A sealed collection structure for improving the accuracy of spectral data collection

Abstract

The present invention relates to the technical field of spectral acquisition structures, and in particular to a sealed acquisition structure for improving the accuracy of spectral data acquisition. The structure comprises a sealed outer tube connected to a reaction chamber through a seal, an inner acquisition tube which is a set of structures assembled inside the sealed outer tube and used for acquiring spectra and isolating pollution in the reaction chamber. The other end of the sealed outer tube is connected to a sealing component, the end of the sealing component away from the acquisition inner tube is connected to a converter, the end of the converter away from the sealing component is connected to a condenser, the outer wall of the sealed outer tube is covered with a heating shell, the heating shell heats the spectrometer acquisition inner tube through external heating and then through the thermal radiation effect, so as to assist the acquisition inner tube to be not affected by the reaction temperature of the chamber, the sealing component is connected to a gas inlet, and a certain amount of inert gas is introduced to form a pressure in the overall collector device higher than the pressure in the reaction chamber, thereby further improving the accuracy of data acquisition by the collector structure.

Description

Technical Field

[0001] The present invention relates to the technical field of spectrum collection structures, and in particular to a sealed collection structure for improving the accuracy of spectrum data collection. Background Art

[0002] The application principle of existing spectrometers is mainly to collect light from the light source through a convex lens and focus it on the transmission optical fiber, and then transmit it to the spectrometer through the optical fiber for data collection and analysis.

[0003] The accuracy of spectrometer analysis mainly depends on the light source, and the collection of light emitted by the light source has always been a difficult problem. This is because if the light intensity collector is close to the reaction area, the collector will be contaminated, and if the collector is too far away from the reaction area, the amount of collected data will be low. Both will affect the accuracy and effectiveness of the data. When there are a large number of pollution sources in the reaction in the cavity, the optical lenses in the existing spectrometer collection structure will be contaminated in a short time, causing a large deviation in mirror reflection, which in turn causes a deviation in the collected data. Especially in a vacuum evaporation coating environment, the collection structure is a cold component, and the chamber reaction releases a hot pollution source. The hot pollution source is cooled and then forms solid pollutants on the optical components, reducing the accuracy of the optical components. Summary of the invention

[0004] In view of this, the purpose of the present invention is to propose a sealed collection structure that improves the accuracy of spectral data collection, so as to solve the problem that the pollution sources in the reaction in the chamber affect the optical components and reduce the accuracy of the collected data.

[0005] Based on the above purpose, the present invention provides a sealed collection structure for improving the accuracy of spectral data collection, which is sealed and connected to the reaction chamber, and includes:

[0006] A sealed outer tube, in which a collection inner tube is assembled, one end of the sealed outer tube is sealed and connected to the reaction chamber, and the other end is connected to a sealing component, and the sealing component is connected to a gas inlet for introducing an inert gas, and the end of the sealing component away from the collection inner tube is connected to a converter, and the end of the converter away from the sealing component is connected to a condenser;

[0007] A first optical glass is arranged in the collecting inner tube, and a second optical glass is arranged in the sealing component;

[0008] The heating shell is coated on the outer side wall of the sealed outer tube.

[0009] Preferably, a resistance heater and a heat preservation layer covering the outside of the resistance heater are provided in the heating shell.

[0010] Preferably, the sealing assembly and the converter are at least partially enclosed within the heating shell.

[0011] Preferably, a retaining spring groove is provided at the top of the collecting inner tube, a retaining spring for abutting the top of the first optical glass is provided in the retaining spring groove, an inner sleeve is provided at the top of the collecting inner tube, a step is extended inward from the top of the inner sleeve for abutting the bottom end of the first optical glass, and a light hole is formed in the middle of the step.

[0012] Preferably, a first protrusion is provided on the side end of the inner sleeve so as to be snap-fitted to the inner tube wall of the collection inner tube.

[0013] Preferably, a bottom sleeve is provided at the bottom end of the collecting inner tube, the outer wall of the bottom sleeve is attached to the inner tube wall of the collecting inner tube, and the bottom sleeve is provided with a first hole, a second hole, and a third hole from bottom to top, the diameter of the first hole is larger than the diameter of the second hole, and the diameter of the third hole is larger than the diameter of the second hole.

[0014] Preferably, a slot is formed at the bottom end of the bottom sleeve.

[0015] Preferably, a second protrusion is provided on the side end of the bottom sleeve so as to be snap-fitted to the inner tube wall of the collection inner tube.

[0016] Preferably, a rotary hook is provided at the top end of the collecting inner tube for hanging with the sealing outer tube.

[0017] Preferably, the bottom end of the sealed outer tube is sealed and connected to the reaction chamber through a lower flange, the top end of the sealed outer tube is sealed and connected to the sealing assembly through an upper flange, and a threaded structure for threaded connection with the lower end of the concentrator is provided on the top of the converter.

[0018] The beneficial effects of the present invention are as follows: a sealed outer tube is sealed and connected to the reaction chamber, and the collection inner tube is a set of structures assembled inside the sealed outer tube for collecting spectra and isolating pollution in the reaction chamber. The other end of the sealed outer tube is connected to a sealing component, and the sealing component is connected to a converter at one end away from the collection inner tube, and the converter is connected to a condenser at one end away from the sealing component. A heating shell is coated on the outer wall of the sealed outer tube, and the heating shell heats the spectrometer collection inner tube through external heating and then through the thermal radiation effect, thereby assisting the collection inner tube from being affected by the reaction temperature of the chamber. A gas access port is connected to the sealing component, and a certain amount of inert gas is introduced to form a pressure in the overall collector device that is higher than the pressure in the reaction chamber, thereby further improving the accuracy of data collected by the collector structure. Replacing cheap optical glass to ensure the accuracy of spectral data collection in each production cycle, and collecting the inner tube by sealing the outer tube and the inner tube can greatly reduce the difficulty of maintenance or replacement of the structure. By fully covering the heater with the external component, the heat can be transferred to the internal component through radiation, and there is no need to set up heating inside the collection structure, which can reduce the design difficulty and reduce the impact of thermal radiation on luminosity, thereby not affecting the accuracy of the collected data. By additionally introducing a small amount of inert gas into the sealing component, the internal pressure of the collection structure is slightly greater than that inside the cavity, which further reduces the probability of the optical device in the collection structure being affected by reactive impurities. By controlling the diameter of the optical through hole inside the collection inner tube, the light intensity requirements of different spectral analysis instruments can be controlled to meet the measurement light intensity range of the spectrometer. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only for the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0021] Figure 2 It is a schematic diagram of the internal structure of the present invention;

[0022] Figure 3 This is a schematic diagram of the internal structure of the collection inner tube of the present invention;

[0023] Figure 4 It is a schematic diagram of the structure of the rotary hanging of the present invention;

[0024] Figure 5 is a schematic structural diagram of the first optical glass of the present invention;

[0025] Figure 6It is a structural schematic diagram of the collection inner tube of the present invention;

[0026] Figure 7 It is a structural schematic diagram of the sealed outer tube of the present invention;

[0027] Figure 8 It is a schematic diagram of the assembly structure of the sealing component, the converter and the concentrator of the present invention;

[0028] Fig. 9 It is a structural schematic diagram of the sealing assembly of the present invention;

[0029] Fig.10 It is a schematic diagram of the internal structure of the concentrator of the present invention.

[0030] The markings in the figure are:

[0031] 1. Reaction chamber; 2. Collection inner tube; 201. First optical glass; 202. Rotary hanging; 203. Retaining spring groove; 204. Light-through hole; 205. Step; 206. First protrusion; 207. Inner sleeve; 209. Third hole; 210. Second protrusion; 211. First hole; 212. Bottom sleeve; 213. Slot; 3. Sealed outer tube; 31. Upper flange; 32. Lower flange; 4. Heating shell; 5. Sealing assembly; 51. Gas inlet; 6. Converter; 600. Through hole; 7. Concentrator; 800. Second hole; 100. Sealing medium. DETAILED DESCRIPTION

[0032] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments.

[0033] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0034] like Figure 1 , Figure 2As shown, a sealed collection structure for improving the accuracy of spectral data collection is sealed and connected to a reaction chamber 1, including a sealed outer tube 3, a collection inner tube 2 is assembled in the sealed outer tube 3, one end of the sealed outer tube 3 is closed and connected to the reaction chamber 1, and the other end is connected to a sealing component 5, the sealing component 5 is connected to a gas inlet 51 for introducing an inert gas, the sealing component 5 is connected to a converter 6 at one end away from the collection inner tube 2, and the converter 6 is connected to a condenser 7 at one end away from the sealing component 5, a first optical glass 201 is arranged in the collection inner tube 2, a second optical glass is arranged in the sealing component 5, and a heating shell 4 is covered on the outer wall of the sealed outer tube 3.

[0035] The present invention provides a sealed outer tube 3 sealed and connected to a reaction chamber 1. The reaction chamber 1 refers to a vacuum or non-vacuum container. A chemical or physical reaction occurs in the container. Energy transition in the reaction can release a stable spectrum. The collection inner tube 2 is a set of structures assembled inside the sealed outer tube 3 for collecting spectra and isolating pollution in the reaction chamber 1. One end of the sealed outer tube 3 is sealed and connected to the reaction chamber 1 to form isolation inside and outside the chamber, so that the collection structure can not only collect spectral data, but also ensure the stability of the reaction in the chamber without being interfered by the collection or other functions. The other end of the sealed outer tube 3 is connected to a sealing component 5. The end of the sealing component 5 away from the collection inner tube 2 is connected to a converter 6. The end of the converter 6 away from the sealing component 5 is connected to a condenser 7. The collection inner tube 2 is provided with a first optical glass 201, and the sealing component 5 is provided with a second optical glass. The converter 6 makes necessary structural changes without changing the spectral data, so that the back-end connection device is easier to connect. It is mainly suitable for connecting components with different sizes at both ends, or downstream components need to be adjusted in size or angle, such as Fig.10As shown, the concentrator 7 is a catalytic structure that transmits the spectrum collected by the upstream component through the downstream optical fiber for a long distance. It can aggregate the divergent light collected at the upstream end into a specific small area through the concentrating lens, which is convenient for the accuracy of the downstream optical transmission data. Considering that the sputtering or vapor in the cavity during the reaction is affected by the cold state of the collection structure, fogging will occur on the collection structure to reduce the accuracy of the spectrum, especially in the vacuum evaporation coating environment, the collection structure is a cold element, and the chamber reaction releases a hot pollution source. The hot pollution source is cooled and then forms pollutant solids on the optical component, reducing the accuracy of the optical component. The outer wall of the sealed outer tube 3 is coated with a heating shell 4, and the heating shell 4 is heated by external heating and then by the thermal radiation effect to heat the spectrometer collection inner tube 2. Heat helps the collection inner tube 2 not to be affected by the reaction temperature of the cavity. The sealing component 5 has a second optical glass with high transmittance, and the sealing is not affected by the intervention of the optical glass. The sealing component 5 is connected with a gas access port 51. Preferably, the gas access port 51 controls the inflow of a specific amount of inert gas through an external MFC. By introducing a certain amount of inert gas, the pressure in the overall collector device is higher than the pressure in the reaction cavity 1. According to the principle of gas diffusion, the pressure diffusion flows from the collector to the inside of the cavity, thereby having a certain protective effect on the collector. In addition, since the light transmission is not affected by the pressure and gas medium, adding a small amount of inert body has no effect on the light transmission, thereby further improving the accuracy of the data collected by the collector structure.

[0036] Specifically, a spectrum is released during the chemical or physical reaction in the reaction chamber 1, and is screened through the structure inside the collecting inner tube 2 perpendicular to the direction of the light, so that light with specific requirements passes through the collecting inner tube 2 to the first optical glass 201 at the top thereof, and then passes through the first optical glass 201 to the sealing component 5 with flat optical glass, and finally passes through the internal cavity of the converter 6 to the optical glass surface inside the concentrator 7. The low-intensity light is condensed onto the downstream optical fiber through the concentrating optical glass, and can be transmitted over a long distance through the optical fiber to reach the analysis equipment for spectral separation, thereby obtaining the current reaction state in the body.

[0037] In the embodiment of the present invention, a resistance heater and a heat preservation layer covering the outside of the resistance heater are arranged in the heating shell 4 .

[0038] In an embodiment of the present invention, the sealing component 5 and the converter 6 are at least partially enclosed in the heating shell 4, and heat can be transferred from the outside to the internal components through thermal radiation, including the optical glass components included in the collection inner tube 2 and the sealing component 5 and the converter 6. The temperature reached by forming the optical component structure is higher than the freezing point / liquefaction point of the pollution source generated by the reaction in the reaction chamber 1, thereby effectively preventing the pollution source from liquefying / solidifying on the optical component to form an interference source.

[0039] In an embodiment of the present invention, Figure 3 , Figure 5 As shown, a retaining spring groove 203 is provided at the top of the collecting inner tube 2, and a retaining spring is provided in the retaining spring groove 203 for abutting against the top of the first optical glass 201 to prevent it from sliding or falling off. An inner sleeve 207 is provided at the top of the collecting inner tube 2, and a through hole 600 is formed in the middle of the inner sleeve 207. A step 205 is extended inward from the top of the inner sleeve 207 for abutting against the bottom of the first optical glass 201. A light hole 204 is formed in the middle of the step 205. The light hole 204 is slightly smaller than the first optical glass 201. On the one hand, it can collect the light flowing in from the upstream component, and on the other hand, it can prevent the pollution source in the reaction of the reaction chamber 1 from diffusing to the downstream component sealing component 5 to cause pollution of the optical coating glass. The step 205 plays a role of lower support, and cooperates with the upper retaining spring to fix the first optical glass 201.

[0040] In an embodiment of the present invention, Figure 3 , Figure 5 As shown, the side end of the inner sleeve 207 is provided with a first protrusion 206 to be snapped onto the inner tube wall of the collecting inner tube 2. The first protrusion 206 and the tube wall of the collecting inner tube 2 need to be connected 180° to ensure that the tube wall and the first optical glass 201 form a 90° angle.

[0041] The structure of the inner tube 2 is collected, and the light with an incident angle of 90° radiated from the screening reaction chamber 1 is selected, so that the incident light transmitted to the downstream components is perpendicular to all optical glass planes, reducing the temperature reflection loss caused by the incident angle.

[0042] The first optical glass 201 is fused quartz glass or optical coating glass. This patent prefers fused quartz glass based on the frequency of use and cost, because it has good light transmittance, low surface diffuse reflection, and low cost.

[0043] In an embodiment of the present invention, Figure 3 , Figure 5As shown, a bottom sleeve 212 is provided at the bottom end of the collecting inner tube 2, and the outer wall of the bottom sleeve 212 is attached to the inner tube wall of the collecting inner tube 2. The bottom sleeve 212 is provided with a first hole 211, a second hole 800, and a third hole 209 from bottom to top. The diameter of the first hole 211 is larger than the diameter of the second hole 800, and the diameter of the third hole 209 is larger than the diameter of the second hole 800, so that the second hole 800 only intercepts the light in the middle area of ​​the collecting light source. The light in this area is not disturbed by other factors, and the data is most accurate. The diameter of the third hole 209 is equivalent to that of the through hole 600, and the through hole 600 is The diameter should be larger than the diameter of the light-clearing hole 204. The first hole 211, the second hole 800 and the third hole 209 form an optical correction structure, which filters the 90-degree incident light for use by the spectrometer and removes the incident light reflected by the tube surface or with a cosine angle to ensure the accuracy of the collected data. The intensity of the collected light can be controlled by controlling the diameter of the second hole 800. Considering that the light intensity generated by the strong internal reaction of some equipment is high, and the spectrometer has a specific range, the collected light intensity must meet the intensity mileage range of the spectrometer. This can be achieved by adjusting the diameter of the second hole 800.

[0044] In an embodiment of the present invention, Figure 3 , Figure 5 As shown, a slot 213 is provided at the bottom end of the bottom sleeve 212 for installing a fulcrum for the collection inner tube 2 to rotate. A slotted screwdriver tool can be used to complete the above operation. This structure is simple but highly practical.

[0045] In an embodiment of the present invention, Figure 3 , Figure 5 As shown, a second protrusion 210 is provided at the side end of the bottom sleeve 212 to be snapped into a groove at a corresponding position on the inner tube wall of the collection inner tube 2 so that the bottom sleeve 212 fits tightly against the inner wall of the collection inner tube 2 .

[0046] In an embodiment of the present invention, Figure 3 , Figure 4 , Figure 5 As shown, a rotary hanger 202 is provided at the top of the collecting inner tube 2 for hanging the collecting inner tube 2 and the sealing outer tube 3. By adopting the hanging method, this structure only needs to push the entire collecting inner tube 2 to the top of the sealing outer tube 3, align the connection point and then screw the rotary hanger 202 into the position to achieve the connection. This structure is simple to operate but has an anti-detachment structure that can effectively prevent the structure from falling off due to external effects in application, such as deformation caused by contraction of the cold and hot structure.

[0047] In an embodiment of the present invention, Figures 6 to 9As shown, the bottom end of the sealed outer tube 3 is connected with a lower flange 32, which is sealed and connected to the reaction chamber 1 through the lower flange 32; the top end of the sealed outer tube 3 is connected with an upper flange 31, which is sealed and connected to the sealing assembly 5 through the upper flange 31; the sealing medium 100 of the upper flange 31 and the lower flange 32 can be one or more of a fluororubber sealing ring, a copper pad, an aluminum pad, a nickel pad, etc.; the upper flange 31, the sealing medium 100, the sealing assembly 5, and the converter 6 are externally connected by bolts, and are optically conductive internally; the lower flange 32, the sealing medium 100, and the reaction chamber 1 are externally connected by bolts, and are optically conductive internally; the sealing medium 100 at this position is preferably a high temperature resistant metal gasket, which is one or more of a copper pad, an aluminum pad, a nickel pad, etc.; a threaded structure is provided on the top of the converter 6 for threaded connection with the lower end of the concentrator 7.

[0048] Those skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present invention (including the claims) is limited to these examples. Under the concept of the present invention, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in detail for the sake of simplicity.

[0049] The present invention is intended to cover all such substitutions, modifications and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A sealed collection structure for improving the accuracy of spectral data collection, which is sealed and connected to a reaction chamber, characterized in that: include: A sealed outer tube, wherein a collection inner tube is assembled in the sealed outer tube, one end of the sealed outer tube is sealed and connected to the reaction chamber, and the other end is connected to a sealing component, and the sealing component is connected to a gas inlet for introducing an inert gas, and the end of the sealing component away from the collection inner tube is connected to a converter, and the end of the converter away from the sealing component is connected to a condenser; The collecting inner tube is provided with a first optical glass, and the sealing component is provided with a second optical glass; The heating shell is covered on the outer side wall of the sealed outer tube.

2. A sealed collection structure for improving the accuracy of spectral data collection according to claim 1, characterized in that: A resistance heater and a heat preservation layer covering the outside of the resistance heater are arranged in the heating shell.

3. A sealed collection structure for improving the accuracy of spectral data collection according to claim 1, characterized in that: The sealing assembly and the converter are at least partially enclosed within the heating shell.

4. A sealed collection structure for improving the accuracy of spectral data collection according to claim 1, characterized in that: A retaining spring groove is provided at the top of the collecting inner tube, a retaining spring for abutting the top of the first optical glass is provided in the retaining spring groove, an inner sleeve is provided at the top of the collecting inner tube, a step is extended inward from the top of the inner sleeve for abutting the bottom end of the first optical glass, and a light hole is formed in the middle of the step.

5. A sealed collection structure for improving the accuracy of spectral data collection according to claim 4, characterized in that: The side end of the inner sleeve is provided with a first protrusion to be clamped on the inner tube wall of the collection inner tube.

6. The sealed collection structure for improving the accuracy of spectral data collection according to claim 1, characterized in that: A bottom sleeve is provided at the bottom end of the collecting inner tube, and the outer wall of the bottom sleeve is attached to the inner tube wall of the collecting inner tube. The bottom sleeve is provided with a first hole, a second hole, and a third hole in sequence from bottom to top. The diameter of the first hole is larger than the diameter of the second hole, and the diameter of the third hole is larger than the diameter of the second hole.

7. A sealed collection structure for improving the accuracy of spectral data collection according to claim 6, characterized in that: A slot is provided at the bottom end of the bottom sleeve.

8. The sealed collection structure for improving the accuracy of spectral data collection according to claim 6, characterized in that: The side end of the bottom sleeve is provided with a second protrusion for clamping on the inner tube wall of the collection inner tube.

9. The sealed collection structure for improving the accuracy of spectral data collection according to claim 1, characterized in that: A rotary hook is provided at the top end of the collecting inner tube for being hung with the sealing outer tube.

10. The sealed collection structure for improving the accuracy of spectral data collection according to claim 1, characterized in that: The bottom end of the sealed outer tube is sealed and connected to the reaction chamber through a lower flange, the top end of the sealed outer tube is sealed and connected to the sealing assembly through an upper flange, and a threaded structure is provided on the top of the converter for threaded connection with the lower end of the concentrator.

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