of the present invention. Figure 7 ;

[0105] Fig.16 is a flow chart of a processing method for probe measurement in one embodiment of the present invention;

[0106] Fig.17 Schematic diagram of the structure of a probe measuring device in one embodiment of the present invention. DETAILED DESCRIPTION

[0107] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0108] In the description of the specification of the present invention, it is necessary to understand that the orientation or position relationship indicated by the terms "upper part", "lower part", "upper end", "lower end", "lower surface", "upper surface", etc. is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0109] In the description of the present specification, the terms "first" and "second" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features.

[0110] In the description of the present invention, "plurality" means a plurality, such as two, three, four, etc., unless otherwise clearly and specifically defined.

[0111] In the description of the present invention, unless otherwise clearly specified and limited, the term "connection" and other terms should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or mutual communication; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0112] The technical solution of the present invention is described in detail with specific embodiments below. The following specific embodiments can be combined with each other, and the same or similar concepts or processes may not be described in detail in some embodiments.

[0113] Please refer to Figure 1 , the control method of the probe measurement includes:

[0114] S101: When controlling M measuring probes and N early warning probes to scan a surface to be measured, obstacles on the surface to be measured are detected by the early warning probes to obtain corresponding obstacle detection signals, wherein the M measuring probes and the N early warning probes are sequentially distributed along a scanning motion direction; N and M are both integers greater than or equal to 1;

[0115] S102: According to the obstacle detection signal, control the measurement probe to cross the detected obstacle.

[0116] In one embodiment, the M+N probes include:

[0117] A probe for measuring the three-dimensional topography of the surface to be measured.

[0118] In one embodiment, the M+N probes further include at least one of the following:

[0119] Probes for measuring electrical information of the object to be tested;

[0120] A probe for measuring mechanical information of an object to be measured;

[0121] A probe for measuring magnetic information of an object to be measured;

[0122] A probe for measuring optical information of an object to be measured;

[0123] A probe for measuring acoustic information of an object to be measured;

[0124] A probe used to measure the composition of the material being measured.

[0125] The material, shape, size and performance parameters (including intrinsic resonance frequency and elastic coefficient) of each probe may be completely the same or different. Each probe can measure the three-dimensional morphology of the surface to be measured. At the same time, different measurement data can be obtained by using probes with different physical or chemical properties according to the actual application scenario, or the physical and chemical properties of the surface to be measured can be measured simultaneously.

[0126] Please refer to Figures 2a to 2b In one embodiment, when at a predetermined initial height, the angle between the connecting line of the needle tips of the probes in the same row (e.g., C1, C2, C3, etc.) and the corresponding scanning line is the target angle, which can be understood as:

[0127] The M+N probes are distributed in sequence along the scanning motion direction. For example, the needle tips of the M+N probes can be arranged in a straight line that completely coincides with the scanning motion direction; or, for example, the needle tips of the M+N probes can be arranged in a straight line that forms a certain angle with the scanning motion direction. This angle can be set according to the specific application scenario.

[0128] The M+N probes form an array and are fixed on the same base, and the spacing between two adjacent probes along the scanning direction can be the same or different. All probes move along the scanning direction at the same speed.

[0129] The M+N probes have their longitudinal heights increasing in sequence along the scanning direction. This longitudinal arrangement can be achieved by at least one of the following methods:

[0130] Each probe (e.g. for passive probes via external mechanical excitation) is implemented by high and low mechanical settings, e.g. Figure 2d ,

[0131] Each probe (e.g., for active probes that are thermomechanically excited and controlled) is electrically biased by applying a DC bias.

[0132] Each probe (e.g., for active probes that are excited and controlled by other means) is implemented by applying other bias excitation signals.

[0133] Each probe is realized by tilting the probe array set at the same height at an angle in the longitudinal vertical direction, for example Figure 2c ,

[0134] Each probe is realized by tilting the probe array set at the same height at an angle in the longitudinal vertical direction and forming an angle in the transverse vertical direction of the scanning direction.

[0135] The longitudinal vertical direction can be understood as the vibration direction of the probe, and the transverse vertical direction can be understood as the translation direction of the probe, that is, the direction on the horizontal plane that is perpendicular to the scanning motion direction.

[0136] The longitudinal measurement range of the probe represents the lower and upper limits of the height of the probe tip from the surface to be measured. For example, the surface to be measured is regarded as the xy plane and the height is regarded as the z-axis. If the lower limit of the probe tip in the positive half axis of the z-axis is 10nm and the upper limit of the probe tip in the positive half axis of the z-axis is 30nm, then the longitudinal measurement range of the probe is 10-30nm.

[0137] It can be seen that since the M measurement probes and the N early warning probes are distributed sequentially along the scanning movement direction, during the scanning movement, the early warning probe will reach various positions in the scanning movement direction earlier than the measurement probe. Obstacles can be identified based on the early warning probe. When an obstacle is detected, an early warning is generated for the measurement probe, so that the measurement probe can be adjusted before reaching the obstacle without reducing the lateral speed to avoid hitting the obstacle, thereby increasing the measurement speed.

[0138] The early warning probe operates in an amplitude modulation or frequency modulation mode at a constant height, and detects obstacles by detecting changes in the probe vibration amplitude or frequency. The measurement probe operation mode can be any scanning mode that can be achieved by a scanning probe microscope, including contact mode, tapping mode, non-contact mode, etc. According to the selected scanning mode, the measurement probe maintains constant probe parameters under the action of the feedback loop to achieve the measurement of the surface properties to be measured.

[0139] At the same time, since the same measurement site will be scanned by all probes in succession, the measurement data of each probe more or less contains the information of the measurement site. On the basis of the present invention, if the measurement data of the early warning probe and the measurement probe are superimposed, the signal-to-noise ratio of the measurement can also be improved. Therefore, the present invention can quickly realize the scanning measurement of the surface to be measured with nanometer precision, and can help make the measurement result more accurate.

[0140] In one example, any probe works in coordination and synchronization with other probes, where the coordinated and synchronous work can be understood as all probes sharing a data processing module, a scanning control module, and using a common mechanical bracket to fix each probe sensor, and sharing a workbench for the sample to be tested.

[0141] In one embodiment, the longitudinal measurement range of the early warning probe tip matches the height of the obstacle to be detected, and the longitudinal measurement range of the measuring probe tip when no crossing is performed matches the height required to scan the surface to be measured when there is no obstacle.

[0142] Among them, the lower limit value of the longitudinal measurement range of the needle tip of the early warning probe is greater than the height of the detected obstacle. The lower limit value of the longitudinal measurement range of the needle tip is the smallest when the measuring probe has not crossed over, and the surface to be measured can be accurately detected. The setting of the longitudinal measurement range of each probe can realize the measurement of different heights of the surface to be measured. The early warning probe is maintained at a higher position. As a high-position measurement, it can provide early warning information for the measuring probe, so that the early warning probe does not need to slow down the scanning speed when crossing an obstacle.

[0143] In one example, the lower limit of the longitudinal measurement range of the needle tip when the measuring probe has not implemented a crossing is the minimum height for three-dimensional topography measurement; in another example, the lower limit of the longitudinal measurement range of the needle tip when the measuring probe has not implemented a crossing is higher than the minimum height for three-dimensional shape measurement, so as to ignore the measurement of the three-dimensional shape of the measured surface below a certain set height.

[0144] In one example, for the same surface to be measured, similar measurement data of different probes at the same position along the scanning direction can be superimposed and processed, thereby improving the signal-to-noise ratio of the measurement result.

[0145] In the above implementation manner, by setting the longitudinal measurement range of the warning probe tip to match the height of the obstacle to be detected, the warning probe can detect the obstacle without hitting the obstacle (that is, without colliding with the obstacle it is detecting), thereby providing a more accurate obstacle detection signal for the measuring probe. When the measuring probe does not cross, the longitudinal measurement range of the needle tip matches the height required to scan the surface to be measured when there is no obstacle, so that a more accurate measurement result can be obtained.

[0146] Please refer to Figure 3 ,In one embodiment, the obstacle detection signal represents the height and position of the detected obstacle;

[0147] Step S102 includes:

[0148] S1021: Determine a crossing parameter of the measuring probe according to the detected height and position of the obstacle, the current height and position of the measuring probe, and the movement speed of the measuring probe, wherein the crossing parameter represents the lifting time, height difference, and crossing distance or crossing time required for the measuring probe to cross the corresponding obstacle;

[0149] S1022: According to the crossing parameter, control the measuring probe to cross the corresponding obstacle.

[0150] The obstacle detection signal includes: probe number, probe height, whether an obstacle is detected, obstacle height, obstacle coordinates, etc., and then the crossing parameters are determined according to the obstacle detection signal.

[0151] In the above implementation, different early warning probes can detect obstacles at different heights, and the early warning probe can also cross the obstacle based on the obstacle detection signal of the early warning probe in front of it. The improvement in measurement speed is not only applicable to surfaces with small fluctuations in the longitudinal height direction, but also to steep surfaces with huge fluctuations in the longitudinal height.

[0152] The following will be combined Figures 4 to 5 , the calculation of the crossing parameters when the measuring probe crosses an obstacle is explained:

[0153] Assume that the surface to be measured is an xy plane, the probe moves along the x-axis, the probe vibrates in the z-axis direction, the speed of the measuring probe C1 and the early warning probe C2 along the scanning direction is Vx, the sampling frequency of the measuring probe C1 is f0, the height of the obstacle DF1 detected by the early warning probe C2 at X2 is H2, the tip coordinates of the measuring probe C1 when it starts to be raised at the latest are (X1, H1), the moving speed of the measuring probe C1 in the z-axis direction is Vz, the minimum early warning distance of the obstacle DF1 of the measuring probe C1 in the x-axis direction is D = (H2-H1)*Vx / Vz, and the raising time in the z-axis direction is t = (H2-H1) / Vz;

[0154] When measuring probe C1, when it moves to Xi, the height Hi from the surface to be measured directly below is:

[0155] Hi=(H2-H1)*(Xi-X1) / D+H1-hi,

[0156] Where hi is the height of the three-dimensional structure of the surface to be measured at Xi.

[0157] During the process of raising the measuring probe C1, due to the deviation from the measurement equilibrium position, the measurement of the surface directly below will deviate from the actual situation. However, due to the interaction force between the probe and the surface to be measured and the distance between them, Figure 5 As shown in the monotonic relationship, when the probe C1 moves to Xi, its distance Hi from the three-dimensional structure of the surface to be measured directly below can be expressed as follows: Figure 5 The relationship Fi=F(Xi,Hi) shown is given. Through such a relationship, the height hi of the three-dimensional structure of the surface to be measured during the lifting stage can also be accurately measured.

[0158] Please refer to Figure 6 In one implementation, after step S1022, the method further includes:

[0159] S1023: Control the measuring probe to return to the longitudinal measuring range of the needle tip when the crossing is not performed, or: control the measuring probe to cross another obstacle.

[0160] In the above implementation, when the early warning probe detects an obstacle, the measuring probe is controlled to increase the longitudinal measuring range to cross the obstacle. After crossing the corresponding obstacle, the subsequent early warning probe and the measuring probe are controlled to return to the set height of the needle tip before crossing. The coordinate point for executing the recovery process also depends on the early warning information transmission of the front early warning probe. The coordinate point at which the adjacent rear probe executes the recovery process is the coordinate point corresponding to when the obstacle leaves the longitudinal measuring range of the adjacent front probe. Before this, the probe maintains the height when crossing the obstacle; if another obstacle needs to be crossed, the needle tip of the measuring probe is kept within a certain range relative to the surface to be measured when there is no need to cross, so as to always obtain a more accurate measurement result.

[0161] Please refer to Figure 7 In one implementation, after step S101, the method further includes:

[0162] S103: According to the obstacle detection signal of the i-th early warning probe, control the k-th early warning probe to cross the obstacle detected by the i-th early warning probe; wherein k<i, 1<i≤M.

[0163] Wherein, N is an integer greater than or equal to 2, which can be, for example, Figure 2d ,When different early warning probes are not implemented to cross, the longitudinal measurement ranges of the needle tips are different and overlap;

[0164] Along the scanning motion direction, the N warning probes are distributed in sequence, and the lower limit values ​​of the corresponding longitudinal measurement ranges increase in sequence, and the upper limit values ​​also increase in sequence;

[0165] In the above implementation manner, there are two or more early warning probes, and different early warning probes can detect obstacles at different heights. Therefore, the early warning probe can also cross the obstacle based on the obstacle detection signal of the early warning probe in front of it. The improvement in measurement speed is not only applicable to surfaces with small fluctuations in the longitudinal height direction, but also to steep surfaces with huge fluctuations in the longitudinal height.

[0166] Please refer to Figure 8 In one implementation, before step S101, the method further includes:

[0167] S104: Determine the jth scan line as the current scan line, where j≥1;

[0168] S105: Determine the measuring probe and the early warning probe from among the M+N probes according to the arrangement order of the M+N probes along the scanning motion direction of the current scanning line.

[0169] In the above implementation, the early warning probe and the measuring probe are determined before scanning, and then the longitudinal measuring range of each probe is adjusted to improve the rate of probe measurement and provide a basis for subsequent obstacle detection and crossing.

[0170] Please refer to Fig. 9 In one implementation, before step S104, the method further includes:

[0171] S106: taking the j-1th scanning line as the current scanning line, controlling the M+N probes to scan the surface to be tested, and completing the scanning required for the j-1th scanning line;

[0172] S107: Control the M+N probes to move to the j-th scanning line.

[0173] Please refer to Fig.10 In one embodiment, the scanning movement direction of the j-th scanning line and the scanning movement direction of the j-1-th scanning line are opposite directions;

[0174] Step S107 specifically includes:

[0175] S1071: Control the M+N probes to move to the outside of the starting point of the j-th scanning line along a translation direction, where the translation direction is perpendicular to the scanning movement direction of the j-th scanning line.

[0176] Please refer to Fig.11 In one implementation, before step S105, the method further includes:

[0177] S108: Determine a predetermined initial height of each measuring probe and warning probe;

[0178] S109: Controlling each probe to enter the current scanning line in sequence;

[0179] S110: After each probe enters the first scanning point of the current scanning line, the probe is controlled to move to a corresponding predetermined initial height.

[0180] The above implementation method is a preparation stage before scanning, which initializes the system and controls the probe to enter the current scanning line.

[0181] In one implementation, before step S109, the following steps are further included:

[0182] S111: Determine the reference heights of the M+N probes.

[0183] Please refer to Fig.12 In one implementation, step S111 includes:

[0184] S1111: Control the M+N probes to descend so that the probes contact the surface of the ultra-flat reference sample;

[0185] S1112: Record the height value of each probe as the reference height of the corresponding probe.

[0186] Please refer to Fig.13 In one implementation, step S111 includes:

[0187] S1113: Select any point on the surface to be measured as a reference point;

[0188] S1114: sequentially controlling the M+N probes to move above the reference point, and controlling them to descend until they contact the reference point;

[0189] S1115: Record the height value of each probe when it contacts the reference point as the reference height of the corresponding probe.

[0190] Please refer to Fig.14 In one embodiment, the control method for probe measurement further includes:

[0191] S112: Before any p-th probe enters the first scanning point of the first scanning line, whether the p+1-th probe detects an obstacle

[0192] If an obstacle is detected, step S113 is executed: controlling the pth probe to move to a corresponding predetermined initial height;

[0193] If no obstacle is detected, step S114 is executed: controlling the pth probe to cross the corresponding obstacle;

[0194] The p-th probe and the p+1-th probe are the p-th probe and the p+1-th probe distributed along the scanning motion direction of the current scanning line among the N probes.

[0195] The above can be understood as:

[0196] Before any p-th probe enters the first scanning point of the first scanning line, the actual height of the p+1-th probe is compared with its set height: if the actual heights are lower than the set heights, there are no obstacles in the current measurement area, and scanning begins after all probes return to the predetermined initial heights; if it is found that the actual height of a warning probe is close to or even exceeds its set height, there is an obstacle under the probe, and the coordinates and height information of the obstacle are transmitted backward to guide subsequent probes to cross the obstacle before scanning begins.

[0197] In the above example, all probes enter the first scanning line in sequence, and the height of the entering needle tip relative to the first scanning point is the predetermined initial height of the previous probe, which can avoid needle collision due to unreasonable setting of the predetermined initial height when entering the scanning line.

[0198] Please refer to Fig.15 In one implementation, before step S101, the method further includes:

[0199] S115: determining a scanning movement direction of a probe array formed by a plurality of probes; wherein the probe array includes a plurality of rows of probes, and each row of probes is used to enter a corresponding scanning line;

[0200] S116: Determine the measuring probe and the early warning probe in each row of probes according to the arrangement order of the probes in the probe array along the scanning motion direction.

[0201] In the above implementation manner, multiple scanning lines are used to scan simultaneously, thereby reducing the measurement time of the same surface to be measured and improving the measurement speed.

[0202] In one example, the control method of the probe measurement further includes:

[0203] According to the measurement results of the M+N probes on the same position, the predetermined initial heights of at least some of the probes are adjusted.

[0204] Please refer to Figures 1 to 16 , describe the specific working process of the present invention and / or its optional solutions, and combine the prior art to describe the positive effects of the present invention and / or its optional solutions:

[0205] The specific workflow of the present invention and / or its optional solutions may be, for example:

[0206] Pre-scanning preparation stage: first, perform step S104 to determine the current scan line, then proceed to step S111 to determine that there is no obstacle at the first scan point of the j-th scan line, and then perform steps S109, step S111, step S109, step S112, step S113 or step S114, step S110, step S105 in sequence;

[0207] Probe scanning stage: enter step S101, detect the surface to be tested, and then complete steps S103, step S102, and step S106 in sequence;

[0208] End stage of a scan line: when the probes complete the measurement of the last scan point on the scan line in step S106, it means that the scan of a scan line is finished and the next scan line is ready to be scanned;

[0209] Next scan line preparation stage: This stage is similar to the pre-scan preparation stage, except that before entering step S105, S107 needs to be completed to switch the scan line.

[0210] An embodiment of the present invention, by setting M+N probes with a certain height gradient along the scanning motion direction, realizes early warning of the front obstacle along the scanning motion direction, and provides sufficient time for the rear probe to cross the obstacle (equivalent to pre-feedback of the obstacle), thereby realizing continuous and rapid measurement.

[0211] Please refer to Fig.16 , the processing method of the probe measurement includes:

[0212] When or after controlling the probe using the control method for probe measurement described above,

[0213] S201: Determine a target measurement result of a corresponding scanning point according to measurement results of different probes for the same scanning point.

[0214] In one embodiment, the processing method of the probe measurement further includes:

[0215] S202: Determine deviation information of the probe measurement device according to measurement results of different probes for the same scanning point.

[0216] Please refer to Fig.17 , the probe measuring device 3 comprises: a scanning control module 301, and a probe array 302 composed of a plurality of probes, wherein the plurality of probes comprises M measuring probes and N early warning probes;

[0217] The scanning control module 301 is configured to interact with each probe by signals to obtain the measurement result of the probe and control the movement of the probe to execute the control method of the probe measurement described above.

[0218] In one embodiment, the probe measurement device further includes a result output module 303 , which is configured to interact with the scanning control module 301 by signals so as to obtain measurement results from the scanning control module 301 and output the measurement results in a specified format.

[0219] In one embodiment, the plurality of probes include:

[0220] A probe for measuring the three-dimensional topography of the surface to be measured.

[0221] In one embodiment, the plurality of probes further comprises at least one of the following:

[0222] Probes for measuring electrical information of the object to be tested;

[0223] A probe for measuring mechanical information of an object to be measured;

[0224] A probe for measuring magnetic information of an object to be measured;

[0225] A probe for measuring optical information of an object to be measured;

[0226] A probe for measuring acoustic information of an object to be measured;

[0227] A probe used to measure the composition of the material being measured.

[0228] The material, shape, size and performance parameters (including intrinsic resonance frequency and elastic coefficient) of each probe may be completely the same or different. Each probe can measure the three-dimensional morphology of the surface to be measured. At the same time, different measurement data can be obtained by using probes with different physical or chemical properties according to the actual application scenario, or the physical and chemical properties of the surface to be measured can be measured simultaneously.

[0229] Please refer to Figures 2a to 2b In one embodiment, when at a predetermined initial height, the angle between the connecting line of the tips of the M+N probes (e.g., C1, C2, C3, etc.) and the corresponding scanning motion direction is a specified angle, which can be understood as:

[0230] The M+N probes are distributed in sequence along the scanning motion direction. For example, the needle tips of the M+N probes can be arranged in a straight line that completely coincides with the scanning motion direction; or, for example, the needle tips of the M+N probes can be arranged in a straight line that forms a certain angle with the scanning motion direction. This angle can be set according to the specific application scenario.

[0231] A plurality of probes may form an array, the probe array comprising a plurality of rows of probes, each row of probes being used to enter a corresponding scanning line, the array being fixed on the same base, and the spacing between two adjacent probes along the scanning direction may be the same or different. All probes move along the scanning direction at the same speed, and at least one row of probes comprises M measuring probes and N warning probes.

[0232] The plurality of probes can be arranged in a fixed manner by at least one of the following methods:

[0233] Each probe (e.g. for passive probes via external mechanical excitation) is implemented by high and low mechanical settings.

[0234] Each probe (e.g., for active probes that are thermomechanically excited and controlled) is electrically biased by applying a DC bias.

[0235] Each probe (e.g., for active probes that are excited and controlled by other means) is implemented by applying other bias excitation signals.

[0236] Each probe is realized by tilting the probe array set at the same height at an angle in the longitudinal vertical direction.

[0237] Each probe is realized by tilting the probe array set at the same height at an angle in the longitudinal vertical direction and forming an angle in the transverse vertical direction of the scanning direction.

[0238] In one example, any probe works in coordination and synchronization with other probes, where the coordinated and synchronous work can be understood as all probes sharing the data processing module 201, the scanning control module 203, and using a common mechanical bracket to fix each probe sensor, and sharing a workbench for the sample to be tested.

[0239] Please refer to Fig.17 In one embodiment, the scanning control module 303 includes a first control unit 3011,

[0240] The first control unit 3011 includes a probe control unit 30111 corresponding to each probe and a joint control and data processing unit 30112.

[0241] The joint control and data processing unit 30112 is electrically connected to the probe control unit 30111 to control the movement of the corresponding probe in the longitudinal direction through the probe control unit 30111, and receive the measurement results of each probe. More specifically, the probe control unit 30111 is used to control the excitation, longitudinal movement, data acquisition, calculation and transmission of the probe. The joint control and data processing unit 30112 obtains the position, movement and measurement result information of each probe collected by each probe control unit 30111, uses this information to calculate the scanning motion parameters required for the next step of each probe, and feeds these parameters back to the corresponding probe through each probe control unit 30111. The joint control and data processing 30112 unit obtains the measurement results of each probe collected by each control unit, and performs data processing on these results, including data superposition, and outputs the final measurement results.

[0242] In the above implementation, different probes control their vibration frequencies and longitudinal measurement ranges through different first control units, which can facilitate the realization that each probe can set different vibration frequencies and longitudinal measurement ranges according to actual needs to obtain measurement results in different ranges, thereby achieving an early warning effect.

[0243] In one implementation, the scanning control module 301 further includes a second control unit 3012, and the second control unit 3012 is used to control the M measurement probes and the N early warning probes to move along the scanning direction.

[0244] In the above implementation, the second control unit 3012 controls the M measuring probes and the N warning probes to move along the scanning direction, so that the speed of each probe along the scanning direction can be the same.

[0245] In one implementation, the scanning control module 301 further includes a third control unit 3013, and the third control unit 3013 is used to control the M measurement probes and the N warning probes to move along a translation direction perpendicular to the scanning movement direction.

[0246] In the above implementation, the third control unit 3013 controls the M measurement probes and the N warning probes to move along the translation direction perpendicular to the scanning movement direction, so that all of them can be translated simultaneously.

[0247] In the description of this specification, the description with reference to the terms "one implementation", "one example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present disclosure. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0248] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A control method for probe measurement, characterized in that: include: When controlling M measuring probes and N early warning probes to scan the surface to be measured, obstacles on the surface to be measured are detected by the early warning probes to obtain corresponding obstacle detection signals, wherein the M measuring probes and the N early warning probes are sequentially distributed along the scanning motion direction; N and M are both integers greater than or equal to 1; According to the obstacle detection signal, controlling the measuring probe to cross the detected obstacle; The obstacle detection signal represents the height and position of the detected obstacle.

2. The control method for probe measurement according to claim 1, characterized in that: The longitudinal measurement range of the early warning probe tip matches the height of the obstacle to be detected, and the longitudinal measurement range of the measuring probe tip when the crossing is not implemented matches the height required for scanning the surface to be measured when there is no obstacle.

3. The control method for probe measurement according to claim 2, characterized in that: According to the obstacle detection signal, controlling the measuring probe to cross the detected obstacle comprises: Determine the crossing parameter of the measuring probe according to the height and position of the detected obstacle, the current height and position of the measuring probe, and the movement speed of the measuring probe, wherein the crossing parameter represents the lifting time, height difference, and crossing distance or crossing time required for the measuring probe to cross the corresponding obstacle; According to the crossing parameter, the measuring probe is controlled to cross the corresponding obstacle.

4. The control method for probe measurement according to claim 3, characterized in that: After controlling the measuring probe to cross the corresponding obstacle according to the crossing parameter, the method further includes: The measuring probe is controlled to return to the longitudinal measuring range of the needle tip when the crossing is not performed, or: the measuring probe is controlled to cross another obstacle.

5. The control method for probe measurement according to claim 4, characterized in that: Wherein N is an integer greater than or equal to 2, and the longitudinal measurement ranges of the needle tips of different early warning probes are different and overlap when they are not crossed; Along the scanning motion direction, the N warning probes are distributed in sequence, and the lower limit values ​​of the corresponding longitudinal measurement ranges increase in sequence, and the upper limit values ​​also increase in sequence; For any i-th early warning probe, after obtaining the obstacle detection signal of the i-th early warning probe, the method further includes: According to the obstacle detection signal of the i-th early warning probe, the k-th early warning probe is controlled to cross the obstacle detected by the i-th early warning probe; wherein k<i, 1<i≤M.

6. The control method for probe measurement according to any one of claims 1 to 5, characterized in that: Before controlling the measuring probe and the early warning probe to scan the surface to be measured, the method further includes: Determine the jth scan line as the current scan line, where j ≥ 1; The measuring probe and the early warning probe are determined from the M+N probes according to the arrangement order of the M+N probes along the scanning motion direction of the current scanning line.

7. The control method for probe measurement according to claim 6, characterized in that: Before determining the j-th scan line as the current scan line, the following steps are also included: Taking the j-1th scanning line as the current scanning line, controlling the M+N probes to scan the surface to be measured, and completing the scanning required for the j-1th scanning line; The M+N probes are controlled to move to the j-th scanning line.

8. The control method for probe measurement according to claim 7, characterized in that: The scanning movement direction of the j-th scanning line and the scanning movement direction of the j-1-th scanning line are two opposite directions; Controlling the M+N probes to move to the j-th scanning line specifically includes: The M+N probes are controlled to move to the outside of the starting point of the j-th scanning line along a translation direction, wherein the translation direction is perpendicular to the scanning movement direction of the j-th scanning line.

9. The control method for probe measurement according to claim 6, characterized in that: According to the arrangement order of the M+N probes along the scanning motion direction of the current scanning line, before determining the measuring probe and the early warning probe among the M+N probes, the method further includes: Determine the intended initial height of each measuring probe and warning probe; Controlling each probe to enter the current scanning line in sequence; After each probe enters the first scanning point of the current scanning line, the probe is controlled to move to the corresponding predetermined initial height.

10. The control method of probe measurement according to claim 9, characterized in that: Before sequentially controlling each probe to enter the current scanning line, the method further includes: The reference heights of the M+N probes are determined.

11. The control method for probe measurement according to claim 10, characterized in that: Determining the reference heights of the M+N probes includes: Controlling the M+N probes to descend so that the probes contact the surface of the ultra-flat reference sample; Record the height value of each probe as the reference height of the corresponding probe.

12. The control method of probe measurement according to claim 10, characterized in that: Determining the reference heights of the M+N probes includes: Select any point on the surface to be measured as a reference point; Controlling the M+N probes to move to above the reference point in sequence, and controlling them to descend until they contact the reference point; The height value of each probe when it contacts the reference point is recorded as the reference height of the corresponding probe.

13. The control method of probe measurement according to claim 10, characterized in that: Also includes: Before any p-th probe enters the first scanning point of the j-th scanning line, if the p+1-th probe does not detect an obstacle, the p-th probe is controlled to move to the corresponding predetermined initial height; If the p+1th probe detects an obstacle, the pth probe is controlled to cross the corresponding obstacle; The p-th probe and the p+1-th probe are the p-th probe and the p+1-th probe distributed along the scanning motion direction of the current scanning line among the N probes.

14. The control method for probe measurement according to any one of claims 1 to 5, characterized in that: Before controlling the M measuring probes and the N early warning probes to scan the surface to be measured, it also includes: Determining a scanning motion direction of a probe array formed by a plurality of probes; wherein the probe array comprises a plurality of rows of probes, each row of probes being used to enter a corresponding scanning line; According to the arrangement order of the probes in the probe array along the scanning motion direction, the measuring probes and the early warning probes are determined in each row of probes.

15. A method for processing probe measurement, characterized in that: include: When or after controlling the probe using the probe measurement control method according to any one of claims 1 to 14, the target measurement result of the corresponding scanning point is determined based on the measurement results of different probes for the same scanning point.

16. The probe measurement processing method according to claim 15, characterized in that: Also includes: According to the measurement results of different probes on the same scanning point, the deviation information of the probe measuring device is determined.

17. A probe measuring device, characterized in that: include: A scanning control module, and a plurality of probes, wherein the plurality of probes include M measurement probes and N early warning probes; The scanning control module is configured to interact with each probe by signals; To obtain the measurement result of the probe and control the movement of the probe to execute the probe measurement control method according to any one of claims 1 to 15.

18. The probe measuring device according to claim 17, characterized in that: The system further comprises a result output module, which is configured to interact with the scanning control module through signals so as to obtain the measurement result from the scanning control module and output the measurement result in a specified format.

19. The probe measuring device according to claim 17, characterized in that: When at a predetermined initial height, the angle between the connecting line of the tips of the M+N probes and the corresponding scanning motion direction is a specified angle.

20. The probe measuring device according to any one of claims 17 to 19, characterized in that: The scanning control module includes a first control unit, which includes a probe control unit corresponding to each probe and a joint control and data processing unit. The joint control and data processing unit is electrically connected to the probe control unit to control the movement of the corresponding probe along the longitudinal direction through the probe control unit and receive the measurement result of each probe.

21. The probe measuring device according to any one of claims 17 to 19, characterized in that: The scanning control module further includes a second control unit, and the second control unit is used to control the M measurement probes and the N early warning probes to move along the scanning movement direction.

22. The probe measuring device according to any one of claims 17 to 19, characterized in that: The scanning control module further includes a third control unit, and the third control unit is used to control the M measurement probes and the N early warning probes to move along a translation direction perpendicular to the scanning movement direction.

23. The probe measuring device according to any one of claims 17 to 19, characterized in that: The plurality of probes include: A probe for measuring the three-dimensional topography of the surface to be measured.

24. The probe measuring device according to any one of claims 17 to 19, characterized in that: The plurality of probes further comprises at least one of the following: Probes for measuring electrical information of the object to be tested; A probe for measuring mechanical information of an object to be measured; A probe for measuring magnetic information of an object to be measured; A probe for measuring optical information of an object to be measured; A probe for measuring acoustic information of an object to be measured; A probe used to measure the composition of the material being measured.

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