Process chamber recipe management system and semiconductor equipment control method

Abstract

The present application discloses a process chamber recipe management system and a semiconductor equipment control method, the semiconductor equipment control method includes: saving the Chamber information of each recipe in the process chamber recipe management system; the user edits the equipment module, equipment type, machine recipe and Chamber in the process chamber recipe management system; EAP obtains the recipe in the MES and intersects it with the edited recipe in the process chamber recipe management system; EAP obtains the recipe list from the machine and determines whether the recipe after the intersection exists in the recipe list. If so, the machine is allowed to produce, otherwise the machine stops production. The present application safely and conveniently realizes the control of the Recipe Chamber, improving the management efficiency of the production line.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor production technology, and in particular to a process chamber recipe management system and a semiconductor equipment control method. Background Art

[0002] Recipe (process method) refers to the process in the industrial automation manufacturing process, and its content may include multiple steps in the process and various process parameter values ​​of each step and the duration of the step. In the industrial automation manufacturing process, the equipment can complete the processing of materials according to the content of the recipe, and the quality of the processed products can be improved by adjusting the recipe, so an advanced recipe plays a very important role in improving product value, especially in the semiconductor manufacturing industry.

[0003] At present, in the semiconductor manufacturing industry, semiconductor manufacturing plants have to produce a wide variety of semiconductor devices in different quantities at the same time. Moreover, the processing technology, processing time cycle, and processing quantity of various types of semiconductor devices are different, and the delivery date and quantity required by customers for various types of semiconductor devices are also different. Under such complex conditions, how to improve the production efficiency of the machine and how to make the software supporting system more perfect are becoming more and more the key to the survival and development of semiconductor companies in the fierce competition.

[0004] Due to the complexity of semiconductor processes, some process equipment will have a multi-cavity structure, and one device will be divided into a main unit and multiple process chambers. When the product is actually produced, the machine will run different process chambers according to the different product processes. In view of this situation, it is very troublesome to maintain the chamber of each recipe in each machine in the MES (Manufacturing Execution System), and due to the uniqueness of the recipe, the safety requirements are particularly high.

[0005] Therefore, how to develop a process chamber recipe management system that helps process engineers manage recipes to improve production efficiency has become an increasingly important issue in production. Summary of the invention

[0006] The object of the present invention is to provide a process chamber recipe management system (or Recipe Chamber management system) and a semiconductor equipment control method and system based on the process chamber recipe management system to solve the problems raised in the above technical background.

[0007] To achieve the above object, the present invention adopts the following technical solutions:

[0008] The first aspect of the present application discloses a process chamber recipe management system, comprising:

[0009] The device module management module is used to edit the modules required by the recipe, including adding modules, modifying modules, and deleting modules;

[0010] The device type management module is used to customize the device type of the machine. Each device type is associated with the module to which it belongs.

[0011] The equipment information management module is used to customize and edit the machine information, including the equipment type corresponding to the machine and the chamber included in the machine;

[0012] The machine main interface information management module is used to edit the chamber for each recipe of each machine and select the available chamber.

[0013] Preferably, the process chamber recipe management system further includes:

[0014] Personnel management module, used to add or delete users;

[0015] The permission management module is used to set the user's operation permissions.

[0016] Preferably, the machine main interface information management module further includes:

[0017] Enable editing unit, which is configured to respond to user recipe editing operations after enabling editing control is checked;

[0018] The deletion unit is configured to respond to a user's operation of deleting a certain recipe configuration data;

[0019] An export unit, configured to respond to a user's operation of exporting machine data;

[0020] An import unit, configured to respond to an operation by a user to import designated machine data into a database;

[0021] A query unit, configured to respond to a user's operation of querying a recipe list (RecipeList) or a device group type (GroupType);

[0022] The Chamber editing unit is configured to respond to the user's operation of selecting an available Chamber for a specified Recipe and saving it to the database.

[0023] Preferably, the process chamber recipe management system adopts a traditional C / S architecture, and the database adopts a SQL Server database.

[0024] The second aspect of the present application discloses a semiconductor device control method, comprising:

[0025] Install the above-mentioned process chamber recipe management system on the user terminal;

[0026] In combination with the equipment type and product process, the Chamber information of each recipe of each machine is stored in the process chamber recipe management system;

[0027] Users edit equipment module information, equipment type information, machine recipe and chamber information in the process chamber recipe management system;

[0028] When performing recipe verification, EAP (Equipment Automation Programming) obtains the recipe in MES and intersects it with the recipe edited in the process chamber recipe management system;

[0029] EAP obtains the recipe list from the machine and determines whether the recipe obtained after the intersection in the above step exists in the recipe list. If so, the machine is allowed to produce according to the recipe obtained after the intersection. Otherwise, the machine stops production.

[0030] The third aspect of the present application discloses a semiconductor device control system, comprising:

[0031] The first acquisition module is used to acquire the recipe in the MES, which is recorded as the first recipe;

[0032] A second acquisition module is used to acquire the edited recipe in the process chamber recipe management system, which is recorded as a second recipe;

[0033] A calculation module, used for taking the intersection of the first recipe and the second recipe to obtain a third recipe;

[0034] The third acquisition module is used to obtain the recipe list of the machine;

[0035] a judgment module, used to judge whether the third recipe obtained by the calculation module exists in the recipe list obtained by the third obtaining module, and obtain a judgment result;

[0036] The control module is used to control the production status of the machine according to the judgment result obtained by the judgment module: when the third recipe exists in the recipe list, the machine is controlled to produce according to the third recipe; when the third recipe does not exist in the recipe list, the machine is controlled to stop production.

[0037] The fourth aspect of the present application discloses a computer-readable storage medium, in which a computer program or a code set is stored. When the computer program or the code set is executed by a processor, the above-mentioned semiconductor device control method is implemented.

[0038] Compared with the prior art, the technical solution of the present invention has the following beneficial effects:

[0039] The process chamber recipe management system of the present application safely and conveniently realizes the control of the recipe chamber. The semiconductor equipment control method and system of the present application can improve the management efficiency of the production line, save a lot of time cost, and improve production safety and reliability. When the user finds that a chamber of the machine is unavailable, it can be promptly hung up in the process chamber recipe management system and updated in real time in actual production, ensuring the timeliness of production. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] The drawings that constitute part of this application are used to provide a further understanding of this application. The illustrative embodiments of this application and their descriptions are used to explain this application and do not constitute an improper limitation on this application. In the drawings:

[0041] Figure 1 It is a schematic diagram of the interface of the equipment module management module of a process chamber recipe management system according to a preferred embodiment of the present invention;

[0042] Figure 2 It is a schematic diagram of the interface of an equipment type management module of a process chamber recipe management system according to a preferred embodiment of the present invention;

[0043] Figure 3 It is a schematic diagram of the interface of a device information management module of a process chamber recipe management system according to a preferred embodiment of the present invention;

[0044] Figure 4 It is a schematic diagram of the interface of a personnel management module of a process chamber recipe management system according to a preferred embodiment of the present invention;

[0045] Figure 5 It is a schematic diagram of an interface of a rights management module of a process chamber recipe management system according to a preferred embodiment of the present invention;

[0046] Figure 6It is a schematic diagram of the interface of a machine main interface information management module of a process chamber recipe management system according to a preferred embodiment of the present invention;

[0047] Figure 7 It is a schematic diagram of the interface of the export unit of the information management module of the machine main interface;

[0048] Figure 8 It is a flow chart of a semiconductor device control method according to a preferred embodiment of the present invention;

[0049] Fig. 9 It is a working principle diagram of a semiconductor device control method of the present invention. DETAILED DESCRIPTION

[0050] In order to make the purpose, technical solution and effect of the present invention clearer and more specific, the present invention is further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0051] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0052] Example

[0053] The semiconductor process system includes a fab host, a host computer connected to the fab host through a fab interface, and a slave computer connected to the host computer, wherein the fab interface is connected to the fab host through Ethernet. The management of recipes can be achieved by the slave computer in the system, and the host computer can provide an intuitive operation interface for users to intuitively manage recipes.

[0054] The present application provides a process chamber recipe management system, which adopts a traditional C / S architecture and a SQL Server database to ensure the reliability of the system.

[0055] The process chamber recipe management system is equivalent to an intermediate management system. The Recipe Chamber is managed through the operation interface of the process chamber recipe management system, such as: custom editing of new equipment module information, custom editing of equipment type information, custom editing of equipment information, user management, authority management, and viewing recipes, editing recipes, deleting recipes, importing recipes, exporting recipes, querying recipes, saving recipes and other operations through the machine main interface information management.

[0056] The following is a detailed introduction to the system. Specifically, the process chamber recipe management system includes the following modules:

[0057] 1) Equipment module management module

[0058] like Figure 1 As shown, the administrator can customize and edit the new module information, such as the etching group, yellow light group, etc. in Fab.

[0059] 2) Device type management module

[0060] like Figure 2 As shown, the administrator can customize the device type information and it will show which module it belongs to.

[0061] 3) Equipment information management module

[0062] Administrators can customize and edit device information, which will show which device type the device belongs to, and need to edit the chamber information in the device, which chambers the machine contains, such as Figure 3 shown.

[0063] 4) Personnel management module

[0064] Administrators can edit related personnel. Figure 4 As shown, this module can be used to add or modify users.

[0065] 5) Rights Management Module

[0066] Administrators can manage user permissions. Specific permissions can be controlled to the corresponding machine and each permission of the corresponding recipe (including adding, deleting, editing, etc.), such as Figure 5 shown.

[0067] 6) Machine main interface information management module

[0068] This module allows you to edit the chamber for each recipe of each machine. Select the available chamber, as follows: Figure 6 shown.

[0069] The module also has the following functions:

[0070] a. Enable editing function

[0071] To prevent users from making mistakes, users should first check Enable edit controls to make changes. After users click the Add button, a new recipe data will be added to the recipe list of the machine, and users can edit it according to actual conditions.

[0072] b. Delete function

[0073] Select a row of recipe data in the machine and click the Delete button to delete the configuration of the recipe.

[0074] c. Export function

[0075] like Figure 7 As shown, when the user clicks the Export button, the table data of the machine will be saved in the selected path, and the file name defaults to the machine name. The user can customize the file name.

[0076] d. Import function

[0077] When the user clicks the import button, the system will import the data in the Excel table of the specified machine into the database, making it easier for the user to operate.

[0078] e. Query function

[0079] You can query based on RecipeList or GroupType.

[0080] f.Chamber editing function

[0081] Users can check the available Chambers for a recipe and save them in the database.

[0082] On the other hand, the present application also discloses a semiconductor equipment control method based on the process chamber recipe management system, see Figure 8-Figure 9 , specifically including the following steps:

[0083] S1, installing the above-mentioned process chamber recipe management system on a user terminal.

[0084] The process chamber recipe management system is installed on the user terminal and provides a GUI for users to use. The relationship between the process chamber recipe management system and EAP is as follows: Fig. 9 shown.

[0085] S2, combining the equipment type and product process, saving the Chamber information of each recipe of each machine in the process chamber recipe management system.

[0086] S3, the user edits the equipment module information, equipment type information, machine recipe and chamber information in the process chamber recipe management system.

[0087] S4, when EAP (Equipment Automation Programming) performs recipe verification, EAP will take out the recipe from MES and take the intersection with the recipe edited in the process chamber recipe management system.

[0088] S5, EAP obtains the recipe list from the machine and determines whether the recipe after the intersection in the above step exists in the recipe list. If so, the machine is allowed to produce according to the recipe obtained after the intersection. Otherwise, the machine stops production.

[0089] For example, the recipe in MES is Recipe-ABC, but the user can shut down cavity C according to the actual situation of the machine, and the recipe in the process cavity recipe management system is edited to Recipe-AB, so the actual recipe taken out by EAP is Recipe-AB. If the machine does not have Recipe-AB, the machine is not allowed to process; if the machine has Recipe-AB, the actual recipe for the product to run is Recipe-AB.

[0090] On the other hand, corresponding to the above-mentioned semiconductor device control method, the present application also discloses a semiconductor device control system, which specifically includes: a first acquisition module, a second acquisition module, a calculation module, a third acquisition module, a judgment module and a control module.

[0091] The first acquisition module is used to acquire the Recipe in the MES, which is recorded as the first Recipe.

[0092] The second acquisition module is used to acquire the edited recipe in the process chamber recipe management system, which is recorded as the second recipe.

[0093] The calculation module is used to obtain the third recipe by taking the intersection of the first recipe and the second recipe.

[0094] The third acquisition module is used to acquire the recipe list of the machine.

[0095] The judgment module is used to judge whether the third recipe obtained by the first calculation module exists in the recipe list obtained by the third acquisition module, and obtain a judgment result.

[0096] The control module is used to control the production status of the machine according to the judgment result obtained by the judgment module: when the third recipe exists in the recipe list, the machine is controlled to produce according to the third recipe; when the third recipe does not exist in the recipe list, the machine is controlled to stop production.

[0097] The present application also provides a computer storage medium, in which a computer program or code set is stored, and when the computer program or code set is run by a processor or a computer, the computer readable storage medium controls the execution of some or all steps of the semiconductor equipment control method based on the process chamber recipe management system. The computer includes a personal computer, a tablet computer, a laptop computer, a PDA, a mobile phone or a server.

[0098] The computer-readable storage medium may be a computer-readable signal medium or a computer-readable storage medium or any combination of the two. The computer-readable storage medium may be, for example, but not limited to, an electrical, magnetic, optical, electromagnetic, infrared or semiconductor system, device or device, a magnetic card, an IC card, a USB flash drive, an SD card, etc. More specific examples of computer-readable storage media may include, but are not limited to: an electrical connection with one or more wires, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any combination of the above. The computer-readable storage medium may be any tangible medium containing or storing a program that may be used by or in conjunction with an instruction execution system, device or device. The computer-readable signal medium may include a data signal propagated in a baseband or as part of a carrier wave, in which a computer-readable program code is carried. This propagated data signal may take a variety of forms, including but not limited to an electromagnetic signal, an optical signal, or any combination of the above. A computer-readable signal medium may also be any computer-readable storage medium other than a computer-readable storage medium that can send, propagate or transmit a program for use by or in conjunction with an instruction execution system, apparatus or device. The program code contained on the computer-readable storage medium may be transmitted using any appropriate medium, including but not limited to: wireless, wired, optical cable, radio frequency signals, etc.

[0099] In summary, the process chamber recipe management system of the present application safely and conveniently realizes the control of the Recipe Chamber. The semiconductor equipment control method and system of the present application can improve the management efficiency of the production line, save a lot of time cost, and improve production safety and reliability. When the user finds that a chamber of the machine is unavailable, it can be promptly hung up in the process chamber recipe management system of the user terminal, and updated in real time in actual production, ensuring the timeliness of production.

[0100] The specific embodiments of the present invention are described in detail above, but they are only examples, and the present invention is not limited to the specific embodiments described above. For those skilled in the art, any equivalent modifications and substitutions made to the present invention are also within the scope of the present invention. Therefore, the equalization changes and modifications made without departing from the spirit and scope of the present invention should be included in the scope of the present invention.

Claims

1. A semiconductor device control method, characterized in that: include: A process chamber recipe management system is installed on the user terminal, and the process chamber recipe management system includes: The device module management module is used to edit the modules required by the recipe, including adding modules, modifying modules, and deleting modules; The device type management module is used to customize the device type of the machine. Each device type is associated with the module to which it belongs. The equipment information management module is used to customize and edit the machine information, including the equipment type corresponding to the machine and the chamber included in the machine; The machine main interface information management module is used to edit the chamber for each recipe of each machine and select the available chamber; In combination with the equipment type and product process, the Chamber information of each recipe of each machine is stored in the process chamber recipe management system; Users edit equipment module information, equipment type information, machine recipe and chamber information in the process chamber recipe management system; When performing recipe verification, EAP obtains the recipe in MES and takes the intersection with the recipe edited in the process chamber recipe management system; EAP obtains the recipe list from the machine and determines whether the recipe obtained after the intersection is in the recipe list. If so, the machine is allowed to produce according to the recipe obtained after the intersection is completed. Otherwise, the machine stops production.

2. A semiconductor device control method according to claim 1, characterized in that: The process chamber recipe management system also includes: Personnel management module, used to add or delete users; The permission management module is used to set the user's operation permissions.

3. A semiconductor device control method according to claim 1, characterized in that: The machine main interface information management module also includes: Enable editing unit, which is configured to respond to user recipe editing operations after enabling editing control is checked; A deletion unit is configured to respond to a user's operation of deleting a certain recipe configuration data; An export unit, configured to respond to a user's operation of exporting machine data; An import unit, configured to respond to an operation by a user to import designated machine data into a database; A query unit, configured to respond to a user's query operation on a recipe list or a device group type; The Chamber editing unit is configured to respond to the user's operation of selecting an available Chamber for a specified Recipe and saving it to the database.

4. A semiconductor device control method according to claim 1, characterized in that: The process chamber recipe management system adopts a traditional C / S architecture, and the database adopts a SQL Server database.

5. A semiconductor device control system, characterized in that: include: The first acquisition module is used to acquire the recipe in the MES, which is recorded as the first recipe; A second acquisition module, used for acquiring an edited recipe in a semiconductor device control method according to any one of claims 1 to 4, recorded as a second recipe; A calculation module, used for taking the intersection of the first recipe and the second recipe to obtain a third recipe; The third acquisition module is used to obtain the recipe list of the machine; a judgment module, used to judge whether the third recipe obtained by the calculation module exists in the recipe list obtained by the third obtaining module, and obtain a judgment result; The control module is used to control the production status of the machine according to the judgment result obtained by the judgment module: when the third recipe exists in the recipe list, the machine is controlled to produce according to the third recipe; when the third recipe does not exist in the recipe list, the machine is controlled to stop production.

6. A computer-readable storage medium having a computer program or a code set stored therein, characterized in that: When the computer program or the code set is executed by a processor, the semiconductor device control method according to claim 1 is implemented.

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