A temperature compensation method for hot film flowmeter

By building a Wheatstone bridge and design resistor, the problem of output signal drift of the thermal film flowmeter when the fluid temperature changes is changed, and the compensation for the lead resistance is achieved is achieved, which improves measurement accuracy.

CN115127631BActive Publication Date: 2025-03-21SUZHOU IN SITU CHIP TECH CO LTD
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Patent Information

Application Number
CN202110327956.2
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2021-03-26
Publication Date
2025-03-21
Estimated Expiration
2041-03-26

AI Technical Summary

Technical Problem

Thermal film flowmeter will cause the output signal to drift when the fluid temperature changes, affecting the measurement accuracy.

Method used

By building a Wheatstone bridge, combining heating thermistor and temperature measuring thermistor, and designing resistance and determining parameters such as reference temperature, overheating ratio, and expected temperature difference, compensation for the lead resistance is achieved.

Benefits of technology

The temperature difference drift caused by the heating thermistor's lead resistance changes with the fluid temperature, suppresses the drift of the output voltage with the fluid temperature, and improves the accuracy of flow measurement.

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Abstract

The present invention relates to a temperature compensation method for a thermal film flowmeter, wherein the thermal film flowmeter comprises a silicon plate and a heating thermistor and a temperature measuring thermistor arranged on the fluid side surface of the silicon plate, wherein solder joints are arranged on the silicon plate, wherein the heating thermistor is connected to the corresponding solder joints via leads, wherein the leads are arranged on the fluid side surface of the silicon plate. The method comprises: S1 constructing a Wheatstone bridge, S2 designing a resistor, and S3 obtaining a voltage value U3 across the third fixed resistor when measuring the flow rate of the fluid to be detected, and compensating the output voltage U′ by U′=M·U3, wherein #imgabs0# wherein T f is the temperature measured by the temperature measuring thermistor, thereby achieving temperature compensation.
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