Multi-band Filtering Component, Preparation Method and Multispectral Detection Device

Abstract

The present application relates to the field of multispectral detection technology, and provides a multi-band filter assembly, a preparation method and a multispectral detection device. The multi-band filter assembly includes: a substrate, the substrate includes a plurality of first channels and at least one second channel, wherein the distance between any two adjacent first channels is less than the distance between the second channel and any one of the first channels, and / or, the distance between any two adjacent first channels is less than the distance between any two adjacent second channels; a plurality of filter films, the plurality of filter films are respectively arranged on the first channels and the second channels, wherein there are at least two filter films among the plurality of filter films that allow different wavelength ranges to pass through. By restricting the positional relationship between the multiple channels corresponding to the multiple filter films, the dynamic range of the multi-band filter assembly is improved, thereby improving the dynamic range of the multispectral detection device.

Description

Technical Field

[0001] This application relates to the field of multispectral detection technology, and particularly to a multi-band filter component, a preparation method, and a multispectral detection device. Background Art

[0002] Multispectral detectors have wide applications in fluorescence detection, infrared identification, space remote sensing, and imaging fields. The multispectral detector first splits the wide-band incident signal into multiple narrow-band signals, and then uses corresponding detector sensing areas such as CMOS sensors (Complementary Metal-Oxide-Semiconductor) or CCD sensors (Charge Coupled Device) for detection. In this process, the dynamic range of the sensor plays an important role. The dynamic range determines the ability of the multispectral detector to distinguish strong light from weak light, and reflects the ratio of the maximum value to the minimum value of the measured light, with the unit of decibel. Currently, the dynamic range performance of most sensors is below 100 decibels, so the multispectral detection relying on sensors is limited by high-dynamic-range measurement environments. Specifically, in a multispectral detector based on multi-band filters, because the corresponding filter bands of each filter are different, when receiving effective signal light, in the case of insufficient dynamic range of the detector itself, it is very easy for some filter channels to be saturated and overflow, and overflow to other effective filter channels that are not saturated, thus causing signal distortion. Therefore, improving the dynamic range of the multispectral detector and achieving high-quality measurement is a very important goal.

[0003] The main current technical means to improve the dynamic range of the detector are as follows: 1. By changing the hardware size of the detector to increase the saturation well capacity and enhance the charge storage and collection ability during the period, so as to achieve a wide dynamic range. 2. By controlling the exposure time of the detector for multiple exposures and performing complex data processing to improve the dynamic range of the detector. 3. By controlling the discrete integration time of pixels to achieve multiple signal gains, and generating corresponding data by discretely processing the data of each pixel to improve the dynamic range. However, these solutions have great limitations in practical applications, requiring higher processing technology, more circuit control, longer data processing time, and consuming higher costs. Summary of the Invention

[0004] The main purpose of this application is to provide a multi-band filter component, a preparation method, and a multispectral detection device, aiming to improve the dynamic range of the multi-band filter component, thereby improving the dynamic range of the multispectral detection device.

[0005] In a first aspect, this application provides a multi-band filter component, including:

[0006] A substrate, the substrate comprising a plurality of first channels and at least one second channel, wherein the distance between any two adjacent first channels is less than the distance between the second channel and any one of the first channels, and / or the distance between any two adjacent first channels is less than the distance between any two adjacent second channels;

[0007] A plurality of filters, the plurality of filters being respectively disposed on the first channels and the second channel, wherein at least two of the plurality of filters have different wavelength ranges that are allowed to pass through.

[0008] In a second aspect, the present application further provides a method for manufacturing a multi-band filter assembly, the manufacturing method comprising:

[0009] Providing a substrate, the substrate comprising a plurality of first channels and at least one second channel, wherein the distance between any two adjacent first channels is less than the distance between the second channel and any one of the first channels, and / or the distance between any two adjacent first channels is less than the distance between any two adjacent second channels;

[0010] Providing a plurality of filters, the plurality of filters being respectively disposed on the first channels and the second channel, wherein at least two of the plurality of filters have different wavelength ranges that are allowed to pass through.

[0011] In a third aspect, the present application further provides a multi-spectral detection device, comprising:

[0012] The aforementioned multi-band filter assembly;

[0013] A photoelectric conversion unit configured to output a corresponding signal when receiving light that has passed through the multi-band filter assembly.

[0014] By providing a multi-band filter assembly, a manufacturing method, and a multi-spectral detection device, the multi-band filter assembly includes: a substrate, the substrate comprising a plurality of first channels and at least one second channel, wherein the distance between any two adjacent first channels is less than the distance between the second channel and any one of the first channels, and / or the distance between any two adjacent first channels is less than the distance between any two adjacent second channels; a plurality of filters, the plurality of filters being respectively disposed on the first channels and the second channel, wherein at least two of the plurality of filters have different wavelength ranges that are allowed to pass through. By restricting the positional relationship between the multiple channels corresponding to the multiple filters, the dynamic range of the multi-band filter assembly is increased, thereby increasing the dynamic range of the multi-spectral detection device. Description of the Drawings

[0015] To more clearly illustrate the technical solutions of the embodiments of the present application, the accompanying drawings required for the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, other accompanying drawings can be obtained based on these drawings without creative efforts.

[0016] Figure 1 It is a schematic structural diagram of a multi-band filter component provided by an embodiment of the present application;

[0017] Figure 2 It is a partial cross-sectional view of a substrate in an embodiment;

[0018] Figure 3 It is a partial cross-sectional view of a substrate in another embodiment;

[0019] Figure 4 It is a schematic structural diagram of a substrate in an embodiment;

[0020] Figure 5 It is a schematic structural diagram of a substrate in another embodiment;

[0021] Figure 6 It is a schematic structural diagram of a substrate in yet another embodiment;

[0022] Figure 7 It is a schematic flowchart of a preparation method of a multi-band filter component provided by an embodiment of the present application;

[0023] Figure 8 It is a schematic block diagram of a multi-spectral detection device provided by an embodiment of the present application.

[0024] Explanation of reference numerals: 10, multi-spectral detection device; 100, multi-band filter component; 110, substrate; 120, filter; 111, first channel; 112, second channel; 1111, first light-passing hole; 1112, first groove; 1121, second light-passing hole; 1122, second groove; 200, photoelectric conversion unit.

[0025] The realization of the purpose, functional features and advantages of the present application will be further described with reference to the embodiments and the accompanying drawings. Detailed implementation manners

[0026] Next, the technical solutions in the embodiments of the present application will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts fall within the scope of protection of the present application.

[0027] The flowcharts shown in the accompanying drawings are merely illustrative examples, and do not necessarily include all the content and operations / steps, nor are they necessarily executed in the order described. For example, some operations / steps can be decomposed, combined, or partially merged, so the actual execution order may change according to the actual situation.

[0028] It should be understood that the terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. As used in the specification of this application and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an", and "the" are intended to include the plural forms.

[0029] It should also be understood that the term "and / or" used in the specification of this application and the appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0030] The following will describe in detail some embodiments of this application in conjunction with the accompanying drawings. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0031] Please refer to Figure 1 , Figure 1 which is a schematic structural diagram of a multi-band filter component 100 provided by an embodiment of this application.

[0032] As Figure 1 shown, the multi-band filter component 100 includes: a substrate 110, the substrate 110 includes a plurality of first channels 111 and at least one second channel 112, wherein the distance between any two adjacent first channels 111 is less than the distance between the second channel 112 and any one of the first channels 111, and / or, the distance between any two adjacent first channels 111 is less than the distance between any two adjacent second channels 112; a plurality of filter films 120, the plurality of filter films 120 are respectively disposed on the first channels 111 and the second channels 112, wherein at least two of the plurality of filter films 120 have different wavelength ranges allowed to pass through.

[0033] Exemplarily, the material of the substrate 110 may include metal, resin, or other corrosion-resistant materials.

[0034] Exemplarily, the filter film 120 may include a coated dielectric filter film, an absorption filter film, or other types of filter films.

[0035] In some embodiments, the integration methods of the conventional multi-band filter assembly 100 include monolithic integration and direct bonding. Among them, the direct bonding method means that after the filter films 120 of each band are prepared, each filter film 120 is cut into a micro size, and then a plurality of filter films 120 of different bands are directly bonded and spliced. The distance between the micro filter films 120 is small, which easily leads to a large crosstalk problem between the filter films 120.

[0036] It can be understood that the substrate 110 in the multi-band filter assembly 100 includes a plurality of first channels 111 and at least one second channel 112. A plurality of filter films 120 are respectively arranged on the first channels 111 and the second channel 112. The substrate 110 provides a physical interval for the plurality of filter films 120, thereby reducing the crosstalk between the filter films 120.

[0037] Exemplarily, the photoelectric conversion unit 200 in the multispectral detector device may include a CMOS sensor and a CCD sensor. It can be understood that the photoelectric conversion unit 200 includes a plurality of photodiodes.

[0038] In some embodiments, after the plurality of filter films 120 in the multi-band filter assembly 100 allow light of a plurality of specific bands to pass through, the photoelectric conversion unit 200 receives the light passing through the multi-band filter assembly 100, and the photodiodes corresponding to the positions of the plurality of filter films 120 in the photoelectric conversion unit 200 convert the received photons into electrons and store them. It can be understood that the more electrons stored in the photodiode, the corresponding increase in the charge density. When the charge capacity stored in the photodiode exceeds the saturation well capacity of the photodiode, the excess electrons will overflow to the nearby photodiode, resulting in signal distortion.

[0039] For example, the target multispectral excitation and detection device includes a multispectral excitation device and a multispectral detection device 10. In the target multispectral excitation and detection device, the excitation wavelengths corresponding to the excitation light sources of the multispectral excitation device are 250nm, 270nm, 310nm, 365nm, 400nm, 450nm, and the acquisition wavelengths corresponding to the multispectral detection device 10 are 365nm, 400nm, 450nm, 500nm, 600nm. There is an overlapping part between the excitation wavelengths corresponding to the excitation light sources of the multispectral excitation device and the acquisition wavelengths corresponding to the multispectral detection device 10. The wavelengths corresponding to the overlapping part are 365nm, 400nm, and 450nm.

[0040] It can be understood that when the multi-band filter component 100 is applied to the multi-spectral detection device 10, the acquisition wavelengths corresponding to the multi-spectral detection device 10 are equivalent to the wavelengths allowed to pass through by the multiple filter films 120 in the multi-band filter component 100 of the multi-spectral detection device 10. Compared with the photodiodes corresponding to the filter films 120 in the photoelectric conversion unit 200 that allow the light with wavelengths of 500 nm and 600 nm to pass through in the multi-band filter component 100, the charge capacity stored in the photodiodes corresponding to the filter films 120 in the photoelectric conversion power supply that allow the light with wavelengths of 365 nm, 400 nm, and 450 nm to pass through in the multi-band filter component 100 is more likely to reach its saturation well capacity. In order to prevent excess electrons from overflowing into the nearby photodiodes and causing distortion of the measured optical signal, corresponding restrictions need to be imposed on the positions of the respective filter films 120.

[0041] In some embodiments, the filter films 120 that allow the light with wavelengths of 365 nm, 400 nm, and 450 nm to pass through are disposed on the second channel 112 of the substrate 110 in the multi-band filter component 100, and the filter films 120 that allow the light with wavelengths of 500 nm and 600 nm to pass through are disposed on the first channel 111 of the substrate 110 in the multi-band filter component 100, wherein the distance between any two adjacent first channels 111 is less than the distance between the second channel 112 and any one of the first channels 111, and / or the distance between any two adjacent first channels 111 is less than the distance between any two adjacent second channels 112. Thus, when the photodiodes corresponding to the position of the second channel 112 reach the saturation well capacity, the influence on the optical signals received by the photodiodes corresponding to the position of the first channel 111 is minimized as much as possible.

[0042] It can be understood that after the positions of the first channel 111 and the second channel 112 on the substrate 110 in the multi-band filter component 100 are determined, the distance between the first channel 111 and the second channel 112 on the substrate 110 can also be changed by changing the sizes of the first channel 111 and the second channel 112 on the substrate 110.

[0043] It can be understood that the influencing factors of the sizes of the first channel 111 and the second channel 112 include at least one of the cross-sectional shapes of the first channel 111 and the second channel 112 and the parameters corresponding to the cross-sectional shapes of the first channel 111 and the second channel 112, which are not limited herein.

[0044] For example, if the cross-sectional shapes of the first channel 111 and the second channel 112 are rectangular, the parameters corresponding to the cross-sectional shapes of the first channel 111 and the second channel 112 include at least one of the length, width, and diagonal length of the rectangle. The sizes of the first channel 111 and the second channel 112 can be reduced by reducing at least one of the length, width, and diagonal length corresponding to the cross-sectional shapes of the first channel 111 and the second channel 112. If the cross-sectional shapes of the first channel 111 and the second channel 112 are circular, the parameters corresponding to the cross-sectional shapes of the first channel 111 and the second channel 112 include the diameter or radius of the circle. The sizes of the first channel 111 and the second channel 112 can be reduced by reducing the diameter or radius corresponding to the cross-sectional shapes of the first channel 111 and the second channel 112.

[0045] It can be understood that after the positions of the first channel 111 and the second channel 112 are determined, by reducing the sizes of the first channel 111 and the second channel 112, the distance between the channels can be correspondingly increased, preventing the photodiode corresponding to the position of a certain channel from reaching the saturation well capacity, and the excess electrons overflowing to the photodiode corresponding to the position of the nearby channel, causing distortion of the measured optical signal, and improving the dynamic range of the multi-band filter assembly 100.

[0046] In some embodiments, there may be a situation where the excitation wavelength of the multi-spectral excitation device and the acquisition wavelength of the multi-spectral detection device 10 completely overlap, or there may be a situation where it is unknown whether there is an overlapping wavelength between the excitation wavelength of the unknown multi-spectral excitation device and the acquisition wavelength of the multi-spectral detection device 10. It can be understood that in order to prevent the electrons of the photodiode at a certain position in the photoelectric conversion unit 200 from saturating and overflowing to the photodiodes at other positions, the cross-sectional shape parameters of the lens of the multi-spectral detection device 10 can be obtained, and according to the cross-sectional shape parameters of the lens of the multi-spectral detection device 10, the cross-sectional area of the substrate 110 adapted to the cross-sectional shape of the lens of the multi-spectral detection device 10 can be determined. Within the range of the cross-sectional area of the substrate 110, the positions of the respective channels in the substrate 110 are uniformly arranged, so as to increase the distance between the respective filter elements 120 as much as possible. It can be understood that after the positions of the respective channels in the substrate 110 are determined, the sizes of the respective channels in the substrate 110 can also be restricted. When the sizes of the respective channels in the substrate 110 are reduced, the distance between the channels is correspondingly increased, and the dynamic range of the multi-band filter assembly 100 is also correspondingly improved.

[0047] In some embodiments, the multiple filter elements 120 are respectively disposed on the first channel 111 and the second channel 112 may include placing the multiple filter elements 120 at the corresponding positions of the first channel 111 and the second channel 112 respectively, and gluing or clamping the filter elements 120 to the first channel 111 and the second channel 112.

[0048] It can be understood that the position of the filter 120 can be restricted by the first channel 111 and the second channel 112 of the substrate 110. At the same time, restricting the position of the filter 120 through the substrate 110 and gluing and splicing the substrate 110 and the filter 120 is more convenient and easier compared to directly gluing and splicing multiple filters 120.

[0049] Optionally, the first channel 111 forms a first light passing hole 1111, and the second channel 112 forms a second light passing hole 1121; the first light passing hole 1111 and the second light passing hole 1121 penetrate the substrate 110; multiple filters 120 are respectively arranged on the first light passing hole 1111 and the second light passing hole 1121, and the width of each filter 120 is greater than or equal to the width of the first light passing hole 1111 and the second light passing hole 1121.

[0050] It can be understood that the width of the first light passing hole 1111 is a parameter corresponding to the cross-sectional shape of the first light passing hole 1111, and the width of the second light passing hole 1121 is a parameter corresponding to the cross-sectional shape of the second light passing hole 1121. For example, when the cross-sectional shapes of the first light passing hole 1111 and the second light passing hole 1121 are circular, the widths of the first light passing hole 1111 and the second light passing hole 1121 are equivalent to the diameter or radius of the circle; when the cross-sectional shapes of the first light passing hole 1111 and the second light passing hole 1121 are rectangular, the widths of the first light passing hole 1111 and the second light passing hole 1121 are equivalent to at least one of the length, width, and diagonal length of the rectangle, and no limitation is made here.

[0051] It can be understood that when the widths of the first light passing hole 1111 and the second light passing hole 1121 decrease, the sizes of the first channel 111 and the second channel 112 also decrease accordingly, and the distance between the first channel 111 and the second channel 112 increases accordingly.

[0052] Exemplarily, that multiple filters 120 are respectively arranged on the first light passing hole 1111 and the second light passing hole 1121 may include respectively placing or clamping multiple filters 120 at corresponding positions of the first light passing hole 1111 and the second light passing hole 1121, and gluing each filter 120 to the first light passing hole 1111 and the second light passing hole 1121.

[0053] In some embodiments, when the widths of multiple filters 120 are greater than the widths of the first light passing hole 1111 and the second light passing hole 1121, multiple filters 120 can be respectively placed at corresponding positions of the first light passing hole 1111 and the second light passing hole 1121, and each filter 120 is glued to the first light passing hole 1111 and the second light passing hole 1121.

[0054] In some embodiments, when the widths of the plurality of filters 120 are equal to the widths of the first light passing hole 1111 and the second light passing hole 1121, the plurality of filters 120 can be respectively clamped on the first light passing hole 1111 and the second light passing hole 1121, and each filter 120 is glued to the first light passing hole 1111 and the second light passing hole 1121.

[0055] Optionally, the first channel 111 is formed with a first groove 1112 at at least one end of the first light passing hole 1111, and the width of the first light passing hole 1111 is smaller than the width of the first groove 1112; the second channel 112 is formed with a second groove 1122 at at least one end of the second light passing hole 1121, and the width of the second light passing hole 1121 is smaller than the width of the second groove 1122; the plurality of filters 120 are respectively disposed on the first groove 1112 and the second groove 1122, and the width of each filter 120 is smaller than or equal to the widths of the first groove 1112 and the second groove 1122.

[0056] It can be understood that the width of the first groove 1112 is a parameter corresponding to the cross-sectional shape of the first groove 1112, and the width of the second groove 1122 is a parameter corresponding to the cross-sectional shape of the second groove 1122. For example, when the cross-sectional shapes of the first groove 1112 and the second groove 1122 are circular, the widths of the first groove 1112 and the second groove 1122 are equivalent to the diameter or radius of the circle; when the cross-sectional shapes of the first groove 1112 and the second groove 1122 are rectangular, the widths of the first groove 1112 and the second groove 1122 are equivalent to at least one of the length, width, and diagonal length of the rectangle, and no limitation is made herein.

[0057] It can be understood that when the widths of the first groove 1112 and the second groove 1122 decrease, the sizes of the first channel 111 and the second channel 112 also decrease accordingly, and the distance between the first channel 111 and the second channel 112 increases accordingly.

[0058] In some embodiments, as Figure 2 shown, when the first channel 111 is formed with a first groove 1112 at one end of the first light passing hole 1111, the second channel 112 is formed with a second groove 1122 at one end of the second light passing hole 1121, and the orientations of the first groove 1112 and the second groove 1122 are the same.

[0059] In some embodiments, as Figure 3 shown, when the first channel 111 is formed with first grooves 1112 at both ends of the first light passing hole 1111, the second channel 112 is formed with second grooves 1122 at both ends of the second light passing hole 1121.

[0060] In some embodiments, a plurality of filters 120 are respectively disposed on the first groove 1112 and the second groove 1122, and each filter 120 is glued to the first groove 1112 and the second groove 1122.

[0061] It can be understood that when the first groove 1112 and the second groove 1122 are provided on both sides of the substrate 110 in the multi-band filter assembly 100 for respectively disposing a plurality of filters 120, it helps to increase the upper limit of the OD value (Optical Density) of the multi-band filter assembly 100, thereby achieving a better filtering effect.

[0062] It can be understood that a plurality of identical multi-band filter assemblies 100 can also be glued together, thereby increasing the upper limit of the OD value of the multi-band filter assembly 100 and achieving a better filtering effect.

[0063] It can be understood that the substrate 110 in the multi-band filter assembly 100 can be a substrate 110 with uniform material.

[0064] Optionally, as Figure 4 shown, the second channel 112 is uniformly disposed on any straight line passing through the centroid of the cross-section of the substrate 110, and the first channels 111 are uniformly disposed around the second channel 112 on the substrate 110.

[0065] Optionally, as Figure 5 shown, the second channel 112 is disposed at the centroid of the cross-section of the substrate 110.

[0066] It can be understood that when the first channels 111 are uniformly disposed around the second channel 112 on the substrate 110, the plurality of first channels 111 can be uniformly disposed in a circular, rectangular, triangular or any shape on the substrate 110, which is not limited herein.

[0067] Optionally, as Figure 6 shown, the first channels 111 are symmetrically disposed on the substrate 110 with the centroid of the cross-section of the substrate 110 as the center of symmetry, and, the first channels 111 are uniformly disposed on at least one straight line passing through the centroid of the cross-section of the substrate 110, and the second channel 112 is uniformly disposed around the centroid of the cross-section of the substrate 110 on the substrate 110.

[0068] It can be understood that when the first channels 111 are symmetrically disposed on the substrate 110 with the centroid of the cross-section of the substrate 110 as the center of symmetry, and, the first channels 111 are uniformly disposed on at least one straight line passing through the centroid of the cross-section of the substrate 110, the plurality of first channels 111 can be uniformly disposed in an "H" shape, "Y" shape, "+" shape, "×" shape or any shape on the substrate 110, which is not limited herein.

[0069] The multi-band filter component 100 provided by the embodiment of the present application includes: a substrate 110, the substrate 110 includes a plurality of first channels 111 and at least one second channel 112, wherein the distance between any two adjacent first channels 111 is less than the distance between the second channel 112 and any one of the first channels 111, and / or the distance between any two adjacent first channels 111 is less than the distance between any two adjacent second channels 112. By restricting the positional relationship between the channels corresponding to the plurality of filters 120, the dynamic range of the multi-band filter component 100 is improved, thereby improving the dynamic range of the multi-spectral detection device 10.

[0070] Please refer to the foregoing embodiments in conjunction with Figure 7 , Figure 7 which is a schematic flow chart of a method for manufacturing a multi-band filter component 100 provided by an embodiment of the present application.

[0071] As Figure 7 shown, the method for manufacturing the multi-band filter component 100 includes steps S310 to S320.

[0072] Step S310: Provide a substrate 110, the substrate 110 includes a plurality of first channels 111 and at least one second channel 112, wherein the distance between any two adjacent first channels 111 is less than the distance between the second channel 112 and any one of the first channels 111, and / or the distance between any two adjacent first channels 111 is less than the distance between any two adjacent second channels 112.

[0073] In some embodiments, the basic processing parameters of the substrate 110 can be obtained. The basic processing parameters include at least one of the following: the number of first channels, the number of second channels, and the layout range of the first channels 111 and the second channels 112. According to the fact that the distance between any two adjacent first channels 111 is less than the distance between the second channel 112 and any one of the first channels 111, and / or the distance between any two adjacent first channels 111 is less than the distance between any two adjacent second channels 112 and the basic processing parameters, the processing position of the substrate 110 is determined, that is, the positions of the first channels 111 and the second channels 112 on the substrate 110.

[0074] In some embodiments, it is also possible to generate a channel layout pattern for a plurality of substrates 110 based on the fact that the distance between any two adjacent first channels 111 is less than the distance between the second channel 112 and any one of the first channels 111, and / or the distance between any two adjacent first channels 111 is less than the distance between any two adjacent second channels 112, as well as the basic processing parameters. It can be understood that the channel layout pattern of the substrate 110 includes the positions of the first channels 111 and the second channels 112 on the substrate 110. When a target channel layout pattern determination instruction is received, the processing position of the substrate 110 is determined according to the target channel layout pattern.

[0075] In some embodiments, the target channel layout pattern can also be stored in a channel layout pattern library. If the basic processing parameters of the substrate 110 are consistent with the basic processing parameters corresponding to the channel layout pattern in the channel layout pattern library, the corresponding channel layout pattern is directly obtained and the processing position of the substrate 110 is determined according to this channel layout pattern.

[0076] Optionally, the first channel 111 forms a first light passing hole 1111, and the second channel 112 forms a second light passing hole 1121; the first light passing hole 1111 and the second light passing hole 1121 penetrate through the substrate 110; a plurality of filter plates 120 are respectively arranged on the first light passing hole 1111 and the second light passing hole 1121, and the width of each filter plate 120 is greater than or equal to the width of the first light passing hole 1111 and the second light passing hole 1121.

[0077] Optionally, the first channel 111 forms a first groove 1112 at at least one end of the first light passing hole 1111, and the width of the first light passing hole 1111 is less than the width of the first groove 1112; the second channel 112 forms a second groove 1122 at at least one end of the second light passing hole 1121, and the width of the second light passing hole 1121 is less than the width of the second groove 1122; a plurality of filter plates 120 are respectively arranged on the first groove 1112 and the second groove 1122, and the width of each filter plate 120 is less than or equal to the first groove 1112, and the plurality of filter plates 120 are less than or equal to the width of the second groove 1122.

[0078] It can be understood that after determining the processing position of the substrate 110, that is, determining the positions of the first channels 111 and the second channels 112 on the substrate 110, the first light passing hole 1111 and the first groove 1112 can be processed for the first channels 111 according to the processing position of the substrate 110, and the second light passing hole 1121 and the second groove 1122 can be processed for the second channels 112.

[0079] Optionally, the method of processing the substrate 110 may include laser processing technology or precision machining technology, which is not limited herein.

[0080] Step S320: Provide a plurality of optical filters 120, and respectively dispose the plurality of optical filters 120 on the first channel 111 and the second channel 112. Among them, there are at least two optical filters 120 in the plurality of optical filters 120 that allow different wavelength ranges to pass through.

[0081] In some embodiments, cut the plurality of optical filters 120, and the plurality of optical filters 120 are respectively adapted to the first channel 111 and the second channel 112 of the substrate 110.

[0082] In some embodiments, provide a plurality of optical filters 120, respectively place the plurality of optical filters 120 in the first groove 1112 and the second groove 1122 of the substrate 110, and glue each optical filter 120 to the first groove 1112 and the second groove 1122 to obtain the multi-band optical filter assembly 100.

[0083] In some embodiments, the glued multi-band optical filter assembly 100 can also be encapsulated and cured.

[0084] The specific principle and implementation manner of the preparation method of the multi-band optical filter assembly 100 provided by the embodiments of the present application are similar to those of the multi-band optical filter assembly 100 in the foregoing embodiments, and will not be elaborated here.

[0085] The preparation method of the multi-band optical filter assembly 100 provided by the embodiments of the present application provides a substrate 110. The substrate 110 includes a plurality of first channels 111 and at least one second channel 112. Among them, the distance between any two adjacent first channels 111 is less than the distance between the second channel 112 and any one of the first channels 111, and / or the distance between any two adjacent first channels 111 is less than the distance between any two adjacent second channels 112; provide a plurality of optical filters 120, and respectively dispose the plurality of optical filters 120 on the first channel 111 and the second channel 112. Among them, there are at least two optical filters 120 in the plurality of optical filters 120 that allow different wavelength ranges to pass through. By restricting the positional relationship between the plurality of channels corresponding to the plurality of optical filters 120, the dynamic range of the multi-band optical filter assembly 100 is improved, thereby improving the dynamic range of the multi-spectral detection device 10.

[0086] Please refer to the foregoing embodiments in conjunction with Figure 8 , Figure 8 which is a schematic block diagram of a multi-spectral detection device 10 provided by the embodiments of the present application.

[0087] As Figure 8 shown, the multi-spectral detection device 10 includes the foregoing multi-band optical filter assembly 100 and a photoelectric conversion unit 200. Exemplarily, the photoelectric conversion unit 200 may include a CMOS sensor and a CCD sensor. It can be understood that the photoelectric conversion unit 200 includes a plurality of photodiodes.

[0088] In some embodiments, the multi-band filter assembly 100 is configured to limit the positions where light of different wavelengths is allowed to pass through, provide light of corresponding wavelengths for corresponding positions of the photoelectric conversion unit 200, and improve the dynamic range of the multi-band filter assembly 100 by restricting the positional relationship between multiple channels corresponding to multiple filters 120, thereby improving the dynamic range of the multi-spectral detection device 10, and avoiding the saturation overflow of the photodiodes corresponding to the positions of some filters 120 to the unsaturated photodiodes corresponding to the positions of other filters 120, which may cause signal distortion.

[0089] The specific principles and implementation manners of the multi-spectral detection device 10 provided in the embodiments of the present application are similar to those of the multi-band filter assembly 100 in the foregoing embodiments, and will not be elaborated herein.

[0090] It should be understood that the terms used herein in the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application.

[0091] The above are only specific implementation manners of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed in the present application can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should all be covered within the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A multi-band filter component, characterized in that, Comprising: A substrate, the substrate including a plurality of first channels and at least one second channel, wherein the distance between any two adjacent first channels is less than the distance between the second channel and any one of the first channels, and / or the distance between any two adjacent first channels is less than the distance between any two adjacent second channels; the second channel is uniformly arranged on any straight line passing through the center of gravity of the cross-section of the substrate, and the first channels are uniformly arranged around the second channel on the substrate; A plurality of filters, the plurality of filters being respectively arranged on the first channels and the second channel, wherein there are at least two filters among the plurality of filters that allow different wavelength ranges to pass through.

2. The multi-band filter component according to claim 1, characterized in that The first channels form first light passing holes, and the second channel forms a second light passing hole; The first light passing holes and the second light passing hole penetrate the substrate; The plurality of filters are respectively arranged on the first light passing holes and the second light passing hole, and the width of each filter is greater than or equal to the width of the first light passing holes and the second light passing hole.

3. The multi-band filter component according to claim 2, wherein The first channels are formed with first grooves at at least one end of the first light passing holes, and the width of the first light passing holes is less than the width of the first grooves; The second channel is formed with second grooves at at least one end of the second light passing hole, and the width of the second light passing hole is less than the width of the second grooves; The plurality of filters are respectively arranged on the first grooves and the second grooves, and the width of each filter is less than or equal to the width of the first grooves and the second grooves.

4. The multi-band filter component according to claim 1, characterized in that, The second channel is arranged at the center of gravity of the cross-section of the substrate.

5. The multi-band filter component according to any one of claims 1 to 3, characterized in that The first channels are symmetrically arranged on the substrate with the center of gravity of the cross-section of the substrate as the center of symmetry, and the first channels are uniformly arranged on at least one straight line passing through the center of gravity of the cross-section of the substrate, and the second channels are uniformly arranged around the center of gravity of the cross-section of the substrate on the substrate.

6. A preparation method of a multi-band filter component, characterized in that, The preparation method includes: Providing a substrate, the substrate including a plurality of first channels and at least one second channel, wherein the distance between any two adjacent first channels is less than the distance between the second channel and any one of the first channels, and / or the distance between any two adjacent first channels is less than the distance between any two adjacent second channels; the second channel is uniformly arranged on any straight line passing through the center of gravity of the cross-section of the substrate, and the first channels are uniformly arranged around the second channel on the substrate; Providing a plurality of filters, the plurality of filters being respectively arranged on the first channels and the second channel, wherein there are at least two filters among the plurality of filters that allow different wavelength ranges to pass through.

7. The preparation method of the multi-band filter component according to claim 6, wherein The first channels form first light passing holes, and the second channel forms a second light passing hole; The first light passing holes and the second light passing hole penetrate the substrate; The plurality of filters are respectively arranged on the first light passing holes and the second light passing hole, and the width of each filter is greater than or equal to the width of the first light passing holes and the second light passing hole.

8. The preparation method of the multi-band filter component according to claim 7, wherein, The first channel is formed with a first groove at at least one end of the first light passing hole, and the width of the first light passing hole is smaller than the width of the first groove; The second channel is formed with a second groove at at least one end of the second light passing hole, and the width of the second light passing hole is smaller than the width of the second groove; The plurality of filter films are respectively arranged on the first groove and the second groove, and the width of each filter film is smaller than or equal to the widths of the first groove and the second groove.

9. A multispectral detection device, characterized in that, Comprising: The multi-band filter assembly according to any one of claims 1 to 5; A photoelectric conversion unit, configured to output a corresponding signal when receiving the light passing through the multi-band filter assembly.

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